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RA-Micro 007

Desktop Rotating Anode

X-Ray Generator

Service Manual

Document No. 4156A101

RA-Micro 007

Desktop Rotating Anode

X-Ray Generator

Service Manual

Document No. 4156A101

August 2002

Rigaku/MSC, Inc. shall not be liable for technical or editorial

omissions or mistakes in this manual. Nor shall it be liable for

incidental or consequential damages resulting from the use of the

information contained herein.

Reproduction, adaptation, or translation of any portion of this

publication

without prior written consent from Rigaku is prohibited, except as

allowed under copyright laws.

© Copyright 2002 by Rigaku/MSC, Inc., 9009 New Trails Drive, The

Woodlands, TX 77381.

All rights reserved.

Technical writer: M. Liliana Riahi

RA-Micro 007 Service Manual v

Contents

Chapter 1. Equipment Outline and Specifications ................................................................... 2

Specifications.............................................................................................................. 2

Utilities ....................................................................................................................... 2

Manual................................................................... Error! Bookmark not defined.

Construction ............................................................................................................... 3

Power Supply Requirements...................................................................................... 4

Voltage ............................................................................................................................................... 4

Frequency.......................................................................................................................................... 4

Installation ................................................................................................................. 5

Turning ON the System ............................................................................................. 9

Stability of Focus Position........................................................................................ 10

Focus Size ................................................................................................................. 10

Determining the Focus Size ..................................................................................... 12

RA-Micro 007 vs. Ultrax-18 ..................................................................................... 13

Chapter 2. Individual Units ......................................................................................................... 15

Power Supply............................................................................................................ 15

Power Section ........................................................................................................... 16

Subpanel ................................................................................................................... 18

Target Driver ............................................................................................................ 22

Check Terminal.................................................................................................. 22

LED Display...................................................................................................... 22

TMP Driver ............................................................................................................... 23

Shutter Circuit ......................................................................................................... 23

CPU Circuit .............................................................................................................. 25

Operation Panel........................................................................................................ 26

vi RA-Micro 007 Service Manual

Secret Command ............................................................................................... 26

Rotation of Target .............................................................................................. 26

Aging Mode......................................................................................................... 26

Check Flag Mode................................................................................................ 27

Dimming............................................................................................................. 27

X-Ray LED/Shutter Open LED ......................................................................... 27

Shutter FS Circuit.................................................................................................... 28

Shutter Drive Unit ................................................................................................... 28

Ready Conditions...................................................................................................... 29

Chapter 3. Characteristics ........................................................................................................... 31

Consumption of Electricity....................................................................................... 31

Vacuum ..................................................................................................................... 33

Filament.................................................................................................................... 34

Focus size .................................................................................................................. 35

Definition............................................................................................................ 36

Focus Size Measurement................................................................................... 36

BIAS Voltage ............................................................................................................ 38

BIAS Setting–Filament Current.............................................................................. 39

TMP Driver ............................................................................................................... 40

Aging ......................................................................................................................... 41

Check Terminal and LED of High Voltage Transformer........................................ 43

X-Ray Intensity Monitoring ..................................................................................... 46

X-Ray Intensity Changing........................................................................................ 47

FC and Focus Size .................................................................................................... 48

Chapter 4. Alarm and Countermeasures................................................................................... 51

Chapter 5. Drawing ....................................................................................................................... 55

2 RA-Micro 007 Service Manual

Chapter 1

Equipment Outline and

Specifications

Specifications

Refer to the publication titled RA-Micro 007 Desktop Rotating

Anode X-Ray Generator: Specifications Manual (Document No.

DBG-S001).

Utilities

Refer to the publication titled RA-Micro 007 Desktop Rotating

Anode X-Ray Generator: Utilities Manual (Document No. DBG-

U001).

Service

Please refer to this publication titled RA-Micro 007 Desktop

Rotating Anode X-Ray Generator: Service Manual (Document No.

4156A101).

RA-Micro 007 Service Manual 3

Construction

Name

Name of Components

Cat. No.

Drawing No.

Micro 007 Electrical components 4541N201 A792-001-3-12

Micro 007 Tube tower 4540H701 A792-001-3-13

Micro 007 Power supply 4541N101 A792-0026

RA-Micro 007 Right 4601L711 A116-0053

RA-Micro 007 Left 4601M111 A116-0054

R2HV cable 4259B2 4437-0049

Top table BS 2807F312 A340-6-1D

RA-Micro 007

4156A101

A792-001-3-11

Filament APBS D2H64T 4547-0072

Cathode

4479A118

5726-0069

DPTA2

4364F401

A347-001-1


Power Supply Requirements

Power

Voltage

Frequency

Note

3 -phase AC 200V ± 10% 50/60 Hz ± 1% Standard specification.

3-phase AC 220V ± 10% 60 Hz ± 1% Standard specification.

3-phase AC 220V ± 10% 50 Hz ± 1% Roughing pump needs

to be changed.

Current and voltage

Three-phase AC 200V 3.5 kVA.

NOTE

More than 15 A must be used at the main breaker.


Installation

X-ray generator unit

This unit provides a power supply for the RA-Micro 007. For the unit

to be operational, the ventilation cap must be set to operate rather

than to transfer.

Connection at power supply terminal

TB 401

Display

Work (See A792-0040H)

1 L1/U Connect wire at L1/U from main breaker.

2 L2/V Connect wire at L2/V from main breaker.

3 L3/W Connect wire at L3/W from main breaker.

4 PE/G Connect grounding wire from main breaker.


TB 402

Display


1 L1/U Connect wire at L1/U of X-ray generator

power unit.

2 L2/V Connect wire at L2/V of X-ray generator

power unit.

3 L3/W Connect wire at L3/W of X-ray generator

power unit.

4 PE/G

XG-PS

Connect grounding wire to X-ray generator

power unit.


TB 403

Display


1 COM

2 200V Jumper Pin 1 (COM) and Pin 2 (COM) when using AC

200 V and AC 208 V.

3 220V Jumper Pin 1 (COM) and Pin 3 (COM) when using AC

220 V.

4 240V

IG

TRANS

TAP

SELECT

Do not use.

5 Do not use.

6 Do not use.

7

8

100V

Radiation

Enclosure

AC 100 V power supply output when the power is ON

at subpanel.

MAX 0.4(A)

9

10

100V

CW

AC 100 V power supply output when the power is ON

at the subpanel. It is for the remote signal of the heat

exchanger.

MAX 0.1(A)

11 L1/U Connect the U line wire of the roughing pump.

12 L2/V Connect the V line wire of the roughing pump.

13 L3/W Connect the W line wire of the roughing pump.

14 PE/G

RP

Connect the ground wire of the roughing pump.


Installing the Roughing Pump

To install the roughing pump, connect the power and the ground

wire at TB403 and connect the vacuum tube between the

turbomolecular pump (TMP) and the roughing pump.

Cooling the water line

Connect the water hose between the RA-Micro 007 IN, OUT and the

heat exchanger.


Turning ON the System

After all the parts are assembled and connected, follow the steps below

to turn on the system:

1. Turn ON the main breaker on the wall. Be sure that the line

lamp in the power section lights up.

2. Turn ON the breaker on the system. Be sure that the line

lamp in the subpanel lights up.

3. Turn ON the power switch on the subpanel. There will be the

buzzing sound of cooling water.

4. Turn ON the heat exchanger. Be sure that the buzzing sound

disappears.

5. Be sure that Power Off Now is lit up in the display, then

push the Start button of the vacuum.

6. Be sure that the Ready light is on in the display when pushing

the Power ON button

7. The X-ray generator is now ON and running.


Stability of Focus Position

The system needs 1.5 hours to maintain its focus position. Therefore,

after 1.5 hours, it is necessary to take measurements and to align the

CMF. To do this,

1. Set 600 dev at BIAS volume.

2. Execute a short in the aging mode.

NOTE

The best conditions for this step will occur automatically

after 1.5 hours.

Focus Size

To set the correct (official) focus size, follow the steps below:

1. Mount the front cover of the system, and then start the

vacuum.

2. Set the BIAS setting at 600 dev.

3. Turn the X-ray generator ON and execute aging in short time.

4. Connect the voltage meter (DC) to the FC check terminal.


NOTE

It is necessary to wait for 1.5 hours.

Be sure that the X-ray generator is set at

40 kV/20 mA.

FC

5. After the filament change, the FC voltage must be checked.

At the FC check terminal, set the voltage to *.* V through the

BIAS setting.

NOTE

The BIAS knob may need to be adjusted to set the voltage

to *.* V.

CAUTION!!!

Gloves must be worn when working with a vacuum.

Do not apply tension to the filament.

+ –


1.40

1.35

1.30

1.25

1.20

1.15

z ax

is [

mm]

1.851.801.751.701.65y axis [mm]

Determining the Focus Size

The tables below show the specifications for the focus size, as

measured with a CCD camera.

FWHM

FWHM Focus area (µmz)

Z(µ m) Y(µ m) Maximum Minimum

75 ± 15%

(64 ~ 86)

65 ± 15%

(55 ~ 75)

4900

(F 79)

3320

(F 65)

FWHM

FWHM Focus area (µ?)

Z(µ m) Y(µ m) Maximum Minimum

BIAS

setting

FC

(V)

Vaccum

(mV)

Focus picture


RA-Micro 007 vs. Ultrax-18

There is a number of advantages to the RA-Micro 007 over the

Ultrax-18. Some of these advantages are as follows:

1. The focus size is only 70 µ m.

2. The capacity of the X-ray generator is 800 W.

3. The CE is specified.

4. There is only one copper target.

5. The tube tower is designed directly for the RA-Micro 007.

6. The HV bushing is designed directly for the RA-Micro 007, and

it is small. It is not a gas insulation.

7. The rotary shutter is designed directly for the RA-Micro 007.

8. The turbomolecular pump (TMP) is manufactured by the

Varian company.

9. The electronic component is stored in the subcabinet.

10. The cooling water flow rate is only 4 liters/min.

11. The operating power is AC 200 V 10 A.

12. It is not possible to increase the mA before reaching 40 kV.

13. It is not possible to decrease the voltage to < 40kV before

reaching 10 mA.

14. An error prompt may appear when the mA increase

command is issued at <39 kV.


15. The aging mode is designed only for the RA-Micro 007.

During aging, if the UP or DOWN key is depressed, aging may

be canceled and the X-ray generator may be made to run

continually.

16. The target driver is of a new type (SGPXD-4). The target is a

DPTA2.

17. The turbomolecular pump (TMP) driver is of a circuit board

type manufactured by Varian.

18. The X-ray warning lamp does not have a power connector.

The RA-Micro 007 has 6 pins. The Ultrax-18 has 10 pins.


Chapter 2

Individual Units

Power Supply

The power supply for the X-ray generator

• is named RMN1,

• is of 2 kW, and

• is made by RMS.

Drawing: A792-26-1D

A845-001-3-2.

NOTE

For more detailed information, see the RA-Micro 007

Desktop Rotating Anode X-Ray Generator:

Maintenance Manual.


Power Section

The power section supplies power to each component of the RA-Micro

007, with the terminal being located in the back of the unit, in the

right lower part:

1. Terminal TB 401

Connect the power supply wires at TB 401 from the main

breaker on the wall.

2. Line lamp

The line lamp lights up when it receives AC 200 V power.

3. Circuit protector 1 (CP 1)

Circuit protector 1 trips when too much power flows to the

line lamp.

4. Main breaker (ELB 1)

The current at the main breaker is 15 A, and the electrical

leakage is 30 mA.


Circuit protector 2 trips when the Varista jumper lights up or

there is an abnormal input impulse.

6. Terminal TB 402

The TB 402 terminal provides a power supply for the X-ray

generator.


7. Terminal TB 403

The TB 403 provides a power supply for each of the

components of the unit.

NOTE

See the TB 403 table in the section titled Connection at

Power Supply Terminal in Chapter 1 on p. 6.


Circuit protector 3 trips when the current flows more than

0.5 A at TB 402 7–8, 9–10.

9. Electric contactor RY 2

The electric contactor RY 2 is for the roughing pump. The

thermal relay should be set to 2.6 A.


Subpanel

The subpanel is located under the OP panel. This subpanel displays

the hour meter and the status of each component. It also manages

the ON/OFF power control and the turbomolecular pump (TMP).

1. Main power switch

This switch controls the ON/OFF power and has a lamp that

lights up when the switch is turned ON. Inside the cabinet,

there is also a fan, which rotates when the main power switch

is turned ON.

NOTE

The main power switch cannot be turned on if the fan is

not rotating.

2. Hour meter

There is a reset switch in the hour meter under the black line.

IMPORTANT!!!

It appears to be best not to tell the customer about the

reset switch.

3. Focus selection switch

This switch controls the selection of the focus size. This size

must be set at 0.07. It is the only setting on the RA-Micro

007.


4. Target selection switch

This switch is used to select the target material and must be

set at Cu. (Other targets are optional.)

5. BIAS setting knob

The BIAS must be set at 0.07. The BIAS setting knob will set

the RA-Micro 007 to *.* V at the FC terminal.

6. Turbomolecular pump (TMP)unit display

The TMP unit will display the following:

• a lighted power lamp when the main power is supplied by

the TMP driver;

• a lighted acceleration lamp when the TMP accelerates;

• a lighted run lamp when the final rotation speed is reached;

• a lighted alarm lamp when an abnormal condition occurs in

the rotation or the temperature of the unit.

7. TMP check terminal

The actual rotation speed output is 0–10 V between COM and

speed. The output is 10 V when the run lamp is lit (run = 75

krpm). The TMP load output is between COM and power.

1 V is about 10 W.

NOTE

See the section on the TMP driver below for driver

specifications.


8. Shutter mode selection

The shutter mode switch has the following selections:

• L, for left;

• R, for right;

• XG, for operating the shutter with the OP panel and the

computer;

• Hose, for operating the shutter with the R-Axis unit or the

RCD.

9. Buzzer switch

This switch controls whether the buzzer is to be ON or OFF.

10. Auxiliary terminal

This terminal offers the following selections:

• Power ON, which yields a maximum AC 120 V–2 A;

• X-ray ON, which yields a maximum AC 120 V–2 A.

11. Vacuum output terminal

The output range of this terminal is 0–500 mV at 1 x 10ˆ – 1,

1 x 10ˆ – 5.

12. FC check terminal

The output of this terminal is the primary filament current.

NOTE

See the section on Filament specifications in Chapter 3

on p. 34.


13. Sequencer

This item manages the vacuum system.

14. TMP driver

The TMP driver is of the circuit board type.

15. BIAS reference voltage

The BIAS reference voltage can be measured. It should be

measured when it is abnormal.

Setting: +10 (V) (+9.995 V ~ +10.005 V).


Target Driver

The model number of the target driver is SGPXD-40. This target

driver is a newer version of the S30T. The SGPXD-40 provides

• economy of electricity,

• less noise, and

• fewer vibrations.

Check Terminal

Check

Point

Name

Sub

Name

Note

TP1 Sensor test point HX ±13 V ~ ±14 V

TP2 Monitor test point pul ±13 V ~ ±14 V

GND Signal common GND

LED Display

Name

LED Display

RDY Green color when in Ready mode.

Red color when in Alarm mode.

SRV Green color when in Run mode.

Red color when in Alarm mode.


NOTE

When the alarm LED is lit, push the reset switch or the

ON switch .

TMP Driver

The specifications of the TMP driver are as indicated in the table.

TMP Driver

Model number 969-9509

Manufacturer Varian

Input voltage

Frequency

Power

90 V ~ 265 V

50/60 Hz

150 VA maximum

Output voltage

Frequency

Power

54 Vac ±10%

1250 Hz

70 W

Revolutions 75,000 r/min

Shutter Circuit

This circuit monitors the shutter status. The circuit will shut off the

X-ray when an abnormal condition occurs. The monitor will close the

sensor in the shutter.


Card Rack

At the lower right in the cabinet, there is a card rack that holds the

switching regulators.

Specifications for the switching regulators.

P/N and

Manufacturer

Input

Output

Note

PS1 LWT30H-5FF/ Densei-Lambda

85~ 265VAC 0.7A

5V/5A? +15V/1.2A? -15V/0.6A

For control circuit.

PS2 RWS 30A-24/ Densei-Lambda

85~ 265VAC 0.7A

24V/1.3A For sequencer and warning lamp.

NOTE

Press keys F1 and F2 to activate the 3.15-A circuit

protector whenever an abnormal current flow is tripped

within the main power panel.


CPU Circuit

The CPU circuit controls the X-ray generator.

ROM: Version 4.10 (12/13/1001)

IC3 in A171-14-ID

Rotary switch 2

(kV maximum)

6 (0 ~ F)

Rotary switch 3

(mA maximum)

D (0 ~ F)

D.W. switch 5 1 – > ON

2 – > OFF

3 – > OFF

4 – > OFF

5 – > OFF

6 – > OFF

7 – > ON

8 – > OFF


Operation Panel

The operation panel controls the operation of and information in the

X-ray generator.

ROM version 3.10 (13/12/2001)

IC10 in the A171-22-ID

D.W. S2 1 – > OFF

2 – > OFF

3 – > OFF

D.W. S4 1 – > ON

2 – > ON

3 – > OFF

4 – > OFF

Secret Command (Password?)

The RA-Micro 007 requires no password.

Rotation of Target

The target may be rotated only in the Manual mode.

Aging Mode

There are four aging modes in the RA-Micro 007.

NOTE

The aging process will stop and the kV and mA settings

will be kept when the UP and DOWN keys are pressed

during aging.


1. Short time mode: When the system is running, it is generally

in the short time mode. One hour of running time is needed

to reach the 40 kV and 20 mA level.

2. Medium time mode: When the filament is replaced. The

system is in the medium time mode. 12 hours of running time

are needed to reach the 40 kV and 20 mA level.

3. Long time mode: This mode is used for the aging of the new

tube tower. The factory uses this mode when running the first

aging. In this mode, 48 hours of running time are needed to

reach the 40 kV and 20 mA level.

4. Manual mode: This mode may be used for the aging

procedure.

Check Flag Mode

This mode is used for monitoring all the flag statuses in the CPU

circuit. When all the flags are normal, the check flag mode is at

ready.

• Input port: The input port displays the port condition.

• Echo back: The echo back displays communication

between the computer and the RA-Micro 007.

Dimming

This feature adjusts the brightness in the operation panel. The

standard brightness is 60%.

X-Ray LED/Shutter Open LED

This feature monitors the jumper and the open mode in the LED. The

LED must be replaced when all the LEDs are lit up.


Shutter FS Circuit

This circuit controls two of the rotary shutters and the FS unit. To

operate the shutter, the shutter driver circuit must be installed

(A105-003, which is included in the R-Axis controller).

NOTE

When the R-Axis is not used, the shutter driver circuit

must be ordered.

Shutter Drive Unit

The RA-Micro 007 contains two rotary shutters. The A171-0035

(circuit board control) is included in the RA-Micro 007. However,

there is no shutter drive circuit board in the RA-Micro 007 because it

is included in the R-Axis and in the RCD.

D. S. S1 1 – > OFF

2 – > ON

3 – > OFF

4 – > OFF

5 – > ON

6 – > OFF

D. S. S2 1 – > ON

2 – > ON

3 – > OFF

4 – > OFF


If the R-Axis and the RDC are not ordered, then the shutter driver

unit must be installed in the RA-Micro 007.

Ready Conditions

The ready conditions are as follows:

1. No alarm is active.

2. Shutters are closed (by the close sensor).

3. All circuit boards are installed in the RA-Micro 007.

4. There is more than 10ˆ4 Pa (250 mV less) in the vacuum.

5. The radiation enclosure doors are closed.

The power ON conditions are as follows:

• The shutter mounting sensor is not visible.

• The water leaking sensor is detected.


This page intentionally left blank.


Chapter 3

Characteristics

Consumption of Electricity

Condition A B C D Voltage (V)

Current (A)

Current (A)

C urrent (A)

Current (A)

180 9.95 11.42 11.34 11.26200 8.25 10.10 9.71 9.92208 7.94 9.53 9.49 9.45220 7.65 9.07 8.77 8.56242 7.37 8.42 8.41 8.04

180 9.09 10.98 10.60 10.66200 7.95 9.63 9.33 9.17208 7.57 9.01 8.83 8.69220 7.26 8.53 8.38 8.14242 6.86 8.17 7.84 7.61

Load 0.8 1.2 1.2 1.2

Frequency (Hz)

50

60

Difference between 50 Hz and 60

6.0 7.0 8.0 9.0

10.0 11.0 12.0

170 180 190 200 210 220 230 240 250 (V)

(A)

50 Hz 60 Hz


40 kV, 20 mA, BIAS 156 V (950) 40 kV, 30 mA, BIAS 0 V (000)

Condition A B

Frequency

( Hz)

Voltage

( V)

Effective

electricity

(W)

Invalid

electricity

(Var)

Superficial

electricity

(VA)

Rate

(%)

Effective

electricity

(W)

Invalid

electricity

(Var)

Superficial

electricity

(VA)

Rate

(%)

50 200 2302 508 2366 0.97 2845 590 2913 0.98

200 2442 179 2453 1.00 2966 194 2978 1.00

208 2427 187 2436 1.00 2936 215 2947 1.00 60

220 2485 253 2505 0.99 2986 269 3009 0.99

Load (kW) 0.8 1.2

0.8(kW)

2200

2300

2400

2500

2600

2700

2800

2900

3000

3100

195 205 215 225 Volt (V)

(W)?

) (VA

)

Effe 50Hz Supe 50Hz

Effe 60Hz Supe 60Hz


Vacuum

1.0E-06

1.0E-05

1.0E-04

1.0E-03

1.0E-02

1.0E-01

1.0E+00

0 50 100 150 200 250 300 350 400 450 500

IG? ? ? ? ? ? ( mV)

??

??

(Pa

)

IG terminal output (mV) Actual vacuum and Output of IG terminal

Vacu

um

(Pa)


Filament

4.000

5.000

6.000

7.000

8.000

9.000

10.000

3.00 4.00 5.00 6.00 7.00 8.00 9.00 10.00 11.00

FC? ? ? ? ? ? ( FCMF) ( V)

??

??

??

??

(A

)

FC terminal (FCMF) (V) Filament current and FC monitor output (FCMF)

FCL: A (at 40kV, 20mA, BIAS950) +10% Detect at 7.7 A Must measure at FCMF after 1.5 hours 40 kV-20 mA

(because of the drifting FCMF temperature).

Filam

ent cu

rrent (A

)


Focus size

0.0

0.1

0.2

0.3

0.4

0.5

0 100 200 300 400 500 600 700 800 900 1000

? ? ? ? ? ?

??

??

?

(mm

)

FW10%M_X

FW10%M_Y

FWHM_X

FWHM_Y

BIAS deviation

This is a reference example chart between focus size and BIAS. BIAS setting is at about 866 = 156 V .

Focu

s size (mm

)


1.40

1.35

1.30

1.25

1.20

1.15

z ax

is [

mm]

1.851.801.751.701.65y axis [mm]

Definition

The focus size of the RA-Micro 007 must be less than 80 µm in the X

and Y directions.

The X-ray focus size is the same as that using FWHM (X–Y).

Focus Size Measurement

The expansion rate should be 3–4 times.

Glancing angle must be 6 deg.

40 kV 20 mA BIAS 950 (148.2 V)


100

80

60

40

20In

tens

ity

[arb

.uni

t]

-0.10 0.00 0.10y-axis [mm]

120

100

80

60

40

20

0Intensity [arb.unit]

0.15-0.15Z-axis [mm]


BIAS???? BIAS? ? ? ? ? ?

0.0

50.0

100.0

150.0

200.0

250.0

300.0

350.0

400.0

450.0

0 100 200 300 400 500 600 700 800 900 1000BIAS???

BIAS??? ?

(V) Focus 0.1 40kV

Focus 0.1 50kVFocus 0.1 60kVFocus 0.5 40kVFocus 0.5 50,60kV

BIAS Voltage

RA-Micro 007 = Focus 0.1

BVMF---BIAS? ? ? ?y = 103.6x + 0.1479

0

50

100

150

200

250

300

350

400

450

0 0.5 1 1.5 2 2.5 3 3.5 4 4.5

BVMF(V)

BIAS

? ?(V

)

40kV 45kV 50kV Linear (50kV)


BIAS Setting–Filament Current

40kV, 20mA

(Reference example)

FCMF must be measured after 1.5 hours because of the drifting temperature.

BIAS 866 = about 156 V.

BIAS? ? -FC (FC M F)? ?

5.00

5.50

6.00

6.50

7.00

7.50

0 100 200 300 400 500 600 700 800 900 1000BIAS? ?

FC(FCMF)(V)


TMP Driver

Acceleration time around 1 min

Power at RUN About 13 W (1.3 V)

At RUN 75 k(r/min)(10V)

Stop without leak

RPM

Power

Power during acceleration time 86 W (8.6 V)


Aging

The RA-Micro 007 has four aging modes.

Aging will stop and keep the present kV and mA when the UP or

DOWN keys are pressed.

AGING MODE: Short

0

10

20

30

40

50

60

0 60 120 180 240 300 360 420 480 540 600 660 720 780 840AGING TIME (min)

kV,mA

kV mA

After 1 hour 40 kV, 20 mA

After 12 hours X-ray OFF


0

10

20

30

40

50

60

0 120 240 360 480 600 720 840 960 1080 1200 1320 1440

Aging Time (min)

kV, m

A

kV mAAGING MODE: Middle


After 12 hours 40 kV, 20 mA


AGING MODE: Long

0

10

20

30

40

50

60

70

0 720 1440 2160 2880 3600 4320 5040AGING TIME (min)

kV,

mA

kV mA

After 48 hours 40 kV, 20 mV



Check Terminal and LED of High Voltage Transformer

Display Action or Name Voltage LED or color

Power When provided power in the transformer.

Green LED

KVMR KV reference 6 V/–60kV Red color KVMF KV feed back 6 V/–60kV Red color MAMR MA reference 3 V/30 mA Red color MAMF MA feed back 3 V/30 mA Red color FCMR Filament current reference 8.23 V Red color FCMF Filament current feedback See p. 15:

Graph FCMF and filament current

Red color

BVMR Bias reference 4 V/– 400 V Red color BVMF Bias feedback 4 V/– 400V Red color + 5 V + 5V + 5 V Red color + 15 V + 15 V + 15 V Red color + 15 V + 15 V + 15 V Yellow

color +15 V(A) + 15 V + 15 V Red color COM Common Black color ARC ALARM

Arcing detection select ON/OFF switch.

Switch

XON Lit when X-ray ON. Green LED kV min OK

Lit when kV is more than 17 kV.

Green LED

MA min OK

Lit when mA is more than 1.8 mA.

Green LED

PSFLT Fan abnormal rotation, Thermal sensor, Fuseburned,

Arc detected, Power supply voltage

abnormal, Resister between BIAS and filament less than 30 KO when lit one above alarm.

Red color

HVL Lit when kV is more than 63 kV.

Red color

LVL Lit when kV is less than 17 kV.

Red color

TCL Lit when mA is more than 66 mA .

Red color

OLL Lit when passed + 5% OLL setting (0.8 kW).

Red color


Display Action or Name Voltage LED or color

LCL Lit when flowed 150 A in IGBT.

Red color

FUSE Lit when burned out fuse. Red color THERM Lit when passed 60 deg in

inverter and converter heat sink.

Red color

FAN Lit when detected fan as abnormal.

Red color

ARC Lit when detected arcing. Red color UVL Lit when power supply

voltage is less than 170 V. Red color

BFS Lit when make short between filament and cathode or resister is less than 30KO.

Red color


X-Ray Intensity Monitoring

150000

100000

50000

0

Inte

nsity

[cps

]

2.42.22.01.81.61.41.21.00.80.60.40.20.0time [hour]

warmup time 100min

X-ray intensity with Cu0.2foil

X-ray intensity monitoring over time.


X-Ray Intensity Changing

X-ray intensity changing over time.

180000

175000

170000

165000

160000

155000

150000

Inte

nsity

[cps

]

80006000400020000time [sec]

26

24

22

20

18

tube

tem

p [C

°]

5000cps

1000cps

5000cps

1000cps

intensity water temp


FC and Focus Size

Below is an FC and a focus size characteristic chart. The correct

(official) focus size may be obtained by setting the FC voltage at *.* V

as in *.* V (FCMF) = 6.2 V + FC Offset at 40 kV–20 mA.

6.2 V = Constant voltage for the RA-Micro 007.

FC offset = Every RA-Micro 007 has a typical offset value.

Focus characteristic in 5 of RA-Micro 007.

FC-FOCUS(FWHM Z) 5FCMF-Offset = 6.2 V

50556065707580859095100105110115120125

5.0 5.2 5.4 5.6 5.8 6.0 6.2 6.4 6.6 6.8 7.0 7.2 7.4

FCMF-Offset (V)

Z?FWHM??µm)

02-0.19

02-0.13

02-0.19(2)

02-0.145

02-0.08

02-0.115

02-0.08(2)

02-0.15

01-0.18

01-0.17(A)

01-0.15

01-0.17(B)

01-0.12

01-0.17

01-0.19

Pass? MAX

Pass MIN

01-0.15± 0.05

03-0.15± 0.05

04-0.17

05-0.15± 0.05

04-0.17-10.95

04-0.17-11.05

04-0.17-11.20


Focus characteristics in 5 of RA-Micro 007.

FC-FOCUS (FWHM Y) 5FCMF-Offset = 6.2 V

50

55

60

65

70

75

80

85

90

95

100

105

5.00 5.20 5.40 5.60 5.80 6.00 6.20 6.40 6.60 6.80 7.00 7.20 7.40

FCMF-Offset (V)

Y FW

HM (

µm)

02-0.19

02-0.13

02-0.19(2)

02-0.145

02-0.08

02-0.115

02-0.08(2)

02-0.15

01-0.18

01-0.17(A)

01-0.15

01-0.17(B)

01-0.12

01-0.17

01-0.19

Pass MAX

Pass MIN

02-0.15± 0.05

03-0.15± 0.05

04-0.17

05-0.15± 0.05

04-0.17-10.95

04-0.17-11.05

04-0.17-11.20


Chapter 4

Alarm and Countermeasures

The operation panel has 15 alarms. These alarms are as follows:

1. High voltage limit alarm: Goes off when the voltage

exceeds –63 kV.

Countermeasures

HVL alarm is triggered mostly by arcing in the tube tower.

Find arcing mark and remove it with sand paper.

Check arcing mark on the target surface.

2. Low voltage limit alarm (HVL): Occurs when the voltage

exceeds –17 kV.

Countermeasures

Check the register between L and Ground C and Ground S

after removing the high voltage cable from the transformer.

Check the voltage at the kVMR.

3. Over load alarm (OLL): Occurs when too much current has

flowed in kV and mA.

Countermeasures

The OLL alarm occurs in the case of arcing in the tube tower

and on the target surface. This is the same as the HVL alarm.


4. Filament current limit alarm: Occurs when 7.7 A of current

has flowed into the filament or when an open circuit occurs in

the filament.

Countermeasures

Check the resistance between L and C after removing the high

voltage cable at the transformer. The display should read

open.

5. Tube current limit alarm: Occurs when the current in the

tube exceeds 66 mA.

Countermeasures

This may cause arcing in the tube. Check the arcing mark in

the tube tower.

6. PSFLT alarm: The PSFLT alarm will be visible whenever the

following conditions occur:

• The fan rotation is abnormal (FAN).

• The inverter heat sink is over 60 deg (THERM).

• The fuse is burned out (FUSE).

• Arcing is detected when the power supply voltage is

below 170 V (UVL).

• The current flow exceeds 150 A in the inverter (LCL).

• A jumper occurs between the BIAS and the filament (BFS).

• Insulation below 30 kO registers between the BIAS and the

filament (BFS).

Countermeasures

Be sure about which alarm occurred in the high voltage

transformer.


7. Target rotation limit alarm: Occurs when a rotation speed

of < 5700 rpm is reached.

Countermeasures

Check the T1 frequency. It must be 400 Hz.

The target rotation limit is 95% of the rotation speed.

SD circuit board (A 287-008).

TP-25 = input.

TP-24 = output of LM2917.

TP-9 = target rotation limit set point (95% of TP-24).

8. Cooling water flow alarm: Occurs when the water flow rate

is <3.5 liters/min.

Countermeasures

Check the cooling water flow line.

9. Cooling water pressure alarm: Occurs when the water

pressure is >0.34 Mpa.

Countermeasures


10. Cooling water temperature alarm: Occurs when the

temperatures in the water line is over the set point.

Countermeasures



11. Vacuum alarm: Occurs when the pressure in the tube tower

exceeds 1 x 10 –2 Pa and the X-ray shuts off.

Countermeasures

Check the filament in the RIG and check for leaking from the

tube tower.

12. TMP overload alarm: When an overload occurs in the TMP

driver or an abnormal temperature occurs in the TMP.

Countermeasures

• Check the TMP rotation by hand.

• Check for leaking in the tube tower.

• Listen for a “strange” sound.

13. X-ray warning lamp alarm: Occurs when a short circuit

takes place in the X-ray warning lamp.

Countermeasures

Check the connection at the connector. This alarm is indicated

by an LED display.

14. Operation panel X-ray lamp alarm: Occurs when the

operation panel is open or when a short circuit takes place in

the X-ray lamp of the panel.

Countermeasures

Check whether the X-ray lamp is ON. The X-ray ON is

indicated by an LED display.

15. Cooling water leakage alarm: Occurs when a water leak is

detected. This is an optional function not included in the

standard options.


Chapter 5

Drawing

Tube tower


Index A

acceleration lamp................................... 19

aging mode .............................. 9, 13, 26,41

alarm .................................... 51, 52, 53, 54

alarm lamp............................................. 19

alarm mode ............................................ 22

auxiliary terminal.................................. 20

B

BIAS deviation....................................... 35

BIAS reference....................................... 21

BIAS setting............... 9, 10, 11, 19, 35, 39

BIAS voltage .......................................... 38

BIAS volume ............................................ 9

buzzer switch ......................................... 20

C

card rack................................................. 24

check flag mode...................................... 27

circuit board ........................................... 13

circuit protector.......................... 16, 17, 24

consumption of electricity...................... 31

CPU circuit............................................. 25

current...................................................... 3

D

dimming ................................................. 27

E

electric contactor .................................... 17

error prompt........................................... 12

F

FC check terminal.................................... 9

filament .................................................. 34

filament change...................................... 10

filament current..................................... 39

focus position............................................ 9

focus size .......................... 9, 11, 18, 36, 48

G

ground wire .............................................. 6

H

heat exchanger................................. 6, 7, 8

hour meter.............................................. 18

L

line lamp............................................. 8, 16

long time mode....................................... 27

M

main breaker.............................. 3, 4, 8, 16

Maintenance Manual ............................. 15

manual mode.......................................... 27

medium time mode ................................ 27


O

operation panel ...................................... 26

P

power supply ................................ 3, 15, 17

R

ready conditions..................................... 29

ready mode............................................. 22

reset switch ............................................ 18

rotary shutter................................... 12, 28

roughing pump................................... 7, 17

run lamp................................................. 19

run mode ................................................ 22

S

Service Manual ........................................ 1

short circuit............................................ 54

short time mode ..................................... 27

shutter circuit ........................................ 23

shutter driver......................................... 29

shutter mode .......................................... 20

shutter mounting................................... 29

Specifications Manual ............................. 1

T

target driver ..................................... 13, 22

target selection....................................... 19

TMP driver........................... 19, 21, 23, 40

TMP rotation.......................................... 54

tube tower ........................................ 12, 55

turbomolecular pump (TMP) 7, 12, 13, 18,

19

U

U line wire................................................ 6

Utilities Manual....................................... 1

V

V line wire ................................................ 6

vacuum................................................... 33

vacuum output ....................................... 20

vacuum system....................................... 21

vacuum tube............................................. 7

ventilation cap.......................................... 4

voltage ...................................................... 3

voltage meter ........................................... 9

W

W line wire ............................................... 6

water flow line........................................ 53

water flow rate ................................. 12, 53

water hose ................................................ 7

water line ................................................. 7

X

X-ray generator 4, 5, 8, 9, 10, 12, 13, 15,

16, 25, 26

X-ray intensity ................................. 46, 47

Rigaku/MSC, Inc.

9009 New Trails Drive

The Woodlands, TX 77381

U.S.A.

Telephone: (281) 363-1033

Facsimile: (281) 364-3628

E-mail: [email protected]

http://www.RigakuMSC.com

Rigaku/MSC, Inc.

(European Branch)

Unit D2, Chaucer Business Park

Watery Lane, Kemsing

Sevenoaks, Kent

TN15 6YU England

U.K.

Telephone: (44) 1732 763367

Facsimile: (44) 1732 763757

E-mail: [email protected]

Rigaku/MSC, Inc.

9009 New Trails Drive

The Woodlands, TX 77381

Telephone: (281) 363-1033 or 1-800-543-2379

Printed in the U.S.A.

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Transcript of RA-Micro 007 - uni-goettingen.de · RA-Micro 007 Desktop Rotating Anode X-Ray Generator Service...