Public Input No. 2-NFPA 318-2015 [ Section No. 2.3 ] Input No. 2-NFPA 318-2015 [ Section No ......

Public Input No. 2-NFPA 318-2015 [ Section No. 2.3 ]

2.3 Other Publications.

2.3.1 ANSI/ CGA Publications.

Compressed Gas Association, 14501 George Carter Way, Suite 103, Chantilly, VA 20151-2923.

ANSI/ CGA G-13, Storage and Handling of Silane and Silane Mixtures, 2006 3rd edition, 2015 .

2.3. 2 ANSI/ 2 FM Publications.

ANSI/

FM

4910, Standard for

Global, 270 Central Avenue, P.O. BOX 7500, Johnston, RI 02919

FM Approval 4910, Cleanroom Materials Flammability Test Protocol, 2004 2013 .

2.3.3

ANSI/

UL Publications.

Underwriters Laboratories Inc., 333 Pfingsten Road, Northbrook, IL 60062-2096.

ANSI/ UL 723, Standard for Test for Surface Burning Characteristics of Building Materials, 2008, Revised2010 2013 .

ANSI/ UL 900, Standard for Air Filter Units, 2004, Revised 2010 2012 .

ANSI/ UL 2360, Standard Test Method for Determining the Combustibility Characteristics of Plastics Usedin Semiconductor Tool Construction, 2000, Revised 2013 .

2.3.4 ASME Publications.

American Society of Mechanical Engineers, Three ASME International , Two Park Avenue, New York,NY 10016-5990.

ASME A A13 .13. 1, Scheme for the Identifications of Piping Systems, 2007, Reaffirmed 2013 .

ASME B31.3, Process Piping, 2012 2014 .

ASME Boiler and Pressure Vessel Code , 2015.

2.3.5 ASTM Publications.

ASTM International, 100 Barr Harbor Drive, P.O. Box C700, West Conshohocken, PA 19428-2959.

ASTM D 5 D5 /D5M , Standard Test Method for Penetration of Bituminous Materials, 2006 e1 2013 .

ASTM E 84 E84 , Standard Test Method for Surface Burning Characteristics of Building Materials, 20132015 .

ASTM E 136 E136 , Standard Test Method for Behavior of Materials in a Vertical Tube Furnace at 750°C,2012.

2.3.6 ISO Publications.

International Organization for Standardization, 1, ch. de la Voie-Creuse, Case postale 56, CH-1211Geneva 20, Switzerland.ISO ISO Central Secretariat, BIBC II, 8, Chemin de Blandonnet, CP 401,1214 Vernier , Geneva Switzerland.

ISO DIS 14644-1, Cleanrooms and Associated Controlled Environments — Part 1: Classification of AirCleanliness By Particle Concentration , 1999 2014 .

National Fire Protection Association Report http://submittals.nfpa.org/TerraViewWeb/ContentFetcher?commentPara...

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2.3.7 SEMI Publications.

Semiconductor Equipment and Materials International, 3081 Zanker Road, San Jose, CA 95134.

SEMI F1, Specification for Leak Integrity of High-Purity Gas Piping Systems and Components, 1996.

SEMI S3-0306 , Safety Guidelines for Process Liquid Heating Systems, 2006 2011 .

2.3.8 U.S. Government Publications.

U.S. Government Printing Office, Washington, DC 20402.

Title 29, Code of Federal Regulations, Part 1910.1000, “Air Contaminants.”

2.3.9 Other Publications.

Merriam-Webster's Collegiate Dictionary, 11th edition, Merriam-Webster, Inc., Springfield, MA, 2003.

Statement of Problem and Substantiation for Public Input

Updated SDO addresses, standard numbers and standard editions.

Related Public Inputs for This Document

Related Input Relationship

Public Input No. 3-NFPA 318-2015 [Section No. D.1.2]

Submitter Information Verification

Submitter Full Name: Aaron Adamczyk

Organization: [ Not Specified ]

Street Address:

City:

State:

Zip:

Submittal Date: Sat Mar 21 20:11:10 EDT 2015

Committee Statement

Resolution: See FR 1-3. Committee wishes to retain the ANSI designations. The edition dates were updated inFirst Revisions 1, 2, and 3.


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Public Input No. 19-NFPA 318-2015 [ Section No. 2.3.2 ]

2.3.2 ANSI/FM Publications.

ANSI/FM 4910, Standard for Cleanroom Materials Flammability Test Protocol, 2004 2013 .


date update


Submitter Full Name: MARCELO HIRSCHLER

Organization: GBH INTERNATIONAL

Street Address:

City:

State:

Zip:

Submittal Date: Mon Jul 06 17:34:21 EDT 2015

Committee Statement

Resolution: FR-2-NFPA 318-2015

Statement: date update


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2.3.3 ANSI/UL Publications.


ANSI/UL 723, Standard for Test for Surface Burning Characteristics of Building Materials, 2008, Revised2010 2013 .

ANSI/UL 900, Standard for Air Filter Units, 2004, Revised 2010 2012 .

ANSI/UL 2360, Standard Test Method for Determining the Combustibility Characteristics of Plastics Used inSemiconductor Tool Construction, 2000 2013 .


The proposed changes represent revisions/updated editions of UL Standards.


Submitter Full Name: RONALD FARR

Organization: UL LLC

Street Address:

City:

State:

Zip:

Submittal Date: Thu Jun 18 14:06:05 EDT 2015

Committee Statement


Statement: The proposed changes represent revisions/updated editions of UL Standards.


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2.3.5 ASTM Publications.


ASTM D 5, Standard Test Method for Penetration of Bituminous Materials, 2006 e1.

ASTM E 84, Standard Test Method for Surface Burning Characteristics of Building Materials, 2013 2015a .

ASTM E 136, Standard Test Method for Behavior of Materials in a Vertical Tube Furnace at 750°C, 2012.


date update




Street Address:

City:

State:

Zip:

Submittal Date: Tue Jun 30 18:34:51 EDT 2015

Committee Statement


Statement: date update


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3.3.4 Compressed Gas.

A material, or mixture of materials, that (1) is a gas at 68°F (20°C) or less at an absolute pressure of 14.7psi (101.3 kPa) and (2) has a boiling point of 68°F (20°C) or less at an absolute pressure of 14.7 psi (101.3kPa) and that is liquefied, nonliquefied, adsorbed onto a solid porous material, or in solution, except thosegases that have no other health or physical hazard properties are not considered to be compressed gasesuntil the pressure in the packaging exceeds an absolute pressure of 40.6 psi (280 kPa) at 68°F (20°C). [55,2013]


In 3.3.4, “adsorbed onto a solid porous material,” was added to clarify that the gas in a Type 1 SAGS is classified as a compressed gas. NFPA 318 has extracted the compressed gas definition from NFPA 55. NFPA 55, and other standards, list toxic and highly toxic gases under “compressed gases”. In 318, 7.14.2 states “All (both Type 1 and Type 2) SAGS shall meet the requirements for gases found in this standard, except as provided in 7.14.2.1 through 7.14.2.6.” The use of “gases” and “compressed gases” are used in different NFPA standards. When addressing the requirements for toxic and highly toxic gases the requirements listed for both gases and compressed gases should be followed. Note that Praxair will also propose a TIA in NFPA 55 for the same change in the definition. This will allow the extract process from NFPA 55 to continue in NFPA 318 maintaining the same compressed gas definition found in NFPA 55. If the same proposed change is not adopted until NFPA 55:2019 edition, then 318 can extract the definition in its next cycle.

Note to NFPA Staff. I submitted 3 proposed changes. None of them showed my name, which is "Ronald Fuhrhop". It just has "not specified" and I could not change it. It only had my email address ([email protected]). I verified thet my profile had both my name, email, address and company. I want to make sure that these three proposals are accepted and submitted to the Technical Committee for review. If there is anything that I need to do, please let me know.


Submitter Full Name: RONALD FUHRHOP

Organization: Praxair Inc.

Street Address:

City:

State:

Zip:


Committee Statement

Resolution: This is not an appropriate change to the definition of compressed gas for NFPA 318. It is additionallynot in accordance with the goal for global harmonization.


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3.3.8 * Exempt Amount per Control Area.

The amount of hazardous material allowed to be stored, used, or handled in a control area as .

A.3.3.8 The exempt amount is set forth in NFPA 1, Fire Code, and NFPA 5000, Building Construction andSafety Code. The exempt amount per control area is based on the material state (solid, liquid, or gas) andthe material storage or use conditions.


This simply moves the reference to NFPA 1 and 5000 to the Annex in compliance with the Manual of Style. The second sentence is not really part of the definition but additional information.



Public Input No. 9-NFPA 318-2015 [Section No. 5.5.2 [Excluding any Sub-Sections]]




Street Address:

City:

State:

Zip:


Committee Statement

Resolution: Relocating the referenced standards and language to the annex will confuse the issue.


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3.3.17 * Hazardous Production Material.

In semiconductor fabrication facilities, any solid, liquid, or gas that has a degree-of-hazard rating in health,flammability, or reactivity of Class 3 or 4 as .

A.3.3.17 Hazardous production materials are ranked by NFPA 704, Standard System for the Identificationof the Hazards of Materials for Emergency Response.


In order to comply with the NFPA Manual of Style, the reference to NFPA 704 is being moved to an annex note. A reference is also added into the body of the standard, in chapter 5.



Public Input No. 11-NFPA 318-2015 [Chapter 5]




Street Address:

City:

State:

Zip:


Committee Statement

Resolution: Concern that relocating the referenced standards and language to the annex will confuse the issue.


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Public Input No. 12-NFPA 318-2015 [ Section No. 3.3.23 [Excluding any Sub-Sections] ]

A material that has a

fluidity greater than that of 300 penetration asphalt when tested in accordance with ASTM D 5, StandardTest Method for Penetration of Bituminous Materials . Unless otherwise specified, the term liquid includesmelting point that is equal to or less than 68°F (20°C) and a boiling point that is greater than 68°F (20°C) and14.7 psia (101.3 kPa). When not otherwise

identified, the term liquid shall mean both flammable and combustible liquids. [NFPA 1]


There is no need for the definition to deal with requirements based on bitumen penetration when it is easiest to simply extract a normal definition of liquid from NFPA 1, which does not contain references to other standards.




Street Address:

City:

State:

Zip:


Committee Statement


Statement: There is no need for the definition to deal with requirements based on bitumen penetration when it iseasiest to simply extract a normal definition of liquid from NFPA 1, which does not contain referencesto other standards.


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3.3.24 Noncombustible .

In semiconductor fabrication facilities, a material that, in the form in which it is used and under theconditions anticipated, will not ignite, burn, support combustion, or release flammable vapors whensubjected to fire or heat. Materials that are reported as passing ASTM E 136, Standard Test Method forBehavior of Materials in a Vertical Tube Furnace at 750°C , shall be considered noncombustible materials

material.

(see 4.3) .


This is being proposed for consistency with many other documents (including NFPA 1, 101, 5000, 90A, 220, etc) and for compliance with the Manual of Style, which prohibits requirements and references to codes and standards in definitions. The requirements are proposed to be moved to a new section 4.3 and extracted from NFPA 101.



Public Input No. 6-NFPA 318-2015 [New Section after 4.2]




Street Address:

City:

State:

Zip:


Committee Statement

Resolution: The current definition provides the necessary information. The definition of a noncombustible materialshould be located in the definitions chapter.


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Public Input No. 6-NFPA 318-2015 [ New Section after 4.2 ]

4.3* Noncombustible material [NFPA 101; 4.6.13]

A material that complies with any of the following shall be considered a noncombustible material:

(1)*A material that, in the form in which it is used and under the conditions anticipated, will not ignite, burn,support combustion, or release flammable vapors when subjected

to fire or heat

(2) A material that is reported as passing ASTM E 136, Standard Test Method for Behavior of Materials ina Vertical Tube Furnace at 750 Degrees C

(3) A material that is reported as complying with the pass/fail criteria of ASTM E 136 when tested inaccordance with the test method and procedure in ASTM E 2652, Standard Test Method for Behavior ofMaterials in a Tube Furnace with a Cone-shaped Airflow Stabilizer, at 750 Degrees C [NFPA 301; 4.6.13.1]

A.4.3 The provisions of 4.3 do not require inherently noncombustible materials to be tested in order to beclassified as noncombustible materials.

A.4.3 (1) Examples of such materials include steel, concrete, masonry, and glass.

(Also, add ASTM E2652 (2012), Standard Test Method for Behavior of Materials in a Tube Furnacewith a Cone-shaped Airflow Stabilizer, at 750 Degrees C, into Section 2 on referenced ASTMstandards. )


This public input incorporates into NFPA 318 the same format as is used in NFPA 1, 101, 5000, 220, 90A and others and complies with the manual of style which prohibits definitions from containing requirements or references to specific codes or standards. This is associated also with the proposed reference, in the definitions section, simply to this section.



Public Input No. 7-NFPA 318-2015 [Section No. 3.3.24]




Street Address:

City:

State:

Zip:


Committee Statement

Resolution: The current verbiage addressing noncombustible materials provides the necessary information.


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Public Input No. 20-NFPA 318-2015 [ Section No. 4.4 ]

4.4 Fire Resistance Rating.

4.4.1

Fire resistance ratings shall be detemined in accordance with ASTM E119, Standard Test Methods for FireTests of Building Construction and Materials.

4.4.2

Fabrication areas shall be separated from each other by 1-hour fire resistance–rated construction.

4.4.2 3

Fabrication areas shall be separated from adjacent occupancies by not less than 1-hour fireresistance–rated construction and not less than the fire resistance rating required in NFPA 5000, BuildingConstruction and Safety Code.

(Also add ASTM E119, 2014, into chapter 2 on ASTM referenced standards)


The actual fire test to be used to assess fire resistance rating needs to be stated in the standard. There are other tests for fire resistance ratings (ASTM E1539, UL 1709, ISO 834, etc.) and the one used by NFPA 5000 is ASTM E119 (NFPA used to have a test, namely NFPA 251) but it was withdrawn in favor of ASTM E119 (date, for addition into chapter 2): 2014.




Street Address:

City:

State:

Zip:


Committee Statement

Resolution: Adding the reference to ASTM E119 would provide a US-centric approach and limit worldwideapplication.


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Public Input No. 11-NFPA 318-2015 [ Chapter 5 ]

Chapter 5 Hazardous Materials — General Provisions

5.1* Hazardous Chemicals.

5.1.1 Materials Classification.

Hazardous Production Materials (HPM) shall be classified in accordance with NFPA 704, Standard Systemfor the Identification of the Hazards of Materials for Emergency Response, and shall be defined by thefollowing classes of chemicals or substances.

5.1.1.1 Physical Hazards.

The following material categories shall be classified as physical hazards, and a material with a primaryclassification as a physical hazard can pose a health hazard:

(1) Flammable and combustible liquids

(2) Flammable solids and gases

(3) Oxidizer materials

(4) Pyrophoric liquids, gases, and solids

(5) Unstable (reactive) materials

(6) Water-reactive solids and liquids

(7) Cryogenic fluids

(8) Compressed gases

5.1.1.2 Health Hazards.

The following material categories shall be classified as health hazards, and a material with a primaryclassification as a health hazard can pose a physical hazard:

(1) Highly toxic and toxic materials

(2) Corrosive materials

5.2 HPM Risk Assesment.

5.2.1

This section shall apply to the management methodology used to identify, evaluate, and control the hazardsinvolved in the processing and handling of flammable and combustible liquids. These hazards include, butare not limited to, preparation; separation; purification; and change of state, energy content, or composition.

5.2.2

Operations involving flammable and combustible liquids shall be reviewed to ensure that fire and explosionhazards are addressed by fire prevention, fire control, and emergency action plans. [30:6.4.1]

Exception No. 1: Operations where liquids are used solely for on-site consumption as fuels.

Exception No. 2: Operations where Class II or Class III liquids are stored in atmospheric tanks ortransferred at temperatures below their flash points.


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5.2.3

The fire hazards management review shall be repeated whenever the hazards leading to a fire or explosionchange significantly. Conditions that shall require repeating a review shall include, but are not limited to, thefollowing:

(1) When changes occur in the materials in process

(2) When changes occur in process equipment

(3) When changes occur in process control

(4) When changes occur in operating procedures or assignments

5.2.4

A written emergency action plan that is consistent with available equipment and personnel shall beestablished to respond to fires and related emergencies. This plan shall include the components containedin 6.8.1 of NFPA 30, Flammable and Combustible Liquids Code.

5.3 Container Delivery.

5.3.1*

In new buildings, a service corridor shall be provided when necessary to transport hazardous chemicalsfrom a liquid storage room, hazardous chemical room, or gas room or from the outside of a building to theperimeter wall of a fabrication area.

5.3.1.1

Hazardous chemicals shall be transported in approved chemical carts.

5.3.2

Hazardous chemicals shall not be dispensed or stored in exit access corridors.

5.3.3*

Chemical carts transporting or containing hazardous chemicals shall be designed so that the contents willbe fully enclosed.

5.3.3.1

Chemical carts shall be capable of containing a spill from the largest single container transported, with amaximum individual container size of 20 L (5.3 gal) for liquids.

5.3.3.2

The capacity of carts used for the transportation of hazardous chemicals shall not exceed the following:

(1) Liquids: 208 L (55 gal)

(2) Solids: 227 kg (500 lb)

(3) Compressed gases: 7 cylinders, up to 18 kg (40 lb) each

(4) SAGS: 7 cylinders, up to 18 kg (40 lb) each

5.3.4

Incompatible chemicals shall not be transported simultaneously on the same hazardous chemical cart.

5.3.5

The minimum clear width of a service corridor shall be 1524 mm (5 ft) or 838 mm (33 in.) wider than thewidest cart or truck used in the service corridor, whichever is greater.

5.3.6

Service corridors shall not be used as a required means of egress.

5.3.7

The maximum quantities of hazardous chemicals transported in a service corridor at one time shall notexceed two times that set forth in 6.3.3.


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5.4 Storage and Handling of Hazardous Chemicals.

Storage and handling of hazardous chemicals shall comply with applicable NFPA standards, including thefollowing:

(1) NFPA 30, Flammable and Combustible Liquids Code

(2) NFPA 55, Compressed Gases and Cryogenic Fluids Code

(3) NFPA 70, National Electrical Code

(4) NFPA 385, Standard for Tank Vehicles for Flammable and Combustible Liquids

(5) NFPA 400, Hazardous Materials Code

5.5* Separation of Hazardous Chemicals.

Hazardous chemicals stored in hazardous chemical rooms shall be separated from incompatible materialsin accordance with Table 5.5.

Table 5.5 Minimum Separation of Hazardous Production Materials (HPMs)

MaterialHighlyToxic Toxic Acid Base Flammable Oxidizer

Water-

Reactive PyrophoricUnstable

(Reactive)

Organic

Peroxid

Highlytoxic

NR 1 hr 1 hr 1 hr 1 hr 1 hr 1 hr 1 hr 1 hr

Toxic NR S S S S S S S S

Acid 1 hr S S S* S S S* S S

Base 1 hr S S S S S S S S

Flammable 1 hr S S* S S R S S S

Oxidizer 1 hr S S S S S S* S S

Water-reactive

1 hr S S S R S S S S

Pyrophoric 1 hr S S* S S S* S S S

Unstable(reactive)

1 hr S S S S S S S S

Organicperoxide

1 hr S S S S S S S S

NR = Not required.

1 hr = 1-hour fire resistance–rated construction.

S = Separation by a partial noncombustible partition extending not less than 457 mm (18 in.) above and tothe sides of the stored material.

R = Separate rooms, which are not required to have a fire resistance rating.

Note: HPM gases are required to be separated from HPM liquids and solids by 1-hour fire resistance–ratedconstruction or are required to be kept in approved gas cabinets. HPM gases also are required to beseparated from gases in other HPM hazard categories as required by Table 5.5, or are required to be keptin approved gas cabinets.

*Separation by not less than 6 m (20 ft) is permitted in lieu of a noncombustible partition.

5.5.1

Hazardous chemical rooms and gas rooms shall be separated from the fabrication area by not less than2-hour fire resistance–rated construction, with the fire resistance rating in accordance with NFPA 5000,Building Construction and Safety Code, Chapter 8.

5.5.2


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Hazardous chemicals in the fabrication area shall be limited to those needed for operations andmaintenance and as required by 5.5.2.1 and 5.5.2.2, with quantities not exceeding the limitations specifiedin Table 5.5.2. The limits of Table 5.5.2 shall be permitted to be exceeded, provided a submittal usingalternative methods and materials is approved by the authority having jurisdiction (AHJ).

Table 5.5.2 Quantity Limits for Hazardous Materials in a Single Fabrication Area

Hazard Category

Solids Liquids Gas

kg/m2 lb/ft2 L/m2 gal/ft2m3 @

NTP/m2ft3 @

NTP/ft2

Physical Hazard Materials

Combustible liquid

Class II 0.8 0.02

Class III-A 1.6 0.04

Class III-BNot

limitedNot

limited

Combination Class I, II, andIII-A

3.26 0.08

Cryogenic

Flammable Note b Note b

Oxidizing 0.76 2.5

Flammable gas

Gaseous Note b Note b

Liquefied Note b Note b

Flammable liquid

Class I-A 2.04 0.05

Class I-B 2.04 0.05

Class I-C 2.04 0.05

Combination Class I-A, I-B, andI-C

2.04 0.05


3.26 0.08

Flammable solid 0.032 0.002

Organic peroxide

Unclassified detonable Note a Note a Note a Note a

Class I Note a Note a Note a Note a

Class II 0.8 0.05 0.1 0.0025

Class III 3.2 0.2 0.8 0.02

Class IVNot

limitedNot

limitedNot

limitedNot

limited

Class VNot

limitedNot

limitedNot

limitedNot

limited

Oxidizing gas

Gaseous 0.76 2.5

Liquefied 0.76 2.5

Combination of gaseous andliquefied

0.76 2.5

Oxidizer

Class 4 Note a Note a Note a Note a


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Hazard Category

Solids Liquids Gas


NTP/m2ft3 @

NTP/ft2

Class 3 0.096 0.006 2.44 0.06

Class 2 0.096 0.006 2.44 0.06

Class 1 0.096 0.006 2.44 0.06

Combination oxidizer

Class 1, 2, 30.096 0.006 2.44 0.06

Pyrophoric Note a Note a 0.1 0.0025 Notes b and c Notes b and c

Unstable reactive

Class 4 Note a Note a Note a Note a Note a Note a

Class 3 0.8 0.05 0.2 0.005 Note a Note a


Class 1Not

limitedNot

limitedNot

limitedNot

limitedNot limited Not limited

Water reactive

Class 3 Note b Note b 0.1 0.0025

Class 2 8.0 0.5 2.04 0.05

Class 1Not

limitedNot

limitedNot

limitedNot

limited

Health Hazard Materials

CarcinogensNot

limitedNot

limitedNot

limitedNot


CorrosivesNot

limitedNot

limitedNot

limitedNot


Highly toxicsNot

limitedNot

limitedNot

limitedNot

limited Note b Note b

IrritantsNot

limitedNot

limitedNot

limitedNot


SensitizersNot

limitedNot

limitedNot

limitedNot


Other health hazardsNot

limitedNot

limitedNot

limitedNot


ToxicsNot

limitedNot

limitedNot

limitedNot


Note: Hazardous materials within piping not to be included in the calculated quantities.

aQuantity of hazardous materials in a single fabrication not to exceed exempt amounts in NFPA 1, FireCode.

bThe aggregate quantity of flammable, pyrophoric, toxic, and highly toxic gases not to exceed a density

limit of 0.2 ft3 per ft2at NTP.

cThe aggregate quantity of pyrophoric gases in the building limited to the amounts for which detachedstorage is not required as set forth in NFPA 1, Fire Code.

5.5.2.1


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Quantities of hazardous chemicals shall be limited to those in use within the tool or the daily (24-hour)supply of chemicals needed, with quantities not exceeding the limitations specified in Table 5.5.2.1 unlessa risk assessment determines that a significant fire is unlikely to take place.

Table 5.5.2.1 Maximum Quantities of Hazardous Chemicals at a Workstation

Hazardous Chemical State Maximum Amount

Flammables, highly toxics, and

pyrophorics and toxics combineda Gas

Combined aggregate volume of all cylinders at a work stationshall not exceed an internal cylinder volume of 150 L (39.6 gal,

or 5.29 ft3).

Hazardous chemical flammablesLiquid 56.8 L (15 gal)a, b

Solid 2.3 kg (5 lb)a, b,

Corrosivesa

Gas


or 5.29 ft3).

Liquid 378.5 L (100 gal)a, b

Solid 9.1 kg (20 lb)

Highly toxicsLiquid 56.8 L (15 gal)a

Solid 2.3 kg (5 lb)a

Oxidizersa

Gas


or 5.29 ft3).

Liquid 45.4 L (12 gal)a, b

Solid 9.1 kg (20 lb)a, b

Pyrophorics Liquid 20 L (5.3 gal)c, d

ToxicsLiquid 56.8 L (15 gal)a, b


Unstable reactives

Class 3

Liquid 20 L (5.3 gal)a, b, d


Water reactives

Class 3Liquid 1.9 L ( 0.5 gal)c

aAllowable quantities increased 100 percent for use-closed systems operations. When note b also applies,the increase for both requirements is allowed.

bAllowable quantities are allowed to be increased 100 percent when tools are constructed of materials thatare listed or approved for use without internal fire extinguishing or suppression or internally protected withan approved automatic fire-extinguishing or suppression system. When note a also applies, the increasefor both notes is allowed.

cOnly in tools that are internally protected with an approved automatic fire-extinguishing or fire protectionsystem compatible with the reactivity of materials in use at the workstation.

d20 L is acceptable, it is more reflective of current practices for volumes of materials used at individualtools.

5.5.2.1.1*

The amounts in Table 5.5.2.1 shall be permitted to be exceeded if a risk assessment is performed andapproved by the AHJ.

5.5.2.2

Storage of hazardous chemicals in the fabrication area shall be within approved or listed storage cabinets,gas cabinets, or exhausted enclosures, or within a tool.


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5.5.3

Hazardous chemical storage and dispensing rooms shall have mechanical exhaust ventilation as follows:

(1) Mechanical exhaust ventilation shall be at a minimum rate of 0.31 m3/min·m2 (1 ft3/min·ft2) of floorarea.

(2) Exhaust and inlet openings shall be arranged to prevent accumulation of vapors.

5.5.4 Incompatible Storage.

5.5.4.1

Incompatible hazardous materials shall be separated from each other in accordance with NFPA 1, FireCode.

5.5.4.2

Only inert gas shall be used for pressurization of gas-over-liquid delivery systems.

5.5.4.3

Containers of chemicals shall be labeled to identify their contents.

5.6 Systems, Equipment, and Processes.

Systems, equipment, and processes utilized for storage, dispensing, use, or handling of hazardousmaterials shall be in accordance with 5.6.1 through 5.6.2.

5.6.1 Design and Construction of Containers, Cylinders, and Tanks.

5.6.1.1

Containers, cylinders, and tanks shall be designed and constructed in accordance with approvedstandards.

5.6.1.2

Containers, cylinders, tanks, and other means used for containment of hazardous materials shall be of anapproved type.

5.6.2

Piping, tubing, valves, and fittings conveying hazardous materials shall be designed and installed inaccordance with approved standards and shall be in accordance with 5.6.2.1.


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5.6.2.1* Design and Construction.

Piping, tubing, valves, fittings, and related components used for hazardous materials shall be in accordancewith the following:

(1) Piping, tubing, valves, fittings, and related components shall be designed and fabricated frommaterials that are compatible with the material to be contained and shall be of adequate strength anddurability to withstand the pressure, structural, and seismic stress and exposure to which they aresubject.

(2) Piping and tubing shall be identified in accordance with ASME A13.1, Scheme for the Identification ofPiping Systems, to indicate the material conveyed.

(3) Readily accessible manual valves or automatic remotely activated fail-safe emergency shutoff valvesshall be installed on supply piping and tubing at the following locations:

(4) The point of use

(5) The tank, cylinder, or bulk source

(6) Manual emergency shutoff valves and controls for remotely activated emergency shutoff valves shallbe identified and the location shall be clearly visible, accessible, and indicated by means of a sign.

(7) Backflow prevention or check valves shall be provided when the backflow of hazardous materialscould create a hazardous condition or cause the unauthorized discharge of hazardous materials.

(8) Where gases or liquids have a hazard ranking of health hazard Class 3 or 4, flammability Class 4,reactivity Class 3 or 4.in accordance with NFPA 704, Standard System for the Identification of theHazards of Materials for Emergency Response, and are carried in pressurized piping above gaugepressure of 103 kPa (15 psi), an approved means of leak detection and emergency shutoff or excessflow control shall be provided. Where the piping originates from within a hazardous material storageroom or area, the excess flow control shall be located within the storage room or area.

5.6.3 Hazard Chemical Storage Cabinets.

Hazardous chemicals shall be stored within enclosed storage cabinets or workstations.

5.6.3.1

Within hazardous materials storage or dispensing rooms, enclosures shall not be required.

5.6.3.2

Incompatible chemicals shall not be stored in the same cabinet.

5.6.3.3

Storage cabinets shall be constructed of not less than 1.2 mm (18 gauge) steel.

5.6.3.4

Doors shall be self-closing and shall be provided with a latching device.

5.6.3.5

Approved safety containers shall be used to store flammable liquids.

5.6.3.5.1

Where needed for purity, glass or plastic containers shall be permitted for quantities of 4 L (1 gal) or lessper individual container.

5.7 Supply Piping.

5.7.1

Supply piping for hazardous chemical liquids and gases shall be welded throughout, except for connectionsto the systems that are located within a ventilated enclosure if the material is a gas, or an approved methodof drainage or containment shall be provided for connections if the material is a liquid.

5.7.2

Hazardous chemicals piping and tubing shall comply with ASME B31.3, Process Piping.


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5.7.3

Supply piping for all liquids shall be hydrostatically tested to 150 percent of the maximum allowable workingpressure for 2 hours with no visible leakage or loss of pressure.

5.8 Welding.

5.8.1

Welders and pipefitters shall be trained and qualified for the specific function they are performing.

5.8.2*

Thermoplastic welders for critical components shall be trained and qualified for the specific function theyare performing.


This just adds the reference to NFPA 704, relocated from the definitions chapter, to comply with the Manual of Style.







Street Address:

City:

State:

Zip:


Committee Statement


Statement: This just adds the reference to NFPA 704, relocated from the definitions chapter, to comply with theManual of Style.


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Public Input No. 9-NFPA 318-2015 [ Section No. 5.5.2 [Excluding any Sub-Sections] ]


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Hazardous chemicals in the fabrication area shall be limited to those needed for operations andmaintenance and as required by 5.5.2.1 and 5.5.2.2, with quantities not exceeding the limitations specifiedin Table 5.5.2, based on the exempt amounts per control area in NFPA 1, Fire Code, and NFPA 5000,Building Construction and Safety Code . The limits of Table 5.5.2 shall be permitted to be exceeded,provided a submittal using alternative methods and materials is approved by the authority having jurisdiction(AHJ).

Table 5.5.2 Quantity Limits for Hazardous Materials in a Single Fabrication Area

Hazard Category

Solids Liquids Gas


NTP/m2ft3 @

NTP/ft2

Physical Hazard Materials

Combustible liquid

Class II 0.8 0.02

Class III-A 1.6 0.04

Class III-BNot

limitedNot

limited


3.26 0.08

Cryogenic

Flammable Note b Note b

Oxidizing 0.76 2.5

Flammable gas

Gaseous Note b Note b

Liquefied Note b Note b

Flammable liquid

Class I-A 2.04 0.05

Class I-B 2.04 0.05

Class I-C 2.04 0.05

Combination Class I-A, I-B, andI-C

2.04 0.05


3.26 0.08

Flammable solid 0.032 0.002

Organic peroxide

Unclassified detonable Note a Note a Note a Note a

Class I Note a Note a Note a Note a

Class II 0.8 0.05 0.1 0.0025

Class III 3.2 0.2 0.8 0.02

Class IVNot

limitedNot

limitedNot

limitedNot

limited

Class VNot

limitedNot

limitedNot

limitedNot

limited

Oxidizing gas

Gaseous 0.76 2.5

Liquefied 0.76 2.5

Combination of gaseous andliquefied

0.76 2.5

Oxidizer


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Hazard Category

Solids Liquids Gas


NTP/m2ft3 @

NTP/ft2

Class 4 Note a Note a Note a Note a

Class 3 0.096 0.006 2.44 0.06

Class 2 0.096 0.006 2.44 0.06

Class 1 0.096 0.006 2.44 0.06

Combination oxidizer

Class 1, 2, 30.096 0.006 2.44 0.06

Pyrophoric Note a Note a 0.1 0.0025 Notes b and c Notes b and c

Unstable reactive

Class 4 Note a Note a Note a Note a Note a Note a



Class 1Not

limitedNot

limitedNot

limitedNot


Water reactive

Class 3 Note b Note b 0.1 0.0025

Class 2 8.0 0.5 2.04 0.05

Class 1Not

limitedNot

limitedNot

limitedNot

limited

Health Hazard Materials

CarcinogensNot

limitedNot

limitedNot

limitedNot


CorrosivesNot

limitedNot

limitedNot

limitedNot


Highly toxicsNot

limitedNot

limitedNot

limitedNot


IrritantsNot

limitedNot

limitedNot

limitedNot


SensitizersNot

limitedNot

limitedNot

limitedNot


Other health hazardsNot

limitedNot

limitedNot

limitedNot


ToxicsNot

limitedNot

limitedNot

limitedNot


Note: Hazardous materials within piping not to be included in the calculated quantities.

aQuantity of hazardous materials in a single fabrication not to exceed exempt amounts in NFPA 1, FireCode.

bThe aggregate quantity of flammable, pyrophoric, toxic, and highly toxic gases not to exceed a density limit

of 0.2 ft3 per ft2at NTP.

cThe aggregate quantity of pyrophoric gases in the building limited to the amounts for which detachedstorage is not required as set forth in NFPA 1, Fire Code.


This brings the requirements from 3.3.8 into the body of the standard, to comply with the Manual of Style.


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Street Address:

City:

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Committee Statement

Resolution: As the recommended changes to the definition were not accepted, the proposed language is stillcontained in the definition and it is not necessary to be duplicated here.


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8.2.1

Tools shall be constructed of noncombustible materials, except as permitted by 8 .2.1.2 or by 8.2.1.2.

8.2.1.1

Small parts within the tool such as knobs, buttons, electrical contacts, and terminal strips shall not berequired to be of noncombustible materials.

8.2.1.2*

Materials listed, in accordance with the requirements contained in ANSI/FM 4910, Standard for CleanroomMaterials Flammability Test Protocol, or with the requirements contained in ANSI/UL 2360, Standard TestMethod for Determining the Combustibility Characteristics of Plastics Used in Semiconductor ToolConstruction, for use without internal fire detection and suppression shall be permitted to be used as anacceptable alternative to noncombustible materials, where process concerns or process chemicals requirealternatives .


Instead of having to go to the annex, the methods for approving materials as alternatives to non-combustible materials should be included in the body of the standard. The annex indicates that FM 4910 and UL 2360 are the tests used for listing such materials.




Street Address:

City:

State:

Zip:


Committee Statement


Statement: Instead of having to go to the annex, the methods for approving materials as alternatives tonon-combustible materials should be included in the body of the standard. The annex indicates thatFM 4910 and UL 2360 are the tests used for listing such materials.


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Public Input No. 15-NFPA 318-2015 [ Section No. A.7.14.2 ]

A.7.14.2

A subatmospheric gas source (SAGS) reduces the risk and magnitude of gas releases. In a SAGS, avacuum (subatmospheric) condition is required to induce gas flow from the cylinder. An accidental openingof the valve under atmospheric conditions will result in little or no gas release. In a Type 1 SAGS, gas isadsorbed on a medium (with internal pressure of less than 101.3 kPa at 20 °C and less than 300 kPa at50 °C as defined in the UN Model Regulations, i.e. positive pressure above 20 C) and is released under avacuum condition. In a Type 2 SAGS, the pressure driver is mitigated via a normally closed internal valvethat requires a vacuum condition to release the gas. Because of its improved built-in safety features, aSAGS should be used instead of standard high-pressure cylinder gas wherever process compatibilityallows.


In A.7.14.2, the sentence “An accidental opening of the valve under atmospheric conditions will result in little or no gas release.” was deleted because we should not include accident scenarios in a standard. The first sentence states “…(SAGS) reduces the risk an magnitude of gas releases.” which implies improved safety without going into the many specific benefits and the many different accident scenarios.

In A.7.14.2, the parenthetical text “(with internal pressure of less than 101.3 kPa at 20 °C and less than 300 kPa at 50 °C as defined in the UN Model Regulations, i.e. positive pressure above 20 C)” was added in order to provide important information about Type 1 SAGS. Users should be aware that Type 1 SAGS can be above atmospheric pressure at higher temperatures, typically above 25 C. It is common for Type 1 to be above atmospheric pressure under normal storage, handling and use conditions. An accidental opening of the valve under atmospheric conditions and temperatures above 25 C, Type 1 will result in a puff of gas release followed by gas desorbing from the media. The definition in the UN Model regulations was referenced because it includes pressure and temperature values accepted by DOT and internationally. The statement “i.e. positive pressure above 20 C” makes the reader aware that Type 1 can be positive pressure at higher temperatures.




Street Address:

City:

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Committee Statement

Resolution: The current definition of Type 1 SAGS is adequate.


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Public Input No. 16-NFPA 318-2015 [ Section No. A.7.14.2.6 ]

A.7.14.2.6

A Type 1 SAGS has an inherent flow restriction because the cylinder’s internal gas pressure issubatmospheric at 20 C . At temperatures typically above 25 C, the pressure will be above atmospheric .


In A7.14.2.6, the added language that makes the reader aware that Type 1 SAGS can be positive pressure at temperatures typically above 25 C. Users should be aware that positive pressure can exist and it should be addressed when evaluating release scenarios. It is common for Type 1 to be above atmospheric pressure under normal storage, handling and use conditions. An accidental opening of the valve under atmospheric conditions and temperatures above 25 C, Type 1 will result in a puff of gas release followed by gas desorbing from the media.




Street Address:

City:

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Committee Statement

Resolution: Type 1 SAGS have inherent flow restrictions. The proposed criteria are not relevant to this definition.


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Public Input No. 3-NFPA 318-2015 [ Section No. D.1.2 ]

D.1.2 Other Publications.

D.1.2.1 ANSI ASME Publications.

American National Standards Institute, Inc., 25 West 43rd Street, 4th floor, ASME International , TwoPark Avenue , New York, NY 10036 10016-5990 .

ANSI B31 ASME B31 .3, Chemical Plant and Petroleum Refinery Power Piping , 2004 2014 .

ANSI/ ISA S84.01, Application of Safety Instrumented Systems for the Process Industries, 1996.(Superseded by ISA 84.00.01 P1 Functional Safety: Safety Instrumented Systems For The ProcessIndustry Sector - Part 1: Framework, Definitions, System, Hardware And Software Requirements,2004.)

D.1.2.2 ASTM Publications.


IEEE/ASTM SI 10, American National Standard for Use of the International System of Units (SI): TheModern Metric System, 2002 Metric Practice , 2010, Revised 2013 .

ASTM E 1354 E1354 , Standard Test Method for Heat and Visible Smoke Release Rates for Materials andProducts Using an Oxygen Consumption Calorimeter, 2013.

ASTM E 2058 E2058 , Standard Test Methods for Measurement of Synthetic Polymer Material FlammabilityUsing a Fire Propagation Apparatus (FPA), 2013.

D.1.2.3 CGA Publications.

Compressed Gas Association, 14501 George Carter Way, Chantilly, VA 20151-1770.

CGA G-13, Storage and Handling of Silane and Silane Mixtures, 2006 2015 .

D.1.2.4 FM Publications.

FM Global, 1301 Atwood Avenue 270 Central Avenue , P.O. Box 7500, Johnston, RI 02919.

FMApproval 4910, Clean Room Materials Flammability Test Protocol, September 1997 2013 .

FMApproval 4922, Fume Exhaust Ducts or Fume and Smoke Exhaust Ducts, April 2001.

D.1.2.5 SEMI Publications.

Semiconductor Equipment and Materials International, 3081 Zanker Road, San Jose, CA 95134.

SEMI S2-0703a , Environmental, Health, and Safety Guideline for Semiconductor ManufacturingEquipment, 2002 2010e .

SEMI S14, Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor ManufacturingEquipment, 2000 2009 .

D.1.2.6 UL Publications.


ANSI/ UL 2360, Standard Test Method for Determining the Combustibility Characteristics of Plastics Usedin Semiconductor Tool Construction, 2000, Revised 2008 2013 .

D.1.2.7 U.S. Government Publications.

U.S. Government Printing Office, Washington, DC 20402.

Title 29, Code of Federal Regulations, Part 1910.1000, “Air Contaminants.”

Title 49, Code of Federal Regulations, Part 173, Appendix A, “Transportation.”



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Referenced current SDO names, addresses, standard names and editions.



Public Input No. 2-NFPA 318-2015[Section No. 2.3]

Referenced current SDO names, addresses, standard names,and editions.


Submitter Full Name: Aaron Adamczyk

Organization: [ Not Specified ]

Street Address:

City:

State:

Zip:

Submittal Date: Sat Mar 21 20:39:19 EDT 2015

Committee Statement

Resolution: ANSI designation should be retained for these standards. See the date updates addressed in FRs 8and 9.


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Public Input No. 17-NFPA 318-2015 [ Section No. D.1.2.2 ]

D.1.2.2 ASTM Publications.


IEEE/ASTM SI 10, Standard for Use of the International System of Units (SI): The Modern Metric System,2002.

ASTM E 1354 E1354 , Standard Test Method for Heat and Visible Smoke Release Rates for Materials andProducts Using an Oxygen Consumption Calorimeter, 2013 2015a .

ASTM E 2058 E2058 , Standard Test Methods for Measurement of Synthetic Polymer Material FlammabilityUsing a Fire Propagation Apparatus (FPA), 2013 2013a .


date updates




Street Address:

City:

State:

Zip:


Committee Statement


Statement: date updates


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Public Input No. 13-NFPA 318-2015 [ Section No. D.1.2.6 ]

D.1.2.6 UL Publications.


ANSI/UL 2360, Standard Test Method for Determining the Combustibility Characteristics of Plastics Used inSemiconductor Tool Construction, 2000, Revised 2008 2013 .


Proposed change reflect updated edition of UL Standard.


Submitter Full Name: RONALD FARR

Organization: UL LLC

Street Address:

City:

State:

Zip:

Submittal Date: Wed Jul 01 13:34:35 EDT 2015

Committee Statement


Statement: Proposed change reflect updated edition of UL Standard.


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