Organized bySAMCO INC., Japan

withDepartment of Electrical Engineering

Indian Institute of Technology Bombay14:00-19:00, 2nd February, 2016

Venue: Lecture Hall, VMCC, IIT Bombay(VICTOR MENEZES CONVENTION CENTRE)

This workshop aims at providing a broad overview on MEMS & NEMS plasma applications which arefundamental techniques for nanofabrication in R&D.

This 1st workshop in India will be organized by SAMCO & Simco to celebrate the inauguration of the MEMS/NEMS proto type facility center in IIT Bombay.

This workshop will be useful to: Scientists who plan to have a MEMS facility in the future. Participants interested in networking with scientists already working in this exciting research area.

For registration, please visit: http://en.samco.co.jp/form/

For further details, please contact: koho@samco.co.jp

SAMCO MEMS Workshop 2016@Bombay, India

This workshop includes:

Keynote speaker, Dr. O. Tabata, Professor of Kyoto University & Nano-hub center, who will speak about trends in Micro/Nano processing and SAMCO systems’ applications.

Keynote speaker, Dr. V. Ramgopal Rao, Institute Chair Professor, Indian Institute Bombay, who will speak about Polymer MEMS applications.

MEMS processes and Nano process overview, such as Silicon Deep RIE, Low temperature PECVD by liquid source deposition materials, etc., by the experts of the SAMCO Japan team.

Salient features of the workshop:

To commemorate this 1st workshop in India, No registration fee is charged.

Tea, Coffee, and Buffet Dinner (19:00-21:00) are included.

Accommodations and transport is to be taken care of by participants.

Interested researchers and students are invited to register. Kindly visit http://en.samco.co.jp/form/and fill out the registration form before January 11, 2016.

Registration is limited (Max.150 seats).

Keynote Speakers

Dr. V. Ramgopal Rao is a P. K. Kelkar Chair Professor in the Department of Electrical Engineering and the Chief Investigator for the Centre of Excellence in Nanoelectronics project at IIT Bombay. Dr. Rao has over 375 publications in the area of Electron Devices & Nanoelectronics in refereed international journals and conference proceedings and is an inventor on 30 patents (including 13 US patents) and patent applications, with many of his patents licensed to industries for commercialization. He is also a co-founder of the company NanoSniff Technologies Pvt. Ltd. at IIT Bombay which is developing products in the area of Nanotechnology. Prof. Rao has supervised/co-supervised over 100 Masters students & 30 Ph.D. students at IIT Bombay in the area of Nanoelectronics since the year 2000.

Prof. Dr. V. Ramgopal RaoPh.D., FNAE, FASc, FNASc, FNAP. K. Kelkar Chair Professor, Department of Electrical Engineering, IIT Bombay

Osamu Tabata was born in 1956. He received a M.S. degree and the Ph.D. degree from Nagoya Institute of Technology, Nagoya, Japan, in 1981 and in 1993, respectively. Since 1981, he had been with the Toyota Central Research and Development Laboratories, Inc., Aichi, Japan. In 1996, he joined the Department of Mechanical Engineering, Ritsumeikan University, Shiga, Japan. From September to December 2000, he was a guest Professor of Institute of Microsystem Technology, University of Freiburg, Germany and from January to March 2001, he was a guest Professor of ETH Zurich, Switzerland. In 2003, he joined the Department of Mechanical Engineering, Kyoto University, Kyoto, Japan. From April 2005, he is a Professor at the Department of Micro Engineering, Kyoto University, Kyoto, Japan, a visiting senior international scientists of the Chinese Academy of Science in 2010, a senior research fellow at Freiburg Institute for Advanced Studies (FRIAS) from May 2010 to 2013 October, and a guest Professor of Huazong University of Science and Technology, China from July 2011 to July 2014.

Prof. Dr. Osamu TABATADepartment of Micro Engineering, Kyoto University

SAMCO Inc.

OrganizerSAMCO was founded by Osamu Tsuji in 1979 as the Semiconductor And Materials COmpany (SAMCO). Osamu is a pioneer scientist in the field of plasma material science and has made substantial contributions to the International Plasma Chemistry Society and the plasma section of the Japan Society for the Promotion of Science. From its modest beginnings in Kyoto, Japan, SAMCO has grown into a $50 million corporation with more than 180 high-level design and production research associates at its corporate headquarters in Kyoto, sales and service offices in Japan, China, Taiwan, Korea and Singapore, its Europe head office inLiechtenstein, its main US office in Sunnyvale, California and NY office. The Silicon Valley research and development facility in Sunnyvale was opened in 1987.

As an innovative developer of plasma material science, SAMCO has been providing deposition, etch, and surface treatment systems for 37 years, installing more than 3,600 systems in 30 countries, and continues to play a critical role in the production of our customers’ power devices, LEDs, LDs, MEMS, TSVs, SAW devices, RF devices and photonic crystals. SAMCO has earned a reputation for "Sharpening the Cutting Edge" by rapidly developing and manufacturing turnkey equipment/process solutions through partnerships with its customers in design and process development.

SAMCO is especially adept at taking the customer's process challenges and modifying existing equipment to provide a solution. By combining modern research and production facilities with a supporting network of major Japanese industrial subcontractors, SAMCO has the production capacity to rapidly manufacture and deliver cost-effective thin-film deposition, etch and surface treatment systems.

With time-to-market, cost of ownership, and competitive pricing becoming increasingly important, SAMCO concentrates on shortening the development cycle for its customers by providing reliable, affordable systems. After the initial product development is completed, SAMCO works closely with its customers to monitor the production of equipment, prepare the installation site, supervise the installation, train the production staff, and follow up with service and support for the life of the product.