Quartz Glass for Optics

Quartz glass is especially superior in its optical characteristics, such as its light transmission characteristics. Also, since quartz glass is of high purity, at the same time it also provides high heat-resistance and radiation-resistance characteristics. Thus, quartz glass is an extremely pure optical material.On the solid foundation of its advanced research and development system, Shin-Etsu Quartz Products Co., Ltd. manufactures and markets the "SUPRASIL-P" series of ultra-pure, highly homogeneous synthetic quartz glass. The "SUPRASIL-P" series is a synthetic quartz glass for optics applications developed at home in Japan, on the basis of the optics-use quartz glass manufacturing technologies imported from Heraeus, and the outstanding synthesizing technologies of the Shin-Etsu Group. The "SUPRASIL-P" series of synthetic quartz glass is chiefly used as lens material for the exposure devices employed in the semiconductor manufacturing process, but it is also suitable as an optical material for prisms, glass, lenses, mirrors and so on. In addition to "SUPRASIL-P", the Company also handles the "HOMOSIL", "HERASIL", and "INFRASIL" series of optics-use natural quartz glass of Heraeus.

Shin-Etsu Quartz Products Co., Ltd.

1, Product Lineup

Product Types

Synthetic Quartz Glass / "SUPRASIL-P" SeriesThe "SUPRASIL-P" Series is ultra-high quality synthetic quartz glass that is used as lens material for the aligner used in semiconductor manufacture. In tandem with the further miniaturization of processes, this series is constantly being developed with even further capabilities, and it can be used with conventional i-line systems as well as up to the most-advanced ArF applications. 8 product grades are available, each of which has unique characteristics in terms of light transmission rates, laser-resistance properties, whether they have striae or are striae free, etc.

Natural Quartz Glass / "HOMOSIL", "HERASIL", and "INFRASIL"Each of these brands consists of quartz glass for optics applications made by Heraeus, using natural quartz crystal as raw material. A wide range of product types are offered, from optics materials for ordinary applications to high-grade products, in accordance with the purity and homogeneity rates of each, as well as their light transmission rates, etc.

Shape and Size

Our quartz glass for optics comes in a variety of shapes, including blocks, plates, prisms, lenses, rods, and so on.For detailed information regarding the sizes and characteristics that can be manufactured, please contact the sales department in charge. On the last page, you can find the contact information for the relevant sales department.

- 1 - Quartz Glass for Optics PC-OPT-GEN-009-E

SUPRASIL-F300 F300 has the same high IR transmission as optical fiber and also the high homogeneity ofquartz glass for optical use.

This is striae-free in one direction, and more homogeneous than P20.

The optical characteristics conform to those of P310, and the laser resistance propertieshave been improved for its use in ArF excimer lithography applications.

This is appropriate for general optical element applications where a high light transmissionrate is required.

SUPRASIL-P210

SUPRASIL-P30

SUPRASIL-P700

SUPRASIL-P20

SUPRASIL-P310

SUPRASIL-P710C

Type Grade

This is optics-use quartz glass for which only carefully selected crystal are usedas raw material. It has no particulate structure, and has extremely favorable homogeneityproperties, as well as high light transmission in ultraviolet ranges.According to its purpose, 3D striae free material and 1D striae free material are available.

Characteristics

This is high purity optical-use quartz glass that is striae free in all directions,and thus is highly suited for high-precision optics applications.

The optical characteristics are superior to those of P248, the laser resistance propertieshave been improved for its use in ArF excimer lithography applications.

Large optics more than diameter 600mm are available.

This is striae-free in one direction, and is appropriate for optical element,such as windows and lens materials, etc.

Synt

hetic

Qua

rtz G

lass

SUPRASIL-P248

Nat

ural

Qua

rtz G

lass HOMOSIL

INFRASIL-301

HERASIL

This is optics-use quartz glass manufactured from specially selected crystals andproduced with low OH content. It shows high homogeneity and high light transmissioncharacteristics all the way from visible to near infrared ranges.According to its purpose, 3D striae free material and 1D striae free material is available.INFRASIL-302

2, Data and Properties

- 2 - Quartz Glass for Optics PC-OPT-GEN-009-E

*1 *1 *2 *3 *4 *5

Type Grade Striae Striae Max Bubble Fluorescence Excimer laser

grade intensity size Nominal Onrequest grade tolerance

< 200 2×10-6 1×10-6 2

< 300 3×10-6 2×10-6 3

< 200 1×10-6 0.5×10-6 2

< 300 2×10-6 1×10-6 2

3D A < 600 5×10-6 - 8

1D A < 750 8×10-6 - 10

< 150 20×10-6 - 8

< 400 20×10-6 - 10

< 150 5×10-6 2×10-6 8

< 400 10×10-6 4×10-6 10

< 150 5×10-6 1×10-6 8

< 300 10×10-6 2×10-6 10

< 200 4×10-6 2×10-6 8

< 300 6×10-6 4×10-6 10

< 150 5×10-6 2×10-6 8

< 400 10×10-6 4×10-6 10

Note: Values shown in this chart are not specification (i.e., guaranteed) values. Please also refer to the notes listed below. For detailed information regarding the sizes and characteristics that can be manufactured, please contact the sales department incharge. On the last page, you can find the contact information for the relevant sales department.

　Notes regarding the List of Characteristics table　　*1: 3D means striae free in all 3 directions. 1D means striae free in one direction.　　 According to the MIL-G-174 standard of the U.S. Military. Evaluation made via the main surface.　　*2: This value is valid for 90% of the diameter. In the outer area the actual value may exceed this stated value.　　*3: For large-sized products this value may be slightly higher in the edge zone, which is the outer 20% of the diameter.　　*4: Conforms to DIN 58927.　　*5: Excitation wavelength is 253.7nm. For quartz glass, there is almost never excitation at wavelength of 290 nm and above.　　*6: The transmission loss is less than 0.2%/cm after1.8×107 pulses of KrF excimer laser　　 (λ=248nm,100mJ/cm2/pulse ) irradiation.　　*7: The transmission loss is less than 1%/cm after 6×106 pulses of ArF excimer laser　　 (λ=193nm,20mJ/cm2/pulse ) irradiation.

Residualstrain

(nm/cm)

-

0

-

0 free

0 free

0

0

-

SUPRASIL-P248 3D A

ArF（193nm）*7freeSUPRASIL-P700 3D A

KrF（248nm）*6free

free

0

-

SUPRASIL-P20 KrF（248nm）*6

KrF（248nm）*6

0

SUPRASIL-P310 1D A

free

free

-

-

0

1D A ArF（193nm）*7

-

4×10-6 <1×10-6 5…15

5…15<1×10-6A

INFRASIL-302 1D A

HERASIL 1D A

3D blue-violet

-

<2×10-6 5…15 0

0

-blue-violet

blue-violet

Synt

hetic

Qua

rtz G

lass

1D A

-

SUPRASIL-P210

SUPRASIL-P30 - B-C -

SUPRASIL-P710C

SUPRASIL-F300 slight blue

0

0

A

3D A

1D

Nat

ural

Qua

rtz G

lass HOMOSIL 3×10-6

6×10-6

5×10-6INFRASIL-301 3D A

Homogeneity（⊿n）

0～1<3×10-6 5…15 -blue-violet

3, Ultraviolet & Infrared Light Initial Transmission Rates

- 3 - Quartz Glass for Optics PC-OPT-GEN-009-E

4, Refractive index at 20℃ and 1 barMeasurement accuracy ±3×10-5

HOMOSIL HOMOSIL HOMOSILHERASIL HERASIL HERASILINFRASIL INFRASIL INFRASIL

185.41 - 1.57464 298.06 1.48837 1.48859 700 1.45529 1.45539193.53 - 1.56071 307.59 1.48575 - 800 1.45332 1.45341202.54 1.54717 1.54729 313.17 1.48433 - 900 1.45175 1.45185206.20 1.54266 1.54269 328.36 - 1.48183 1000 1.45042 1.45051213.85 1.53434 - 334.15 1.47976 - 1200 1.44805 1.44815214.45 - 1.53385 340.36 1.47860 1.47877 1400 1.44578 1.44589226.50 1.52299 1.52318 346.69 1.47748 1.47766 1600 1.44342 1.44353232.94 - 1.51834 361.17 1.47503 1.47513 1800 1.44087 1.44099237.83 1.51473 - 365.48 1.47448 - 2000 1.43809 1.43821248.20 1.50841 - 398.84 - 1.47028 2200 1.43501 1.43515250.20 - 1.50762 404.65 1.46961 2400 1.43163 1.43177253.70 1.50555 1.5059 435.83 1.46669 1.46679 2600 1.42789 1.42804257.62 1.50351 1.50397 486.13 1.46314 1.46324 2800 1.42377 1.42393265.36 1.49994 - 546.07 1.46007 1.46021 3000 1.41925 1.41941274.87 - 1.49634 587.56 1.45847 1.45857 3200 1.41427 1.41444280.35 1.49403 - 589.00 1.45843 1.45853 3400 1.40881 1.40897289.36 1.49098 - 656.27 1.45637 1.45646 Without SUPRASIL-F300

SUPRASIL-PWavelength（nm）

Wavelength（nm）

Wavelength（nm）

SUPRASIL-P SUPRASIL-P

0

10

20

30

40

50

60

70

80

90

100

150 200 250 300

Tran

smis

sion

(inc

ludi

ng re

flect

ion

loss

) (%

)

P248/P310

P20/P30

HOMOSIL / HERASIL

Reflection loss at the surface

1000 2000 3000 4000

Wavelength (nm)

Measurement example at sample thickness 10mm

0

10

20

30

40

50

60

70

80

90

100

150 200 250 300

Tran

smis

sion

(inc

ludi

ng re

flect

ion

loss

) (%

)

P700/P210

P710C

F300

INFRASIL-301/302

Reflection loss at the surface

1000 2000 3000 4000

Wavelength (nm)

Measurement example at sample thickness 10mm

5, Typical Characteristics

- 4 - Quartz Glass for Optics PC-OPT-GEN-009-E

measurement accuracy : ±0.5×10-6

Relative temperature coefficients of the refractive index in 10-6 K-1 Thermal data

HOMOSIL

HERASIL

INFRASIL

nm 0～20℃ 20～40℃ 0～20℃ 20～40℃ Strain temperature ℃ 1000 1075

237.8 14.6 14.9 15.2 15.3 Annealing temperature ℃ 1100 1180

365.0 11.0 11.2 11.5 11.6 Softening temperature ℃ 1600 1730

546.1 9.9 10.1 10.6 10.7 Max. working temperature

587.6 9.8 10.0 10.5 10.6 continuous ℃ 950 1150

643.8 9.6 9.8 10.4 10.5 short-term ℃ 1200 1300

Mean specific heat J/kg・K

Abbe constant

Heat conductivity W/m・K

Birefringence constant @ 633nm

nm/cmkg/cm2

Typical trace impurities in quartz glass unit：ppm

HOMOSIL

HERASIL Mean thermal expansion coefficient K-1

Al 10 20

Ca 1 1

Cr 0.1 0.1

Cu 0.1 0.1

Fe 0.2 0.8

K 0.1 0.8

Li 1 1

Mg 0.1 0.1 Electrical data

Na 1 1 HOMOSIL

Ti 0.1 1 HERASIL

OH 130-200 <8 Resistivity in（Ω・m） INFRASIL

1.0×1016 1.0×1016

*The OH content of SUPRASIL-F300 is less than 1ppm. 1.0×106 1.0×1010

6.3×104 6.3×106

1.3×103 1.3×105

Mechanical data Dielectric loss angle tanδ

g/cm3

N / mm2

N / mm2

N / mm2

N / mm2

N / mm2 Dielectric constant ε

N / mm2

N / mm2

N / mm2 Dielectric strength in kV/mm (Layer thickness ≧ 5 mm)

m/s

Values shown in this chart are not specification (i.e., guaranteed) values.

23℃, 9×108Hz 3.77

20℃

400℃

800℃

1200℃

3.70

4.0×10-43×1010Hz

5.0×10-4

1.0×10-4

tanδ at 1MHz is nearly-constant up to 200℃, while itbecomes gradually higher above 200℃.tanδ at 1010Hz becomes gradually lower up to 350℃, while itbecomes gradually higher above 350℃.

1KHz

1MHz

500℃

23℃, 3×1010Hz

25～40

4～5

3.81

20℃1×10-5

5720

Internal damping

Sound velocity

Micro-hardness

Knoop-hardness

Mohs-hardness 5.5～6.5

8600～9800

5800～6100

Tensile strength

Bending strength 67

Torsional strength

50

Compressive strength

2.20

3.0×104

7.0×104

0.17

1150

Modulus of elasticity

<0.04

<0.005

INFRASIL

Poisson's ratio

at 20℃

Wavelength

67.7±0.5 67.6±0.5

<0.005

20℃, 0～1×106Hz

<0.001

<0.001

<0.001

0～900℃

0～200℃

Density

Modulus of torsion

30

<0.001

Impurities

3.47±0.05 3.54±0.05

HOMOSIL

INFRASIL

SUPRASIL-P

1.38

1.47

772

964

1052

0～100℃

0～500℃

0～900℃

HERASIL

20℃

100℃

950℃

0～300℃

SUPRASIL-P

SUPRASIL-P

<0.005 0.27×10-6

0.58×10-6

0.59×10-6

0.48×10-6

<0.01

1-1000*

<0.001

0.51×10-6

2.68

0～600℃

0～100℃

SUPRASIL-P

200℃

0.54×10-6

-50～0℃

1.67300℃

400℃ 1.84

1.55

CF

dd nn

n−−

=1

ν

For Business ContactIf you have any questions or inquiries concerning company information about Shin-Etsu Quartz Products Co., Ltd. or about its products, please inquire to the following.

Shin-Etsu Quartz Products Co., Ltd. / Functional Materials Division Shinjuku San-ei Bldg., 1-22-2, Nishi-Shinjuku, Shinjuku-ku, Tokyo 160-0023, JapanTEL : +81-3-3348-1913 FAX : +81-3-3348-4919URL : http://www.sqp.co.jp/

Shin-Etsu Quartz Products Co., Ltd.

© Shin-Etsu Quartz Products Co., Ltd. 2013.9.1- 5 - Quartz Glass for Optics PC-OPT-GEN-009-E

Shin-Etsu Quartz Group & Heraeus Quartz Group (Main companies)Japan

Shin-Etsu Quartz Products Co., Ltd.Shinjuku San-ei Bldg., 1-22-2, Nishi-Shinjuku, Tokyo 160-0023, JapanTEL: +81-3-3348-1912 FAX: +81-3-3348-4919

Yamagata Shin-Etsu Quartz Co., Ltd.2-4-1,Shoge-higashi, Tendo-shi, Yamagata 994-0069, JapanTEL: +81-23-655-3221 FAX: +81-23-655-3220

Fukui Shin-Etsu Quartz Co., Ltd.1-4, Kayadani-cho 3-chome, Echizen-shi, Fukui 915-0037, JapanTEL: +81-778-27-2777 FAX: +81-778-27-2779

Asia

Young Shin Quartz Co.,Ltd. <Korea>149,Hoechuk-ri, Kwanghyewon-myon, Chinchon-Kun, Chungbuk Province 365-834TEL: +82-43-535-2338 FAX: +82-43-535-2337

Topco Quartz Products Co.,Ltd <Taiwan>No.8 Wen-Hua Road, Hsin-Chu Industrial ParkTEL: +886-3-598-5668 FAX: +886-3-598-3096

Heraeus Shin-Etsu Quartz (China) Inc. <P.R.China>No.17,Daminghu Street, Economic & Technical Development Zone, Shenyang, 110141TEL: +86-24-2536-2266 FAX: +86-24-2581-6079

Heraeus Shin-Etsu Quartz Singapore Pte. Ltd. <Singapore>26 Boon Lay Way, #01-90 Tradehub 21, Singapore 609970TEL: +65-6862-5025　　　FAX: +65-6862-5075

U.S.A.

Heraeus Quartz America, LLC.100 Heraeus Blvd. Buford, GA 30518 USATEL: +1-678.714-4350 FAX: +1-678.714-4358

Europe

Heraeus Quarzglas GmbH & Co.KG <Germany>Quarzstrasse 8 ,63450 Hanau TEL: +49-6181-35-6285 FAX: +49-6181-35-6270