SD Cover TP 100 01dheemstr/equipment/etch_oxford/... · 2013-10-14 · he cooling flow 0v he...

stru

ctio

ns

Oxford Instruments Plasma Technology

Plasmalab® System100

System Diagrams

Works Order No.: 94-220025

Orig

inal

In

Customer: University of Notre Dame

www.oxford-instruments.com

Issue 01
November 2010

System DiagramsPlasmalab® System100

Orig

inal

Inst

ruct

ions
List of System Diagrams
In the list of drawings below, the page numbers in blue are hyperlinks. Click on a page number to find the corresponding drawing.

Drawing No. Title Revision Date Page

ES30701 LN2 CHANGEOVER OVER UNIT 02 05/08/10 3

SE00A26865 PC2003 INTERFACE SCHEMATIC 08 10/09/09 4

SE00B26162 100/80 SUBCON POWER BOX LOOM 08 30/06/05 5

SE00B26874 AMU CONTROL PCB 03 14/04/09 6

SE00B28100 AMU WIRING PLC 2003 02 22/03/05 7

SE00C31741 LN2 CHANGEOVER UNIT 02 12/03/10 8

SE00D26871 AMU SENSE PCB 02 17/10/07 9

SE00D27872 ANALOGUE CARD INTERFACE SCHEMATIC 01 21/01/05 10

SE81B26657 PC2003 GASPOD LOOM - SHEET 1 07 21/11/08 11

PC2003 GASPOD LOOM - SHEET 2 12

SE91A19752 100 PLUS POWER BOX - SHEET 1 22 19/04/05 13

100 PLUS POWER BOX - SHEET 2 14

SE91A27512 PC2003 100 SYSTEM INTERFACE WIRING - SHEET 1 18 19/02/10 15

PC2003 100 SYSTEM INTERFACE WIRING - SHEET 2 16

SE91C20974 CRYO HEATER TABLE WITH FILTERS EUROTHERM 2404 05 01/07/99 17

SE91C27460 100 SYSTEM LOADLOCK CAN PCB SCHEMATIC 02 30/10/05 18

SE91C28357 VAT VALVE AND TABLE HEIGHT WIRING 07 04/02/10 19

SE91D27463 100/133 SYSTEM LOADLOCK - SHEET 1 10 04/02/10 20

100/133 SYSTEM LOADLOCK - SHEET 2 21

SE91D27997 TC HEATER CONTROLLER 100 SYSTEM 04 30/10/09 22

SE91D28346 VARIABLE TABLE AND VAT CAN SCHEMATIC 02 30/10/05 23

SP91C28022 SERVICE FLOW DIAGRAM BLUE PLC SERIES 180 380 ICP 07 10/02/10 24

SP91C28023 SERVICE FLOW DIAGRAM BLUE PLC 100 & 133 SERIES RIE 04 10/02/10 25

SP91C28024 SERVICE FLOW DIAGRAM BLUE PLC 100 SERIES DP 03 09/04/10 26

Issue 01

©2010.

OIPT

November 2010Oxford Instruments Plasma Technology. All rights reserved.

94-220025

5

5

4

4

3

3

2

2

1

1

D D

C C

B B

A A

PUMP CURRENT OK>

HEATER SNAP SWITCH BYPASS

+ 24 V DC TO RL2 COM 2

<PUMP

CURRENT SW

+ 24 V DC TO RL6 COM 2+ 24 V DC TO RL6 COM 1

+ 24 V DC TO RL7 COM 2+ 24 V DC TO RL7 COM 1

SPARE INT/LOCK 1 BYPASS

SPARE INT/LOCK 2 BYPASS

A/BLK21A=PURGE SW NOT FITTED.

HOIST

RL4:

CONTROL RF SWITCHING

TOP/LOWER/RF COAX RELAYS

RL5:

DC BIAS SWITCHED

RIE MODE/AMU ONE I/P TO PLC

PE MODE/AMU TWO I/P TO PLC

CM GAUGE I/P +VCM GAUGE 0V

+5v

PUMP CURRENT SW

WATER THREE

SYSTEM SELECTION

< MASTER / SLAVE

LED12 RL10 (HOIST CONTROL)

SPARE INTERLOCK 1

0v

SPARE INTERLOCK 2

RL14 (MASTER/SLAVE) ACTIVE SLAVE

PENNING 0VPENNING I/P +V

TEMPERATURE I/P +VTEMPERATURE 0V

CHILLER 0VCHILLER I/P +V

0v

100 SYSTEM

100 SYSTEM

MASTER / SLAVE SELECT (+24v)+ 12v VIA RL8

100 SYSTEM

100 SYSTEM

AMU TWO C1 POS I/P +VAMU TWO C1 POS 0V

AMU TWO C2 POS 0VAMU TWO C2 POS I/P +V

SYSTEM SELECTION+ 12v

PUMP ONE PURGE SW>

HOIST OK>

VAC STAT OK>

<PUMP ONE PURGE SW

SPARE INTERLOCK 2 OK>

<PUMP ONE PURGE VALVE0v

BUZZER

BUZZER

DRY PUMP ROTATION START

0v


DRY PUMP READY>

AMU ONE P TO P +VAMU ONE P TO P 0V

AMU ONE/TWO DC BIAS 0VAMU ONE/TWO DC BIAS +V

RF ONE FWD I/P 0VRF ONE REF I/P +VRF ONE REF I/P 0V

RF ONE FWD I/P +V

LASER E/POINT I/P +VLASER E/POINT 0V

OIPT & VERITY E/POINT 0V

0v

OIPT & VERITY E/POINT I/P +V

24V TRIP

20V MIN

21.1V MAX

AMU ONE C1 POS I/P +VAMU ONE C1 POS 0V

AMU ONE C2 POS 0VAMU ONE C2 POS I/P +V

AMU TWO C2 POS 0V

AMU TWO C1 POS S/P +V

ATMOSPHERE I/P

DIG IN TO PLC

AMU TWO C1 POS 0VAMU TWO C2 POS S/P +V

CHILLER READY

< CM IN

PUMP ONE PURGE SW.

LK21A=SW NOT FITTED.

LK21B=SW FITTED.

ON/OFFBUTTONS/LEDS

AMU TWO/P TO P/RF ON/DC BIASREF:RL5 DC BIAS/RL3 RF ON

CM IN >

CM COMP OK>

OPTICAL E/POINT I/P +VOPTICAL E/POINT 0V

LASER E/POINT 0VLASER E/POINT I/P +V

HO

IST

& V

AC

ST

AT

OK

>

LN2

OVERTEMP ALARM

NAME COLOUR MONITORING

GREEN + 24 V DCRED + 15 V DC

YELLOW - 15 V DCGREEN + 5 V DC



AMU TWO C2 POS I/P +VAMU TWO C2 POS 0V

AMU TWO C1 POS 0V

Ov

AMU TWO C1 POS I/P +V

N2 PRESS SWITCH>

REDREDREDREDREDRED

N2 PRESSURE SWITCH

WATER ONEWATER TWO

HOIST

PUMP PURGE SWITCH

VAC STAT

02/02/2004

N/U

N/UN/U

N/U

0v

-15v

L/LOCK PIRANI 0VL/LOCK PIRANI I/P +V

+24V TO GASPOD

+15v

0v

SPARE INTER LOCK 2

+24v

SPARE INTER LOCK 1

PUMP ONE RUNNING

RL5 COM

L/LOCK PUMP CONT

PUMP ONE FAIL

PUMP ONE CURRENT SW

PUMP ONE PURGE SW

PUMP TWO RUNNING

PUMP TWO FAIL

DRY PUMP SIGNAL 2

DRY PUMP SIGNAL 3

WATER FLOW THREE

+ 15v

+ 24v

DRY PUMP SIGNAL 4

+ 24v

0v

0v

- 15v

RF ONE/TWO ON TO AMU TWO

PUMP 3 AND L/L TURBO FROM LL CAN

AMU TWO DC BIAS +VAMU TWO DC BIAS 0V

PRIMARY +24V

START OF INTERLOCK CHAIN

SECONDARY +24V

START OF INTERLOCK CHAIN

RL5 NC

Ov

RL5 NO

TURBO AT SPEED>

TURBO BRAKING


HOIST

VAC STAT

WATER FLOW ONE

L/L TURBO ON>

WATER FLOW TWO

N2 PRESS SWITCH

TURBO AT SPEED

- 15 VOLTS OK

+ 15 VOLTS OK

+ 24 VOLTS OK

EMO BUTTON OUTEMO BUTTON RET

PWR BOX RETPWR BOX OUT

SYSTEM ON0V

CM COMPARATOR

CHILLER READY TEMP

WATER FLOW THREE

POWER ON0VOFF SWOFF SWON SWON SWSYS ON LAMPSYS ON LAMP

EMO IN0VCONTACTOR ONMAIN ON LAMPMAIN ON LAMP

LK3 NON - CONTROLLER CRYO ENABLE

NON - CONTROLLER HEATER ALARM

PUMP ONE ON

PUMP TWO ON

PUMP ONE PURGE VALVE

SOFT VENT

VENT

PENNING ENABLE

TEMPERATURE I/P +V>TEMPERATURE 0V>

TURBO GATE VALVE

TURBO BACKING VALVE

TURBO PURGE VALVE

TURBO START/ON

SOFT ROUGH VALVE

ROUGH VALVE

L/LOCK GAUGE ENABLE

0v

L/LOCK PENNING I/P +VL/LOCK PENNING 0V

ANALOGUE 0v TO CHASSIC

<TEMP CONT S/P +V<TEMP CONT 0V

DIGITAL 0v TO ANALOGUE 0v

FIT IF NO OEM CONTROLLER


PENNING ENABLE

PUMP THREE FAIL>

SPARE DIG I/P

DRY PUMP READY>

PUMP THREE RUNING><PUMP THREE ON

+ 24v0v

RL7 COM 1 / + 24v (LK12 FITTED)


CM GAUGE 0VCM GAUGE I/P +V

RL7 NC 2RL7 NO 2

RL7 NO 1

CM GAUGE 0VCM GAUGE I/P +V

RL7 NC 1

APC

CM GAUGE

PENNING I/P +V

PENNING 0V

RL2 & 6>

ATMOSPHERE

HOIST OK>

PENNING

L/LOCKPENNING

CHILLER

TEMP I/P

TEMP CONT

<RF ONE ON FROM PLC

RF ONE ON TO AMU ONE>

RF ONE/TWO ON

TO AMU TWO

<RF TWO ON FROM PLC

RIE/PE +24V NCRIE/PE +24V NO

<HEATER ENABLE

AMU ONE P TO P 0VAMU ONE P TO P +V

AMU ONE/TWO

DC BIAS +V

BUZZER

+ 24v

AMU TWO DC BIAS +V

FROM AMU TWO

AMU ONE DC BIAS +V

FROM AMU ONE

AMU ONE DC BIAS 0V

FROM AMU 0NE

AMU TWO P TO P 0VAMU TWO P TO P +V

FLOW METER / MAG LEV I/P +VFLOW METER / MAG LEV 0V

He COOLING FLOW 0VHe COOLING FLOW I/P +V

He COOLING PRESSURE I/P +V

CM GAUGE ISO VLV

PENNING ISO VLV

He COOLING PRESSURE 0V

0v

0v

He COOLING PRESSURE S/P +VHe COOLING PRESSURE 0V

L/L PENNING ENABLE

VALVES ISO

RL2 NO 2

HFV 8000 ENABLE/+12V CONNECTED


HOISTINTERLOCK(S)

RL9 COM 1

GUARDMASTER+ 24vHOIST1><VAC STAT OKHOIST>

GUARDMASTER:

SWITCH FUCTION REPLACES RL10.

SWITCH DOUBLE POLE SINGLE THROW.

LASER ENDPOINT

SPARE INTERLOCK 1 I/P

RL13 O/P TO SPARE INTERLOCK TWO

INTERLOCKS OK>

+ 24vVIA VAC STAT


0v

PUMP CURRENT

+ 24V VIA INTERLOCK CHAIN

+ 15v

+ 15v

+ 15v

+ 15v

CM COMPARATOR

HOIST INTERLOCK(S)

+ 15v

+ 15v

- 15v

- 15v

- 15v

- 15v

SPARE INTERLOCK 1 O/P

- 15v

- 15v

SPARE INTERLOCK 1

0v

0v

0v

0v

0v

0v

0v

0v

0v

0v

0v

0v

0v

0v+ 24v

0v

CM ISO VLV

PENNING ISO VLV

L/LOCKPIRANI

L/L PIRANI GAUGE I/P +V

L/L/ PIRANI GAUGE 0V

0v+ 24v

<COMP OUT

<COMP OUT

<TURBO AT SPEED

AMU ONE / P TO P/RF ON / DC BIASREF:RL5 DC BIAS/RL3 RF ON

SENSOR SUPPLY

He PRESS

TEMP SIGN

TEMPERATURE 0VTEMPERATURE I/P +V

PUMP THREE ON><PUMP THREE RUNNING<PUMP THREE FAIL

FLOW METER MAG

LK21

RL9 NC 1

RL9 NO 2

RL9 COM 2

RL9 NO 1

RL9 NC 2

HOIST CONTROL

CHILLER I/P +VCHILLER 0V

RF ONE

RF TWO

RL6 NC 2

AUX GAUGE I/P +V

DC BIAS

CH TURBO CONT

AUX GAUGE 0V

WATER SW

HOIST

GASPOD PWR

VALVES SMC

ROUHING VLV I/P

TURBO VLV I/P

AMU ONE

PUMP ONE

AIR PRESS I/P

RL2 COM 2 / + 24v (LK9 FITTED)RL2 NC 2

CHILLER S/P +V

TEMP CONT S/P +VTEMP CONT 0V

CHILLER 0V

AMU TWO DC BIAS 0V

FROM AMU TWO

AMU ONE C2 0VAMU ONE C2 S/P +V

AMU ONE C1 S/P +VAMU ONE C1 0V

AMU ONE C2 POS I/P +VAMU ONE C2 POS 0V

AMU ONE C1 POS 0VAMU ONE C1 POS I/P +V

<CRYO ENABLE

He FLOW

ENDPOINT(S)

DRY PUMPS

0vSOFT ROUGH VALVE0v

TURBO ON/START

<PUMP TWO ON - K3PUMP TWO RUNNING>

PUMP ONE CURRENT SW>

PUMP ONE RUNNING>PUMP ONE FAIL>

PUMP TWO FAIL>

RIE/PE & DC BIAS SW

AMU TWO AUTO/MANUAL

AMU TWO PARK/FREEZE

CLOSE <OPEN <0v-ANA

<LN2 VLV CONT +V<LN2 VLV CONT 0V

RF TWO ON

AMU ONE AUTO/MANUAL

AMU ONE PARK/FREEZE

APC S/P +VAPC 0V

RF ONE ON

+ 24v

+ 24v

+ 24vDRY PUMP SIGNAL 4

DRY PUMP SIGNAL 3

DRY PUMP SIGNAL 2

+ 24vVAC STAT I/P

A

TURBO PURGE VALVE0vTURBO BACKING VALVE0v

TURBO GATE VALVE

0vVENT

0vSOFT VENT

0v

RF ONE ON

AMU ONE PARK/FREEZEOv

Ov

LK1LK2

LK4LK5

LK8LK9LK10LK11LK12LK13

LK17LK18LK19

LK20

RF ONE REF I/P +VRF ONE FWD 0V

0v

RF ONE FWD I/P +VRF ONE 0VRF ONE S/P +V

TURBO BRAKING>

B

POWER IN

Ov

AMU ONE AUTO/MANUAL

VAC STAT

R62 = 12K SWITCHES 11.5V ~ 12.2V

R62 = 15K SWITCHES 12.0V ~ 12.6V

RF TWO ON

AMU TWOAMU TWO PARK/FREEZE0v

0v

0v

AMU TWO AUTO/MANUAL

RL6 NO 1


DRY PUMP READY

He COOLING PRESSURE 0VHe COOLING PRESSURE I/P +V

0v

He COOLING FLOW 0VHe COOLING FLOW I/P +V

He COOLING PRESSURE 0VHe COOLING PRESSURE S/P +V

TEMP CONT S/P +V

+ 24v


He COOL VALVE

0vN2 CONDEN' VALVE

0v

0v

ROUGH VALVE/GATE

ROUGH VALVE/GATE

K5 OK>


RF ONE REF 0V

<CRYO ENABLECRYO ENABLE>

NAME FUNCTION

0v

RL3:

SYSTEM FITTED WITH 2 AMU AND 1 RF

RF ONE/RF ON SIGNAL SWITCHED TO

AMU 0NE RIE MODE/AMU TWO PE MODE

01 ---- FIRST ISSUE

HOIST>

POWER OUT

+ 24v

ATMOSPHERE SW

+ 24v

RL6 NC 1

HOIST VLV A

HOIST VLV B0V

0VR/HAND SW NOR/HAND SW COM

L/HAND SW COML/HAND SW NO

UP/DOWN SW COMUP/DOWN SW NOUP/DOWN SW NC

RIE/PE &

DC BIAS SW

+ 24v

RF ONE ON TO AMU ONE

LED4

LED10

LED6

+ 24v

+ 24v

LED7

LED9

PRESS SW

LED8

WATER FLOW ONE

WATER FLOW TWO

+ 24v

RF TWO REF 0VRF TWO REF I/P +V

+ 24v

<N2 PRESS SWITCH

TURBO AT SPEED>

RF TWO FWD 0VRF TWO FWD I/P +VRF TWO 0V

LED2LED3

LED1

RF TWO S/P +V

ALARM O/PHEAT ON -

SNAP SW COMSNAP SW NC

- 15V OK+ 15V OK+ 24V OK

RF TWO FWD I/P +VRF TWO FWD 0VRF TWO REF I/P +VRF TWO REF 0VRF TWO P TO P I/P +VRF TWO P TO P 0V

FLOW METER MAG LEV 0VFLOW METER MAG LEV I/P +V


RL6 NO 2

ALARM O/PHEAT ON +

PWR BOX SKT13 A - 0vPWR BOX SKT13 B - ALARM +PWR BOX SKT13 C - HEAT +

CHILLER S/P +VCHILLER 0V

TEMP CONT 0VTEMP CONT S/P +V

RF TWO S/P +VRF TWO 0V

RF ONE S/P +VRF ONE 0V

SNAP SW

APC 0VAPC S/P +V

AMU ONE C1 S/P +V

AMU ONE C2 S/P +V

PURGE FLOW OK

PURGE FLOW OK

AMU ONE C2 0V

AMU ONE C1 0V


RIE/PE

LED11

PUMP TWO

PUMP THREE

PUMP THREE DP - 100 SYSTEM ONLY

L/L/ PENNING ENABLE

PENNING ENABLE

L/L/ PENNING GAUGE 0V

L/L PENNING GAUGE I/P +V

AMU ONE/TWO

DC BIAS 0V

LED13LED14LED15LED16

RL2 NC 1

LED17

RL2 NO 1

REDREDREDREDREDRED

+24v

+24v

+24v

+24v

+24v

0v

0v

0v

0v

0v

N2 CONDEN' VALVE

+15v

+15v

He COOL VALVE

MASTER / SLAVE SELECT

-15v

-15v

N/UN/U

0v0v

CRYO ENABLE

N/UN/UN/U

0v0v

HEATER ENABLE

N/UN/UN/U

0v+12v

0v

REF:

PUMP ONE PURGE SWITCH & VALVE REF:

INTERLOCK CIRCUIT.

N/UN/UN/UN/U

+ 24v

PUMP ONE CURRENT SW +24V

N/UN/UN/UN/U


0v

0v

AMU ONE DC BIAS 0VAMU ONE DC BIAS +V

0v

+12V

CONNECTED

+12V

CONNECTED

INTERLOCKS

AUX GAUGE

SPARE

<PUMP ONE ON - K2

02

A

B

0v0v+ 24v+ 24v

+ 24v

0v0v+ 24v + 24v

0v0v+ 24v

+ 24v

0v0v+ 24v

HOIST

VAC STAT

WATER FLOW ONE

WATER FLOW TWO

N2 PRESS SWITCH

- 15 VOLTS OK

+ 15 VOLTS OK

WATER FLOW THREE

PUMP ONE ON

PUMP TWO ON

PUMP ONE PURGE VALVE

TURBO BACKING VALVE

TURBO PURGE VALVE

TURBO START/ON

SOFT ROUGH VALVE

ROUGH VALVE

TURBO BRAKING

TURBO AT SPEED

+ 24 VOLTS OK

CM COMPARATOR

CHILLER READY TEMP

SOFT VENT

VENT

PENNING ENABLE

TURBO GATE VALVE

L/LOCK GAUGE ENABLE

RIE/PE & DC BIAS SW

AMU TWO AUTO/MANUAL

AMU TWO PARK/FREEZE

RF TWO ON

AMU ONE AUTO/MANUAL

AMU ONE PARK/FREEZE

RF ONE ON

DRY PUMP READY

PUMP ONE RUNNING

PUMP ONE FAIL

PUMP ONE CURRENT SW

PUMP ONE PURGE SW

PUMP TWO RUNNING

PUMP TWO FAIL

DRY PUMP SIGNAL 2HEATER ENABLE


SPARE INTER LOCK 2

SPARE INTER LOCK 1

DRY PUMP SIGNAL 3

DRY PUMP SIGNAL 4N2 CONDEN' VALVE

He COOL VALVE

MASTER / SLAVE SELECT

CRYO ENABLE

ATMOSPHEREBUZZER

CM ISO VLV

PENNING ISO VLV

PM140 E/POINT 0VPM140 E/POINT I/P +V

+ 15v

- 15v0v

0v

0v

0v

+ 24v

+ 24v

PM140ENDPOINT

REMOTE H/VOLT 2-10VDC0v

A

A

B

B

FIT LK6B AND LK7B FIT LK6A AND LK7A

LK14

LK15LK16

LK6

LK7A/B

A/B

LK6A = NON PM140 ENDPOINT

LK7A = NON PM140 ENDPOINTLK6B = PM140 ENDPOINT

LK7B = PM140 ENDPOINT

SEE LK7

SEE LK6A/B

A/B

NOTES

LK14A = NON DRY PUMP FITTEDA/B

NON - CONTROLLER HEATER ENABLE


CM COMP OKREDLED5

PUMP CURRENT BYPASS

SYSTEM LINK CONFIGURATION TABLE SYSTEM LED MONITORING TABLE

CM GAUGE I/P +VPENNING I/P +VTEMPERATURE I/P +VCHILLER I/P +V0V

APC S/P +VCHILLER S/P +VRF ONE S/P +VTEMP CONT S/P +V0V

N/U

N/UN/U

N/U0V

RF ONE FWD I/P +VRF ONE REF I/P +VAMU ONE P TO P +VAMU ONE/TWO DC BIAS +V0V

AMU ONE C1 POS I/P +VAMU ONE C2 POS I/P +VAMU TWO C1 POS I/P +VAMU TWO C2 POS I/P +V

RF TWO FWD I/P +VRF TWO REF I/P +VRF TWO P TO P I/P +V

0V

AMU ONE C1 S/P +VAMU ONE C2 S/P +VN/UN/U0V

0V

RF TWO S/P +VHe COOLING PRESSURE S/P +VAMU TWO C1 POS S/P +VAMU TWO C2 POS S/P +V

OPTICAL E/POINT I/P +VLASER E/POINT I/P +VL/LOCK PENNING I/P +VL/LOCK PIRANI I/P +V0V

0V0V

He COOLING PRESSURE I/P +VHe COOLING FLOW I/P +VFLOW METER MAG LEV I/P +V

FIT TO BYPASS SNAP SWITCH

ANALOGUE TO CHASSIC

DIGITAL TO ANALOGUE

PUMP ONE

CURRENT

SWITCH BYPASS

OVERTEMP ALARM

O/TEMP ALARM +24VO/TEMP ALARM O/P OVERTEMP ALARM >

CONTROLLER

OVERTEMP ALARM >

OIPT CONTROL

SYSTEM 100/133

LOADLOCK INTERLOCK CHAIN

N/UN/U

AMU1 PWR

AMU2 PWR

AMU1 PWR (+24V/RL17)

AMU2 PWR (+24V/RL17)

0vFORELINE VENT

TURBO VLV I/P

ROUHING VLV I/P

AIR PRESS I/P

TURBO VLV I/P

ROUHING VLV I/P

AIR PRESS I/P

APC OPEN

APC CLOSE

I/P DIG - OIPT APC DATA IN

OIPT APC DATA OUT

OIPT APC CLK

SPARE I/P DIG

25/005/05 15793 REF. ECO15793

LK22 100 SYSTEM ON LED/BULB BYPASSLK23 DRY PUMP SIGNAL 4LK24 700 DegC TEMPERATURE RANGE ENABLE

100 SYSTEM ON LED/BULB BYPASS

DRY PUMP

SIGNAL 4 BYPASS

700 DegC TEMPERATURE

RANGE ENABLE

CONTROL MODE APC <

0v-DIG

CONTROL MODE APC

VAT 612 DIG 0V >

VAT 612 DIG 0V

+24v0v

VAT 612 VLV POSISTION +V


VAT 612 VLV POSISTION 0V

VAT 612 VLV POSISTION 0V

AUX GAUGE I/P +VAUX GAUGE 0V

AUX GAUGE I/P +V

CONTROL MODE APC


APC OPEN

APC CLOSE

CONTROL MODE APC

>

>

>

>

>

>

>

03 28/08/07 REF:ECO22349 & DR178

GEN INTER

+ 24v VIA INT' CHAIN COMP

+ 24v VIA INT' CHAIN COMP0v

0v

A

B

LK25 LK25A = LOADLOCK WET PUMP

NOT FITTED 100/133

LK21B=PURGE SW FITTED.

LK25B = LOADLOCK DRY PUMP

LK14B = DRY PUMP FITTED

VAT 612

RL18, RL19, RL20, D17, D20 & D21

FITTED AS STANDARD

REMOVED FOR OIPT APC

APC OPENAPC CLOSE

APC S/P +V

+ 24v

CM GAUGE I/P +V

OIPT APC

+ 15v

- 15v0v

0v

0v0v

0v0v

+ 24v

100 SYSTEM

EMO BUTTON OUTEMO BUTTON RET

PRIMARY

SECONDARY

PUMP THREE FAIL>PUMP THREE RUNING>

PUMP THREE RL22 NO

+ 24v

PUMP THREE RL22 COM

PUMP THREE WP - 100 SYSTEM ONLY

SPARE I/P DIG

OPTION OF USE INCLUDE:

700 Deg ELECTRODE - WATER FLOW FOUR

LK25A = STANDARD PUMP FITTED

LK25B = DRY PUMP FITTED

REDLED18 SPARE DIG I/P - WATERFLOW 4


LK14A = NON DRY PUMP FITTEDLK14B = DRY PUMP FITTED

DILUTE N2 FLOW ALARM

NOTE:

SYSTEMS FITTED WITH EBARA DRY PUMP

LK20 - SPARE INTERLOCK 2

NOT FITTED ON EBARA DRY PUMPSRL23

LK26

LK27

FITTED FOR DRY PUMPSNOT FITTED FOR EBARA

FITTED FOR EBARANOT FITTED FOR DRY PUMPS

LK27

<0v SUPPLY

<+ 24v SUPPLY

+ 24v

+ 24v

+ 24v

+ 24v

0v

DIG 0v

ANA 0v-15v

+15v

Ov

LK29 AIR PRESS I/P BYPASS

LK30A : POWER BOX K2 CONTROLLEDLK30B : POWER BOX K2 ENABLEA

B

LK30LK30B : POWER BOX K2 ENABLELK30A : POWER BOX K2 CONTROLLED

A/B

SECONDARY EMO - BLK27A - BYPASSED USING WIRE LINK - REF:M.J.COOKE

22349

04 REF:ECO23479

PWR BOX SKT13 D - K5 OK>

K5 OK

K5 OK

A & C

A & B

A

B

LK27BA & C

LK26 A & BLK27 B

2347907/01/08

05 22/04/08 REF:ECO2399023990

06

LK31


NOT FITTED WHEN GUARDMASTER/BLK19

IS INSTALLED-NOT SYSTEM DEPENDENT

22/08/08 REF:DS252/CHANGES TO RL23 CONTACT AND TRACK/ADD LK31 - GUARDMASTER25241

KLW

REF:

A.COCKRAM

ECO23906

07 12/08/09 REF:ECO23906:R10 WAS 470R CHANGED TO 560R:A.COCKRAM23906

08 10/09/09 27866 REF:ECO27866 - TO MATCH BOM - F1GOES FROM 2 AMP TO 3.15 AMP

SIGN3

SIGN5

SIGN124

SIGN7

SIGN1

SIGN144

SIGN137

SIGN122

SIGN142

SIGN124

SIGN143

SIGN128

SIGN115

SIGN125

SIGN139

SIGN121

SIGN132

SIGN145

SIGN119

SIGN126

SIGN138

SIGN141

SIGN117

SIGN118

SIGN127

SIGN140

SIGN134

SIGN116

SIGN156

SIGN123

SIGN95

SIGN141

SIGN150SIGN149

SIGN90

SIGN140

SIGN102

SIGN9

SIGN11

SIGN99SIGN117SIGN118

SIGN93

SIGN33

SIGN123

SIGN144

SIGN35

SIGN19

SIGN21

SIGN23

SIGN1

SIGN17

SIGN156

SIGN83

SIGN84

SIGN63


SIGN25SIGN26SIGN27SIGN28

SIGN96

SIGN120

SIGN121

SIGN29

SIGN27

SIGN31

SIGN25

SIGN147

SIGN146

SIGN45

SIGN48

SIGN55

SIGN46

SIGN49

SIGN42

SIGN57

SIGN67

SIGN41

SIGN45

SIGN51

SIGN43

SIGN47

SIGN53

SIGN44

SIGN143

SIGN142

SIGN3

SIGN126

SIGN4

SIGN127

SIGN113

SIGN53

SIGN130

SIGN54

SIGN55

SIGN42

SIGN44SIGN43

SIGN56

SIGN41

SIGN18

SIGN73

SIGN116

SIGN74SIGN67SIGN68

SIGN75SIGN76

SIGN77SIGN78

SIGN17SIGN18SIGN19SIGN20SIGN21

SIGN131

SIGN22SIGN23SIGN24

SIGN132

SIGN57

SIGN59

SIGN157

SIGN33

SIGN62

SIG

N8

9

SIG

N8

7

SIGN146

SIGN37

SIGN40SIGN39

SIGN137

SIGN29SIGN30

SIGN154SIGN153

SIGN130

SIGN157

SIGN47SIGN48

SIGN5

SIGN106

SIGN110

SIGN145

SIGN11SIGN12SIGN94

SIGN49

SIGN129

SIGN13SIGN14

SIG

N8

8

SIGN101

SIGN104

SIGN103

SIGN82

SIGN111

SIGN81

SIGN112

SIGN129

SIGN82

SIGN154

SIGN[1..162]

SIGN153

SIGN105

SIGN66SIGN65

SIGN113SIGN114

SIGN130

SIGN157

SIGN73

SIGN75

SIGN100

SIGN77

SIGN79SIGN80

SIGN135

SIGN35

SIGN86

SIGN155

SIGN149

SIGN98

SIGN107

SIGN138

SIGN147

SIGN89

SIGN91

SIGN105

SIGN112

SIGN108

SIGN150

SIGN139

SIGN148

SIGN95

SIGN107

SIGN96

SIGN111SIGN94

SIGN93

SIGN136

SIGN133

SIGN109

SIGN15

SIGN90

SIGN110

SIGN64

SIGN106

SIGN92

SIGN39

SIGN71

SIGN37

SIGN69

SIGN134

SIGN16SIGN15SIGN6

SIGN85

SIGN31

SIGN32

SIGN1

SIGN8SIGN7

SIGN144

SIGN50

SIGN99

SIGN103

SIGN81

SIGN82

SIGN102

SIGN87

SIGN101

SIGN88

SIGN85

SIGN100SIGN83

SIGN104

SIGN86

SIGN97

SIGN84

SIGN98

SIGN133

SIGN114

SIGN120

SIGN135

SIGN129

SIGN131

SIGN136

SIGN52

SIGN51

SIGN155

SIGN65SIGN65

SIGN6

SIGN4

SIGN2


SIGN12

SIGN10

SIGN24

SIGN22

SIGN20

SIGN32

SIGN30

SIGN28

SIGN26

SIGN59

SIGN61SIGN60

SIGN58

SIGN69SIGN70SIGN71

SIGN66

SIGN68

SIGN56

SIGN54

SIGN52

SIGN50

SIGN38

SIGN36

SIGN34

SIGN78

SIGN76

SIGN74

SIGN70

SIGN72

SIGN38

SIGN40

SIGN36

SIGN34

SIGN60

SIGN58

SIGN8

SIGN72

SIGN62

SIGN64

SIGN148

SIGN46

SIGN2

SIGN159

SIGN10SIGN9

SIGN108

SIGN109

SIGN160

SIGN159

SIGN79SIGN80

SIGN160

SIGN91

SIGN96

SIGN122

SIGN151

SIGN152SIGN151


SIGN158

SIGN161

SIGN119

SIGN128

SIGN97

SIGN115

SIGN92

SIGN162

SIGN161

SIGN125

SIGN162DIG 0v

+12v

DIG 0v

+24v

+24v

+12v

+5v

DIG 0v

-15v

+24v

+15v

+15v

-15v

DIG 0v

DIG 0v

DIG 0v

DIG 0v

+24v

DIG 0v

-15v DIG 0v +24v+15v

DIG 0v

+5v

DIG 0v

+15v-15v

+24v

DIG 0v

DIG 0v

DIG 0v

DIG 0v

+24v

+12v

+24v

+24v

+24v

DIG 0v

+24v

+24v

+24v

+24v

DIG 0v

DIG 0v

DIG 0v

DIG 0v

DIG 0v

DIG 0v

DIG 0v

DIG 0v

+24v

+15v

DIG 0v

-15v

+24v

DIG 0v

+24v

+24v

+24v

+24v

+24v

+24v

DIG 0v

DIG 0v

DIG 0v

+24v

-15v

+15v

+24v

+5v

+24v

+15v

DIG 0v

+24v

+24v

DIG 0v

+15vDIG 0v

+24v

+15v-15v

+24v

DIG 0v

+24v

+15v

+15v

+15v

-15v

+24v

-15v

-15v

-15v

DIG 0v

+24v

DIG 0v

DIG 0v

DIG 0v

DIG 0v

+24v

DIG 0v

-15v

DIG 0vDIG 0v

+15v

DIG 0v

DIG 0v

+5v

DIG 0v

+24v

+24v

DIG 0v

+24v

DIG 0v +24v-15v +15v

DIG 0v

DIG 0v

DIG 0v

DIG 0v

DIG 0v

+15v-15v

DIG 0v

+24v

DIG 0v

DIG 0v

DIG 0v +24v

+15v

+24v

DIG 0v

+24v

DIG 0v

DIG 0v

+15v

-15v

DIG 0v

DIG 0v

DIG 0v

DIG 0v

DIG 0v

DIG 0vDIG 0v

DIG 0v

DIG 0v

+24v

DIG 0v

DIG 0v

DIG 0v

DIG 0v

DIG 0v

DIG 0v

+24v

DIG 0v

DIG 0v+24v

+24v DIG 0v

+24v DIG 0v

+24v DIG 0v

+24v

+24v

+15v

+24v

DIG 0v

DIG 0v

+24v+24v

+24vDIG 0v

+24v

DIG 0v

+24v

DIG 0v

+24v

DIG 0v

DIG 0v

+15v

-15v

+24v

DIG 0v

DIG 0v+24v

DIG 0v

DIG 0v

DIG 0v

+24v

Size DWG NO Rev

Sheet of

This drawing belongs to Oxford Instruments Plasma Technology and is issued on condition that it is not copied, reprinted or disclosed either in whole or in part to a third party without the consent in writing of Oxford Instruments Plasma Technology

Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:

Rev Date ECO Modification

by

Checked on by

Oxford Instruments

Plasma Technology

Design review No Sign

08SE00A26865 Wednesday, September 09, 2009

1 1

A0

PC2003 INTERFACE SCHEMATIC

\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\BLUE 80\INTERFACE PCB\PCB INTERFACE REV08\DESIGN4.DSN

Tuesday, January 11, 2005 JBWSize DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology



1 1

A0



Tuesday, January 11, 2005 JBWSize DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology



1 1

A0



Tuesday, January 11, 2005 JBW

JP64

DRY PUMP ONE

JP64

DRY PUMP ONE

123456

RL16

ESR2450

RL16

ESR2450

51

1029

6

-+

RL7

ESR0034

-+

RL7

ESR0034

13567 8 10

12

BLK26

M/S SW

BLK26

M/S SW

123456

Q2

ZTX450/TO

Q2

ZTX450/TO

R15

82K

R15

82K

SKT9

ANA I/P

SKT9

ANA I/P

12345678

910

R53

4K7/0.25W

R53

4K7/0.25W

JP57

GAUGE ISO VLV

JP57

GAUGE ISO VLV

1234

LK26BLK26B

D4

1N4004

D4

1N4004

D241N4004D241N4004

LK25LK25

LED4

+5V GRN

LED4

+5V GRN

C10.1uF/63C10.1uF/63

BLK29

N2 VLV OUT

BLK29

N2 VLV OUT

12

D22

1N4004

D22

1N4004

R37

10K/0.25W

R37

10K/0.25W

R38

1K0/0.25W

R38

1K0/0.25W

SKT13

ANA O/P

SKT13

ANA O/P

12345678

910

R704K7/0.25WR704K7/0.25W

LED9

RED

LED9

RED

LED3

-15V YEL

LED3

-15V YEL

JP38

AMU 2 BIAS

JP38

AMU 2 BIAS

123456

TP9

ANA O/P

TP9

ANA O/P

12345

C18

.1uF/63V

C18

.1uF/63V

TP14

I/P & O/P

TP14

I/P & O/P

123456789

10111213141516

R8

10K/0.25W

R8

10K/0.25W

LK24LK24

R61

3K3/0.25W

R61

3K3/0.25W

R19

47K/0.25W

R19

47K/0.25W

D17

1N4004

D17

1N4004

RL15

ESR2450

RL15

ESR2450

51

1029

6

Q10BC182Q10BC182

BLK27

EMO F/P

BLK27

EMO F/P

12

JP60

AUX GAUGE

JP60

AUX GAUGE

1234567

JP4

I/P & O/P

JP4

I/P & O/P

123456789

1011121314151617181920

R111K0R111K0

LK26ALK26A

R64

100K/0.25W

R64

100K/0.25W

SKT10

ANA I/P

SKT10

ANA I/P

12345678

910

JP61

SP DIG I/P

JP61

SP DIG I/P

1234

JP19

PWR BOX

JP19

PWR BOX

1234

R78 2K4/0.25WR78 2K4/0.25W

JP42

CAN LL

JP42

CAN LL

12345678

JP50

WATER SW

JP50

WATER SW

123456789

TP6

ANA I/P

TP6

ANA I/P

12345

JP48

SPARE I/P DIG

JP48

SPARE I/P DIG

12

LED5

RED

LED5

RED

LED7

RED

LED7

RED

- +

RL3

ESR0034

- +

RL3

ESR0034

1

3

56 7

8

10

12

JP25

RF ONE AUX

JP25

RF ONE AUX

123

TP15

I/P & O/P

TP15

I/P & O/P

123456789

10111213141516

+ C1722uF/35V

+ C1722uF/35V

JP28

UPPER SW

JP28

UPPER SW

123

R10560R/0.25WR10560R/0.25W

C5

.1uF/63V

C5

.1uF/63V

R2

270R/0.25W

R2

270R/0.25W

F1

3.15 AMP

F1

3.15 AMP

Q1

ZTX450/TO

Q1

ZTX450/TO

JP55

PURGE SW

JP55

PURGE SW

1234

D7

1N4004

D7

1N4004

D3

1N4004

D3

1N4004

D9

1N4004

D9

1N4004

R47

4K7/0.25W

R47

4K7/0.25W

- +

RL9

ESR0034

- +

RL9

ESR0034

1

3

56 7

8

10

12

TP7

ANA I/P

TP7

ANA I/P

12345

LED17

RED

LED17

RED

R544K7/0.25W

R544K7/0.25W

JP44

PUMP ONE

JP44

PUMP ONE

12345678910

R59

620R/0.25W

R59

620R/0.25W

JP21

HOIST VLV

JP21

HOIST VLV

1234

JP29

LOWER SW

JP29

LOWER SW

123

JP54

PURGE VLV

JP54

PURGE VLV

12

BLK3BLK312

R714K7/0.25WR714K7/0.25W

BLK5

HOOD/ICP FAN

BLK5

HOOD/ICP FAN

12

JP24

RF ONE

JP24

RF ONE

123456789101112

LK2LK2

BLK11BLK1112

C21

.1uF/63V

C21

.1uF/63V

LED12

RED

LED12

RED

BLK6

RSP FANS

BLK6

RSP FANS

12

JP53

SPARE INT LOCK 2

JP53

SPARE INT LOCK 2

1234

JP52

SPARE INT LOCK 1

JP52

SPARE INT LOCK 1

1234

LK10LK10

BLK23

ROUGH GATE

BLK23

ROUGH GATE

12

LED11

RED

LED11

RED

LK20LK20

LK8LK8

RL22

ESR2450

RL22

ESR2450

51

1029

6

LK1LK1

RL23

ESR2450

RL23

ESR2450

51

1029

6

R49

4K7/0.25W

R49

4K7/0.25W

Q5BC182Q5BC182

LK6LK6

R29

470K/0.25W

R29

470K/0.25W

D6

1N4004

D6

1N4004

JP32

He COOL PRESS

JP32

He COOL PRESS

12345

-+

RL8

ESR0034

-+

RL8

ESR0034

13567 8 10

12

C2

.1uF/63V

C2

.1uF/63V

R7

10K/0.25W

R7

10K/0.25W

RL18

ESR2450

RL18

ESR2450

51

1029

6

SKT2

PENNING

SKT2

PENNING

12345678

LED8

RED

LED8

RED

BLK17

VAC STAT

BLK17

VAC STAT

12

SKT12

ANA I/P

SKT12

ANA I/P

12345678

910

BLK18

HOIST

BLK18

HOIST

12

TP4

ANA I/P

TP4

ANA I/P

12345

BLK30

VAT 612 PWR

BLK30

VAT 612 PWR

12

SKT3

L/LOCK PENNING

SKT3

L/LOCK PENNING

12345678

BLK14

CAN V PWR

BLK14

CAN V PWR

123456

R6310K/0.25WR6310K/0.25W

SKT5

ANA I/P

SKT5

ANA I/P

12345678

910

R3

1K2/0.25W

R3

1K2/0.25W

JP16

CM GAUGE

JP16

CM GAUGE

12345

Q3

ZTX450/TO

Q3

ZTX450/TO

C4

.1uF/63V

C4

.1uF/63V

Q7BC182Q7BC182

LK9LK9

LK14LK14

R39

1K0/0.25W

R39

1K0/0.25W

TP1

ANA I/P

TP1

ANA I/P

12345

R743K0/0.25WR743K0/0.25W

R13

47K/0.25W

R13

47K/0.25W

C19

.1uF/63V

C19

.1uF/63V

-+

RL2

ESR0034

-+

RL2

ESR0034

13567 8 10

12

R16

1K5/0.5W

R16

1K5/0.5W

D5

1N4004

D5

1N4004

R62

12K/0.25W

R62

12K/0.25W

LED1

+24V GRN

LED1

+24V GRN

U2

MAX8216

U2

MAX8216

GN

D2

+5V3

-5V4

DOUT9

OUT410OUT311OUT212OUT113

GN

D8

+15V5

-15V6

DIN7

VREF1

VDD14

BLK22

GEN INTER

BLK22

GEN INTER

12

JP17

CHILLER

JP17

CHILLER

12345

U4

LM7812

U4

LM7812

VI1

GN

D2

VO3

JP1

I/P & O/P

JP1

I/P & O/P

123456789

1011121314151617181920

R66

4K7/0.25W

R66

4K7/0.25W

JP47

DRY PUMPS I/P

JP47

DRY PUMPS I/P

12345678910

SKT15

ANA O/P

SKT15

ANA O/P

12345678

910

R5

5K1/0.25W

R5

5K1/0.25W

R554K7/0.25W

R554K7/0.25W

SKT1

OIPT APC

SKT1

OIPT APC

815714613512411310291

16

17

JP15

APC-CONT

JP15

APC-CONT

12345678910

Q6BC182Q6BC182

Q9BC182Q9BC182

LK19LK19

SKT4

L/LOCK PIRANI

SKT4

L/LOCK PIRANI

12345678

LK21LK21

JP35

ATOM SW

JP35

ATOM SW

1234567

D12

1N4004

D12

1N4004

R9

10K/0.25W

R9

10K/0.25W

D11

1N4004

D11

1N4004

D25 1N4004D25 1N4004

LK22LK22

BLK20

GASPOD

BLK20

GASPOD

123456

F2

1 AMP

F2

1 AMP

R14

100R

R14

100R

R604K7/0.25WR604K7/0.25W LK15LK15

D19 1N4004D19 1N4004

+ C6

22uF/35V

+ C6

22uF/35V

JP43

TURBO LL

JP43

TURBO LL

123456

R76 2K4/0.25WR76 2K4/0.25W

LK11LK11

BLK25

TURBO GATE

BLK25

TURBO GATE

12

LED16

RED

LED16

RED

LED10

RED

LED10

RED

Q4

ZTX450/TO

Q4

ZTX450/TO

JP15A

APC-CM

JP15A

APC-CM

12

R6

1K5/0.25W

R6

1K5/0.25W

BLK10BLK1012

BLK7

LF FAN

BLK7

LF FAN

12

TP3

SPARE

TP3

SPARE

12345

JP66

FORELINE VENT

JP66

FORELINE VENT

12

BLK28

EMO PWR BOX

BLK28

EMO PWR BOX

12

D8

1N4004

D8

1N4004

LED14

RED

LED14

RED

TP10

ANA O/P

TP10

ANA O/P

12345

R31

1K0/0.25W

R31

1K0/0.25W

VR2

10K0

VR2

10K0

- +

RL11

ESR0034

- +

RL11

ESR0034

1

3

56 7

8

10

12

JP62

SP DIG I/P

JP62

SP DIG I/P

123

JP36

RF TWO

JP36

RF TWO

123456789101112

LED15

RED

LED15

RED

R17

1K5/0.5W

R17

1K5/0.5W

R58

620R/0.25W

R58

620R/0.25W

R73

470R

R73

470R

BLK2

+/-15V

BLK2

+/-15V

1234

R50

4K7/0.25W

R50

4K7/0.25W

R35

4K7/0.25W

R35

4K7/0.25W

JP2

I/P & O/P

JP2

I/P & O/P

123456789

1011121314151617181920

RL20

ESR2450

RL20

ESR2450

51

1029

6

TP12

I/P & O/P

TP12

I/P & O/P

123456789

10111213141516

JP26

AMU 1 BIAS

JP26

AMU 1 BIAS

123456

- +

RL1

ESR0034

- +

RL1

ESR0034

1

3

56 7

8

10

12

LK30LK30

SKT16

ANA I/P

SKT16

ANA I/P

12345678

910

LK29LK29

LK18LK18

D18

DIODE ZENER1

D18

DIODE ZENER1

SKT7

ANA O/P

SKT7

ANA O/P

12345678

910

- +

RL12

- +

RL12

1

3

56 7

8

10

12

BLK8BLK81234

JP39

AMU TWO

JP39

AMU TWO

1234567891011121314

JP3

I/P & O/P

JP3

I/P & O/P

123456789

1011121314151617181920

D23

1N4004

D23

1N4004

R32

10K/0.25W

R32

10K/0.25W

U1

LM7805

U1

LM7805

VI1

GN

D2

VO3

- +

RL10

ESR0034

- +

RL10

ESR0034

1

3

56 7

8

10

12

SKT6

ANA O/P

SKT6

ANA O/P

12345678

910

LK23LK23

C7

.1uF/63V

C7

.1uF/63V

JP46

PUMP THREE WP

JP46

PUMP THREE WP

12345

R524K7/0.25WR524K7/0.25W

LK3LK3

BLK16

SNAP SW

BLK16

SNAP SW

12

JP59

EXP

JP59

EXP

12345678

R18

1K5/0.5W

R18

1K5/0.5W

C15.1uF/63VC15.1uF/63V

JP63

PUMP THREE DP

JP63

PUMP THREE DP

12345

-+

RL5

ESR0034

-+

RL5

ESR0034

13567 8 10

12

R4

1K2/0.25W

R4

1K2/0.25W

D21

1N4004

D21

1N4004

R56

4K7/0.25W

R56

4K7/0.25W

- +

RL13

- +

RL13

1

3

56 7

8

10

12

LK5LK5

R36

4K7/0.25W

R36

4K7/0.25W

R574K7/0.25W

R574K7/0.25W

JP33

N2 FLOW METER

JP33

N2 FLOW METER

12345

R72 2K4/0.25WR72 2K4/0.25W

SKT11

ANA I/P

SKT11

ANA I/P

12345678

910

R1

2K0/0.25W

R1

2K0/0.25W

D10

1N4004

D10

1N4004

RL19

ESR2450

RL19

ESR2450

51

1029

6

R40

10K/0.25W

R40

10K/0.25W

JP45

PUMP TWO

JP45

PUMP TWO

12345

D16

1N4004

D16

1N4004

BLK9BLK91234

TP2

ANA O/P

TP2

ANA O/P

12345

BLK4

DIG PLC

BLK4

DIG PLC

12

LED18

RED

LED18

RED

LK7LK7

RL21

ESR2450

RL21

ESR2450

51

1029

6

R33

1K0/0.25W

R33

1K0/0.25W

-+

RL4

ESR0034

-+

RL4

ESR0034

13567 8 10

12

JP30

COAX SW

JP30

COAX SW

123

LED2

+15V RED

LED2

+15V RED

BLK21

GEN INTER

BLK21

GEN INTER

12

- +

RL14

ESR0034

- +

RL14

ESR0034

1

3

56 7

8

10

12

R48

4K7/0.25W

R48

4K7/0.25W

LK12LK12

C20

470pF/100V

C20

470pF/100V

JP37

RF TWO AUX

JP37

RF TWO AUX

123

LK17LK17

R30

10K/0.25W

R30

10K/0.25W

SKT14

ANA O/P

SKT14

ANA O/P

12345678

910

JP51

HOIST CONT INTER

JP51

HOIST CONT INTER

123456

R77 2K4/0.25WR77 2K4/0.25W

JP18

TEMP CONT

JP18

TEMP CONT

12345678910

R125K6R125K6

R654K7/0.25W

R654K7/0.25W

TP13

I/P & O/P

TP13

I/P & O/P

123456789

10111213141516

R694K7/0.25WR694K7/0.25W

BLK1

+24V

BLK1

+24V

12

SKT8

SPARE

SKT8

SPARE

12345678

910

TP11

ANA I/P

TP11

ANA I/P

12345

LK4LK4

D20

1N4004

D20

1N4004

+ C1

22uF/35V

+ C1

22uF/35V

TP5

ANA I/P

TP5

ANA I/P

12345

LK27CLK27C

R20

47K/0.25W

R20

47K/0.25W

JP56

BUZZER

JP56

BUZZER

12

BLK15

TEMP PROBE

BLK15

TEMP PROBE

12

JP22

ON/OFF/LEDS

JP22

ON/OFF/LEDS

12345678910

JP34

ENDPOINT

JP34

ENDPOINT

12345678910

R751K0R751K0

R45

100R/0.25W

R45

100R/0.25W

C3

.1uF/63V

C3

.1uF/63V

LK16LK16

BLK24

ISO VLV

BLK24

ISO VLV

12

JP40

CH TURBO

JP40

CH TURBO

12345678910

D15

1N4004

D15

1N4004

LK31LK31

F3

1 AMP

F3

1 AMP

LED6

RED

LED6

RED

-

+

U5

LM311

-

+

U5

LM311

2

3

756 4

1

8

C12

470pF/100V

C12

470pF/100V

BLK19

GUARDMASTER

BLK19

GUARDMASTER

1234

JP27

AMU ONE

JP27

AMU ONE

1234567891011121314

JP20

HOIST BUTTONS

JP20

HOIST BUTTONS

12345678

D14

1N4004

D14

1N4004

C11

.1uF/63V

C11

.1uF/63V

LK13LK13

-

+

U3

LM311

-

+

U3

LM311

2

3

75 64

1

8

BLK12

CAN A PWR

BLK12

CAN A PWR

123456

LK27LK27

C13

.1uF/63V

C13

.1uF/63V

BLK13

CAN LL PWR

BLK13

CAN LL PWR

123456

BLK27A

EMO F/P

BLK27A

EMO F/P

12

-+

RL6

ESR0034

-+

RL6

ESR0034

13567 8 10

12

JP31

He COOL CONT

JP31

He COOL CONT

12345678

+ -

RL17

ESR0034

+ -

RL17

ESR0034

1

3

56 7

8

10

12

+ C8

22uF/35V

+ C8

22uF/35V

+ C9.1uF/63V

+ C9.1uF/63V

Q8BC182Q8BC182

JP23

EMO I/P

JP23

EMO I/P

123456

JP49

PRESS SW

JP49

PRESS SW

123

C16.1uF/63VC16.1uF/63V

JP58

VALVES

JP58

VALVES

12345678910111213141516

LED13

RED

LED13

RED

R514K7/0.25WR514K7/0.25W

D13

1N4004

D13

1N4004

5

5

4

4

3

3

2

2

1

1

D D

C C

B B

A A

0.1V

EXTERNAL

All unmarked diodes are IN4148's.

(Typ. -2V=MAN

*

Fine adjustment of MAX & MIN limits.10V equates to VH=3.3V, VL=2.7V.

High=Disable, Low=Park.

C1 max. interlock

(RF ON)

C1 EXT POS.

+24v=MANUAL, NC=AUTO.

(max -Ve current -140mA)

+2.5V

Assembly number:

POS. B: PARK DISABLED

10K

FARNELL 657-177 OR 323-159

C2 decrease

POS. B: MED. GAIN

POS. A: PARK ENABLED

C2 EXT POS.

POS. A: LOW GAIN

C1 MOTOR CONTROL

*

+1.4V=AUTO )

High=Disable, Low=Park.

MA00Z26876 AMU CONTROL PCB

POS. A: DISABLE PARK IN MANUAL

+

0.1V

If RF ON=OFF & AUTO=TRUE

Park Pot.

POS. B: AIR CAP.PARK GAIN

6V REF

C2 max. interlock

Note: pin 7 is high if VIN < +2.5v.

POS. A: LOW GAIN

C2 min. interlock

-2.28V

+

(Typ. Vout= -13 to -14.5V)

FOR ANALOGUE SWITCHES

C2 MOTOR CONTROL

9.9V

+2.5V

*

(Typ. -2V=MAN

PARK POTS

Note: pin 7 is high if VIN < +2.5v.

-4.67V

(note DC bias O/P will be +Ve)

SILICONIX DG211

12V REF

Fine adjustment of MAX & MIN limits.

ADJ. TO GIVE 1KV=10V

9.9V

POS. A: VAC CAP.PARK GAIN

POS. A: DISABLE PARK IN MANUAL

POS. B: MED. GAIN

94- EIA0001

C1 decrease

POS. C: HIGH GAIN

PINS 1,3,5,7,8 NO CONNECTION

C1 min. interlock

0.4A (0.8A TRIP)

,8PIN DIL

Note. Logic threshold is set by the

12V REF

C2 increase

RF ON (+5 to +15v equals ON, float or OV equals OFF)

C1 increase

Then CAPS go to park.

POS. C: HIGH GAIN

POS. A: VAC CAP.PARK GAIN

10K

LOW CURRENT LED (2mA)

Symbol used to denote analogue switch

6V REF

POS. B: AIR CAP.PARK GAIN

POS. B: DISABLE PARK Controlled by PLC

4.8v

2.28V

*

+1.4V=AUTO )

PC00S26875 AMU CONTROL PCB

POS. B: DISABLE PARK Controlled by PLC

POWER SUPPLY DETAILS

SYSTEM +24V

1.2v

1A

+

01 First issue----

A

B

B

A

A

B

B

A

B

A

A

B

B

A

A

B

B

A

A

B

A

B

B

C

A

A

C

B

B

A

A

B

(Auto/Manual)

Park/Freeze

*

*

Volt p-p

Volt DC bias

0 Volt

PHASE

MAGNITUDE

Fine GAIN Ajust

Fine GAIN Ajust

28-07-04

LK107

b

LK 1

a

b

a

b

LIN

K

a

LK105

PANEL/PLC CONTR.

b

Full range of the Vaccum cap

LK 2

LK104

a

a

Full range of the Vaccum cap

LK 5

b

a

a

b

b POS. IS USED FOR AMU

a

a

a

LK102

a

VA

C C

AP

LO

W P

WR

a

a

a

AIR

CA

P

a

LK106

INCR.GIAN SIGNAL

a

LK 8

INCR.GIAN SIGNAL

DIFF.TUNE GAIN

a

a

b

c

b

a

CONTROLLED BY PLC

LK108

a

LK101

c

b POS. FOR TESTING ONLY

a

HI P

WR

LK 3

CONTROLLED BY PLC

a

b

b

a

a

a

PANEL/PLC CONTR.

LK 7

RF ON SIGNAL

a

a


LK 4

a

a

VA

C C

AP

a

LK 6

DIFF.TUNE GAIN a

a

a

LK 9 off off off P-P Gain

02 26-11-08 26028 Up issued to remove confusion over multiple rev01’s - No change to the physical rev01 PCB or circuit

03 14-04-09 27155 FS1 and FS101 changed to higher current re-settable fuses (0.8A trip) BOM change only, PCB not changed

0.4A (0.8A TRIP)

JBW

CAP2

CAP2

CAP1

CAP1

C1 decrease

C2 decrease

C1 increase

C2 increase

C2 decrease

C1 decrease

C1 increase

C2 increase

DC Bias

DC Bias

DC Bias

C1c

C1b

C1a

C2c

C2b

C2a

C2a

C2b

C2c

C1b

C1c

C1a

Volt P-P

Volt P-P

+24V

0V

+15V

-15V

0V 0V

+15V

0V

0V

+10V REF

+24V

0V

-15V

+10V REF

-15V

0V

0V

-15V

0V

+10V REF

-15V

+24V

+24V

-15V

-15V

+15V

+10V REF

+10V REF

-15V

-15V

+15V

+15V+15V

0V

0V

+15V

0V

-15V

-15V

+15V

0V

+15V

-15V

-15V

+15V

-15V

-15V

0V

+10V REF

+15V

0V

-15V

0V

+10V REF

0V

0V

-15V

-15V

+15V

+15V

+15V

+15V

+15V

+15V

+15V

+15V

+15V

+15V

+15V

+15V

+15V

-15V

-15V

0V 0V

0V

0V

0V

0V

-15V

0V0V

+15V

0V

0V0V

Size DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology


03SE00B26874 Thursday, April 16, 2009

1 1

A1

AMU control PCB

\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\PCBS\AMU CONTROL PCB REV03\MAINAMU_PC

Wednesday, September 03, 2003 JRMSize DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology



1 1

A1

AMU control PCB


Wednesday, September 03, 2003 JRMSize DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology



1 1

A1

AMU control PCB


Wednesday, September 03, 2003 JRM

R36

10K

R36

10K

R11310KR11310K

R6110KR6110K

R62

62K

R62

62K

R21

100k

R21

100k

R94

20K

R94

20K

R45270KR45270K

LED2LED2

R92

470R

R92

470R

C10110nC10110n

U9D

ADG211A

U9D

ADG211A

D7

IN8S

6

TP4TP4

1

TP101TP101

1

R48

560K

R48

560K

R3510KR3510K

+

-

U1

LM311

+

-

U1

LM311

2

37

84 1

6 5

U14REF01U14REF01

OUT6

V+2

V-4

AD

J5

U9C

ADG211A

U9C

ADG211A

D10

IN9S

11

R1310KR1310K

JP6JP6

123456789101112

JP3JP3

123456

R51

100K

R51

100K

R22

10K

R22

10K

R93

10K

R93

10K

C6610uFC6610uF

D5IN4001D5IN4001

D105IN4001D105IN4001

RV2

10K

RV2

10K

R3410KR3410K

R60560RR60560R

R108

10k

R108

10k

R4639KR4639K

D1110VD1110V

C133100nFC133100nF

C116100nFC116100nF

C137100nC137100n

R67

9K1

R67

9K1

R131

47K

R131

47K

R157

1K

R157

1K

R17

560k

R17

560k

R84

100K

R84

100K

LK107LK107

R82

470R

R82

470R

R63100KR63100K

D106IN4001D106IN4001

C123100nFC123100nF

C110100nC110100n

R159100KR159100K

R166100RR166100R

C13210OnFC13210OnF

C131470nC131470n

R66100RR66100R

Q102

ZTX450

Q102

ZTX450

R424K7R424K7

C32100nFC32100nF

R203

?

R203

?

R152

100K

R152

100K

R124

100R

R124

100R

C34100nFC34100nF

LED4LEDLED4LED

C117100nFC117100nF

R123

56K

R123

56K

R14639KR14639K

C37100nC37100n

R16100KR16100K

C6110uFC6110uF

R65100RR65100R

R64180KR64180K

R97

10K

R97

10K

C59100nF

C59100nF

R98

20K

R98

20K

C30100nFC30

100nF

+

-

U106B

TL082

+

-

U106B

TL082

5

67

84

C113100nC113100n

R200

?

R200

?

R140

56K

R140

56K

R691K

R691K

R87100KR87100K

C27100nC27100n

C42.22uF

C42.22uF

C40470nF C40470nF

R116100KR116100K

C68200pFC68200pF

C41

470nF

C41

470nF

R40

56K

R40

56K

R59100KR59100K

R165100RR165100R

R1501KR1501K

U109B

ADG211A

U109B

ADG211A

D15IN16

S14

C129100nC129100n

LK104LK104

C26

100p

C26

100p

C2510nC2510n

+

-

U11B

TL082

+

-

U11B

TL0825

67

84

Q2ZTX450

Q2ZTX450

R10939KR10939K

R2

1M

R2

1M

+

-

U3

LM311

+

-

U3

LM311

2

37

84 1

6 5

C119100nFC119100nF

LK4LK4

+

-

U11A

TL082

+

-

U11A

TL082

3

21

84

R53560RR53560R

C72

200nF

C72

200nF

C1151nFC1151nF

R164180KR164180K

R117

560k

R117

560k

+

-

U101

LM311

+

-

U101

LM311

2

37

84 1

6 5

JP8_2JP8_2

12

C28

10uF

C28

10uF

R18

SOT

R18

SOT

C135

100nF

C135

100nF

+

-

U10B

TL082

+

-

U10B

TL0825

67

84

C124100nFC124100nF

C111

100p

C111

100p

LK9LK9

R38

47K

R38

47K

R100

10K

R100

10K

TP102TP102

1

R91

43K

R91

43K

C52200pFC52200pF

R11182kR11182k

C43.22uF

C43.22uF

+

-

U110B

TL082

+

-

U110B

TL0825

67

84

U9B

ADG211A

U9B

ADG211A

D15IN16

S14

C102100nFC102100nF

Q103

ZTX450

Q103

ZTX450

R23

56K

R23

56K

R89

20K

R89

20K

R144

100K

R144

100K

R30

270K

R30

270K

C8100nC8100n

C151nFC151nF

C125

10n

C125

10n

LK108LK108

R147

100K

R147

100K

R3982kR3982k

R160560RR160560R

JP4JP4

12345678910

R1554K7R1554K7

C120470nC120470n

TP8TP8

1

R561KR561K

R11910K

R11910K

R11010KR11010K

C29100nC29100n

R102

1M

R102

1M

C22100nFC22100nF

C7100nC7100n

JP101JP101

1 2

D10210VD10210V

+

-

U8

L165

+

-

U8

L165

1

24

35

R8

10k

R8

10k

LK102LK102

R80

470R

R80

470R

TP11TP11

1

D8IN4001D8IN4001

R154

10K

R154

10K

+

-

U5B

TL082

+

-

U5B

TL0825

67

84

JP5JP5

1234

R121

100k

R121

100k

R1533KR1533K

R128SOTR128SOT

LK101LK101

R104

51K

R104

51K

R204

?

R204

?

R148

560K

R148

560K

D107D107

R12082KR12082K

R57

1K

R57

1K

R13210K

R13210K

RV1

10K

RV1

10KQ1ZTX450Q1ZTX450

C6710uFC6710uF

R1424K7R1424K7

C6410uFC6410uF

TP30TP30

1

R10

10K

R10

10K

R118SOTR118SOT

C35100nC35

100n

R153560RR153560R

U9A

ADG211A

U9A

ADG211A

D2IN1

S3

R125

10K

R125

10K

U109C

ADG211A

U109C

ADG211A

D10

IN9S

11

R554K7R554K7

+

-

U16D

LM324

+

-

U16D

LM324

12

1314

411

R3320KR3320K

C65100nFC65100nF

RV101

10K

RV101

10K

R158

100K

R158

100K

C36

100n

C36

100n

FS2FS2

C118100nFC118

100nF

TP10TP10

1

JP102JP102

1234

JP8_3JP8_3

12

R25

10K

R25

10K

+

-

U4

L165

+

-

U4

L165

1

24

35

D9IN4001D9IN4001

D11110VD11110V

JP8_4JP8_4

12

TP6TP6

1

R906K8R906K8

U13

Si7661

U13

Si7661

1

2

3

4 5

6

7

8

R201

?

R201

?

R126

470K

R126

470K

R1182kR1182k

C19100nFC19

100nF

LED3LED3

+

-

U16B

LM324

+

-

U16B

LM324

5

67

411

C56

200nF

C56

200nF

C62100nF

C62100nF

C114100nC114100n

R13982kR13982k

R105100KR105100K

R81

470R

R81

470R

R151

100K

R151

100K

+

-

U7B

TL082

+

-

U7B

TL082

5

67

84 R20

82KR2082K

R26

470K

R26

470K

LK8LK8

JP7JP7

12

C70100nFC70100nF

R13320KR13320K

R43

270K

R43

270K

D110vD110vLED5

LED

LED5

LED

+

-

U103

LM311

+

-

U103

LM311

2

37

84 1

6 5

LK7LK7

C14100nC14100n

+

-

U110A

TL082

+

-

U110A

TL0823

21

84

LK105LK105

R44

100K

R44

100K

C127100nC127100n

JP8_1JP8_1

12

LED102LED102

C106100nC106100n

R19

10K

R19

10K

C50

200pF

C50

200pF

U15

Si7661

U15

Si7661

1

2

3

4 5

6

7

8

C20470nC20470n

R122

10K

R122

10K

R13410KR13410K

C130100nFC130

100nF

R101

10K

R101

10K

R610KR610K

C2100nC2100n

TP5TP5

1

R141100RR141100R

R127

10K

R127

10K

R3210KR3210K

C6100nC6100n

+

-

U106A

TL082

+

-

U106A

TL082

3

21

84

LK2LK2

C23100nC23100n

C69200nFC69200nF

R4

51K

R4

51K

C11

100p

C11

100p

R114

51K

R114

51K

C16100nC16100n

C54100nFC54100nF

R701K

R701K

C107100nFC107100nF

C110nC110n

C12270pC12270p

D104D104

C55100nFC55100nF

JP2JP2

1234

D4D4

R88

2K2

R88

2K2

U109A

ADG211A

U109A

ADG211A

D2IN1

S3

C53200nFC53200nF

C143.22uFC143.22uF

LK106LK106

R143

270K

R143

270K

C31

470n

C31

470n

R3

27K

R3

27K

+

-

U107B

TL082

+

-

U107B

TL082

5

67

84

+

-

U108

L165

+

-

U108

L165

1

24

35

C6310uFC6310uF

RV102

10K

RV102

10K

R99

2K2

R99

2K2

C71100nFC71100nF

+

-

U16A

LM324

+

-

U16A

LM3243

21

411

R24

100R

R24

100R

R163100KR163100K

R1679K1R1679K1

Q101ZTX450

Q101ZTX450

C3100nC3100n

R85

10K

R85

10K

TP20TP20

1

R49

62K

R49

62K

C112270pC112270p

R16110KR16110K

R191

51K

R191

51K

C134100nFC134100nF

D108IN4001D108IN4001

R145270KR145270K

C13100nC13100n

LK6LK6

JP1JP1

1 2

C33100nFC33100nF

+

-

U16C

LM324

+

-

U16C

LM32410

98

411

LK1LK1

+

-

U104

L165

+

-

U104

L165

1

24

35

LED1LED1

D109IN4001D109IN4001

C24100nFC24100nF

TP110TP110

1

Q3ZTX450Q3ZTX450

C18100nFC18

100nF

R47

100K

R47

100K

R83

10K

R83

10K

R138

47K

R138

47K

R41100RR41100R

U109D

ADG211A

U109D

ADG211A

D7

IN8S

6

+

-

U5A

TL082

+

-

U5A

TL082

3

21

84

R96

10K

R96

10K

TP7TP7

1

R10610KR10610K

+

-

U6A

TL082

+

-

U6A

TL082

3

21

84

TP3TP3

1

C10100nC10100n

R149

62K

R149

62K

R739KR739K

C13810nC13810n

D10D10

R5100KR5100K

C51200pFC51200pF

R127.4KR127.4K

+

-

U105B

TL082

+

-

U105B

TL0825

67

84

R136

10K

R136

10K

+

-

U107A

TL082

+

-

U107A

TL0823

21

84

C6010nFC6010nF

REG1LM7815REG1LM7815

VI1

GN

D2

VO3

R11533KR11533K

C126100pC126100p

+

-

U105A

TL082

+

-

U105A

TL0823

21

84

R13510KR13510K

+

-

U7A

TL082

+

-

U7A

TL0823

21

84

R52

100K

R52

100K

LED101LED101

R28SOTR28SOT

FS101EFF0108

FS101EFF0108

R9510KR9510K

R31

47K

R31

47K

D6IN4001D6IN4001

R103

27K

R103

27K

R54

10K

R54

10K

C122100nFC122

100nF

R27

10K

R27

10K

C136C136

+

-

U6B

TL082

+

-

U6B

TL082

5

67

84

C58100nFC58100nF

R97.4KR97.4K

LK3LK3

R129

100R

R129

100R

R1451KR1451K

+

-

U10A

TL082

+

-

U10A

TL0823

21

84

C17100nC17

100n

R58

100K

R58

100K

C3810nC3810n

U12

Si7661

U12

Si7661

1

2

3

4 5

6

7

8

TP103TP103

1

C12810uF

+ C12810uF

+

C103100nFC103100nF

R501KR501K

FS1EFF0108FS1EFF0108

R29

100R

R29

100R

R1561KR1561K

R86

10K

R86

10K

TP1TP1

1

R162

62K

R162

62K

LK5LK5

C108100nC108100n

TP2TP2

1

R130

270K

R130

270K C142.22uF

C142.22uF

C5710uFC5710uF

5

5

4

4

3

3

2

2

1

1

D D

C C

B B

A A

Size DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology


02SE00B28100 Thursday, June 14, 2007

1 1

A1

AMU Wiring PLC 2003

\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\AMU WIRING 2005\DESIGN1.DSN

Thursday, August 18, 2005 J.R.MSize DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology



1 1

A1

AMU Wiring PLC 2003


Thursday, August 18, 2005 J.R.MSize DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology



1 1

A1

AMU Wiring PLC 2003


Thursday, August 18, 2005 J.R.M

C1 POSITION POT.

LK104

CONTROLLED BY PLC

a

ECC0056

GN

TWO FANS FITTED ON SENSE PCB COVERICP 380

ONE AIR FLOW IN, ONE AIR FLOW OUT

CCW

JP2

WH

EWB0027

THROUGH THE QUAZT TUNE

a

PC00S26875SE00B26874

RD

RD

SWAP RED AND GREEN

BU

2

FOR AIR CAPS WIREGN

WIRES AROUND.

SWAP RED AND GREEN

EWC0075

C1 PARK

JP6

RF ON SIGNAL

AS ABOVE.

RD

BU

RD

BU

NUMBERS ON

MOTOR +

MOTOR +

RD

INCR.GIAN SIGNAL

b

MANUAL

CW

MOTOR -

FOR AIR CAPS WIRE

BU

POSITION POT.RD

1

LK 6

PHASE & MAGNETUDE ERROR SIGNALS

RD

BU

MOTOR -

3

GN

RDBU

2GN

BU

WIRES AROUND.

RD

BU

NUMBERS ON

AS ABOVE.

POSITION POT.

FOR THE VACUUM CAPS

FOR THE VACUUM CAPS

USE EWB0027

a

1

BU

3

GN

PADDING CAPACITORS

OG

JP4

BU

BK

OG

CCW

MOTOR 1 CONNECTIONBN

EWB0027

AIR

CA

P

EXTERNAL PARK POTS.

a

VT

a

cDIFF.TUNE GAIN

CCW

BU

b

a

FAN 1 NOT FITTED ON ICP380

YE

JP7

GNC2 POSITION POT.

DC BIASvolt

BU

VTJP6 BK

FIRST ISSUE----

VA

C C

AP

GN

10

GN

ALL AIR VANE AMU'S TO BE FITTED WITH 2 X 180pF ACROSS C1

8

SEE MD00D21243

7

FAN1 +BUFAN1 -

LK 1

EXTERNAL INTERFACE

PK

RD

USE EWB0027

75m

m

CU TUBE 1/4"

RD

a

18 TURNS

LK 2

RF IN, 'N' TYPE

18 TURNS

BASIC CABLE LAYOUT.

C1 POSITION

6

10

BLUE PLCSW1 NOT REQUIREDENSURE LK1 FITTED

RF OUT TO AMU

CW

LOAD COIL

EWM0002

YE

VT

EWM0002

EWC0075

C1 POSITION POT.

BU

9

EWM0002

EWM0004

EWM0004

RD

b


11

BU

PHASE COIL

10

JP102

SEE MD00D21242

BN

OG

LK 3

PANEL/PLC CONTR.

a

EWM0108

GN

RD

ALL VAC CAP AMU'S NO PADDING CAPS FITTED

EWM0108

BU MA00Z26876

CONNECT TO

FEED THROUGH CAPS

YE

VT

RD

VT

JP4 ON 2ND AMU

BU

RD

VAC CAP SET UP POSISTIONS (AMU TEST)

RIE/DP - C1 & C2, 1 TURN FROM MAXIMUMICP 180/65 AND ION BEAM - C1&2, 1 TURN FROM MINIMUM,

FAN 2 ONLY FOR ICP180/65

SECURE CABLE TO SUPPORT PILLARS WITH 'P' CLIPS

YE

GN

JP101

ECC0834

AUTOOG

MOTOR 2 CONNECTION

GN

PK

a

CW

LO

W P

WR

THROUGH THE QUAZT TUNE

CW

RD

BN

JP1

BN

ICP380 - C1, 1 TURN FROM MAXIMUM, C2, 7 TURN FROM MINIMUM

TO PIN 5A MA00Z26873

PLASMA AMU LAYOUT FOR ICP SYSTEM

PEAK TO PEAK volt

RF TO ELECTRODE

DO NOT FIT DC COIL

FOR DP SYSTEMa

a

WH

b

SE00D26871

PC00S26872

MA00Z26873

a

BN

MOTOR 2 CONNECTION

EWM0112

CONNECT TOCONNECT TO

PKCCW

a

GNBU

TO PIN 10 MA00Z26873

BK

LK105

INCR.GIAN SIGNAL

+24V SUPPLY

VA

C C

AP

LK 4

WH

a

b

VT

2ND AMU

b

14

RD

EWM0108

BU

JP4

LK 7

a

SCREEN

C2 PARK

VT

b

a

MOTOR 1 CONNECTION

PK

a

a

ONLY FIT FOR

DIFF.TUNE GAIN

JP1

(10 way header)

BU

WH

a

RD

a

b

RD

a

b

LK106

RD

ASSY. MA00Z26876

BLACK PLC

PLASMA AMU LAYOUT FOR DP/RIE SYSTEM

SE00C20154

CONTROLLED BY PLC

BK

RF IN

GN

a

SW1 REQUIRED

BK

a

YE

BLACK PLC WIRED AS BELOW

a

AUTOMATCH CONTROL PANEL.

LK102

ENSURE LK1 IS NOT FITTED

1

2

3

BLUE PLC, AMU CONTROL PANEL NOT REQUIRED

4

SEE MA00D23007

EWM0112

TIGHTLY WOUND WITH MAXIMUM No TURNS OFENAMELLED WIRE EWB0027 BETWEEN ENTRANCEAND EXIT HOLES

WITH A SOLDER TAG

RF TO ION SOURCE

VT

a

CONNECT TO THE RF COIL

TP5 TP15

a

LK107

JP5

RD

a

PANEL MOUNT

BU

JP3

C2 POSITION

YE

RD

2

3

1

1

2

3

YE

SEE SYSTEMWIRINGDIAGRAMS

PANEL MOUNT

CORE

RD

15CM ION SOURCE AMU LAYOUT

RD

BU

a

K.L.W

BU

PANEL/PLC CONTR.

a

JP6 ON 2ND AMU

GN

FAN 2 FITTEDIF ICP180/65

C2 PARK

01 22/03/05

EWM0002 RDBU FAN 2-

FAN 2+

RDBU

GN

b POS. FOR TESTING ONLY

ICP

380

FAN 3 & 4 ONLY FITTEDWITH BLACK PLC AND OLDENCLOSURES

FAN 3

FAN 4

LIN

K

SCREEN

RDYE

YE

BU

RF IN

BU

RD

YE

JP2

YE

1: DC BIAS VOLT

GN

2: DC PEAK TO PEAK VOLT


C2 POSITION POT.

a

aa

RD

C1 PARK

BK

YE

c

YE

YERDGN

b

LK 8

BN

a

BU

TWIST ANDSLEEVE

TO PIN 5B MA00Z26873

BK

(12 way header)

RF ON SIGNAL

LK101

BK

CONNECT TO

RD

+24V SUPPLY

BU

BN

GN

RF IN

LK108

BN

LK 5

LK 9 P-P GAIN OFF OFF OFF

02

SW1

EST3503

SW1

EST3503

123456789101112

C5C5

JP101JP101

12

C2C2

JP8B3JP8B3

12

12345678

RV3

100K

RV3

100K

PADDING C1PADDING C1

C6C6

C1 PADDERS1C1 PADDERS1

JP8DJP8D

1 2

123456789

101112

JP1JP1

123

DC BIAS COILDC BIAS COIL

C2 PADDERSC2 PADDERS

123456789

10

JP8AJP8A

1 2

JP9JP9

1234

123456789101112

EE

5pF5

4KV

5pF5

4KV JP102JP102

1234

JP5JP5

123

C3C3

JP8A3JP8A3

JP6JP6

123

JP10JP10

12

JP14JP14

1234

C4C4

JP16JP16

123456789101112

C2 PADDERS1C2 PADDERS1

JP3JP3123456

JP2JP2

12345678

COIL1COIL1

COILCOIL

RV2

100K

RV2

100K

C1C1

ORSCREEN CABLE USING P CLIPOR TO CABLE SHELL

EWT2120C - 3.0mm TO 3.5mmEWT2122C - 5.0mm TO 5.5mmEWT2123C - 8.0mm TO 8.5mm

IF A PLASTIC P CLIP IS USED COPPER TAPEIS REQUIRED TO LINE INSIDE OF CLIP

EMC1

ORSCREEN CABLE USING P CLIPOR TO CABLE SHELL

EWT2120C - 3.0mm TO 3.5mmEWT2122C - 5.0mm TO 5.5mmEWT2123C - 8.0mm TO 8.5mm

IF A PLASTIC P CLIP IS USED COPPER TAPEIS REQUIRED TO LINE INSIDE OF CLIP

EMC1

C1 PADDERSC1 PADDERS

DD

JP7JP712

JP4JP4

12345678

JP8CJP8C

12

BK

BU

GN

GY

OG

RD

VT

WH

YE

VIOLET

WHITE

YELLOW

ORANGE

GREEN

BROWN

BLACK

BLUE

GREY

RED

BN

COLOUR CHART

BK

BU

GN

GY

OG

RD

VT

WH

YE

VIOLET

WHITE

YELLOW

ORANGE

GREEN

BROWN

BLACK

BLUE

GREY

RED

BN

COLOUR CHART

JP12JP12

123

JP6JP6

123

5pF

4KV

5pF

4KV

JP8C4JP8C4

5pF4

4KV

5pF4

4KV

12345678

PK

TQ TURQUOISE

PINKPK

TQ TURQUOISE

PINK

JP13JP13

123

COIL2COIL2

JP8A4JP8A4

JP11JP11

123456789101112

JP15JP15

12345678910

12345678

JP8JP8

123456789

101112

123456789

101112

PADDING CPADDING C

5pF3

4KV

5pF3

4KV

JP8B4JP8B4

5

5

4

4

3

3

2

2

1

1

D D

C C

B B

A A

Size DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology


02SE00D26871 Wednesday, October 17, 2007

1 1

A3

AMU SENSE PCB

\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\PCBS\AMU_PCB_DEV\SENSE_PCB_REV02\SENSE_

Tuesday, September 02, 2003 KLWSize DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology



1 1

A3

AMU SENSE PCB


Tuesday, September 02, 2003 KLWSize DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology



1 1

A3

AMU SENSE PCB


Tuesday, September 02, 2003 KLW

PCB No: PC00S26872

1mm TERMINAL PINS

clearance for this pin (2 KV)

39R 2W

PCB ASSY: MA00Z26873

1KV=4.67V

PHASE & MAGNITUDE PCB.

SEE PIN OUT PCB

NOTE:ALL TRIANGLE GND=GROUND PLANE

SEE PIN OUT

1mm TERMINAL PINS

PCB

LOAD

PHASE

C10:100pF (RS495-745)

01 28-07-04 ---- FIRST ISSUE

DEB

02 REF ECO - CIRCUIT UNCHANGED-PAD CLEARENCE EARTH PLAIN-JUNCTION R18 TO TP5 INCREASED

REV02

TP1TPTP1TP

R20

10K

R20

10K

R19

82K

R19

82K

R6

10K

R6

10K

D2

1N5711

D2

1N5711

R9 47RR9 47R

R1147R2W

R1147R2W

R7 47RR7 47R

TP3TPTP3TP

R1

10K

R1

10K

TP5TPTP5TP

R1747R2W

R1747R2W

JP3JP3

123

TP11TPTP11TP

C810nFC810nF

R10

10K

R10

10K

C11nFC11nF

R4 47RR4 47R

LK1

LINK

LK1

LINK

R3 47RR3 47R

C310nFC310nF

R5R5

R14

10K

R14

10K

D1

1N5711

D1

1N5711

TP9TPTP9TP

TP2TPTP2TP

C6

100nF

C6

100nF

C410nFC410nF

D5

1N5711

D5

1N5711

R1347R2W

R1347R2W

C5100nF

C5100nF

C?100pF

C?100pF

TP4TPTP4TP

R1247R2W

R1247R2W

TP15TPTP15TP

C9

2000nF

C9

2000nF

R2 47RR2 47R

JP2JP2

123

JP1JP1

123

R15

4K7

R15

4K7

D3

1N5711

D3

1N5711

C11470nFC11470nF

C710nFC710nF

TP7TPTP7TP

TP10TPTP10TP

C21nFC21nF

R18

820K2W

R18

820K2W

R8 47RR8 47R

D4

1N5711

D4

1N5711

R16

180K

R16

180K

TP6TPTP6TP

C10100pFC10100pF

TP14TPTP14TP

TP8TPTP8TP

D6

1N5711

D6

1N5711

5

5

4

4

3

3

2

2

1

1

D D

C C

B B

A A

SIGN8

SIGN1SIGN2SIGN3SIGN4SIGN5SIGN6SIGN7

SIGN1SIGN2

SIGN3SIGN4

SIGN5SIGN6

SIGN7SIGN8

SIGN[1..8]

Size DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology


01SE00D27872 Friday, May 20, 2005

1 1

A3

ANALOGUE CARD INTERFACE SCH

\\UKPTSERVER03\ELECTRICAL DRAWINGS\DRAWINGS\BLUE 80\ANALOGUE INTERFACE\DESIGN2.DSN

Tuesday, February 15, 2005 KLWSize DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology


01SE00D27872 Friday, May 20, 2005

1 1

A3



Tuesday, February 15, 2005 KLWSize DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology


01SE00D27872 Friday, May 20, 2005

1 1

A3



Tuesday, February 15, 2005 KLW

01 21/02/05 ---- FIRST ISSUE

80mm

18mm

J1

SK

T1

PCB = 94-PC00S27873ASSY = 94-MA00Z27874

94-PC00S27873

JRM

Weidmuller Part # 4286340000

Farnell Part # 430-0801

1

SKT1SKT1

123456789

101112

J1J1

12345678

0

PL16

CB14

SKT17

EPS0114

1

2

GND

CB7

J27/PC91S21083

1

2

RELAY 2

12

34

CB11

CB2

CB13

SK11B

1

2

3

4

5

6

7

CB5

CB6

SKT

1

2

3

4

5

6

J12

1

2

3

4

5

6

7

8

RL3

1

3

5

6 7

8

10

12- +

J15

ON/OFF

1

2

3

4

5

6

L3'

SKT16

1

2

E

SK14/RSP

5

9

4

8

3

7

2

6

1

00

K1

CONTACTOR 3+1

1 2

3

5

13

81 82

14

6

4

SK15/RSP

A

B

C

D

E

F

G

H

J

K

L

M

CB12

F2

CB15

J16

EMO IN

1

2

3

4

PL10A

EPP0013

1

2

3

GND

F3

CB1

1

2

CB3

F3

CB16

L3

K4

12

3

5

13

A1A2

14

6

4

N

CB9

F1

N1

PL

1

2

3

4

5

6

SKT10A

EPS0013

1

2

3

GND

1

2

PLG12/RSP

A

B

C

D

SKT9

EPS0016

1

2

3

4

5

6

GND

CB10

PL9

EPP0016

1

2

3

4

5

6

GND

POWER BOX

5

9

4

8

3

7

2

6

1

00

PL10

CB8 / 15

PLG13

A

B

C

D

K4

12

3

5

13

A1A2

14

6

4

CB8

SKT10

1

2

J13

1

2

3

4

SK7/FSP

A

B

C

D

PL17

EPP0114

1

2

GND

F2

L2'

SK8/FSP

A

B

C

D

CB4

L2

J14

1

2

3

4

5

6

Spare #

J17

PUMPS

1

2

3

4

5

6

7

8

1

2

L1'

D6

F1

L1

DK.BU/0.5/35

DK.BU/0.5/17

DK.BU/0.5/18

DK.BU/0.5/20

24v

DK.BU/0.5/34,16

24vDK.BU/0.5/35

24vDK.BU/0.5/18DK.BU/0.5/13,16

24v

DK.BU/0.5/34,19

DK.BU/0.5/17DK.BU/0.5/19,32

DK.BU/0.5/24

DK.BU/0.5/20 DK.BU/0.5/23

WH/BU/0.5/15,14DK.BU/0.5/22

DK.BU/0.5/21

WH/BU/0.5/15,39

DK.BU/0.5/24

DK.BU/0.5/22

YE/0.5/5

RD/0.5/1 RD/0.5/2

WH/BU/0.5/3 WH/BU/0.5/3

YE/0.5/4

DK.BU/1.0/9

DK.BU/0.5/11

DK.BU/1.0/129

DK.BU/0.5/13

24v24v 24v

WH/BU/1.0/10

WH/BU/0.5/12-26

WH/BU/1.0/100

BK/2.5/83

BU/G9

BROWN

DK.BU/0.5/33-32

BLUE

DK.BU/1.0/28

RD/0.5/20

WH/BU/0.5/3

YE/0.5/40

DK.BU/0.5/30

DK.BU/0.5/29

DK.BU/0.5/37

RD/0.5/20

WH/BU/0.5/3

DK.BU/0.5/6

YE/0.5/40

WH/BU/0.5/3 WH/BU/0.5/3

DK.BU/0.5/7

24v

YE/0.5/5

RD/0.5/1

DK.BU/0.5/8

YE/0.5/4

RD/0.5/2

53 DK.BU/1/28-38

DK.BU/1.0/9

24v

DK.BU/0.5/11

DK.BU/0.5/27DK.BU/1.0/129 54

WH/BU/1.0/10

DK.BU/0.5/13

WH/BU/1.0/100

WH/BU/0.5/12-26

DK.BU/0.5/30

DK.BU/0.5/29

63 DK.BU/0.5/3164

BN/G9 BK/2.5/82

24v

RD/0.5/2

WH/BU/1.0/10

DK.BU/0.5/33 DK.BU/0.5/7

74 73 RD/0.5/20

WH/BU/0.5/85

DK.BU/0.5/87

DK.BU/0.5/86

24v 84 83 YE/0.5/40YE/0.5/4 DK.BU/0.5/31

WH/BU/1.0/100

DK.BU/1.0/38

DK.BU/0.5/8

DK.BU/0.5/36

24vDK.BU/0.5/6

DK.BU/0.5/11WH/BU/0.5/39

DK.BU/0.5/36

GN-YE/1.0

BU/1.0/54

DK.BU/0.5/27-25WH/BU/0.5/12-14

WH/BU/0.5/32

DK.BU/0.5/333

WH/BU/0.5/26

DK.BU/0.5/25

DK.BU/0.5/37

DK.BU/0.5/23

DK.BU/0.5/21

24v

BK2

BK3

2W Q/M

15+

PHASE 1

BK1

PHASE 3

T2

97

BK2

GN/YE

VAT VALVE APC

STUD REAR

14

K7

4 METERS EWM2404

RF GENERATOR - RIE/PECVD

K

CB 13

2A mp

DK.BU/.5/41

PHASE 2

V

BU/.75

1.5mm

EARTH

HEATER TABLE

2

TO EARTH

BUS BAR

1

4

BN

3

TURBO

GN/YE/2.5/G3

a

BK2

24 V CH B

ALARM

BU

BU/00/G1

BK/10/1

TO K4 PIN A1

CB 5

95

GN

K8:EGB3022

BK2

PIN 1 (E)

4A

3

VT

SEE NOTE 7.

GN/YE/10/42

EWM1503

4

0v

EPP7003

4C

A1

N

N/O

BU

AUXILLARY CONTACTOR

13

CB

3

RD

TO NEUTRAL BUSBAR

96

EWM0603

GN/YE/G6

1

OVERLOAD 2

BK/10/52

5

PHASE 2

1.5mm

BN/00/G6

A2

a

97

BK 1

TEMPERATURE CONTROLLER

SEE CB 15 CHILLER &

HEATED TURBO BK VALVE

SERVICE PANEL

PUMPDOWN HEATER / TURBO

COLLAR

BU

MOUNT K8 NEXT TO K4

BK3

GREEN/YELLOW

CONTACTOR

PHASE 2

PHASE 2

400V

6

EARTH BUS BAR

EWM1805

GN/YE/2.5SUPPLY

4 METERS EWM2404

5

F

K3

A

GN/YE/10

BU/00/G2

BK/1.5/93

LAMBDA

MODEL No:PU200-37-1C

PIN4

BK1

CHAMBER HEAT

1A

CB 15

NOTE:

IF SYSTEM FITTED WITH ICP F3 = 5 AMP

IF SYSTEM FITTED WITH CRYO TABLE F3 = 5 AMP

IF SYSTEM FITTED WITH 2 AMU

(2nd AMU VACUUM CAP) F3 = 5 AMP

1

CHILLER /


WHEN CB 8 USED

95

N/O

N/C

BK/2.5/79

96

4

A2

BK/1.5/90

L

2

230V AC

(LABEL)

A1

6

3

BK/10/2

GN

95

NEUTRAL

EGT0059

13

EMO O/P

K1

BU

RD

GLAND ON THE

2

VT

SEE NOTE 5.

BK/1.5/94

DK.BU/0.5/110

PHASE 1

98

PUMP 3

WH/BU/0.5/32

TEMPERATURE CONT'

4

24V

BK/2.5/96

K2

2

GN-YE/.75

97

BK/10/47

PC91S21083

WH

WH/BU/1.0

LINK

B

BK

RD

98

WH/BU/0.5/103

RD DK.BU/.5/41

208V

BK/1.0/70

TURBO

USE WHITE

SPIRAL WRAP

PL

4

2W Q/M

BK

SKT

FAN MOUNTED ON THE BACK PANEL

FAN MOUNTED TO SUPPLY AIR

YE

4.

A

K3

DK.BU/0.5/07

SYSTEM OFF

5Amp

NEUTRAL

2A mp

1A2 Amp

A1

EQUIPMENT

SWITCH

A1

SEE CONTROL WIRING1C

1B

N/C

SYSTEM ON

HEATER

TABLE

T1

+15V

0V

0V

0V

-15V

+24

PUMP OIL/FILTER

BK/2.5/62

24v

13

WH/BU/0.5

EXP1524

0v

PL

WH

0v FAN

PIN7

RD

WH/BU/0.5/111

N/O

EWM0008

3 WAY AMP

L1

YE

FREE SKT & SHELLCIRCUIT

BK

PUMP 1

A2

PHASE 1

BK 3

EMO 24v

OVERLOAD 3

14

FIT FOR ALL HEATED VALVE SYSTEMS

-15v

N/C

A1

EMO I/P

8.

VACUUM SW IS MADE

6

14

PHASE 1

50B

CB 11

GN-YE/1.5/176

DYRVAC 50P 415V 50HZ 5.5A

UNIT

GREEN/YELLOW

TO MATCH MAINS

SEE NOTE # 8

SEE NOTE # 8

A1

(BLOWER)

GN/YE/2.5/G5

A

3

0v

PIN 3 (N)

2

1

PHASE 2

96

3

97

98

EGB0054

HEATER/CHILLER

BLACK

BK4

GN/YE 1.0mm

EGT0058

WH

b

13

ISOLATE UNUSED CORES

96

ISOLATE UNUSED CORES

BU

A1A2

BK/10/45

IEC SOCKET

MD81C19435

BK/1.5/74

6

BK/2.5/201

2

NEUTRAL

A1

1C

4

BK/2.5/76

BU/00/G6

E

BREAKER

3 PHASE LINE FILTER

MAKE : PROTEK

PIN6

A1

CHAMBER PUMP 2 /

LOADLOCK PUMP

14

EPS7003

BN/00/G3

BK1/00/G2

PUMP FAIL

5

2

BN

BK1

TO EARTH

BUS BAR.

PHASE 3

98

5

95

PHASE 1

WH/BU/0.5/103

6

13

4

BU

BU

TYPE OF PUMP

NEUTRAL

BK

SEE CONTROL WIRING

4

A2


GN-YE/2.5/102

4 METERS EWM1304

PL14

4

SWITCH

3

13

5

RATING

BN

CONNECTION

HEAT

FORELINE TRAP

HEATER

BK2/G2

TO EARTH BUS

BAR

N

PHASE 3

1

BU

PUMP ON

EXP2415

6

RD

4

EGB2032 FOR STANDARD SYSTEM

PSU

96

14

EWM0008

K8

6

A1

EMO 2

4C

b

BK/10/49

PUMP 3 START

SUPPLIED WITH UNIT

6

3

ELS0043for 3000W Generator

3

MAIN IN

2

L

+24V DC WHEN THE

4 METERS EWM1007

5

0v

FOR DRYVAC 25B

1

EWK2532

GREEN/YELLOW

GN/YE

400V

PHASE 1

* DEPENDANT ON TYPE OF PUMP SUPPLIED, SEE OEM MANUAL

FREE PLG & SHELL

PHASE 1

PHASE 2

GN

EARTH

N

BK3

GN/YE

2

BK/2.5/062

400V

PHASE 1

EFM1610

PHASE 2

N

BK3

6

PHASE 2

BK1

5

14

208V

WIRE TO NEUTRAL

BUS BAR

BU

PHASE 3

BK3/G2

E

EFI1050

BN/1.5/178

IF PUMP3 REQUIRED

0v

BK2

SUPPLIED WITH UNIT

1A

BK2

6

BK3

A1

BK/1.5/73

YELLOW RING CRIMPS

6.

PHASE 1

BK1

BK3

N

GREEN/YELLOW

98

GREEN/YELLOW

BK/10/3

PHASE 3

BK2

WH

BN/00/G4

GN/YE

BK3

4

1

BK/2.5/80

4

EGB3022

PHASE 2

6

A2

4

GN/YE/2.5

BK1

208V

PHASE 2

L

BU/00/G2

4A

98

PHASE 3

ELS0043 for 3000W Generator

YELLOW RING CRIMPS

2

GN

EWK1825

OPTION FOR EDWARDS DRYSTAR IQDP 80

AND ALCATEL ADS602 DRY PUMP

A2

1

0v

PIN9

CB 10


FOR OPTIONAL

IEC SOCKET

B

CB 4

97

CB 1

CB 3

BK2

K2 Pin 2

AUX/LF GEN

GN/YE/6.0/105

ON O/P

CHAMBER TURBO

SUPPLIED WITH UNIT

A2

13

BU

BK3

PHASE 1

K1

PHASE 3

BK1

PHASE 3

O/LOAD

RF GENERATOR

WH/BU/0.5mm

SKT

K2 Pin 4

OPTION FOR

BK2

GN/YE

A1

TO NEUTRAL

BUS BAR

GN/YE/2.5/G2

SEE NOTE 7.

GREEN/YELLOW

BU

SUPPLIED WITH UNIT

YE

YE

5

95

13

2

2

MAIN IN

5

2

BU/2.5/84

YE-GN

STUD TOP COVER

D.C. VOLTS WIRING

PHASE 1

BK2

BK/2.5/81

BU/00/G10

GN/YE

BK

1

95

4B

24V FAN

BK1

PUMP 1 FAULT

YE

EFM1606

ICP RF GEN

4

BK

K6:EGT0058

5


PUMP 1

BK/10/44

RF GEN 2 / LF GEN 1

EGB3022

3

2

BLACK 1

EARTH CONNECTED

TO VALVE BODY

GN/YE/1.0mm

SPARE / LOADLOCK or TRANSFER

TURBO / FORELINE HEATER

SEE NOTE 7.

C

EARTH BUS BAR

1

BROWN

13

PSU

SYSTEM ON/OFF

4

RD

BN/00/G5

EGB3022

6

CONTROL WIRING

2

BK/10/51

YE-GN

EARTH BUS BAR

GN/YE

LAMP

BK/00/G10

CB 6

2 Amp

2

WH

A1

OVERLOAD 1

K2

PHASE 3

95

13

BK

BK/10/48

96

HF GEN

BLACK

14

13

6

BK2/00/G2

EARTH BUS BAR

PHASE 2

400V

PHASE 3

RD

BN/.75

BK/10/43

A2

BK/1.5/72

BU/00/G4

CB 14

E.C.R.

13

OG

CB 2

CB 7

3

C

CONTACTOR WITH FITTED OVERLOAD


OPTION FOR

B

A1

GN-YE/2.5/100

BK/1.0/71

14

2.

CB 12

A1

EWK2532

3

LAMP

K4

PUMP 2 COIL 24v

A2

CRYO TABLE 200 C

TEMPERTARE

15-

PUMP 2 ON

K3

RD

3

EGB2052 FOR 180 ICP SYS (EXCEPT HFV8000)

L/LOCK TURBO/FORELINE HEATER

PANEL

BK/2.5/77

HEATER CONTROL

2

PHASE 1

PHASE 3

TO NEUTRAL

BUS BAR.

K2 Pin 6

OV

BK/10/53

6

CHAMBER PUMP 1 (*ROTARY)

OR I.C.P.

3

A

1

BLACK

DK.BU/0.5mm

PHASE 1

CB 9

3.

EARTH

ICP 180 SYS

GN/YE/2.5/G1

BK/2.5/200BK/10/46

CHAMBERS HEATERS

BK/2.5/162

BLACK 4

CRYO TABLE 400 C

2

14

A2

5

PIN5

98

2

6

(NOTE 5)

BK 2

97 1

EWM1805

2.5 METERS EWM5205

PIN 2 (L)

GN-YE/1.0/169

OG

NOTES.

K6

2

NOTE:

IF SYSTEM FITTED WITH

ALCATEL ADS602 FIT

EFM1620 = CB12

EGB2032 = K2

REF. DRG. No.SE00D23969 2/3

RD

PUMP 2

PHASE 3

6

(NOTE3)

BU

LAMP

5

BK/1.0/50

A1

PUMP 2 FAULT

N

6

6

EFM1606

RF GENERATOR - ICP

OPTION FOR

RF GEN 1

BU

BLACK

2

TO K4 PIN A2

BK/1.5/92

EWM0603

1B

RD

PSU:24V:+/-15V

PHASE 3

BLACK 3



A2

7.

CB 8

EARTH

4

NEUTRAL BUS BAR

+/-15V

BU/10/4

LEYBOLD DRYPUMP

6

1.5mm

RD

1

1

A2

BU/1.0/168

BK

WIRE O

DK.BU/0.5/110

5.

2

GN-YE/1.5/102

EARTH BUS BAR

14

3.5Amp

5

496

PHASE 2

GN/YE/00/G7

K6

A2

LAMP

A2

EARTH

EARTH

6 W Q/M

A2

BK/1.5/95

N/C E

BK/2.5/62

97

PUMP 1 ON

N

5 METERS EWM5205

BK/1.0/69

DK.BU/.5/41

BK

SERVICES PANEL

BK/2.5/202

APC/VAT

WIRE TO EARTH

BUS BAR

A.P.C.

VAT

PROTECTIVE COVER

0v

4

BN/00/G7

BK/2.5/162

BK1/G2

BK/1.5/91

PHASE 1

ON I/P

DK.BU/0.5/333

PIN4

ON SWITCH 24v N/O

EWM0012

BK1

BK3


BU/00/G5

N/O

USE WHITE

SPIRAL

WRAP

TABLE HEATER ELEMENT - 400 C

GN-YE/1.5/101

1.

EGT0058

EARTH BUS BAR

GN/YE/2.5/G4

YE

BLACK 2

RD

GN/YE/6.0/106

BU/1.5/177

PUMPDOWN HEAT

BK/2.5/97

6

LOADLOCK

4

FIT MAINS WIRING

4

ICP OPTION

BLUE (HEATSHRINK BOTH ENDS BLACK)

H

PHASE 3

1

EMO 1

+15v

3

WH

14

BU/10/41

CONTROLLER

K2:EGT0058

1B

GN/YE

ELS0040for 3000W Generator

400V

PHASE 1

PHASE 2

N

FROM SW 1

14

PUMP 1 COIL 24v

BK3

BN

BK

4

GN

4

4-6A

PHASE 2

BK1

208V

GN

BU/00/G7

NEUTRAL BUS BAR

PHASE 3

PHASE 2

BU/00/G3

BK3/00/G2

BK/00/G1

K5

G/VAC/VLV/840 (NW40)

IDENT LIVE AND NEUTRAL WIRES

WITH HEAT SHRINK IDENTS (L&N)

HEATED BACKING VALVE

TO BE WIRED IN PARALLEL

RD

RD

RD

RD

K5-MONITOR

DK.BU/0.5/89

WH/BU/0.5/107

DK.BU/0.5/88


1A0

PLASMA TECHNOLOGYANGLE

X.XX

X.X

X

Issue Date ECN Modification DrawnZone

2345

A

B

C

D

JRM KW 19.04.2005

100 PLUS POWER BOX

3 PHASE 400V SUPPLY

SE91A19752

1 OF 222

1:1

mm

20 19.08.09 26114 K5 WIRING AMENDED AS WIRE 89 WAS SHOWN IN TWO PLACES J.R.M P.J.M

21 06.01.10 28862 REFORMATED TO AUTOCAD. K4 CONTACT ADDED IN SERIES WITH K5 COIL J.B.W. J.R.M.

95

6 5

BK/1.5/90

13

2

96

97

98

4

1

IF PUMP3 REQUIRED

2

A1

SEE NOTE 7.

3

K6

6

A2

BK/1.5/92

FIT MAINS WIRING

14

4

PL10A

EPP0013

1

2

3

GND

SKT10A

EPS0013

1

2

3

GND

BK/1.5/93

BK/1.5/94

EARTH BUS BAR

GN-YE/1.5/101

CB13

TO NEUTRAL

BUS BAR

MAIN BUS BAR

4.0 METERS 94-EWM0603

BLUE

GREEN/YELLOW

BROWN

PUMP3 - LOADLOCK (SINGLE PHASE 230V)

GN-YE/1.5/101

BU/00/095

EGT0031 = OL2

SKT16

BN/2.5/96

GN-YE/2.5/100

BU/2.5/99

CB8 / 15

3

PL16

1

2

E

2

YE-GN

1

33

1ph 230VAC SUPPLY

3ph 400VAC SUPPLY

3ph 400VAC SUPPLY

1ph 230VAC SUPPLY

CHILLER REQUIRES

CHILLER REQUIRES

CHILLER REQUIRES

MACHINE SUPPLY

BK/2.5/98

NEUTRAL BUSBAR

CONNECT TO

TO MAINS

CONNECT

BUSBAR

TO MAINS

CONNECT

BUSBAR

FOR COMPONENT RATINGS

REFER TO POWER BOX CRIB

SHEET STORED ON EDMS

SYSTEM DOC NO. ED33975

NEUTRAL BUS BAR

44 4

BK/2.5/99

NEUTRAL BUSBAR

CONNECT TO

SEE NOTE # 8

AND WIRE PLG/SKT

PLEASE SELECT

POWER SUPPLY

PIN TO PIN5 TO ENSURE

PLEASE ADD CODING

CHILLER IS CONNECTED

TO CORRECT OUTLET

3 P

HA

SE

BU

S B

AR

TO NEUTRAL

BUS BAR.

TO NEUTRAL

BUS BAR.

TO NEUTRAL

BUS BAR.

TO NEUTRAL

BUS BAR.

TO NEUTRAL

BUS BAR.

TO NEUTRAL

BUS BAR.

TO NEUTRAL

BUS BAR.

TO EARTH

BUS BAR.

TO EARTH

BUS BAR.

TO EARTH

BUS BAR.

TO EARTH

BUS BAR.

TO EARTH

BUS BAR.

TO EARTH

BUS BAR.

GN/YE/2.5/G10TO EARTH

BUS BAR.

TO NEUTRAL

BUS BAR.

TO EARTH

BUS BAR.

GN-YE/2.5/G2

MAIN MACHINE BREAKER

SW1

Current Switch

+1

-2

Over

Current

Sw itch

2A 2 0A

TO PL12

TWICE THRU

B

RD

EWM0002

BK/2.5/78

MIN.

SETTING

BU

SET POT TO

TO BE COILED

BK/2.5/78

SW1

IF LOADLOCK PUMP

SINGLE PHASE REFER

TO WIRING CHANGE

ON LEFT OF PAGE

FIT EZB0011 TO UN-INSULATED PINS

USE A SECOND 6W BUSBAR TOBRIDGE THE 2 FITTEDBUSBAR(S)

WHICH REQUIRES

3 PHASE 208V

RF GENERATOR

OPTION FOR

WHICH REQUIRES

3 PHASE 208V

FORLINE

TRAP

HEATER

FEMALE INSERT - EPS0306

CODING PIN (CP) - EPT3040

2.5mmsq FEMALE PIN - EPT0240

EMC CHASSIS MOUNT - EPS1306

IF FORELINE HEATER

SYSTEM BK H/SHRINK

NEUTRAL CONNECT

TO TWIN CB VIA K7

CONTROL DETAILED ON

DRG # SE91A27512

BK/2.5/162

K7

12

3

5

13

A1A2

14

6

4

BN/00/G8

BU/00/G8

GN/YE/2.5/G8

TO NEUTRAL

BUS BAR.

TO EARTH

BUS BAR.

LINE LOAD

EARTH EARTH

1

2

E

3

1

2

E

3

1

E

1

E

4 4

BLACK 1

BLACK 2

GREEN/YELLOW

BLACK 4

BLACK 3

RIE / PECVD

HF

GENERATOR

GENERATOR

AUX.

LF GEN.

RF GENERATOR

RIE/PECVD

RF GENERATOR

RIE/PECVD

RF GENERATOR

ICP

RF GENERATOR

ICP

BK-4/103

GN-YE/104

WH/BU/0.5/111 5A

DO NOT FIT 2 POLE CIRCUIT BREAKERS IN 400V SYSTEM.

SOME EXTERNAL UNITS SUPPLIED MAYBE COMPATIABLE

TO SYSTEMS SINGLE PHASE VOLTAGE.

CHECK BEFORE INSTALLATION.

FOR DRY PUMP OPTIONS (TAIKO / EBRA), REF. DRG SE00D23979/1.

FOR 110/208v SLEEVE BLUE NEUTRAL WIRES WITH WHITE HEATSHRINK.

SUPPLY CONNECTION CABLES SHALL BE AT LEAST 10mm.

REMOVE THESE 2 PINS PRIOR TO ASSEMBLY ON CONTACTOR K2, K3

& K6 AS SHOWN BELOW.

WHEN HEATER/CHILLER OPTION IS INSTALLED G5 TEMPERATURE

CONTROLLER CABLE IS NOT USED.

ALL WIRE TRI-RATED, EXCEPT CONTROL WIRING.

5CP

5CP

4CP

G9

G8

G10

G7

G11

G4

G3

G5

G1

G6

G2

5

WH/BU/0.5/100FE 14 - 13

DWG REF 2C

DK.BU/0.5/87DK.BU/0.5/112

DK.BU/0.5/87

K4

CB17

PL13

A

B

C

D

BN

WH/BU/0.5/85

GN/YE

4

K5

6 5

3

A1

TE1OS

EWM1303

A2

+ 5

2

- 6

EUROTHERM WIRING

GN/YE

CB9 IN POWER BOX

1

BU

BN

10AMP EFM1410

DK.BU/0.5/86

4

1

BU

3

13

2

BUS BAR

14

EGB3022

MA00A23554

REF DRG

SE91B23358 2/3 - BLACK PLC

SE91A27512 1/2 - BLUE PLC

CB8/2A

NEUTRAL

FU1038/16ADK.BU/0.5/87

EWM1303

BU/2.5/84

BK/2.5/82 BK/2.5/182

BU/2.5/184

BK/2.5/182

BU/2.5/184

FE 14 - 13

DWG REF 2C

DK.BU/0.5/87DK.BU/0.5/112

DK.BU/0.5/87

K4

E FDK.BU/0.5/87DK.BU/0.5/112

E FDK.BU/0.5/87DK.BU/0.5/112

* IF IN DOUBT ASK *

WIRING IF TABLE IS CONNECTED TO EARTH

WIRING IF TABLE IS NOT CONNECTED TO EARTH

* IF IN DOUBT ASK *



K4 13/14 IS ONLY WIRED IF

HEATED AND NOT

CONNECTED TO EARTH

* IF IN DOUBT ASK *

THE TABLE IS ELECTRICALLY


HEATED AND NOT

CONNECTED TO EARTH

* IF IN DOUBT ASK *


22 13.01.10 25737 REFORMATED & CHANGE FILTER WIRING & DRAWING MODS J.J J.B.W.

0V

0V

0V

0V

0V

0V

0V

0V 0V 0V

0V 0V 0V

EXP2415/EXP1524

OPTION FOR RFX II 1250

0V

0V

WH/BU/0.5/100

PL16

CB14

SKT17

EPS0114

1

2

GND

CB7

J27/PC91S21083

1

2

RELAY 2

12

34

CB11

CB2

CB13

SK11B

1

2

3

4

5

6

7

CB5

CB6

SKT

1

2

3

4

5

6

J12

1

2

3

4

5

6

7

8

RL3

1

3

5

6 7

8

10

12- +

J15

ON/OFF

1

2

3

4

5

6

L3'

SKT16

SK14/RSP

5

9

4

8

3

7

2

6

1

00

SW1

Current Switch

+1

-2

Over

Current

Sw itch

2A 2 0A

K1

CONTACTOR 3+1

1 2

3

5

13

81 82

14

6

4

SK15/RSP

A

B

C

D

E

F

G

H

J

K

L

M

CB12

F2

CB15

J16

EMO IN

1

2

3

4

PL10A

EPP0013

1

2

3

GND

F3

CB1

1

2

CB3

F3

CB16

L3

K4

12

3

5

13

A1A2

14

6

4

N

CB9

F1

N1

PL

1

2

3

4

5

6

SKT10A

EPS0013

1

2

3

GND

1

2

PLG12/RSP

A

B

C

D

SKT9

EPS0016

1

2

3

4

5

6

GND

CB10

PL9

EPP0016

1

2

3

4

5

6

GND

POWER BOX

5

9

4

8

3

7

2

6

1

00

PL10

CB8 / 15

PLG13

A

B

C

D

K4

12

3

5

13

A1A2

14

6

4

CB8

SKT10

1

2

J13

1

2

3

4

SK7/FSP

A

B

C

D

PL17

EPP0114

1

2

GND

F2

L2'

SK8/FSP

A

B

C

D

CB4

L2

J14

1

2

3

4

5

6

Spare #

J17

PUMPS

1

2

3

4

5

6

7

8

1

2

L1'

D6

F1

L1

DK.BU/0.5/35

DK.BU/0.5/17

DK.BU/0.5/18

DK.BU/0.5/2024v

DK.BU/0.5/34,1624v

DK.BU/0.5/35

24vDK.BU/0.5/18DK.BU/0.5/13,16

24v

DK.BU/0.5/34,19

DK.BU/0.5/17DK.BU/0.5/19,32

DK.BU/0.5/24

DK.BU/0.5/20 DK.BU/0.5/23

WH/BU/0.5/15,14DK.BU/0.5/22

DK.BU/0.5/21

WH/BU/0.5/15,39

DK.BU/0.5/24

DK.BU/0.5/22

YE/0.5/5

RD/0.5/1 RD/0.5/2

WH/BU/0.5/3 WH/BU/0.5/3

YE/0.5/4

DK.BU/1.0/9

DK.BU/0.5/11

DK.BU/1.0/129

DK.BU/0.5/13

24v24v 24v

WH/BU/1.0/10

WH/BU/0.5/12-26

WH/BU/1.0/100

BK/2.5/83

BU/G9

BROWN

DK.BU/0.5/33-32

BLUE

DK.BU/1.0/28

RD/0.5/20

WH/BU/0.5/3

YE/0.5/40

DK.BU/0.5/30

DK.BU/0.5/29

DK.BU/0.5/37

RD/0.5/20

WH/BU/0.5/3

DK.BU/0.5/6

YE/0.5/40

WH/BU/0.5/3 WH/BU/0.5/3

DK.BU/0.5/724v

YE/0.5/5

RD/0.5/1

DK.BU/0.5/8

YE/0.5/424v

RD/0.5/2

53 DK.BU/1/28-38

DK.BU/1.0/9

24v24v

DK.BU/0.5/11

DK.BU/1.0/129

DK.BU/0.5/27DK.BU/1.0/129 54

WH/BU/1.0/10

DK.BU/0.5/13

WH/BU/1.0/100

WH/BU/0.5/12-26

DK.BU/0.5/30

DK.BU/0.5/29

63 DK.BU/0.5/3164

BN/G9 BK/2.5/82

24v

RD/0.5/2

WH/BU/1.0/10

DK.BU/0.5/33 DK.BU/0.5/7

74 73 RD/0.5/20

WH/BU/0.5/85

DK.BU/0.5/87

DK.BU/0.5/86

24v 84 83 YE/0.5/40YE/0.5/4 DK.BU/0.5/31

WH/BU/1.0/100

DK.BU/1.0/38

DK.BU/0.5/8

DK.BU/0.5/3624vDK.BU/0.5/6

DK.BU/0.5/11WH/BU/0.5/39

DK.BU/0.5/36

GN-YE/1.0/55

BU/1.0/54

DK.BU/0.5/27-25WH/BU/0.5/12-14

WH/BU/0.5/32

DK.BU/0.5/333

WH/BU/0.5/26

DK.BU/0.5/25

DK.BU/0.5/37

DK.BU/0.5/23

DK.BU/0.5/21

24v

2W Q/M

15+

T2

97

VAT VALVE APC

STUD REAR

14

K7

4 METERS EWM2404

RF GENERATOR - RIE/PECVD

K

CB 13

2A mp

DK.BU/.5/41

PHASE 2

V

BU/.75

EARTH

HEATER TABLE

2

TO EARTH

BUS BAR

TO PL12

1

4

BN

3

TURBO

GN/YE/00/G3

a

BK2

24 V CH B

ALARM

BU

SEE CB 15

BK/10/1

TO K4 PIN A1

CB 5

95

GN

K8:EGB3022

PIN 1 (E)

TWICE THRU

4A

3

VT

SEE NOTE 7.

RIE / PECVD

EWM1503

EGT0021

4

0v

EPP7003

4C

A1

N

N/O

AUXILLARY CONTACTOR

13

CB

3

RD

96

EWM0603

GN/YE/00/G6

1

OVERLOAD 2

BK/10/52

5

PHASE 2

BN/00/G6

REF POINT A

A2

a

97

BK 1

TEMPERATURE CONTROLLER

SEE CB 15 CHILLER &


SERVICE PANEL

PUMPDOWN HEATER / TURBO

COLLAR

BU

MOUNT K8 NEXT TO K4

GREEN/YELLOW

CONTACTOR

6

SUPPLY

4 METERS EWM2404

5

F

K3

A

GN/YE

WH/00/G2

BK/1.5/93

LAMBDA

MODEL No:PU200-37-1C

PIN4

CHAMBER HEAT

1A

CB 15

NOTE:

IF SYSTEM FITTED WITH ICP F3 = 5 AMP

IF SYSTEM FITTED WITH CRYO TABLE F3 = 5 AMP

IF SYSTEM FITTED WITH 2 AMU

(2nd AMU VACUUM CAP) F3 = 5 AMP

1

CHILLER /


WHEN CB 8 USED

95

N/O

N/C

BK/2.5/79

96

4

A2

BK/1.5/90

L

2

220V AC

(LABEL)

EGB3022

A1

6

3

BK/10/2

GN

95

NEUTRAL

13

EMO O/P

K1

BU

RD

GLAND ON THE

2

VT

SEE NOTE 5.

BK/1.5/94

DK.BU/0.5/110

PHASE 1

98

PUMP 3

WH/BU/0.5/32

TEMPERATURE CONT'

4

24V

BK/2.5/96

K2

2

GN-YE/.75

97

BK/10/47

PC91S21083

WH

B

WH/BU/1.0

LINK

B

BK

RD

98

WH/BU/0.5/103

RD DK.BU/.5/41

BK/1.0/70

TURBO

USE WHITE

SPIRAL WRAP

PL

4

2W Q/M

BK

SKT



YE

A

K3

DK.BU/0.5/07

SYSTEM OFF

5Amp

NEUTRAL

2A mp

1A2 Amp

EFM1613

A1

EQUIPMENT

A

SWITCH

A1

SEE CONTROL WIRING1C

1B

N/C

SYSTEM ON

HEATER

TABLE

T1

2.5mm

+15V

0V

0V

0V

-15V

+24

PUMP OIL/FILTER

BK/2.5/62

24v

13

WH/BU/0.5

EXP1524

0v

PL

WH

0v FAN

PIN7

RD

EGB2022

WH/BU/0.5/111

N/O

EWM0008

DYRVAC 50P 208V 60HZ 11A

FOR LOADLOCK TURBO

WIRE DIRECT TO CB3

3 WAY AMP

L1

YE

FREE SKT & SHELLCIRCUIT

BK

PUMP 1

A2

BK 3

EMO 24v

OVERLOAD 3

14

FIT FOR ALL HEATED VALVE SYSTEMS

-15v

N/C

FOR SYSTEM FITTED WITH


WIRE TO TWIN CB SLEEVE

WITH BK HEATSHRINK

A1

EMO I/P

VACUUM SW IS MADE

6

14

50B

FIT EZB0011 TO UN-INSULATED PINS

CB 11

GN-YE/1.5/176

UNIT

GREEN/YELLOW

TO MATCH CHILLER

SEE NOTE # 8

208V SYS BK H/SHRINK

NEUTRAL CONNECT

TO TWIN CB

SEE NOTE # 8

A1

SEE NOTE # 8

(BLOWER)

GN/YE/00/G5

A

3

0v

PIN 3 (N)

2

1

PHASE 2

96

3

97

98

EGB0054

EGT0059

HEATER/CHILLER

BLACK

BK4

GN/YE 1.0mm

WH

b

13

96

BU

A1A2

BK/10/45

IEC SOCKET

BK/1.5/74

EFM1613

6

BK/2.5/201

2

A1

1C

4

BK/2.5/76

BU/00/G6

E

BREAKER

3 PHASE LINE FILTER

MAKE : PROTEK

RD

PIN6

A1

CHAMBER PUMP 2 /

LOADLOCK PUMP

14

EPS7003

BN/00/G3

BK1/00/G2

PUMP FAIL

5

2

BN

TO EARTH

BUS BAR.

98

5

95

PHASE 1

WH/BU/0.5/103

6

13

4

BU

BU

TYPE OF PUMP

NEUTRAL

BK

SEE CONTROL WIRING

4

A2

GN-YE/2.5/102

4 METERS EWM1304

PL14

4

SWITCH

3

13

5

BN

CONNECTION

HEAT

FORELINE TRAP

HEATER

BK2/G2

TO EARTH BUS

BAR

N

1

BU

PUMP ON

EXP2415

6

RD

4

EGB2032 FOR STANDARD SYSTEM

PSU

96

14

EWM0008

K8

6

A1

EMO 2

4C

b

BK/10/49

PUMP 3 START

SUPPLIED WITH UNIT

6

3

3

MAIN IN

2

L

USE A SECOND 6W BUSBAR TOBRIDGE THE 2 FITTEDBUSBAR(S)

+24V DC WHEN THE

A

4 METERS EWM1007

5

0v

FOR DRYVAC 25B

1

EWK2532

GREEN/YELLOW

PHASE 1

* DEPENDANT ON TYPE OF PUMP SUPPLIED, SEE OEM MANUAL

FREE PLG & SHELL

GN

EARTH

2

BK/2.5/062

HF

6

5

14

BU

BK3/G2

E

EFI1050

BN/1.5/178

IF PUMP3 REQUIRED

0v

EGB3022

SUPPLIED WITH UNIT

1A

6

A1

BK/1.5/73

YELLOW RING CRIMPS

BK3

L2

GREEN/YELLOW

98

GREEN/YELLOW

BK/10/3

WH

BN/00/G4

BK/2.5/062

BK3

4

1

BK/2.5/80

4

6

A2

4

PHASE 2

L

WH/00/G2

4A

98

YELLOW RING CRIMPS

2

GN

EWK1825

OPTION FOR EDWARDS DRYSTAR IQDP 80

AND ALCATEL ADS602 DRY PUMP

A2

1

0v

PIN9

CB 10

FOR OPTIONAL

IEC SOCKET

B

CB 4

97

CB 1

CB 3

K2 Pin 2

AUX/LF GEN

GN/YE/6.0/105

ON O/P

CHAMBER TURBO

SUPPLIED WITH UNIT

A2

13

GENERATOR

K1

O/LOAD

WH/BU/0.5mm

SKT

K2 Pin 4

GENERATOR

A1

GN/YE/00/G2

SEE NOTE 7.

GREEN/YELLOW

BU

SUPPLIED WITH UNIT

YE

YE

5

95

13

2

2

MAIN IN

5

2

YE-GN

STUD TOP COVER

D.C. VOLTS WIRING

PHASE 1

BK2

BK/2.5/81

BK

1

95

1C

24V FAN

BK1

PUMP 1 FAULT

YE

ICP RF GEN

L/GEN/RF/102

4

BK

K6:- EGT0058

5

PUMP 1

BK/10/44

RF GEN 2 / LF GEN 1

3

2

SEM-S2 SYSTEM

BLACK 1

EARTH CONNECTED

TO VALVE BODY

GN/YE/1.0mm

SPARE / LOADLOCK or TRANSFER

TURBO / FORELINE HEATER

SEE NOTE 7.

C

1

1.5mm

BROWN

13

PSU

SYSTEM ON/OFF

4

RD

BN/00/G5

6

CONTROL WIRING

2

BK/10/51

YE-GN

EARTH BUS BAR

LAMP

BK00/G1

CB 6

EWM0002

2 Amp

2

AUX.

WH

A1

OVERLOAD 1

K2

PHASE 3

95

13

BK

BK/10/48

96

HF GEN

BLACK

14

13

6

BK2/00/G2

EARTH BUS BAR

PHASE 2

PHASE 3

RD

BN/.75

BK/10/43

A2

BK/1.5/72

BU/00/G4

CB 14

E.C.R.


13

OG

CB 2

CB 7

3

C

CONTACTOR WITH FITTED OVERLOAD

OPTION FOR

B

A1

GN-YE/2.5/100

208V SYS BK H/SHRINK

NEUTRAL CONNECT

TO TWIN CB

EXP2415/EXP1524

BK/1.0/71

14

CB 12

A1

EWK2532

3

LAMP

K4

PUMP 2 COIL 24v

A2

CRYO TABLE 200 C

TEMPERTARE

15-

PUMP 2 ON

K3

RD

3

EGB2052 FOR 180 ICP SYS (EXCEPT HFV8000)

L/LOCK TURBO/FORELINE HEATER

PANEL

BK/2.5/77

HEATER CONTROL

2

FORLINE

PHASE 3

TO NEUTRAL

BUS BAR.

K2 Pin 6

OV

BK/10/53

6

CHAMBER PUMP 1 (*ROTARY)

OR I.C.P.

3

A

1

BLACK

DK.BU/0.5mm

PHASE 1

CB 9

EARTH

ICP 180 SYS

GN/YE/00/G1

BK/2.5/200BK/10/46

CHAMBERS HEATERS

BK/2.5/162

BLACK 4

CRYO TABLE 400 C

EGT0059

2

14

A2

5

PIN5

98

2

6

BK/2.5/78

BK 2

97 1

2.5 METERS EWM5205

PIN 2 (L)

GN-YE/1.0/169

OG


NOTES.

K6

2

NOTE:

IF SYSTEM FITTED WITH

ALCATEL ADS602 FIT

EFM1620 = CB12

EGB2032 = K2

REF. DRG. No.SE00D23969 2/3

RD

PUMP 2

PHASE 3

6

(NOTE3)

BU

LAMP

5

BK/1.0/50

208V

A1

PUMP 2 FAULT

N

6

6

RF GENERATOR - ICP

OPTION FOR

RF GEN 1

BU

BLACK

2

TO K4 PIN A2

BK/1.5/92

EWM0603

1B

RD

PSU:24V:+/-15V

PHASE 3

BLACK 3



A2

CB 8

4

+/-15V

BU/10/4

LEYBOLD DRYPUMP

6

RD

1

1

A2

BU/1.0/168

MIN.

SETTING

BK

WIRE O

DK.BU/0.5/110

2

GN-YE/1.5/102

EARTH BUS BAR

14

3.5Amp

5

496

GN/YE/00/G7

K6

A2

RATING

LAMP

A2

LF GEN.

EARTH

EARTH

6 W Q/M

A2

BK/1.5/95

N/C E

BK/2.5/62

97

PUMP 1 ON

RIE/PECVD OPTION

5 METERS EWM5205

BK/1.0/69

DK.BU/.5/41

BK

SERVICES PANEL

BK/2.5/202

APC/VAT A.P.C.

VAT

0v

4

BN/00/G7

BK/2.5/162

BK1/G2

BK/1.5/91

PHASE 1

ON I/P

DK.BU/0.5/333

PIN4

ON SWITCH 24v N/O

EWM0012

BK1

1.5mm

N/O

USE WHITE

SPIRAL

WRAP


GN-YE/1.5/101

EARTH BUS BAR

GN/YE/00/G4

YE

BLACK 2

RD

GN/YE/6.0/106

BK/1.5/077

PUMPDOWN HEAT

BK/2.5/97

6

LOADLOCK

4

FIT MAINS WIRING

EFM1620

4

ICP OPTION

BLUE (HEATSHRINK BOTH ENDS BLACK)

H

PHASE 3

1

EMO 1

+15v

3

WH

14

BU/10/41

CONTROLLER

K2:EGT0059

BU

1B

FROM SW 1

14

PUMP 1 COIL 24v

BN

BK

4

GN

4

4-6A

GN

BU/00/G7

NEUTRAL BUS BAR

PHASE 2

BU/00/G3

BK3/00/G2

BK/00/G1

K5

G/VAC/VLV/840 (NW40)

IDENT LIVE AND NEUTRAL WIRES

WITH HEAT SHRINK IDENTS (L&N)


TO BE WIRED IN PARALLEL

RD

RD

RD

RD

K5-MONITOR

DK.BU/0.5/89

WH/BU/0.5/107

DK.BU/0.5/88


1A0


X.XX

X.X

X


2345

A

B

C

D

J.R.M KW 19.04.2005

100 PLUS POWER BOX

3 PHASE 208V SYSTEM

SE91A19752

2 OF 222

1:1

mm

95

6 5

BK/1.5/90

13

2

96

97

98

4

1

IF PUMP3 REQUIRED

2

A1

SEE NOTE 7.

3

K6

6

A2

BK/1.5/092

FIT MAINS WIRING

14

4

PL10A

EPP0013

1

2

3

GND

SKT10A

EPS0013

1

2

3

GND

BK/1.5/93

BK/1.5/94

EARTH BUS BAR

GN-YE/1.5/101

CB13

FROM

MAIN BUS BAR

4.0 METERS 94-EWM0603

BLUE

GREEN/YELLOW

BROWN

PUMP3 - LOADLOCK (TWO PHASE 208V)

GN-YE/1.5/101

FROM

MAIN BUS BAR

BK/1.5/91

EGT0031 = OL2

SKT16

CB8 / 15

BK/2.5/96

GN-YE/2.5/100

BK/2.5/99

PL16

2

YE-GN

1

3

208VAC SUPPLY

3ph 208VAC SUPPLY

3ph 208VAC SUPPLY

208VAC SUPPLY

CHILLER REQUIRES

CHILLER REQUIRES

CHILLER REQUIRES

CHILLER REQUIRES

BK/2.5/98

TO MAINS

CONNECT

BUSBAR

TO MAINS

CONNECT

BUSBAR

FOR COMPONENT RATINGS

REFER TO POWER BOX CRIB

SHEET STORED ON EDMS

SYSTEM DOC NO. ED33975

4 BK/2.5/99

NEUTRAL BUSBAR

CONNECT TO

SEE NOTE # 8

AND WIRE PLG/SKT

PLEASE SELECT

POWER SUPPLY

3 P

HA

SE

BU

S B

AR

TO NEUTRAL

BUS BAR.

TO NEUTRAL

BUS BAR.

TO EARTH

BUS BAR.

TO EARTH

BUS BAR.

TO EARTH

BUS BAR.

TO EARTH

BUS BAR.

TO EARTH

BUS BAR.

TO EARTH

BUS BAR.

TO NEUTRAL

BUS BAR.

TO EARTH

BUS BAR.

GN-YE/00/G2

BK/00/G5

BK/2.5/84BK/2.5/84

TO NEUTRAL

BUS BAR.

TO EARTH

BUS BAR.

TO NEUTRAL BUS BAR.

BK-4/103

TO EARTH BUS BAR.

GN-YE/104

TO NEUTRAL

BUS BAR.

TO EARTH

BUS BAR.

SET POT TO

TO BE COILED

BK/2.5/78

SW1

K8

12

3

5

13

A1A2

14

6

4

TO EARTH

BUS BAR.

BK00/G10

BK/00/G10

BK/2.5/0162

MAIN MACHINE BREAKER

IF LOADLOCK PUMP

SINGLE PHASE REFER

TO WIRING CHANGE

ON LEFT OF PAGE

NEUTRAL BUSBAR

CONNECT TO

BK/2.5/97

RF GENERATOR

RF GENERATOR

RIE/PECVD

ICP

TRAP

HEATER

IF FORELINE HEATER

SYSTEM BK H/SHRINK

NEUTRAL CONNECT

TO TWIN CB VIA K7

CONTROL DETAILED ON

DRG # SE91A27512

BK/2.5/162

K7

12

3

5

13

A1A2

14

6

4

TO EARTH

BUS BAR.

BK/00/G8

BN/00/G8

BK/2.5/0162

GN/YE/00/G8

GN/YE/10.0/42

MD81C19435PROTECTIVE COVER

LINE LOAD

EARTH EARTH


CODING PIN (CP) - EPT3040


EMC CHASSIS MOUNT - EPS1306


CODING PIN - EPT3040


STD CHASSIS MOUNT - EPS1206

1

2

E

3

1

2

E

3

4 4

1

2

E

1

2

E

4

1

2

E

3

1

2

E

3

BLACK 1

BLACK 2

GREEN/YELLOW

BLACK 4

BLACK 3PHASE 2

PHASE 1

NEUTRAL

PHASE 3

EARTH

WH/BU/0.5/111 5A

GN/YE/00/G10

4.

8.

6.

2.

3.

7.

5.

1.

DO NOT FIT 2 POLE CIRCUIT BREAKERS IN 400V SYSTEM.

SOME EXTERNAL UNITS SUPPLIED MAYBE COMPATIABLE

TO SYSTEMS SINGLE PHASE VOLTAGE.

CHECK BEFORE INSTALLATION.

FOR DRY PUMP OPTIONS (TAIKO / EBRA), REF. DRG SE00D23979/1.

FOR 110/208v SLEEVE BLUE NEUTRAL WIRES WITH WHITE HEATSHRINK.

SUPPLY CONNECTION CABLES SHALL BE AT LEAST 10mm.

REMOVE THESE 2 PINS PRIOR TO ASSEMBLY ON CONTACTOR K2, K3

& K6 AS SHOWN BELOW.

WHEN HEATER/CHILLER OPTION IS INSTALLED G5 TEMPERATURE

CONTROLLER CABLE IS NOT USED.

ALL WIRE TRI-RATED, EXCEPT CONTROL WIRING.

4CP

5CP

5CP

5

4

WH/BU/0.5/100

CB17

PL13

A

B

C

D

BN

WH/BU/0.5/85

GN/YE

4

K5

6 5

3

A1

TE1OS

EWM1303

A2

+ 5

2

- 6

EUROTHERM WIRING

GN/YE

CB9 IN POWER BOX

1

BU

BN

10AMP EFM1410

DK.BU/0.5/86

4

1

BU

3

13

2

SLEEVE BLUE

WIRE WITH

BLACK

HEATSHRINK14

EGB3022

MA00A23554

REF DRG

SE91B23358 2/3 - BLACK PLC

SE91A27512 1/2 - BLUE PLC

CB8/2A

FU1038/16ADK.BU/0.5/87

EWM1303

BU/2.5/84

BK/2.5/82 BK/2.5/182

BU/2.5/184

BK/2.5/182

BU/2.5/184

FE

* IF IN DOUBT ASK *

14 - 13

DWG REF 2C

DK.BU/0.5/87DK.BU/0.5/112

DK.BU/0.5/87

K4

E F


HEATED AND NOT

CONNECTED TO EARTH

* IF IN DOUBT ASK *

DK.BU/0.5/87DK.BU/0.5/112

E FDK.BU/0.5/87DK.BU/0.5/112





HEATED AND NOT

CONNECTED TO EARTH

* IF IN DOUBT ASK *


FE 14 - 13

DWG REF 2C

DK.BU/0.5/87DK.BU/0.5/112

DK.BU/0.5/87

K4

* IF IN DOUBT ASK *



20 19.08.09 26114 K5 WIRING AMENDED AS WIRE 89 WAS SHOWN IN TWO PLACES J.R.M P.J.M

21 06.01.10 28862 REFORMATED TO AUTOCAD. K4 CONTACT ADDED IN SERIES WITH K5 COIL J.B.W. J.R.M.

22 13.01.10 25737 REFORMATED & CHANGE FILTER WIRING & DRAWING MODS J.J J.B.W.

0V

0V

0V

0V

0V

0V

0V

0V 0V 0V

0V 0V 0V

0V

0V

G9

G8

G10

G7

G11

G4

G3

G5

G1

G6

G2

WH/BU/0.5/100

D4 94-EDA4004C

D1

1N4004

JP16

CM GAUGE

1

2

3

4

5BLK16

SNAP SW

1

2

JP4

CON10

1

2

3

4

5

6

7

8

9

10

PLG

3W Q/M

1

2

3

OFF SW RED

ESZ0026

JP5

CON4

1

2

3

4

62SM

C

1

2

BLK19

GUARDMASTER

1

2

3

4

SKT12/POWER BOX

PWR BOX

A

B

C

D

HFV8001

PLG 15W DG

8

15

7

14

6

13

5

12

4

11

3

10

2

9

1

00

ON SW GREEN LAMP

EDL0006

UPPER AMU CONTROL

SKT25W DG

13

25

12

24

11

23

10

22

9

21

8

20

7

19

6

18

5

17

4

16

3

15

2

14

1

00

TEMP PROBE1

3W Q/M PL

1

2

3

JP5

CON4

1

2

3

4

POWER

9W D SKT

5

9

4

8

3

7

2

6

1

TEMP FILTER

SKT 9W DG

5

9

4

8

3

7

2

6

1

00

EMO2

EMO_SW

1 2

SKT-V1

94-EPM3102C

1

2

JP57

GAUGE ISO VLV

1

2

3

4

CHAMBER LID

SW SPDT

VAC STAT

CONECTOR SUPPLIED

N2 METER

SKT 15W DG

8

15

7

14

6

13

5

12

4

11

3

10

2

9

1

00

COMDEL CX601

PLG 15W DG

8

15

7

14

6

13

5

12

4

11

3

10

2

9

1

00

BLK27

EMO F/P

1

2

3

5

4

1

2

JP23

EMO I/P

1

2

3

4

5

6

SKT-V2

94-EPM3102C

1

2

SKT-V3

94-EPM3102C

1

2

HOIST

GUARDMASTER

MKS PIRMARY CM

SKT 15W DG

8

15

7

14

6

13

5

12

4

11

3

10

2

9

1

00

BLK28

EMO

1

2

JP58

VALVES

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

16

EMC1

OR

SCREEN CABLE USING P CLIP

OR TO CABLE SHELL

EWT2120C - 3.0mm TO 3.5mm



IF A PLASTIC P CLIP IS USED COPPER TAPE

IS REQUIRED TO LINE INSIDE OF CLIP

JP38

AMU 2 BIAS

1

2

3

4

5

6

SKT

3W Q/M

1

2

3

REMOTE CONTROL

SKT 15W DG

8

15

7

14

6

13

5

12

4

11

3

10

2

9

1

00

UPPER AMU CONTROL

SKT25W DG

13

25

12

24

11

23

10

22

9

21

8

20

7

19

6

18

5

17

4

16

3

15

2

14

1

00

MKS SECONDARY CM

SKT 15W DG

8

15

7

14

6

13

5

12

4

11

3

10

2

9

1

00

3

5

4

1

2

K-RF

94-EGB2052

2

4

6

A1+A2-

5

3

1

BLK17

VAC STAT

1

2

UPPER AMU CONTROL

PLG 25W DG

13

25

12

24

11

23

10

22

9

21

8

20

7

19

6

18

5

17

4

16

3

15

2

14

1

00

HFV8000

PLG 15W DG

8

15

7

14

6

13

5

12

4

11

3

10

2

9

1

00

BLK26

1

2

3

4

5

6

LF INDUCTOR

2W Q/M SKT

1

2

JP49

PRESS SW N2

1

2

3

PLG 25W DG

13

25

12

24

11

23

10

22

9

21

8

20

7

19

6

18

5

17

4

16

3

15

2

14

1

00

JP18

TEMP CONT

1

2

3

4

5

6

7

8

9

10

JP15A

1

2

BLK18

HOIST

1

2

PL-V3

94-EPM3202C

1

2

ORANGE/MAINS ON

EDL0007

REMOTE

1

2

3

4

5

6

7

8

9

10

JP61

RLOCK 8W

A

B

C

D

E

F

G

H

TEMP PROBE

3W Q/M SKT

1

2

3

23SM

C

1

2

PL15/POWER BOX

PWR BOX

A

B

C

D

E

F

G

H

J

K

L

M

BLK22

GEN INTER

1

2

JP36

RF TWO

1

2

3

4

5

6

7

8

9

10

11

12

JP16

CM GAUGE

1

2

3

4

5

BLK27A

EMO F/P

1

2

ICP FAN

94-EPM0813

5

9

4

8

3

7

2

6

1

00

3

5

4

1

2

BLK30

1

2

SKT13/POWER BOX

PWR BOX

A

B

C

D

22SM

C

1

2

21SM

C

1

2

He PRESS CONT

SKT 15W DG

8

15

7

14

6

13

5

12

4

11

3

10

2

9

1

00

5SM

C1

2

MKS 100mTorr/1 & 2 Torr

SKT 15W DG

8

15

7

14

6

13

5

12

4

11

3

10

2

9

1

00

COLOUR CHART

BK

BU

GN

GY

OG

RD

VT

WH

YE

VIOLET

WHITE

YELLOW

ORANGE

GREEN

BROWN

BLACK

BLUE

GREY

RED

BN

LF INDUCTOR

2W Q/M PL

1

2

ICP FAN

SKT 9W DG

5

9

4

8

3

7

2

6

1

00

ON SW GREEN

ESZ0025

94-ERB0310C

1K0/1W

BLK2

+/-15V

1

2

3

4

N2 PRESS SW

3W Q/M PL

1

2

3

AE LF5

PLG 37W DG

19

37

18

36

17

35

16

34

15

33

14

32

13

31

12

30

11

29

10

28

9

27

8

26

7

25

6

24

5

23

4

22

3

21

2

20

1

00

PLG 25W DG

13

25

12

24

11

23

10

22

9

21

8

20

7

19

6

18

5

17

4

16

3

15

2

14

1

00

SKT

3W Q/M

1

2

3

JP19

PWR BOX

1

2

3

4

4SM

C

1

2

3

5

4

1

2

2SM

C

1

2

AE RFX600

PLG 25W DG

13

25

12

24

11

23

10

22

9

21

8

20

7

19

6

18

5

17

4

16

3

15

2

14

1

00

TEMP FILTER

94-EPM0813C

5

9

4

8

3

7

2

6

1

00

JP31

He PRESS CONT

1

2

3

4

5

6

7

8

SENSOR

15W D PL

8

15

7

14

6

13

5

12

4

11

3

10

2

9

1

6SM

C

1

2

SKT

3W Q/M

1

2

3

JP27

AMU ONE

1

2

3

4

5

6

7

8

9

10

11

12

13

14

EMO1

EMO_SW

1 2

JP7

CON2

1

2

JP60

AUX GAUGE

1

2

3

4

5

6

7

COMDEL CX601

PLG 15W DG

8

15

7

14

6

13

5

12

4

11

3

10

2

9

1

00

PLG

3W Q/M

1

2

3

ENI 300/500W

PLG 15W DG

8

15

7

14

6

13

5

12

4

11

3

10

2

9

1

00

He METER

SKT 15W DG

8

15

7

14

6

13

5

12

4

11

3

10

2

9

1

00

SYS ON/OFF

12W Q/M/ PL

1

2

3

4

5

6

7

8

9

10

11

12

ENI 600

PLG 25W DG

13

25

12

24

11

23

10

22

9

21

8

20

7

19

6

18

5

17

4

16

3

15

2

14

1

00

JP8B-FAN3

ICP FAN

1

2

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

BLK21

GEN INTER

1

2

P1

15W D PL

8

15

7

14

6

13

5

12

4

11

3

10

2

9

1

JP33

He METER CONT

1

2

3

4

5

N2 PRESS

SUPPLIED

1

2

3

PL14/POWER BOX

PLG 9W DG

5

9

4

8

3

7

2

6

1

00

JP43

TURBO LL

1

2

3

4

5

6

D2

1N4004

JP32

He METER CONT

1

2

3

4

5

JP15

APC

1

2

3

4

5

6

7

8

9

10

JP58

VALVES

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

16

SYS ON/OFF

12W Q/M SKT

1

2

3

4

5

6

7

8

9

10

11

12

JP46

PUMP 3

1

2

3

4

5

AE RFX601

PLG 25W DG

13

25

12

24

11

23

10

22

9

21

8

20

7

19

6

18

5

17

4

16

3

15

2

14

1

00

20SM

C

1

2

BLK23

ROUGH GATE VLV

1

2

ENI 300/500W

PLG 15W DG

8

15

7

14

6

13

5

12

4

11

3

10

2

9

1

00

BLK1

+24V

1

2

JP40

CH TURBO

1

2

3

4

5

6

7

8

9

10

JP50

WATER I/L

1

2

3

4

5

6

7

8

9

100 mtorr

SKT 9W DG

5

9

4

8

3

7

2

6

1

00

BLK27A

EMO F/P

1

2

JP44

PUMP 1

1

2

3

4

5

6

7

8

9

10

BLK6 or BLK7

94-PC00S26866

1

2

JP7

CON2

1

2

PL-V1

94-EPM3202C

1

2

BLK 7

LF FAN

1

2

JP8-PC91S28347

1

2

3

4

5

6

7

8

9

10

11

12

JP6

CON12

1

2

3

4

5

6

7

8

9

10

11

12

D3 94-EDA4004C

PL-V2

94-EPM3202C

1

2

BLK25

TURBO GATE VLV

1

2PK

TQ TURQUOISE

PINK

INTERFACE

25W D PL

13

25

12

24

11

23

10

22

9

21

8

20

7

19

6

18

5

17

4

16

3

15

2

14

1

JP39

AMU TWO

1

2

3

4

5

6

7

8

9

10

11

12

13

14

JP45

PUMP 2

1

2

3

4

5

1SM

C

1

2

JP4

CON10

1

2

3

4

5

6

7

8

9

10

PLG

3W Q/M

1

2

3

19SM

C

1

2

PRESS SW

3W Q/M SKT

1

2

3

UPPER AMU CONTROL

PLG 25W DG

13

25

12

24

11

23

10

22

9

21

8

20

7

19

6

18

5

17

4

16

3

15

2

14

1

00

JP24

RF ONE

1

2

3

4

5

6

7

8

9

10

11

12

JP26

AMU 1 BIAS

1

2

3

4

5

6

JP9-PC91S28347

1

2

3

4

5

6

7

8

9

10

JP6

CON12

1

2

3

4

5

6

7

8

9

10

11

12

JP22

ON/OFF/LEDS

1

2

3

4

5

6

7

8

9

10

SKT2

SKT4

BU

PENNING

PIRANI

PENNING - CHAMBER

BU

LOADLOCK PIRANI

CHAMBER PENNING

RD

RF ONE FWD I/P +V

RF ONE FWD 0V

RF ONE REF I/P +V

PIRANI - LOADLOCK

94-EWM9307

RL2 NO 1

RL2 NC 1

94-EWM9307

LINK

YE

RD

BU

T.SPEED

GN

YE

BU

94-EWM0112

SKT3

PENNING LOADLOCK PENNING

94-EWM9307

GN

10/151/361

TU.SPEED

PK

ROUGHING GATE VALVE

TURBO GATE VALVE

GN

BN

YE

94-EWM8002

RD

WH

RF ONE S/P +V

RF ONE 0V

RD

BU

RF ONE 0V

RF ONE REF I/P +V

BU

RF ONE FWD I/P +V

94-EWM8002

RD

RD

BU

BU

RF ONE/HF/UPPER OR LOWER ELECTRODE

RF TWO/HF/UPPER ELECTRODE OR ICP

PIN E

PIN B

PIN C

PIN I

CONNECTOR SUPPLIED

BY OEM

GN

RL5 COM

RL5 NC

RL2 COM 1

RL2 NO 1

RL5 NO

PIN1

PIN1

GN

PIN2

PIN2

D1 FITTED INSIDE CONNECTOR

100/1500

RD


CONNECTOR SUPPLIED

CONNECTOR SUPPLIED

YE

+24V

+24V

0V

0V

94-EWM0002

RD

BU

RD

BU

BU

BU

GN

WH

+24v

VT

OG

LID/HOIST

VT

COM

N/O

N/C

OG

CHAMBER LID

RF TWO 0V

RF TWO S/P +V

RF TWO 0V

RD

BU

GN

YE

RF TWO REF I/P +V

WH

BK

BN

VT

OG

PK

94-EWM0112

RF TWO FWD I/P +V

OG

ENSURE OPERATION

USE EFB2011 TO COVER

THERMAL SNAP SWITCH

WHGN

TQ

PK

OG

VT

AMU TWO

BN

BK

WH

RD/BN

YE

RD/BK

ALCATEL

GN

WH/RD

BU

YE/RD

RD

AMU ONE

GN/RD

RD

ACT200T / 600T

RD/BU

GY

AMU TWO

YE/BU

WH/BU

FIT LK13

+ 24v

Ov

BN

DRY CONTACTS

NOTE:

ALCATEL ACT600M & ACT1300M REQUIRES FITTING OF MECHANICAL AND ELECTRONIC COMPONENTS FOR N2 METER MAGLEV TURBO

VT

OG

PK

TQ

GY

+ 24VRD

TURBO AT SPEED

RD/BU

GN/RD

YE/RD

STARTBU

BU

WH/RD

RD/BK

RD/BN

GN

YE

YE/BU

WH/BU

COMM

N/O

FIT LK13

AMU ONE DC BIAS +V

AMU ONE DC BIAS 0V


FIT LK13 FIT LK13

RD

AMU TWO PARK/FREEZE

AMU TWO C2 S/P +V

AMU TWO DC BIAS 0V

GN

GN

AMU TWO C1 S/P +V

Ov

BU

YE

AMU TWO C1 0V

Ov

AMU TWO DC BIAS +V

RD

WH

RD


+ 24v

RF ONE ON TO AMU TWO

YE

BU

GN

AMU TWO C2 POS 0V

AMU TWO P TO P 0V

Ov

AMU TWO C1 POS 0V

Ov

AMU TWO P TO P +V

AMU TWO AUTO/MANUAL

AMU TOW C2 0V

RF ONE ON TO AMU ONE

Ov

PIN 3

PIN 4

SUPPLIED

TURBO BRAKE VALVE

ALCATEL SUPPLIED VALVE IS NORM OPEN

OEM PART # 6-221-103-20

PIN 1

AMU ONE AUTO/MANUAL

PIN 2

PIN 3

PIN 5

PIN 6

BU

BU

GN

RD

YE

ALCATEL

RD

BU

ACT600M

FIT LK13

GN

YE

WH

LEYBOLD NT20

PIN 1

BK

BN

PIN 2

PIN 3

PIN 4

VT

OG

PK

PIN 5

PIN 6

TQ

GY

RD/BU

PIN 7

PIN 8

GN/RD

YE/RD

PIN 9

PIN 10

WH/RD

RD/BK

RD/BN

PIN 18

YE/BU

WH/BU

PIN 19

AMU ONE PARK/FREEZE

DRY N2 PURGE VLV

WH/BU

AMU ONE C2 0V

BU

GN

AMU ONE C1 0V

RD

YE

GY

PK

BU

YE

OG

RD

WH/RD

GN

BU

GN

YE

RD/BN

WH

BK

BN

WH

TQ

94-EWM0008

YE/BU

LEYBOLD TURBO PFEIFFER TURBO

BK

RD/BK

BN

VT

GN/RD

YE/RD

RD

RD/BU

REF:DGR # SG91C25068

1 2

3

EWM0120

4

BK

EWM0120

YE

BN

80 PLUS STYLE ON/OFF 100 PLUS STYLE ON/OFF

+24V

GN YE

VENT RELEASE

MOTOR PUMP

PUMP STATION

T AT SPEED

SET TURBO CONTROLLER TO

REM ON THE DISPLAY

VT

NOTE:

IF ALACTEL TURBO USED,

DO NOT USE 3 ROW / 44 PIN CONNECTOR

PROVIDED WITH PUMP CONTROLLER.

ATTACH PROVIDED CONNECTOR TO LOOM,

USING TIE WRAP.

TURBO CONTROLLER INTERFACE

USE PART # 94-EPM0944C

0V

RD

GN

YE

VT

RD

START/STOP

94-EWM8002

MODE I/P CONT'

BU

GN

WH

a

b

PIN 1

PIN 2

1

2

3

27

PIN 3

4

TURBO

PURGE

VALVE

PIN 5

PIN 6

RD

TURBO AT SPEED

YE

BU

WH

LIN

K

BK

BN

39

18

VT

94-EWM0008

31

TU

41

BRAKE+24V

7

GROUND

RD

42

RD

BU

GN

SET TURBO CONTROLLER TO

REM ON THE DISPLAY

BU

YE

WH

BK

TURBO AT SPEED

30

INHIBIT

6

36


LEYBOLD 10/151/361

RD

GN

MODE I/P CONT'

PENNING - LOADLOCK

BU

15

32

WH

GROUND

38


GROUND

PL (44 W 3 ROW)

EXT. FAULT

40

AMU TWO DC BIAS 0V

BK

BN

8

24

BK

AMU TWO DC BIAS +V

5

ACT 1300

CABLE & VALVE SUPPLIED

16

WH

Ov

+ 24v

RD

FIT LK13

ALCATEL ACT1300M

AMU TWO C1 0V

AMU TWO PARK/FREEZE

BK

CHAMBER TURBO

BK

YE

Ov

a

GN

b

1

2

PIN 3

RD

3

RD

4

PIN 1

PIN 5

PIN 6

AMU ONE C1 POS I/P +V

PIN 2

GN


AMU ONE C2 S/P +V

AMU TWO C2 0V

94-EWM0008

AMU ONE C1 S/P +V

SYSTEM POWER ON/OFF SWITCH + LAMP

LEYBOLD 1000/1500

AMU TWO C1 S/P +V

AMU TWO AUTO/MANUAL

AMU TWO C2 S/P +V

SWITCH PART # 94-ESM0200C

SWITCH PART # 94-ESM0200C

LEYBOLD NT10

BU

TMH071P / TMU071P / TPH261

Ov

LEAVE &

SLEEVE

LEAVE &

SLEEVE

REPLACE SUPPLIED CONNECTOR

TRANSFER PREVIOUS WIRES

CONNECT BN & GN / LINK 3 TO 11

GN

BN

WH

PIN 7

PIN 8

PIN 9

PIN 10

SYSTEM OFF (RED)

YE

WH

BK

N/O

BN

VT

OG

TURBO BRAKING

N/C

0v

TURBO AT SPEED

94-EWM0002

RL7 NC 1

RL7 NO 1

SYSTEM ON (GREEN)

PIN 13

RL7 NO 2

RL7 NC 2

RL7 COM 2

94-EWM8002

PIN 14

RL7 COM 1

PIN 31

LAMP

PIN 32

PIN 33

PIN 34

PIN 36

PIN 37

94-EWM0012

PIN 38

PIN 39

PIN 40

PIN 41

PIN 42

94-EWM0004

0V

N/C

94-EWM8002

N/O

94-EWM0208

RD

BU

GN

LAMP

YE

WH

BK

RD

RD

BU

EWM0120

RD

RD

RD

BU

RD

RD

N/C

RD

GN

YE

RD

WH

BU

LAMP

BK

LAMP

+24V

0V

0V

0V

+15V

-15V

N/O

N/C

RD RD

0V

-15V

RD

BU

+15V

0V

+24V

BU

BU

RD

GN

WH

N/O

RD

BU

BU

V1

V2

YE

RD

V3

BU

EMO OUT

RD

BU

EMO IN

GN

AMU ONE P TO P +V

94-E

WM

0002

0V

ALARM +

YE

WH

AMU TWO P TO P +V

94-E

WM

0002

HEAT +

BK

EWM0120

RD

HEAT +

0V

ALARM +

BU

RD

RD

BU

GN

BU

RD

BU

BU

RD

CURRENT SW +24V

CURRENT SW

BN

VT

OG

PK

RD

BU

TQ

GY

RD

RD/BU

GN/RD

CONTACTOR ON

YE/RD

WH/RD

RD/BK

BU

RD/BN

YE/BU

GN

WH/BU

BN

VT

OG

PK

RD

TQ

GY

BU

RD/BU

GN/RD

GN

YE

YE/RD

WH/RD

RD/BK

WH

RD/BN

YE/BU

RD

BU

MAIN ON LAMP

WH/BU

MAIN ON LAMP

CONTACTOR ON

0V

EMO IN

+ 24v(INTERLOCK CHAIN)

0v

JP4

VT

AMU ONE DC BIAS +V

Ov

AMU ONE DC BIAS 0V

AMU ONE PARK/FREEZE


AMU ONE P TO P +V

AMU ONE C1 POS 0V

AMU ONE P TO P 0V

AMU ONE C2 POS 0V

+ 24v

TP

12

LINK 14 DETAIL


AMU ONE C1 0V

AMU ONE C1 S/P +V

WH

0v

AMU ONE C2 S/P +V

BN

AMU ONE

0v

AMU ONE C2 0V

VT

+ 24v(INTERLOCK CHAIN)

OG

PK

AMU ONE AUTO/MANUAL

A

LOWER OR UPPER AMU

TQ

GY

B

Ov

Ov

BU

0v

PUMP ONE ON

UPPER AMU

RD/BU

GN/RD

LK 14

YE/RD

WH/RD

PUMP TWO ON

PUMP ONE RUNNING

+ 15v

0v

RD/BK

RD/BN

PUMP ONE FAIL

PUMP TWO RUNNING

PUMP TWO FAIL

0v

- 15v - 15v

YE/BU

WH/BU

VT

RD


He COOLING PRESSURE S/P +V


GN

TQ

WH

YE

BU

GN

He COOLING PRESSURE I/P +V

He COOLING FLOW I/P +V

GY

BK

WH

BK

He COOLING FLOW 0V

He PRESS & He METER

ASSISTED COOLING

+ 15v

YE

VT

RD/BN

BN EMO IN

BU

YE/BU

RD/BU

OG

RD

BN

YE/RD

RD

BU

OG

GN/RD

ONLY REQUIRED FOR AMU FITTED

TO UPPER ELECTRODE

ELSE WIRED DIRECT

+ 24v

+ 24v

BU

YE YE

PK

RD

WH/RD

0v

0v

PUMP TWO FAIL

GN

GN

WH

WH/BU

PUMP ONE FAIL

PUMP ONE RUNNING

PUMP ONE ON

WH

BK

RD/BK

PUMP ONE CURRENT SW

PUMP TWO RUNNING

BN

94-EWM0108 94-EWM0108

PUMP TWO ON

PUMP ONE CURRENT SW +24V

+ 24v

0v

RD

RD

BU

GN

WH

YE

WH

PUMP THREE ON >

< PUMP THREE FAIL

< PUMP THREE RUNNING

BK

BN

RD

RD

VT

BU

BU

GN

GN

OG

PK

TEMPERATURE CONTROLLERS

TEMP I/P +V

TEMP 0V

TEMP CONT S/P +V

POWER BOX WIRING

TEMP CONT 0V

ALARM +24V

ALARM O/P

NOTE:

100 PLUS STYLE ON/OFF

FIT LK22

V +

V -

94-EWM0004

HEAT ON O/P +

HEAT ON O/P -

BU

GN

SOFT VENT VLV

1D

2A

AB COM

TEMP CONT S/P +V

TEMP I/P +V

HEAT ON O/P +

2B

AA ALARM

TEMP 0V

HEAT ON O/P -

ALARM O/P

1A O/P1

1B

3A

GN

GN

YE

RD

BU

BU

94-EWM0104

RD

1C CRYO ENABLE>

<CRYO ENABLE

WH

BK

RD

BU

BN

VT

OG

ALARM +24V

PK

3D

GN

YE

L

N

AC SUPPLY

80 - 250 VAC

G5 CB8 2AMP

SEE DIAGRAM

94-SE91A19752

FOR AC WIRING

EARTH STUD

SEE DETAIL BELOW

94-MA00A23554

94-EWM0112

MAINS WIRING

FOR CONTROLLER(S) AND ELECTRODE

REF DRG. No.SE81A19439 V i

GN/YEL

BU

BN

NOTE:

REPLACE F1 ON 94-PC00S26866 WITH

94-EFF2150 = 5 AMP 20mm FUSE

TEMPERATURE PROBE WIRING DETAIL

RD

RD

RD

RD

RD

RD

WH WH WH

94-EWS0902

94-EWS0902

94-EWS0909

KEEP AS SHORT AS POSSIBLE, ALLOW FOR ONE REPAIR ON TEMPERATURE PROBE

TEMPERATURE PROBE

94-E

WM

0603

CRYO ENABLE>

<CRYO ENABLE

TEMP CONT 0V

ITEM 112

EUROTHERM

700 DEG C & 400 DEG C TEMPERATURE SNAP SWITCH ON PECVD SYSTEMS

BN

94-EWM0108

+ 15v

- 15v

N2 FLOW METER 0V WH

0v

N2 METER

ALL TURBOS

RD

N2 FLOW METER I/P +V GN

YE

BU

S/P +V

- 15v

0v

+ 15v

I/P +V

I/P 0V

RD

BU

YE

GN

WH

BK

EMC BOND

TOTAL CABLE LENGTH

TERMINATION LENGTH

CABLE PART #

025

OIPT CABLE# FITTED ONCE AT

MID-POINT OF CABLE

TERMINATION LENGTH

OIPT CABLE #

NOTE:

1. USE OPT/WI/4 AND OPT/WI/23.

2. WIRES TERMINATED AT PC00S26866 TO BE SLEEVED

AT EQUIPMENT IF NOT USED, ALL UNUSED WIRES TO BE REMOVED.

3. = CABLE FITTED AT ALL TIMES.

4. = CABLE FITTED OPTION.

5. = CABLE / ASSEMBLY WIRED TO W/O OPTION

6. UNLESS STATED ALL CONNECTIONS ARE TO PC00S26866

7. ETHERNET WIRING AND CANBUS REF DRG # SE81A26868 SHEET 3

8.

94-EWM0108

EMC BOND

I/P 0V

+ 15v

I/P +V

94-EST0006

FIT LINK IN 10V POSITION

INSIDE He PRESSURE UNIT

0v

- 15v

I/P 0V

0v

- 15v

+ 15v

SYSTEM FIT OPTION

I/P +VGN

WH

RD

BU

YE

GN

WH

RD

BU

YE

VT

0V

94-EWM8002

RD

RD

BU BU

BK

94-EWM8002

SNAP SW COM

SNAP SW NC

94-EWM0012

PIN 1 PIN 3

BU

RD RD

BU BU

24V>

24V<

24V>

24V>

24V>

FLOW 1 OK

FLOW 2 OK

FLOW 3 OK

RD

BU

GN

YE

SYSTEM INTERLOCKS

YE

+15V

-15V

0V

CM GAUGE 0V

CM GAUGE +V

CM GAUGE 0V

-15V

0V

CM GAUGE +V

+15V -15V

CM GAUGE 0V

CM GAUGE +V

0V

+15V

WH

GN

BU

RD

BU

YE

GN

WH

YE

BU

RD

CM GAUGE

YE

RD

GN

WH

94-EWM0108

RF 2/HEAT 2

RD

BK

170 DEG

WH

REF DRG # SE00C25489

OG

WH

OV

BU

BU

CONTROL VALVE WIRING

0 -400 DEG C RF BIAS TABLE

BLOW INTO ICP

OV

OV

RD

RD

RD

BLOW INTO LF INDUCTOR

VT

GN

AIR FLOW

BK

RL6 COM 1

RL6 NO 1

RD

BK

RDRD

BU

BU

N2 PRESSURE SWITCH

LF INDUCTOR

BU

SCREEN TO RF GEN

94-EWM0102

94-EWM0102

RF 1

RD

BK

BK

WH

YE

RD = +24V

BK = 0V

WH = PULSED OUTPUT

BLO

W IN

TO

UN

IT

WH

BK

RD

BU

LF INDUCTOR

BN

RD

RD

VT

VT

BU

OG

OG

AIR FLOW

BN

94-EWM0112

RL2 NO 1

RL2 NO 1

RL2 NO 1

RF ONE S/P +V

RD

RD

RF ONE REF I/P +V

RF ONE FWD I/P +V

RF ONE 0V

BK

BK

RL2 COM 1

BU

ICP 65

OG

RD

WH

BU

GN

VT

RD

BU

GN

VT

VT

94-EWM0102

RD

RL6 COM 1

RF TWO FWD I/P +V

BK

BK

RF TWO S/P +V

RF TWO 0V

RL6 NO 1

LINK

CHASSIS GROUND

MOTOR INTERLOCK

RL6 NO 1

RF TWO REF I/P +V

MOTOR INTERLOCK

+24V

RL6 NO 1

VT

SENSOR 1 +

SENSOR 1 -

DC SUPPLY

VT

RD

OG

WH

VT

RD

BU

GN

BU

94-EWM0102

RF ONE REF I/P +V

RF ONE REF 0V

RF ONE FWD I/P +V

RF ONE FWD 0V

RL2 NO 1

RF ONE S/P +V

RF ONE 0V

0 VOLT

0 VOLT

RL2 COM 1

INTERLOCK

INTERLOCK

RL2 NO 1

0 VOLT

RF TWO FWD 0V

RF TWO REF 0V

RF TWO REF I/P +V

RF TWO S/P +V

INTERLOCK

RL2 COM 1

INTERLOCK

0 VOLT

RF TWO 0V

RF TWO FWD I/P +V

OPEN VLV

CLOSE VLV

DIGITAL OV

ANALOG COMMON

WH

BK

BK

CONTROL MODE

BNBN

RF ONE FWD I/P +V

BU

OUT

0 VOLT

WH

VT

BK

INTERLOCK

INTERLOCK

GN

BU

RF ONE S/P +V

DC(-)

DC(+)

RF ONE REF I/P +V

RL2 NO 1

RL2 COM 1

BU

BK

SMC PART # ISE30-01-25

OIPT PART # 94-GVV0300

RD

OG

RL6 NO 1

YE

0 VOLT

RF ONE FWD I/P +V

0 VOLT

INTERLOCK

0 VOLT

VAT 612 ISO 63/100 APC

INTERLOCK

RF ONE S/P +V

RD

RF ONE REF I/P +V

RL2 NO 1

BU

YE

RL2 COM 1

BU

0 VOLT

RD

RF TWO S/P +V

YE

RF TWO 0V/LOAD -

1.2 MTR

BU

VT

OG

RD

BU

GN

WH

YE

CABLE SUPPLIED

GN


RL2 COM 1

RF ONE REF 0V

RF ONE S/P +V

RF TWO S/P +V

RF TWO 0V

RF TWO FWD I/P +V

RF TWO FWD 0V

RL6 NO 1

RF TWO REF I/P +V

94-EWM0004

RL6 NC 1


RF TWO REF 0V

RL6 COM 1

RL6 COM 1

INTERLOCK

INTERLOCK

RF TWO 0V/LOAD -

RD

BU

BU

VT

OG

RF TWO FWD I/P +V/LOAD +GN RL6 NO 1

RF TWO FWD I/P +V/LOAD +

RF TWO 0V/LOAD -

RF TWO S/P +V

RL6 COM 1

VT

RD

BU

GN

OG

TURBO BACKING VLV

DRY N2 PURGE VLV

TURBO PURGE VLV

SOFT ROUGH VLV

RF ONE FWD I/P +V

CABLE TO BE IDENTIFIED WITH VALVE NUMBER

CABLE IS NOT TO BE TWISTED

RD

BU 0 VOLT

GN

INTERLOCK

INTERLOCK

10 WAY SMC

OG

0V

WH

RF ONE S/P +V

VT

RF ONE REF I/P +V

0V

YE

YE

CM ISOVLV

PENNING ISOVLV

RL2 NO 1

RF TWO S/P +V

RL2 COM 1

RF TWO 0V


RF TWO REF I/P +V

BK

RL6 COM 1

RL6 NO 1

INTERLOCK

INTERLOCK

RD

BK

BK

RD

BK

RD

BK

RD

BK

BK

BU

GN

RD

RD

WH

OG

VT

RD

RD

RD

BK

VT

BU

PCB MOUNTED SMC(S)

He VLV

0V

ROUGHING VLV

VENT VLV

0V

SOFT VENT VLV

0V

0V

0V

0V

0V

0V

OG

VT

BN

GN

BK

GN

BU

WH

YE

PIN F

RF ONE FWD I/P +V

YE

YE

GN

RD

RD

ACT 1000

RD

GN

BU

OG

RD

BU

GN

0 VOLT

GN

INTERLOCK

INTERLOCK

WH

RF ONE S/P +V

VT

RF ONE REF I/P +V

YE

START/

STOP

ACT200T/600T

REMOTE

MODE

EXT

SAFETY

TER' BLK

BU

WH

GN

RD

YE

RL2 NO 1

ALCATEL

BU

YE

RL2 COM 1

YE

LINK PIN 5

TO PIN 6

RD

SPEED

TURBO

AT

BU

+24v

LOADLOCK TURBO LEYBOLD

94-EWM0008

RD

ENI 800

BU

RF ONE 0V

RD

YE

FOR NT20

LINK

PRESSURE SETPOINT +VE

VALVE POSISTION OUTPUT +VEWH

BK

BN

RD

BU

GN

YE

LINK BK

BK 0V

0V

0V

2

3

5

6

13

14

1 2 3 4 5 6 7 8 9 10

11 12 13 14 15 16 17 18 19 20

16

15

4

3

42

41

40

39

38

37

36

34

33

32

31

13

START

N/O

COMM

+24V

6

5

3

2

1

1

2

3

4

5

6

7

8

RD

94-EWM8002

BK

RD

BK

RD/0.5mm

SECONDARY EMO

AT CUSTOMER REQUEST

LINK

OR

NOTE:

LINK BLK27A WHEN SYSTEM NOT FITTED

WITH SECONDARY EMOREF:MJC

HEAT 1

RD

BK

WH

YE

WH

BK

RF GENERATOR POWER

CONNECTION PANEL

P1-BK/10mm

P2-BK/10mm

P3-BK/10mm

+24VDC

0VDC

94-L/GEN/RFG/200=208VAC 3 PHASE

94-L/GEN/RFG/201=400VAC 3 PHASEHFV8000

RD

RD

BU

BU

1-BK

2-BK

3-BK

E-GN/YE/10mm

E-GN/YE

SUPPLIED

94-EWM0102

1

2

3

4

BLUE

94-EPS2080

PL COMPONENT OF PART

NOTE:

TO BE USED IN CONJUNCTION WITH DIAGRAM # SE91C24202

ICP380 RF GENERATOR EMO

PIRANI - AUX

94-EWM9307

PIRANI - AUXILLIARY

GN

BK

BU

YE

BU

GN

YE

PFEIFFER

TMH071P/TMU071P/TMH262P

remote

MASS (GROUND)

SWITCH OUTPUT 1

+24 VDC

INPUT STANDBY/RESET

INPUT REMOTE/LOCAL

=

NC

X2 X1

POWER SUPPLY/

POWER UNIT

90-132/

185-265

VAC

PE

CABLE SUPPLIED WITH UNIT

YE

BN

BU

PUMPING STATION

0V WH

WH

CONTROL MODE APC >

0v-DIG

CLOSE >

OPEN >

0v-ANA

APC S/P +V

APC 0V

VAT 612 VLV POS' 0V

VAT 612 DIG 0V <

CM GAUGE 0V

CM GAUGE I/P +V

VAT 612 VLV POS' +V

0v

+24v

VT

GN

YE

BU

RD

WH

BK

BN

VT

PK

PK

94-EWM0112

AUX GAUGE I/P +V

AUX GAUGE 0V

+ 24v

DIG 0v

ANA 0v

-15v

+15v

BU

BK

OG

GN

BU

WH

AE RFX600A/1250/1251/3000/3001

DRESSLER 133/136

JF 300

CEASER 0230

AE RFX600A/1250/1251/3000/3001

DRESSLER 133/136

JF 300

CEASER 0230

RD

BK

RD

BK

BK

RD

USED ON

ALD SYSTEMS

ALL REMAINING CONNECTIONS

AS SHOWN ABOVE FOR SMC CONTROL

NOT REQUIRED FOR

ALD SYSTEMS

NOT REQUIRED FOR

ALD SYSTEMS

NOT REQUIRED FOR

ALD SYSTEMS

K5 OK

K5 OK

YE

YE

PK

GN

YE

BU

RD

WH

BK

BN

VT

ALD SYSTEM

STD SYSTEM

ALL SYSTEMS

94-MA91Z28348

CLEANROOM INTERFACE

REF:DRG # SE91D27448

OR

NT10

PIN 2

PIN 3

PIN 4

PIN 5

PENNING - CHAMBER

PFEIFFER PKR 251

SKT2

PENNING

94-EWM9307

BU (+24VDC)

OG (+0VDC)

BLK (+V SIGNAL)

GN (0V SIGNAL)

22

12

21

11GN

GN

YE

YE94-EWK2533C FITTED

TO CLAMP CABLE

ENSURE THAT CABLE ALLOWS FOR HOIST TRAVEL

94-EWM0104

RD

RD

BU

BU

+24v

HOIST OK

VACSTAT>

HOIST

GUARDMASTER

NOTE:

STANDARD 100/133 AND ALL ICP W/O'S

CHAMBER LID SWITCH REMAINS AS BOM.

ALD W/O'S CHAMBER LID IS CHANGED TO

94-ESZ6320

94-EWM0108

WH

WH

94-E

WM

0108

94-EGE0201 x 3

94-EGE0222 x 2

94-EWM0002

+15V

-15V

CM GAUGE 0V

CM GAUGE +V

BU

YE

RD

GN

WH

BU

YE

RD

GN

WH

94-E

WM

0108

BU

YE

RD

# 94-ESR2454

GN

YE

RD

BU

RD

GN

5

6

7

8

9

10

11

12

13

14

15

16

COM

1

2

3

4

RD

BU

RLB - 1

BU

BU

BU

BU

-15V

CM GAUGE 0V

CM GAUGE +V

0V

+15V

GN

WH

YE

BU

RD

ITEMS:94-ESR2454 / 94-EGE0201 / 94-EGE0222 ON DIN RAIL

0V

-15V

CM GAUGE 0V

CM GAUGE +V

0V

+15V

GN

WH

YE

BU

RD

CM GAUGE - TWIN SWITCHING

TPH521

PRIMARY GAUGE = LOW VACUUM

SECONDARY GAUGE = HIGH VACUUM

E.G.

2 TORR WITH 100mTORR

2 TORR = PRIMARY

100 mTORR = SECONDARY

10 TORR WITH 1 TORR

10 TORR = PRIMARY

1 TORR = SECONDARY

CHASSIS GROUND

RD

BU

PC00S26875

RF TWO S/P +V


RF TWO REF I/P +V

RL6 COM 1

RL6 NO 1

INTERLOCK

INTERLOCK

RD

RF TWO 0VBU

WH

GN

VT

AE LF5

CONNECTOR SUPPLIED

BY OEM

PIN E

PIN V

PIN H

PIN J

PIN F

PIN L

PIN K

PIN W

GREEN ECCO

OG

1A0


X.XX

X.X

X


2345

A

B

C

D

KLW DEB 23/05/05

PC2003 100 SYSTEM

INTERFACE WIRING

ES27512

1 OF 218

1:1

mm

16 13/01/10 28409 N2 PURGE ADDED TO ALCATEL PUMPS. 122P & A300H CTL UNIFIED 2 - 3A P.J.M J.B.W

17 02/02/10 29413 LF5 GEN PIN F EDWARDS PUMPS SIGNALS JULABO FCW2500 ADDED JRM JBW

330R/0.25W

94-ERB0233

330R/0.25W

94-ERB0233

330R/0.25W

94-ERB0233

18 19/02/10 29544 PAGE 1 - ADD 330 OHM RESISTORS TO WATER FLOW SWITCH 2B JRM JBW

PLC CAN

7AC911.9

5

9

4

8

3

7

2

6

1

00

Spare #

ENDPOINT

PLG 9W DG

5

9

4

8

3

7

2

6

1

00

12T/C-

V out

BNC

1

2

X3

EXP2712

1

2

3

4

5

6

7

8

9

10

11

12

X3

1

2

3

4

5

6

7

8

9

10

11

12

PARALLEL INTERFACE

SKT 25W DG

13

25

12

24

11

23

10

22

9

21

8

20

7

19

6

18

5

17

4

16

3

15

2

14

1

00

25W D SKT1

SKT 1/GASPOD

13

25

12

24

11

23

10

22

9

21

8

20

7

19

6

18

5

17

4

16

3

15

2

14

1

9W D PL

PL SLIT VLV

5

9

4

8

3

7

2

6

1

PUMP I/O

SKT 37W DG

19

37

18

36

17

35

16

34

15

33

14

32

13

31

12

30

11

29

10

28

9

27

8

26

7

25

6

24

5

23

4

22

3

21

2

20

1

00

BLK13

CAN LL PWR

1

2

3

4

5

6

PLC 2 CAN

7AC911.9

5

9

4

8

3

7

2

6

1

00

LN2 VLV

SKT 9W DG

5

9

4

8

3

7

2

6

1

00

X3

EXP2712

1

2

3

4

5

6

7

8

9

10

11

12

CB11/4A

JP64

DRY PUMP ONE

1

2

3

4

5

6

CAN

1

2

3

4

JP52

1

2

3

4

LASER E/POINT CAMERA

SUPPLIED WITH UNIT

1

2

3

VERITY

SKT 9W DG

5

9

4

8

3

7

2

6

1

00

X3

1

2

3

4

5

6

7

8

9

10

11

12

1L

13SM

C

1

2

LASER E/POINT CAMERA

SUPPLIED WITH UNIT

1

2

3

PL

94-EPP7003

1

2

GDN

LN2 VLV

PLG 9W DG

5

9

4

8

3

7

2

6

1

00

F/LINE

2W Q/M PL

1

2

CB10/6A = CHAMBER

JP55

PURGE SW

1

2

3

4

1L

X3

1

2

3

4

5

6

7

8

9

10

11

12

ESR1732

Solid State Relay

1

23

4

+

-

ac

ac

COLOUR CHART

BK

BU

GN

GY

OG

RD

VT

WH

YE

VIOLET

WHITE

YELLOW

ORANGE

GREEN

BROWN

BLACK

BLUE

GREY

RED

BN

X3

EXP2712

1

2

3

4

5

6

7

8

9

10

11

12

V out

BNC

1

2

CB11/4A

JP51

HOIST CONT INTER

1

2

3

4

5

6

EQT0002

BU

BN

5+

90 deg C

EST0001C

1

2

PK

TQ TURQUOISE

PINK

BLK15

TEMP PROBE

1

2

BLK20

GASPOD PWR

1

2

3

4

5

6

JP34

ENDPOINT

1

2

3

4

5

6

7

8

9

10

CHILLER

PLG 9W DG

5

9

4

8

3

7

2

6

1

00

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

16

17

18

19

TURBO VALVE

CONNECTOR SUPPLIED

2

3

1

GASPOD

SKT 25W DG

13

25

12

24

11

23

10

22

9

21

8

20

7

19

6

18

5

17

4

16

3

15

2

14

1

00

6-

5+

X5

94-EPP0206

1

2

3

4

5

6

11T/C+

EMC1

OR


OR TO CABLE SHELL






JP47

DRY PUMPS I/P

1

2

3

4

5

6

7

8

9

10

BLK26

1

2

3

4

5

6

FIREROD2/FRONT CHAMBER

G/SUN/HET/010

1

2250 W

NESLAB-RTE-7

PLG 15W DG

8

15

7

14

6

13

5

12

4

11

3

10

2

9

1

00

JP34

ENDPOINT

1

2

3

4

5

6

7

8

9

10

JP17

CHILLER

1

2

3

4

5

JP15A

1

2

HOIST CONT INTERLOCK

SKT 9W DG

5

9

4

8

3

7

2

6

1

00

2N

TEMP PROBE

1

2

ENDPOINT

SKT 9W DG

5

9

4

8

3

7

2

6

1

00

PUMP I/O

PLG 37W DG

19

37

18

36

17

35

16

34

15

33

14

32

13

31

12

30

11

29

10

28

9

27

8

26

7

25

6

24

5

23

4

22

3

21

2

20

1

00

94-ECC0512C

100n/50V

JP42

1

2

3

4

5

6

7

8

9W D SKT

SKT - SLIT VLV

5

9

4

8

3

7

2

6

1

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

16

EXD3604

4W terrm

HARTING SKT

CON16

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

16

REMOTE PUMP CONN'

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

16

17

PL-CHP

MAINS

A

B

C

D

JP8

PUMP CONTROL

1

2

3

4

5

6

7

ESR1732

Solid State Relay

1

23

4

+

-

ac

ac

FIREROD1/FRONT CHAMBER

G/SUN/HET/010

1

2250 W

BLK14

SUPPLY

1

2

3

4

5

6

PUMP PURGE SW & VLV

9W D PL

5

9

4

8

3

7

2

6

1

90 deg C

EST0001C

1

2

BLK1

SUPPLY IN

1

2

3

4

5

6

11T/C+

EBARA DRY PUMP CH

SUPPLIED

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

16

17

18

19

20

21

22

23

24

25

26

27

28

29

30

31

32

33

34

35

36

37

38

39

40

41

42

43

44

45

46

47

48

49

50

PUMP PURGE SW & VLV

9W D SKT

5

9

4

8

3

7

2

6

1

REG+E+PROG

CIRDIN_6-P SOLDER VIEW

1

2

3

5

6

4

V out

BNC

1

2

6-

FIREROD4/REAR CHAMBER

G/SUN/HET/010

1

2250 W

12T/C-

JP54

PURGE VLV

1

2

JP7

F/TRAP

1

2

PL-CHP

MAINS

A

B

C

D

JP47

DRY PUMPS I/P

1

2

3

4

5

6

7

8

9

10

12

SM

C1

2

CB11

2 AMP

D1

1N4004

F/LINE

2W Q/M SKT

1

2

BETTATECH-CU500

SKT 9W DG

5

9

4

8

3

7

2

6

1

00

ENDPOINT

PLG 9W DG

5

9

4

8

3

7

2

6

1

00


PLG 9W DG

5

9

4

8

3

7

2

6

1

00

CM SIGNAL

1

2

CHILLER

SKT 9W DG

5

9

4

8

3

7

2

6

1

00

JP10

INTERLOCK

1

2

GASPOD

PLG 25W DG

13

25

12

24

11

23

10

22

9

21

8

20

7

19

6

18

5

17

4

16

3

15

2

14

1

00

SKT

94-EPS7003

1

2

GDN

1 2 3

X3

EXP2712

1

2

3

4

5

6

7

8

9

10

11

12

X3

1

2

3

4

5

6

7

8

9

10

11

12

BLK1

SUPPLY

1

2

3

4

FIREROD3/REAR CHAMBER

G/SUN/HET/010

1

2250 W

JP66

F/LINE VENT

1

2

X3

1

2

3

4

5

6

7

8

9

10

11

12

ROUGH VALVE

CONNECTOR SUPPLIED

2

3

1

2N

BLK29

LN2 VLV OUT

1

2

JP61

CON4

1

2

3

4

PUMP PURGE SW & VLV

9W D PL

5

9

4

8

3

7

2

6

1

X3

EXP2712

1

2

3

4

5

6

7

8

9

10

11

12

CAN G

CAN L

VT/0.5mm

BU

CAN A - TRAFFIC LIGHTS / IDAC & SD1024 / EP MOTOR CONT

X3 PIN 1 LINKED TO PIN 2

OF HIGHEST NUMBERED

CAN FITTED TO SYSTEM

PK

GN/YE 0.5mm

GN/YE 0.5mm

94-EWM8022

CHAMBER PUMPDOWN

FITS INTO

BASE

2/CPU

COMMS - ALD

TERM

PC91S27461

415V SYS

NEUTRAL BUS BAR

TERM

CAN G

CAN L

CAN H

INSIDE POWER BOX

LD-250 SOFIE ENDPOINT

CAMERA INTERLOCK

shield

CAN H

BU/0.5mm

shield

RD

1 POLE CB/415V SYS

2 POLE CB/208V SYS +

SLEEVE BLUE WIRE

BLACK HEATSHRINK

BU

[LK19 NOT FITTED]

PC00S26866 JP52 (+24v)

BN

94-EWM0002


EARTH BUS BAR

EARTH BUS BAR EXZ0060/EXZ0062

IF REQUIRED USE T/C PL & SKT TO EXTEND

COVER : ESR1731

MOUNTED TO PANEL ON THE REAR OF SYSTEM


THERMAL SNAP SWITCH

BU

94-EWM0008

BN

PC91S28347

REF:94-SE91C28357

94-EPR0106

94-EPR010494-EPR0202

JOIN AND SLEEVE WITH

IN CONNECTOR SHELL

FITTED BEWTEEN

R.S.P. FANS

ETHERNET

CABLE HAS NO ROUTING

RD

VARIABLE TABLE/VAT CAN

R.S.P.

RD/BU

PK

X2

C1

GN

BU

RD

YE

X1

RD

GN

0

BU

2

BASE 2

CPU

YE

GY

4

6

RD

GN

RD/BU

OG

8A

C

BU

PK


IN CONNECTOR SHELL

E

NOT

USED

.

INNER CORE

BASE 6

DIGITALIN/OUTPUT

.

OUTER/SCREEN LD-250 SOFIE ENDPOINT

EXTERNALLY MOUNTED

BU

EXAMPLE

YE

94-EPR0106

YE

GN

GN

WH

WH

C

A

R

D

0 2

4

68

+12V

A

C

E

E

T

H

E

R

N

E

T

C3

.

0 VOLTS

BASE 1

X5

.

.

RD

C2

X4

FIT:94-ERB0310C - R69, R70, R71

PUMP RUN

Supply:

+24VDC

PUMP RUN

PUMP ALARM

X3

PUMP ALARM

PUMP WARNING

PUMP WARNING

NOTE:

FIT BATTERY INTO BASE 2 CPU - INSTRUCTIONS SUPPLIED WITH UNIT FROM O.E.M.

SET NODE SWITCHES ON BASE 2.

BOTH SET TO POSITION 2

SET NODE SWITCHES ON ETHERNET CARD.

UPPER SW TO 0.

LOWER SW TO 1.

PUMP START

PUMP START

0

TAKIO

DRY PUMP(S) CONTROL

2

4

68A

C

PUMP START

E

0

PUMP START

PUMP ALARM

2

4

PUMP ALARM

PUMP WARNING

PUMP WARNING

68A

PUMP RUN

PUMP RUN

C

E

EXAMPLE

BU

CAN

SYSTEM / USER

PC

EWM0108

PUMP START

PUMP RUN

ALARM COLLECTIVE

TRIP COLLECTIVE

94-EWM0002

N2 VLV

PUMP START

0 VOLTS

RD

VAT VLV SWITCH DETAIL

N2 VALVE LINK TO PUMP ON

PUMP START

COM

PUMP RUN

PUMP RUN

NC

NO

PUMP ALARM

PUMP ALARM

VARIABLE TABLE/VAT CAN PCB

RD

PUMP START

PUMP START

RD BU

BU

EWM0102

JP7


IN CONNECTOR SHELL

ROUGH VALVE SWITCH INPUT

RD

PUMP RUN

PUMP RUN

BK

BN

BU

PUMP ALARM

PUMP ALARM

ALCATEL DRY PUMPS

10

94-EWM0002

RD

11

BU

BU

14

15

21

20

22

RD

35

BU

36

47

48

49

50

RD

BU

GN

YE

RD

BU

GN

YE

0V

O/P

I/P

SIGN98R.S.P.

22

14

20

10

21

1

8

9

EMC BOND

TOTAL CABLE LENGTH

TERMINATION LENGTH

EDWARDS iM / iQ CONT

BK

CABLE PART #

025

OIPT CABLE# FITTED ONCE AT

MID-POINT OF CABLE

TERMINATION LENGTH

OIPT CABLE #

NOTE:

1. USE OPT/WI/4 AND OPT/WI/23.

2. WIRES TERMINATED AT PC00S26866 TO BE SLEEVED

AT EQUIPMENT IF NOT USED, ALL UNUSED WIRES TO BE REMOVED.

3. = CABLE FITTED AT ALL TIMES.

4. = CABLE FITTED OPTION.

5. = CABLE / ASSEMBLY WIRED TO W/O OPTION

6. UNLESS STATED ALL CONNECTIONS ARE TO PC00S26866

7. ETHERNET WIRING AND CANBUS REF DRG # SE81A26868 SHEET 3

8.

94-EWM0108

EMC BOND

SYSTEM FIT OPTION

EDWARDS iQ CONT

EDWARDS IL70/IH80/IH600EDWARDS QDP

40/80 Q SERIES 2

RD

94-EWM0008

R.S.P.

RD

RD

BU

BU

GN

YE

YEWH

YE/RD

BK

BK

COM 1

COM 2

NC 2

JP4

NC 1

NO 1

NO 2

GN

WH

CHAMBER FORELINE VENT CABLE & CONNECTOR TO REMAIN

WITHIN CONFINES OF MOUNTING PLATE

RD N/C

BK

N/ORD

GY

94-EWM8002

HOIST CONTROLLED

INTERLOCKS - ENDPOINT(S)

LN2 C/O


IN CONNECTOR SHELL

GLAND

IDAC

SPARE

BU

0V

POWER BOX

PUMPDOWN

HEATER

CONT'

REAR SERVICE PANEL

CONNECTOR POSITIONNOT SUBJECT TO

CHANGE

24V>

BU

415 VAC USE EFM1402

208 VAC USE EFM1502

IF USED WITH PUMPDOWN

HEATER CONT' CB11 = 4AMP

BU

RD

BK

94-EWM0603

RD

TURBO HEATER COLLAR

BN

415 VAC NEUTRAL BUSBAR

208 VAC TWIN CB

BN

GN/YE

BU

BU

*

CHILLER

*

BU

*

LN2 VALVE

HOIST CONT' I/L

ENDPOINT

BN

BU

GASPOD

PUMPI/O

TP

12

LINK 14 DETAIL

CABLE SUPPLIED

GN/YE

TURBO HEATER

COLLAR

EARTH BUSBAR

RD

REF:DIAGRAM SE91A19752 FOR AC VOLTAGE WIRING

ACT 600

BN

BU

AB

LK 14

94-EWM0002

BN

FORLINE TRAP HEATER

BU

RD

BU

R.S.P.

FOR OPTIONAL

AUXILLARY CONTACTOR

2

RD

RD

BU

RD

94-EWM8002

SERVICE PANEL

BU

5

94-EWM8002

94-EWM0120

A1

LN2 VALVE

NOTE:

EBARA DRY PUMP

CHAMBER OR LOADLOCK

REF:DRG # 94-SE91D29072

LN2 VALVE

GLAND ON THE

BU

RD

3

14

CONNECTOR SUPPLIED

K2 TO SUPPLY MAINS TO PUMP.

THE PUMP CONTROL "START" BUTTON

IS PRESSED TO TURN ON PUMP

13

K7

EQUIPMENT


PIN2

PUMP START

ETHERNET

1

A2

PIN1

6

4

DP START NO

OG

BK

DP START COM

DP READY

+24V

+24V

+24V

+24V

0V

0V

RD

BU

0V

0V

GN

YE

WH

BK

DP SIGNAL 2

DP SIGNAL 4

DP SIGNAL 3

BN

VT

OG

PK

GN/YE

PK

TQ

GY

RD/BU

GN/RD

NOTE:

GN & YE = DRY PUMP READY/RUNNING

BK & BN = DRY PUMP SIGNAL 2

OG & PK = DRY PUMP SIGNAL 3

GY & RD/BU = DRY PUMP SIGNAL 4

LINK

BK

YE

RD

GN

BU

OG

VT

WH94-EWM0008

94-EWM0012

YE

RD

RD

RD

BU

BU

GN

GN

YE

YE

BU

WH

WH

BK

BN

BN

GY

OG

WH

OG

RD

RD

RD

BU

BU

GN

GN

RD/BU

PK

YE

YE

WH

WH

GN

BUBK

BN

VT

OG

GN

OG

GY

YE

MODIFIED 'N' TYPE

94-MA00D21316

94-EWC0393

70cm TO 72cm

94-EWC0393

PECVD LF GEN : REFERENCE DRG # SE00C25489

3 MTR

'N' TYPE

94-EPC0005C

94-EPC0009C94-EPC1002

RF COAX

BULKHEAD

CONNECTION

EXTERNAL RF CONNECTION BULKHEAD TO AMU

INTERNAL RF CONNECTION BULKHEAD TO RF GENERATOR

'N' TYPE

94-EPC0005C

ICP180 3K0 RF GEN

0.9-1.0 MTR - DRESSLER 133/136 RF GEN

BNC/PL

94-CA91D100

RFX600A

DRESSLER 133/136

CEX OUT

1.0 MTR

94-EWC0067

94-EWC0067

BK

94-EWC0067

RFX600A

DRESSLER 133/136

CEX IN

BN

94-EWC0076

RFX600A

CEX IN

BNC/PL

3.7-3.8 MTR - DRESSLER 133/136 RF GEN

PECVD

0.7 - 0.8 MTR - ALL TYPES RF GEN

EPC1002

94-EPC0716C

1.0 - 1.1 MTR - NON DRESSLER RF GEN

94-EPC0716C

94-EWM0108

94-EPC0716C

94-EPC0717C

94-EPC0717C

INTERNAL EXTERNAL

94-EPC0717C

60cm TO 61cm

ICP 65 (USE ICP180 1K2 COAX DETAIL)

ICP180 1K2 RF GEN

94-EPC0716C

94-EWC039394-EPC0717C

94-EWM0104

BNC/SMA FOR ICP 180

RIE

94-EWC0393

SMA

USE APPROPRIATE COAX CONNECTOR SUITABLE FOR RF GENERATOR / AMU

BNCRFG3001

CEX OUT

1.3 - 1.4 MTR - NON DRESSLER RF GEN

RF COAX

BULKHEAD

CONNECTION

94-EPC0719



180cm TO 181cm

ICP380

R.S.P.

YE

S/P 0V

RD

R.S.P.

I/P +V

S/P +V

I/P 0V

MODIFIED 'N' TYPE

94-MA00D2131694-EWC0393

BU

42cm TO 43cm

94-EWC0393

'N' TYPE

94-EPC0005CHN MALE

94-EPC1001

94-EPC0009C

WH

GN

94-EPC1002

CHILLER(S)

S/P +V

I/P +V

RF COAX

BULKHEAD

CONNECTION



I/P 0V

S/P 0V

READY

RD

BU

94-EWM0112

GN

YE

WH

GN

RD

BU

GN

RD

BU

RD

YE

BU

GN

YE

YE

WH WH

BK BK

BN BN

VT

VT

OG

OG

ENDPOINT(S)


IN CONNECTOR SHELL

RD

BU

3.5 mtr

EDWARDS IL70/IH80/IH600

0 VDC

BK

+ 24VDC

CAN G

BK

CAN L

VT/0.5mm

94-EWM0108

YE

94-EXP7242

BU

ALL VERITY ENDPOINTS

shield

CAN L

shield

CAN H

RD

GN

WH

RD

GN

WH

BU

TERM

CAN G

YE

0 VDC

CAN L

CAN H

+ 24VDC

TERM

CAN G

LOADLOCK CAN VAT VALVE/VAR HEIGHT CAN OR CAN A


OF HIGHEST NUMBERED



OF HIGHEST NUMBERED


GN/YE 0.5mm

GN/YE 0.5mmGN/YE 0.5mm

H

94-EWM8022 94-EWM8022

GL

G

COVER : ESR1731

BN(WH)

BU


EXZ0060/EXZ0062

ON


THERMAL SNAP SWITCH

H

OFF

ICP SPACER

L

STRESS RELEIF

ATTACH SCREEN

(BU)WH

415V SYS

NEUTRAL BUS BAR

FIT AC WARNING LABEL

INSIDE POWER BOX

(EWZ0005)

FIT WARNING LABEL

BU

BN


BU(WH)

EWM0603

CHAMBER FIRERODS / 133 LOADLOCK

(BU)WH

(BN)GN

1 POLE CB/415V SYS


SLEEVE BLUE WIRE

BLACK HEATSHRINK

BN

FIT TEMPERATURE SENSOR USING M5 MOUNTING HOLE

NEXT TO THERMAL SNAP SWITCH-EST0001C

M5 CAP HEAD SCREW & PLAIN WASHER TO BE USED ON ASSEMBLY

FIT AC WARNING LABEL ON THE

SOLID STATE RELAY COVER

EARTH BUS BAR

BN

(EWZ0005)

BU

FIT WARNING LABEL

94-EWM8022

94-EWM0208

GY

(BN)GN

GY

GY

GY

GY



BU

GY

GY

GY

GN-YE

GN-YE

RD

94-EXZ0250 = CONTROLLER

BU

GN

EWM0002

94-EXZ0260 = COVER

FOR EARTH USE SUITABLE

POSITION ON PANEL

YE

WH

BK

BU

PUMPDOWN PIPE

+24V VIA IN'LOCK

+24V

+15V

-15V

0V

0V

GASPOD COMMS & POWER

RD

BN

94-EWM8107

BU

BN

BN

WH

YE

RD

SENSOR

GN

BU

RD

1.

BN



PTFE

BN

415V SYS

NEUTRAL BUS BAR

1 POLE CB/415V SYS


SLEEVE BLUE WIRE

BLACK HEATSHRINK

BN

WH

BU

CB9/6A = 133 LOADLOCK

BK/PAIRED WH

BK/PAIRED GN

EWM0603

0v

GN

TAPE

OG

94-EWM0002

GN-YE

+24v

GN-YE

YE

BN

94-EXZ0260 = COVER

BK/PAIRED YE

BK/PAIRED GN

REF:94-SE91D27463

BU

HEATER MAT

CAN_L

CAN_H


POSITION ON PANEL

CAN_GND

BK/PAIRED RD

RD

0v

BK/PAIRED YE

LOADLOCK CAN PCB INTERFACE WIRING

BU

BK/PAIRED RD

+24 VDC

0 VDC

EWM0002

BK/PAIRED WH

+24V VIA IN'LOCK

BU

RD

BU

RD

OG

94-EQT0350

+15V

0V

-15V

+24V

0V

BK

RD

BU

+24v

4mm DIA YE

RING CRIMP5mm DIA YE

RING CRIMP

YE

GN

DIG IN

-15v

BK/PAIRED BN


CONTROL UNIT

MOTOR AUX

GN/YE 4mm

CAMERA MAINS

SIGNAL IN

4.5 MTR

WH

V out

ANA IN

0v

+15v

94-EWM8002

VAC

STAT

CAN H

CAN G

CAN L

BK/PAIRED BN

SIGNAL

INTERLOCK

SUPPLY

RDRD

BU

HEATER CONTROLLERS

BU

BUBU

BUBU

SYSTEM PC

94-EXP0800

94-EPC0007

GN GN

YE

SUPPLIED

SUPPLIED

SUPPLIED

YE

WH

LD-250 & LEM- G50 ENDPOINT FITTED ENSURE THAT

INTERNAL WIRING SHOWN IN BOX

HOIST CONTROLLED INTERLOCKS - ENDPOINT(S)

ARE FITTED

WH

BK BK

SYSTEM EARTH STUD

BN

BN

RD

GASPOD EARTH STUD

R.S.P.

PUMP3 START O/P

PUMP3 RUNNING I/P

INNER CORE

OUTER/SCREEN

CORE

PUMP3 FAIL I/P

0 VDC

TERM

0 VDC

L/L TURBO ON O/P

L/L TURBO AT SPEED I/P

TERM

CAN G

LOADLOCK CAN PCB

CAN L

RD

CAN H

shield

CAN H

RD

BU/0.5mm

shield

RD

0 VDC

+ 24VDC

BK

SOFIE CONTROLLER


INTERNALLY MOUNTED UNIT

RD/0.5mm

BU/0.5mm

JOIN & SLEEVE

INNER CORE

OUTER/SCREEN

INNER CORE

OUTER/SCREEN

CORE

WHEN W/O LD-250 SOFIE ENDPOINT BASE BUILD

JP34 DISCONNECTED AND LABLE - JP34 N/U

GN

BU

YE

RD

HAAKE/LAUDA

94-EWC0076

94-EWC0076

3.5 mtr

A1

A2

E1

E2

E3

E4

E5

E6

SUPPLIED

RD

RD

BU

BU

OMRON - K3MA-J

D6F

WH

WH

GN

GN

YE

LINK

BN

BU

BK

YE

PK

PK

RD

BU

GN

YE

YE

GN

+24V

0V

94-EWM0008

WH

WH

BK

BK

94-EWM0008

DILUTE N2 FLOW ALARM

GY

VT

TQ

DRY PUMP ROTATION START NO

DRY PUMP ROTATION START COM

DRY PUMP READY

GN/RD

YE/RD

WH

WH

OG

BK

0 VOLTS

0 VOLTSWH

RD

BU

GN

WH

0 VOLTS

0 VOLTS

LEAVE AND SLEEVE

PUMP START

PUMP START

PUMP RUN

JOIN AND SLEEVE WITHIN

CONNECTOR SHELL

DRY PUMP SIGNAL 4

TRIP-DRY PUMP SIGNAL 2

ALARM-DRY PUMP SIGNAL 3

DILUTE N2

FLOW ALARM

RL1

EBARA

BK1 BK1

BK2BK2

BK3 BK3

GN/YE GN/YE

94-EWM5004

P1

P2

P3

EARTH

MAINS SUPPLY VIA

CUSTOMER OUTLET

BK1 BK1

BK2BK2

BK3 BK3

GN/YE GN/YE

94-EWM5004

P1

P2

P3

EARTH

MAINS SUPPLY VIA

CUSTOMER OUTLET

BLK15

TEMPERATURE SENSOR - THERMO COUPLE - WATER CIRCUIT - RIE

WH

94-EWZ0005

SENSER SUPPLY

BU

BU

RDRD

94-EWM0102

SENSER SIGNAL

+

-+

-94-EXZ0060

SP

AN

ZE

RO

+

-

T/C mV SENSOR

CONNECT TO THERMOCOUPLE

PART # 94-EXZ0061 FITTED ON

SYSTEM WATER OUT

MOUNTED TO R.S.P. NEXT SYSTEM - WATER IN / OUT

MOUNTED TO LOWER ELECTRODE - SCREENING BOX.CONNECT TO THERMOCOUPLE

FITTED TO ELECTRODE

SENSER SIGNAL

T/C mV SENSOR

-

94-EWM0102

+

94-EXZ0065

RD

ZE

RO

-

SP

AN

-

++94-EWZ0005

94-EXP9350

SHORT AS POSSIBLE & REPAIR

RD

BU

BU

WH

SENSER SUPPLY

GN

TEMPERATURE SENSOR - THERMO COUPLE - ELECTRODE - PECVD

94-EXP9350

GN

PC91S27461

PC00S26866

LOADLOCK FORELINE TRAP HEATER

CHAMBER FORELINE TRAP HEATER

BU

RD

SHORT AS POSSIBLE & REPAIR

REFERENCE:

DRG. # SE91C29730

NOTE:208V SYSTEM - SLEEVE BLUE WIRE WITH BLACK HEATSHRINK

'N' TYPE

94-EPC0009C

'N' TYPE

94-EPC0005C

'N' TYPE

94-EPC0005C

MODIFIED 'N' TYPE

94-MA00D21316

'N' TYPE

94-EPC0005C

'N' TYPE

94-EPC0005C

PURGE SWITCH ASSEMBLY

94-EWM0108

NOTE:

DIODE FOR VALVE FITTED ON PCB

PUMP PURGE VALVE

RD

RD

WH

WH

BK

BK

94-G/VAC/PMP/652

94-G/VAC/PMP/650

94-G/VAC/PMP/651

94-MA00A30505 - STD

94-MA00A30506 - HALOGEN

ALD =2.0 MTR - DRESSLER 133/136 RF GEN

NOTE:TEST MAY REQUIRE A CUSTOM LENGHT OF ANY RF COAX, DUE TO PROCESS REQUIREMENTS

4.5 MTR

STANDARD PLC SYSTEMS

CPU-PLC1

CAN G

CAN L

VT/0.5mm


OF HIGHEST NUMBERED


GN/YE 0.5mm

GN/YE 0.5mm

TERM

TERM

CAN G

CAN L

CAN H

shield

CAN H

BU/0.5mm 0 VDC

+ 24VDC

shield

CAN G

CAN L

VT/0.5mm

LOADLOCK CAN VAT VALVE/VAR HEIGHT CAN OR CAN A


OF HIGHEST NUMBERED


GN/YE 0.5mm

GN/YE 0.5mm

94-EWM8022

TERM

TERM

CAN G

CAN L

CAN H

shield

CAN H

BU/0.5mm

shield

0 VDC

+ 24VDC

FITS INTO

BASE

2/CPU

94-EXP7242

H

GL

G

ON

H

OFF

L

STRESS RELEIF

ATTACH SCREEN

ALD PLC 1

CPU-PLC1

94-EWM8022

ALD PLC 2

COMMS - STANDARD SYSTEMS

STANDARDALD

CAN_H

CAN_L

SHLD

CAN T

GN/YE 0.5mm

94-EXP2704

B&R #=IFF1

94-EWM8022

LD-250

VOUT

SUPPLIED

RD

BU

INTERLOCK

SIGNAL

SYSTEM PC

94-EXP0800

94-EPC0007

DIG IN

DIGITOOL ENDPOINT

CONTROL UNIT

MOTOR AUX CAMERA MAINS

SIGNAL IN V out

ANA IN

SUPPLIED

INNER CORE

OUTER/SCREEN

CORE

SUPPLIED DC

POWER UNIT

POWER BOX

94-EFM1402

LEM-G50

ENDPOINT


PLG 9W DG

PLG 9W DG

BK

BN

GY

PUMP ALARM

PUMP ALARM

PUMP WARNING

PUMP WARNING

PUMP RUN

PUMP RUN

PUMP START

PUMP START

YE

RD/BU

GN

RD

BU

NOTE:JP51-YE & BK MAY REQUIRE REMOVEL/LEAVE & SLEEVE

FOR INTERLOCK ON E-CHUCK-SE91B30903

EXTERNAL

CHILLER CONTROLJULABO FP88

HL/FP51 SERIES

ELECTRONICS MODULE

No. 8 900 100

RD

YE

BU

GN

LINK

BETTATECH CU500

RD

YE

BU

GN I/P 0V

I/P +V

S/P 0V

S/P +V

NESLAB RTE-7

RD

YE

GN

BU

I/P +V

0V

S/P +V

FITTED FOR VAT PM-5

REF:SHEET 1/2 VAT 612

4

3

2

1BN

BU

EWM0603

GN/RD

YE/RD

GN/RD

YE/RD

GN/RD

YE/RD

GN/RD

YE/RD

GN/RD

YE/RD

NOTE:

WHEN TWO WIRES ARE

INSERTED INTO ONE TERMINAL

OF ITEM 94-EXD3604.

USE 94-G-EPA3620

YE

WH

GN

BELDEN

LAPP YE WH GN

WH/OG BU/WH OG/WH

94-EWM8022 - SUPPLIER VARIATIONS

YE

WH

GN

YE

WH

GN

WH

GN

YE

YE

WH

GN

YE

WH

GN

YE

WH

GN

WH

GN

YE

WH

GN

YE

YE

WH

GN

WH

GN

YE

WH

GN

YE

WH

GN

YE

YE

WH

GN


BELDEN

LAPP YE WH GN

WH/OG BU/WH OG/WH


BELDEN

LAPP YE WH GN

WH/OG BU/WH OG/WH

94-G-VAC-PMP-653

YE

WH

GN

BU/0.5mm

REQUIRED WHEN SYSTEM

NOT W/O FROM DRY PUMP.

LOOMED JP47 TO REMAIN,

MARKED N/U.

3 MTR

94-EWM0008

OVER - HANGING LOADLOCK / SERVICE PANEL INTERFACE

94-G-EPS6000

SERVICE PANEL

RD

BU

GN

YE

WH

BK

RD

BU

GN

YE

WH

BK

1A0


X.XX

X.X

X


2345

A

B

C

D

KLW DEB 25/05/05

PC2003 100 SYSTEM

INTERFACE WIRING

ES27512

2 OF 218

1:1

mm

EWM0603

BN

BU

BN

BU

BN

EWM0603

BU

BN

BN

BU

EWM0603

TAPESLEEVE

STICK TAPE ONTO PUMPDOWN PIPE

2. PUT THE SENSOR ONTO THE TAPE

3. ENSURE SENSOR WIRE NOT TOUCHING

PUMPDOWN PIPEWORK

4. STICK TAPE ONTO SENSOR

5. ENSURE PTFE FULLY ENCLOSE TEMP,

SENSOR WIRES UNDER HEATER MAT

NOTES.

HEATER MAT

PL

94-EPP7003

1

2

GDN

SKT

94-EPS7003

1

2

GDN

12T/C-

1L

EQT0002

BU

BN

5+

6-

11T/C+

2N

ESR1732

Solid State Relay

1

23

4

+

-

ac

ac

90 deg C

EST0001C

1

2

COVER : ESR1731

BN(WH)


EXZ0060/EXZ0062


THERMAL SNAP SWITCH

(BU)WH


(EWZ0005)

FIT WARNING LABEL

BU

BN


BU(WH)

(BN)GN




94-EXZ0260 = COVER


POSITION ON PANEL

PUMPDOWN PIPE

SENSOR

1.PTFE

TAPE

HEATER MAT

BU

EWM0002

RD

BU

RD

BN

BU

BN

BU

BN

EWM0603

BU

BN

BN

BU

EWM0603

TAPESLEEVE

STICK TAPE ONTO PUMPDOWN PIPE

2. PUT THE SENSOR ONTO THE TAPE

3. ENSURE SENSOR WIRE NOT TOUCHING

PUMPDOWN PIPEWORK

4. STICK TAPE ONTO SENSOR

5. ENSURE PTFE FULLY ENCLOSE TEMP,

SENSOR WIRES UNDER HEATER MAT

NOTES.

HEATER MAT

PL

94-EPP7003

1

2

GDN

SKT

94-EPS7003

1

2

GDN

EWM0603

27

26

25

24

N2 PURGESTAND

N2 PURGESTART

VT

122P/ADS602, A300H

PUMPFAIL

PUMP

RUN

PUMP TEMPALERT

PUMP I/O

PLG 37W DG

19

37

18

36

17

35

16

34

15

33

14

32

13

31

12

30

11

29

10

28

9

27

8

26

7

25

6

24

5

23

4

22

3

21

2

20

1

00

DRY PUMP (NON-ALCATEL)

DRY PUMP (ALCATEL)

RD

BU

GN

YE

WH

BK

BN

VT

GY

GY

94-CA38484V02

+12V

0 VOLTS

PUMPSTART

16 13/01/10 28409 N2 PURGE ADDED TO ALCATEL PUMPS. 122P & A300H CTL UNIFIED 2 - 3A P.J.M J.B.W

GY

RD/BU

OG

PK


IN CONNECTOR SHELL

GN/RD

YE/RD

TC PL

94-EXZ0062

+

-

VT1/2

94-EPP7003

L

N

E

TC SKT

94-EXZ0060

+

-

VT3/4/5

94-EPP7003

L

N

E

1L

11T/C+

94-EXD3604

4W terrm

12T/C-

2N

VT1/2

94-EPS7003

L

N

E

5+

CB11/4A

6-

ESR1732

Solid State Relay

1

23

4

+

-

ac

ac

VT3/4/5

94-EPS7003

L

N

E

BU/1.0mm/06

BN

COVER : ESR1731

BU


BU/1.0mm/06

FORELINE HEATING

(BU)WH

BN

380V SYS

NEUTRAL BUS BAR

BN/1.0mm/05


94-EWZ0005

(BN)GN1 POLE CB/380 V SYS


SLEEVE BLUE WIRE

BLACK HEATSHRINK

BN

EWM0603



EARTH BUS BAR

BN/1.0mm/04BN/1.0mm/04

1 POLE CB/380 V SYS


SLEEVE BLUE WIRE

BLACK HEATSHRINK

GN-YE


94-EXZ0260 = COVER

FOR EARTH USE

SUITABLE POSITION

ON PANEL

EWM00302

BUBN

EWM0002

BU

RD

BU

RD

BU

BU

(BN)GN

BU

(BU)WH

BU

BU SUPPLIED

SUPPLIED

(BN)GN

(BU)WH

SUPPLIED

BN

TIE & TIDY NOT USED

THERMOCOUPLE

TIE & TIDY NOT USED

THERMOCOUPLE

SUPPLIED

BN

SUPPLIED

VT1 VT2

VT4VT3

BN

BN/1.0mm/05

TURBO ELBOW

VT5

FORELINE

ELBOW

FLEXI

BN

BU

TURBO TEE

EWM00302

SUPPLIED

R.S.P. ELBOW

BN

BU

GN-YE

BN/1.0mm

BN

BN

BU

BU/1.0mm

BU

1

2

3

4

HEATERS SUBJECT

TO W/O CHANGE

HEATERS SUBJECT

TO W/O CHANGE

TC PL2

94-EXZ0062

+

-

EXTERNAL HEAT

RSP SKT

A

B

C

D

TC PL2

94-EXZ0062

+

-

TC SKT2

94-EPZ0202

+

-

EXTERNAL HEAT

FREE PLUG

A

B

C

D

BN

BUBU

BN

EXTERNAL FLEXI

(BN)GN

(BU)WH

(BN)GN

(BU)WH

(BN)GN

(BU)WH

EWZ0005

EWM0302

SUPPLIED

SUPPLIED

OPTIONAL CONNECTION

TO TC SKT 1

BN

BNBU

BU

OPTIONAL FLEXI

94-EXZ0062

+

-

TC PL3

94-EXZ0062

+

-

TC SKT3

94-EPZ0202

+

-

FLEXI

VT2B

(BN)GN

(BU)WH

(BN)GN

(BU)WH

(BN)GN

(BU)WH

94-EWZ0005

OPTIONAL CONNECTION

TO TC SKT 1

OPTIONAL FLEXI

REG+E+PROG

CIRDIN_6-P SOLDER VIEW

1

2

3

5

6

4

FCW2500

RDYE

BU

GN

94-G-EPS6000

17 02/02/10 29413 LF5 GEN PIN F EDWARDS PUMPS SIGNALS JULABO FCW2500 ADDED JRM JBW

18 19/02/10 29544 PAGE 1 - ADD 330 OHM RESISTORS TO WATER FLOW SWITCH 2B JRM JBW

5

5

4

4

3

3

2

2

1

1

D D

C C

B B

A A

SIGN33SIGN34

SIGN11

SIGN31

SIGN12

SIGN30

SIGN17

SIGN12

SIGN17

SIGN[1..34]

SIGN2

SIGN22

SIGN18SIGN4

SIGN1

SIGN11

SIGN14

SIGN25

SIGN34

SIGN26

SIGN27

SIGN28

SIGN29

SIGN33

SIGN15

SIGN15

SIGN16

SIGN16

SIGN32

SIGN31

SIGN17SIGN18

SIGN23

SIGN19

SIGN13

SIGN20

SIGN30

SIGN24

SIGN21

SIGN32

SIGN22SIGN23

SIGN19

SIGN24SIGN25SIGN26SIGN27SIGN28SIGN29SIGN30

SIGN1SIGN2SIGN3SIGN4SIGN5SIGN6SIGN7SIGN8SIGN9SIGN10SIGN11SIGN12SIGN13SIGN14

SIGN3

SIGN31

SIGN7

SIGN10

SIGN9

SIGN8

SIGN21

SIGN20

SIGN6SIGN5

+24

DIG 0v

DIG 0v

+24

DIG 0v

DIG 0v

DIG 0v

DIG 0v

+24

+24

DIG 0v

+24

DIG 0v

DIG 0v

DIG 0v

DIG 0v

+24

DIG 0v

+24

+24+24

+24

+24

+24

DIG 0v

+24

DIG 0v

+24

+24

DIG 0v

DIG 0v

DIG 0v

+24

Size DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology


02SE91C27460 Friday, November 11, 2005

1 1

A2

100 SYS LOADLOCK CAN PCB SCH

\\UKPTSERVER03\ELECTRICAL DRAWINGS\PDF FILES\100'S\CURRENT_BLUE\LOOMS\BLUE 100\LOADLOCK\LOADLOCK PCB REV0

Thursday, August 11, 2005 KLWSize DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology



1 1

A2



Thursday, August 11, 2005 KLWSize DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology



1 1

A2



Thursday, August 11, 2005 KLW

WAFER PRESENT I/P

F/TRAP ENABLE O/P

0v

0v

0v

0v

SOFT ROUGH PUMP O/P

0v

SPARE I/P 1 (I/P 15)SPARE I/P 2 (I/P 16)

PUMP 3 RUNNING I/PPUMP 3 FAIL I/P

MOTOR +

MOTOR +

MOTOR -

MOTOR -

SPARE O/P 1 (0/P 16)

PUMP 3 START O/P

WAFER LIFT UP I/P

WAFER LIFT DOWN I/P

WAFER UNCLAMPED I/P

WAFER CLAMPED I/P

ATMOSPHERE SW

ARM LOAD OPTICARM HOME OPTIC

ARM TO HOME ARM TO LOAD

+24VDC

0v I/P+24v I/P

ATMOSPHERE SW I/P

0v

+24VDC

+24VDC

ROUGH/TURBO (NON GATE VALVE) O/P

LID SW

TURBO BACKING (WITH GATE VALVE) O/P

ROUGH/TURBO (NON GATE VALVE)TURBO BACKING (WITH GATE VALVE)TURBO GATE VALVE

ANODE LOADCATHODE LOADCOLLECTOR LOAD

ANODE HOMECATHODE HOMECOLLECTOR HOMEEMITER

EMITER

SLIT VALVE OPENSLIT VALVE CLOSE

0v

0v

LOAD

HOME

0v

PUMP 3 START

WAFER CLAMP/UNCLAMPWAFER LIFT UP/DOWN

+24VDC

I = ARM AT LOAD0 = ARM NOT AT LOAD

SLIT VALVE OPENSLIT VALVE CLOSED

[LK19 NOT FITTED]PC00S26866 JP52 (+24v) >

SLIT VALVE PIN 7SLIT VALVE PIN 1

SLIT VALVE PIN 3

SLIT VALVE PIN 4

SLIT VALVE PIN 2SLIT VALVE PIN 8

L/L TURBO ON O/P< SPARE INTERLOCK 1 I/P

01 ---- FIRST ISSUE : REFERANCE W/O 814727

WAFER LIFT UPWAFER LIFT DOWN

WAFER CLAMPEDWAFER UNCLAMPED

+24VDC

TURBO AT SPEED

LOAD ARM AT HOMELOAD ARM AT LOAD

PUMP 3 RUNNINGPUMP 3 FAIL

SLIT VALVE OPEN O/P

SLIT VALVE CLOSE O/P

WAFER CLAMP/UNCLAMP O/P

WAFER LIFT UP/DOWN O/P0v

0v

0v

0v

LID SW COM O/P (+24VDC)LID SW NC I/P

0v

WAFER PRESENT

TURBO AT SPEED I/P

SOFT ROUGH PUMPVENTSOFT VENT

0v

0v O/P

+24VDC

23/07/2004

ARM TO HOMEARM TO LOAD

+24VDC

ARM TO LOAD

+24v O/P

TURBO GATE VALVE O/P

+24VDC

FORELINE TRAP ENABLE

+24v

I = ARM AT HOME

0v O/P+24v O/P

+24VDC

0 = ARM NOT AT HOME

+24v

ARM TO HOME

VENT O/P

0v

SOFT VENT O/P

L/L TURBO ON O/P

0v

0v

0v

0v

SPARE O/P 1 (0/P 16)

SPARE I/P 1 (I/P 15)SPARE I/P 2 (I/P 16)

OPEN CLOSED

SW1

SW2

1 1

3 3

7 7

4 4

2 2

8 8

VAT - SERIES 021SW#

02 30/10/05 REF: ECO17623:MOTOR SIGNALS CORRECTED, SLIT VALVE INTERLOCK CORRECTED.17623

DEB

C10.1uf/63vC10.1uf/63v

R19

10K/0.25W

R19

10K/0.25W

R8

27K/0.25W

R8

27K/0.25W

Q1ETB0450Q1

ETB0450

R3

4K7/0.25W

R3

4K7/0.25W

JP17

ARM OPTIC I/P

JP17

ARM OPTIC I/P

12345678

R13

2K2/0.5W

R13

2K2/0.5W

JP5

PUMPING SMC VLV

JP5

PUMPING SMC VLV

12345678910

JP16

WAFER PRESENT

JP16

WAFER PRESENT

12345

JP13

SPARE I/O

JP13

SPARE I/O

12345

R7

470R/1W

R7

470R/1W

JP7

F/TRAP

JP7

F/TRAP

12

R5

470R/1W

R5

470R/1W

D4

LED

D4

LED

Q7ETB0550Q7ETB0550

R9

27K/0.25W

R9

27K/0.25W

JP9

SLIT VLV SW

JP9

SLIT VLV SW

123456

R16

10K/0.25W

R16

10K/0.25W

JP15

LOADING VALVES

JP15

LOADING VALVES

12345678

R10

27K/0.25W

R10

27K/0.25W

D5

LED

D5

LED

F1

1A

F1

1A

JP2

CAN I/P PWR

JP2

CAN I/P PWR

12

R11

27K/0.25W

R11

27K/0.25W

Q3ETB0450Q3

ETB0450

JP11

F/LINE VENT

JP11

F/LINE VENT

12

JP8

PUMP CONTROL

JP8

PUMP CONTROL

1234567

Q5ETB0450Q5ETB0450

JP4

CAN O/P PWR

JP4

CAN O/P PWR

12

JP6

ATOM SW

JP6

ATOM SW

12345

R14

15K/0.25W

R14

15K/0.25W

JP10

INTERLOCK

JP10

INTERLOCK

12

R4

150R/4W

R4

150R/4W

R17

15K/0.25W

R17

15K/0.25W

R6

470R/1W

R6

470R/1W

Q2ETB0450

Q2ETB0450

JP1

CAN I/P

JP1

CAN I/P

12345678910111213141516

Q6ETB0450

Q6ETB0450

BLK3

MOTOR

BLK3

MOTOR

12

JP14

WAFER SW

JP14

WAFER SW

12345678

D3

LED

D3

LED

Q4ETB0450

Q4ETB0450

R18

2K2/0.25W

R18

2K2/0.25W

R15

2K2/0.25W

R15

2K2/0.25W

BLK2

T/GATE VLV

BLK2

T/GATE VLV

12

JP3

CAN O/P

JP3

CAN O/P

12345678910111213141516

JP18

X3 SUPPLY

JP18

X3 SUPPLY

12

Q8ETB0550Q8ETB0550

BLK1

SUPPLY

BLK1

SUPPLY

1234

D1

1N4004

D1

1N4004

JP12

LID SW

JP12

LID SW

12

+ C222uf/35v

+ C222uf/35v

R12

2K2/0.5W

R12

2K2/0.5W

SKT

A

B

C

D

E

F

H

J

K

L

14SM

C1

2

11SM

C1

2

JP14-100/133

EPM0208C

1

2

3

4

5

6

7

8

F/LINE

94-EPM3102

1

2

JP15-100/133

EPM0208C

1

2

3

4

5

6

7

8

7SM

C1

2

JP9-100/133

SLIT VLV SW

1

2

3

4

5

6

10SM

C1

215

SM

C1

2

20SM

C1

2

PL

A

B

C

D

E

F

H

J

K

L

5

9

4

8

3

7

2

6

1

00

L/L LID u SW

JP5-100/133

EPM0210C

1

2

3

4

5

6

7

8

9

10

SKT WC

94-EPM3204

1

2

3

4

3SM

C1

2

PL WC1

94-EPM3104

1

2

3

4

JP17-100

EPM0208C

1

2

3

4

5

6

7

8

JP12-100

EPM0202C

1

2

9W D PL

PL - SLIT VLV

5

9

4

8

3

7

2

6

1

BLK3-100

1

2

BLK2-100/133

TURBO G/VLV

1

2

9W D SKT

SKT - SLIT VLV

5

9

4

8

3

7

2

6

1

16SM

C

1

2

COLOUR CHART

BK

BU

GN

GY

OG

RD

VT

WH

YE

VIOLET

WHITE

YELLOW

ORANGE

GREEN

BROWN

BLACK

BLUE

GREY

RED

BN

5

9

4

8

3

7

2

6

1

00

21SM

C1

2

8SM

C1

2

MOTOR

A -+

9W D SKT

SKT - SLIT VLV

5

9

4

8

3

7

2

6

1

EMC1

OR


OR TO CABLE SHELL






9SM

C1

2

F/LINE

94-EPM3202

1

2

PK

TQ TURQUOISE

PINK

JP11-100/133

F/LINE VENT

1

2

94-EIQ0055

NOTE:

1. UNLESS STATED OR SUPPLIED ALL PCB / CAN 1 LOADLOCK

WIRE TO BE EXTRACTED FROM MULTI-CORE CABLE.

2. ALL SMC VALVES ARE SUPPLIED WITH CONNECTION CABLES.

133 LOADLOCK - ARM SENSORS CABLBE SUPPLIED.

3. REFERENCE DIAGRAM # SE91A27512 FOR REMAINING INTERFACE WIRING.

LOADLOCK PCB TO INTERFACE PCB AND COMMS.

4. UNLESS STATED - ALL WIRING DETAIL USE FOR 100 & 133 LOADLOCKS.

SHEET 2/2 FOR 133 LOADLOCK MOTOR DRIVEN

94-EIQ0055

A

C E

K

A

C E

K

BU

.

YE

VT

BU

EWM0008

GN

BN

YE

BN

RD

GN

WH

VT

RD

BU

BKBK

100 SYS LOADLOCK SENSER WIRING

10 PIN SEAL

WH

BK

.

AND LOOM IN PTFE SPIRO WRAP

LOADLOCK 100 SYSTEM

INTERNAL WIRING

.

WH

BK

.GN

OG

.

VT

BU

HOME OPTIC

RD

VT

YE

WH

RD

.

OG

10 PIN SEAL

LOAD OPTIC

YE

GN

TOP VIEWLOAD

OPTIC

HOME

OPTIC

EWM0002

COM

RD

BU

N.C.

BU

EWM0002

N.O.

BU

BU

WAFER

CLAMP

RD

RD

WAFER

LIFT

TURBO

BACKING

WITH GATE VLV

SOFT

ROUGH

SOFT

VENT

RD

EWM0004

SLIT VLV

OPEN

SLIT VLV

CLOSE

L/LOCK

VENT

L/LOCK

ROUGH

RD

BK

BK

BK

BK

RD

RD

RD

DIODE FITTED ON PCB

WAFERCLAMP ACTUATOR

TURBO GATE VALVE

EWM8002

RD

RD

BU

BU

PIN1

PIN2

CONNECTOR SUPPLIED

BN

BN

WAFERLIFT ACTUATOR

BU

RF COVER

WAFER LIFT

SENSOR DOWN

EPM0813C

BU

WAFER LIFT

SENSOR UP

WAFER CLAMP

SENSOR UPRD

GN

BU

WAFER CLAMP

SENSOR DOWN

BU

YE

BN

BN

MOUNTED AT CLAMP ACTUATOR (100 ONLY)

BU

BU

GN

RD

YE

EWM0004

BK

RD

BK

RD

BK

RD

7

14

14

20

20

11

11

21

21

BK

RD

BK

RD

BK

RD

BK

RD

BK

RD

8

8

9

9

10

10

3

3

RD

GN

BU

YE

RD

RD

BK

BK

RD

GN

BU

YE

RD

BU

GN

YE

WH

BK

EWM0008

CHECK

GN

EWM0008

YE

RD

BU

GN

YE

WH

BK

YE

RD RD

WHWH

BK BK

ADDITIONAL WIRING FOR

OVER-HANGING LOADLOCK

BUBU

GN

133 MOTOR DRIVEN LOADLOCK USE SHEET 2/2

133 MOTOR DRIVEN LOADLOCK USE SHEET 2/2

BK

RD

BK

RD

RD

RD

BK

BK

USE PTFE WIRE 94-EWS09##INTERNAL WIRING

7

OPERATION

CABLE & CONNECTOR TO REMAIN

WITHIN CONFINDS OF MOUNTING PLATE

RD

N/CBK

N/O

RD

BU

RD

BK

EWM0002

RD

BU

EPM0202C

SERVICE PANEL

94-EPM0909

94-EPM0809

94-EPH1209

94-EPH1209

94-EPH1209

94-EPM0809

94-EPM0809

94-EPH1209

W/LIFT PLW/LIFT SKT

87654321

A

B

C

D

E

F

A3


X.XX

X.X

X

Issue Date ECN Modification DrawnZone KLW JBW 11/06/2009

100/133 SYSTEM LOADLOCK CAN LOOM SE91D27463

1 OF 210

1:1

mm

6

5

4

3

2

1

WAFER CLAMP ACTUATOR SENSORS (133 ONLY)

BU

BU

BN

BN

BN

BN

BU

BU

ACTUATOR 1

UP

ACTUATOR 2

UP

ACTUATOR 1

DOWN

ACTUATOR 2

DOWN

1

3

4

6

SKT WC PL WC1MOUNTED NEAR CLAMP ACTUATORS (133 ONLY)

EWM0004

GN

YE

BU

RD

94-G-EPM3206 94-G-EPM3306

(100 ONLY)

(100 ONLY)

(133 ONLY)EWM0004

8 12/06/09 27367 RV1 VARISTOR 94-G-ERZ0140 ADDED TO RL3/10K RESISTORS ADDED TO MD123 Plus.

9 09/07/09 28340 ADD EXTRA WAFER CLAMP SWT FOR 133 SYSTEMS + CONVERT TO ACAD 8A JBW PJM

10 04/02/10 28964 REMOVE DETAILS OF WIRING TO PCB. SPACE OTHER ITEMS OUT (SHT1) A4 - D4 RDE JBW

X2

EXP2718

1

2

3

4

5

6

7

8

9

10

11

12

13

14

15

16

17

18

10K

JP17

ARM OPTIC I/P

1

2

3

4

5

6

7

8

PL1

94-EPM3104C

1

2

3

4

PL-LLM

94-EPM3112

1

2

3

4

5

6

7

8

9

10

11

12

RV1

94-G-ERZ0140

GUARDMASTER

SW DPST

R18

LINK

ICS1

94-ERZ0064

7 8 9

D4

LED

4K7/0.25W

94-ERB0347C

R19

10K/0.25W

R15

LINK

PL LLSEN

94-EPM3306

1

2

3

4

5

6

JP16-94-PC91S27461

WAFER PRESENT

1

2

3

4

5

SKT-LLM

94-EPM3212

1

2

3

4

5

6

7

8

9

10

11

12

SKT LLSEN

94-EPM3206

1

2

3

4

5

6

D5

LED

BLK1-94-PC91S27461

SUPPLY

1

2

3

4

SKT1

94-EPM3204C

1

2

3

4

R12

LINK

R16

10K/0.25W

10K

EMC1

OR


OR TO CABLE SHELL






123456

R13

LINK

RL3

JP12-94-PC91S27461

LID SW

1

2

BK

BU

GN

GY

OG

RD

VT

WH

YE

VIOLET

WHITE

YELLOW

ORANGE

GREEN

BROWN

BLACK

BLUE

GREY

RED

BN

10K

JP17-94-PC91S27461

EPM0208C

1

2

3

4

5

6

7

8

D1

94-EDA4004C

CB16

SIGN11

SIGN12

DIG 0v

DIG 0v

DIG 0v

+24+24

+24+24 +24+24

94-EWM0002

BU

94-EWM0002

BU

RD

BN

BU

BU

94-G-ESR0010

94-G-ESR0011

BN

21

A2

A1

6

3

11

BU

RD

BU

MDI23Plus

BN

BU

RD

BK

YE/WH

OG/WH

PE/WH

GN

BU/WH

RD

12 RD

21 22BU RD

ENSURE OPERATION

BU 11

RD

YE

GN

BK

WH

BU

BU

GN

YE

WH

BK

RD

94-EWM0008

SLIT/VAT VLV

ARM AT HOME

FAR FROM

CLOSE TO

SLIT/VAT VLV

ARM AT LOAD

BN

BN

BK

BK

BU

BU

- - + + Rdy

LN

DRA240-48x

BN

BU

GN

-YE

94-EWM0302

BN

BU

DC OUTPUT

AC INPUT

94-EXP4805

RD

RD

BU

SUPPLIED

SUPPLIED

RD

BU

94

-EW

M0002

BU

BUBU

BU

BU

RD RD

RD

94-EWM0002

94-EWM0002

94-EWM0302

RD

BU

+24VDC O/P

0VDC O/P

<+24VDC

+24VDC>

+24VDC I/P

0VDC I/P

94-EWM0603

TO NEUTRAL BUSBAR

TO EARTH BUSBAR

BN/2.5mm

GN-YE/2.5mm

BU/2.5mm

240VAC = 94-EFM1404

110VAC = 94-EFM1406

LOAD

HOME

I = ARM AT LOAD

0 = ARM NOT AT LOAD

I = ARM AT HOME

0 = ARM NOT AT HOME

b

b

c

c

e

e

Q7-REMOVE

Q8-REMOVE

LINK

LINK

R14-REMOVE

R17-REMOVE

MOD to 94-PC91S27461

REPLACE WITH LINK - R12, R13, R15, R18.

REMOVE R14, R17, Q7 & Q8.

LINK Q7 BASE TO Q7 EMITTER (D4).

LINK Q8 BASE TO Q8 EMITTER (D5).

94

-EW

M0002

POWER BOX

COVER & MOUNTING KIT:

94-G-MD93B29682

94-G-MD93B29681

0V94-G-EMM0045

REMOVE & SLEEVE

YE/RD-REF SHT 1/2

94-ERB0410 x 3

BK

RD

GN

BU/WH

YE/WH

PE/WH

OG/WH

NOTE:

10K RESISTORS - 94-ERB0410

MUST BE FITTED ON MOTOR.

REF:D.SHERGOLD

SUPPLIED

BN

BK

BU

WAFER TRACKING-133

MOUNTED ON

LOADLOCK

VIEWPORT

LOADLOCK PCB

87654321

A

B

C

D

E

F

A3


X.XX

X.X

X

Issue Date ECN Modification DrawnZone KLW JBW 11/06/2009

100/133 SYSTEM LOADLOCK CAN LOOM SE91D27463

2 OF 210

1:1

mm

8 12/06/09 27367 RV1 VARISTOR 94-G-ERZ0140 ADDED TO RL3/10K RESISTORS ADDED TO MD123 Plus.

9 09/07/09 28340 ADD EXTRA WAFER CLAMP SWT FOR 133 SYSTEMS + CONVERT TO ACAD 8A JBW PJM

10 04/02/10 28964 REMOVE DETAILS OF WIRING TO PCB. SPACE OTHER ITEMS OUT (SHT1) A4 - D4 RDE JBW

5

5

4

4

3

3

2

2

1

1

D D

C C

B B

A A

SIGN32

SIGN1SIGN29

SIGN3

SIGN34

SIGN5SIGN6

SIGN27

SIGN28

SIGN38

SIGN7SIGN8SIGN9SIGN10SIGN11SIGN12SIGN13SIGN14SIGN15

SIGN13

SIGN20SIGN22SIGN24

SIGN16

SIGN14

SIGN23

SIGN11

SIGN2

SIGN15

SIGN36

SIGN37

SIGN35

SIGN21

SIGN[1..38]

SIGN16

SIGN5

SIGN33

SIGN7

SIGN37

SIGN36

SIGN6SIGN38

SIGN19

SIGN12

SIGN8

SIGN2

SIGN4

SIGN17

SIGN19

SIGN30

SIGN33

SIGN34

SIGN18SIGN19SIGN20

SIGN35

SIGN21

SIGN21

SIGN22SIGN23SIGN24

SIGN9

SIGN33

SIGN25

SIGN10

SIGN3

SIGN26

SIGN1

SIGN27

SIGN25SIGN26

SIGN28

SIGN17

SIGN18


SIGN31

SIGN20

DIG 0v

+24

DIG 0v

DIG 0v

DIG 0v

+24

DIG 0v

+24

+24

+15

+24-15

DIG 0v

DIG 0v

-15

DIG 0v

+15

+24

DIG 0v

+24

DIG 0v

DIG 0v

+15

+15

-15

DIG 0vDIG 0v

+24

+24

Size DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology


02SE91D28346 Thursday, June 14, 2007

1 1

A3

VARIABLE TABLE AND VAT CAN SCH

\\UKPTSERVER03\ELECTRICAL DRAWINGS\PDF FILES\100'S\CURRENT_BLUE\LOOMS\BLUE 100\VAT_VAR\CA

Monday, October 17, 2005 KLWSize DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology



1 1

A3



Monday, October 17, 2005 KLWSize DWG NO Rev

Sheet of


Drawn on

North End, Yatton,

Bristol BS49 4AP

UK

Last Modified:

Filename:


by

Checked on by

Oxford Instruments

Plasma Technology



1 1

A3



Monday, October 17, 2005 KLW

02 30/10/05 REF. ECO17624 - RL5, RL6 ADDED = IMPROVED CONTROL OF VAT PM-5

ZERO ENABLE

<PRESS S/P

<POS S/PPOS R/B >

< LEARN ENA< PRESS/POS ENA

<PRESS S/P<POS S/P

TABLE HEIGHT >

PRESS R/B >

PRES & POS S/P >

PRESS R/B

< DIGITAL VAT COMMON

ZERO ENABLE >

< ZERO ENABLE

0v

+24v

+24v

+24v 0v

+15v

-15v0v

0v+24v

+24v

MODE SELECT PRESS/POS

+24v

LOWER SW

LEARN ENA >

+24v

MODE SELECT LOCAL/REM

DIGITAL VAT COMMON >ANALOGUE VAT COMMON >

UPPER SW

0v

PANEL SW

0v

PRESS S/P

SPARE DIG I/P - 2SPARE DIG I/P - 3SPARE DIG I/P - 4

SPARE DIG I/P - 5SPARE ANA O/P - 1

T/H ON-OFFT/H DIRECTION

T/H SPEED

0v

POS S/P

< DIGITAL VAT COMMON

LOWER SW >

UPPER SW >

POS R/B

<OPEN<CLOSE

OPENCLOSE

PANEL SW >

CM + >

< CM +

LOCAL/REM >

MODE SELECT LEARN

10v DC REF0v

PRESS/POS ENA >

0v

0v

0v

0v 0v

0v

<PRES & POS S/P

0v

0v

SPARE DIG I/P - 1

0v

<10v DC REF

NOTE: RELAY 1. PINS 10, 8 & 7.USED FOR VAT 612

NOTE:RELAY 4.AUTOMATIC ZEROCONTACT CLOSED FOR0.5s MIN.

<LOCAL/REM

TABLE HEIGHT

M/S LEARNM/S LOCAL/REMM/S PRESS/POS

94-PC91S28347 = UNPOPULATED PCB94-MA91Z28468 = B.O.M.

<M/S LEARN

< ZERO ENABLE

<T/H ON-OFF<T/H DIRECTION

<M/S LOCAL/REM

<T/H SPEED

<M/S PRESS/POS

0v

0v

0v

0v

0v

01

0v

DEB

15/07/05 ----- FIRST ISSUE

SPARE ANA O/P - 1

SPARE DIG I/P - 1SPARE DIG I/P - 2SPARE DIG I/P - 3SPARE DIG I/P - 4SPARE DIG I/P - 5

0v

< OPEN< CLOSE

+24v0v

0v

0v+24v

17624

JP9

APC INT'FACE 2

JP9

APC INT'FACE 2

12345678910

JP11

T/HEIGHT

JP11

T/HEIGHT

123

LED5LOCAL

LED5LOCAL

R4

4K7 / 0.25W

R4

4K7 / 0.25W

D6

1N4004

D6

1N4004

LED1

+15V RED

LED1

+15V RED

JP2

CAN O/P

JP2

CAN O/P

123456789

10111213141516

BLK1

SUPPLY IN

BLK1

SUPPLY IN

123456

R6

4K7 / 0.25W

R6

4K7 / 0.25W

R2

1K2 / 0.25W

R2

1K2 / 0.25W

R1

1K2 / 0.25W

R1

1K2 / 0.25W

LED2

-15V YEL

LED2

-15V YEL

LK4LK4

R3

2K0 / 0.25W

R3

2K0 / 0.25W

JP14

PANEL SW TO PWR BOX

JP14

PANEL SW TO PWR BOX

12

-+

RL5

-+

RL5

1

3

567

8

10

12

D5

1N4004

D5

1N4004

JP5

X2

JP5

X2

12

U1REF01U1REF01

OUT 6V+2

V-4

AD

J5

R5

4K7 / 0.25W

R5

4K7 / 0.25W

LK2LK2

LED3

+24V GRN

LED3

+24V GRN

JP6

CM TO VAT

JP6

CM TO VAT

12

R7

100R

R7

100R

D2

1N4004

D2

1N4004

JP1

CAN I/P

JP1

CAN I/P

123456789

10111213141516

D4

1N4004

D4

1N4004

JP13

PANEL SW

JP13

PANEL SW

12

D1

1N4004

D1

1N4004

JP4

X1

JP4

X1

12

-+

RL1

-+

RL1

1

3

567

8

10

12

LK1LK1

JP8

APC INT'FACE 1

JP8

APC INT'FACE 1

123456789101112

-+

RL3

-+

RL3

1

3

567

8

10

12

BLK2

SPARE PWR

BLK2

SPARE PWR

123456

JP7

CM I/P

JP7

CM I/P

12

-+

RL4

-+

RL4

1

3

567

8

10

12

JP15

SPARE IO

JP15

SPARE IO

123456789

10

-+

RL2

-+

RL2

1

3

567

8

10

12

LK3LK3

LED4

PRESS

LED4

PRESS

JP12

650

JP12

650

12345678

JP10

T/LIMIT

JP10

T/LIMIT

1234

-+

RL6

-+

RL6

1

3

567

8

10

12

LED6LEARN

LED6LEARN

JP3

X3

JP3

X3

12

D3

1N4004

D3

1N4004

+

-

U2

OP07+

-

U2

OP073

26

7 14 8

SD Cover TP 100 01dheemstr/equipment/etch_oxford/... · 2013-10-14 · he cooling flow 0v he...

Documents

Transcript of SD Cover TP 100 01dheemstr/equipment/etch_oxford/... · 2013-10-14 · he cooling flow 0v he...