Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.
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Transcript of Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.
![Page 1: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/1.jpg)
Substitute beer and pizza?
![Page 2: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/2.jpg)
Basic Silicon Solar Cellas fabricated in Cameron
With
Schematic
![Page 3: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/3.jpg)
A detailed traveler is used to define the process steps
![Page 4: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/4.jpg)
The process begins with a silicon wafer, 100mm in diameter, (100) orientation,
PRIME grade, p-type boron doped, 1-10 ohm-cm resistivity
![Page 5: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/5.jpg)
The process begins with a silicon wafer, 100mm diameter, (100) orientation, PRIME grade, p-type boron doped, 1-10 ohm-cm
resistivity
Shown in cross section of wafer
![Page 6: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/6.jpg)
The wafer is cleaned using the sulfuric acid/hydrogen peroxide
clean
![Page 7: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/7.jpg)
Using PECVD (plasma enhanced chemical vapor deposition) the back side is coated
with SiO2 to prevent doping of the backside
![Page 8: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/8.jpg)
Using POCl3 as the source for phosphorus doping an n-region will be created in the p-
type silicon wafer
POCl3 bubbler – nitrogen is bubbled through the liquid POCl3 and carries phosphorus into the tube
![Page 9: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/9.jpg)
With the POCl3 running into the tube, phophorus is diffused into the silicon wafer
at 950C
![Page 10: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/10.jpg)
A n-region is now diffused into the silicon wafer at 950C
![Page 11: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/11.jpg)
A metal film (aluminum) is sputtered on the top surface and a photolithographic mask
creates a conductive grid in the metal
![Page 12: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/12.jpg)
A metal film (Aluminum) is sputtered on the top surface and a photolithographic mask
creates a conductive grid in the metal
![Page 13: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/13.jpg)
Positive photoresist is spun on the metal coated wafer
![Page 14: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/14.jpg)
A transparency mask of the top side grid is placed on top of the photoresist coated
wafer and exposed to UV
![Page 15: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/15.jpg)
The image is developed which leaves the metal conductor pattern
![Page 16: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/16.jpg)
With photoresist protecting the metal, the unprotected metal is etched away
leaving the top side grid pattern in metal
![Page 17: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/17.jpg)
A metal film is evaporated on the top surface and a photolithographic mask creates a
conductive grid in the metal
![Page 18: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/18.jpg)
A second metal film (aluminum) is deposited on the back for backside contact
![Page 19: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/19.jpg)
A second metal film is deposited on the back for backside contact
![Page 20: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/20.jpg)
Using PECVD (plasma enhanced chemical vapor deposition) an anti-reflective coating
of SiO2 is deposited on the top surface
![Page 21: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/21.jpg)
Using PECVD (plasma enhanced chemical vapor deposition) a anti-relective coating of
SiO2 is deposited on the top surface
![Page 22: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/22.jpg)
Individual cells are diamond saw cut from the wafer
![Page 23: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/23.jpg)
Individual cells are diamond saw cut from the wafer
![Page 24: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/24.jpg)
Electrical testing (I-V trace) of the cell is performed under a solar light simulator
Calibration cell determines the intensity of sunlight
![Page 25: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/25.jpg)
Electrical testing (I-V trace) of the cell is performed under a solar light simulator
![Page 26: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/26.jpg)
Electrical testing (I-V trace) of the cell is performed under a solar light simulator
Blue trace is without sun light, red trace is with sunlight at 1.0 sun
![Page 27: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/27.jpg)
Completed Solar Cell
![Page 28: Substitute beer and pizza?. Basic Silicon Solar Cell as fabricated in Cameron With Schematic.](https://reader036.fdocuments.us/reader036/viewer/2022070413/5697bfbb1a28abf838ca0ac1/html5/thumbnails/28.jpg)
Assignment
• Lecture 4 assignment from web site