Solid Diffusion of Metal

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    THE WAY TOSOMEWHERE

    1

    Sub-topics

    DiffusionDiffusion processes in industry

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    NON+SPONTANEOS PROCESSES

    State 1

    State 2

    Q=activation energy

    Involves reduction in energy

    Or

    Energy change is negative

    1.2.

    -or proess to be started,t"e atoms s"ould "a!esuffiient ener#y too!erome an 'cti#'tion

    ener%y barrier(

    )

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    DI--SION

    As T of t"e system is inreased, more and more moleules .ill attain t"eati!ation ener#y le!el(

    In statistial me"anis, M'*ell+,olt&'nn st'tistics desribes t"edistribution of material partileso!er !arious ener#y states and

    probabilities to find a partile indefinite state/

    Probability 0 ep(-E/RT)

    R Boltzman constant = 1.38

    x10 -23 J/atom K .

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    12AT IS DI--SION3

    /

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    SEL-+DI--SION

    A

    B

    C

    DA

    B

    C

    D

    t

    0

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    4ACANC5 OR S6STITTIONAL DI--SION1"y, in #eneral, ist"e ati!ation ener#yfor self diffusion "i#"erfor materials of "i#"meltin# point3

    7 Atoms mo!e into t"e!aanies plaes(7 8ore !aanies arereated at "i#"ertemperature(

    7 Diffusion rate is "i#"erat "i#" temperatures(

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    2O1 -AST DOES DI--SION OCCR3

    Concentration

    of Cu [kg/m3]

    Concentration

    of Ni [kg/m3]

    Position, x

    Cu flux Ni flux

    Concentration Profile, C(x) [kg/m3]

    !x = D

    "C

    "x

    Diffusion coefficient [m#/s]

    concentration

    gra"ient [kg/m$]

    flux in x%"ir&[kg/m#%s]

    3

    T"e rate at ."i" atoms, ions, partilesor ot"er speies diffuse in a material

    T"e flu' is defined as t"e number ofatoms passin# t"rou#" a plane of unitarea per unit time

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    STEAD5+STATE DI--SIONo Diffusion is a time dependent proess and t"e rate of mass transfer ist"e diffusion flu "4$5

    o In a steady+state ondition t"e onentration #radient is onstant(

    Fic67s First l'*8

    Net flo. of atomsPer unit area pernit time ; RADIENT

    1)

    T"e onentration #radient s"o.s "o.t"e omposition of t"e material !aries.it" distane/c

    is t"e differene in onentrationo!er t"e distane x

    G#mFG#m s

    atomsm s

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    PRO6LE8 + SE8ICONDCTOR DOPIN>One .ay to manufature transistors, ."i" amplifyeletrial si#nals, is to diffuse impurity atoms into a

    semiondutor material su" as silion $Si&( Problem/ Suppose a silion .afer @(B m t"i:, ."i"

    ori#inally ontains one p"osp"orus atom for e!ery B@million Si atoms, is treated so t"at t"ere are H@@ P+atoms for e!ery B@ million Si atoms(

    Calulate t"e onentration #radient $a& in atomiperentm and $b& in atoms$mF ' m&

    1.

    T"e lattieparameter ofsilion is (HF@? A(

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    DI--SI4IT5Diffusi#ity depends on

    9 Type of diffusion / 1"et"er t"e diffusion isinterstitial or substitutional(9 Temperature/ As t"e temperature inreasesdiffusi!ity inreases(9 Type of rystal struture/ 6CC rystal "as lo.erAP- t"an -CC and "ene "as "i#"er diffusi!ity(9 Type of rystal imperfetion/ 8ore open strutures

    $#rain boundaries& inreases diffusion(9 T"e onentration of diffusin# speies/ 2i#"eronentrations of diffusin# solute atoms .ill affetdiffusi!ity( 1/

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    DI--SION COE--ICIENT

    10

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    E--ECT O- TE8PERATRE ON DI--SION

    Temperature "as a most profound influeneon t"e oeffiients and diffusion rates(

    A lar#e ati!ation ener#y results in a relati!ely small diffusion oeffiient(

    1

    1"en t"e temperature inreases, t"e diffusion oeffiient D inreasesand, t"erefore, t"e flu' of atoms inreases as .ell(At "i#"er temperatures, t"e t"ermal ener#y supplied to t"e diffusin#atoms permits t"e atoms to o!erome t"e ati!ation ener#y barrier andmore easily mo!e to ne. sites in t"e atomi arran#ements(At lo. temperaturesoften belo. about @(H times t"e absolute

    meltin# temperaturediffusion is !ery slo. and may not be si#nifiant(

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    I8PRIT5 DI--SION INTO SILICON 1A-ER

    Impurities are made to diffuseinto silion .afer to "an#e its

    electric'l c;'r'cteristics57 sed in inte#rated iruits(7 Silion .afer is e'posed to!apour of impurity at BB@@C in

    a %uartz tube furnae(7 T"e onentration ofimpurity at any point depends

    on dept" and time of e'posure(

    Do'ing ilicon it* P

    silicon

    +& De'osit P ric*

    laers on surface&

    #& -eat it&

    3& .esult Do'e"

    semicon"uctor

    regions&

    silicon 12

    t"e ati!ationener#ies in ionimaterials are "i#"and t"e rates of

    diffusion are lo. SiO2

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    DESI>N PRO6LE8/ INTE>RATED CIRCITINTERCONNECTS

    Top layers t"at ser!e as t"e .irefor t"is de!ie $interonnet&(Diffusion+layer doped silion t"at"a!e been oated .it" aninterlayer dieletri(

    1"at material an be usedfor interonnets3

    13

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    DESI>N O- AN IRON 8E86RANE

    A ylinder F m in diameterand B@ m lon# ontains a #as

    t"at inludes @( 'B@@

    N atomsper mF and @( 'B@@ 2 atomsper mF on one side of an ironmembrane(>as is ontinuously introdued to t"e pipe to assure a onstant

    onentration of nitro#en and "ydro#en(T"e #as on t"e ot"er side of t"e membrane inludes a onstant B

    B@B N atoms per mF and B ' B@B 2 atoms per mF(T"e entire system is to operate at ?@@ C $at t"is T iron "as t"e 6CC

    struture&( Desi#n an iron membrane t"at .ill allo. no more t"an BJ of t"enitro#en to be lost t"rou#" t"e membrane ea" "our,

    ."ile allo.in# K@J of t"e "ydro#en to pass t"rou#" t"e membraneper "our( (:

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    T5PES O- DI--SION

    In #olu&e diffusion< t"e atoms mo!e t"rou#" t"e rystalfrom one re#ular or interstitial site to anot"er( 6eause oft"e surroundin# atoms, t"e ati!ation ener#y is lar#e andt"e rate of diffusion is relati!ely slo.(

    Atoms an also diffuse alon# boundaries, interfaes, and

    surfaes in t"e material( Atoms diffuse easily by %r'inbound'ry diffusion< beause t"e atom pa:in# isdisordered and less dense in t"e #rain boundaries(6eause atoms an more easily s%ueeze t"eir .ay t"rou#"

    t"e #rain boundary, t"e ati!ation ener#y is lo.( Surf'ce diffusion is easier still beause t"ere is e!en less

    onstraint on t"e diffusin# atoms at t"e surfae((1

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    TN>STEN +T2ORI8 DI--SION COPLE Consider a diffusion ouple bet.een pure tun#sten

    and a tun#sten alloy ontainin# B atJ t"orium(

    After se!eral minutes of e'posure at @@@C, atransition zone of @(@B m t"i:ness is establis"ed( 1"at is t"e flu' of t"orium atoms at t"is time if

    diffusion is due to $a& !olume diffusion, $b& #rain boundary diffusion, and $& surfae diffusion3

    ((

    T"e lattie parameter of6CC tun#sten is F(BM (

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    NONSTEAD5+STATE DI--SION

    Fic67s Second ='*

    >oncentr'tion of solute 'to&s 't 'ny point in &et'l c;'n%es *it;ti&e in t;is c'se5

    Fic6s second l'*8

    R'te of co&position'l c;'n%e is e?u'l to

    diffusi#ity ti&es t;e r'te of c;'n%e ofconcentr'tion %r'dient5

    C"an#e of onentration of solute atoms .it" "an#e in time in different planes

    ()

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    Co''er "iffuses into a ar of aluminum&

    +0

    're%existing conc&, Coof co''er atoms

    urface conc&,Csof Cu atoms

    ar

    Co

    Cs

    'osition, x

    C(x,t)

    tot+

    t#t3

    NON+STEAD5 STATE DI--SION

    (.

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    SOLTIONOne pratially important solution is for a semi+infinite solid in ."i" t"esurfae onentration is "eld onstant(-re%uently, t"e soure of t"e diffusin# speies is a #as p"ase, t"e partialpressure of ."i" is maintained at a onstant !alue(

    -urt"ermore, t"e follo.in# assumptions are made/B(6efore diffusion, any of t"e diffusin# soluteatoms in t"e solid are uniformly distributed .it"onentration of C0.

    ( xat t"e surfae is zero and inreases .it"distane into t"e solid(F( T"e time is ta:en to be zero beforet"e diffusion proess be#ins(

    (/

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    F@>7S SE>OBD =AW+ SO=CT@OB

    (0

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    TA6LATION O- ERROR -NCTION 4ALES

    (

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    CAR6RIIN>

    =o*

    c'rbon

    Steel p'rt

    Diffusin% c'rbon

    'to&s

    >'rbon r'dients

    @n >'rburied &et'ls

    7 Result/++"ard to deform/ C atomslo: planes from s"earin#(

    ++"ard to ra:/ C atoms putt"e surfae in ompression( (2

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    E--ECT O- TE8PERATRE ON DI--SION+

    EA8PLE@f diffusi#ity 't t*o te&per'tures 're deter&ined< t*o

    e?u'tions c'n be sol#ed for 'nd D:

    ):

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    DI--SI4IT5DATA -OR SO8E 8ETALS

    )(

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    PRO6LE8

    / TI8E -OR DI--SION

    ))

    >'rburiin%8 t"e steel piee is e'posed, at an ele!ated temperature, to anatmosp"ere ri" in a "ydroarbon #as, su" as met"ane $C2H &(

    Consider an alloy t"at initially "as a uniform arbon onentration

    of @( .tJ and is to be treated at K@ C( If t"e onentration of arbon att"e surfae is suddenly brou#"t to and maintained at B(@ .tJ,"o. lon# .ill it ta:e to a"ie!e a arbon ontent of @(@ .tJ at a position@( mm belo. t"e surfae3

    T"e diffusion oeffiient for arbon in iron at t"is temperature is B(M ' B@+BB

    ms(

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    DESI>N PRO6LE8T"e .ear resistane of a steel #ear is to be impro!ed by "ardenin# itssurfae( T"is is to be aomplis"ed by inreasin# t"e arbon ontent.it"in an outer surfae layer as a result of c'rbon diffusion into t"esteel t"e arbon is to be supplied from an e'ternal arbon+ri" #aseousatmosp"ere at an ele!ated and onstant temperature(

    T"e initial arbon ontent of t"e steel is @(@ .tJ, ."ereas t"e surfaeonentration is to be maintained at B(@@ .tJ( In order for t"is treatmentto be effeti!e, a arbon ontent of @(M@ .tJ must be establis"ed at aposition @(? mm belo. t"e surfae(Speify an appropriate "eat treatment in terms of temperature and time

    for temperatures bet.een K@@C and B@@ C( se data in Table for t"ediffusion of arbon in +iron( T"e #as onst ; (FB

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    DESI>N O- A 8ORE ECONO8ICAL 2EATTREAT8ENT

    )/

    B@ " are re%uired to suessfully arburize a bat" of @@ steel#ears at K@@C, ."ere t"e iron "as t"e -CC struture(

    1e find t"at it osts UB@@@ per "our to operate t"e arburizin#furnae at K@@C and UB@@ per "our to operate t"e furnae atB@@@C(Is it eonomial to inrease t"e arburizin# temperature toB@@@C31"at ot"er fators must be onsidered3

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    #1

    Diffusion FASTER for555

    7 open rystal strutures

    7 lo.er meltin# T materials

    7 materials .seondarybondin#

    7 smaller diffusin# atoms

    7 lo.er density materials

    Diffusion S=OWER for(((

    7 lose+pa:ed strutures

    7 "i#"er meltin# T materials

    7 materials .o!alentbondin#

    7 lar#er diffusin# atoms

    7 "i#"er density materials

    S88AR5/

    STRCTRE V DI--SION

    )0