SENTECH equipment for thin film measurement€¦ · SENTECH Instruments GmbH Schwarzschildstr. 2...
Transcript of SENTECH equipment for thin film measurement€¦ · SENTECH Instruments GmbH Schwarzschildstr. 2...
SENTECH equipmentfor thin film measurement
• Research & development• Quality control in production• Photovoltaics• LEDs & OLEDs
Spectroscopic ellipsometersLaser ellipsometersAutomated measurement systemsReflectometers
Spectroscopic ellipsometers
DUV-VIS-NIR spectroscopic ellipsometer SENresearch 4.0Large variety of options for R & D and routine applications from DUV to NIR
• Widest spectral range 190 nm (deep UV) – 3,500 nm (NIR)• No moving parts with SSA principle• Full Mueller matrix by innovative 2 C design• SpectraRay/4 comprehensive ellipsometry
software
Cost-effective ellipsometer
SENproFocused on speed and accuracy for the measurementofthinfilms(1nmto15μm)
• Spectral range 370 –1,050 nm• Goniometer with preset angles of incidence• Step Scan Analyzer principle for highest
measurement accuracy• Spectroscopic ellipsometer
software SpectraRay/4
Infrared spectroscopic ellipsometer
SENDIRAVibrational spectroscopic analysis of thin layers (dielectric layers, TCOs, semiconductors, organic layers)
• IR spectral range 1,700 – 25,000 nm• Fully applicable FTIR spectrometer• Proprietary ellipsometer software
SpectraRay/4
Spectroscopic ellipsometer software SpectraRay/4User-friendly software with recipe orien-ted mode for operators and advanced mode for inter active measurement and modeling
• Supports variable angle, multi-experiment, and combined photometric measurements
• Ellipsometric,reflection,andtransmission data
• Huge library of materials‘ data, large number of dispersion models
• Sample effects: depolarization, non-uniformity, scattering (Mueller-matrix),backsidereflection
Automated ellipsometer for R & D SENDUROFast, highly precise, and repeatable measurements in production, process monitoring, and R & D
• Spectral range 290 – 850 nm• Patented automatic alignment sensors• Step Scan Analyzer principle for highest
measurement accuracy• Small footprint• Routine applications• Proprietary ellipsometer
software SpectraRay/4
Laser ellipsometers
Multiple angle laser ellipsometer SE 400advCharacterizationofsinglefilmsandsubstratesinmicroelectronic, photovoltaic, data storage, display technology, life science, metal processing, etc.
• Applicationspecificanglesofincidence• HeNe laser of 632.8 nm wavelength• Measurement precision of 0.1 Å• Highmeasurementspeedallowsforfilmgrowth
monitoring and endpoint detection
CombinedEllipsometryReflectometry SE 500advMaximumflexibilityfortheanalysisofthickdielectric, organic, photoresist, silicon, or polysiliconfilms
• Fast and unambiguous determination of the thicknessoftransparentfilmsupto25µm
• Multiple angle manual goniometer for the characterizationofsinglefilmsandlayerstacks
Automated measurement tools
Ellipsometer for routine applications SENDURO 200 / 300Veryfastmeasurementoffilmsbetweenafewångstromandmorethan50µmthickness
• Cassette to cassette load for 200 mm and 300 mm wafers
• Spectral range 290 – 850 nm• Recipe based measurements• Proprietary ellipsometer software
SpectraRay/4
Summary
SENTECH Instruments GmbHSchwarzschildstr. 212489 Berlin, GermanyTel: +49 30 6392 5520Fax: +49 30 6392 5522E-mail: [email protected]
Sales office:SENTECH Gesellschaft für Sensortechnik mbHKonrad-Zuse-Bogen 1382152 Krailling / KIM, GermanyTel: +49 89 897 9607 0Fax: +49 89 897 9607 22E-mail: [email protected]
Reflectometers
Film Thickness Probe FTPadvFast and easy measurementoffilmthickness in production, process monitoring, and R & D
• Thicknessrange30nm–25µm• Recipe oriented software• Adaptation to a microscope
for measurements in small areas
• Small spot size• UV to NIR spectral range• Most accurate measurement by height
and tilt adjustment of samples• Optional high resolution mapping• Comprehensive, recipe-oriented
reflectometersoftwareFTPadv EXPERT
Spectroscopicreflectometer
RM 1000 / 2000 Accurate measurements of reflectance,filmthickness, andopticalconstantsoffilms between5nmand50µm
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SENDIRA ( ) ( )SENDURO
RM 1000 / RM 2000 ( ) ( ) ( )FTPadv ( )
( ) only in special applicationsPlease consult also our brochures about thin film metrologyfor crystalline silicon and thin film solar cells.