RUVAC®

Roots PumpsImproved VacuumTechnical information 173.23.02

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RUVAC®

Roots Pumps – Reliable, Safe, Rugged

2006 Austauschangebot TRIVAC B

Proven Technology Fully Optimized

RUVAC roots pumps have been manu-factured by Oerlikon Leybold Vacuumfor many decades. The dry compres-sor roots principle has proven itself inmany areas of vacuum technology.

Combined with oil-sealed fore-vacuumpumps such as the TRIVAC® or SOGEVAC®, RUVAC roots pumps areused very effectively to increase thepumping speed at low pressures, thusextending the operating pressure rangeof the fore-vacuum pumps.

Additionally, RUVAC roots pumps maybe combined with dry-compressionfore-vacuum pumps such as SCREWLINE® pumps where a total dry vacuum solution is desired.

RUVAC roots pumps are manufacturedin three series with different motor drives.

The RUVAC WA series uses air cooled,flange-mounted standard three phasemotors. The RUVAC WS series are equipped with canned (rotor) motors inair-cooled or water-cooled versions.

Each series consists of various sizes toalways provide an optimized pumpingspeed for each application. All threeseries are available with or withoutintegrated bypass valve (also known as pressure compensation valve).

1000 800

600

400

200

10010-3 10-2 10-1 100 101 102 103

2 4 6 8

Pressure [mbar]

Pum

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2

1

3

Range of RUVAC WAU pumps: WAU 2001, WAU 1001, WAU 501, WAU 251

■ RUVAC roots pumps can beused either in vertical or horizon-tal position, thus ensuring flexibili-ty in achieving compact designwithin systems. Position selectedmay be changed later if required.

■ RUVAC roots pumps have ruggedbearings, which in combinationwith the highly efficient lubricationsystems enhances quiet runningproperties.

■ The rotor and stator coils in thedrive motor of the RUVAC WSand RUVAC WSU are separatedby a vacuum-sealed can.

As there is no drive shaft leadthrough,the requirement for reliability combinedwith a perfect seal is met in an idealmanner.

The canned (rotor) motors combinedwith the highly efficient lubricationsystem in the RUVAC WS series allowrunning speeds up to 6,000 RPM (byfrequency modulation).

This means increased pumping speedwith the same size of pump.

Pumping speed for fore-vacuumpump combined with RUVAC rootspump with and without integratedpressure bypass valve (example:WA/WAU1001 with SOGEVACSV300):

1. Fore-vacuum pumping speed

2. RUVAC pumping speed withoutpressure bypass valve

3. RUVAC pumping speed withintegrated bypass valve

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The Intelligent Series

Proven Technology for Your Applications

2006 Austauschangebot SOGEVAC

RUVAC roots pumps are used in almostall areas of vacuum technology. They are a standard in combinationwith the established oil-sealed TRIVACand SOGEVAC families. But they are also a standard as a complete drycombination with the SCREWLINE®

family.

Vacuum pump system RUTA WAU 2001/SP 630/Gfor industrial applications, consisting of RUVACWAU 2001 and SCREWLINE SP 630

Automotive industry Decorative coatings Lamp and bulb production Wear protection coating Electron beam melting

■ RUVAC roots pumps are used inmany applications to achieve theshortest possible cycle times.Wherever fast evacuations areimportant, for example at load lockchambers or for food packaging,they will be applicable.

■ RUVAC roots pumps quickly reach apressure of less than 10-3 mbar orTorr when evacuating lamps andinsulating surfaces prior to the vapordeposition processes.

■ RUVAC pumps are also used inmonocrystal pulling equipment suchas are used for the manufacture ofsilicon mono-crystal, the basic mate-rial for the manufacture of semicon-ductors and solar cells.

A special offer from Oerlikon LeyboldVacuum is our application support forcustomers.

We would be pleased to put the know-how of our well experienced applicati-on experts to your service.

Oerlikon Leybold Vacuum has takenthe well-proven roots principle furtherand applied it in the RUVAC series tomeet the highest requirements deman-ded by modern vacuum-based pro-duction processes:

■ The most frequent use of RUVACroots pumps is to work as a boosterstage for smaller forevacuum pumpsto enable the compression of largevolume flows of gases or vapors inthe fine vacuum range.

Typical applications are heat treat-ment, furnaces, metallurgy or largearea coating.

■ RUVAC roots pumps are standardequipment in the architectural glasscoating industry. Combined withestablished oil sealed SOGEVACpumps they realize the shortestpump down time at the loadlockchambers. Combined with the drycompressing SCREWLINE® pumpsthey guarantee a dry, realible andtrouble-free vacuum at the processchambers.

ATEX (94/9/EG) CompliantRUVAC Roots Pumps

ATEX certified Roots pumps are available for the lines RUVAC WA / WAU 251/501/1001/2001.

They comply with ATEX Category 3(inside), as well as Category 3 (inside) and (outside) and are equipped withmotors which comply with temperatureclasses T3 or T4.

■ The RUVAC Roots pumps WA/WAU can optionally be equipped with a temperature monitoring facility (Pt 100 temperature sensor)

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Technical DataOrdering Information

Headquarter Germany

OerlikonLeybold Vacuum GmbHBonner Strasse 498D-50968 Cologne

T +49 (0) 221-347-0F +49 (0) 221-347-1250info.vacuum@oerlikon.com

www.oerlikon.com BIC

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RUVAC WA/WAU 251 501 1001 2001

WS/WSU

Nominal pumping speed m3 x h-1 253 505 1000 2050

Rotational speed (50/60) min-1 ≤ 3000/3600 ≤ 3000/3600 ≤ 3000/3600 3000/3600

Motor power (kW) ≤ 1.1 ≤ 2.2 ≤ 4.0 7.5

Maximum permissible

pressure difference 1) mbar 80 80 80 50

Connection flanges 3” ANSI 3” ANSI 4” ANSI 6” ANSI

Catalog number 2) WA/WAU 91720/91721 91730/91721 91740/91741 91750/91751

Connection flanges DN 63 ISO-K DN 63 ISO-K DN 100 ISO-K DN 160 ISO-K

Catalog number 2) WA/WAU 11720/11721 11730/11731 11740/11741 11750/11751

Connection flanges DN 63 ISO-K DN 63 ISO-K DN 100 ISO-K DN 160 ISO-K

Catalog number 2) WS/WSU 11722/11723 11732/11733 11742/11743 11752/11753

Connection flanges – DN 63 ISO-K DN 100 ISO-K DN 160 ISO-K

Catalog number 3) WS/WSU...W – 12860 / – ≤ upon request upon request

Frequency controlled version – – – DN 160 ISO-K

Catalog number 4) WS...FC – – – 155 020

1) Integrated bypass valve adjusts for any intake pressure2)Air-cooled motor/N62 oil3)Water cooled motor/PFPE oil (or prepared for PFPE oil)4)WS 2001 FC with frequency controlled motor and Anderol 555 oil offers

up to 4100 m3/h nominal pumping speed. PFPE oil filling is possible. For additional information please contact us.

You can obtain further technical details on our full series of RUVACroots pumps by contacting your nearest Oerlikon Leybold Vacuumsales office.

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