Rein Boshuisen, PME

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1 Titel van de presentatie Rein Boshuisen, PME nalysis and Performance of a lightweig ver-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010

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Analysis and Performance of a lightweight over-actuated 450mm wafer chuck. R. Boshuisen, PME 09-06-2010. Rein Boshuisen, PME. Contents. Introduction Problem Description Principle of Over-actuation Test S etup and Analysis Improvements on the Current Setup Conclusions. - PowerPoint PPT Presentation

Transcript of Rein Boshuisen, PME

Page 1: Rein Boshuisen, PME

1Titel van de presentatie

Rein Boshuisen, PME

Analysis and Performance of a lightweight over-actuated 450mm wafer chuck

R. Boshuisen, PME09-06-2010

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2Titel van de presentatie

Contents• Introduction

• Problem Description

• Principle of Over-actuation

• Test Setup and Analysis

• Improvements on the Current Setup

• Conclusions

Over-actuation of a wafer chuck

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Problem descriptionTypically wafer chucks are actuated as rigid bodies. Larger wafers leads to heavier wafer stages:

200 mm Wafer

m kg

300 mm Wafer

> 3 x m kg

450 mm Wafer

> 11 x m kg

Z

Y

X

Width: 1.5Depth 1.5Thickn: 1.5

Width: 1.5Depth 1.5Thickn: 1.5

Modal analysisModal analysisOver-actuation of a wafer chuck

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Drawbacks of large wafers and chucks:• Larger actuation forces and deformation• Larger power dissipation and thermal load • Internal modes still critical to performance

Z

Y

X

Problem descriptionDesire to have a LARGE chuck with

LOW Mass and HIGH internal modes

Modal analysisModal analysisOver-actuation of a wafer chuck

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zF

z

ALTERNATIVE means of ACTUATOR placement

Actuation in nodes

zFzFSymmetrical actuation

zF zF zF

Challenge deal with infinitely many modes, without adding as many actuators and control complexity

Alternative: Over-Actuation

Over-actuation of a wafer chuck

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Eigenmodes of a chuck

Over-actuation of a wafer chuck

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First eigenmode - Example

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Eigenmodes of a chuck

Over-actuation of a wafer chuck

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• Actuators on nodeline?• Change nodelines?

Modal analysisModal analysis

Eigenmodes of a chuck

Over-actuation of a wafer chuck

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1Langelaar TU Delft

y

x

Topology optimization1 of chuck

Over-actuation of a wafer chuck

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5

1

25

1

25

1

2min

f RyTff Rx

Tff z

Tf BBB

Z Rx Ry

00

010

001

2

2

kms

ms

Mechanics

T CB

Modal Coordinates

Physical CoordinatesMinimize the contribution by varying actuator position and cavity diameter :

a d

Optimization Strategy

Over-actuation of a wafer chuck

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12Titel van de presentatieModal analysisModal analysisOver-actuation of a wafer chuck

Optimization result I

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184 Hz 270 Hz 270 Hz

349 Hz 521 Hz

Actuator location

Green zero displacement

Eigenmodes of a chuck

Over-actuation of a wafer chuck

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Optimization result II

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15Titel van de presentatieModal analysisModal analysisOver-actuation of a wafer chuck

Optimization result II

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Wafer chuck demonstrator motions in Z, Rx, and Ry

Z

Y

X

Three linear encoders

Folded Flexures (3x), Fixing Rz, X and Y Actuator assembly

(5x)

Frame

Modal analysisModal analysis

Realized Test Setup

Over-actuation of a wafer chuck

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Conventional actuation around COG

Over-actuation around COG

Realized Test Setup

Over-actuation of a wafer chuck

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Measured Result I

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Measured Result II

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Control of the chuck

ChuckDynamics

Loc ->CoGActuation matrix3 PID

controllers

3 Sensors

Z

RX

RY

Control with standard industrial controller Bosch-RexRoth NYCe 4000

Over-actuation of a wafer chuck

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Performance of the setupConventional Over-Actuated

Bandwidths:ZRXRY

50 Hz60 Hz50 Hz

102 Hz100 Hz100 Hz

Standstill Performance RMS

ZRXRY

30 nm 150 nrad135 nrad

7 nm35 nrad30 nrad

Factor 2 in bandwidth, 4 in stiffness

Factor 5 improvement

Over-Actuation shows clear benefits compared to conventional actuation!

Over-actuation of a wafer chuck

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Why still excitation of the modes??

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• Improved model

• No Symmetry – Possible causes• Actuator 5• Gravity Compensators• Plate springs• Chuck

The analysis only partially explains the mode excitations Over-actuation of a wafer

chuck

Mode excitation analysis

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• Sensor-placement / Over-Sensing

Over-actuation of a wafer chuck

Improvements of the current setup

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Control of the chuck

ChuckDynamics

Loc ->CoGActuation matrix3 PID

controllers

3 Sensors

Z

RX

RY

Control with: Matlab/Simulink, using xPc Target software

Over-actuation of a wafer chuck

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Adjust Sensorposition such, that the excitation of the modes is not converted to CoG movement

• Place sensor in a node

• Symmetric sensor placement

Over-actuation of a wafer chuck

Over-Sensing

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Over-Sensing

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• This sensor placement can distinguish the first and second eigenmode from the rigid body movement

• Active damping of first eigenmode!

Over-actuation of a wafer chuck

Over-Sensing

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Conventional Over-Actuated + first mode active damping

Bandwidths:ZRXRY

100 Hz100 Hz100 Hz

200 Hz150 Hz150 Hz

Standstill Performance RMS

Sensor 1Sensor 2Sensor 3Sensor 4

4.0 nm5.8 nm4.6 nm4.6 nm

1.8 nm1.9 nm1.9 nm1.9 nm

Over-actuation of a wafer chuck

Over-Sensing - Performance

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• Over-actuation is succesfully implemented on a wafer chuck with an increased performance as result.

• Symmetry is critical for the positions of the nodelines on the diagonals

• Include sensor position optimization in the design phase

• Use four sensors to be able to actively damp the first eigenmode

Over-actuation of a wafer chuck

Conclusion

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Rein Boshuisen, PME

Analysis and Performance of a lightweight over-actuated 450mm wafer chuck

R. Boshuisen, PME09-06-2010

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32Titel van de presentatieOver-actuation of a wafer chuck

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Dynamic Analysis – effect of rotated chuck

Over-actuation of a wafer chuck

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Dynamic Analysis – effect of Gravity Compensator

Over-actuation of a wafer chuck

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Damping• Chuck is very lightly damped, increasing damping,

reduces maximum peak-hight, leading to less sensitivity of the actuator placement

Over-actuation of a wafer chuck