CHAPTER 15 Characterization, applications and processing of Polymers
Semiconductor Processing and Characterization … Processing and Characterization Techniques:...
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Semiconductor Processing and Characterization Techniques: Diffusion Professor Benjamín Alemán Department of Physics University of Oregon (Gatan, 2003)
Transcript of Semiconductor Processing and Characterization … Processing and Characterization Techniques:...
Semiconductor Processing and Characterization Techniques:
Diffusion
Professor Benjamín AlemánDepartment of PhysicsUniversity of Oregon
(Gatan, 2003)
Planar Processing with Semiconductors (Silicon):Course Map
• Crystal growth (semiconductors)• Wafer doping (in situ)• Wafer characteristics• SiO2 growth*• Defects and impurities
• SiO2 growth*• Lithography• Masked diffusion doping• Vacuum Systems• Thin Films: CVD, MBE,
PVD, ALD• Implantation• Wet and Dry Etching• Integration
Constant-surface-concentration diffusion profiles:Complementary error function (erfc)
𝐶 𝑥, 𝑡 = 𝐶𝑠 erfc(𝑥
2 𝐷𝑡)
Concentration-dependent diffusion profilesbecome box-like with increasing 𝛾
Boron, Arsenic
Gold, platinum;avoided in CMOS