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    MICROSENSORS

    By:KARTHIK SUBRAY BHAT

    CWID : 11472940.

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    OVERVIEW

    Introduction to and classification of Microsensors

    Need for Microsensors

    Trends in Microsensors

    Types of Microsensors; Sensing principles, functionality and features

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    INTRODUCTION

    A microsensor is an extremely small device capable of picking up and relayingenvironmental information. Microsensors can be termed as transducers, as they

    convert one form of energy into another. Microsensors basically converts measured

    mechanical signal (non-electrical physical or chemical quantity) into an electrical

    signal. These electrical signals are passed on to a processor and processor then

    converts these signals into meaningful information for variety of applications.

    A microsensor can be as small as few nanometres to few millimetres in size. They

    can plug into a sensor array to collect a variety of data, and may interface

    wirelessly with processors for ease of operation.

    The way microsensors are designed must include a way of collecting the desired

    information, which can depend on how the device will be used. Some microsensorsallow realtime reading abilities, which can be useful for activities like monitoring

    cells in culture. Others store data which must be downloaded when researchers

    want to interact with it.

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    Classification of Microsensors

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    Why do we need Microsensors?

    low manufacturing costsbecause of mass production and materials required are less

    wider exploitation of IC technology

    wider applicability to sensor arrayslower weight

    The need for microsensors is not only because of the advantages that are listed above

    that can be exploited, but also because of the various fields it finds applications.

    Listed below are some examples of applications of Microsensors.

    Examples of Automotive Applications:

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    MedicalApplications

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    General requirements for a sensor:

    The following are some of the requirements of a sensor:

    It must be less sensitive to secondary inputsif not the output readings might be

    inaccurate.

    It must be stable for a long term.

    Low pressure and temperature hysteresis

    Small size and low cost

    Resistance to corrosive ambient

    Biocompatibility with the body

    Trends in Microsensors:

    The basic trends that we can see in Microsensors are as follows:

    Miniaturization: The trend follows such that the feature size of the each component

    is being made smaller and smaller. This is because of the fact that with smaller sizes

    we can have high volume and thus lower cost.

    Integration: Sensors are being integrated with signal processing circuits for various

    functions one such being linearization of the output. Sensors can also have a built-inactuator for self test, automatic calibration, change of sensitivity etc..

    Array of Sensors: Nowadays it is so that we are not having a single sensors but an

    array of sensors. This is done so that we can get more reliable outputs and also larger

    output signals.

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    Chemical sensor is used to detect the presence of or

    concentration of a chemical substance. These sensors find

    applications in Medical Diagnostics, Nutritional Sciences,

    Environmental Protection and Automobile Industry.

    A sensitive layer sensitive to particular chemicals is in contact

    with the substance. Chemical reaction takes place on thesensitive layer. Due to the reaction physical, optical, acoustic

    or dielectric properties are changed. Transducers transform

    these changes into electrical signals.

    Optical sensors are cheap and can be sterilized easily. It can

    handle small samples and are highly sensitive. A coupling

    grid detector is used here. The substance to be analysed is in

    direct contact with the waveguide. The index of refraction

    varies depending on the concentration of the substance. In

    other words, the amount of light striking the detector

    depends on the concentration.

    A biosensor is an analytical device for the detection of an

    analyte that combines a biological component with a

    physicochemical detector component. Sensitive layer is

    made of biologically sensitive components such asenzymes or anti-bodies. Molecules of the bioelement and

    the molecules of the substance interact to produce

    changes in physical or chemical parameter. These

    parameter changes are converted into electrical signals.

    Signals represent concentration to be measured.

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    Pressure sensors are used measure the pressure of gases or liquids. They can be broadly

    classified into two: Absolute and Relative pressure sensors.

    Piezoresistive pressure sensor: Piezoresistors

    are integrated on the membrane. Pressure

    causes stress on the membrane which causes

    the change in the resistance. This resistance

    change is calculated using a Wheat-stone

    bridge. The change in resistance is calculated

    into pressure.

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    Piezoresistive pressure sensors

    Left: Sensonors absolute pressure sensor.

    Right: Motorolas MAP sensor

    Capacitive membrane pressure sensor:

    Membrane changes when pressure is applied. Due to this the distance between the

    electrodes changes and so does capacitance. They dont have hysteresis and have better

    long-term stability and higher sensitivity but higher production costs.

    Tohokus pressure sensor

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    Position and Speed Microsensors: Accelerometers and gyroscopes are used to calculate

    acceleration and position respectively. These sensors find applications in Automobiles, Robots

    and Medical Instruments. Piezoresistive accelerometers and capacitive accelerometers are the

    accelerometer sensors commonly used.

    The advantages of piezoresistive accelerometers are: they have simpler structures, simpler

    fabrication process, and simpler read-out circuitry. And the disadvantages are: Larger

    temperature sensitivity, lower mechanical sensitivity, high power consumption. The

    advantages of capacitive accelerometers are: high sensitivity, good DC performance and noise

    performance, low drift, low temperature sensitivity, low power consumption. The

    disadvantages are: susceptible to electromagnetic interference, non-linear output.

    Left: Piezoresistive accelerometer: In

    the figure the top sensor is called

    SA50 and has two axes crash sensors.

    The bottom sensor is called SAC60

    and has 1-axis side crash sensor.

    Right : Capacitive accelerometer:

    Fords accelerometer

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    Gyrosopes: It consists of two high performance MEMS devices integrated in one: A self-tuned

    resonator in the drive axis and a micro-accelerometer in the sensing axis. They are very sensitive to

    all potential manufacturing variations, packaging, linear acceleration, temperature, etc. Low-noise

    read-out, signal processing and control electronics are required. Tuning fork gyroscopes and disk

    gyroscopes are the two types of gyroscopes.

    Top left:Drapers double-gimbal gyroscope

    TopRight:Comb-drive gyroscope

    Left:Silicon MicroRing gyroscope

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    Acknowledgement

    I thank Dr. Weili Zhang for giving me an opportunity to select Microsensors as

    my topic and write a term paper and do a presentation on the same. I learnt a lot

    about microsensors and their applications while doing this paper.

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    References:

    Microsensors- documentation by Daniel Lapadatu, SensoNor Technologies.http://mspde.usc.edu/inspiring/resource/sensor/Microsensors.pdf

    http://en.wikipedia.org/wiki/Wheel_speed_sensor

    http://en.wikipedia.org/wiki/Biosensor

    http://www.intechopen.com/books/microsensors

    http://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-

    microsensors

    http://mspde.usc.edu/inspiring/resource/sensor/Microsensors.pdfhttp://en.wikipedia.org/wiki/Wheel_speed_sensorhttp://en.wikipedia.org/wiki/Biosensorhttp://www.intechopen.com/books/microsensorshttp://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-microsensorshttp://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-microsensorshttp://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-microsensorshttp://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-microsensorshttp://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-microsensorshttp://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-microsensorshttp://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-microsensorshttp://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-microsensorshttp://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-microsensorshttp://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-microsensorshttp://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-microsensorshttp://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-microsensorshttp://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-microsensorshttp://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-microsensorshttp://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-microsensorshttp://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-microsensorshttp://noc.ac.uk/science-technology/research-groups/ote/instruments-sensors/biological-microsensorshttp://www.intechopen.com/books/microsensorshttp://www.intechopen.com/books/microsensorshttp://www.intechopen.com/books/microsensorshttp://www.intechopen.com/books/microsensorshttp://www.intechopen.com/books/microsensorshttp://www.intechopen.com/books/microsensorshttp://www.intechopen.com/books/microsensorshttp://en.wikipedia.org/wiki/Biosensorhttp://en.wikipedia.org/wiki/Biosensorhttp://en.wikipedia.org/wiki/Biosensorhttp://en.wikipedia.org/wiki/Biosensorhttp://en.wikipedia.org/wiki/Biosensorhttp://en.wikipedia.org/wiki/Biosensorhttp://en.wikipedia.org/wiki/Biosensorhttp://en.wikipedia.org/wiki/Wheel_speed_sensorhttp://en.wikipedia.org/wiki/Wheel_speed_sensorhttp://en.wikipedia.org/wiki/Wheel_speed_sensorhttp://en.wikipedia.org/wiki/Wheel_speed_sensorhttp://en.wikipedia.org/wiki/Wheel_speed_sensorhttp://en.wikipedia.org/wiki/Wheel_speed_sensorhttp://en.wikipedia.org/wiki/Wheel_speed_sensorhttp://mspde.usc.edu/inspiring/resource/sensor/Microsensors.pdfhttp://mspde.usc.edu/inspiring/resource/sensor/Microsensors.pdfhttp://mspde.usc.edu/inspiring/resource/sensor/Microsensors.pdfhttp://mspde.usc.edu/inspiring/resource/sensor/Microsensors.pdfhttp://mspde.usc.edu/inspiring/resource/sensor/Microsensors.pdfhttp://mspde.usc.edu/inspiring/resource/sensor/Microsensors.pdfhttp://mspde.usc.edu/inspiring/resource/sensor/Microsensors.pdfhttp://mspde.usc.edu/inspiring/resource/sensor/Microsensors.pdfhttp://mspde.usc.edu/inspiring/resource/sensor/Microsensors.pdf
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    THANK YOU