we s u p p o r t y o u r i n n o v a t i o n

Heated Getter Gas Purifiers

SAES Pure Gas , Inc .

Applications

Vapor Deposition Processes MOCVD PVD CVD Epitaxy Photolithography Metrology R&D laboratory experiments LED

B.S

PG

.85.

0

Media

MonoTorr Purifiers provide the highest capacity impurity removal in Rare Gases (Argon, Helium, Xenon, Krypton, Neon), Nitrogen, and Hydrogen.

MonoTorr heated getter technology is based on zirconium alloys and gaseous impurities irreversibly bind and diffuse into the purification material bulk.

Unlike ambient purification technologies that rely on surface sorption only, heated getter technology utilizes the entire volume of material resulting in superior impurity capacity and longer purifier lifetime, as shown in the comparison chart as tested in Rare Gas.

MonoTorr Heated Getter Purifiers

Heated Getter

Crystal pulling Implant Etching Diffusion and Oxidation processes Annealing Fiber Optics Analytical Solar and Photovoltaics

SAES Pure Gas, Inc.4175 Santa Fe RoadSan Luis Obispo, CA, 93401, USA

Phone: +1 805-541-9299Fax: +1 805-541-9399E-mail: spg@saes-group.comwww.saespuregas.com

SAES Pure Gas Products and Services:

MicroTorr Point-of-Use Purifiers

SAES Pure Gas MicroTorr ambient temperature purifiers are ideal solutions for point-of-use gas purification.

Gases Purified include: Nitrogen, Rare Gases, Hydrogen, Oxygen, CDA, Ammonia, Corrosives, Silane, Arsine, Phosphine, etc.

Flow rates up to 1,000 slpm.

SAES Pure Gas manufacturing company is ISO9001 certified

ISO 9001:2008

Microcontamination Inspection Service

The Microcontamination Inspection Service from SAES Pure Gas is an economical way to determine Molecular Contamination in Nitrogen, CDA or Cleanroom Air.

The CollectTorr sampling manifold is shipped to the customer’s site where samples are collected and, after a fixed time, the unit is returned to the SAES Pure Gas factory for immediate analysis.

© 2010 SAES Pure Gas. Printed in USA. All rights reserved. MICROTORR®, MEGATORR®, and MONOTORR® are registered trademarks of SAES Pure Gas, Inc. SAES Pure Gas reserves the right to change or modify product specifications at any time without notice.

MegaTorr Area and House Gas Purification

SAES Pure Gas offers an entire line of bulk gas purifiers designed for complete facility-level purification.

Gases purified include:Nitrogen, Argon, Helium, Oxygen, CDA, Hydrogen, Ammonia

Flow rates up to 20,000 Nm3/hr depending on the gas.

WWW.TEESING.COM | TEL +31 70 413 07 50

we s u p p o r t y o u r i n n o v a t i o n

Heated Getter Gas Purifiers

SAES Pure Gas , Inc .

Applications

Vapor Deposition Processes MOCVD PVD CVD Epitaxy Photolithography Metrology R&D laboratory experiments LED

B.S

PG

.85.

0

Media

MonoTorr Purifiers provide the highest capacity impurity removal in Rare Gases (Argon, Helium, Xenon, Krypton, Neon), Nitrogen, and Hydrogen.

MonoTorr heated getter technology is based on zirconium alloys and gaseous impurities irreversibly bind and diffuse into the purification material bulk.

Unlike ambient purification technologies that rely on surface sorption only, heated getter technology utilizes the entire volume of material resulting in superior impurity capacity and longer purifier lifetime, as shown in the comparison chart as tested in Rare Gas.

MonoTorr Heated Getter Purifiers

Heated Getter

Crystal pulling Implant Etching Diffusion and Oxidation processes Annealing Fiber Optics Analytical Solar and Photovoltaics

SAES Pure Gas, Inc.4175 Santa Fe RoadSan Luis Obispo, CA, 93401, USA

Phone: +1 805-541-9299Fax: +1 805-541-9399E-mail: spg@saes-group.comwww.saespuregas.com

SAES Pure Gas Products and Services:

MicroTorr Point-of-Use Purifiers

SAES Pure Gas MicroTorr ambient temperature purifiers are ideal solutions for point-of-use gas purification.

Gases Purified include: Nitrogen, Rare Gases, Hydrogen, Oxygen, CDA, Ammonia, Corrosives, Silane, Arsine, Phosphine, etc.

Flow rates up to 1,000 slpm.

SAES Pure Gas manufacturing company is ISO9001 certified

ISO 9001:2008

Microcontamination Inspection Service

The Microcontamination Inspection Service from SAES Pure Gas is an economical way to determine Molecular Contamination in Nitrogen, CDA or Cleanroom Air.

The CollectTorr sampling manifold is shipped to the customer’s site where samples are collected and, after a fixed time, the unit is returned to the SAES Pure Gas factory for immediate analysis.

© 2010 SAES Pure Gas. Printed in USA. All rights reserved. MICROTORR®, MEGATORR®, and MONOTORR® are registered trademarks of SAES Pure Gas, Inc. SAES Pure Gas reserves the right to change or modify product specifications at any time without notice.

MegaTorr Area and House Gas Purification

SAES Pure Gas offers an entire line of bulk gas purifiers designed for complete facility-level purification.

Gases purified include:Nitrogen, Argon, Helium, Oxygen, CDA, Hydrogen, Ammonia

Flow rates up to 20,000 Nm3/hr depending on the gas.

WWW.TEESING.COM | TEL +31 70 413 07 50

ImpuritiesNitrogen Rare Gas

Outlet Purity (ppb)

Outlet Purity (ppb)

H2O <10 <10

O2 <10 <10

CO <10 <10

CO2 <10 <10

CH4 <50 <10

Other Hydrocarbons <10 <10

H2 <10 <10

N2 N/A <10

PS2-GC50 Performance

ImpuritiesNitrogen Rare Gas

Outlet Purity (ppb)

Outlet Purity (ppb)

H2O <1 <1

O2 <1 <1

CO <1 <1

CO2 <1 <1

CH4 <1 <1

Other Hydrocarbons <1 <1

H2 <1 <1

N2 N/A <1

PS3-MT3 Performance

Gas Impurity PS4-MT3 PS4-MT15

5 slpm Average Flow 15 slpm Average Flow

Rare Gases H2O, O2, CO, CO2, N2, CH4, H2 <1 ppb <1 ppb

Nitrogen H2O, O2, CO, CO2, CH4, H2 <1 ppb <1 ppb

Hydrogen H2O, O2, CO, CO2, N2, NMHC <1 ppb <1 ppb

Gases Purified

Impurities Removed Rare Gases Nitrogen Hydrogen

H2O <1 ppb <1 ppb <1 ppb

O2 <1 ppb <1 ppb <1 ppb

CO <1 ppb <1 ppb <1 ppb

CO2 <1 ppb <1 ppb <1 ppb

Total Hydrocarbons <1 ppb <1 ppb N/A

H2 <1 ppb <1 ppb N/A

N2 <1 ppb N/A <1 ppb

PS4-MT3, PS4-MT15 Performance PS4-MT50 Performance

PS2-GC50Maximum Flow 200 sccm

PS3-MT3Maximum Flow 5 slpm

PS4-MT3PS4-MT15Maximum Flow 50-75 slpm

PS4-MT50Maximum Flow 100-150 slpm

Product Specifications• 150 slpm maximum flow rate (Hydrogen)• 100 slpm maximum flow rate (Nitrogen, Helium, Argon)• 30 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 300-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption 1.1 kW• 0.003µm metal particle filter• 1/2” pneumatic diaphragm valves• 1/2” VCR inlet/outlet connections• PLC controlled operation • Exhausted enclosure with separate electronics bay • Hydrogen removal unit (Nitrogen and Rare Gas models only) • Life status indicator• High temperature hardware interlock • CE Marking• Dimensions: • Height 113 cm (44.5 inches) • Width 53 cm (21 inches) • Depth 30 cm (12 inches) • Weight 70 kg (154 lbs)

Optional equipment:• N2 purge system (Hydrogen model only)• Hydrogen leak detector (Hydrogen model only)• Uninterruptible power supply • Emergency off button• Manual bypass • 110-120 VAC or 220-240 VAC

Product Specifications:• 200 sccm maximum flow rate (Nitrogen, Helium, Argon)• Getter bed operating temperature 350-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption < 50 W• 20 µm metal particle filter• 1/8” Compression inlet/outlet connections• CE Marking• Dimensions: • Height 23 cm (9 inches) • Width 10 cm (4 inches) • Weight 1.8 kg (4 lbs)

Optional equipment:• 1/4” VCR fittings• 110-120 VAC or 220-240 VAC

Product specifications:• MT3 • 50 slpm maximum flow rate (Nitrogen, Helium, Argon) • 30 slpm maximum flow rate (Hydrogen) • 3 slpm maximum flow rate (Xenon)• MT15 • 75 slpm maximum flow rate (Nitrogen, Helium, Argon) • 50 slpm maximum flow rate (Hydrogen) • 9 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 300°C - 400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption 125 W (MT3), 187 W (MT15)• 0.003µm metal particle filter• 1/4” pneumatic diaphragm valves• 1/4” VCR inlet/outlet connections• Life Status Sensor (Rare Gas and Nitrogen only)• Bypass assembly• Surface mountable enclosure with cooling fan• CE Marking• Dimensions: • Height 86.4 cm (34 inches) • Width 20.3 cm (8 inches) • Rare Gas/Nitrogen - Depth 20.9 cm (8.25 inches) • Hydrogen - Depth 22.7 cm (8.94 inches) • Weight 23-28 kg (50-61 lbs)

Optional equipment:• 110-120 VAC or 220-240 VAC

Product Specifications:• 5 slpm maximum flow rate (Nitrogen, Helium, Argon)• 3 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 350-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption < 50 W• 0.003µm metal particle filter• 1/4” manual diaphragm valves• 1/4” VCR inlet/outlet connections• CE Marking• Dimensions: • Height 60 cm (24 inches) • Width 25 cm (10 inches) • Depth 10 cm (4 inches) • Weight 6 kg (13 lbs)

Optional equipment:• Bypass assembly• 110-120 VAC or 220-240 VAC

WWW.TEESING.COM | TEL +31 70 413 07 50

ImpuritiesNitrogen Rare Gas

Outlet Purity (ppb)

Outlet Purity (ppb)

H2O <10 <10

O2 <10 <10

CO <10 <10

CO2 <10 <10

CH4 <50 <10

Other Hydrocarbons <10 <10

H2 <10 <10

N2 N/A <10

PS2-GC50 Performance

ImpuritiesNitrogen Rare Gas

Outlet Purity (ppb)

Outlet Purity (ppb)

H2O <1 <1

O2 <1 <1

CO <1 <1

CO2 <1 <1

CH4 <1 <1

Other Hydrocarbons <1 <1

H2 <1 <1

N2 N/A <1

PS3-MT3 Performance

Gas Impurity PS4-MT3 PS4-MT15

5 slpm Average Flow 15 slpm Average Flow

Rare Gases H2O, O2, CO, CO2, N2, CH4, H2 <1 ppb <1 ppb

Nitrogen H2O, O2, CO, CO2, CH4, H2 <1 ppb <1 ppb

Hydrogen H2O, O2, CO, CO2, N2, NMHC <1 ppb <1 ppb

Gases Purified

Impurities Removed Rare Gases Nitrogen Hydrogen

H2O <1 ppb <1 ppb <1 ppb

O2 <1 ppb <1 ppb <1 ppb

CO <1 ppb <1 ppb <1 ppb

CO2 <1 ppb <1 ppb <1 ppb

Total Hydrocarbons <1 ppb <1 ppb N/A

H2 <1 ppb <1 ppb N/A

N2 <1 ppb N/A <1 ppb

PS4-MT3, PS4-MT15 Performance PS4-MT50 Performance

PS2-GC50Maximum Flow 200 sccm

PS3-MT3Maximum Flow 5 slpm

PS4-MT3PS4-MT15Maximum Flow 50-75 slpm

PS4-MT50Maximum Flow 100-150 slpm

Product Specifications• 150 slpm maximum flow rate (Hydrogen)• 100 slpm maximum flow rate (Nitrogen, Helium, Argon)• 30 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 300-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption 1.1 kW• 0.003µm metal particle filter• 1/2” pneumatic diaphragm valves• 1/2” VCR inlet/outlet connections• PLC controlled operation • Exhausted enclosure with separate electronics bay • Hydrogen removal unit (Nitrogen and Rare Gas models only) • Life status indicator• High temperature hardware interlock • CE Marking• Dimensions: • Height 113 cm (44.5 inches) • Width 53 cm (21 inches) • Depth 30 cm (12 inches) • Weight 70 kg (154 lbs)

Optional equipment:• N2 purge system (Hydrogen model only)• Hydrogen leak detector (Hydrogen model only)• Uninterruptible power supply • Emergency off button• Manual bypass • 110-120 VAC or 220-240 VAC

Product Specifications:• 200 sccm maximum flow rate (Nitrogen, Helium, Argon)• Getter bed operating temperature 350-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption < 50 W• 20 µm metal particle filter• 1/8” Compression inlet/outlet connections• CE Marking• Dimensions: • Height 23 cm (9 inches) • Width 10 cm (4 inches) • Weight 1.8 kg (4 lbs)

Optional equipment:• 1/4” VCR fittings• 110-120 VAC or 220-240 VAC

Product specifications:• MT3 • 50 slpm maximum flow rate (Nitrogen, Helium, Argon) • 30 slpm maximum flow rate (Hydrogen) • 3 slpm maximum flow rate (Xenon)• MT15 • 75 slpm maximum flow rate (Nitrogen, Helium, Argon) • 50 slpm maximum flow rate (Hydrogen) • 9 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 300°C - 400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption 125 W (MT3), 187 W (MT15)• 0.003µm metal particle filter• 1/4” pneumatic diaphragm valves• 1/4” VCR inlet/outlet connections• Life Status Sensor (Rare Gas and Nitrogen only)• Bypass assembly• Surface mountable enclosure with cooling fan• CE Marking• Dimensions: • Height 86.4 cm (34 inches) • Width 20.3 cm (8 inches) • Rare Gas/Nitrogen - Depth 20.9 cm (8.25 inches) • Hydrogen - Depth 22.7 cm (8.94 inches) • Weight 23-28 kg (50-61 lbs)

Optional equipment:• 110-120 VAC or 220-240 VAC

Product Specifications:• 5 slpm maximum flow rate (Nitrogen, Helium, Argon)• 3 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 350-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption < 50 W• 0.003µm metal particle filter• 1/4” manual diaphragm valves• 1/4” VCR inlet/outlet connections• CE Marking• Dimensions: • Height 60 cm (24 inches) • Width 25 cm (10 inches) • Depth 10 cm (4 inches) • Weight 6 kg (13 lbs)

Optional equipment:• Bypass assembly• 110-120 VAC or 220-240 VAC

WWW.TEESING.COM | TEL +31 70 413 07 50

ImpuritiesNitrogen Rare Gas

Outlet Purity (ppb)

Outlet Purity (ppb)

H2O <10 <10

O2 <10 <10

CO <10 <10

CO2 <10 <10

CH4 <50 <10

Other Hydrocarbons <10 <10

H2 <10 <10

N2 N/A <10

PS2-GC50 Performance

ImpuritiesNitrogen Rare Gas

Outlet Purity (ppb)

Outlet Purity (ppb)

H2O <1 <1

O2 <1 <1

CO <1 <1

CO2 <1 <1

CH4 <1 <1

Other Hydrocarbons <1 <1

H2 <1 <1

N2 N/A <1

PS3-MT3 Performance

Gas Impurity PS4-MT3 PS4-MT15

5 slpm Average Flow 15 slpm Average Flow

Rare Gases H2O, O2, CO, CO2, N2, CH4, H2 <1 ppb <1 ppb

Nitrogen H2O, O2, CO, CO2, CH4, H2 <1 ppb <1 ppb

Hydrogen H2O, O2, CO, CO2, N2, NMHC <1 ppb <1 ppb

Gases Purified

Impurities Removed Rare Gases Nitrogen Hydrogen

H2O <1 ppb <1 ppb <1 ppb

O2 <1 ppb <1 ppb <1 ppb

CO <1 ppb <1 ppb <1 ppb

CO2 <1 ppb <1 ppb <1 ppb

Total Hydrocarbons <1 ppb <1 ppb N/A

H2 <1 ppb <1 ppb N/A

N2 <1 ppb N/A <1 ppb

PS4-MT3, PS4-MT15 Performance PS4-MT50 Performance

PS2-GC50Maximum Flow 200 sccm

PS3-MT3Maximum Flow 5 slpm

PS4-MT3PS4-MT15Maximum Flow 50-75 slpm

PS4-MT50Maximum Flow 100-150 slpm

Product Specifications• 150 slpm maximum flow rate (Hydrogen)• 100 slpm maximum flow rate (Nitrogen, Helium, Argon)• 30 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 300-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption 1.1 kW• 0.003µm metal particle filter• 1/2” pneumatic diaphragm valves• 1/2” VCR inlet/outlet connections• PLC controlled operation • Exhausted enclosure with separate electronics bay • Hydrogen removal unit (Nitrogen and Rare Gas models only) • Life status indicator• High temperature hardware interlock • CE Marking• Dimensions: • Height 113 cm (44.5 inches) • Width 53 cm (21 inches) • Depth 30 cm (12 inches) • Weight 70 kg (154 lbs)

Optional equipment:• N2 purge system (Hydrogen model only)• Hydrogen leak detector (Hydrogen model only)• Uninterruptible power supply • Emergency off button• Manual bypass • 110-120 VAC or 220-240 VAC

Product Specifications:• 200 sccm maximum flow rate (Nitrogen, Helium, Argon)• Getter bed operating temperature 350-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption < 50 W• 20 µm metal particle filter• 1/8” Compression inlet/outlet connections• CE Marking• Dimensions: • Height 23 cm (9 inches) • Width 10 cm (4 inches) • Weight 1.8 kg (4 lbs)

Optional equipment:• 1/4” VCR fittings• 110-120 VAC or 220-240 VAC

Product specifications:• MT3 • 50 slpm maximum flow rate (Nitrogen, Helium, Argon) • 30 slpm maximum flow rate (Hydrogen) • 3 slpm maximum flow rate (Xenon)• MT15 • 75 slpm maximum flow rate (Nitrogen, Helium, Argon) • 50 slpm maximum flow rate (Hydrogen) • 9 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 300°C - 400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption 125 W (MT3), 187 W (MT15)• 0.003µm metal particle filter• 1/4” pneumatic diaphragm valves• 1/4” VCR inlet/outlet connections• Life Status Sensor (Rare Gas and Nitrogen only)• Bypass assembly• Surface mountable enclosure with cooling fan• CE Marking• Dimensions: • Height 86.4 cm (34 inches) • Width 20.3 cm (8 inches) • Rare Gas/Nitrogen - Depth 20.9 cm (8.25 inches) • Hydrogen - Depth 22.7 cm (8.94 inches) • Weight 23-28 kg (50-61 lbs)

Optional equipment:• 110-120 VAC or 220-240 VAC

Product Specifications:• 5 slpm maximum flow rate (Nitrogen, Helium, Argon)• 3 slpm maximum flow rate (Xenon)• High temperature alarm• Getter bed operating temperature 350-400°C• Inlet gas temperature 0° - 35° C• Outlet gas temperature < 50° C• Maximum inlet pressure 150 psig (10.3 barg)• Average power consumption < 50 W• 0.003µm metal particle filter• 1/4” manual diaphragm valves• 1/4” VCR inlet/outlet connections• CE Marking• Dimensions: • Height 60 cm (24 inches) • Width 25 cm (10 inches) • Depth 10 cm (4 inches) • Weight 6 kg (13 lbs)

Optional equipment:• Bypass assembly• 110-120 VAC or 220-240 VAC

WWW.TEESING.COM | TEL +31 70 413 07 50

we s u p p o r t y o u r i n n o v a t i o n

Heated Getter Gas Purifiers

SAES Pure Gas , Inc .

Applications

Vapor Deposition Processes MOCVD PVD CVD Epitaxy Photolithography Metrology R&D laboratory experiments LED

B.S

PG

.85.

0

Media

MonoTorr Purifiers provide the highest capacity impurity removal in Rare Gases (Argon, Helium, Xenon, Krypton, Neon), Nitrogen, and Hydrogen.

MonoTorr heated getter technology is based on zirconium alloys and gaseous impurities irreversibly bind and diffuse into the purification material bulk.

Unlike ambient purification technologies that rely on surface sorption only, heated getter technology utilizes the entire volume of material resulting in superior impurity capacity and longer purifier lifetime, as shown in the comparison chart as tested in Rare Gas.

MonoTorr Heated Getter Purifiers

Heated Getter

Crystal pulling Implant Etching Diffusion and Oxidation processes Annealing Fiber Optics Analytical Solar and Photovoltaics

SAES Pure Gas Products and Services:

MicroTorr Point-of-Use Purifiers

SAES Pure Gas MicroTorr ambient temperature purifiers are ideal solutions for point-of-use gas purification.

Gases Purified include: Nitrogen, Rare Gases, Hydrogen, Oxygen, CDA, Ammonia, Corrosives, Silane, Arsine, Phosphine, etc.

Flow rates up to 1,000 slpm.

SAES Pure Gas manufacturing company is ISO9001 certified

ISO 9001:2008

Microcontamination Inspection Service

The Microcontamination Inspection Service from SAES Pure Gas is an economical way to determine Molecular Contamination in Nitrogen, CDA or Cleanroom Air.

The CollectTorr sampling manifold is shipped to the customer’s site where samples are collected and, after a fixed time, the unit is returned to the SAES Pure Gas factory for immediate analysis.

© 2010 SAES Pure Gas. Printed in USA. All rights reserved. MICROTORR®, MEGATORR®, and MONOTORR® are registered trademarks of SAES Pure Gas, Inc. SAES Pure Gas reserves the right to change or modify product specifications at any time without notice.

MegaTorr Area and House Gas Purification

SAES Pure Gas offers an entire line of bulk gas purifiers designed for complete facility-level purification.

Gases purified include:Nitrogen, Argon, Helium, Oxygen, CDA, Hydrogen, Ammonia

Flow rates up to 20,000 Nm3/hr depending on the gas.

Media

WWW.TEESING.COM | TEL +31 70 413 07 50