Scanning Electron Microscope

1

1. Turbo Molecular Pump (TMP) is standard. As an oil-free pumping system, sample contamination is

minimised. Unlike conventional oil diffusion pumped SEM, it does not require large heating

capacity or water re-circulator, making it an energy saving ecological SEM.

2. To assist inexperienced users the SU1510 includes an on-screen operation guide that walks

the user step by step through the complete imaging process – from vacuum mode selection to

image capture. This unique feature allows users of all experience levels to quickly obtain

high quality images.

3. The advanced technologies incorporated into the SU1510 provide a guaranteed secondary electron

resolution of 3.0nm (high vacuum mode) and a guaranteed backscattered electron resolution of

4.0nm (variable pressure mode).

4. For quick observation of non-conductive samples the SU1510 utilizes variable pressure mode

that eliminates negative charging, and provides the optimum conditions for both imaging and

EDX microanalysis ＊1.

5. The specimen chamber and stage have been designed to accommodate samples as large as

153mm in diameter. Simultaneous EDX microanalysis and imaging can be completed on a sample

that is up to 60mm in height at the analytical working distance of 15mm.

6. The ESED-Ⅱ＊2 is optionally available if secondary electron imaging in variable pressure mode is

desired. This detector is integrated into the GUI of the SU1510 and is completely software driven

with all automatic features ready for instant use by the operator.

Features

Compact & High-performance

＊1 : Energy Dispersive X-ray microanalysis (option)＊2 : Environmental Secondary Electron Detector (option)＊ Table is to be prepared locally.＊ The images are simulated, and are not actual images.

2

One-point

advice

The key to obtaining good quality images is to optimize the microscope to suit the requirement. The SU1510 GUI has pre-prepared versatile

conditions for observation and EDX microanalysis. The software helps the operator to select the optimum operating conditions depending on

the user’s application.

STEP1 Condition setting

＊3 : An impression of easy operate varies between individuals.

Just follow the instruction in the GUI, SU1510 will be set to the proper operating conditions for both focus and astigmatism adjustment.

STEP2 Image adjustment

Operation Guide - Good quality images by easy operate＊3 -

3

High Vacuum, SE imageMagnification : ×100,000

Sample : Evaporated gold particles

Accelerating voltage : 15kVMagnification : ×30,000

Traditional variable biasAccelerating voltage : 3kVmagnification : ×30,000

A unique Quad bias systemAccelerating voltage : 3kVmagnification : ×30,000

Sample : Metal hydride

Accelerating voltage : 3kVMagnification : ×15,000

Sample : Zeolite

Low Vacuum, BSE imageMagnification : ×60,000

The SU1510 electron optics incorporate a low aberration objective lens and a unique gun bias system that allows delivery of high emission

current. This design allows a guaranteed resolution of 3.0nm at High Vacuum (SE) and 4.0nm at Low Vacuum (BSE).

High resolution image (High Vacuum 3.0nm/30kV, Low vacuum 4.0nm/30kV)

The SU1510, in addition to the traditional variable bias,

has a unique Quad bias system, in which allows delivery

of high emission currents at the four most frequently

used accelerating voltages. This produces images with

good signal to noise ratio even when operated at a low

accelerating voltage.

Gun bias voltage system

Electron optics for high resolution microscopy

4

Left : SE image Right : BSE image

A full frame real time image (1,280×960 pixels)

Signal mixing image (SE+BSE)

A simultaneous live display of two different images(640×480 pixels×2)

A small screen real time image (640×480 pixels)

Sample : Clock

Sample : Ball grid array

The SU1510 has a choice of image displays. The operator can choose from real time displays of full screen, small screen or simultaneously

display two different live signals as shown below.

Real time image display

The SU1510 has a signal mixing function in which operators can mix different live signals generated from the same field of view and produce

one combined image. If operators mix a secondary electron signal (which is sensitive to surface topography) and a backscattered electron

signal (which is sensitive to atomic number contrast), for example, they may be able to evaluate surface details and compositions using a

single image.

Signal mixing function

Various Real Time Image Function those are Easy to Use

＊ The images are simulated, and are not actual images.

5

Acceleratingvoltage :

15kV

Acceleratingvoltage :

3kV

Acceleratingvoltage :

5kV

Acceleratingvoltage :

15kV

Sample : Photocatalyst fiber

Sample: Saccaromyces cerevisiae (containing Zinc)

The VP mode allows observation of non-conductive or hydrated samples without the need for sample preparation, such as a conductive

coating. Positive ions generated by either interaction of the incident electron beam or with electrons leaving the sample with the chamber gas,

act to neutralize the build up of negative charge on the sample surface. The chamber pressure is controlled by a simple slide bar.

Real-time Vacuum Feedback (RVF) system permits rapid vacuum stability in the specimen chamber at the user specified pressure setting.

The high sensitivity, 4 segment BSE detector makes observation of samples at low accelerating voltages a reality.

A comparison of BSE images at high and low accelerating voltages in VP-mode

Observation in Variable pressure (VP) mode

Observation of insulating samples

Residual gas

molecules

The objective lens

ee

＋＋

－ － － － － －

Sample

A backscattered electron detector

A beam of electrons

Neutralization ofa sample surfacepotential by ions

Preventingsample charging

A variable pressureenvironment

Microscopy ofwater/oil containingwet samples without

metal coatings

A variablepressure

environment(6 to 270Pa)

6

BSE/TopographyBSE/Composition

Sample : Blade for a cutting tool

SE (Secondary electron)BSE/3D

It is well known that BSE images reflect sample composition due to atomic number contrast. This has been widely used in the examination of

metallic samples, as well as particles on various surfaces, such as molded parts. The SU1510 has a 4 segment BSE detector. In addition to

the normal compositional image this allows observation of sample topography from four different orientations without the need to rotate the

sample. The BSE detector is so compact that samples can be imaged at short working distances at very high sensitivity.

High sensitivity semiconductor BSE detector

BSE imaging at high speed scan rates

7

Sample : A block lavaAnalyzed by XFlash5010 (Bruker AXS)

60ｍｍ

Si

MgSi Fe

Fe Al Mg Ti

Japanese Seal (60mm height)

BSE image EDX Qualitative analysis

EDX Mapping image EDX Mapping imageEDX Mapping image

EDX Mixed mapping image

The specimen stage of the SU1510 will accept a sample as tall as 60mm for image observation and elemental analysis (EDX), or 70mm tall

sample is applicable if elemental analysis is not required.

A sample as tall as 60mm for EDX

The SU1510 design provides optimum column conditions for fast and accurate analytical X-ray mapping, qualitative analysis and quantitative

analysis.

EDX analysis (option)

Versatile Specimen Chamber for Various Analytical Tools

8

This is a point of interest. This is brought to the center of the screen by clicking the point of interest.

Here is a point of interest. It is brought to the right or any new position by dragging it.

Clicking

Dragging

10mmSample : MEMS (Racheting Torsion Motor)

Courtesy of Dalhousie University,Canada

Capture Box

Sample : Key (10×10 images)

This function allows the operator to navigate around the

sample using either a low magnification SEM image, an

image from an optical microscope or digital image (available

file format is BMP, JPEG and TIFF), from another source.

Image navigation

This function allows the operator to record SEM images automatically across a

large sample from neighboring fields. By combining the recorded images it is

possible to make an image covering a large field of view on a sample.

Montage function (option)

The Move function uses both electrical image shift and motordrive stage controls. This function allows operators to move an object of interest to

the center of the monitor screen with a click of the mouse. It also allows any part of the image to be brought to a new location as shown below.

Move function

Selecting one of the last 16 captured images allows the operator to return to the stage coordinates of that image. This is convenient for further

study of a previously visited area.

Returning the stage to a captured image position

X-Y Axis Motor Drive (option)

＊ The images are simulated, and are not actual images.

9

BSE image ESED-Ⅱ image

BSE image ESED-Ⅱ image

The ESED-Ⅱ detects a signal that is the result of the secondary electrons interacting with the gas in the chamber. The resultant image has all

the characteristics and topographical information of a traditional secondary electron image.

ESED-Ⅱ (Environmental Secondary Electron Detector Ⅱ)(Option)

A complementary use of the ESED-Ⅱ with the standard BSE detector allows a comparison of two images. BSE images show sample

compositions while ESED-Ⅱ images show surface topography of a sample closely.

A comparison of the ESED-Ⅱand BSE images in VP-mode

High sensitivity imaging by using secondary electrons in a VP-mode

Sample : Rubber roller

Sample : Powder of cosmetic

10

At an ambient temperatureSample shrinkage is seen after 5 minutes.

Sample : Petal of a hydrangea

At -20℃ (A cooling stage was used)Sample shrinkage is not seen after 5 minutes.

A relation of water and its vapor pressure

Cooling stage can be used to image hydrated samples such as biological material, plants, food products and emulsions as the vaporization of

water content can be minimized by keeping the sample between 0 to –20℃. It allows observation and analysis of water-containing samples for

a few tens of minutes to a couple of hours without causing deformation of samples.

Cooling stage (Option)

Typical applications of a cooling stage

Variable pressure range of the SU1510

A cooling stage

Freezing

Freezing

Evaporation

A water (ice) vapor pressure curve

6 10

30

−60

0

102 103 104

A general view of a cooling stage

11

The SU1510 has a 3D animated maintenance guide that shows the procedure for routine tasks such as to replace a filament.

3D animated maintenance guide

After the installation of a new filament, it is necessary to adjust the filament current, electron beam alignment, focus brightness and contrast.

This can all be achieved automatically with the click of a single button.

Auto Beam Setting

There is no need for the operator to perform complicated and delicate

alignment procedures. The filaments for the SU1510 are pre-aligned at the

factory so there is no need to perform centering in the field.

Pre-centered cartridge filament

The condenser lens fixed apertures are all located within the liner tube and

can be simply removed through the gun chamber. It is not necessary to

disassemble the column to gain access to the aperture assembly. 3D

animated maintenance guide provides users with step by step instructions

on how to replace the apertures.

Condenser lens apertures (Column liner design)

Simple maintenance

12

A 3D-model

Sample : chromium molybdenum steel(Vickers hardness)

A bird’s-eye view

A 3D-model

Sample : Multi-crystalline Si photovoltaic cells A bird’s-eye view

Using the BSE detector equipped as standard the 3D software generates surface roughness measurements and an interactive 3D model

display of the sample.

3D VIEW software (Option)

Optional software for extended data analysis

13

Wafer holders for 2,4,6 inch wafers

Multiple sample holder(15mm dia. ×4 pcs)

Sample holder for resin embedded samples

An appropriate specimen stub is selectable dependent upon the purpose.

A set of sample holders and stubs (Standard)

Here are sample holders prepared for some specific purposes.

Special holders (Option)

Here are sample holders for wafers of 2 to 6 inches (SEM compatible). These holders allow loading/unloading wafers at one touch.

Wafer holders (Option)

Sample holders

14

■ Specifications ■ Optional AccessoriesItems Description

Resolution SE

Resolution BSE

Magnification

Accelerating Voltage

Low Vacuum Range

Image Shift

Maximum Specimen Size

Sp

ec

ime

n S

tag

eE

lec

tro

n O

pti

cs

Dis

pla

yE

vacu

ati

on

Syste

m

Auxiliary Functions

X

Y

Z

R

T

Observable area

Maximum Height

Electron Gun

Objective Aperture

Gun Bias

Detector

Analytical Position

OS

Controls

Monitor

Auto Alignment

Auto Image

Adjustment

Image Data

Saving

Image Filing

Filing Format

Auto Data

Display

Image Display

Mode

Operation

Turbo molecular pump

Oil Rotary Pump

Protection

3.0nm at 30kV (High Vacuum Mode)

4.0nm at 30kV (Variable Pressure Mode)

×5 to ×300,000

0.3 to 30kV

6 to 270Pa through graphic menu

±50µｍ (WD=15mm)

153mm in diameter

0 to 80mm

0 to 40mm

5 to 50mm

360°

-20 to 90°

126mm in diameter (with rotation)

60mm (WD=15mm)

Precentered Cartridge Filament

5-position, click stop objective aperture

Quad bias with variable bias control

Secondary Electron Detector

High Sensitivity Semiconductor BSE Detector

WD=15mm, TOA.=35°

WindowsR XP (subject to change without notice)

Mouse, Keyboard

19 type LCD (subject to change without notice)

Auto Beam Setting, Auto Axial Alignment

Auto Focus, Auto Stigmator/Focus

Auto Brightness & Contrast

640×480 pixels, 1,280×960 pixels

2,560×1,920 pixels, 5,120×3,840 pixels

Search Functions / Built-in Image Data Base

with Image Processing Functions

BMP, TIFF, JPEG

Accelerating Voltage, Magnification, Micron Marker,

Unit, Working Distance,Date/Time, Detector, Pressure

Full Screen Display ：1,280×960 pixels

Small Screen Display ： 640×480 pixels

Dual Image Display ： 640×480 pixels ×2

Signal Mixing

Full Automatic Sequence

210L/s ×1

135L/min (162L/min. with 60Hz) ×1

Power Failure and Vacuum Failure

Raster Rotation

Dynamic Focus / Tilt Compensation

Dynamic Stigma Monitor

Free Layout Print Function

3D Animation Maintenance Guide

Operation Guide

Easy Measurement

Oblique image

Detector and Analytical ToolEnvironmental secondary electron detector (ESED-Ⅱ)

Energy Dispersive X-ray Spectrometer (EDX) made by each manufacturer

Chamber scope made by each manufacturer

Specimen StageX-Y Axis Motor Drive

Cool Stage made by Deben UK Limited.

Camera navigation system

Software3D-VIEW (3D Image View and Measurement software)

CD Measurement

Hi-Mouse (Common software for Mouse and Keyboard)

Consecutive image recording function (Zigzag capture function). Stitch

InterfaceExternal communication Interface, DBC

OthersRotary Knob

■ Dimension / WeightItems Description

Main Unit

Oil Rotary Pump

Weight

550(W) × 1,000(D) × 1,460(H) mm, 380kg

526(W) × 225(D) × 306(H) mm, 28kg

200(W) × 180(D) × 160(H) mm, 40kg

■ Installation Requirements

■ Typical installation room layout

Items DescriptionRoom Temperature

Humidity

Power Supply

Power Cable

Grounding

15 to 30℃70% RH or less

Single Phase AC100, 110, 115, 200, 220 or 240V (±10%) 2.0kVA

10 meters long with M5 crimp-type terminal

100Ω or better

●Windows R is a registered trademark of Microsoft Corp. in the U.S. and other countries.●Observable area is restricted by specimen size.

2,0

00

1,700

200

526

(600)

1,0

00

18

0

50

0

550

500

Doorway (600 or greater)

( 60

0)

22

5

Weight

Rotary pump

PC

Table＊

unit : mm

＊ Table is to be prepared locally.

Printed in Japan (H) HTD-E175 2010.3

Notice: For proper operation, follow the instruction manual when using the instrument.Specifications in this catalog are subject to change with or without notice, as Hitachi High-Technologies Corporation continues to develop the latest technologies and products for our customers.

Tokyo, Japanhttp://www.hitachi-hitec.com/em/world/24-14 Nishi-Shimbashi 1-chome, Minato-ku, Tokyo, 105-8717, Japan