Research:The acquisition of electron beam lithography with support from the NSF MRI program has dramatically enhanced research opportunities in four thrust areas ongoing at U.C. Irvine:(1) Wireless communications(2) Fiber optic communications(3) Biotechnology(4) Nanotechnology

Acquisition of An Electron-beam Lithography System for a Nanotechnology Research and Education Facility at U.C. IrvinePeter Burke, G.P. Li, Wilson Ho, A. P. Lee, R. Penner, U.C. Irvine DMR-0216635

Examples:Nano-magnetism Carbon MEMS

Madou group has continued to push economical carbon MEMS devices by pyrolizing photoresist. Recent work has shown electron-beam lithography patterned carbon MEMS structures can be fabricated with this technique

Lu group has investigated spin based transport in nanosystems extensively, as well as new materials for nanowires, including TCMQ and ZnO[10-17, 38, 39]. Lu has collaborated with U.C. Irvine optics expert Professor Henry Lee and U.C. Irvine chemist Professor Penner, as well as other faculty outside of U.C. Irvine. Lu is involved with an NSF Spintronics NIRT project.

Ferromagnetic single-electron transistor. (Lu lab).

Carbon MEMS and nano-scale MEMS from photoresist pyrolysis. (Madou lab).

Acquisition of An Electron-beam Lithography System for a Nanotechnology Research and Education Facility at U.C. IrvinePeter Burke, G.P. Li, Wilson Ho, A. P. Lee, R. Penner, U.C. Irvine DMR-0216635

All told in 1.5 years, over 20 graduate students and postdocs have accessed the machine directly; they come from 10 different faculty research groups. These students come from all walks of life, and include women and minorities, including African Americans, Hispanics, and Asian Americans. As in most higher educational institutions in this country there is a mix of U.S. Citizens and foreign students. We have also developed, through the cleanroom, an outreach program for K-12 students. In the first year, that program targeted 20 students. In the second year, 50 school teachers were involved on campus.

The faculty supported by this instrument include 2 recent NSF Career awardees (Lu ’02, Collins ‘03), one ONR Young Investigator awardee (Burke ‘02), as well as established senior faculty.

Peter J. Burke Principal Investigator

Wilson Ho CoPrincipal Investigator

Guann P. Li CoPrincipal Investigator

Abraham P. Lee CoPrincipal Investigator

Reginald M. Penner CoPrincipal Investigator

Albert Yee Senior personnel

Marc Madou Senior personnel

Jia Grace Lu Senior personnel

William C. Tang Senior personnel

Philip G. Collins Senior personnel

Chunlei Wang Post-doc

Le Yan Graduate student

Wei Wei Graduate student

Zhen Yu Graduate student

Dawei Wang Graduate student

Hong Zhou Graduate student

Chong Wang Graduate student

Haroon Lais Graduate student

Kuosheng Ma Graduate student

Lifeng Zheng Graduate student

Sungmu Kang Graduate student

Zhiyong Fan Graduate student

Guangyao Jia Graduate student

Shengdong Li Graduate student

Yen Peng Kong Graduate student

Pai-Chun Chang Graduate student

Chung-Jen Chien Graduate student

Derek L. Kingrey Graduate student

Tsung-Hsi Hsieh Graduate student

Christopher Rutherglen Graduate student

Qinghzou Xu Technician

Frekrik Nikolajeff Academic user from Europe (visitor)

Optical Wireless Link (Industry)

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