Silicon DeliveryTM Systems For More Information and Services · CRYSTALPAK® 300 The Crystalpak®...
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CRYSTALPAK® 300 The Crystalpak® 300 wafer shipping box and integrated 13 capacity cassette provide clean and secure 300 mm wafer transport, optimum automation performance and the highest overall output for your facility
Transcript of Silicon DeliveryTM Systems For More Information and Services · CRYSTALPAK® 300 The Crystalpak®...
CRYSTALPAK® 300
The Crystalpak® 300 wafer shipping box and integrated 13 capacity cassette provide clean and secure 300 mm
wafer transport, optimum automation performance and the highest overall output for your facility
Silicon DeliveryTM Systemsand ServicesTo optimize wafer and device handling in your facilities, Entegris offersSilicon DeliveryTM Systemsand Services – our unique materials integrity managementsolution to cost-effectively manage silicon from production to consumption.
Wafer Handling Systems• Raw wafer processing and shipping
• Wafer processing
• Finished wafer shipping and handling
• Related product handling
• Handling product cleaning systems
Device Handling Systems• Finished wafer shipping and handling
• Bare die shipping and handling
• Packaged device shipping and handling
• Handling product cleaning systems
WaferCareSM and DeviceCareSM Services• Certified reuse and recycle
• Product cleaning
• Logistics management
• On-site and off-site programs
• Cleaning systems
For More InformationTo find out more about what Entegris can do for you, please call one of our Regional Customer Service Centers today.
Entegris Regional Customer Service CentersTelephone Fax
North America 952-556-4181 952-556-8022
North America Toll Free 800-394-4083 800-763-5820
Europe 49-7264-9158-0 49-7264-9158-927
Japan 81-3-5769-7800 81-3-5769-7845
Malaysia 604-403-1266 604-403-1262
Korea 82-31-738-1181 82-31-738-1191
Taiwan 886-3-5633598 886-3-5633521886-3-5633552
Terms and Conditions of SaleAll purchases are subject to Entegris’ “Terms andConditions of Sale.”
EntegrisTM and Silicon DeliveryTM are trademarks of Entegris, Inc.WaferCareSM and DeviceCareSM are service marks of Entegris, Inc. Crystalpak® is a registered trademark of EMPAK, Inc.
ENTEGRIS, INC.Corporate Headquarters / 3500 Lyman Boulevard / Chaska, Minnesota 55318 USACustomer Service Tel. 952-556-4181 / Customer Service Fax 952-556-8022 / www.entegris.com
The materials integrity management company ©2003 Entegris, Inc. Printed in USA 5550-1289MAX-0303
Clean and secure 300 mm wafer transport
CRYSTALPAK® 300
With a patented wafer suspension system, the Entegris Crystalpak® 300 provides your waferswith the shipping security and protection they need.
Ordering InformationDescription Material Part Number
Crystalpak® 300 assembly, cleaned, no pressure valve, PC natural box and cassette with HS300-0009with uninstalled 0501 gasket TPE gasket and LDPE cushions
Crystalpak® 300 reuse kit with top and bottom cushions TPE gasket and LDPE cushions HS300-0601and one 0501 gasket
• Removable TPE gasket protects against external contamination
• Patented wafer suspension system minimizes waferrotation and particle generation
• Metal-free assembly prevents metallic contamination
• Ergonomic design ensures proper operator handling
• LDPE cushions are low in outgassing and preventwafer-to-box contact during handling and shipping
Optimum AutomationPerformanceThe Crystalpak® 300 cassette incorporates a variety of features to ensure reliable automation integrationand interoperability:
• Polycarbonate construction ensures dimensional stability and consistent wafer positioning
• Kinematic couplers with carbon-fiber-filled polycar-bonate guides provide proper cassette positioning
• Flexible design allows horizontal or vertical usage
• Side grip pits, pick-up flanges and conveyor railsallow automated handling
• Molded-in wafer supports ensure accurate waferplane and precise 10 mm wafer spacing
Highest Overall Output ForYour FacilityThe Crystalpak® 300 offers maximum wafer protectionand optimum automation performance, improving your productivity and increasing your overall yield. The Crystalpak® 300:
• Maximizes your wafer transfer throughput with precise wafer plane performance
• Maximizes tool and AMHS uptime and ensures long-term reliability with a dimensionally stable cassette
• Is completely cleanable for re-use
• Minimizes any contribution to contamination
Material Description• The Crystalpak® 300 box and cassette are
manufactured from Entegris’ ultrapure polycarbonate material. This material offerslow inorganics, low particle generation, lowoutgassing and dimensional stability.
• The removable gasket is manufactured from thermal plastic elastomer. This material provides excellent toughness and resilience, is heat resistant to creep and flex fatigue and is low in outgassing.
• The Crystalpak® 300 patented wafer suspension cushions are manufactured from low density polyethylene material.
• The kinematic coupling plate guides are manufactured from carbon-filled polycarbonate.
Overall Box Size• Depth: 268.5 mm (10.57˝)
• Width: 383.9 mm (15.11˝)
• Height: 326.1 mm (12.84˝)
Overall Cassette Size• Depth: 182.1 mm (7.17˝)
• Width: 325.1 mm (12.80˝)
• Height: 307.1 mm (12.09˝)
Wafer Spacing• 10 mm
Silicon DeliveryTM Systemsand ServicesThe Crystalpak® 300 is one component of SiliconDeliveryTM Systems and Services — Entegris’ uniquematerials integrity management solution to cost-effectively manage silicon from production to consumption. This offering brings together wafer and device handling systems and services into a customized, coordinated package that works for you.
Clean and Secure WaferShipping ProtectionThe two-piece Crystalpak® 300 shipping box is engineered to provide maximum protection for your 300 mm wafers:
• Manufactured from dimensionally stable, ultra-pure, low outgassing, transparent polycarbonate
Base
Cover
Top cushion
Bottom cushion
Gasket
Cassette
Specifications
Clean and secure 300 mm wafer transport
CRYSTALPAK® 300
With a patented wafer suspension system, the Entegris Crystalpak® 300 provides your waferswith the shipping security and protection they need.
Ordering InformationDescription Material Part Number
Crystalpak® 300 assembly, cleaned, no pressure valve, PC natural box and cassette with HS300-0009with uninstalled 0501 gasket TPE gasket and LDPE cushions
Crystalpak® 300 reuse kit with top and bottom cushions TPE gasket and LDPE cushions HS300-0601and one 0501 gasket
• Removable TPE gasket protects against external contamination
• Patented wafer suspension system minimizes waferrotation and particle generation
• Metal-free assembly prevents metallic contamination
• Ergonomic design ensures proper operator handling
• LDPE cushions are low in outgassing and preventwafer-to-box contact during handling and shipping
Optimum AutomationPerformanceThe Crystalpak® 300 cassette incorporates a variety of features to ensure reliable automation integrationand interoperability:
• Polycarbonate construction ensures dimensional stability and consistent wafer positioning
• Kinematic couplers with carbon-fiber-filled polycar-bonate guides provide proper cassette positioning
• Flexible design allows horizontal or vertical usage
• Side grip pits, pick-up flanges and conveyor railsallow automated handling
• Molded-in wafer supports ensure accurate waferplane and precise 10 mm wafer spacing
Highest Overall Output ForYour FacilityThe Crystalpak® 300 offers maximum wafer protectionand optimum automation performance, improving your productivity and increasing your overall yield. The Crystalpak® 300:
• Maximizes your wafer transfer throughput with precise wafer plane performance
• Maximizes tool and AMHS uptime and ensures long-term reliability with a dimensionally stable cassette
• Is completely cleanable for re-use
• Minimizes any contribution to contamination
Material Description• The Crystalpak® 300 box and cassette are
manufactured from Entegris’ ultrapure polycarbonate material. This material offerslow inorganics, low particle generation, lowoutgassing and dimensional stability.
• The removable gasket is manufactured from thermal plastic elastomer. This material provides excellent toughness and resilience, is heat resistant to creep and flex fatigue and is low in outgassing.
• The Crystalpak® 300 patented wafer suspension cushions are manufactured from low density polyethylene material.
• The kinematic coupling plate guides are manufactured from carbon-filled polycarbonate.
Overall Box Size• Depth: 268.5 mm (10.57˝)
• Width: 383.9 mm (15.11˝)
• Height: 326.1 mm (12.84˝)
Overall Cassette Size• Depth: 182.1 mm (7.17˝)
• Width: 325.1 mm (12.80˝)
• Height: 307.1 mm (12.09˝)
Wafer Spacing• 10 mm
Silicon DeliveryTM Systemsand ServicesThe Crystalpak® 300 is one component of SiliconDeliveryTM Systems and Services — Entegris’ uniquematerials integrity management solution to cost-effectively manage silicon from production to consumption. This offering brings together wafer and device handling systems and services into a customized, coordinated package that works for you.
Clean and Secure WaferShipping ProtectionThe two-piece Crystalpak® 300 shipping box is engineered to provide maximum protection for your 300 mm wafers:
• Manufactured from dimensionally stable, ultra-pure, low outgassing, transparent polycarbonate
Base
Cover
Top cushion
Bottom cushion
Gasket
Cassette
Specifications
CRYSTALPAK® 300
The Crystalpak® 300 wafer shipping box and integrated 13 capacity cassette provide clean and secure 300 mm
wafer transport, optimum automation performance and the highest overall output for your facility
Silicon DeliveryTM Systemsand ServicesTo optimize wafer and device handling in your facilities, Entegris offersSilicon DeliveryTM Systemsand Services – our unique materials integrity managementsolution to cost-effectively manage silicon from production to consumption.
Wafer Handling Systems• Raw wafer processing and shipping
• Wafer processing
• Finished wafer shipping and handling
• Related product handling
• Handling product cleaning systems
Device Handling Systems• Finished wafer shipping and handling
• Bare die shipping and handling
• Packaged device shipping and handling
• Handling product cleaning systems
WaferCareSM and DeviceCareSM Services• Certified reuse and recycle
• Product cleaning
• Logistics management
• On-site and off-site programs
• Cleaning systems
For More InformationTo find out more about what Entegris can do for you, please call one of our Regional Customer Service Centers today.
Entegris Regional Customer Service CentersTelephone Fax
North America 952-556-4181 952-556-8022
North America Toll Free 800-394-4083 800-763-5820
Europe 49-7264-9158-0 49-7264-9158-927
Japan 81-3-5769-7800 81-3-5769-7845
Malaysia 604-403-1266 604-403-1262
Korea 82-31-738-1181 82-31-738-1191
Taiwan 886-3-5633598 886-3-5633521886-3-5633552
Terms and Conditions of SaleAll purchases are subject to Entegris’ “Terms andConditions of Sale.”
EntegrisTM and Silicon DeliveryTM are trademarks of Entegris, Inc.WaferCareSM and DeviceCareSM are service marks of Entegris, Inc. Crystalpak® is a registered trademark of EMPAK, Inc.
ENTEGRIS, INC.Corporate Headquarters / 3500 Lyman Boulevard / Chaska, Minnesota 55318 USACustomer Service Tel. 952-556-4181 / Customer Service Fax 952-556-8022 / www.entegris.com
The materials integrity management company ©2003 Entegris, Inc. Printed in USA 5550-1289MAX-0303
MykronMykron Microelectronics Co., Ltd. 上海资方微电子有限公司Suite 318, B Office Tower, Poly PlazaNo.14, Dong Zhi Men Street (South), Dong Cheng DistrictBeijing, 100027, ChinaTel. (86)10-6551 0500 Fax (86)10-6551 0501
