SORB-AC Cartridge Pumps MK5 Series · SORBAC ® Cartridge Pumps MK5 Series SAES® Getters, the...

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Page 1: SORB-AC Cartridge Pumps MK5 Series · SORBAC ® Cartridge Pumps MK5 Series SAES® Getters, the world leader in Gettering Technology, presents the MK5 series of the SORBAC Cartridge

SORB-AC® Cartridge Pumps MK5 Series

w e s u p p o r t y o u r i n n o v a t i o n

Page 2: SORB-AC Cartridge Pumps MK5 Series · SORBAC ® Cartridge Pumps MK5 Series SAES® Getters, the world leader in Gettering Technology, presents the MK5 series of the SORBAC Cartridge

.

SORB-AC®

Cartridge Pumps

MK5 Series

General Features

� High pumping speed for all active gases

� Constant pumping speed in HV and UHVpressure region

� No low pressure limitation (down to 10-12 Torrregion)

� Reversible pumping of hydrogen and itsisotopes

� Possibility of operation at room temperatureafter activation, without power

� Operation in the presence of high magneticfields

� Oil free and vibration free ultra high vacuum

� Low weight

Applications

� Improving ultimate vacuum in combinationwith ion, diffusion, cryogenetic orturbomolecular pumps

� Surface analysis systems

� Particle accelerators, synchrotron radiationsources and related equipment

� Process pumps for vacuum devices

� Portable vacuum instrumentation

� Pumping, storing and releasing hydrogen isotopes

� Plasma machines

� Hydrogen traps

� Impurities removal in rare gas filled devices

HIGHLIGHTS

Cartridge

Pump Body

Heater

Thermocouple

Flange

Electrical Connector

Page 3: SORB-AC Cartridge Pumps MK5 Series · SORBAC ® Cartridge Pumps MK5 Series SAES® Getters, the world leader in Gettering Technology, presents the MK5 series of the SORBAC Cartridge

SORB�AC® Cartridge Pumps � MK5 Series

SAES® Getters, the world leader in Gettering Technology, presents the MK5 series of theSORB�AC Cartridge non evaporable getter pumps.These pumps are based on the well�known St 707 getter material, which achieves highsorption performances for all the active gases even after an activation at moderatetemperature.The MK5 series includes a new flange design1. Which makes the overall pump assemblymore simple and compact, with foot print and reliability advantages over the previous series.In particular, the flange includes an electrical connector which integrates both power andthermocouple pins. In this way the design gains in reliability adopting a thermocouplesolution, which does not need to be sheathed, and in operability since the connector isbakeable up to 400 °C. In addition the pump also gains in compactness since it gets rid of theprevious bulky electrical connector. The St 707 getter material used in the pump cartridge is provided as metal powdermechanically coated by cold compression onto a constantan strip folded to form the gettercartridge. St 707 provides high pumping performances for all active gases at the lowestactivation temperatures. Standard activation temperature is 450 °C, but full activation is alsoachievable at temperatures as low as 350 °C if maintained for a suitably long time. SORB�AC Cartridge pumps find wide use in a variety of applications, alone or in combinationwith traditional UHV pumps. They are particularly suitable to boost the vacuum performancesof general purpose vacuum systems, thanks to their high pumping speed for hydrogen andother active gases. In particular the SORB�AC Cartridge pumps exploit a high pumping speedfor hydrogen which does not decrease at UHV level, where other UHV pumps show poorperformance.Typical applications of SORB�AC Cartridge pumps are in the field of particle accelerators,synchrotron radiation sources and related equipment, surface analysis systems and otherR&D vacuum systems.

1. Not available for the GP 50 model.

Page 4: SORB-AC Cartridge Pumps MK5 Series · SORBAC ® Cartridge Pumps MK5 Series SAES® Getters, the world leader in Gettering Technology, presents the MK5 series of the SORBAC Cartridge

CartridgeThe cartridge is made by coating the getter alloy onto costantan strips, which are then pleatedin concertina fashion and formed into cylinders which make up the cartridge. For the SORB�AC MK5 cartridge pumps, only St 707 cartridges are available. A stainless steel separator is inserted in the cartridge to facilitate the correct positioning ofthe thermocouple.

Pump BodyThe optional pump body is a simple double flanged nipple. If desired, the pump can bemounted nude inside the vacuum system to fully exploit its pumping speed. The pump body can be supplied with a water�cooled jacket, but it should be noted thatwater cooling is not necessary for the pump to function efficiently. The pump body is leaktested to 1.5 x 10�10 sccm/s.

HeaterThe heater consists of a tantalum wire spiral�wound on an alumina element supported bya stainless steel rod. The heater assembly also includes the cartridge and the thermocouple�positioning(stainless steel tube) and securing components.

ThermocoupleThe thermocouple is a K�type, electrically insulated within an alumina tube.The thermocouple is assembled to the support flange. It is connected to the thermocouple pins of the connector with compensated contactterminations.

FlangeThe support flange is a standard CF type flange in which one Special Connector equippedwith six conductors for electrical� and thermocouple�connections is TIG welded. The pumpflange is leak tested to 1.5 x 10�10 sccm/s.

Electrical ConnectorThe Special Connector allows the connection of the pump to the power supply and controlunit. The connector is bakeable up to 400°C.

Page 5: SORB-AC Cartridge Pumps MK5 Series · SORBAC ® Cartridge Pumps MK5 Series SAES® Getters, the world leader in Gettering Technology, presents the MK5 series of the SORBAC Cartridge

The SAES Getters Group manufacturing companies are ISO9001 certified, the Asian and Italian companies are

ISO14001certified also. Full information about certifications for each company of the Group is available on the corporate

website at: www.saesgetters.com

© 2011 SAES Getters. Printed in Italy. All rights reserved. SAES® is a registered trademark of SAES Getters S.p.A., its subsidiaries and affiliates.SAES Getters reserves the right to change or modify product specifications at any time without notice.

SAES Getters S.p.A., Capital Stock Euro 12,220,000 f.p., Executive Office: Viale Italia, 77 � 20020 Lainate (Milan), ItalyRegistered with the Milan Court CompaniesRegister no. 00774910152

SAES Getters Group

[email protected]

B.V

S.0

3.2

Lainate, Italy - Avezzano, Italy - Bologna, Italy - Truchtlingen, Germany - Weil am Rhein, Germany - Nanjing, P.R. of China

- Shanghai, P.R. of China - Tokyo, Japan - Seoul, Korea - Jhubei City, Taiwan - Colorado Springs CO, USA - San Luis Obispo

CA, USA - Watsonville CA, USA - New Hartford NY, USA - Bethel CT, USA - Menlo Park CA, USA

Page 6: SORB-AC Cartridge Pumps MK5 Series · SORBAC ® Cartridge Pumps MK5 Series SAES® Getters, the world leader in Gettering Technology, presents the MK5 series of the SORBAC Cartridge

W e s u p p o r t y o u r i n n o v a t i o n

HIGHLIGHTS

GP 50

The GP 50 pump still maintains its original configuration with the twocopper current feedthrough protruding out of the base flange. It usesboth St 707 and St 101 getter cartridges mounted on a heater structurebased on a single heater element, and is available on CF35 (2 3/4”)flange. The pumping speed curves and the activation curves are shownin the enclosed graphs.

GP 50 2F

Ordering Information

Base Flange with Heater

Base Flange with Heater and Water Cooled Body

St 101 Getter Cartridge on Iron Substrate

St 101 Getter Cartridge on Constantan Substrate

St 707 Getter Cartridge on Constantan Substrate

4H0305

4H0295

4H0030

4H0065

4H0205

GP 50 2F

GP 50 W2F

C 50-St101

C 50-St101AM

C 50-St707

General features

High pumping speed for all active gases

Constant pumping speed in

HV and UHV pressure region

No low pressure limitation

(down to 10-12 Torr region)

Reversible pumping of hydrogen

and its isotopes

Possibility of operation at room

temperature after activation, without

power

Operation in the presence of high

magnetic fields

Oil free and vibration free ultra high

vacuum

Low weight

Applications

Improving ultimate vacuum in

combination with ion, diffusion,

cryogenetic or turbomolecular pumps

Surface analysis systems

Particle accelerators, synchrotron

radiation sources and related

equipment

Process pumps for vacuum devices

Portable vacuum instrumentation

Pumping, storing and releasing

hydrogen isotopes

Plasma machines

Hydrogen traps

Impurities removal in rare gas filled

devices

ø 70

10

Dimensions in mm

172

186

Page 7: SORB-AC Cartridge Pumps MK5 Series · SORBAC ® Cartridge Pumps MK5 Series SAES® Getters, the world leader in Gettering Technology, presents the MK5 series of the SORBAC Cartridge

2001 ©SAES Getters. Printed in Italy. All rights reserved. Sorb-Ac® is a trademark of SAES Getters.SAES Getters reserves the right to change or modify product specifications at any time without notice.

Lainate (Italy)

Avezzano (Italy)

Köln (Germany)

Moscow (Russia)

Paris (France)

Daventry (UK)

Nanjing (China)

Shanghai (China)

Tokyo (Japan)

Seoul (Korea)

Chin Chon (Korea)

Singapore

Hsin Chu (Taiwan)

Cleveland OH (USA)

Colorado Springs CO (USA)

San Luis Obispo CA (USA)

Sparks MD (USA)

D.VS.03.02

SAES Getters S.p.A.Group Headquarters:Viale Italia,7720020 Lainate (Milano), ItalyTel.: + 39 02 931 78 1Fax: + 39 02 931 78 320

www.saesgetters.com

SAES AdvancedTechnologies S.p.A.Nucleo Industriale:Via Diesel,167051 Avezzano (AQ), ItalyTel.: + 39 0863 495 1Fax: + 39 0863 267 43

Typical Pump Characteristics

Note: Pumping speed data refer to the initial values of the pump without thepump body. CO capacity based on speed below 10 l/s.

Alloy Type

Getter Alloy Mass (g)

Getter Surface (cm2)

PumpingSpeed (I/s)

SorptionCapacity(Torr I)

H2

CO

H2

CO

St 101

24

830

210

110

240

St 707

32

830

200

100

320

CO Total

CO Room Temperature 0,55

215

0,55

290

Conversion Tablesought

Pa mbar Torr

1 Pa

1 mbar

1 Torr

1 10-2 750.06x 10-5

102 1 0.75006

133.322 1.333 1

given

Pu

mp

ing

Sp

eed

(I/s

)

GP50 2F St707

1

10

100

1000

0,001 0,01 0,1 1 10 100

Sorbed Quantity (Torr. l)nude with water cooled body

Sorption temperature: 25 °C Activation: 450 °C x 45' Sorption pressure: 3e-6 Torr

H2

COVo

ltag

e (V

)

Cu

rren

t (A

)

GP50 W2F

Temperature (°C)

Voltage (V) Current (A)

0

5

10

15

20

25

30

35

40

45

50

50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800

0

0,5

1

1,5

2

2,5

3

3,5

4

4,5

5

Page 8: SORB-AC Cartridge Pumps MK5 Series · SORBAC ® Cartridge Pumps MK5 Series SAES® Getters, the world leader in Gettering Technology, presents the MK5 series of the SORBAC Cartridge

W e s u p p o r t y o u r i n n o v a t i o n

HIGHLIGHTS

GP 100 MK5

The GP 100 MK5 pump uses an St 707 getter cartridge mounted on aheater structure based on a single heater element, and is available onCF63 (4 1/2”) flange.The flange is conveniently supplied with a custom-made, bakeableelectrical connector which combines power and thermocouple pins, forbest integration and minimum footprint.The pump sorption speed is at its maximum when mounted directly inthe vacuum system without a body.The pumping speed curves and the activation curves are shown in theenclosed graphs.

GP 100 MK5

Ordering Information

Base Flange with Connector and Heater

Base Flange with Connector, Heater and Body

Base Flange with Connector, Heater andWater Cooled Body

St 707 Getter Cartridge on Constantan Substrate

4H0273

4H0450

4H0451

4H0250

GP 100 MK5

GP 100 MK5 B

GP 100 MK5 W

C 100-MK5 St707

ø 114

218

163

ø 46

ø 60

getterssaes

33

General features

High pumping speed for all active gases

Constant pumping speed in

HV and UHV pressure region

No low pressure limitation

(down to 10-12 Torr region)

Reversible pumping of hydrogen

and its isotopes

Possibility of operation at room

temperature after activation, without

power

Operation in the presence of high

magnetic fields

Oil free and vibration free ultra high

vacuum

Low weight

Applications

Improving ultimate vacuum in

combination with ion, diffusion,

cryogenetic or turbomolecular pumps

Surface analysis systems

Particle accelerators, synchrotron

radiation sources and related

equipment

Process pumps for vacuum devices

Portable vacuum instrumentation

Pumping, storing and releasing

hydrogen isotopes

Plasma machines

Hydrogen traps

Impurities removal in rare gas filled

devices

Dimensions in mm

Page 9: SORB-AC Cartridge Pumps MK5 Series · SORBAC ® Cartridge Pumps MK5 Series SAES® Getters, the world leader in Gettering Technology, presents the MK5 series of the SORBAC Cartridge

2001 ©SAES Getters. Printed in Italy. All rights reserved. Sorb-Ac® is a trademark of SAES Getters.SAES Getters reserves the right to change or modify product specifications at any time without notice.

Lainate (Italy)

Avezzano (Italy)

Köln (Germany)

Moscow (Russia)

Paris (France)

Daventry (UK)

Nanjing (China)

Shanghai (China)

Tokyo (Japan)

Seoul (Korea)

Chin Chon (Korea)

Singapore

Hsin Chu (Taiwan)

Cleveland OH (USA)

Colorado Springs CO (USA)

San Luis Obispo CA (USA)

Sparks MD (USA)

D.VS.03.02

SAES Getters S.p.A.Group Headquarters:Viale Italia,7720020 Lainate (Milano), ItalyTel.: + 39 02 931 78 1Fax: + 39 02 931 78 320

www.saesgetters.com

SAES AdvancedTechnologies S.p.A.Nucleo Industriale:Via Diesel,167051 Avezzano (AQ), ItalyTel.: + 39 0863 495 1Fax: + 39 0863 267 43

Typical Pump Characteristics

PumpingSpeed (I/s)

Alloy Type St 707

Getter Alloy Mass (g) 100

Getter Surface (cm2) 2600

H2 600

CO 300

H2 1000

CO Room Temperature 2.1

CO Total 900

SorptionCapacity(Torr I)

Note: Pumping speed data refer to the initial values of the pumpwithout the pump body. CO capacity based on speed below 30 l/s.

Conversion Tablesought

Pa mbar Torr

1 Pa

1 mbar

1 Torr

1 10-2 750.06x 10-5

102 1 0.75006

133.322 1.333 1

given

Pu

mp

ing

Sp

eed

(I/s

)

GP100 MK5 St 707

1

10

100

1000

0,001 0,01 0,1 1 10

H2

CO

Sorbed Quantity (Torr. l)nude with body

Sorption temperature: 25 °C Activation: 450 °C x 45' Sorption pressure: 3e-6 Torr

Volt

age

(V)

Cu

rren

t (A

)

GP100 MK5 (nude)

Temperature (°C)

Voltage (V) Current (A)

0

5

10

15

20

25

30

35

40

45

50

50 100 150 200 250 300 350 400 450 500 5500

0,5

1

1,5

2

2,5

3

3,5

4

4,5

5

Page 10: SORB-AC Cartridge Pumps MK5 Series · SORBAC ® Cartridge Pumps MK5 Series SAES® Getters, the world leader in Gettering Technology, presents the MK5 series of the SORBAC Cartridge

W e s u p p o r t y o u r i n n o v a t i o n

HIGHLIGHTS

GP 200 MK5

The GP 200 MK5 pump uses a St 707 getter cartridge mounted on aheater structure based on a single heater element, and is available onCF100 (6”) flange.The flange is conveniently supplied with a custom-made, bakeableelectrical connector which combines power and thermocouple pins, forbest integration and minimum footprint.The pump sorption speed is at its maximum when mounted directly inthe vacuum system without a jacket.The pumping speed curves and the activation curves are shown in theenclosed graphs.

GP 200 MK5

ø 63

33

211

157

ø 152

saesgetters

Ordering Information

Base Flange with Connector and Heater

Base Flange with Connector, Heater and Body

Base Flange with Connector, Heater andWater Cooled Body

St 707 Getter Cartridge on Constantan Substrate

4H0236

4H0452

4H0453

4H0249

GP 200 MK5

GP 200 MK5 B

GP 200 MK5 W

C 200-MK5 St707

General features

High pumping speed for all active gases

Constant pumping speed in

HV and UHV pressure region

No low pressure limitation

(down to 10-12 Torr region)

Reversible pumping of hydrogen

and its isotopes

Possibility of operation at room

temperature after activation, without

power

Operation in the presence of high

magnetic fields

Oil free and vibration free ultra high

vacuum

Low weight

Applications

Improving ultimate vacuum in

combination with ion, diffusion,

cryogenetic or turbomolecular pumps

Surface analysis systems

Particle accelerators, synchrotron

radiation sources and related

equipment

Process pumps for vacuum devices

Portable vacuum instrumentation

Pumping, storing and releasing

hydrogen isotopes

Plasma machines

Hydrogen traps

Impurities removal in rare gas filled

devices

Dimensions in mm

Page 11: SORB-AC Cartridge Pumps MK5 Series · SORBAC ® Cartridge Pumps MK5 Series SAES® Getters, the world leader in Gettering Technology, presents the MK5 series of the SORBAC Cartridge

2001 ©SAES Getters. Printed in Italy. All rights reserved. Sorb-Ac® is a trademark of SAES Getters.SAES Getters reserves the right to change or modify product specifications at any time without notice.

Lainate (Italy)

Avezzano (Italy)

Köln (Germany)

Moscow (Russia)

Paris (France)

Daventry (UK)

Nanjing (China)

Shanghai (China)

Tokyo (Japan)

Seoul (Korea)

Chin Chon (Korea)

Singapore

Hsin Chu (Taiwan)

Cleveland OH (USA)

Colorado Springs CO (USA)

San Luis Obispo CA (USA)

Sparks MD (USA)

D.VS.03.02

SAES Getters S.p.A.Group Headquarters:Viale Italia,7720020 Lainate (Milano), ItalyTel.: + 39 02 931 78 1Fax: + 39 02 931 78 320

www.saesgetters.com

SAES AdvancedTechnologies S.p.A.Nucleo Industriale:Via Diesel,167051 Avezzano (AQ), ItalyTel.: + 39 0863 495 1Fax: + 39 0863 267 43

Typical Pump Characteristics

PumpingSpeed (I/s)

Alloy Type St 707

Getter Alloy Mass (g) 170

Getter Surface (cm2) 4470

H2 900

CO 350

H2 Room Temperature 1700

CO Room Temperature 4.5

CO Total 1530

SorptionCapacity(Torr I)

Note: Pumping speed data refer to the initial values of the pumpwithout the pump body. CO capacity based on speed below 50 l/s.

Conversion Tablesought

Pa mbar Torr

1 Pa

1 mbar

1 Torr

1 10-2 750.06x 10-5

102 1 0.75006

133.322 1.333 1

given

GP200 MK5 St 707

1

10

100

1000

0,001 0,01 0,1 1 10 100

Pu

mp

ing

Sp

eed

(I/s

)

Sorbed Quantity (Torr. l)nude with body

Sorption temperature: 25 °C Activation: 450 °C x 45' Sorption pressure: 3e-6 Torr

H2

CO

Volt

age

(V)

Cu

rren

t (A

)

GP200 MK5 (nude)

Temperature (°C)

Voltage (V) Current (A)

0

10

20

30

40

50

60

70

50 100 150 200 250 300 350 400 450 500 5501

1,5

2

2,5

3

3,5

4

4,5

Page 12: SORB-AC Cartridge Pumps MK5 Series · SORBAC ® Cartridge Pumps MK5 Series SAES® Getters, the world leader in Gettering Technology, presents the MK5 series of the SORBAC Cartridge

W e s u p p o r t y o u r i n n o v a t i o n

HIGHLIGHTS

GP 500 MK5

The GP 500 MK5 pump uses a St 707 getter cartridge mounted on aheater structure based on three heater elements, and is available onCF150 (8”) flange.The flange is conveniently supplied with a custom-made, bakeableelectrical connector which combines power and thermocouple pins, forbest integration and minimum footprint.The pump sorption speed is at its maximum when mounted directly inthe vacuum system without a jacket.The pumping speed curves and the activation curves are shown in theenclosed graphs.

GP 500 MK5

Ordering Information

Base Flange with Connector and Heater

Base Flange with Connector, Heater and Body

Base Flange with Connector, Heater andWater Cooled Body

St 707 Getter Cartridge on Constantan Substrate

4H0243

4H0454

4H0455

4H0248

GP 500 MK5

GP 500 MK5 B

GP 500 MK5 W

C 500-MK5 St707

ø 202

33

saesgetters

243

ø 98

188

General features

High pumping speed for all active gases

Constant pumping speed in

HV and UHV pressure region

No low pressure limitation

(down to 10-12 Torr region)

Reversible pumping of hydrogen

and its isotopes

Possibility of operation at room

temperature after activation, without

power

Operation in the presence of high

magnetic fields

Oil free and vibration free ultra high

vacuum

Low weight

Applications

Improving ultimate vacuum in

combination with ion, diffusion,

cryogenetic or turbomolecular pumps

Surface analysis systems

Particle accelerators, synchrotron

radiation sources and related

equipment

Process pumps for vacuum devices

Portable vacuum instrumentation

Pumping, storing and releasing

hydrogen isotopes

Plasma machines

Hydrogen traps

Impurities removal in rare gas filled

devices

Dimensions in mm

Page 13: SORB-AC Cartridge Pumps MK5 Series · SORBAC ® Cartridge Pumps MK5 Series SAES® Getters, the world leader in Gettering Technology, presents the MK5 series of the SORBAC Cartridge

2001 ©SAES Getters. Printed in Italy. All rights reserved. Sorb-Ac® is a trademark of SAES Getters.SAES Getters reserves the right to change or modify product specifications at any time without notice.

Lainate (Italy)

Avezzano (Italy)

Köln (Germany)

Moscow (Russia)

Paris (France)

Daventry (UK)

Nanjing (China)

Shanghai (China)

Tokyo (Japan)

Seoul (Korea)

Chin Chon (Korea)

Singapore

Hsin Chu (Taiwan)

Cleveland OH (USA)

Colorado Springs CO (USA)

San Luis Obispo CA (USA)

Sparks MD (USA)

D.VS.03.02

SAES Getters S.p.A.Group Headquarters:Viale Italia,7720020 Lainate (Milano), ItalyTel.: + 39 02 931 78 1Fax: + 39 02 931 78 320

www.saesgetters.com

SAES AdvancedTechnologies S.p.A.Nucleo Industriale:Via Diesel,167051 Avezzano (AQ), ItalyTel.: + 39 0863 495 1Fax: + 39 0863 267 43

Typical Pump Characteristics

PumpingSpeed (I/s)

Alloy Type St 707

Getter Alloy Mass (g) 540

Getter Surface (cm2) 14290

H2 1900

CO 650

H2 Room Temperature 5400

CO Room Temperature 10

CO Total 4860

SorptionCapacity(Torr I)

Note: Pumping speed data refer to the initial values of the pumpwithout the pump body. CO capacity based on speed below 100 l/s.

Conversion Tablesought

Pa mbar Torr

1 Pa

1 mbar

1 Torr

1 10-2 750.06x 10-5

102 1 0.75006

133.322 1.333 1

given

GP500 MK5 St 707

1

10

100

1000

10000

0,01 0,1 1 10 100

Sorbed Quantity (Torr. l)nude with body

Pu

mp

ing

Sp

eed

(I/s

)

H2

CO

Sorption temperature: 25 °C Activation: 450 °C x 45' Sorption pressure: 3e-6 Torr

Volt

age

(V)

Cu

rren

t (A

)

GP500 MK5 (nude)

Temperature (°C)

Voltage (V) Current (A)

0

10

20

30

40

50

60

70

80

90

50 100 150 200 250 300 350 400 450 500 550 6003

4

5

6

7

8

9

10

11

12

Page 14: SORB-AC Cartridge Pumps MK5 Series · SORBAC ® Cartridge Pumps MK5 Series SAES® Getters, the world leader in Gettering Technology, presents the MK5 series of the SORBAC Cartridge
Page 15: SORB-AC Cartridge Pumps MK5 Series · SORBAC ® Cartridge Pumps MK5 Series SAES® Getters, the world leader in Gettering Technology, presents the MK5 series of the SORBAC Cartridge