PSE Conferences - PSE Conferences · 2014. 12. 16. · PSE 2006, Garmisch-Patenkirchen (Germany)...

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PSE

2006

Prog

ram

Every dimension is infinite,the limits are in the mind.

Global network offered by a global player.

Surface technology solutions for cutting tools, forming tools, medical devices and implants, components and decorative applications.

Equipment for PACVD, PVD and CVD coatings.

www.ionbond.com

-

-

HÜTTINGER – generat ing p lasma exc i tat ion.

There may be stronger plasma energy sources …

… but certainly none that are as precise. HUETTINGER generators can be accuratelyregulated. And therefore offer ideal solutions for plasma excitation in industry andresearch. Whether for the production of semiconductors, fl at panel displays, solarcells or for large area coatings. HUETTINGER’s DC, MF and RF generators impressthrough re liable technology and excellent availability – with simple system integration.High process stability and rapid-reaction arc management – for optimum process results.HUETTINGER is the world’s undisputed number one in generators for large area coatings.www.huettinger.com

generating confidenceTRUMPF Group

Scope of the PSE Conference:

Applications of plasma and ion beam techniques in surface engineering and their fundamentals

The 10th International Conference on Plasma Surface Engineering PSE 2006 will set a new milestone with its big anniversary. The continuous success of the PSE is reflecting the increasing requirements of new surface technologies in industry. This conference every two years has aided the know-how-transfer from R&D to industrial applications. By exchanging the scientific know-how with the industrial applica-tions the PSE is an excellent forum for a dialogue between these groups. The high scientific level com-bined with this special feature has made the PSE so successful. Therefore, the forthcoming conference will focus more actively on these exchanges of experiences. With the 10th repetition in 2006 the PSE will continue its successful history since 1988. During this time plasma surface engineering has made large scientific and practical developments. With the new scien-tific progress in the field of nano technologies further potential for the future has opened already new doors. Expecting again more than 600 delegates from Europe and overseas countries together with an indus-trial exhibition PSE 2006 will be one of the biggest events in the field of plasma surface engineering. The presentations will contribute to the clarification of relationships between the different process pa-rameters as well as the modified surface coatings and thin films. A basic understanding of the different processes is already in the situation that more and more industrial applications for industrial products and consumables are already applied with increasing market shares.

European Joint Committee on Plasma and Ion Surface Engineering (EJC/PISE)

Prof. Dr. G. Bräuer (Chairman) Fraunhofer-Institut für Schicht- und Oberflächentechnik Bienroder Weg 54 e Tel: +49 5 31 2 15 - 55 01 / 55 00 38108 Braunschweig, Germany Fax: +49 5 31 2 15 - 59 01

Conference Chairman: J. Musil, Plzen (CZ)

Conference Co-Chairmen:

R. Grün, Siegen (D) F. Z. Cui, Tsinghua (CHN)

International Scientific Committee

S. Berg, Uppsala (S) J. Bøttiger, Aarhus (DK) I. Braceras, San Sebastian (E) E. Broszeit, Darmstadt (D) D. Cameron, Mikkeli (FIN) A. Cavaleiro, Coimbra (P) R. D’Agostino, Bari (I) W. Fleischer, Venlo (NL) M. Hecq, Mons (B) U. Helmersson, Linkoeping (S) A. S. Korhonen, Espoo (FIN) A. Matthews, Sheffield (GB) H. Michel, Nancy (F) T. Müller, Wels (A) J. Musil, Plzen (CZ) P. Panjan, Ljubljana (SI) H. K. Pulker, Insbruck (A) A. Ricard, Toulouse (F) V. Rigato, Legnaro (I) P. Rödhammer, Reutte (A) M. C. M. van de Sanden, Eindhoven (NL) K. Zdunek, Warsaw (PL)

Advisory Board

J. Albella, Madrid (E) K. Bobzin, Aachen (D) H. Bolt, Garching (D) A. Bouchoule, Orleans (F) K.-D Bouzakis, Salonika (GR) G. A. Collins, Menai (AUS) H. Dimigen, Braunschweig (D) H. Fujiyama, Nagasaki (JPN) J. G. Han, Suwon (ROK) J. Heberlein, Minneapolis (USA) S. Hogmark, Uppsala (S) P. J. Kelly, Salford (GB) U. Kortshagen, Minnesota (USA) S. C. Kwon, Changwon (ROK) J. J. Lee, Seoul (ROK) E. Levashov, Moscow (R) M. Martinez, Alicante (E) R. Messier, Pennsylvania (USA) W. Möller, Dresden (D) W.-D. Münz, Karlstadt (D) S. Myake, Osaka (JPN) A. Ohl, Greifswald (D) H. Oechsner, Kaiserslautern (D) I. Petrov, Illinois (USA) K. Reichel, Düsseldorf (D) F. Rossi, Ispra (IT) Y. Segui, Toulouse (F) R. P. Shimshock, Mountain View (USA) M. Sjoestrand, Stockholm (S) H. Störi, Vienna (A) O. Takai, Nagoya (JPN) J. Vlcek, Plzen (CZ) J. von Stebut, Nancy (F) M. R. Wertheimer, Montreal (CDN) G. K. Wolf, Heidelberg (D) T. Yoshida, Tokyo (JPN)

Editorial Board

A. Cavaleiro, Coimbra (P) R. Grün, Siegen (D) U. Helmersson, Linkoeping (S) W. Möller, Dresden (D) J. Musil, Plzen (CZ) C. Oehr, Stuttgart (D)

Honorary Founding Chairman

K.-T. Rie, Braunschweig (D)

Scientific Program Secretariat Forschungszentrum Rossendorf Europäische Forschungsgesellschaft Dünne Schichten e. V. Prof. Dr. Wolfhard Möller Dr. Ludwig van Loyen Postfach 51 01 19 D-01314 Dresden, Germany

Gostritzer Straße 61 – 63 D-01217 Dresden, Germany

Tel: +49 (0) 3 51 8 71 – 83 75 Fax: +49 (0) 3 51 8 71 – 84 31

e-mail: [email protected] e-mail: [email protected]

PSE 2006, Garmisch-Patenkirchen (Germany) September 10 - 15, 2006

PSE 2006 3

List of sponsors

The main sponsor

IONBONDwww.ionbond.com

Venlo, Netherlands

The further sponsors

Advanced Energy Industries GmbHFilderstadt, Germany

www.advanced-energy.com

AMTEC - Analysenmesstechnik GmbH, Leipzig, Germany

www.amtec-spectro.de

CEMECON AG, Wuerselen, Germany www.cemecon.de

CSM Instruments SA, Peseux, Switzerland www.csm-instruments.com

Eugen G. Leuze Verlag, Bad Saulgau, Germany www.galvanotechnik.de

FNE Forschungsinstitut für Nichteisen-Metalle GmbH, Freiberg, Germany

www.fne-freiberg.de

GfE Metalle und Materialien, Nuernberg, Germany www.gfe-online.de

Heraeus Holding GmbH, Hanau, Germany www.heraeus.com

HÜTTINGER Elektronik GmbH & Co. KG,Freiburg, Germany

www.huettinger.com

MKS Instruments Deutschland GmbH,Muenchen, Germany

www.mksinstrumenst.de

Rolf Schäfer Beschichtungskomponenten,Muenchweiler, Germany

www.robeko.de

Roth & Rau AG, Hohenstein-Ernstthal, Germany www.roth-rau.de

Varian Deutschland GmbH, Darmstadt, Germany www.varianinc.com

VON ARDENNE Anlagentechnik GmbH,Dresden, Germany

www.vonardenne.biz

VTD Vakuumtechnik Dresden GmbH,Dresden, Germany

www.vtd.de

WILEY-VCH Verlag GmbH & Co. KGaA,Weinheim, Germany

www.wiley-vch.de


4 PSE 2006


PSE 2006 5

Tutorial Saturday / Sunday, September 09 – 10, 2006 Room Zugspitze Tutorial ”Fundamentals and Trends in Plasma Surface Processing” (see page 5)

Social Events / Opening Ceremony Sunday, September 10, 2006 18:00 – 21:00 Welcome Party Foyer of the Congress Center

Monday, September 11, 2006 09:00 – 10:30 Official Opening / Welcome Address / Opening Lecture Room Richard Strauss

Tuesday / Wednesday, September 12 – 13, 2006 Tue: 09:20 – 23:00, Wed: 09:20 – 16:45 Industrial Exhibition Room Werdenfels and Foyer Official Opening of the Exhibition takes place after the Plenary Lecture in the room Rich-ard-Strauss by Dr. Reinar Grün

Tuesday September 12, 2006 15:15 – 18:35 Workshop: Successful Applications of Plasma and Ion-based Processes Room Olympia This Industrial Workshop will be organized by Dr. Reinar Grün from Plasma Technik Grün GmbH, Siegen, Germany together with VDI Technology Center, Germany in cooperation with the Society of Vacuum Coater, USA (SVC).

Tuesday September 12, 2006 18:45 – 23:00 Industrial Evening in combination with the poster session in the Congress Center Room Werdenfels and Foyer, First Floor, Restaurant

Wednesday, September 13, 2006 18:30 – 23:00 Bavarian Evening in the “Bayernhalle” of Garmisch-Partenkirchen Separate tickets are required! 18:30 – Bus transfer starts in front of the congress center to the “Bayernhalle”

Special Events (only for invited members) Monday, September 11, 2006 19:30 – 22:00 Meeting EJC / PISE Room Dreitorspitz

Thursday, September 14, 2006 17:30 – 21:00 Common Meeting of AK Plasma and DGPT boards Room Dreitorspitz Meeting Editorial Board Room Alpspitz


6 PSE 2006

Job Placement Center

During the conference an information board is placed in the foyer as “job placement center”. Companies which would like to offer a job or participants who are looking for a new job will find respective forms for completion. Contacts can be arranged on request at the confer-ence office. Conference Location The Tenth International Conference on Plasma Surface Engineering will be held in the Kongresshaus (Congress-Center). Richard-Strauss-Platz D-82467 Garmisch-Partenkirchen (Germany) Conference Office The conference office is located in the foyer of the congress center (main entrance). Opening hours, September 09 – 15, 2006: Saturday: 12:00 to 14:00 h Sunday: 08:00 to 20:00 h Monday: 08:00 to 18:00 h Tuesday: 08:00 to 18:00 h Wednesday: 08:00 to 18:00 h Thursday: 08:00 to 18:00 h Friday: 08:00 to 14:00 h

Internetcafé Next to the conference office an internetcafé will be arranged. For users of notebooks a wireless LAN will be provided. A personal login and password will be dispensed by the registration desk. After 10 min disuse of the wireless LAN the connec-tion will be broken automatically. Conference Telephone / Telefax The conference office` telephone and telefax numbers are: phone: +49 (0) 88 21 18 08 12, fax: +49 (0) 88 21 18 08 50 Conference Language The conference language will be English. No simultaneous translation will be provided. Conference Secretariat / Registration Everybody who wishes to attend the conference has to register online at: www.pse2006.net / Registration Deadlines Registrations until July 31st, 2006 will be considered for the list of participants.

Tutorial “Fundamentals and Trends of Plasma Surface Processing”

in connection with 10th International Conference on Plasma Surface Engineering (PSE 2006) Time Saturday, September 9 13:30 – 14:45 PLASMA TREATMENT OF POLYMERS AND PLASMA POLYMERISATION –

BIOLOGICAL APPLICATIONS C. Oehr Fraunhofer Institute of Interfacial Engineering and Biotechnology, Stuttgart (Germany)

14:45 – 16:00 CARBON-BASED HARD COATINGS AND NANOMATERIALS

B. Schultrich Fraunhofer Institute of Materials and Beam Technology, Dresden (Germany)

16:00 – 16.30 Coffee Break 16:30 – 17:45 DIELECTRIC BARRIER DISCHARGES FOR SURFACE TREATMENT AT

AMBIENT PRESSURE C.P. Klages Fraunhofer Institute of Thin Film and Surface Technology, Braunschweig (Germany)

17:45 – 19:00 ADVANCED PLASMA DIAGNOSTICS FOR THIN FILM DEPOSITION – IN SITU

STUDIES M.C.M. van de Sanden Dept. of Applied Physics, Eindhoven University of Technology (The Netherlands)

19:30 Dinner and Social Get-Together Sunday, September 10

8:45 – 10:00 MAGNETRON SPUTTERING AND PLASMA PROCESSES FOR LARGE AREA

COATINGS J. Strümpfel Von Ardenne Anlagentechnik GmbH, Dresden (Germany)

10:00 – 11:15 PLASMA TECHNOLOGY IN SOLAR CELL MANUFACTURING

S. Roth Roth & Rau AG, Wüstenbrand (Germany)

11:15 – 12:30 NEW APPROACHES TO ADVANCED HARD COATINGS, TYPICAL TRIBO-

LOGICAL COATINGS AND DIAMOND FILMS FOR VARIOUS APPLICATIONS I. Wirth CemeCon AG, Würselen (Germany)

12:30 – 14:00 Lunch 14:00 – 15:15 ION BEAMS FOR INDUSTRIAL SURFACE TREATMENT

N.J. Mikkelsen CemeCon Scandinavia A/S, Åbyhøj (Denmark)

15:15 – 16:30 DIFFUSION TREATMENT USING LOW-PRESSURE PLASMAS

R. Grün Plasma Technik Grün GmbH, Siegen (Germany)

Please note that an additional registration for the tutorial is necessary. An early registration is recommended because the number of participants is limited.


PSE 2006 7


8 PSE 2006


PSE 2006 9


10 PSE 2006


PSE 2006 11

Monday, September 11th, morning Room Richard-Strauss

09:00 – 09:40 Official Opening Jindrich Musil, Conference Chairman

Welcome Address Thomas Schmid, Mayor of Garmisch-Partenkirchen

Funding of Plasma Technology in Germany Karin Reichel, VDI Technologiezentrum GmbH, Düsseldorf, Germany

09:40 – 10:30 Opening Lecture

Chairman: J. Musil, Plzen, Czech Republic Expected developments of PVD and PACVD coatings for components Gerry van der Kolk

Ionbond, Venlo, The Netherlands

10:30 – 11:05 Coffee break

Oral Session Session 1: Microstructure and Stress Chairmen: L. Hultman, Linköping, Sweden K.-D. Bouzakis, Thessaloniki, Greece

11:05 – 11:35 Keynote Lecture Kn0100

Microstructure and stress in thin hard films Guido Janssen

TU Delft, Delft, Netherlands

11:35 – 11:55 Or0101

Stress relaxation by ion bombardment in cubic boron nitride thin films Barbara Abendroth1

, Andreas Kolitsch2, Wolfard Möller3, Raul Gago4

1Forschungszentrum Rossendorf, Dresden, Germany 2,3Forschungszentrum Rossendorf, Dresden, Germany 4Centro de Microanálisis de Materiales, Universidad Autónoma de Madrid, Madrid, Spain

11:55 – 12:15 Or0102

Elastic Properties of Polycrystalline Gold Thin Films: Simulation and X-ray Diffraction Experiments Eric Le Bourhis1

, D Faurie2, P-O Renault3, P Goudeau4

, O Castelnau5, R

Brenner6 1Université de Poitiers, LMP-CNRS UMR 6630, Futuroscope Chasseneuil Cedex, France 2,3,4Université de Poitiers, LMP-CNRS UMR 6630 5,6Université Paris 13, LPMTM, UPR 9001

12:15 – 12:35 Or0103

Low temperature and high rate heteroepitaxy of Si on sapphire by meso plasma CVD Makoto Kambara1

, Munetaka Sawayanagi2, Jose M. A. Diaz3, Eiji Abe4

,

Toyonobu Yoshida5 1Department of Materials Engineering, The University of Tokyo, Tokyo, Japan 2,3,4,5The University of Tokyo, Tokyo, Japan

12:35 – 12:55 Or0104

Magnetron Sputtering of Aluminium Nitride Thin Films for Thermal Management Cyril DUQUENNE1

, Pierre-Yves TESSIER2, Marie-Paule BESLAND3

,

Mohamed Abdou DJOUADI4, Bogdan POPESCU5, Christian

BRYLINSKI6, Sylvain DELAGE7, Yves SCUDELLER8

1Institut des Matériaux Jean Rouxel - IMN UMR CNRS 6502, Nantes, FRANCE 2,3,4Institut des Matériaux IMN - UMR CNRS 6502 - Nantes - FRANCE 5,8Université de Nantes - Ecole Polytechnique-LGMPA - Nantes - FRANCE 6,7THALES III-V LAB, Marcoussis- FRANCE

12 PSE 2006

Monday, September 11th, morning Room Zugspitze

Oral Session Session 2: PECVD Chairmen: M. Creatore, Eindhofen, Netherlands F. Arefi-Khonsari, Paris, France


Macroscopic Description of Plasma Polymerization Dirk Hegemann

EMPA Materials Science and Technology, St.Gallen, Switzerland

11:35 – 11:55 Or0201

Influence of plasma pulsing on DLC and DLC/SiOx films deposited in a low pressure inductively coupled rf plasma Agnes Granier1, C. Duquenne2

, C. Nouveau3, M. A. Djouadi4, C. Labidi5,

T. Begou6, B. Angleraud7

, V. Bursikova8 1IMN, CNRS Univ Nantes UMR6502, NANTES, France 2,4,6,7IMN, CNRS Univ Nantes UMR6502 3,5

ENSAM, Cluny, France 8Dept Electronic Physics, Univ Mazarik, Brno, Czech Republic

11:55 – 12:15 Or0202

PLASMA ASSISTED CVD WITH METAL ORGANIC PRECURSORS FOR AUTOMOTIVE INDUSTRY Jens Mahrholz1

, S.-J. Son2, T. Hosenfeldt3, K.-T. Rie4

, K.-W. Yi5 1IOT Braunschweig, Braunschweig, Germany 2,5

School of Materials Science and Engineering, College of Engineering, Seoul National University, 151-744 Seoul, Korea 3INA-SCHAEFFLER KG, Industriestraße 1-3, 91074 Herzogenaurach, Germany 4Institute for Surface Technology (IOT), Technical University Braunschweig, Bienroder Weg 53, 38108 Braunschweig, Germany

12:15 – 12:35 Or0203

Mass spectrometry of an Ar-TMS low frequency plasma, correlations with a-SiC:H hard films characteristics Audrey Soum-Glaude1

, Laurent THOMAS2, Mickael JOINET3

, Alain DOLLET4 1PROMES-CNRS, Perpignan, France 2,4

PROMES-CNRS, Perpignan, France 3EADS-

CCR, Suresnes, France

12:35 – 12:55 Or0204

CVD of Titanium -Oxide and -Carbonitride Coatings: Comparative Evaluation of Thermal and Plasma-assisted processes Sanjay Mathur1, Patrick Kuhn2 1Head of Division of Nanocrystalline Materials and Thin Film Systems, Saarbruecken, Germany 2Leibniz-Institute of New Materials, Saarbruecken, Germany

PSE 2006 13

Monday, September 11th, morning Room Olympia

Oral Session Session 3: Ion and Laser Treatment Chairmen: W. Möller, Dresden, Germany N.N., ,


NITRIDING OF STAINLESS STEEL: PIII OR LOW ENERGY NITRIDING? Stephan Mändl1, J. Lutz2

, D. Manova3, F. Scholze4

, H. Neumann5, B.

Rauschenbach6 1Leibniz-Institut für Oberflächenmodifizierung, Leipzig, Germany 2,3,4,5,6Leibniz-Institut für Oberflächenmodifizierung, Leipzig, Germany

11:35 – 11:55 Or0301

Comparison of the Hydrogen incorporation mechanisms observed in plasma, in-line implantation and PBII treatments Zeinab Arab1

, Alain STRABONI2, Luc PICHON3, Michel DROUET4

,

Marie-Laure DAVID5 1Laboratoire de Métallurgie Physique UMR 6630-CNRS, U. de Poitiers, FUTUROSCOPE CHASSENEUIL, FRANCE 2,3,4,5Laboratoire de Métallurgie Physique UMR 6630-CNRS, U. de POITIERS, FUTUROSCOPE CHASSENEUIL, FRANCE

11:55 – 12:15 Or0302

Tungsten carbide film preparation by simultaneous sputtering of tungsten and carbon using plasma-based ion implantation and deposition ( PBII&D ) Ken Yukimura1

, Igor Levchenko2, Hiroyuki Ono3

, Keiji Nakamura4,

Yoshiyuki Suda5 1Department of Electrical Engineering, Doshisha University, Kyotanabe, Japan 2School of Physics/The University of Sydney, Sydney, Australia 3Department of Electrical Engineering/Doshisha University, Kyotanabe, Japan 4Department of Electrical Engineering/Chubu Univeristy, Kasugai, Japan 5Graduate School of Information and Technology/Hokkaido University, Sapporo, Japan

12:15 – 12:35 Or0303

Plasma Jet Coupled with Nd:YAG Laser: New Approach to Surface Cleaning Nils Mainusch1

, Christina Pflugfelder2, Wolfgang Viöl3 1HAWK, University of Applied Sciences and Arts, Göttingen, Germany 2,3HAWK University of Applied Sciences and Arts, Göttingen, Germany

12:35 – 12:55 Or0304

SURFACE MODIFICATION WITH LASER: PRE-TREATMENT OF ALUMINIUM ALLOYS FOR ADHESIVE BONDING Elisabeth Stammen1

, Stefan Böhm2, Klaus Dilger3, Ralf Hose4

1Institut für Füge- und Schweißtechnik, TU Braunschweig, Braunschweig, Germany 2,3,4Inst. für Füge- und Schweißtechnik, TU Braunschweig, Braunschweig, Germany

14 PSE 2006

Monday, September 11th, afternoon Room Richard-Strauss

14:20 – 15:05 Plenary Lecture Pl01

Chairman: J. Bottiger, Aarhus, Denmark Advanced Modelling for the Design of New Materials and Devices David McKenzie1

, O. Warschkow2 , M.M. Bilek3 , N.A.Marks4, H. Wilson5

,

J. Houska6 , D.G.Mc Culloch7 1University of Sydney, Sydney, Australia 2,3,4,5University of Sydney, Sydney ,NSW Australia 6University of Western Bohemia,Pilsen,Czech Republic 7RMIT University, Melbourne, Victoria, Australia

15:15 – 16:25 Poster Session 1, Foyer


Oral Session Session 4: Optical and Electrical Properties Chairmen: M. C. M. van de Sanden, Eindhofen, Netherlands A. Subrahmanyam, Madras, India


Zirconium oxynitride Decorative Thin Films: Relationship between Film Characteristics and Properties Filipe Vaz1

, O. Banakh2, P. Carvalho3

, L. Rebouta4 1Minho University, Physics Department, Guimaraes, Portugal 2University of Applied Sciences, HE-ARC, Le Locle, Switzerland 3,4Minho University, Physics Department, Guimarães, Portugal

17:15 – 17:35 Or0401

Low-creep metallic thin films and reflective coatings for optical microsystems Jan-Uwe Schmidt1, Dirk Rudloff2, Martin Friedrichs3

, Hubert Lakner4 1Fraunhofer IPMS, Dresden, Germany 2,3,4Fraunhofer IPMS, Dresden, Germany

17:35 – 17:55 Or0402

Optical and Structural Characteristics of Ion-Plated Nb2O5- and HfO2-Films Antje Hallbauer1, Daniel Huber2, Frederik Klauser3, Andrea Kunz4

,

Richard Tessadri5, Hans K. Pulker6 1University of Innsbruck, Institute of Ion Physics and Applied Physics, Innsbruck, Austria 2,3,4,5,6University of Innsbruck, Innsbruck, Austria

17:55 – 18:15 Or0403

ADSORPTION PROPERTIES, MICROSTRUCTURE AND OPTICAL BEHAVIOUR OF TIO2 THIN FILMS PREPARED BY PECVD Ana Borrás1

, Agustín R. González-Elipe2, Angel Barranco3

, José Cotrino4 1Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Sevilla), Sevilla, Spain 2,3,4Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Sevilla), Sevilla, Spain

18:15 – 18:35 Or0404

Highly Textured Tungsten Disulfide WS2 Absorber Layers for Thin Film Solar Cells Prepared by Rapid Crystallization of Amorphous WS3+x Films Klaus Ellmer1, Stefan Seeger2, Stephan Brunken3

, Rainald Mientus4 1Hahn-Meitner-Institut, Berlin, Germany 2,3Hahn-Meitner-Institut Berlin, Germany 4Optotransmitter-Umweltschutz-Technologie e.V. Berlin, Germany

PSE 2006 15

Monday, September 11th, afternoon Room Richard-Strauss

18:35 – 18:55 Or0405

INFLUENCE OF a-SiOxNy THIN FILMS STRUCTURE ON THEIR ELECTRICAL PROPERTIES Farida Rebib1

, E. Tomasella2, S. Aida3

, M. Dubois4, E. Bêche5

, J. Cellier6, M. Jacquet7 1Laboratoire des Matériaux Inorganiques, Université Clermont-Ferrand, Aubiere, France 2,4,6,7Laboratoire des Matériaux Inorganiques, UMR CNRS 6002, Université Clermont-Ferrand, 24 Avenue des Landais, 63177 Aubière cedex, France 3Laboratoire de couches minces et interfaces, Université Mentouri, route de Ain El Bey, 25000 Constantine, Algérie 5PROMES-CNRS, Odeillo, 66125 Font-Romeu cedex, France

16 PSE 2006

Monday, September 11th, afternoon Room Zugspitze

14 :20 – 15 :05 Plenary Lecture Pl01, Room Richard-Strauss



Oral Session Session 5: PVD Chairmen: R. Tietema, Venlo, Netherlands P. Hovsepian, Sheffield, United Kingdom


STABILITY OF REACTIVE MAGNETRON DISCHARGES Alain Billard

LSGS - INPL, Nancy, France

17:15 – 17:35 Or0501

MAGNETRON SPUTTERING OF FERROMAGNETIC TARGETS USING HIGH PRODUCTIVITY TECHNOLOGY-LOOP Sarah Powell1, Werner Graf2, Victor Bellido-Gonzalez3

, Dermot Monaghan4

, Ken Andersen5 1GENCOA LTD, LIVERPOOL, UK 2,5ILL, GRENOBLE, FRANCE 3,4GENCOA LTD, LIVERPOOL, UK

17:35 – 17:55 Or0502

The structure and properties of magnetron sputtered Fe-Cr-Ni sigma phase coatings Bertram Mallia1

, Karl L Dahm2, Peter A Dearnley3

1University of Leeds (Mechaical engineering), Leeds, UK 2,3University of Leeds

17:55 – 18:15 Or0503

SYNTHESIS AND CHARACTERISATION OF OXIDE CATALYSTS COATINGS Elena SEMINSKAYA1

, F. Perry2, A. Billard3

1Laboratoire de Science et Génie des Surfaces (UMR 7570), Nancy cedex, France 2PVDco s.a.r.l., Baccarat, France 3Laboratoire de Science et Génie des Surfaces, Nancy,

France

18:15 – 18:35 Or0504

New arc evaporators with very strong magnetic guiding. Effect of the magnetic field in the speed of motion of the arc spot and in the quality of deposited coatings Josu Goikoetxea1

, Josu Zuloaga2, Alberto Alberdi3, Kepa Garmendia4

,

Andoni Delgado5, Unai Ruiz de Gopegui6, Juan Bermejo7

1Fundación Tekniker, Eibar Gipuzkoa, Spain 2,3,4,5,6Fundación Tekniker, Spain 7Millennium Coatings, Italy

18:35 – 18:55 Or0505

PVD-Coating – a new solution for antistatic finishing of temperature resistant nonwovens Otmar Zimmer1, Elke Schmalz2 1Fraunhofer Institut für Werkstoff- und Strahltechnik (IWS), Dresden, Germany 2Sächsisches Textilforschungsinstitut e.V, Chemnitz, Germany

PSE 2006 17

Monday, September 11th, afternoon Room Olympia

14 :20 – 15 :05 Plenary Lecture Pl01, Room Richard-Strauss



Oral Session Session 6: Barrier and Protective Coatings Chairmen: N. Schiller, Dresden, Germany R. d'Agostino, Bari, Italy


Plasma-assisted growth of moisture diffusion barrier films on polymers: from chemical vapour deposition to atomic layer deposition Mariadriana Creatore1

, E. Langereis2, S.B.S. Heil3, M.C.M. van de

Sanden4, W.M.M. Kessels5

1Eindhoven University of Technology, Dept. of Applied Physics, Eindhoven, The

Netherlands 2,3,4,5Eindhoven University of Technology, Dept. of Applied Physics,

Eindhoven, The Netherlands

17:15 – 17:35 Or0601

Low temperature atmospheric PE-CVD process for deposition of oxygen barrier coatings on plastic foils Dirk Vangeneugden1

, A.N. Hubacz2, E. Hurme3

, J. Vartiaenen4, K. Rose5

,

M. Dubreuil6, R. Rego7, S. Paulussen8

, J.C.M. Marijnissen9 1VITO - Flemish Institute for Technological Research, Mol, Belgium 2,9Delft University of Technology, Delft, The Netherlands 3,4VTT Biotechnology, Espoo, Finland 5Fraunhofer-Institut fuer Silicatforschung, Wuerzburg, Germany 6,7,8VITO, Flemish Institute for Technological Research, Mol, Belgium

17:35 – 17:55 Or0602

Determination of N atom transmission through polymeric membranes in Nitrogen flowing post discharges. Sandrine Villeger1, J. Durand2

, A. Ricard3 1Centre de physique des plasmas et de leur applications, Toulouse, France 2Institut europeen des membrane, Montpellier France 3Centre de physique des plasmas et de leur applications, Toulouse , France

17:55 – 18:15 Or0603

Investigation of diffusion barrier coating process of PET bottles by means of mass spectrometry Michael Deilmann1

, Peter Awakowicz2, Reinhold Kovacs3

1Ruhr-Universität Bochum, Electrical Egineering and Plasma Technology, Bochum, Germany 2Ruhr-Universität Bochum, Electrical Egineering and Plasma Technology, Bochum, Germany 3

Aurion Anlagentechnik GmbH, Seligenstadt, Germany

18:15 – 18:35 Or0604

Gas barrier film formation with droplet-free metal ion source Keiji Nakamura1

, Yuki Nishido2 1Chubu University, Kasugai, Aichi, Japan 2Chubu University

18:35 – 18:55 Or0605

Hydrogen-free Silicon Nitride films as Hard Disk Protective Coating Prepared Using Plasma-enhanced Magnetron Sputtering Chuang Dong1

, Xinlu DENG2, Wenq LU3

, Wanyu DING4, Jun XU5

1Dalian University of Technology, Dalian, China 2,3,4,5State Key Lab of Materials

Modification, Dalian University of Technology, Dalian 116024, P. R. China

18 PSE 2006

PSE 2006 19

MKS Instruments Deutschland GmbHSchatzbogen 43, 81829 München, Tel 089-4200080, Fax 089-424106http:// www.mksinst.com, e-mail: [email protected]

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hochgenaue und gasartunab-hängige Messung mit denkorrosionsbeständigenBaratron Kapazitätsmanometer

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20 PSE 2006

Print ISSN 0947-076X Online ISSN 1522-24542006. Volume 18, 6 Ausgaben

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PSE 2006 21

Magnetron Tools & EquipmentReady to Marketwww.vonardenne.biz

22 PSE 2006

Tuesday, September 12th, morning Room Richard-Strauss


Chairman: Ch. Oehr, Stuttgart, Germany PLASMA POLYMERIZATION FOR BIOMEDICAL APPLICATIONS Riccardo d’Agostino

Deapartment of Chemistry, University of Bari, Italy, Bari, Italy

Oral Session Session 7: Carbon-based Coatings Chairmen: K. Bewilogua, Braunschweig, Germany T. Krug, Venlo, Netherlands


Large area coatings of nanocrystalline diamond at low temperature Yoshinori Koga1

, M. Hasegawa2, K. Tsugawa3

, M. Ishihara4, T.

Nakamura5 1Research Center for Advanced Carbon Materials, AIST, Ibaraki, Japan 2,3,4,5Research Center for Advanced Carbon Materials, AIST, Ibaraki, Japan

09:55 – 10:15 Or0701

Properties of magnetron sputtered diamond-like carbon coatings Markus Kahn

JOANNEUM RESEARCH Forschungsgesellschaft mbH, Laser Center Leoben, Niklasdorf, Austria

10:15 – 10:35 Or0702

Properties and wear performance of DLC coatings on polymer substrates Mari Tanttari1, T. Kääriäinen2

, D. C. Cameron3, M. Rahamathunnisa4

1ASTRaL, Lappeenranta University of Technology, Mikkeli, Finland 2,3,4

ASTRaL/LUT, Mikkeli, Finland

10:35 – 10:55 Or0703

Tribological performance of reactively sputtered a-C:H coatings in ambient air and aqueous environment Marc Diesselberg1

, H.-W. Zoch2, H.-R. Stock3

1IWT - Foundation Institute for Materials Science, Bremen, Germany 2,3IWT - Foundation Institute for Materials Science, Bremen, Germany


11:15 – 11:35 Or0704

THERMAL STABILITY OF DLC COATINGS IN OXIDANT AND PROTECTIVE ATMOSPHERES Cristina Louro1

, N.J. M. Carvalho2, A. Cavaleiro3

, C. Moura4 1ICEMS-Dep. Eng. Mecânica-FCTUC, Universidade de Coimbra, Coimbra, Portugal 2,3,4Dep. Eng. Mecânica - Polo II, Universidade de Coimbra, Coimbra, Portugal

11:35 – 11:55 Or0705

CNx deposition using pulsed glow discharge in nitrogen Takeshi Tanaka1

, Yoshiyuki Suda2, Igor Levchenko3

, KenYukimura4 ToshinoriTakagi5 1Hiroshima Institute of Technology, Hiroshima, Japan 2Graduate School of Information and Technology/Hokkaido University,Sapporo, Japan 3

School of Physics/The University of Sydney, Sydney, Australia 4Department of Electrical Engineering/Doshisha University, Kyoto , Japan 5Department of Electronics and Phonic Systems Engineering/Hiroshima Institute of Technology, Hiroshima, Japan

11:55 – 12:15 Or0706

Influence of the acetylene flow and substrate bias on the composition, hardness and compressive stress in Tungsten-DLC coatings Rafael Pujada1

, Guido Janssen2 1Delft University of Technology, Delft, The Netherlands 2Delft University of Technology, The Netherlands

PSE 2006 23

Tuesday, September 12th, morning Room Richard-Strauss

12:15 – 12:35 Or0707

CARBON BLACK MODIFICATION BY COLD PLASMA: A FREE NOBEL METAL CATALYST FOR FUEL CELLS. Salvador Borrós1

, Nuria Tricás Rosell2, Juan Herranz Salanyer3 1GEMAT, Institut Químic Sarrià, URL, Barcelona, Spain 2,3GEMAT, Institut Químic Sarrià, URL, Barcelona, Spain

12:35 – 12:55 Or0708

Poly- and nanocrystalline diamond films produced by microwave plasma CVD: structure and properties Victor Ralchenko1

, V. Konov2, A. Saveliev3

, A. Popovich4, I. Vlasov5

, E. Zavedeev6

, A. Khomich7, S. Dub8

1A.M. Prokhorov General Physics Institute RAS, Moscow, Russia 2,3,4,5,6

A.M. Prokhorov General Physics Institute RAS, Moscow, Russia 7Institute of RadioEngineering and Electronics RAS, Fryazino, Russia 8Institute for Superhard Materials, Kiev, Ukraine

24 PSE 2006

Tuesday, September 12th, morning Room Zugspitze

08:30 – 09:15 Plenary Lecture Pl02, Room Richard Strauss

Oral Session Session 8: Pulsed Plasma Processing Chairmen: J. Vlcek, Plzen, Czech Republic V. Kirchhoff, Dresden, Germany


The Influence of Pulse Frequency on Deposition Rate and Power Dissipation during Pulsed Magnetron Sputtering Peter Kelly1

, M Audronis2, AA Onifade3

, Y Zhou4, JW Bradley5

1Manchester Metropolitan University, Manchester, UK 2University of Sheffield, UK 3University of Salford, UK 4Anshan University of Science and Technology, China 5University of Liverpool, UK

09:55 – 10:15 Or0801

Effect of pulsing the magnetron on the plasma and the resulting structure and properties of Cr-Al-N and Ti-C thin films produced in a closed field configuration J. Lin1

, J.M. Anton2, J.J. Moore3

, B. Mishra4, W.D. Sproul5, J.A. Rees6

1ACSEL, Colorado School of Mines, Golden, Colorado, USA 2,3,4

ACSEL, Colorado School of Mines, Golden, Colorado, USA 5Reactive Sputtering Consulting, LLC, 3324 South Lemay Avenue, Fort Collins, Colorado, USA 6Hiden Analytical LTD, Warrington, England

10:15 – 10:35 Or0802

Influence of Different Pulse Modi on the Plasma Properties in a Dual Magnetron Discharge Th. Dunger1, R. Kleinhempel2, F. Richter3, Th. Welzel4, H. Kupfer5, J. Lukas6

, B. Graffel7 1Chemnitz University of Technology, Institute of Physics, Chemnitz, Germany

2,3,4,5,7Chemnitz University of Technology, Institute of Physics 6University of West

Bohemia, Plzen, Czech Republic

10:35 – 10:55 Or0803

Optical imaging of pulsed magnetron plasmas Gregory Clarke1

, P J Kelly2, J W Bradley3

, N. St J Braithwaite4, P Bryant5

1Manchester Metropolitan University, UK, Manchester, UK 2Manchester Metropolitan University, UK 3,5University of Liverpool, UK 4The Open University, UK


11:15 – 11:35 Or0804

Effect of pulse mode and anode configuration on substrate bombardment and layer properties in reactive pulse magnetron sputtering Daniel Glöß1

, Peter Frach2, Hagen Bartzsch3

, Olaf Zywitzki4, Thomas Modes5

, Klaus Goedicke6 1Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik (FEP), Dresden, Germany 2,3,4,5,6Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik (FEP), Dresden, Germany

11:35 – 11:55 Or0805

SiOx thin films deposited in continuous and pulsed plasma: comparison of their corrosion protective properties Sabrina Grassini1, Emma Angelini2, Francesco Fracassi3, Stefania Laera4

, Andrea Palma5, Francesco Rosalbino6

, Fabio Palumbo7 1Politecnico di Torino, Torino, Italy 2,5,6

Politecnico di Torino, Torino, Italy 3,4Università di Bari, Bari, Italy 7IMIP-CNR, Bari, Italy

PSE 2006 25

Tuesday, September 12th, morning Room Zugspitze

11:55 – 12:15 Or0806

Comparative study of films deposited from HMDSO/O2 in pulsed rf discharges Lenka Zajickova1

, V. Bursikova2, D. Franta3

, J. Bursik4, A. Bousquet5, T.

Begou6, A. Granier7, B. Beche8

, A. Goullet9 1Department of Physical Electronics, Masaryk University, Brno, Czech Republic 2,3Department of Physical Electronics, Masaryk University, Brno, Czech Republic 4Institute of Physics of Materials, Academy of Sciences of the Czech Republic, Brno, Czech Republic 5,6,7,8,9Laboratory of Plasmas and Thin Films, University of Nantes, Nantes, France

12:15 – 12:35 Or0807

REACTIVE GAS CONTROL DURING MgO DEPOSITION IN PULSED PLASMA MAGNETRON SPUTTERING DEPOSITION Victor Bellido-Gonzalez1

, Benoit Daniel2, Sarah Powell3 1GENCOA LTD, Liverpool, UK 2,3GENCOA LTD, Liverpool, UK

12:35 – 12:55 Or0808

STUDIES OF STRUCTURE AND PROPERTIES OF COATINGS ON Co-Cr BASE AFTER DUPLEX TREATMENT Victor Bellido-Gonzalez1

, Benoit Daniel2, Sarah Powell3 1GENCOA LTD, Liverpool, UK 2,3GENCOA LTD, Liverpool, UK

26 PSE 2006

Tuesday, September 12th, morning Room Olympia


Oral Session Session 9: Transparent and Photocatalytic Oxides Chairmen: S. Zhang, Singapore, Republic of Singapore G. Bräuer, Braunschweig, Germany


Transparent Conductive Oxide Thin Films. Recent Developments and Future Perspectives Subrahmanyam Aryasomayajula

Indian Institute of Technology Madras, Chennai, India

09:55 – 10:15 Or0901

RF-superimposed DC and Pulsed DC sputtering for Deposition of ITO and ZnO Joachim Mueller1, Mark Lutz2

, Thomas Linz3, Michael Stowell4, Manfred

Ruske5, Julian Schwenzel6

1Advanced Energy Industries GmbH, Filderstadt, Germany 2,3

Advanced Energy Industries GmbH, Filderstadt, Germany 4Applied Films Corporation 5,6

Applied Films GmbH&Co.KG, Alzenau, Germany

10:15 – 10:35 Or0902

Effect of hydrogen on reactive sputtering of transparent oxide films Vaclav Ondok1

, Jindrich Musil2 1University of West Bohemia, Plzen, Czech Republic 2University of West Bohemia, Plzen, Czech Republic

10:35 – 10:55 Or0903

Properties of Indium Tin Oxide (ITO) Thin Films and their Correlation to the Process Parameters in Pulsed Dual Magnetron Discharges Ronny Kleinhempel1, Benjamin Graffel2, Jan Lukas3

, Hartmut Kupfer4, Thoralf Dunger5, Thomas Welzel6, Frank Richter7 1Chemnitz University of Technology, Inst. of Physics, D-09107 Chemnitz, Chemnitz,

Germany 2,4,5,6,7Chemnitz University of Technology, Institute of Physics, 09107 Chemnitz,

Germany 3University of West Bohemia, Univerzitni 8, 30614 Plzen, Czech Republic


11:15 – 11:35 Or0904

Deposition of fluorine doped tin oxide thin films on polycarbonate windows by PECVD for antifouling protection Marie Jubault1, Jérôme Pulpytel2, Hubert Cachet3, Farzaneh Arefi-Khonsari4 1Laboratoire de génie des procédés plasma et traitement de surface, Paris, France 2,4Laboratoire de génie des procédés plasmas et traitement de surface 3Laboratoire interfaces et systèmes électrochimiques

11:35 – 11:55 Or0905

Novel transparent conductive Al: ZnO thin film prepared by metal vapor vacuum arc Jiunn-Der Liao1

, Chi-Yuan Kao2, Chia-Wei Chang3

, Charlie S. F. Chang4,

Song-Mao Chiu5 1Dept. Materials Science and Engineering, National Cheng Kung Univ., Tainan, Taiwan (ROC) 2,3Dept. Materials Science and Engineering, Tainan, Taiwan (ROC) 4Duratek Incorp., Shin-Chu, Taiwan (ROC) 5Metal Industries Research and Development Center, Kaoshiung, Taiwan (ROC)

PSE 2006 27

Tuesday, September 12th, morning Room Olympia

11:55 – 12:15 Or0906

Flux of positive ions and film growth in reactive sputtering of Al-doped ZnO thin films Florian Ruske1

, Wolfgang Werner2, Bernd Szyszka3, Volker Sittinger4,

Ruben Wiese5 1Fraunhofer IST, Braunschweig, Germany 2,3,4Fraunhofer IST, Braunschweig, Germany 5INP, Greifswald, Germany

12:15 – 12:35 Or0907

Optimization of reactive pulsed magnetron sputtering for epitaxial growth of undoped ZnO films Anatoly Rogozin1

, M. Vinnichenko2, N. Shevchenko3

, A. Kolitsch4, W.

Moeller5 1Inst.of Ion Beam Phys. and Mater. Research, FZR, Dresden, Germany 2,3,4,5Inst.of Ion Beam Phys. and Mater. Research, FZR, Dresden, Germany

12:35 – 12:55 Or0908

Photocatalytic properties of TiO2 films prepared by magnetron sputtering David Herman1

, Jindrich Musil2, Jan Sicha3 1University of West Bohemia, Plzen, Czech Republic 2,3University of West Bohemia, Plzen, Czech Republic

28 PSE 2006

Tuesday, September 12th, afternoon Room Richard-Strauss


Chairman: U. Helmersson, Linköping, Schweden HIGH-POWER HIGH-RATE PULSED MAGNETRON SPUTTERING Jaroslav Vlcek

University of West Bohemia, Plzen, Czech Republic

Oral Session Session 10: Biocompatible Coatings and Surfaces Chairmen: Ch. Oehr, Stuttgart, Germany P. Favia, Bari, Italy


Low Pressure plasma decontamination and sterilisation of surfaces Francois Rossi1, Ondrej Ylian2

, Marina Hasiwa3 1Joint Research Centre, ISPRA (VA), Italy 2,3

Joint Research Centre

15:45 – 16:05 Or1001

Biocompatible Ti-based Multicomponent Coatings for Load-Bearing Implants Dmitry Shtansky1

, T.G. Moizhess2, M.A. Kharitonova3

, N.A. Gloushankova4

, E.A. Levashov5, F.V. Kiryukhantsev-Korneev6

, A.N. Sheveiko7

, I.A. Bashkova8, I.V. Reshetov9

, A.S. Grigor’yan10 1Moscow State Institute of Steel and Alloys (Technological University), Moscow, Russia 2,3,4

Cancer Research Center of RAMS, Moscow 115487, Russia 5,6,7,8Moscow State Institute of Steel and Alloys, 119049, Russia 9P.A. Hertsen Moscow Research Oncological Institute, 125248, Russia 10

Central Research Dental Institute, Russia

16:05 – 16:25 Or1002

Biocompatibility of Doped Diamond Like Carbon Coatings for Medical Implants Götz Thorwarth1

, C. Hammerl2, M. Kuhn3, B. Saldamli4, C. Leiggener5, R.

Sader6, W. Assmann7, M. Haeberlen8

, F. Schwarz9, B. Stritzker10

1Experimentalphysik IV, Institut für Physik, Universität Augsburg, Augsburg, Germany

2,3AxynTeC Dünnschichttechnik GmbH, Augsburg, Germany 4,5

Clinic for Reconstructive Surgery, Unit for Maxillofacial Surgery, University Hospital Basel, Switzerland 6Clinic for Cranio-Maxillofacial Surgery, Johann Wolfgang Goethe University, Frankfurt am Main, Germany 7MLL/Beschleunigerlaboratorium der LMU und TU München, Garching, Germany 8,9,10Lehrstuhl für Experimentalphysik IV, Institut für Physik, Universität Augsburg, Augsburg, Germany

16:25 – 16:45 Or1003

Multi-step process to improve the long-term stability of coated coronary stents Diego Mantovani1, François Lewis2

, Maryse Touzin3, Stephane Turgeon4

,

Gaetan Laroche5 1Laboratory for Biomaterials and Bioengineering, Laval University, Quebec City, Canada 2,3,4,5Laboratory for Biomaterials and Bioengineering, Laval University, Quebec City, Canada


17:15 – 17:35 Or1004

A comparative study of characteristics of SiOxCyHz, TiOx and SiO-TiO oxide based biocompatible coatings Ram Prasad1

, Stephen Daniels2, D.C. Cameron3

1National Centre for Plasma Science and Technology ,DCU, Dublin, Ireland 2National Centre for Plasma Science and Technology (NCPST), Ireland 3ASTRaL, Lappeenranta University of Technology, Finland

PSE 2006 29

Tuesday, September 12th, afternoon Room Richard-Strauss

17:35 – 17:55 Or1005

THIN PHOTOCATALYTIC TIO2 DEPOSITS: IMPACT ON BIOADHESION AND CELL VIABILITY Allion Audrey1

, Choquet2 Archambeau3, Damasse4

1Ugine & Alz Research Center, Isbergues, France 2,3I-R&D - Arcelor Flat Steel Europe, Liège, Belgium 4Ugine & Alz Research Center, Isbergues, France

17:55 – 18:15 Or1006

A Study on Fluorocarbon Plasma Coatings with Respect to the Interaction with Mammalian Cells Jakob Barz1

, Kai Busch2, Michael Haupt3, Christian Oehr4, Michaela

Weimer5 1Fraunhofer Institute for Interfacial Engineering and Biotechnology, Stuttgart, Germany 2,3,4,5Fraunhofer Institute for Interfacial Engineering and Biotechnology, Stuttgart, Germany

18:15 – 18:35 Or1007

THE SURFACE PROPERTIES AND BIOLOGICAL RESPONSE TO COATINGS DEPOSITED BY VARIOUS METHODS IN VITRO AND IN VIVO TESTS Anna Zykova1

, L.F. Sukhodub2, V.I. Safonov3

, V.V. Luk’yanchenko4 1Institute of Surface Engineering, Kharkov, Ukraine 2Institute of Applied Physics, Sumy, Ukraine 3Institute of Surface Engineering, Kharkov, Ukraine 4N.I.Sitenko Orthopedy and Trauma Surgery Institute Design and Construction Bureau, Kharkov, Ukraine

18:45 – 23:00 Industrial Evening, Room Werdenfels, Foyer, Restaurant


30 PSE 2006

Tuesday, September 12th, afternoon Room Zugspitze


Oral Session Session 11: Highly Ionized Pulsed Magnetron Sputtering Chairmen: U. Helmersson, Linköping, Sweden G. Erkens, Würselen, Germany


Enhancement of Coating-Substrate Adhesion by High Power Impulse Magnetron Sputtering Pretreatment Arutiun P. Ehiasarian1

, C. Reinhard2, I. Petrov3

, P.Eh. Hovsepian4, J.G.

Wen5 1Nanotechnology Centre for PVD Research, Sheffield Hallam University, Sheffield, UK 2,4Sheffield Hallam University, Sheffield, UK 3,5University of Illinois at Urbana Champaign,

USA

15:45 – 16:05 Or1101

Reactive Sputter Deposition of TiN by High Power Impulse Magnetron Sputtering – Plasma and Film Characterisation Martina Lattemann1

, U. Helmersson2, J. Bohlmark3

1Linköping University, IFM - Material Physics, Linköping, Sweden 2,3Linköping University, IFM - Material Physics, Linköping, Sweden

16:05 – 16:25 Or1102

Enhancement of film properties and control of deposition rate of CrN films grown by reactive high power pulsed magnetron sputtering Jones Alami1, M. Wuttig2

, P. Karimi3, K. Sarakinos4 1I. Physikalisches Institut der RWTH Aachen IA, Aachen, Germany 2,3,4I. Physikalisches Institut der RWTH Aachen IA, Aachen, Germany

16:25 – 16:45 Or1103

Ion flux characteristics and ionization degree of sputtered particles in high-power pulsed magnetron sputtering Pavel Kudlacek1

, Jaroslav Vlcek2, Jindrich Musil3, Kristyna Burcalova4

,

Jan Lukas5 1University of West Bohemia, Plzen, Czech Republic 2,3,4,5University of West Bohemia, Plzen, Czech Republic


17:15 – 17:35 Or1104

Plasma diagnostic and characterization of titanium oxide thin films synthesized by high-power pulsed magnetron sputtering. Stephanos Konstantinidis1

, A. Tromont2, M. Hecq3, J.P. Dauchot4, A.

Ricard5 1Materia Nova, Mons, BELGIUM 2,3Laboratoire de Chimie Inorganique et Analytique, Université de Mons-Hainaut, Mons, Belgium 4Laboratoire de Chimie Inorganique et Analytique, Materia Nova, Mons, Belgium 5CPAT, Université Paul Sabatier,Toulouse, France

17:35 – 17:55 Or1105

Simulation of neutral particle flow during high power magnetron impulse Stanislav Kadlec

Staccato Consulting, Praha 5, Czech Republic

PSE 2006 31

Tuesday, September 12th, afternoon Room Zugspitze

17:55 – 18:15 Or1106

Analysis of the transport of neutral and ionic metallic species in Highly Ionized Sputter Deposition Processes. Jean Bretagne1

, J.C. Imbert2, L. de Poucques3, C. Boisse-Laporte4

, L. Teulé-Gay5

, M. Ganciu6, M. Touzeau7

1Laboratoire de Physique des Gaz et Plasmas CNRS - Univ. Paris-Sud, ORSAY Cedex, France 2,3,4,5,6,7Laboratoire de Physique des Gaz et Plasmas CNRS - Univ. Paris-Sud

18:15 – 18:35 Or1107

High Deposition Rate Magnetrons /HDRM/ - an Innovative Surface Engineering Technology for the XXI Century Ernst Sharipov1

, Valery MITIN2, Alexey MITIN3

1Cinncotec Company, Moscow, Russian Federation 2,3

Cinncotec, Moscow, Russia

18:45 – 23:00 Industrial Evening, Room Werdenfels, Foyer, Restaurant


32 PSE 2006

Tuesday, September 12th, afternoon Room Olympia


Industrial Workshop

Successful Application of Plasma and Ion-based Processes Chairmen: R. Grün, Siegen, Germany R. Shimshock, Society of Vacuum Coaters, USA

15:15 – 15:25 Introduction

Transfer of Plasma Technologies from Research to Industrial Application Reinar Grün

Plasmatechnik Grün GmbH, Siegen, Germany

15:25 – 15:45 IW1

On the Way to Higher Productivity in Large Scale PVD Coating of Engineering Components Wolf-Dieter Münz

Systec Vacuum Systems, Karlstadt a.M., Germany

15:45 – 16:05 IW2

Expertise from one source: About the successful implementation of innovative PVD-CVD technology on tools, moulds and components Alessandro Farinotti1, C. Carini2 1Lafer Revistimenti pvd-cvd SpA, Borghetto di Roncaglia, Italy 2Lafer Revistimenti pvd-cvd SpA, Borghetto di Roncaglia, Italy

16:05 – 16:25 IW3

ENHANCING THE PERFORMANCE OF ROLLING ELEMENT BEARINGS WITH NANOCOMPOSITE TRIBOLOGICAL COATINGS Ryan D. Evans1

, Gary L. Doll2 1Timken Technology Center, North Canton, OH, USA 2Timken Technology Center, North Canton, Ohio (USA)

16:25 – 16:45 IW4

Enhancing plasma process success with innovations in power supplies and mass flow controllers David J. Christie1

, R.M. McDonald2 1Advanced Energy Industries, Inc., Fort Collins, Colorado, USA 2Advanced Energy

Industries, Inc., Fort Collins, Colorado, USA


17:15 – 17:35 IW5

Hydrogenated Amorphous Carbon Film Coating of PET Bottles as Gas Diffusion Barrier Naima Boutroy

SIDEL GROUP, Le Havre Cedex, FRANCE

17:35 – 17:55 IW6

New results and production trends of antireflective nanostructures for polymer optical components Martin Bitzer1, Marion Gebhardt2, Steve Scott3, Jürgen Zosel4 1Fresnel Optics GmbH, Apolda, Germany 2,4Fresnel Optics GmbH 3Reflexite Precision Technology Center

17:55 – 18:15 IW7

Amorphous carbon coatings for medical devices and tools Karin Schenk1

, Udo Grabowy2, Lisa Kleinen3

1NTTF GmbH, Rheinbreitbach, Germany 2NTTF GmbH, Rheinbreitbach, Germany 3Kaiserslautern University of Technology, Rheinbreitbach, Germany

PSE 2006 33

Tuesday, September 12th, afternoon Room Olympia

18:15 – 18:35 IW8

The application of a magnetron sputter technology for the production of antibacterial nonwovens Thomas Ruehle1

, A. Gruber2, D. W. Schubert3, J. Haller4, T. Schindler5, H. Hilgers6

, M. Fahland7 1Freudenberg Forschungsdienste KG, Weinheim, Germany 2,3Freudenberg Forschungsdienste KG, Weinheim, Germany 4,5Freudenberg Haushaltsprodukte KG, Weinheim, Germany 6Nanofunk, Mainz, Germany 7Fraunhofer IEP, Dresden, Gremany

34 PSE 2006

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PSE 2006 35

36 PSE 2006

PSE 2006 37

Wednesday, September 13th, morning Room Richard-Strauss


Chairman: A. Matthews, Sheffield, United Kingdom Surface technology with cold microplasmas Claus-Peter Klages1

, Marko Eichler2, Michael Thomas3 1Fraunhofer-Institut für Schicht- und Oberflächentechnik (IST), Braunschweig, Germany 2,3Fraunhofer-Institut für Schicht- und Oberflächentechnik (IST)

Oral Session Session 12: Atmospheric Plasma Processing, Spraying I Chairmen: J. Heberlein, Minnesota, USA A. Ohl, Greifswald, Germany


Atmospheric Pressure Plasmas for Continuous Thin Film Deposition and Etching Volkmar Hopfe1

, David W. Sheel2 1Fraunhofer Institute Material and Beam Technology, Dresden, Germany 2Institute for Materials Salford University, Manchester, UK

09:55 – 10:15 Or1201

Atmospheric pressure PECVD of fluorocarbon coatings from glow dielectric barrier discharges Fiorenza Fanelli1, Francesco Fracassi2, Riccardo d'Agostino3 1Department of Chemistry, University of Bari, IMIP-CNR, Bari, Italy 2,3Department of Chemistry, University of Bari, IMIP-CNR, Bari, Italy

10:15 – 10:35 Or1202

Diagnostics of SiCOH-Film-Deposition in the Dielectric Barrier Discharge at Atmospheric Pressure Igor Vinogradov1

, D. Zimmer2, A. Lunk3 1Institute for Plasma Research, Stuttgart, Germany 2,3Institute for Plasma Research, Stuttgart, Germany

10:35 – 10:55 Or1203

Atmospheric pressure barrier discharge deposition of silica-like films on polymeric substrates Serguei Starostine1

, H. de Vries2, E. Aldea3

, M.C.M. van de Sanden4,

M.A. Creatore5 1Eindhoven University of Technology, Eindhoven, The Netherlands 2Fuji Photo Film, TRL,

Tilburg, The Netherlands 3,4,5Eindhoven University of Technology, Department of Applied

Physics, Eindhoven, The Netherlands


11:15 – 11:35 Or1204

Deposition of siloxane based anticorrosion layers on galvanized steel by atmospheric pressure dielectric barrier discharge plasma Julien Bardon1

, J. Bour2, R. Dams3, S. Paulussen4

, R. Rego5, D.

Vangeneugden6, D. Ruch7

1Centre de Recherche Public Henri Tudor (CRPHT), Esch sur Alzette, Luxembourg

2,7Centre de Recherche Public Henri Tudor (CRPHT), Esch sur Alzette, Luxembourg

3,4,5,6Vlaamse Instelling voor Technologisch Onderzoek (VITO), Mol, Belgium

11:35 – 11:55 Or1205

Properties of siloxane coatings deposited in a reel-to-reel atmospheric pressure plasma system Barry Twomey1

, L.-A. O'Hare2, L. O'Neill3, G. Byrne4

, D. Dowling5 1UCD, Dublin, Ireland 2,3Dow Corning, Cork, Ireland 4,5UCD, Dublin, Ireland

38 PSE 2006

Wednesday, September 13th, morning Room Richard-Strauss

11:55 – 12:15 Or1206

Atmospheric pressure plasma treatment of glass fibre composite for adhesion improvement Yukihiro Kusano1

, H. Mortensen2, B. Stenum3

, P. Kingshott4, T. L. Andersen5

, P. Brøndsted6, B. F. Sørensen7

, H. Bindslev8 1Risø National Laboratory, Roskilde, Denmark 2,3,4,5,6,7,8Risø National Laboratory, Roskilde, Denmark

12:15 – 12:35 Or1207

Formation Mechanism of Mixed Oxide Phases in PEO Coatings Aleksey L. Yerokhin1

, A. Matthews2, L.O. Snizhko3

, A. Leyland4, N.L.

Gurevina5, D.O. Misnyankin6

, A. Pilkington7 1University of Sheffield, Sheffield, UK 2,4,7University of Sheffield, Sheffield, UK 3,5,6Ukrainian State University for Chemical Engineering, Dnepropetrovsk, Ukraine

12:35 – 12:55 Or1208

Porous Oxide Films with Catalytic Activity Produced by Plasma Electrolysis Lyubov Snizhko1

, A.L. Yerokhin2, D.O. Misnyankin3

, A. Pilkington4, N.L.

Gurevina5, A. Matthews6

1Ukrainian State University for Chemical Engineering, Dnepropetrovsk, Ukraine 2,4,6University of Sheffield, Sheffield, UK 3,5Ukrainian State University for Chemical Engineering, Dnepropetrovsk, Ukraine

PSE 2006 39

Wednesday, September 13th, morning Room Zugspitze


Oral Session Session 13: Surface Interaction and Growth Modelling Chairmen: H. Störi, Vienna, Austria E. Schultheiß, Dresden, Germany


Elementary Mechanisms in the Interaction of Plasmas with Biological Systems Achim von Keudell1, J. Opretzka2

, J. Benedikt3, A. Yanguas-Gil4, J. Wunderlich5 1Ruhr-University Bochum, Bochum, Germany 2,3,4Ruhr-University Bochum, Bochum, Germany 5Fraunhofer Institute for Packaging Technology, Freising, Germany

09:55 – 10:15 Or1301

Ion bombardment effects at surfaces and interfaces in a low-pressure plasma environment Aram Amassian1

, Ludvik Martinu2, Patrick Desjardins3

1Department of Engineering Physics, Ecole Polytechnique de Montreal, Montreal, Canada 2,3Department of Engineering Physics and regroupement quebecois sur les materiaux de pointe (RQMP), Ecole Polytechnique de Montreal, Montreal, Canada

10:15 – 10:35 Or1302

Modelling of magnetron sputtering with reactive gas pulsing process Tomas Kubart1, S. Berg2

, T. Nyberg3, T. Polcar4, N. Parreira5

, A. Cavaleiro6

, O. Kappertz7 1The Ångström Laboratory, Uppsala University, Uppsala, Sweden 2,3,7The Ångström Laboratory, Uppsala University, Uppsala, Sweden 4,5,6ICEMS – Faculdade de Ciências e Tecnologia da Universidade de Coimbra, Coimbra, Portugal

10:35 – 10:55 Or1303

Real-time in-situ analysis of target poisoning during reactive magnetron sputtering by nuclear reaction analysis and energy resolved mass spectroscopy Dominik Güttler1, B. Abendroth2

, R. Grötzschel3, W. Möller4 1Forschungszentrum Rossendorf, Dresden, Germany 2,3,4Forschungszentrum Rossendorf, Dresden, Germany


11:15 – 11:35 Or1304

Determination of plasma parameters during deposition of ZnO-films with ceramic and metallic targets and correlation with film parameters Ruben Wiese1

, Holger Kersten2, Florian Ruske3

, Volker Sittinger4, Richard Menner5, Mario Hannemann6 1Institut für Niedertemperatur-Plasmaphysik Greifswald, Greifswald, Germany 2,6INP Greifswald, Germany 3,4IST Braunschweig, Germany 5ZSW Stuttgart, Germany

11:35 – 11:55 Or1305

Effects of water in the vacuum on the growth of crystalline alumina thin films Erik Wallin1

, J.M. Andersson2, M. Lattemann3

, U. Kreissig4, U.

Helmersson5 1IFM - Material Physics, Linköping University, Linköping, Sweden 2,3,5IFM - Material Physics, Linköping University, Linköping, Sweden 4Institute for Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, Dresden, Germany

40 PSE 2006

Wednesday, September 13th, morning Room Zugspitze

11:55 – 12:15 Or1306

Plasma cleaning: plasma removal of organic contaminations Richard Murillo1

, Yvan Segui2 1Laboratoire de Génie Electrique de Toulouse, Toulouse, France 2Laboratoire de Génie Electrique de Toulouse, Toulouse, France

12:15 – 12:35 Or1307

New Si-B-C-N coatings: Ab-initio calculations and experimental verification Jiri Houska1

, Jaroslav Vlcek2, Jiri Kalas3

, Stanislav Hreben4, Marcela

M.M. Bilek5, David R. McKenzie6

1University of West Bohemia, Czech Republic, Plzen, Czech Republic 2,3,4University of West Bohemia, Czech Republic 5,6The University of Sydney, Australia

12:35 – 12:55 Or1308

Novel Model for Film Formation in Plasma Processing Leonid Shaginyan1

, Jeon-Geon Han2, J. Musil3

1Institute for Materials Science Problems Academy Sciences of Ukraine, Kiev, Ukraine 2Center for Advanced Plasma Surface Technology SKKU Suwon Korea 3Department of Physics University of West Bohemia Plzen, Czech Republic

PSE 2006 41

Wednesday, September 13th, morning Room Olympia


Oral Session Session 14: Wear and Corrosion Resistance I Chairmen: F. Fracassi, Bari, Italy M. Fenker, Schwaebisch Gmuend, Germany


Tribological Properties of Multilayered PVD Coatings Jeon Geon Han1

, Ho Young Lee2, Young Jae3Kabseog4

1 Sungkyunkwan University, Suwon, South Korea 2Sungkyunkwan University 3Lee 4Kim

09:55 – 10:15 Or1401

Influence of different doping elements (W, V, Ti) on the properties of CrN-coatings prepared by reactive magnetron sputtering Martin Weber1, Klaus Bewilogua2

, Helge Thomsen3, Ralf Wittorf4

1Fraunhofer-Institut für Schicht- und Oberflächentechnik IST, Braunschweig, Germany 2,3,4Fraunhofer-Institut für Schicht- und Oberflächentechnik, Braunschweig, Germany

10:15 – 10:35 Or1402

Oxidation of sputtered Cu, Zr, ZrCu, ZrO2 and Zr-Cu-O films during thermal annealing in flowing air Jindrich Musil1, Martin Sasek2

, Radomir Cerstvy3, Michal Jirout4, Petr

Zeman5 1University of West Bohemia, Plzen, Czech Republic 2,3,4,5University of West Bohemia, Plzen, Czech Republic

10:35 – 10:55 Or1403

PVD hard coatings within the system Cr-B-N Karl Budna1

, P. H. Mayrhofer2, J. Neidhardt3, C. Mitterer4 1Materials Center Leoben, Leoben, Austria 2,4Department of Physical Metallurgy and Materials Testing, University of Leoben, Leoben, Austria 3Christian Doppler Laboratory for Advanced Hard Coatings, Department of Physical Metallurgy and Materials Testing, University of Leoben, Leoben, Austria


11:15 – 11:35 Or1404

FRICTION AND WEAR OF SELF-LUBRICATING W-S-C SPUTTERED COATINGS SLIDING UNDER INCREASING LOAD Tomas Polcar1, M. Evaristo2

, A. Cavaleiro3, M. Stueber4, S. Ulrich5

1ICEMS – Faculdade de Ciências e Tecnologia da Universidade de Coimbra, Coimbra, Portugal 2,3ICEMS – Faculdade de Ciências e Tecnologia da Universidade de Coimbra, Coimbra, Portugal 4,5Forschungszentrum Karlsruhe, Institute of Materials Research I, Eggenstein-Leopoldshafen, Germany

11:35 – 11:55 Or1405

Functional properties of niobium-based coatings in the ternary system Nb-O-N Martin Fenker1, P. Carvalho2

, H. Kappl3, F. Vaz4 1FEM, Dept. POT, Schwäbisch Gmünd, Germany 2,4Universidade do Minho, Dept. de Física, Guimarães, Portugal 3FEM, Dept. POT, Schwäbisch Gmünd, GERMANY

11:55 – 12:15 Or1406

Sintering behaviour of monolayer Lanthanum Zirconate and multicomponent Lanthanum Zirconate and Yttria stabilized Zirconia as EB-PVD TBC Nazlim Bagcivan1

, K. Bobzin2, E. Lugscheider3

1Surface Engineering Institute (IOT), RWTH Aachen, Aachen, Germany 2,3

Surface Engineering Institute (IOT), RWTH Aachen, Aachen, Germany

42 PSE 2006

Wednesday, September 13th, morning Room Olympia

12:15 – 12:35 Or1407

High rate deposition of nano-functionalized transparent coatings on metal and glass substrates by hollow cathode arc activated reactive evaporation Henry Morgner1, Olaf Zywitzki2, Christoph Metzner3 1Fraunhofer Institut Elektronenstrahl- und Plasmatechnik (FEP), Dresden, Germany 2,3Fraunhofer Institut Elektronenstrahl- und Plasmatechnik (FEP), Dresden, Germany

12:35 – 12:55 Or1408

Friction and wear of coated micro-linear bearings Rudolf Meeß1

, Frank Löffler2 1Physikalisch-Technische Bundesanstalt, Braunschweig, Germany 2Physikalisch-

Technische Bundesanstalt, Braunschweig, Germany

PSE 2006 43

Wednesday, September 13th, afternoon Room Richard-Strauss


Chairman: A. Cavaleiro, Coimbra, Portugal MAX Phase Thin Films Lars Hultman

Linköping University, IFM, Thin Film Group, Linköping, Sweden



Oral Session Session 15: Atmospheric Plasma Processing, Spraying II Chairmen: C.-P. Klages, Braunschweig, Germany Cor P. G. Schrauwen, Eindhoven, Netherlands


Recent advances in the research on non-equilibrium atmospheric pressure plasma jets Johann Laimer

Vienna University of Technology, Wien, Austria

17:15 – 17:35 Or1501

Design and development of Atmospheric Pressure Plasma MultiJet Sources. Jacek Kedzierski1, Markus Teschke2

, Detlef Theirich3, Juergen

Engemann4 1Microstructure Research Center – fmt, University of Wuppertal, Wuppertal, Germany 2,3,4Microstructure Research Center – fmt, University of Wuppertal, Germany

17:35 – 17:55 Or1502

Use of a High Energy Plasma to Produce Functionally Graded Composite Surface Layers on Titanium and Other Metals James Withers1

, Vladimer Shapovalov2, Roger Storm3

1Materials & Electrochemical Research Corporation, Tucson, USA 2,3MER Corporation, Tucson, USA

17:55 – 18:15 Or1503

On the potential of miniaturized non-thermal atmospheric pressure plasma jets (APPJ) Rüdiger Foest1, Klaus-Dieter Weltmann2

, Manfred Stieber3, Hartmut Lange4

, Eckhard Kindel5, Ronny Brandenburg6 1Institut für Niedertemperatur-Plasmaphysik Greifswald, Greifswald, Germany 2,3,4,5,6Institut für Niedertemperatur-Plasmaphysik Greifswald, Germany

18:30 – 23:00 Bavarian Evening, “Bayernhalle”

44 PSE 2006

Wednesday, September 13th, afternoon Room Zugspitze



Oral Session Session 16: Industrial Device Technology Chairmen: W. Fleischer, Dresden, Germany J.G. Han, Suwon, ROK


Helianthos: Roll-to-Roll deposition of flexible solar cell modules Edward Hamers1

, M.N. van den Donker2, B. Stannowski3, R. Schlatmann4

, G.J. Jongerden5 1Helianthos BV, A Nuon Company, Arnhem, the Netherlands 2Institute of Photovoltaics (IPV), Forschungszentrum Jülich GmbH, D-52425 Jülich, Germany. 3,4,5Helianthos BV, A Nuon company, Solar Cells R&D dept. CSO, Velperweg 76. PO Box 9300, 6800 SB Arnhem,

17:15 – 17:35 Or1601

ULTRA-LARGE-AREA PLASMA SOURCE FOR METERS-SCALE FLAT-PANEL-DISPLAY PROCESSING WITH PROFILE CONTROL BY INDEPENDENTLY-OPERATED MULTIPLE LOW-INDUCTANCE ANTENNA MODULES Yuichi Setsuhara1

, Akinori Ebe2, Kazuaki Nishisaka3

, Kosuke Takenaka4 1Joining and Welding Research Institute, Osaka University, Ibaraki, Osaka, Japan 2,3

EMD Corporation, Kyodai-Katura Venture Plaza, 1-36 Goryouohara-cho, Nishikyou-ku, Kyoto 615-8245, Japan 4Joining and Welding Research Institute, Osaka University, 11-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan

17:35 – 17:55 Or1602

Scaling Control of ICP-Sources Manfred Weiler

CCR GmbH, Rheinbreitbach, Germany

17:55 – 18:15 Or1603

Industrial Production of PVD Coatings for Tools and Components Thomas Krug1

, Roel Tietema2 1Hauzer Techno Coating BV, Venlo, The Netherlands 2Hauzer Techno Coating BV, Venlo, The Netherlands


PSE 2006 45

Wednesday, September 13th, afternoon Room Olympia



Oral Session Session 17: Hybrid and Duplex Processes Chairmen: P. Awakowicz, Bochum, Germany D. Cameron, Mikkeli, Finland


Trends in combining techniques for deposition of new application tailored thin films Gheorghe Dinescu1

, C. Ruset2 1National Institute for Laser, Plasma and Radiation Physics, Magurele, Bucharest, Romania 2National Institute for Laser, Plasma and Radiation Physics

17:15 – 17:35 Or1701

Tribo-mechanical properties of diamond-like carbon films deposited on plasma nitrided biomedical stainless steel Rony Snyders1

, Etienne Bousser2, Philippe Amireault3, Jolanta E. Klemberg-Sapieha4

, Ludvik Martinu5, E. Park6

, Kate Taylor7 1Polytechnic School of Montreal, Montreal, Canada 2,3,4,5Department of Engineering Physics, Ecole Polytechnique, Montreal, Quebec, Canada 6,7Medtronic, Inc., Minneapolis, MN, USA

17:35 – 17:55 Or1702

Hybrid Process to improve the properties of stainless steels Peter Kaestner1, K.-S. Klimek2

, K.-T. Rie3 1TU Braunschweig, Institut für Oberflächentechnik, Braunschweig, Germany 2,3TU Braunschweig, Institut für Oberflächentechnik, Germany

17:55 – 18:15 Or1703

Combination of Hard Protective Coatings with Electron and Laser Beam Hardening Rolf Zenker1, Anja Buchwalder2, Gundis Sacher3 1Zenker Consult, Joh.-Seb.-Bach-Str. 12, D-09648 Mittweida, Germany, Mittweida, Germany 2,3TU Bergakademie Freiberg, IWT, Gustav-Zeuner-Str. 5, D-09599 Freiberg, Germany


46 PSE 2006

2006. Volume 3, 9 IssuesISSN Print 1612-8850 ISSN Online 1612-8869

Bridging Plasma Science and Its Industrial Applications

THE interdisciplinary journal on low-temperature plasma sources and processes operating at pressures rangingfrom partial vacuum to atmospheric.

www.plasma-polymers.org

Wiley-VCHTel.: +49 (0) 6201 606 400 | Fax: +49 (0) 6201 606 184E-mail: [email protected] | www.wiley-vch.de

John Wiley & Sons, Ltd.Tel.: +44 (0) 1243 843 335 | Fax: +44 (0) 1243 843 232E-mail: [email protected] | www.wiley.com 25

7106

03_p

s

All articles that have been published in Plasma Processes and Polymers are included in the ISI ScienceCitation Index Expanded™. Plasma Processes and Polymers will receive its initial Impact Factor for 2006.

Editors-in-Chief> Riccardo d'Agostino, Dept. of Chemistry, Univ. of Bari, I> Pietro Favia, Dept. of Chemistry, Univ. of Bari, I> Christian Oehr, Dept. of Interfacial Engineering, Fraunhofer Inst.

for Interfacial Engineering and Biotechnology, Stuttgart, GER> Michael R. Wertheimer, Dept. of Engineering, Physics and

Materials Engineering, Ecole Polytechnique, Montreal, CA

Readership> Materials scientists, physicists, chemists, biologists, engineers,

health scientists, physicians – both in industry and academia.

Special Issues in 2006/2007> Highlights from the 14th International Summer School

on Vacuum, Electron and Ion Technologies (VEIT-2005), guest-edited by N. Guerassimov, Sofia, BG and W. Möller,Dresden, GER

> Proceedings of the 10th International Conference on PlasmaSurface Engineering (PSE 2006)

A selection of the most frequently downloaded articles from Wiley InterScience> Low-Temperature Plasma Processing of Materials: Past,

Present, and Future, edited by R. d'Agostino, P. Favia, C. Oehrand M. R. Wertheimer, 2005, Volume 2, Issue 1

> Soft Plasma Treated Surfaces: Tailoring of Structure and Properties for Biomaterial Applications, edited by R. Förch, Z. Zhang and W. Knoll, 2005, Volume 2, Issue 5

PSE 2006 47

48 PSE 2006

Thursday, September 14th, morning Room Richard-Strauss


Chairman: J. Patscheider, Dübendorf, Switzerland Hard yet tough nanocomposite coatings Sam Zhang1

, Deen Sun2, Huili Wang3

, Xuan Lam Bui4 1Nanyang Technological University, Singapore, Republic of Singapore 2,3,4Nanyang Technological University

Oral Session Session 18: Nanocomposite Films Chairmen: M. Lattemann, Linköping, Sweden W.-D. Münz, Karlstadt, Germany


Materials Science and Technological Aspects of Deposition of Nanoparticles Disperse-Strengthened Tribological Coatings by Magnetron Sputtering and Electrospark Methods Evgeny Levashov1

, Evgeniya Zamulaeva2, Peter Vakaev3

, Alexander Kudryashov4

, Dmitry Shtansky5 1Moscow State Institute of Steel and Alloys (Technological University), Moscow, Russia 2,3,4,5Moscow State Institute of Steel and Alloys (Technological University), Moscow, Russia

09:55 – 10:15 Or1801

Constitution and mechanical properties of sputtered films in the system Si-C-N studied by XRD, AFM, TEM, NI and molecular dynamics simulation Carlos Ziebert1, S. Ulrich2 1Forschungszentrum Karlsruhe, Institute for Materials Research I, Eggenstein-Leopoldshafen, Germany 2Forschungszentrum Karlsruhe, Institute for Materials Research I, Eggenstein-Leopoldshafen, Germany

10:15 – 10:35 Or1802

SYNTHESIS OF Si-Zn-O COMPOSITE THIN FILMS BY A HYBRID PECVD-PVD RADIOFREQUENCY PROCESS Alain Daniel1, Thierry Belmonte2

, Patrick Choquet3, Denis Jacquet4 1Laboratoire de Science et Génie des Surfaces, Nancy, France 2Laboratoire de Science et Génie des Surfaces, Nancy, France 3Arcelor Research, Liège, Belgique 4Arcelor Research, Maizières-les-Metz, France

10:35 – 10:55 Or1803

Nanocomposite AlTiNCO Coatings Deposited by the Reactive Cathodic Vacuum Arc Evaporation Joerg Vetter1, T. Ishikawa2

, N. Shima3 1Sulzer Metco - Metaplas Ionon, Bergisch Gladbach, Germany 2,3Hitachi Tool Engineering, Ltd., Tokyo-Narita, Japan


11:15 – 11:35 Or1804

Thermal Stability and Age-Hardening of Al-Cr-N Hard Coatings Herbert Willmann1

, P.H. Mayrhofer2, L. Hultman3, C. Mitterer4

1Materials Center Leoben, Leoben, Austria 2Materials Chemistry, RWTH-Aachen, Aachen, Germany 3IFM Material Physics, Division of Thin Film Physics, Linköping University, Linköping, Sweden 4Christian Doppler Laboratory for Advanced Hard Coatings, University of Leoben, Leoben, Austria

11:35 – 11:55 Or1805

Self lubricant TiN/a-C(N) nanocomposite coatings prepared by double magnetron sputtering. Diego Martínez-Martínez1

, C. López-Cartes2, A. Fernández3

, J.C. Sánchez-López4 1Instituto de Ciencia de Materiales de Sevilla (CSIC-USE), Sevilla, Spain 2,3,4Instituto de Ciencia de Materiales de Sevilla (CSIC-USE), Sevilla, Spain

PSE 2006 49

Thursday, September 14th, morning Room Richard-Strauss

11:55 – 12:15 Or1806

Multilayered adaptive nanocomposite coatings exhibiting low friction throughout a broad temperature range and multiple thermal cycles Christopher Muratore1

, Andrey A. Voevodin2, Jianjun Hu3

1UTC/Air Force Research Laboratory, Wright-Patterson AFB, OH, USA 2Air Force Research Laboratory, Wright-Patterson AFB,OH,USA 3UES/Air Force Research Laboratory, Wright-Patterson AFB,OH, USA

12:15 – 12:35 Or1807

Nanocomposite TiN/a-AlN coatings on complex shaped tools for high performance cutting operations Stephan Bolz1

, Kirsten Bobzin2, Erich Lugscheider3, Michel Maes4

, Fritz Klocke5

, Klaus Gerschwiler6 1Chair of Surface Engineering, RWTH Aachen University, Aachen, Germany 2,3,4

Chair of Surface Engineering, RWTH Aachen University, Aachen, Germany 5,6Laboratory for Machine Tools and Production Engineering, Aachen, Germany

12:35 – 12:55 Or1808

Deposition, structure and tribological performance of DLC-based nanocomposite coatings Damiano Galvan1

, Y.T. Pei2, J.Th.M. De Hosson3, A. Cavaleiro4

, C. Strondl5 1University of Groningen - NIMR, Groningen, The Netherlands 2,3University of Groningen - NIMR, Groningen, The Netherlands 4University of Coimbra, Coimbra, Portugal 5Hauzer Techno Coating BV, NL

50 PSE 2006

Thursday, September 14th, morning Room Zugspitze


Oral Session Session 19: Plasma and Ion Diffusion Treatment Chairmen: R. Grün, Siegen, Germany P. Panjan, Ljubljana, Slovenia


Low energy ion accelerated diffusion of interstitial nitrogen in austenitic stainless steel Gintautas Abrasonis1

, Stefan Facsko2, Adrian Keller3, Xin Xin Ma4

,

Wolfhard Möller5 1Institute of ion beam physics and materials research, FZ Rossendorf, Dresden (Rossendorf), Germany 2,3,5Institute of ion beam physics and materials research, FZ Rossendorf, Dresden, Germany 4School of materials science and engineering, Harbin institute of technology, Harbin, China

09:55 – 10:15 Or1901

Enhanced nitrogen diffusion in AISI 4140 steel induced by atomic attrition Fernando Alvarez1

, C. A. Figueroa2, E. A. Ochoa3

, T. Czerwiec4 1Instituto de Física Gleb Wataghin, Unicamp, Brazil, Campinas, Brazil 2,3Instituto de Física Gleb Wataghin, Unicamp, 13083-970, Campinas, São Paulo, Brazil 4Laboratoire de Science et Genie des Surfaces, (UMR CNRS 7570), Institut National Polytechnique de Lorraine, Ecole des Mines de Nancy, Parc de Saurupt, 54042 Nancy Cedex, France.

10:15 – 10:35 Or1902

High Intensity Plasma Ion Nitriding of AerMet 100 Martensitic Steel Ronghua Wei1, R. C. Benn2

, C. V. Cooper3 1Southwest Research Institute, San Antonio, Texas, USA 2,3United Technologies

10:35 – 10:55 Or1903

Plasma assisted nitriding of FeAl40 grade 3 intermetallic alloy Thierry Czerwiec1

, Michel2 Geandier3, Hericher4 1LSGS - Ecole des mines de Nancy, Nancy, France 2,4LSGS - Ecole des Mines 3

ESRF


11:15 – 11:35 Or1904

Study on Nitriding Mechanism for Aluminum and Hardness Control of Modified Layer Using Barrel and Ion Nitriding Masahiro Okumiya1

, Yoshiki Tsunekawa2, Hiroshi Ikeda3

, Yasuo Imada4 1Toyota Technological Institute, Nagoya, Japan 2,4Toyota Technological Institute, Nagoya, Japan 3Graduate student of Toyota Technological Institute, Nagoya, Japan

11:35 – 11:55 Or1905

High Intensity Plasma Ion Nitriding Of Biocompatibile Titanium Alloys For Orthopaedic Implants Mihaela Taca1

, Eugeniu Vasile2, Elvira Alexandrescu3

, Roxana Trusca4,

Ioan Roman5 1Metav-Research and Development S.A., Bucharest,1, Romania 2,3,4,5Metav-Research and Development S.A., Bucharest, Romania

11:55 – 12:15 Or1906

NITRIDING POSSIBILITIES THROUGH ATMOSPHERIC PRESSURE MICROWAVE PLASMA (AtmoPlasTM) PROCESSING WITH NITROGEN AND NITROGENOUS SOURCES Kuruvilla Cherian1

, Mike Demchak2, Thomas Muller3, Andreas

Gebeshuber4, Satyendra Kumar5, Devendra Kumar6, Dave Brosky7,

Dominique Tasch8 1Microwave Technologies, Dana Corporation, Rochester Hills, MI, USA 2,5,6,7,8Dana Corporation, Rochester Hills, MI, USA 3,4Rubig GMBH, Wels, Austria

PSE 2006 51

Thursday, September 14th, morning Room Zugspitze

12:15 – 12:35 Or1907

Nd-YAG Laser Nitriding of t-Zirconia Yash Kathuria

I. I. T. Bombay, Mumbai, India

12:35 – 12:55 Or1908

Evaluation of microstructure, erosion and corrosion properties of carbon steel treated by the plasma electrolytic boriding(PEB) Peyman Taheri1, Changiz Dehghanian2

, mahmood AliofKhazraei3, Alireza Sabour Rouhaghdam4 1University of Tehran, Tehran, Iran 2University of Tehran, Tehran, Iran 3,4Tarbiat modares University, Tehran, Iran

52 PSE 2006

Thursday, September 14th, morning Room Olympia


Oral Session Session 20: Plasma Polymerization Chairmen: H. Biederman, Prag, Czech Republic J. Friedrich, Berlin, Germany


Plasma polymerization in continuous and pulsed modes for deposition of amine rich films Andrey Shukurov1

, Danka Slavinska2, Hynek Biederman3

, Nagahiro Saito4

, Osamu Takai5 1Charles University, Department of Macromolecular Physics, Prague, Czech Republic

2,3Charles University, Department of Macromolecular Physics, Prague, Czech Republic

4,5EcoTopia Science Institute, Nagoya University, Nagoya, Japan

09:55 – 10:15 Or2001

Synthesis and characterization of plasma-polymerized HMDSO films using an ion gun inverse magnetron source Alberto García-Luis1

, P. Corengia2, M. Brizuela3

, I. Braceras4, N. Briz5

,

Sarah Powell6, Victor Bellido-González7, D. González-Santamaría8

1Head of Materials and Components Dept., Energy Unit, INASMET-Tecnalia, Donostia-San Sebastián, Spain 2,3,4,5,8INASMET-Tecnalia, Donostia-San Sebastián, Spain 6,7GENCOA LTD, Physics Road, Liverpool (UK)

10:15 – 10:35 Or2002

PECVD SYNTHESIS OF POLYSILOXANE-LIKE THIN FILMS WITH VERY LOW CONTACT ANGLE HYSTERESIS Mathias Borella1

, BELMONTE2 PLISSONNIER3 1CEA, Grenoble, France, Grenoble, France 2CNRS, Nancy, France 3CEA, Grenoble,

France

10:35 – 10:55 Or2003

A novel pathway to produce chemically functionalized plasma polymers. Bentsian Elkin1

, M. Müller2, C. Oehr3 1Fraunhofer-Institut für Grenzflächen- und Bioverfahrenstechnik IGB, Stuttgart, Germany 2,3Fraunhofer IGB, Stuttgart, Germany


11:15 – 11:35 Or2004

An influence of oxygen on chemical structure of plasma polymer films deposited from a mixture of tetravinylsilane and oxygen gas Vladimir Cech1

, Jan Studynka2, Filip Janos3

, Vratislav Perina4 1Brno University of Technology, Brno, Czech Republic 2,3Brno University of Technology, Brno, Czech Republic 4Nuclear Physics Institute, Rez near Prague, Czech Republic

11:35 – 11:55 Or2005

PE-CVD OF CELL ADHESIVE COATINGS FROM ACRYLIC ACID AND ALLYLAMINE VAPOURS Eloisa Sardella1

, L. Petrone2, M. Nardulli3, R. Gristina4

, R. d'Agostino5, P.

Favia6 1Department of Chemistry, University of Bari, Bari, Italy 2,3,5,6Department of Chemistry, University of Bari, Bari, Italy 4Institute of Inorg. Methodology of Plasma, (IMIP) CNR, Bari, Italy

11:55 – 12:15 Or2006

DNA probe immobilization on plasma polymer embedded streptavidin and its application on DNA mismatch detection Liqiang Chu1

, Wolfgang Knoll2, Renate Förch3 1Max-Planck Institut für Polymerforschung, Mainz, Germany 2,3Max-Planck Institut für Polymerforschung, Mainz, Germany

PSE 2006 53

Thursday, September 14th, morning Room Olympia

12:15 – 12:35 Or2007

Plasma Polymer (PP) Films with High Nitrogen Content: Biotechnological Uses Pierre-Luc Girard-Lauriault1, F. Mwale2

, C. Demers3, S. Lerouge4

, M.R. Wertheimer5, F. Truica-Marasescu6

, H. T. Wang7 1Ecole Polytechnique, Montreal, Canada, Montreal, Canada 2,3,7Lady Davis Institute for

Medical Research and Department of Surgery, McGill University, Montreal, Canada 4Research Center, Notre-Dame Hospital, 1560 Sherbrooke East, Montréal, Canada 5,6Department of Engineering Physics, Ecole Polytechnique, Montreal, Canada

12:35 – 12:55 Or2008

Aging of plasma deposited (homopolymers and copolymer) films prepared from organic monomers Sufal Swaraj1, Wolfgang Unger2, Andreas Lippitz3

, Umut Oran4 1Bundesanstalt fuer Materialforschung und -pruefung (BAM), Berlin, Germany 2,3,4Bundesanstalt fuer Materialforschung und -pruefung (BAM)

54 PSE 2006

Thursday, September 14th, afternoon Room Richard-Strauss


Chairman: W. Möller, Dresden, Germany Nanoscale Morphology Control using Ion Beams with Applications in Materials and Life Sciences Michael Aziz

Div. Engrg. & Appl. Sci., Harvard University, Cambridge MA, USA



Oral Session Session 21: Thin Film Characterization Chairmen: A. Cavaleiro, Coimbra, Portugal M. Collin, Sandviken, Sweden


Comparative depth profiling analysis of nanometre metal multilayers by GDOES, RBS and SIMS Ramon Escobar Galindo1

, R. Mari2, R. Gago3, J.M. Albella4

, A. Climent Font5A.Lousa6 1Instituto de Ciencia de Materiales de Madrid (ICMM-CSIC), Madrid, Spain 2,6Departamento Física y Óptica, Universidad de Barcelona 3,5

Centro de Micro-Análisis de Materiales and Departamento de Física Aplicada, Universidad Autónoma de Madrid 4Instituto de Ciencia de Materiales de Madrid (ICMM-CSIC)

17:15 – 17:35 Or2101

Testing films and coatings with a wide range of properties by laser-acoustics Dieter Schneider1, Bernd Schultrich2 1Fraunhofer Institute for Materials and Beam Technology, Dresden, Gremany 2Fraunhofer Institute for Materials and Beam Technology

17:35 – 17:55 Or2102

Correlating nano-scale fatigue and fracture tests to actual performance of coated carbide tools Ben Beake1

, German Fox-Rabinovich2 1Micro Materials Ltd, Wrexham, UK 2Department of Mechanical Engineering, McMaster University, Hamilton, Canada

17:55 – 18:15 Or2103

A new technique for the characterization of wear, scratch and yield properties of coatings in the micro and nano scale Thomas Chudoba1

, V. Linß2 1ASMEC Advanced Surface Mechanics GmbH, Radeberg OT Rossendorf, Germany

2ASMEC GmbH, Radeberg, Germany

18:15 – 18:35 Or2104

Damage phenomena observed on PVD coatings submitted to repeated impact tests Cecile Langlade1

, F. Ledrappier2, B. Vannes3, Y. Gachon4

1UTBM LERMPS laboratory, Belfort, France 2,4HEF R&D, Andrézieux Bouthéon, France 3ECL, STMS lab, Ecully, France

18:35 – 18:55 Or2105

Optimisation of ion beam preparation of cross sections for AFM observation Alexandre Birr1, Erich Bergmann2 1Geneva School of Engineering, Geneva, Switzerland 2Geneva School of Engineering, Geneva, Switzerland

PSE 2006 55

Thursday, September 14th, afternoon Room Zugspitze



Oral Session Session 22: Nanostructures and Nanopatterning Chairmen: M.J. Aziz, Cambridge / MA, USA K. Zdunek, Warsaw, Poland


Synthesis of Nanoparticle Coated Silicon Nanowires Using a Hypersonically Expanded Thermal Plasma Joachim V. R. Heberlein1

, Jami Hafiz2, Rajesh Mukherjee3

, Xiaoliang Wang4

, Peter H. McMurry5, Steven L. Girshick6

1University of Minnesota, Dept. of Mechanical Engineering, Minneapolis, MN, USA 2,3,4,5,6University of Minnesota, Dept. of Mechanical Engineering

17:15 – 17:35 Or2201

Nanostructured SnO2 layers for gas sensing applications by in-situ deposition of nanoparticles produced by the Karlsruhe microwave plasma process Benedikt Schumacher1, Jürgen Haußelt2, Dorothee Vinga Szabo3

,

Michael Bruns4, Sabine Schlabach5

, Harald Müller6, Benedikt Schumacher7, Rolf Ochs8 1Forschungszentrum Karlsruhe IMF III, Karlsruhe, Germany 2,3,4,5,6,7,8Forschungszentrum Karlsruhe IMF III

17:35 – 17:55 Or2202

Fabrication of carbon nanowalls using novel plasma processing Masaru Hori1, Mineo Hiramatsu2 1Nagoya University, Nagoya, Japan 2Meijo University, Nagoya, Japan

17:55 – 18:15 Or2203

Plasma Modification of Carbon Nanotubes and Bucky Papers Uwe Vohrer1, Christian Oehr2, Nicolas Peer Zschoerper3, Yvonne Koehne4

, Stefanie Langowski5 1Fraunhofer IGB, Stuttgart, Germany 2,3,4,5Fraunhofer IGB, Stuttgart, Germany

18:15 – 18:35 Or2204

Duplex Processing with Mechanical Milling and Plasma Irradiation for Surface Modification of Nanoparticles Hiroya Abe1

, Kosuke Takenaka2, Akira Kondo3

, Yuichi Setsuhara4, Makio

Naito5 1Joining and Welding Research Institute, Osaka University, Ibaraki, Osaka, Japan

2,3,4,5Joining and Welding Research Institute, Osaka University, 11-1 Mihogaoka, Ibaraki,

Osaka 567-0047, Japan

18:35 – 18:55 Or2205

Area-selective growth of dense, aligned single-walled carbon nanotube film using microwave plasma-enhanced chemical vapor deposition Mineo Hiramatsu1

, Masaru Hori2 1Meijo University, Nagoya, Japan 2Nagoya University, Nagoya, Japan

56 PSE 2006

Thursday, September 14th, afternoon Room Olympia



Oral Session Session 23: Wear and Corrosion Resistance II Chairmen: A. Ehiasarian, Sheffield, United Kingdom H. Högberg, Linköping, Sweden


WEAR DEVELOPMENT OF COATED TOOLS WITH VARIOUS PVD FILMS, AT INCREASED CUTTING SPEEDS AND FEED RATES Konstantinos-Dionysios Bouzakis1

, I. Mirisidis2, G.Skordaris3 N.,

Michailidis4 G.Erkens5 1Aristoteles University of Thessaloniki, Thessaloniki, Greece 2,3,4

Aristoteles University of Thessaloniki 5CemeCon AG, Würselen, Germany

17:15 – 17:35 Or2301

Nucleation and growth of magnetron sputtered Ti2AlN MAX phase thin films Manfred Beckers1

, Norbert Schell2, Rui M.S. Martins3, Wolfhard Möller4,

Lars Hultman5, Arndt Mücklich6

1Forschungszentrum Rossendorf, Dresden, Germany 2,3,4,6Forschungszentrum Rossendorf, Dresden, Germany 5Thin Film Physics Division at Linköping University, Linköping, Sweden

17:35 – 17:55 Or2302

D.C Magnetron Sputtering of Epitaxial Ti2GeC Thin Films Hans Högberg1

, L. Hultman2, J. Frodelius3

, O. Wilhelmsson4, U.

Jansson5, P. Eklund6

, J. Emmerlich7 1Department of Physics (IFM), Linköping University, Linköping, Sweden 2,3,6,7Department of Physics (IFM), Linköping University, Linköping, Sweden 4,5Department of Materials Chemistry, The Ångström Laboratory, Uppsala University, Uppsala, Sweden

17:55 – 18:15 Or2303

Deposition of nano-structured Max phase materials via pulsed-dc reactive sputtering from a loose, blended powder target Glen West1, Peter Kelly2 1Manchester Metropolitan University, Manchester, UK 2Manchester Metropolitan University, Manchester, UK

18:15 – 18:35 Or2304

Development of Magnetron Sputtered TiAlx Coatings for Optimised Oxidation Protection of Titanium Aluminides for High Temperature Applications Maik Fröhlich1

, Christoph Leyens2, Reinhold Braun3

1DLR-German Aerospace Center, Institute of Materials Research, Köln, Germany 2Technical University of Brandenburg at Cottbus, 03046 Cottbus, Germany 3DLR-German Aerospace Center, Institute of Materials Research, 51147 Köln, Germany

18:35 – 18:55 Or2305

Wear behaviour of (Cr,Al, Si)N PVD- coatings at elevated temperatures Herbert Scheerer1, Berger2 Hoche3

, Schramm4Abele5 1TU-Darmstadt, Darmstadt, Germany 2,3Materials Technology/Darmstadt University of Technology, Germany 4,5

Production Management, /Darmstadt University of Technology, Germany

PSE 2006 57

www.vtd.de

schnell flexibel effizient

HartstoffBeschichtungssysteme

58 PSE 2006

PSE 2006 59

Advanced Plasma Technology

Plasma technology offers a wide variety of methods to structure, coat or modify surfaces. Roth & Rau providesequipment for plasma and ion beam enhanced thin filmand surface processing for use in research & develop-ment and many industrial branches in which mainlysystems particularly on special applications are offered.

The key components are plasma and ion beam sourcesof several size, construction and functional principle. An impor-tant attention is turned to development and transfer of process techniques and their implementation intocustomised process systems for various applications.

plasma enhanced thin film deposition

ion beam deposition of thin films

dry etching

surface modification

large area plasma processing

www.roth-rau.de

Roth & Rau AGGewerbering 3, OT Wüstenbrand09337 Hohenstein-ErnstthalTel. 03723-4988-0, Fax 03723-4988-25e-mail: [email protected]

Advanced Mechanical Surface Testing

//// The NanoPlatform (OPX)

NanoindentationAdhesion Scratch resistanceFriction Wear3D imaging Surface analysis

60 PSE 2006

Thickness and Stoichiometry

Thin Film Inline Measurement

Field-bus interface to process control system

Internet: www.amtec-spectro.de eMail: [email protected] TEL.: +49-(0)341-230 27 60 FAX: +49(0)-341-230 27 70

EDXRF Analysis

• Multi-layers, alloy-layers

• Thickness: nm ... µm, element content: ppm ... %

• Non-destructive, contact-less, without sample

preparation

• Results in few seconds

• Measuring method corresponding ISO 3497

• Substrate temperatures up to 500 °C

• Transparent single or double layers

• Thickness: nm ... µm

• Measuring distance up to 100 mm

• Results in few milliseconds

• Parallel operation of several spectral sensors

in one system is possible

• Substrate temperatures up to 200 °C

PSE 2006 61

Friday, September 15th, morning Room Richard-Strauss


Chairman: G. Bräuer, Braunschweig, Germany Titanium Dioxide Thin Film Photocatalysis: Present Status and Trends Akira Fujishima

Kanagawa Academy of Science and Technology, Kawasaki, Japan

Oral Session Session 24: Multilayer Films Chairmen: M.R. Wertheimer, Montreal, Quebec, Canada P. Kaestner, Braunschweig, Germany


Study of mechanical properties of nanometric W/Cu multilayers using synchrotron X-ray diffraction Eric Le Bourhis1

, K-F Badawi2, P Goudeau3, P-O Renault4, P Villain5

, B Girault6 1Université de Poitiers, LMP-CNRS UMR 6630, Futuroscope Chasseneuil Cedex, France 2,3,4,5,6Université de Poitiers, Poitiers, France

09:55 – 10:15 Or2401

VMeCN Based Nanoscale Multilayer PVD Coatings Deposited by the Combined High Power Impulse Magnetron Sputtering / Unbalanced Magnetron sputtering, (HIPIMS/UBM) technology P.Eh. Hovsepian1

, A.P. Ehiasarian2, A. Deeming3

1Nanotechnology Centre for PVD Research, Sheffield Hallam University, Sheffield, United Kingdom 2Sheffield Hallam University, Sheffield, United Kingdom 3Hydra Clarkson International, Sheffield, United Kingdom

10:15 – 10:35 Or2402

Improvement of Hardness and Toughness of TiAlN Coatings by Nanoscale Multilayered Structurization with Amorphous Si-N Phase Jong-Keuk Park1

, Carlos Ziebert2, Michael Stüber3, Young-Joon Baik4 1Korea Institute of Science and Technology, Seoul, Korea 2,3Forschungszentrum Karlsruhe, Karlsruhe, Germany 4Korea Institute of Science and Technology, Seoul, Korea

10:35 – 10:55 Or2403

Origin of low friction in nanoscale TiAlN/VN coatings Zhaoxia Zhou1

, P Eh Hovsepian2, Q Luo3

, L Chen4, W M Rainforth5

1Dept of Engineering Materials, The University of Sheffield, UK, Sheffield, UK 2,3,4Materials Engineering Research Institute, Sheffield Hallam University, Sheffield, UK 5Department of Engineering Materials, The University of Sheffield, Sheffield, UK


11:15 – 11:35 Or2404

Growth Morphology, Adhesion and Mechanical Properties of Room-temperature Pulsed Laser Deposited Multilayer Coatings Jürgen M. Lackner1, Wolfgang Waldhauser2, Roman Major3, Lukasz Major4, Boguslaw Major5 1Laser Thin Film Technology Group / Laser Center Leoben, Niklasdorf, Austria 2Laser Center Leoben / JOANNEUM RESEARCH, Niklasdorf, Austria 3,4,5IMIM-PAN, Krakow, Poland

11:35 – 11:55 Or2405

A new concept and some results of an ion beam deposition process for EUV mask blanks Carsten Bundesmann1

, M. Kramer2, J. Dienelt3, E. Schubert4, F. Scholze5

, M. Tartz6, H. Neumann7

, M. Nestler8, M. Schulze9, B.

Rauschenbach10 1Leibniz-Institut für Oberflächenmodifizierung e.V., Leipzig, Germany 2,3,4,5,6,7,10Leibniz-Institut fuer Oberflaechenmodifizierung e.V. Leipzig, Germany 8Roth & Rau AG, Hohenstein-Ernstthal, Germany 9AIS Automation GmbH, Dresden, Germany

62 PSE 2006

Friday, September 15th, morning Room Richard-Strauss

11:55 – 12:15 Or2406

Sputter deposition of nanometer multilayer coatings for high-reflection optics in the extreme ultraviolet (EUV) spectral region Stefan Braun1

, Peter Gawlitza2, Sebastian Lipfert3, Maik Menzel4, Stefan

Schaedlich5, Andreas Leson6

1IWS Dresden, Fraunhofer-Institut fuer Werkstoff- und Strahltechnik, Dresden, Germany 2,3,4,5,6IWS Dresden, Fraunhofer-Institut fuer Werkstoff- und Strahltechnik

12:15 – 12:35 Or2407

The influence of interlayer thickness on mechanical properties of a Cr/CrN dual layer coating Rostislav Daniel1, Christian Mitterer2, Matthias Herrmann3

, Frank Richter4 1Physical Metallurgy and Materials Testing, University of Leoben, Leoben, Austria 2Christian Doppler Laboratory for Advanced Hard Coatings, Dep. of Physical Metallurgy and Materials Testing, University of Leoben, 8700 Leoben, Austria 3,4Chemnitz University of Technology, Institute of Physics, 09107 Chemnitz, Germany

12:35 – 12:55 Or2408

Influence of processing parameters on structural and mechanical properties of TiAlN/ZrN superlattice coatings Dejun Li1, M. Cao2

, J. J. Zhang3, J. Yang4

, X. H. Zhang5 1Tianjin Normal University, Tianjin, China 2,3,4,5Tianjin Normal University, Tianjin, China

12:55 Closing

PSE 2006 63

Friday, September 15th, morning Room Zugspitze


Oral Session Session 25: Plasma Sources: Diagnostics and Modelling Chairmen: S. Starostine, Eindhofen, Netherlands Y. Segui, Toulouse, France


Similarities and particularities of low and of high temperature plasma technologies Uwe Schumacher

Inst. f. Plasmaforschung, University of Stuttgart, Stuttgart, Germany

09:55 – 10:15 Or2501

Determination of N ,H and O-atom densities in N2-H2 and in N2-O2 gas mixtures by optical actinometry in flowing microwave discharges and by NO titration in post-discharges André Ricard1

, Julio Henriques2, Sarah Cousty3

, Sandrine Villeger4, Jayr Amorim5 1CPAT-Univ. Paul Sabatier-, Toulouse, France 2,3,4CPAT - Univ.Paul Sabatier-Toulouse-France 5ITA - Centro Tecnico Aerospacial-San José de Campos- Brazil

10:15 – 10:35 Or2502

Two Dimensional Double Probe Study of the Temporal Evolution of the Charge Carrier Density in a Pulsed Magnetron Thomas Welzel1, Thoralf Dunger2, Frank Richter3 1Chemnitz University of Technology, Chemnitz, Germany 2,3Chemnitz University of Technology, Institute of Physics, Chemnitz, Germany

10:35 – 10:55 Or2503

Electrical characterization of capacitively-coupled radio-frequency discharges in hydrogen Luis Marques1

, L. L. Alves2, J. Jolly3

1Dep. Física, Universidade do Minho, Portugal, Braga, Portugal 2Centro de Física dos Plasmas, Instituto Superior Técnico, Lisboa, Portugal 3Lab. de Physique et Technologie des Plasmas, Ecole Polytechnique, Palaiseau, France

10:55 – 11:15 Cofee break

11:15 – 11:35 Or2504

Duo-Plasmaline, a linearly extended low pressure microwave plasma source for barrier layer deposition Andreas Schulz1

, Matthias Walker2, Uwe Schumacher3, Ulrich Stroth4 1Institut für Plasmaforschung der Universität Stuttgart, Stuttgart, Deutschland 2,3,4Institut für Plasmaforschung der Universität Stuttgart, 70569 Stuttgart, Germany

11:35 – 11:55 Or2505

Cold Cathodes of Diamond Films and Carbon Nanotubes for Gas Discharge Akimitsu Hatta1

, Hiroshi Nakatsuma2, Tsuyoshi Nishikawa3

, Kazutomo Ohzawa4

, Keishi Yanai5, Qin Zou6, Bimal Kumar Pramanik7

, Chaoyang Li8, Hiroaki Yoshimura9 1Kochi University of Technology, Tosayamada, Kochi, Japan 2,3,4,5,6,7,8,9Kochi University of Technology, Kochi, Japan

11:55 – 12:15 Or2506

Deposition and Modeling of Hard, Wear-Resistant Si-C-N Coatings Nicole J. Wagner1, Joachim V. R. Heberlein2

, William W. Gerberich3 1University of Minnesota, Minneapolis, MN, USA 2,3University of Minnesota, Minnesota, MN, USA

64 PSE 2006

Friday, September 15th, morning Room Zugspitze

12:15 – 12:35 Or2507

SIMULATION AND CHARACTERIZATION OF IPVD SYSTEM WITH AN EXTERNAL ICP ANTENNA Jozef Brcka

TEL Technology Center, America, LLC, Albany, USA

12:35 – 12:55 Or2508

Fluid modelling of DC magnetrons - low pressure extension and experimental validation Claudiu COSTIN1

, Tiberiu Marian Minea2, Gerard Gousset3, Gheorghe

Popa4 1Faculty of Physics, Iasi, Romania 2,3LPGP, Paris Sud University, Orsay, France 4Faculty of Physics,

12:55 Closing

PSE 2006 65

Friday, September 15th, morning Room Olympia


Oral Session Session 26: Polymer Treatment and Modification Chairmen: J. Tyczkovski, Lodz, Poland D. Hegemann, St. Gallen, Switzerland


Heterogenization of catalysts on plasma modified membranes Linda Caterina Lopez1

, Pietro Favia2, Riccardo d'Agostino3

1Department of Chemistry, University of Bari, Bari, Italy 2,3Department of Chemistry, University of Bari, Institute of Inorganic Methodologies and Plasmas IMIP-CNR, Bari, Italy

09:55 – 10:15 Or2601

Influence of the ion bombardment on the growth of plasma-deposited SiO2-like films on polymers Antonella Milella1

, M. Creatore2, M.A. Blauw3

, M.C.M. van de Sanden4 1Eindhoven University of Technology, Dept. of Applied Physics, Eindhoven, The Netherlands 2,3,4Eindhoven University of Technology, Dept. of Applied Physics, Eindhoven, The Netherlands

10:15 – 10:35 Or2602

METHOD FOR THE VACUUM DEPOSITION OF OPTICAL COATINGS ON POLYMETHYL-METHACRYLATE Peter Munzert1, Ulrike Schulz2

, Norbert Kaiser3 1Fraunhofer Institut Jena, Jena, Germany 2,3Fraunhofer Institut Jena

10:35 – 10:55 Or2603

Plasma-Enhanced Chemical Vapor Deposition of Inorganic Coatings on Polymeric Materials Using Organic Precursors Juan Jiang1

, Maike Benter2, Bahram Eshtehardi3 1Nanon A/S, Brøndby, Denmark 2,3Nanon A/S, Brøndby, Denmark


11:15 – 11:35 Or2604

Improvement of the adhesive bond strength at metal-polymer interfaces by plasmachemical and wet-chemical modification of polymer surfaces Joerg Friedrich1

, Renate Mix2 1BAM-Berlin, Berlin, Deutschland 2BAM, Berlin, Deutschland

11:35 – 11:55 Or2605

Adhesion mechanism between a soy protein-based hybrid hydrogel and N2 plasma treated polypropylene backing: XPS and derivatization study Rony Snyders1

, Kirill I. Shingel2, Christophe Roberges3, Ludvik Martinu4

,

Jolanta E. Klemberg-Sapieha5, Oleg Zabeida6

, Marie-Pierre Faure7 1Polytechnic School of Montreal, Montreal, Canada 2,3,7Bioartificial Gel Technology, Montreal, Quebec, Canada 4,5,6Department of Engineering Physics, Ecole Polytechnique, Montreal, Quebec, Canada

11:55 – 12:15 Or2606

Atmospheric Pressure Plasma Jet Treatment of Polymer Surfaces for Adhesion Improvement Uwe Lommatzsch1

, Hans-Erich Wagner2, Dirk Pasedag3, O.-D.

Hennemann4, Guido Ellinghorst5, Alfred Baalmann6

1Fraunhofer Institute for Manufacturing Technology and Applied Materials Research, Bremen, Germany, Bremen, Germany 2,3Institute of Physics, Ernst-Moritz-Arndt-Universität Greifswald, Germany 4,5,6Fraunhofer Institute for Manufacturing Technology and Applied Materials Research, Bremen, Germany

66 PSE 2006

Friday, September 15th, morning Room Olympia

12:15 – 12:35 Or2607

Comparative study of different plasma deposition and treatment processes for the protection of PET thin films from bacterial adhesion Dimitrios Mataras1

, M. Katsikogianni2, Ch. Syndrevelis3, E. Amanatides4

,

Y.F. Missirlis5 1Plasma Technology Laboratory, University of Patras, Patras, Greece 2,5Laboratory of Biomechanics and Biomedical Engineering, Department of Mechanical Engineering and Aeronautics, University of Patras, Patras, Greece 3,4Plasma Technology Laboratory, Department of Chemical Engineering

12:35 – 12:55 Or2608

Structured R2R functionalization of polymer film surfaces by a Xenon excimer lamp Andreas Holländer1, Eva Ehrentreich-Förster2, Stefan Kröpke3 1Fraunhofer-Institut für Angewandte Polymerforschung, Potsdam, Germany 2Fraunhofer-Institut für Biomedizinische Technik, Nuthetal, Germany 3Fraunhofer-Institut für Angewandte Polymerforschung, Potsdam, Germany

12:55 Closing

PSE 2006 67

Monday, September 11th Poster Session, 15:15 – 16:45

Poster - Microstructure and Stress

Po1001

Microstructural properties of TiAlN films prepared by DC magnetron sputtering Parasuraman Kuppusami1, V.S. Raghunathan2

, R. Thirumurugesan3, A.

Albert Irudayaraj4, E. Mohandas5, S. Kalainathan6

1Dept. of Atomic Energy, Indira Gandhi Centre for Atomic Research, Kalpakkam, INDIA 2,3,5Indira Gandhi Centre for Atomic Research, Kalpakkam, India 4,6Vellore Institute of Technology, Vellore, India

Po1002

Mechanical and tribological properties of TiAlN PVD coatings Damien Faurie1

, G.C.A.M. Janssen2, J.-D. Kamminga3

1Netherlands Institute for Metals Research, Delft, Netherlands 2Delft University of Technology, Department of Materials Science and Engineering 3Netherland Institute for Metals Research

Po1003

Effects of the interface region on the adhesion of titanium nitride films grown by plasma immersion ion implantation onto polymer substrate Chanokporn Chaiwong1

, Marcela Bilek2, David McKenzie3

1School of Physics, The University of Sydney, Sydney, Australia 2,3School of Physics, The University of Sydney, Australia

Po1004

Plasma electrolytic oxidation coatings on light metals: effect of pulsed current on residual stress Raja H.U. Khan1

, A.L. Yerokhin2, A. Matthews3

, A. Leyland4, A.

Pilkington5 1University of Sheffield, Sheffield, UK 2,3,4,5University of Sheffield, Sheffield, UK

Po1005

Effect of Al addition on structure and properties of sputtered TiC films Jan Soldan1

, Petr Zeman2, Jindrich Musil3

1University of West Bohemia, Domazlice, Czech republic 2,3University of West Bohemia

Po1006

Stress investigation in AlN films deposited by magnetron sputtering Marie-Paule BESLAND1

, Nicolas HORNY2, Bassam ABDALLAH3

,

Mohamed Abdou DJOUADI4, Pierre-Yves JOUAN5 1Institut des Matériaux Jean Rouxel - IMN UMR CNRS 6502, Nantes, France 2,5LMP Université de Valenciennes et du Hainaut-Cambrésis - Maubeuge - FRANCE 3Atomic Energy Commission Syrian (AECS) Damascus, Syria 4Institut des Matériaux IMN - UMR CNRS 6502 - Nantes FRANCE

Po1007

Application of energy-dispersive X-ray diffraction for the efficient investigation of internal stresses in thin films Bernd Kaempfe1

, Otmar Zimmer2, Bernd Schultrich3, Uwe Zschenderlein4

1Fraunhofer-Institute for Reliability and Microintegration, Berlin, Germany 2Fraunhofer-Institute for material and Beam Technology, Dresden, Germany 3Fraunhofer-Institute for Material and Beam Technology, Dresden, Germany 4Technical University Dresden, Germany

Po1008

Mechanical Strength of Thin Films Having Preferred Orientation and High Compressive Residual Stress Masahide Gotoh1

, Yoshiaki Horimoto2, Shouichi Ejiri3, Yukio Hirose4

1Venture Business Laboratory, Kanazawa University, Kanazawa, Japan 2Kanazawa University, Kanazawa, Japan 3Dept. of Culture and Phychology/Seisen Jogakuin College, Nagano, Japan 4Dept. of Mat. Sci. and Eng./Kanazawa University, Kanazawa, Japan

68 PSE 2006


Poster - PECVD

Po1009

Flowability Modification of Fine Powders by Plasma Enhanced Chemical Vapor Deposition Adrian Spillmann1

, Philipp Rudolf von Rohr2, Axel Sonnenfeld3 1ETH Zurich, Institute of Process Engineering, Zurich, Switzerland 2,3ETH Zurich, Institute of Process Engineering, Switzerland

Po1010

PECVD of low carbon content silicon nitride-like thin films with dimetilamminosilanes. Rosa Di Mundo1

, Marina Ricci2, Fabio Palumbo3, Riccardo d’Agostino4

,

Francesco Fracassi5 1Department of Chemistry, University of Bari, Bari, Italy 2,4,5Department of Chemistry, University of Bari 3Institute for Inorganic Methodologies and Plasmas

Po1011

SiC film growth by plasma and catalytic CVD, and optical properties of the films Tsutomu KANEKO1

, Nobuaki Miyakawa2, Shunsuke Suga3

, Hideki Osada4

, Madoka Taii5 1Science University of Tokyio, Dept. of Applied Physics, Shinjuku-ku, Tokyo, JAPAN 2Dept. of Mechanics and Systems, Science University of Tokyo, Suwa, JAPAN 3,4,5Dept. of Applied Physics, Science University of Tokyo, Tokyo, JAPAN

Po1012

Chemical Vapour Deposition of BN Films in the System B-N-H-F-Br Jens Matheis1

, A. Lunk2, D. Sapounas3

1Institute for Plasma Research, Stuttgart, Stuttgart, Germany 2,3Institute for Plasma Research, University of Stuttgart, Pfaffenwaldring 31, Stuttgart, Germany

Po1013

XPS and ToF-SIMS analysis of polysiloxane films deposited through an inductively r.f. sustained HMDSO plasma. Fabian Renaux1

, D.Cossement2 R.Gouttebaron3, V.Carlier4M.Hecq5

1LCIA, Université de Mons-Hainaut, Mons, Belgium 2,3,5LCIA, Université de Mons-Hainaut, Mons, Belgium 4Coatings Research Institute, Limelette, Belgium

Po1014

Study of FAssisted Chemical Vapor Deposition Technique to Obtain Tin Oxide Films Rafael Trommer1, Carlos Pérez Bergmann2 1Universidade Federal do Rio Grande do Sul, Porto Alegre, Brazil 2Universidade Federal do Rio Grande do Sul, Porot Alegre, Brazil

Po1015

SYNTHESIS OF SUPER HARD Ti-B-N NANO-STRUCTURE/NANO-COMPOSITE LAYER SYSTEMS FOR MAGNESIUM AND ALUMINUM DIE CASTING TOOLS MADE BY PLASMA ASSISTED CVD/DUPLEX PROCESS Klaus Stefan Klimek1

, P. Kaestner2, K.-T. Rie3, A. Gebauer-Teichmann4

,

H. Lange5, K. Höck6

1TU Braunschweig/Institut für Oberflächentechnik, Braunschweig, Germany 2,3Institut für Oberflächentechnik, Technische Universität Braunschweig, Bienroder Weg 53, D-38108 Braunschweig, Germany 4Volkswagen AG Werk Kassel, Business Unit Gießerei & Bearbeitung, Technologiezentrum, Brieffach 4720, Postfach 1451, 34219 Baunatal 5Druck- und Spritzgusswerk Hettich GmbH & Co., Siegener Straße 37, 35066 Frankenberg 6H-O-T Servicecenter Schmölln GmbH & Co. KG,, Industriering 19, 04626 Schmölln-Nitschka

PSE 2006 69


Poster - Ion and Laser Treatment

Po1016

Epitaxial Layer Formation in Si by As+ Implantation subsequent Thermal Oxidation Davoud Agha AliGool1, Ali Baghizadeh2

, Dariush Fathy3 1van De Graaff Laboratory, Nuclear Research Center, Tehran, Iran 2Van de Graaff Laboratory, Nuclear Research Center, Tehran, Iran 3Kajeh Nasir Toosi University of technology, Tehran, Iran

Po1017

SURFACE ELEKTRON SPECTROSCOPY OF ION IMPLANTED Si, Pd AND CaF2 CRYSTALS Muradulla Normuradov1

, A.K. Tashatov2, Yu. D. Khalikov3

1Karshi Engineering Economic Institute, l, Uzbekistan 2,3Karshi Engineering Economic Institute, Uzbekistan

Po1019

Nitrogen plasma ion implantation in silicon at high energies Ing Hwie Tan1

, Helfried Reuther2, Beatriz Moreno3, Jose O. Rossi4, Mario

Ueda5 1Instituto Nacional de Pesquisas Espaciais, Sao Jose dos Campos, Brazil 2Research Center Rossendorf/ Institute of Ion Beam Physics and Materials Research, Dresden, Germany 3,4,5Instituto Nacional de Pesquisas Espaciais, Sao Jose dos Campos, Brazil

Po1020

Hybrid laser deposition for TiC, TiCN and SiC films fabrication Miroslav Jelinek1

, Tomas Kocourek2, Jaromir Kadlec3

, Jan Lancok4 1Institute of Physics ASCR, Prague 8, Czech Republic 2,4Institute of Physics ASCR 3Military Academy

Po1021

Amelioration of electrochemical behavior of 32CDV13 low alloy steel by duplex treatments Abdelouahad Chala1

, P. Steyer2, C. Saied3, M.A. Djouadi4

1Département de Physique, Université de Biskra, Biskra, Algeria 2Laboratoire de Physico Chimie Industrielle, INSA Lyon, 69621 Villeurbanne, France 3Département de Physique, Université de Biskra, BP 145 RP, 07000 Biskra, Algeria 4Institut des Matériaux Jean Rouxell, 44233 Nantes, France

Po1022

PROPERTIES OF PIII TREATED CoCr ALLOYS Stephan Mändl1, A. Lehmann2

, I.-M. Eichentopf3, J.W. Gerlach4 1Leibniz-Institut für Oberflächenmodifizierung, Leipzig, Germany 2,3,4Leibniz-Institut für Oberflächenmodifizierung

Po1023

Study of AlN/Al Thin Film Properties Prepared by Ion Beam Technique Masumeh Shariati1, Mahmood Ghoranneviss2

, Abbas Anvari3, Mohammad Reza Hantehzadeh4

, Shabnam Daemi Milani5 1Plasma Physics Research Center, Islamic Azad University, Tehran, Iran 2,4,5Plasma Physics Research Center, Tehran, Iran 3Sharif University of Technology, Tehran, Iran

Poster - Optical and Electrical Properties

Po1024

Inert gas admixtures in PECVD of titanium dioxide thin films on polymers – Influence on the UV absorptance of the films Axel Sonnenfeld1

, Michael Rohner2, Philipp Rudolf von Rohr3 1Institute of Process Engineering, ETH Zurich, Zurich, Switzerland 2,3Institute of Process Engineering, ETH Zurich, CH-8092 Zurich, Switzerland

70 PSE 2006


Po1025

Optical and electrical properties of W-O-N coatings deposited by DC sputtering Nuno Parreira1

, O. Banakh2, N. Martin3

, T. Polcar4, A. Cavaleiro5 1ICEMS - University of Coimbra, Coimbra, Portugal 2HE-ARC / University of Applied Sciences, Le Locle, Switzerland 3LMS / EMSMM, Besançon, France 4,5ICEMS / University of Coimbra, Coimbra, Portugal

Po1026

Hydrogen-containing amorphous carbon layers as optical materials for the NIR and MIR spectral range Andreas Hertwig1

, Jörg Krüger2, Uwe Beck3 1Federal Institute for Materials Research and Testing, Berlin, Germany 2,3Federal Institute for Materials Research and Testing

Po1027

Chemical bonding states and its influence on the electrical and optical characteristics of Ti-C-O thin films Ana Fernandes1

, Pedro Carvalho2, Pedro Alpuim3

, Nicolas Martin4,

Oksana Banakh5, Filipe Vaz6

1Minho University, Guimarães, Portugal 2,3,6Physic Department, Minho University, 4800-058 Guimarães, Portugal 4Laboratoire de Microanalyse des Surfaces, 26, Chemin de l’épitaphe, 25030 Besançon Cedex, France 5University of Applied Sciences, HE-ARC, 7, Avenue de l'Hotel-de-Ville, 2400 Le Locle, Switzerland

Po1028

Plasma deposition of valve-metal based nanostructured films for electronic applications Sabrina Grassini1, Andrea Palma2

, Alessio Carullo3, Emma Angelini4,

Fabio Palumbo5 1Politecnico di Torino, Torino, Italy 2,3,4Politecnico di Torino, Torino, Italy 5IMIP-CNR, Bari, Italy

Po1029

Colourful Decorative Metal/Oxide/Metal Triple Layer PVD Film Systems Wolf-Dieter Münz1

, Ralph Domnick2, Georg Bauer3, Mathias Belzner4,

Stefan Kunkel5 1Systec Vacuum Systems, Karlstadt, Germany 2,3,4identif TECHNOLOGIES, Erlangen, Germany 5Systec Vacuum Systems, Karlstadt, Germany

Po1030

Plasma-chemical oxidation processes for optical components Ullrich Bayer1, Juergen Schmidt2, Angelika Henning3 1Innovent e.V. Technologieentwicklung, Jena, Germany 2,3Innovent e.V. Technologieentwicklung, Jena, Germany

Po1031

Reactive sputtering deposition of WO3 on flexible ITO/PET substrate for Electrochromic Devices Yung-Sen Lin1

, Yue-Liang Chiang2 1Department of Chemical Engineering, Feng Chia University, Taichung, Taiwan, R.O.C 2Department of Chemical Engineering, Feng Chia University

Po1033

Plasma modification of catalysts for the cathode reduction of hydrogen peroxide and oxygen in fuel cells Volker Brueser1, K. Schröder2, P. Bogdanoff3, I. Herrmann4

, H. Junge5, A.

Schmuhl6, N. Savastenko7 1Institut für Niedertemperatur-Plasmaphysik e. V. Greifswald, Greifswald, Germany 2,7Institut für Niedertemperatur-Plasmaphysik e. V. Greifswald, Greifswald, Germany 3,4Hahn-Meitner-Institut, Berlin, Germany 5Leibniz-Institut für Katalyse e.V. an der Universität Rostock, Rostock, Germany 6AMT Analysenmesstechnik GmbH, Rostock, Germany

PSE 2006 71


Po1034

Ionic conductivity of ceria and samaria doped ceria thin films prepared by IBAD Francisco Yubero1

, Catalina Mansilla2, J.P. Holgado3

, J.P. Espinós4, A.R.

González-Elipe5 1ICMSE-CSIC, Seville, Spain 2,3,4,5ICMSE, Seville, Spain

Po1035

NbN COATINGS AS COLLECTION MIRRORS IN EUV LITHOGRAPHY Viorel Braic1

, Mihai Balaceanu2, Adrian Kiss3

, Mariana Braic4, Alina

Vladescu5 1Tehnoprof Centre - National Institute for Optoelectronics, Magurele, Romania 2,3,5National Institute for Optoelectronics, Magurele, Romania 4Tehnoprof Centre - National Institute for Optoelectronics, Magurele, Romania

Po1036

STRONTIUM ZIRCONATE CO-SPUTTER DEPOSITED COATINGS Mohammad Arab Pour Yazdi1, Alain Billard2 1LSGS, Ecole des Mines, Nancy, France 2LSGS, Ecole des Mines, Nancy, France

Po1037

Investigations of apatite-structure coatings deposited by reactive magnetron sputtering dedicated to IT-SOFC Pascal BRIOIS1

, Christian CODDET2, Alain BILLARD3

, Frederic LAPOSTOLLE4

, Sophie LAMY5 1LERMPS- UTBM, Belfort, France 2,4,5LERMPS-UTBM, Belfort, France 3LSGS-ENSMN, Nancy, France

Po1038

ROLE OF THE OXYGEN ON THE PROPERTIES OF YB NANOSTRUCTURES EMBEDDED BY AMORPHOUS MATRIX FABRICATED BY COMBINATION OF MAGNETRON SPUTTERING AND PULSED LASER DEPOSITION TECHNIQUES Jan Lancok1

, Michal Novotny2, Jiri Bulir3, Miroslav Jelinek4

, Claudine Garapon5

, Stephan Guy6 1Institute of Physics AS CR, Prague 8, Czech Republic 2,3,4Institute of Physics AS CR, Prague 8, Czech Republic 5,6LPCML, Lyon, France

Po1039

CORRELATION BETWEEN OPTICAL PROPERTIES AND CONCENTRATION OF B-N BONDS INTO REACTIVELY SPUTTERED Ti-B-N NANOCOMPOSITE COATINGS Jean-Francois Pierson1

, Alain Billard2 1LSGS / Ecole des Mines, Nancy, France 2LSGS / Ecole des Mines, Nancy, France

Po1042

The synthesis and field emission properties of oriented AlN films Changzhi Gu

Institute of Physics, Chinese Academy of Sciences, Beijing, China

Po1044

Structure and optical properties of dc magnetron sputtered Al films on PET Homa Hosseini1, Mahmood Ghoranneviss2

, Abbas Anvari3, Kiomars Yasserian4

, Davood Dorranian5 1Plasma physics Research Center, Islamic Azad University, Tehran, Iran 2,4,5Plasma Physics Research Center, Islamic Azad University, Tehran, Iran 3Physics Department, Sharif University of Technology, Tehran, Iran

72 PSE 2006


Po1045

DIELECTRIC AND OPTICAL PROPERTIES OF TA2O5 THIN FILMS PREPARED BY EVAPORATION AND IBAD METHODS Yubero Francisco1

, Victor Rico2, Juan Pedro Espinós3

, Agustín R. González-Elipe4

, Fabian Frutos5 1Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Sevilla), Sevilla, Spain 2,3,4Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Sevilla) 5Dpto. Física Aplicada I, Universidad de Sevilla

Po1046

Structural and electrical properties of nano-crystalline MeOxNy (Me=Ti, Hf) thin films synthesized with controlled nitrogen partial pressure by PECVD Sang-Jin Cho1

, C.-K. Jung2, J.-S. Hyun3

, Y.H. Kim4, J.Y. Lee5

, J.-H. Boo6 1Department of Chemistry and CAPST, SungKyunKwan University, Suwon, Rep. of Korea 2,3,6Department of Chemistry and Center for Advanced Plasma Technology, SungKyunKwan University, Suwon, Republic of Korea 4,5Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea

Po1047

Material and electrical characteristics of Al-doped ZnO thin films grown by pulsed DC magnetron sputtering Eung Kwon Kim1

, Young Sung Kim2 1Sungkyunkwan University, Suwon, Republic of Korea 2Technology Innovation Center, Suwon, Republic of Korea

Po1048

Characterisation of iron oxides and iron nitrides coatings deposited by reactive magnetron sputtering Carine Petitjean1

, Grafoute2 Pierson3, Rousselot4Banakh5

1Institut FEMTO-st/ Dept CREST/University of Franche Comte-France, Montbeliard, France 2,3,4Institut FEMTO-st/dept. CREST/ University of Franche-Comte-france 5University of Applied Sciences, EIAJ

Po1049

SUBSTRATE TEMPERATURE INFLUENCE ON OPTICAL AND ELECTRICAL PROPERTIES OF Al DOPED ZnO THIN FILMS DEPOSITED BY SPUTTERING. Ammar Mosbah1

, M. Jacquet2, J. Cellier3, E. Tomasella4, M. S. Aida5

1Lab. des Couches Minces et Interfaces, Univ Constantine ALGERIE, Constantine, ALGERIE 2,3,4Laboratoire des Matériaux Inorganiques, Université Blaise Pascal, Clermond FD, France. 5Laboratoire des Couches Minces et Interfaces Univ. Constantine Algérie

Po1050

Modifications of Nano-Sized Oxide Particles by High-Density RF Plasmas Hiroaki Nakayama1

, Kosuke Takenaka2, Yuichi Setsuhara3

, Hiroya Abe4,

Yoichi Sakawa5, Kiyoshi Nogi6

1Joining and Welding Reseach Institute, Osaka University, Ibaraki, Japan 2,3,4,6Joining and Welding Research Institute, Osaka University, Ibaraki, Japan 5Institute of Laser Engineering, Osakaka University, Suita, Japan

Po1053

Study of Solar Cell Production Using Electron Beam Irradiation Amir Hossein Sari1, M.R. Hantehzadeh2

, H. Hora3, M. Ghoranneviss4

, R. Hopfl5, N. Bolouki6, H. R. Ghomi7 1Plasma Physics Research Center, Islamic Azad University, Tehran, Iran 2,4,6Plasma Physics Research Center, Islamic Azad University 3Dept. Theoret. Physics, Univ.New South Wales, Sydney, 2052, Australia 5University of Applied Sciences, Deggendorf, Germany 7Laser Research Institute of Shahid Beheshti University, Evin 19839, Tehran, Iran

PSE 2006 73


Po1054

A study of Ta doping effect on electro-chemical properties of Ir oxide films on Ti electrode deposited by unbalanced magnetron sputtering Sang Sik Kim1

, Sung Dae Kim2 1Plasma Technology Center, Institute for Advanced Engineering, Youngin, South Korea 2Institute for Advanced Engineering, Youngin, South Korea

Poster - PVD

Po1055

Electric circuit model for pulsed-bias arc deposition Chuang Dong1

, Guoqiang LIN2, Lishi WEN3

1Dalian University of Technology, Dalian, China 2,3State Key Lab of Materials Modification, Dalian University of Technology, Dalian 116024, China

Po1056

PVD-Coatings by Using the Pulsed D.C.-Arc-Process (PulsArc) Werner Grimm

INOVAP GmbH, Großerkmannsdorf, Großerkmannsdorf, Germany

Po1057

Emission spectra from a hybrid plasma triggered by a shunting arc discharge using a positively biased electrode Ken Yukimura1

, Kenich Ego2, Igor Levchneko3

, Takashi Ikehata4, Koichi

Takaki5 1Department of Electrical Engineering, Doshisha University, Kyotanabe, Japan 2Department of Electrical Engineering/Doshisha University, Kyotanabe, Japan 3School of Physics/The University of Sydney, Sydney, Australia 4Department of Electrical and Electronics Engineering/Ibaraki University, Hitachi, Japan 5Department of Electrical and Electronics Engineering/Iwate University, Morioka, Japan

Po1058

The Influence of Initial Substrate Surface Roughness on the Adhesion of PVD Nickel on Steel Saskia Benedictus-deVries1

, A.J. Böttger2, A.K.R. Mohanta3, E. van der

Giessen4 1NIMR / Delft University of Technology, dept. of Materials Science, Delft, Netherlands 2Delft University of Technology, dept. of Materials Science, the Netherlands 3NIMR / University of Groningen, Dept. of Applied Physics, the Netherlands 4University of Groningen, Dept. of Applied Physics, the Netherlands

Po1060

Reactively sputtered iron oxynitride coatings: comparison between reactive gas pulsing and conventional processes Christophe Rousselot1, Petitjean2 Grafoute3

, Banakh4Pierson5 1Institut FEMTO-st/ Dept CREST/University of Franche Comte-France, Montbeliard, France 2,3Institut FEMTO-st/dept. CREST/ University of Franche-Comte-france 4University of Applied Sciences, EIAJ, Suisse 5LSGS-Ecole des Mimes Nancy

Po1061

Ion Assisted Deposition of Ti, Zr, and (Ti-Al) alloys on Nickel and Carbon Composites Karl Berreth1

, Khatam Ashurov2, Abram Lyutovich3

, Karl Maile4, Eberhard

Roos5, Sergei Morozov6

1Materialprüfungsanstalt (MPA) Universität Stuttgart, Stuttgart, Germany 2,6Institute of Electronics/Academy of Science, Tashkent , Usbekistan 3,4,5Materialprüfungsanstalt (MPA)/Universität Stuttgart, Stuttgart, Germany

74 PSE 2006


Po1062

High Rate Deposition of Magnetic Films by Gas Flow Sputtering Ralf Bandorf1, Holger Lüthje2

, Kai Ortner3, André Bloche4, Thomas Jung5

1Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany 2,3,4,5Fraunhofer Institute for Surface Engineering and Thin Films (IST)

Po1063

Novel Method for High Rate Deposition of Lead Zirconate Titanate Piezoelectric Films Kai Ortner1, Holger Lüthje2

, Ralf Bandorf3, Hans-Joachim Quenzer4, Harald Jacobsen5

, Thomas Jung6 1Fraunhofer Institute for Surface Engineering and Thin Films, Braunschweig, Germany 2,3,6Fraunhofer Institute for Surface Engineering and Thin Films 4,5Fraunhofer Institute for Silicon Technology

Po1064

INFLUENCE OF CARBON RICH GAS COMPOSITION ON SOME PROPERTIES OF TiC THIN FILMS Mihai Balaceanu1

, Alina Vladescu2, Mariana Braic3

, Viorel Braic4, Adrian

Kiss5 1Tehnoprof Centre - National institute for Optoelectronics, Magurele, Romania 2,3,4,5National Institute for Optoelectronics,Magurele,Romania

Po1065

Investigation on Electropolishing for Surface Pretreatment of Mg-Alloys prior to PVD-Coating with Regard to Film Adhesion and Corrosion Properties Frank Hollstein1

, Klaus Seibt2, Jana Scholz3, Kathleen Schirok4

1Techno-Coat Oberflaechentechnik GmbH, Zittau, Germany 2,3,4University of Applied Science – Institut of Surface Engineering, Zittau, Germany

Po1066

Effects of bias voltage on structure, composition and mechanical properties of Zr-Si-N and Zr-Ge-N sputter deposited films David Pilloud1

, PIERSON2 CAVALEIRO3 1Institut FEMTO-ST, Département CREST, University of Franche-Comté, Montbéliard, France 2LSGS, Ecole des Mines, Nancy (France) 3DEM, Universidade de Coimbra, Polo II, ICEMS, FCTUC (Portugal)

Po1067

Remote RF Plasma Sputtering of Cr-Al-O Coatings Antony Pilkington1

, A.L. Yerokhin2, A. Leyland3

, M.A. Baker4, M.A. Monclus5

, A. Matthews6 1Department of Engineering Materials, University of Sheffield, Sheffield, United Kingdom 2,3,6The University of Sheffield, United Kingdom 4,5University of Surrey, United Kingdom

Po1068

Titanium nitride growth by sputtering for contacts on boron doped diamond Vincent Mortet1, O. Elmazria2

, J. D'Haen3, G. Vanhoyland4

, K. Haenen5,

M. D'Olieslaeger6 1Institute for Materials Research (IMO), Diepenbeek, Belgium, Diepenbeek, Belgium 2LPMIA, Vandoeuvre les Nancy, France 3,4,5,6Institute for Materials Research (IMO), Diepenbeek, Belgium

Po1069

DESIGN AND FABRICATION OF ION BEAM SPUTTERING SYSTEM WITH 10 KEV ENERGY Madjid MOJTAHEDZADEH LARIJANI1, M.Ghoranneviss2 S. Sedghi, Sigarchi3, M.Eshghabadi4 1Nuclear research center for Agriculture and Medicine, AEOI, Karaj, Iran 2,3,4Plasma Physics Research Center, Science and Research Campus of Islamic Azad University, P.O.Box 14665-678, Tehran, Iran

PSE 2006 75


Po1070

IMPACT OF TARGET GEOMETRY AND WAFER REDEPOSITION ON UNIFORMITY IN IPVD SYSTEM Jozef Brcka

TEL Technology Center, America, LLC, Albany, USA

Po1071

The Role of Cathodes and Sputtering Targets in Technological Heredity of Tribological Coatings Alexander Minewitsch1

, Michael Efron2 1TTZH Tribologie & Hochtechnologien e.K., Garbsen, Germany 2TTZH Sued

Po1072

PVD–coatings in injection molding machines for processing optical polymers Florian Manz1

, Kirsten Bobzin2, Nazlim Bagcivan3

, Erich Lugscheider4 1Surface Engineering Institute, RWTH Aachen University, Aachen, Germany 2,3,4Surface Engineering Institute, RWTH Aachen University, Aachen, Germany

Po1073

Hardness and elastic modulus of amorphous and nanocrystalline SiC and Si films Petr Bohac1

, L. Jastrabík2, V. Kulikovsky3

, M. Stranyánek4, V. Vorlicek5

,

R. Ctvrtlík6, A. Kurdyumov7

1Institute of Physics AS CR, Prague 8, Czech Republic 2,3,4,5,6Institute of Physics AS CR 7Institute for Problems of Materials Science, Kiev, Ukraine

Poster - Barrier and Protective Coatings

Po1074

Development of Plasma Polymerised SiOx Barriers on Polymer Films for Food Packaging Applications Joachim Schneider1, Uwe Schumacher2, Andreas Schulz3

, Matthias Walker4, Martina Leins5

, Ulrich Stroth6 1Institut für Plasmaforschung, Universität Stuttgart, Stuttgart, Germany 2,3,4,5,6Institut für Plasmaforschung, Universität Stuttgart, 70569 Stuttgart, Germany

Po1075

Obtaining the self-organizing thin protective thermal-barrier and tribological coatings on the surface of Fe-44%Cr-4%Al-0.3%La alloy Olga Tsurtsumia1

, Besic Eristavi2, Sayavur Bakhtiyarov3, Elguja Kutelia4

,

Boris Bulia5, Husein Adanir6, Omar Mikadze7

1Georgian Technical University (RCSR), Tbilisi, Georgia 2,4,5,7Georgian Technical University (RCSR), Tbilisi, Georgia 3,6New Mexico Institute of Mining and Technology, Socorro, NM, USA

Po1076

A New Approach to the Deposition of Elemental Boron and Boron-based Coatings by Pulsed Magnetron Sputtering of Loosely Packed Boron Powder Targets Martynas Audronis1

, P. J. Kelly2, A. Leyland3

, A. Matthews4 1Department of Engineering Materials, The University of Sheffield, UK, Sheffield, UK 2Surface Engineering Group, Manchester Metropolitan University, UK 3,4Department of Engineering Materials, The University of Sheffield, UK

76 PSE 2006


Po1077

B-C-N Film Deposition in a Supersonic Plasma Jet Reactor with Substrate Bias Jami McLaren1

, Joachim V.R. Heberlein2 1University of Minnesota, Minneapolis, MN, USA, Minneapolis, MN, USA 2University of Minnesota, Minnapolis, MN, USA

Po1078

On some characteristics of Ti oxynitrides obtained by pulsed magnetron sputtering Mariana Braic1

, Viorel Braic2, Adrian Kiss3

, Mihai Balaceanu4, Alina

Vladescu5, Cosmin Mihai Cotrut6

1Tehnoprof Centre - National Institute for Optoelectronics, Magurele, Romania 2,3,4,5Tehnoprof Centre - National Institute for Optoelectronics, Magurele, Romania 6Politehnica University, Bucharest, Romania

Po1079

High rate deposition of Al2O3 coatings reactively sputter deposited David MERCS1

, A. DURANTEAU2, C. MEUNIER3

, S. VIVES4, C.

CODDET5 1LERMPS-UTBM, BELFORT Cedex, FRANCE 2,5LERMPS-UTBM 3,4CREST-UFC

Po1080

Functional properties of the tantalum oxynitride coatings deposited onto steel substrates Oksana Banakh1

, H. Le Dréo2, C. Csefalvay3

, P.-A. Steinmann4, M.

Fenker5, H. Kappl6, F. Vaz7 1Haute Ecole ARC, Ingénierie, La Chaux-de-Fonds, Switzerland 2,3,4Haute Ecole ARC, Ingénierie, Le Locle, Switzerland 5,6Forschungsinstitut für Edelmetalle und Metallchemie, Schwäbisch Gmünd, Germany 7University of Minho, Guimarães, Portugal

Po1081

Aluminum Oxide Thin Films Prepared by RF Magnetron Sputtering as Water Vapor Barrier on Polyethylene Terephthalate Li-Shin Chang1

, Fu-Sheng Shieu2, Dong-Sing Wuu3

, Chih-Wei Wu4 1Department of Material Engineering, National Chung-Hsing University, Taichung, Taiwan/R.O.C. 2,3,4Department of Materials Engineering, National Chung-Hsing University

Po1082

Remote plasma deposition of inorganic films: the influence of plasma chemistry and ion bombardment on film growth and moisture permeation barrier performances Mariadriana Creatore1

, M.A. Blauw2, J.L. van Hemmen3

, I. Volintiru4,

M.M. Koetse5, V.I.T.A. Lohmann6

, M.C.M.van de Sanden7, A. Milella8

,

H.F.M. Schoo9 1Eindhoven University of Technology, Dept. of Applied Physics, Eindhoven, The Netherlands 2,3,4,6,7,8Eindhoven University of Technology, Dept. of Applied Physics, Eindhoven, The Netherlands 5,9TNO Science and Industry, Eindhoven, The Netherlands

Po1083

XRD analysis of plasma sprayed ceramic coatings Tomas Grinys1

, Sigitas Tamulevicius2, Igoris Prosycevas3

, Sarunas Meskinis4 1Kaunas University of Technology, Kaunas, Lithuania 2Institute of Physical Electronics, Kaunas University of Technology, Physics Department, Kaunas University of Technology, Kaunas, Lithuania 3,4Institute of Physical Electronics, Kaunas University of Technology, Kaunas, Lithuania

PSE 2006 77


Po1084

Thin film growth and properties of nanostructured thermal barrier coatings Peter Gawlitza1

, Stefan Braun2, Andreas Leson3

, Torsten Sebald4,

Steffen Beyer5 1IWS Dresden, Fraunhofer-Institut fuer Werkstoff- und Strahltechnik, Dresden, Germany 2,3IWS Dresden, Fraunhofer-Institut fuer Werkstoff- und Strahltechnik, Dresden, Germany 4,5EADS Space Transportation, Ottobrunn, Germany

Po1085

Moisture barrier films deposited on PET by ICPECVD of SiNx Rainer Wolf1, K. Wandel2, C. Boeffel3 1OUT e.V., Berlin, Germany 2SENTECH Instruments GmbH, Berlin, Germany 3Fraunhofer IZM, Teltow, Germany

Po1086

Thermal characterization of hard decorative thin films Francisco Macedo1

, F. Vaz2, P. Carvalho3

, A. C. Fernandes4, L.

Rebouta5, K. H. Junge6

, B. K. Bein7 1Department of Physics , University Minho, Braga, Portugal 2,3,4,5Physics Dept., University of Minho, Guimarães, Portugal 6,7Exp.Phys. III, Solid State Spectroscopy, Ruhr-University, Bochum, Germany

Po1088

THEORETICAL STUDY ON THE INFLUENCE OF OXYGEN ADDITION TO TiC THIN FILMS Luis Marques1

, Marta M. D. Ramos2 1Dep. de Física, Universidade do Minho, Braga, Portugal 2Dep. de Física, Universidade do Minho, Braga, Portugal

Poster - Pulsed Plasma Processing

Po1089

The Introduction of Alternative Process Gas Regimes during the Reactive Sputter Deposition of Titania Coatings Peter Kelly1

, A.A. Onifade2 1Manchester Metropolitan University, Manchester, UK 2Manchester Metropolitan University, UK

Po1090

Deposition of a-C:H polymer films with variable roughness and wettability in pulsed low-pressure RF discharges. Nikita Bibinov1

, Klaus Wiesemann2 1AEPT Ruhr university, Bochum, Germany 2

AEPT Ruhr university Bochum Germany

Po1091

Properties of TiO2 Coatings Deposited by Pulsed Magnetron Sputtering Yin Nan Kok1

, P. J. Kelly2, G. T. West3

1Manchester Metropolitan University, Manchester, United Kingdom 2,3Manchester Metropolitan University, Manchester, United Kingdom

78 PSE 2006


Po1092

Investigation of DC pulsed hollow cathode plasma jet system used for reactive sputtering of oxide thin films Petr Virostko1

, Petr Adámek2, Pavel Kudrna3

, Milan Tichý4, Jiří

Olejníček5, Zdeněk Hubička6

1Institute of Physics, Academy of Sciences of the Czech Republic, Praha, Czech Republic 2Department of Physics, University of South Bohemia, České Budějovice, Czech Republic 3,4Faculty of Mathematics and Physics, Charles University in Prague, Czech Republic 5,6Institute of Physics, Academy of Sciences of the Czech Republic, Prague, Czech Republic

Po1093

Influence of the modified pulsed arc process by variable magnetic fields Enrico Hettkamp1

, Andreas Lindemann2 1Otto-von-Guericke-University Magdeburg; FEIT - IESY, Magdeburg, Germany 2Otto-von-Guericke-University Magdeburg, FEIT-IESY, Magdeburg, Germany

Po1094

Deposition of Ba1-xSrxTiO3 thin films by double RF hollow cathode plasma jet system Zdeněk Hubička1

, Jiří Olejníček2, Petr Virostko3

, Alexander Deyneka4,

Petr Adámek5, Oleksander Churpita6

, Václav Valvoda7, Lubomír

Jastrabík8 1Institute of Physics, Academy of Sciences of the Czech Republic, Praha, Czech Republic 2,3,4,6,8Institute of Physics, Academy of Sciences of the Czech Republic, Prague, Czech Republic 5Department of Physics, University of South Bohemia, České Budějovice, Czech Republic 7Faculty of Mathematics and Physics, Charles University in Prague, Czech Republic

Po1095

PULSED-PLASMA SURFACE DOPING OF METALLIC ALLOY SURFACES Yuriy Tyurin1

, O.V.Kolisnichenko2 A.D.Pogrebnjak3, M.L., Zgadkevich4

1E.O.Paton Electric Welding Institute NAS Ukraine, Kiev, Ukraine 2,4Electric Welding Institute O.E.Paton, Kiev, Ukraine 3Sumy Institute for Surface Modification, Sumy, Ukraine

Po1096

Time-Resolved Ionisation Studies of the High Power Impulse Magnetron Discharge in Mixed Argon and Nitrogen Atmosphere Arutiun Ehiasarian1

, Terry Whitmore2, Yolanda Aranda Gonzalvo3

1MRI, Sheffield Hallam University, Sheffield, United Kingdom 2,3Plasma & Surface Analysis Division, Hiden Analytical Ltd., Warrington, United Kingdom

Po1097

Time Resolved Optical Emission Spectroscopy of High Power Pulsed Magnetron Sputtering Yong M. Kim1

, Ho Y. Lee2, Mireille Gaillard3

, Jeon G. Han4 1CAPST, Sungkyunkwan University, Suwon, Republic of Korea 2,3,4CAPST, SungKyunKwan Univ., Suwon, Korea

Po1099

Phase composition and properties of carbon steels surfaces modified by intense plasma pulses with various reactive gas fluencies Bozena Sartowska1

, Michal Kopcewicz2, Jerzy Piekoszewski3, Lech

Walis4, Jan Senatorski5, Jacek Stanislawski6, Lech Nowicki7, Renata

Ratajczak8 1Institute of Nuclear Chemistry and Technology, Warsaw, Poland 2Institute od Electronic Materials Technology, Warsaw, Poland 3,6,7,8The A. Soltan Institute for Nuclear Studies, Otwock/Swierk, Poland 4Institute of Nuclear Chemistry and Technology, Warsaw, Poland 5Institute of Precision Mechanics, Warsaw, Poland

PSE 2006 79


Po1100

THE SURFACE PROPERTY IMPROVEMENT OF AISI 1090 STEELS BY PULSE PLASMA TECHNOLOGY Yildiz Yaraly Ozbek1

, Mehmet Durman2, Can Kurnaz3

, Aysun Ayday4 1Sakarya University, Sakarya, Turkey 2,3,4Sakarya University

Po1101

FEATURES OF PLASMA-DETONATION TECHNOLOGY IN FORMATION OF ALLOY POWDER COATINGS Yuriy Tyurin1

, O.V. Kolisnichenko12, A.D. Pogrebnjak3

1E.O.Paton Electric Welding Institute NAS Ukraine, Kiev, Ukraine 2Electric Welding Institute O.E.Paton, National Academy of Science, Kiev, Ukraine 3Sumy Institute for Surface Modification, Sumy, Ukraine

Po1102

MODIFICATION OF THE SURFACE PROPERTIES OF A M2 TOOL STEEL Yildiz Yarali Ozbek1

, Mehmet Durman2, Hatem Akbulut3

1SAKARYA UNIVERSITY, SAKARYA, TURKEY 2,3SAKARYA UNIVERSITY

Po1103

SOME PROPERTIES OF MODIFIED SURFACE LAYERS OF COLD WORK STEEL SAMPLES Yildiz Yarali Ozbek1

, Hatem Akbulut2, Mehmet Durman3 1SAKARYA UNIVERSITY, Sakarya, Turkey 2,3Sakarya University

Poster - Highly Ionized Pulsed Magnetron Sputterin

Po1105

New Generation of Combined HIPIMS/Unbalanced Magnetron Pilot Production Sputtering Equipment Wolf-Dieter Münz1

, Jürgen Mangold2, Klaus Bewilogua3

1Systec Vacuum Systems, Wien, Austria 2Systec Vacuum Systems, Karlstadt,Germany 3FhG IST, Braunschweig, Germany

80 PSE 2006

Tuesday, September 12th Poster Session, 18:45 – 23:00

Poster - Carbon-based Coatings

Po2001

Comparative characterization of nanocrystalline diamond and diamond-like carbon films prepared by plasma assisted techniques Cyril Popov1

, J. Zemek2, V. Vorlicek3

, T. Kocourek4, M. Jelinek5

, W. Kulisch6

, B. Mednikarov7, J. Pirov8

, G. Spasov9 1University of Kassel, INA, Kassel, Germany 2,3,4,5Institute of Physics, ASCR, Prague, Czech Republic 6University of Kassel, INA, Kassel, Germany 7,8,9Central Laboratory of Photoprocesses, BAS, Sofia, Bulgaria

Po2002

SYNTHESIS OF CARBON NITRIDE THIN FILMS BY N2/CH4 MICROWAVE PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION: CHARACTERISATION OF THE DISCHARGES AND THE OBTAINED FILMS Paul KOUAKOU1

, V. Brien2, M. Belmahi3, D. Duday4

, H. N. Migeon5, J.

Bougdira6 1LPMIA / Univ. H. Poincaré Nancy I , Vandoeuvre-les -Nancy, France, Vandoeuvre les Nancy, France 2,3,6LPMIA / Univ. H. Poincaré Nancy I , Vandoeuvre-les -Nancy, France 4,5LAM/ Centre de Recherche Public Gabriel Lippmann, Belvaux, Luxembourg

Po2003

Application of ta-C films on forming and machining tools Volker Weihnacht1, Bernd Schultrich2 1Fraunhofer IWS, Dresden, Germany 2Fraunhofer IWS, Dresden, Germany

Po2004

Growth of carbon and carbon nitride thin films by low energy (~150 eV) N2/Ar ion assisted evaporation of C60 Markus Berndt1, M. Vinnichenko2

, A. Kolitsch3, W. Möller4, U. Kreissig5

,

G. Abrasonis6 1Inst. of Ion Beam Physics and Materials Research, FZR, Dresden, Germany 2,3,4,5,6Inst. of Ion Beam Physics and Materials Research, FZR, Dresden,Germany

Po2005

CARBON BASED TRIBOLOGICAL COATINGS BY USING THE HIGH- RATE ELECTRON BEAM EVAPORATION Jens-Peter Heinss1

, Christoph Metzner2, Bert Scheffel3 1Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik (FEP), Dresden, Germany 2,3Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik (FEP), Dresden, Germany

Po2006

Investigation of nanocrystalline wear particles from plasma synthesized DLC coatings for medical use Friederike Deuerler1, V. Buck2

, Tim Ritzmann3, Ingo Erdmann4

, Nicolas Wöhrl5, O. Filipov6

, A. Poukhovoi7 1University of Wuppertal, Fac. D- Dept. of Safety Eng./ Mater. Science, Wuppertal, Germany 2,5,6,7University of Duisburg-Essen, Dept. of Physics, Div. of Thin Film Technology, Essen, Germany 3,4University of Wuppertal, Fac. D - Dept. Safety Eng./Mater. Sci., Wuppertal, Germany

Po2007

A Study on Metal-doped Diamond-Like Carbon Film synthesized by Ion Source and Sputtering Technique Dai Mingjiang1

, Zhu Xiagao2, Zhou Kesong3

, Li Hongwu4, Hou Huijun5

,

Lin Songsheng6 1Guangzhou Research Institute of non-ferrous Metals, Guangzhou, China 2,3,4,5,6Guangzhou Research Institute of non-ferrous Metals, Guangzhou, China

PSE 2006 81


Po2008

Raman Spectroscopy of W-doped DLC films: influence of W content and substrate bias Albano Cavaleiro1

, Michael Stüber2, Monika Rinke3, José R.T. Branco4

,

Carlos Wagner Moura e Silva5 1FCTUC / ICEMS – Grupo de Materiais e Engenharia de Superfícies, Coimbra, Portugal 2,3Forschungszentrum Karlsruhe, Institut für Materialforschung, Karlsruhe, Germany 4,5REDEMAT/CETEC – Laboratório de Engenharia e Modificações de Superfícies, Belo Horizonte-MG, Brasil

Po2010

Modified DLC coatings for heat-transfer surfaces Ingmar Bialuch1

, Timo Geddert2, Stephan Scholl3, Wolfgang Augustin4 1Fraunhofer Institute for Surface Engineering and Thin Films, Braunschweig, Germany 2,3,4Technical University of Braunschweig, Institute for Chemical and Thermal Process Engineering, Braunschweig, Germany

Po2011

Mechanical Properties of ECR-modified RF-PECVD a-C:H Coatings Uwe Beck1

, Michael Griepentrog2, Matthias Weise3

, Dieter Klaffke4,

Bernd Rau5, Karl-Heinz Dittrich6

1BAM, FG VI.4 Surface Technology, Berlin, Germany 2,3BAM, FG VI.4 Surface Technology, Berlin, Germany 4BAM, FG VI.1 Tribology and Wear Protection, Berlin, Germany 5,6Roth&Rau AG, Hohenstein-Ernstthal, Germany

Po2012

Deposition of in situ structured DLC-coatings using a novel RF-PACVD Technique Sven Meier

Fraunhofer-IWM, Freiburg, Germany

Po2013

Mechanical properties and coefficient of friction of Cu/a-C films Martin Louda1

, Jan Šůna2, Jindřich Musil3

1University of West Bohemia, Plzeň, Czech Republic 2,3University of West Bohemia

Po2014

Development of diamond machinable films by reactive magnetron sputtering Monika Giesselbach1

, H.-R. Stock2, M. Diesselberg3

1IWT - Foundation Institute for Materials Science, Bremen, Germany 2,3IWT - Foundation Institute for Materials Science

Po2015

Mechanical and tribological properties of Cr-DLC coatings deposited by ARC-MAG-RF PACVD hybrid method Andrzej Czyzniewski

Technical University of Koszalin, Koszalin, Poland

Po2016

Characterization of transer layer and wear debris on various counterparts sliding against undoped and doped DLC coatings Andrzej Czyzniewski

Technical University of Koszalin, Koszalin, Poland

Po2017

Tribological performance of DLC/WC coatings at elevated temperatures Tomas Vitu1

, Rudolf Novak2 1Faculty of Mechanical Engineering, Czech Technical University, Prague 6, Czech Republic 2Faculty of Mechanical Engineering, Czech Technical University, Prague 6, Czech Republic

82 PSE 2006


Po2018

Hydrogen Permeation through Diamond Like Carbon Thin Film Coated on PET Sheet Akimitsu Hatta1

, Yuji Takimoto2, Takafumi Kojima3

, Shikou Kaneko4,

Hassan Md. Kamrul5 1Kochi University of Technology, Tosayamada-cho, Kochi, Japan 2,3,4,5Kochi University of Technology, Kochi, Japan

Po2019

Characterization of carbon nanotubes deposited in radio frequency and microwave discharges Marek Elias1

, L. Zajickova2, O. Jasek3

, Z. Kucerova4, J. Matejkova5

, J. Bursik6

, P. Klapetek7, M. Klementova8

1Department of Physical Electronics, Masaryk University, Brno, Czech Republic 2,3,4Department of Physical Electronics, Masaryk University, Brno, Czech Republic 5Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Brno, Czech Republic 6Institute of Physics of Materials, Academy of Sciences of the Czech Republic, Brno, Czech Republic 7Czech Metrological Institute, Brno, Czech Republic 8Institute of Inorganic Chemistry, Academy of Sciences of the Czech Republic, Rez, Czech Republic

Po2020

Laser deposited and annealed ta-C films on different types of steel-substrates Kerstin Waetje1

, Bernd Schey2, Götz Thorwarth3

, Marcus Kuhn4, Bernd

Stritzker5 1Lehrstuhl für Experimentalphysik IV, Universität Augsburg, Germany, Augsburg, Deutschland 2,4

Axyntec Dünnschicht GmbH, Augsburg, Germany 3,5Lehrstuhl für Experimentalphysik IV, Universität Augsburg, Germany

Po2021

Thermal stability of PIII&D hard-coatings with compositions between diamond like carbon and amorphous silicon carbonitride Florian Schwarz1

, Claus Hammerl2, Götz Thorwarth3, Marcus Kuhn4

,

Bernd Stritzker5 1Lehrstuhl für Experimentalphysik IV, Universität Augsburg, Germany, Augsburg, Deutschland 2,4

AxynTeC Dünnschichttechnik GmbH, Augsburg, Germany 3,5Lehrstuhl für Experimentalphysik IV, Universität Augsburg, Germany

Po2022

Influence of surface topography on friction and wear of ta-C-films Volker Weihnacht1, Bernd Schultrich2

, Dieter Klaffke3 1Fraunhofer IWS, Dresden, Germany 2Fraunhofer IWS, Dresden, Germany 3BAM, Berlin, Germany

Po2023

Influence of the Applied Bias-Voltage on the Electrical Behaviour of Piezoresistive Diamond-like Carbon Films Ralf Bandorf1, Holger Lüthje2

, Saskia Biehl3, Jan-Hinrich Sick4 1Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany 2,3,4Fraunhofer Institute for Surface Engineering and Thin Films (IST)

Po2024

Interface effects in hard/soft carbon multilayered films Victor Micheli1, M. Anderle2

, R. Bartali3, G. Gottardi4, N. Laidani5 1ITC -IRST, Physics Chemistry of Surfaces and Interfaces Division, Povo - Trento, Italy 2,3,4,5ITC_IRST, Trento, Italy

PSE 2006 83


Po2025

Fatigue lifetime of interface between CVD diamond and Si substrate Shoji Kamiya1

, H. Sekino2, H. Hanyu3

, J. C. Madaleno4, J. Grácio5

, G. Cabral6 1Nagoya Institute of Technology, Japan, Nagoya, Japan 2Nagoya Institute of Technology, Nagoya, Japan 3OSG Corporation, Toyokawa, Japan 4,5,6University of Aveiro, Aveiro, Portugal

Po2027

Surface characteristics of post-implanted DLC coatings with PIII and MEVVA processes sung-mao Chiu1

, Dershin Gan2, J.D. Liao3

, Jacok Lu4, S.C. Lee5

1Institute of Materials Science and Engineering, NAYSU, kaohsiung, Taiwan 2Institute of Materials Science and Engineering, National Sun Yat-Sen University, Kaohsiung , Taiwan 3,5Department of Materials Science and Engineering, National Cheng Kung University, Tainan , Taiwan 4Metal Industries Research and Development Centre, Kaohsiung, Taiwan

Po2028

Machining of aluminium alloys by ta-C coated tools Volker Weihnacht1, Prof. Bernd Schultrich2

, Dr. Andreas Popp3 1Fraunhofer IWS, Dresden, Gemany 2Fraunhofer IWS, Dresden, Germany 3TU Dresden, Dresden, Germany

Po2029

IMPROVEMENT OF MECHANICAL PROPERTIES OF DIAMOND-LIKE CARBON FILM BY TI ION IMPLANTATION Guoqing Li1, Liu Cui2, Gou Wei3, Wang Lige4

, Wu Xiufen5 1State Key Laboratory for Materials Modification, Dalian University, Dalian, PR China 2,3,4,5Dalian University of Technology, Dalian 116024, PR China

Po2030

Structure of Cr Containing Hydrogenated Amorphous Carbon Films Synthesized by Filtered Cathodic Vacuum Arc System Wei GOU1

, CHU Xin-Pu2, LI Guo-Qing3

, Wu Xiufen4 1Dalian University of Technology, Dalian, PR China 2,3,4Dalian University of Technology, Dalian, PR China

Po2031

Nano-sized Diamond Deposition via Dual-Plasma at low Temperature (reactor design, material production and nucleation modeling) Babak Shokri1, Babak Shokri2, Iman Hosseini3, Maziar S.Yaghmaee4

, A. Sarani5 1Laser & Plasma Research Institute, Tehran, IRAN 2,3Laser & Plasma Research Institute, Shahid Beheshti University, Tehran, IRAN 4,5Laser & Plasma Research Institute, Shahid Beheshti University, Tehran, IRAN

Poster - Transparent and Photocatalytic Oxides

Po2032

Application of plasma enhanced metalorganic chemical vapor deposition for the growth of high-quality ZnO films Volodymyr Khranovskyy1

, V. Lazorenko2, G. Lashkarev3

1Junior Research Scientist, Kiev, Ukraine 2,3Department of Functional Materials for Electronics, Institute For Problems of Material Science, National Academy of Science of Ukraine, Kyiv, Ukraine

84 PSE 2006


Po2033

Transparent Indium Tin Oxide (ITO) Electrodes for Light Emitting Diodes Based on Ga1-xAlxAs Klaus Ellmer1, Rainald Mientus2

, Bernd Kloth3 1Hahn-Meitner-Institut, Berlin, Germany 2Optotransmitter-Umweltschutz-Technologie e.V. Berlin, Germany 3EPIGAP Optoelektronik GmbH Berlin, Germany

Po2034

Doping effects on the photocatalytic properties of titanium dioxide reactively sputter-deposited coatings Eric AUBRY1

, Alain Billard2, Valérie Demange3

1Laboratoire de Sciences et Génie des surfaces, Nancy, France 2,3Laboratoire de Sciences et Génie des Surfaces, Nancy, France

Po2035

Sputtered ZnO-Al electrodes: influence of experiment geometry. David Horwat1, Alain Billard2 1LSGS, Ecole des Mines, Nancy, France 2LSGS, Ecole des Mines, Nancy, France

Po2036

Low temperature deposition of TiO2 by reactive ICP-sputtering Yeonghun Han1

, S.J.Jung2 J.J.Lee3 1Materials Science and Engineering, Seoul National University, Seoul, Korea 2,3School of Materials Science and Engineering, College of Engineering, Seoul National University, Seoul

Po2037

Deposition of TiOx thin films by low pressure PVD and low pressure and high pressure PECVD deposition methods Lenka Sedláková1

, Jiří Olejníček2, Zdeněk Hubička3

, Aleš Kolouch4,

Štěpán Kment5, Olexander Churpita6, Petr Špatenka7

1Technical University of Liberec, Liberec, Czech Republic 2,3,5,6Institut of Physic Academy of Sciences of the Czech Republic, Prague, Czech Republic 4,7Technical University of Liberec, Liberec, Czech Republic

Po2038

Surface morphology of magnetron sputtered TiO2 films Jan Sicha1

, Zdenek Stryhal2, Jindrich Musil3, David Herman4, Jaroslav

Pavlik5 1University of West Bohemia, Plzen, Czech Republic 2,5J. E. Purkyne University, Usti nad Labem 3,4University of West Bohemia, Plzen

Po2040

Study of photocatalytic efficiency of titanium oxide coatings deposited by PECVD technique Ales Kolouch1

, Jana Mullerova2, Anna Mackova3

, Pavlina Hajkova4, Petr

Spatenka5, Marta Horakova6

, Jiri Cerman7 1Technical University of Liberec, Liberec, Czech Republic 2,4,5,6,7Technical University of Liberec, Liberec, Czech republic 3Institute of Nuclear Physics, Academy of Sciences of Czech Republic, Rez near Prague, Czech Rep

Po2041

Elaboration of transparent undopped and Al doped ZnO thin films by spray pyrolysis and their properties Saâd Rahmane1

, H. Ben Temam2, A. Chala3

, M. S. Aïda4 1Département de Physique, Université de Biskra, Biskra, Algeria 2Département de Chimie Industrielle, Université de Biskra, BP 145 RP, 07000 Biskra, Algeria 3Département de Physique, Univevrsité de Biskra, BP 145 RP, 07000 Biskra, Algeria 4Laboratoire des Couches Mincs et Interfaces, Université de Constantine, 25000 Constantine, Algeria

PSE 2006 85


Po2042

ZnO THIN FILMS DEPOSITED BY PLASMA AND LASER TECHNIQUES FOR APPLICATION IN PHOTONIC MICROSTRUCTURES Bogdana Mitu1

, E. Budianu2, G. Dinescu3

, S. Vizireanu4, M. Purica5

1National Institute for Lasers, Plasma and Radiation Physics, Magurele- Bucharest, Romania 2,5National Institute for Microtechnologies, Bucharest, Romania 3,4National Institute for Lasers, Plasma and Radiation Physics, Bucharest, Romania

Po2043

Effect of pressure on UV-light-induced hydrophilicity of magnetron sputtered TiO2 thin films Abdellah Benyoucef1, Coddet2 Lapostolle3

, Klein4 1LERMPS-UTBM, BELFORT Cedex, FRANCE 2,3,4LERMPS-UTBM, Belfort, France

Po2044

ADHESION OF ZnO COATINGS ON POLYCARBONATE Abdellah MOUSTAGHFIR1

, E. Tomasella2, E. Beche3

, J. Cellier4, M. Jacquet5 1Universite Blaise Pascal - Clermont 2, AUBIERE Cedex, France 2Universite Blaise Pascal Clermont, Aubiere,France 3PROMES-CNRS, Odeillo,Font Romeu, France 4,5Universite Blaise Pascal Clermont,, Aubiere,France

Po2045

Electro-chemical properties of iridium oxide coated ABS electrode synthesized by unbalanced magnetron sputtering process SungDae Kim1

, Kim SangSik2 1Institute for Advanced Engineering, Yongin-si, Korea 2Institute for Advanced Engineering

Poster - Biocompatible Coatings and Surfaces

Po2046

Nanotechnological Coatings for Synthetic Implants in Today’s Surgery Markus Heinlein

Gfe Medizintechnik GmbH, Nuernberg, Germany

Po2047

Protective and Bio-compatible Nanostructured Surfaces by CVD Techniques: Controlled Modulation of Surface and Phase Structures Sanjay Mathur1, Nicole Donia2

, Thomas Ruegamer3, Patrick Kuhn4,

Ganesan Rajesh5 1Head of Division of Nanocrystalline Materials and Thin Film Systems, Saarbruecken, Germany 2,3,4Leibniz-Institute of New Materials, Saarbruecken, Germany 5Leibniz-Institute of New Materials, Saarbruecken

Po2048

Inhibition of crystalline biofilm formation on urological implants by amorphous carbon coatings Lisa Kleinen1

, Norbert Laube2, Andreas Meißner3, Udo Grabowy4

, Ulla Böde5

, Karin Schenk6, Burkard Hillebrands7

, Stefan C. Müller8 1Institute of Thin Films Technology, TU Kaiserslautern, Rheinbreitbach, Germay 2,3,8Department of Urology, University of Bonn, Bonn, Germany 4,6NTTF GmbH, Rheinbreitbach, Germany 5,7Institute of Thin Films Technology, TU Kaiserslautern, Rheinbreitbach, Germany

86 PSE 2006


Po2049

Multi-functional nano-composite plasma coatings – enabling new applications in biomaterials Dawn Balazs1

, Dirk Hegemann2 1EMPA Materials Science and Technology, St. Gallen, Switzerland 2EMPA Materials Science and Technology, St. Gallen, Switzerland

Po2051

Plasma treatment of silicon elastomer hearing devices Oleg Zabeida1

, J. Asselin2, L. Yane3

, L. Martinu4, J. E. Klemberg-

Sapieha5, M. Turcot6

1Ecole Polytechnique of Montreal, Montreal, QC, Canada 2,3,6Sonomax Hearing Healthcare Inc., Montreal, Canada 4,5Ecole Polytechnique, Montreal, Canada

Po2052

Functionalisation of COC surfaces by microwave plasmas Hartmut Steffen1

, Andreas Ohl2, Benedikt Busse3, Karsten Schröder4

1Institute of Low Temperature Plasma Physics, Greifswald, Germany 2,4Institute of Low Temperature Plasma Physics, F.-L.-Jahn Str. 19, 17489 Greifswald 3zell-kontakt GmbH, Industriestraße 3, 37176 Nörten-Hardenberg

Po2053

FLAME ASSISTED CHEMICAL VAPOR DEPOSITION TECHNIQUE TO OBTAIN HYDROXYAPATITE COATINGS Rafael Trommer1, Luis Alberto dos Santos2

, Carlos Pérez Bergmann3 1Universidade Federal do Rio Grande do Sul, Porto Alegre, Brazil 2,3Universidade Federal do Rio Grande do Sul, Porto Alegre, Brazil

Po2054

PHOTOCATALITIC EFFECT OF TiO2 THIN LAYERS ON VIRUSES AND BACTERIA Pavlina Hájková1

, Irena Horská2, Aleš Kolouch3

, Petr Špatenka4, Jan

Horský5 1Technical University of Liberec, Liberec, Czech Republic 2,3,4Technical University of Liberec, Liberec, Czech Republic 5Regional Hospital Liberec, Liberec, Czech Republic

Po2055

Plasma treated nitrogen containing surfaces as primer layers for biomolecules immobilization Linda Caterina Lopez1

, Pietro Favia2, Riccardo d'Agostino3

, Marina Nardulli4, Roberto Gristina5 1Department of Chemistry, University of Bari, Bari, Italy 2,3Department of Chemistry, University of Bari; Institute of Inorg. Methodology of Plasma, (IMIP) CNR, Bari, Italy 4Department of Chemistry, University of Bari, Bari, Italy 5Institute of Inorg. Methodology of Plasma, (IMIP) CNR

Po2056

PLASMA DEPOSITED NANOCOMPOSITE COATINGS CONTAINING SILVER: A SUCCESSFUL STRATEGY TO PRODUCE ANTI-BACTERIAL DRUG DELIVERY Eloisa Sardella1

, R.d’Agostino2 M., Casavola3 M., Nardulli4 R., Gristina5 A., Mangone6 P.Favia7 1Department of Chemistry, University of Bari, Bari, Italy 2,3,4,6,7Department of Chemistry, University of Bari, Bari, Italy 5Istituto di Metodologie Inorganiche e dei Plasmi- Bari, CNR, Bari, Italy

PSE 2006 87


Po2057

EFFECT OF PULSED ION BOMBARDMENT ON EARLY DEPOSITION STAGE OF TI BASED BIOCOMPATIBLE COATINGS Alina Vladescu1

, Viorel Braic2, Mariana Braic3

, Mihai Balaceanu4, Adrian

Kiss5 1Tehnoprof Centre - National Institute for Optoelectronics, Magurele, Romania 2Tehnoprof Centre - National institute for Optoelectronics, Magurele, Romania 3,4,5Tehnoprof Centre - National Institute for Optoelectronics, Magurele, Romania

Po2058

Micro-patterned silicon surfaces for biomedical devices Karola Richter1, Johann-Wolfgang Bartha2

, Christoph, Kubasch3 1Technische Universität Dresden, Institut für Halbleiter-und Mikrosystemtechnik, Dresden, Deutschland 2,3TU Dresden, IHM, Deutschland

Po2059

Surface modification of polymers by using excimer laser for biomedical applications Martin Jäger1, Marcus Pietzsch2

, Frank Sonntag3, Rüdiger Poll4, Matthias

Rabenau5 1Technical University Dresden, Institute of Biomedical Engineering, Dresden, Germany 2,4,5Technical University Dresden, Institute of Biomedical Engineering 3Fraunhofer Gesellschaft e.V. , Institute for Material and Beam Technology IWS

Po2060

Sterilization Characteristics for Medical Equipments using Radicals Produced by Oxygen RF Plasma Nobuya Hayashi1, Yasushi Hanada2

, Tetsushi Tomari3, Shinsuke Tsutsui4 1Saga University, Saga, Japan 2Elquest Co. Ltd., Chiba, Japan 3,4Saga University, Saga, Japan

Poster - Surface Interaction and Growth Modelling

Po2061

Controlled Preparation of Nanometer-Sized Particles from an Inductively Coupled Plasma Martin Schulze1

, P. Awakowicz2, A. von Keudell3

1Ruhr-Universität Bochum, Arbeitsgruppe Reaktive Plasmen, Bochum, Germany 2Ruhr-Universität Bochum, Lehrstuhl für Allgemeine Elektrotechnik und Plasmatechnik, Bochum, Germany 3Ruhr-Universität Bochum, Arbeitsgruppe Reaktive Plasmen, Bochum, Germany

Po2062

Formation of ordered structures in coating deposition processes by Kinetic Monte-Carlo simulations. Diego Martínez-Martínez1

, Lourdes F. Vega2, C. Herdes3

1Instituto de Ciencia de Materiales de Sevilla (CSIC-US), Sevilla, Spain 2,3Institut de Ciència de Materials de Barcelona, (ICMAB-CSIC), Campus de la U.A.B., 08193, Barcelona, Spain

Po2063

THERMAL STABILIZATION IN PLASMA DEPOSITED METALLIC SYSTEMS Kairat Kadyrzhanov1

, Toleu E.Turkebaev2, Vyacheslav S.Rusakov3

1Institute of Nuclear Physics of National Nuclear Center of Kazakhstan, Almaty, Kazakhstan 2Institute of Nuclear Physics NNC RK, Almaty, Kazakhstan 3Moscow State University, Moscow, Russia

88 PSE 2006


Po2064

EXPERIMENTAL TESTS AND APPLICATION OF FEM SIMULATION IN THE HOT EXTRUSION OF ALUMINUM USING COATED DIES WITH DIFFERENT GEOMETRY Antonios Lontos1

, G. Demosthenous2, K.-D. Bouzakis3

1Frederick Institute of Technology, Nicosia, Cyprus 2Laboratory for Manufacturing Technology and Engineering Design, Department of Mechanical Engineering, Frederick Institute of Technology, Cyprus 3Laboratory for Machine Tools and Manufacturing Engineering, Mechanical Engineering Department, Aristoteles University of Thessaloniki, Greece

Poster - Atmospheric Plasma Processing, Spraying

Po2065

Plasma sprayed ceramic coatings without and with epoxy resin sealing treatment and their wear resistance Pavel Ctibor1, Radek Enzl2, Frantisek Zahalka3

, Karel Neufuss4 1Institute of Plasma Physics ASCR, Praha, Czech Republic 2,3Skoda Research, Plzen, Czech Rep. 4IPP ASCR, Praha, Czech Rep.

Po2066

Development Of An Atmospheric Plasma Process For The Fabrication Of Biofunctional Coatings Pieter Heyse1

, Sabine Paulussen2, Bert Sels3

, Pierre Jacobs4 1VITO, Flemish institute for technological research, Mol, Belgium 2VITO, Mol, Belguim 3,4Catholic University of Leuven, Leuven, Belgium

Po2067

Low temperature plasma treatment of living human cells Wolfgang Viöl1, Dirk Wandke2

, Cindy Kaemling3, Axel Behrendt4,

Stephanie Tümmel5, Andy Kaemling6 1HAWK, University of Applied Sciences and Arts, Göttingen, Germany, Göttingen, Germany 2,3,6Cinogy GmbH, Duderstadt, Germany 4,5HAWK University of Applied Sciences and Arts, Göttingen, Germany

Po2068

Investigation of Wood and Timber Surface Modifications by Dielectric Barrier Discharge under Atmospheric Pressure Arndt Wolkenhauer1, Holger Militz2

, Wolfgang Maus-Friedrichs3, Lothar

Klarhöfer4, Michael Leck5, Peter Rehn6

, Georg Avramidis7, Wolfgang Viöl8

1HAWK, University of Applied Sciences and Arts, Göttingen, Germany, Göttingen, Germany 2Georg-August-University Göttingen, Institute of Wood Biology and Technology, Germany 3,4Technische Universität Clausthal, Institut für Physik und Physikalische Technologien, Germany 5,6,7,8HAWK, University of Applied Sciences and Arts, Göttingen, Germany

Po2069

Generation of stable coatings with carboxylic groups by copolymerization of maleic acid anhydride and acetylene using DBD at atmospheric pressure Michael Thomas1

, Margret von Hausen2, Claus-Peter Klages3

1Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany 2,3Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany

PSE 2006 89


Po2070

DBD-BASED ATMOSPHERIC PRESSURE PA-CVD IN SEALED MICROFLUIDIC SYSTEMS Marko Eichler1, C.-P. Klages2

, M. Thomas3, C. Berger4

1Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany 2,3,4Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany

Po2071

Jet type capacitively coupled radiofrequency plasma sources for material processing at atmospheric pressure Gheorghe Dinescu1

, E. R. Ionita2 1National Institute for Laser, Plasma and Radiation Physics, Magurele-Bucharest, Romania 2National Institute for Laser, Plasma and Radiation Physics, Magurele-Bucharest, Romania

Po2072

Investigations into composition and structure of DBD-deposited aminogroup-containing polymer layers Jochen Borris1

, M. Thomas2, C.-P. Klages3

, F. Faupel4, V. Zaporojtchenko5 1Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany 2,3Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany 4,5Technical Faculty of the CAU, Kiel, Germany

Po2073

Patterned Plasma Surface Modification at Atmospheric Pressure for Low Temperature Wafer Bonding Marko Eichler1, M. Gabriel2, H. Reinecke3

, C.-P. Klages4, M. Thomas5

, B. Michel6, M. Reiche7

, C. Ruddy8, I. Radu9

1Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany 2Suss MicroTec Lithography GmbH, München, Germany 3,8HSG-IMIT, Institut für Mikro- und Informationstechnik der Hahn-Schickard-Gesellschaft e.V, Villingen-Schwennigen, Germany 4,5Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, Germany 6TU Braunschweig – Institute for Surface Engineering (IOT), Braunschweig, Germany 7,9Max Planck Institute of Microstructure Physics, Halle, Germany

Po2074

Pulse Current Electrolytic Plasma Processing for Cleaning Steel Substrates Dinesh Patel1, A. Matthews2

, A. Pilkington3A.L.Yerokhin4 1University of Sheffield, Sheffield, UK 2,3,4University of Sheffield, Sheffield, UK

Po2075

Disinfection of heat sensitive materials by atmospheric pressure plasmas Jörg Ehlbeck1

, Udo Krohmann2, Ronny Brandenburg3

, Manfred Stieber4, Kristian Rackow5

, Klaus-Dieter Weltmann6, Thomas von Woedtke7

1Institute of Low Temperature Plasma Physics, Greifswald, Germany 2,4,5,6,7Institute of Low Temperature Plasma Physics, Greifswald, Germany 3Vanguard AG Medical Services for Europe, Berlin, Germany

Po2076

Characterization of an atmospheric pressure radio-frequency capacitive plasma jet Johann Laimer1, Stefan Haslinger2, Herbert Störi3 1Technische Universität Wien, Wien, Österreich 2,3Technische Universität Wien, Wien, Österreich

90 PSE 2006


Po2077

Atmospheric pressure plasma cleaning of 1-octadecene Cedric Noel1, T. Belmonte2

, D. Duday3, H.-N. Migeon4

1LSGS - LAM, Nancy, France 2LSGS, Nancy, France 3,4LAM-CRPGL, Belvaux, Luxembourg

Po2078

One-side hydrophilization of textiles with DBD remote plasma Albrecht Dinkelmann1

, Volkmar von Arnim2, Thomas Stegmaier3,

Alexander Rau4 1Institut für Textil- und Verfahrenstechnik Denkendorf, Denkendorf, Deutschland 2,3ITV, Denkendorf, Deutschland 4

Ahlbrandt System GmbH, Lauterbach, Deutschland

Po2079

SiOx thin film deposition in the post-discharge of an atmospheric microwave plasma using hexamethyldisiloxane. Rodrigo Perito Cardoso1

, Thierry Belmonte2, Gérard Henrion3

1Laboratoire de Science et Génie des Surfaces, Nancy, France 2,3Laboratoire de Science et Génie des Surfaces, Nancy, France

Po2080

Studies on a microwave-heated atmospheric Plasma Torch Martina Leins1

, M. Walker2, K. M. Baumgärtner3, A. Schulz4, U.

Schumacher5, U. Stroth6 1Institut für Plasmaforschung, Universität Stuttgart, Stuttgart, Germany 2,4,5,6Universität Stuttgart, Institut für Plasmaforschung, Pfaffenwaldring 31, D-70569 Stuttgart, Germany 3Muegge Electronic GmbH, Hochstraße 4-6, D-64385 Reichelsheim, Germany

Po2081

Oxide film formations on metal surfaces by atmospheric pressure RF barrier discharge plasmas Tatsuya Suzuki1, Yukiko Sawado2

, Yasuhiko Fujii3 1Tokyo Institute of Technology, Tokyo, Japan 2Tokyo Institute of Technology, Tokyo, Japan 3Tokyo Institute of Technology, Tokyo Japan

Po2082

The Effects of Pin Density and Dielectric Thickness in Pin–to-plate Type Atmospheric Pressure Plasma Se Jin Kyung1

, Maksym Voronko2, June Hee Lee3

, Geun Young Yeom4 1Sungkyunkwan University, suwon, R.O.Korea 2,3,4Sungkyunkwan University

Po2083

Surface Modification of Carbon Electrode for Electric Double Layer Capacitors Daisuke Tashima1

, Chikahisa Honda2, Masahisa Otsubo3

, Youl-Moon Sung4

, Kenji Kurosawatsu5 1Dept. of Electrical and Electronic Engineering, Univ. of Miyazaki, Miyazaki, Japan 2,3,5Department of Electrical and Electronic Engineering, University of Miyazaki, Gakuenkibanadai-Nishi 1-1, Miyazaki 889-2192, Japan 4Department of Electrical Electronic Engineering, Kyungsung University, Busan 608-736, Korea

Po2084

Atmospheric-pressure non-equilibrium plasma produced by microwave discharge Akira Yonesu1

, Yasumasa Yamashiro2, Shousei Etoh3

, Zenya Touyama4,

Megumi Yamashiro5 1Ryukyu University, Nishihara, Okinawa, Japan 2,3,4,5Ryukyu University, Okinawa, Japan

PSE 2006 91


Po2085

Deposition of TiOx thin films by means of atmospheric barrier torch discharge Oleksander Churpita1

, Petr Špatenka2, J. Cerman3

, Štěpán Kment4, Jiří Olejníček5

, Zdenčk Hubička6, Petr Virostko7

, Hana Šíchová8, L.

Sedláčková9, Lubomír Jastrabík10

1Institute of Physics, Academy of Sciences of the Czech Republic, Praha, Czech Republic 2,3Faculty of Machinery Engineering, Technical University of Liberec, Liberec, Czech Republic 4,5,6,7,10Institute of Physics, Academy of Sciences of the Czech Republic, Prague, Czech Republic 8Faculty of Mathematics and Physics, Charles University in Prague, Czech Republic 9Faculty of Machinery Engineering, Technical University of Liberec, Czech Republic

Po2087

Atmospheric Pressure Microwave PECVD for Deposition of Scratch Resistant Silica Layers Liliana Kotte1

, Sebastian Tschöcke2, Beate Leupolt3, Ines Dani4, Volkmar

Hopfe5 1Fraunhofer IWS, Dresden, Germany, Dresden, Germany 2,3,4,5Fraunhofer IWS, Dresden, Germany

Po2088

Measurement of the energy flux to the substrate during atmospheric pressure microwave plasma processing Ruben Wiese1

, Liliana Kotte2, Holger Kersten3

, Steffen Krause4, Ines

Dani5, Volkmar Hopfe6 1Institute of Low Temperature Plasma Physics, Greifswald, Germany, Greifswald, Germany 2,4,5,6Fraunhofer IWS, Dresden, Germany 3Christian-Albrechts-Universität zu Kiel, Germany

Po2089

STUDY OF BONDING STRENGTH OF PLASMA SPRAYED Ti-Al COATING ON MILD STEEL SUBSTRATE Shinichiro Adachi1K.Nakata2 1Technology Research Institute of Osaka Prefecture, Izumi-shi ,Osaka ,, Japan 2Joining and Welding Research Institute Osaka University, Ibaraki, Osaka, Japan

Po2090

Cleaning Wall Paintings and Architectural Surfaces by Plasma Christina Pflugfelder1, Wolfgang Viöl2, Nils Mainusch3 1HAWK, University of Applied Sciences and Arts, Göttingen, Germany, Göttingen, Germany 2,3HAWK University of Applied Sciences and Arts, Göttingen, Germany

Poster - Industrial Device Technology

Po2091

Plasma diagnostics as a support for the upscaling of PVD deposition processes onto industrial coating units Daniel Parkot1, D. Parkot2, P. Immich3

, M. Maes4, R. Nickel5, E.

Lugscheider6, K. Bobzin7 1Surface Engineering Institute, Aachen, Germany 2,3,4,5,6,7Surface Engineering Institute

Po2092

Design of large-area antenna-coupling microwave plasma system for resource regeneration Jiunn-Der Liao1

, Chih-Chiang Weng2, Yi-Te Wu3

, Juu-En Chang4 1Dept. Materials Science and Engineering, National Cheng Kung Univ., Tainan, Taiwan (ROC) 2,3Dept. Materials Science and Engineering, National Cheng Kung Univ., Tainan, Taiwan (ROC) 4Dept. Environmental Engineering, National Cheng Kung Univ., Tainan, Taiwan (ROC)

92 PSE 2006


Po2093

New high efficiency remote microwave radical source with water cooled alumina plasma chamber Josef Mathuni1, A. Gschwandtner2, A. Mattheus3

, J. Sellmaier4, H. Steinhardt5 1R3T GmbH, Taufkirchen, Germany 2,3,4,5R3T GmbH, Taufkirchen, Germany

Po2094

Industrial, technical and R&D systems for plasma coating of DLC, c-BN and Diamond Karl-Heinz Dittrich1

, Joachim Mai2, Bernd Rau3 1Roth & Rau AG, Hohenstein - Ernstthal, Germany 2,3Roth & Rau AG

Po2095

Process optimization with intelligent software solutions - from component-based Process Control to in-situ Advanced Process Control (APC) Benjamin Abraham1

, Gottfried Gerlach2 1AIS Automation Dresden GmbH, Dresden, Germany 2AIS Automation Dresden GmbH,

Dresden, Germany

Po2096

Characterization of titanium nitride layers deposited on steel strip by reactive plasma activated EB evaporation Olaf Zywitzki1, Th. Modes2

, E. Reinhold3, Chr. Metzner4, B. Scheffel5, Chr.

Steuer6 1Fraunhofer Institut Elektronenstrahl- und Plasmatechnik (FEP), Dresden, Germany 2,4,5Fraunhofer Institut Elektronenstrahl- und Plasmatechnik (FEP), Dresden, Germany 3,6Von Ardenne Anlagentechnik GmbH, Dresden, Germany

Po2097

Magnetron Sputter Process for Inner Cylinder Coatings Frank Löffler

Physikalisch-Technische Bundesanstalt, Braunschweig, Germany

Po2098

Mosaic Targets: Rebirth as a Key component of the HDRM - technology Ernst Sharipov1

, Valery MITIN2, Alexey MITIN3

1Cinncotec, Company, Moscow, Russian Federation 2,3Cinncotec, Moscow, Russia

Po2099

Process simulation of ta-C deposition in industrial vacuum arc coaters Siegfried Voellmar1, Bernd Schultrich2

, Daniel Roemer3 1Fraunhofer Institute for Material and Beam Technology, Dresden, Germany 2Fraunhofer Institute for Material and Beam Technology, Dresden, Germany 3Technical University Dresden, Germany

Po2100

Sputter yields of graphite materials under xenon ion incidence Michael Tartz1

, Horst Neumann2 1Leibniz-Institute for Surface Modification, Leipzig, Leipzig, Germany 2Leibniz-Institute for Surface Modification, Leipzig

Po2101

Erosion rate improvement by pole pieces insertion in a magnetron sputtering target Corinne Nouvellon1

, R. Papantonio2, J.P. Dauchot3, P. Lefevre4

, M. Hecq5 1Unité de Chimie Inorganique et Analytique, Materia Nova, Mons, Belgium 2Service de Génie Mécanique, Faculté Polytechnique, Mons, Belgium 3,5Unité de Chimie Inorganique et Analytique, Materia Nova, Mons, Belgium 4AFTA, Achene, Belgium

PSE 2006 93


Po2102

Clustering of broad-beam ion sources Frank Scholze1

, Michael Tartz2, Horst Neumann3

1Leibniz-Institute for Surface Modification, Leipzig, Germany 2,3Leibniz-Institute for Surface Modification, Leipzig, Germany

Po2103

Coating parts from micron to meter size with diamond using hot-filament chemical vapour deposition Jan Gäbler1, Sven Pleger2, Markus Höfer3, Lothar Schäfer4 1Fraunhofer-Institut für Schicht- und Oberflächentechnik IST, Braunschweig, Germany 2,3,4Fraunhofer IST, Braunschweig, Germany

94 PSE 2006

Wednesday, September 13th Poster Session, 15:15 – 16:45

Poster - Wear and Corrosion Resistance

Po3001

High temperature properties of (Ti,Cr,Al,Si)N coatings for cutting tool application Kenji Yamamoto1

, S. Kujime2, H. Ezura3

, K. Ichijo4, T. Suzuki5, K.

Takahara6 1Kobe Steel Ltd., Kobe, Japan 2,6Kobe Steel Ltd., Kobe, Japan 3,4,5Keio University, Yokohama, Japan

Po3002

Structure and Corrosion of magnetron sputtered pure Mg-Films on silicon substrates Michael Störmer1, Carsten Blawert2, Heiko Hagen3

, Volker Heitmann4,

Wolfgang Dietzel5 1GKSS-Forschungszentrum GmbH, Geesthacht, Germany 2,3,4,5GKSS-Forschungszentrum Geesthacht GmbH

Po3003

AlCrN-based coatings for hard machining Frédéric Fontaine1

, Christoph Gey2 1Balzers AG, Balzers, Liechtenstein 2Balzers AG, Balzers, Liechtenstein

Po3004

DUPLEX PROCESS AND GRADIENT LAYER TO IMPROVE PHYSICAL AND CHEMICAL PROPERTIES Klaus Stefan Klimek1

, P. Kaestner2, K.-T. Rie3 1TU Braunschweig, Institut für Oberflächentechnik, Braunschweig, Germany 2,3TU Braunschweig, Institut für Oberflächentechnik, Braunschweig, Germany

Po3005

Properties and wear performance of chromium nitride coatings on polymer substrates Rahamathunnisa Muhammad Azam1

, M Tanttari2, T Kääriäinen3, D C

Cameron4 1ASTRaL, Lappeenranta University of Technology, Mikkeli, FINLAND 2,3,4

ASTRaL, Lappeenranta University of Technology, Mikkeli, Finland

Po3006

Deposition of SiOx-like thin films from a mixture of HMDSO and oxygen by low pressure and DBD discharges to improve the corrosion behaviour of steel Camille Petit-Etienne1

, Michael Tatoulian2, Farzaneh Arefi-Khonsari3,

Isabelle Mabille4, Eliane Sutter5

1Lab. Genie des Procédés Plasmas et Traitements de Surfaces UPMC ENSCP, Paris, France 2,3,4,5Lab. Génie des Procédés Plasmas et Traitements de Surfaces UPMC ENSCP, Paris, France

Po3007

CORROSION RESISTANT COBALT-DOPED TIN DIOXIDE SPUTTER-DEPOSITED COATINGS Eric ROLIN1

, R. Podor2, M. Vilasi3, A. Billard4 1LSGS - Ecole des Mines, Nancy, France 2,3LCSM - UHP Nancy, France 4LSGS - Ecole des Mines, Nancy, France

Po3008

Engineering and design of wear and corrosion resistant PVD coatings regarding the exceptional properties of magnesium substrates Holger Hoche1

, Herbert Scheerer2, Christina Berger3 1MPA Darmstadt, Darmstadt, Germany 2,3MPA-Darmstadt, Darmstadt, Germany

PSE 2006 95


Po3009

PROPERTIES OF SPUTTERED SI/X/C/N FILMS Daniel Allebrandt1, Christina Berger2, Erhard Broszeit3, Herbert Scheerer4, Holger Hoche5 1Institute of Materials Technology, Darmstadt University of Technology, Darmstadt, Germany 2,3,4,5Institute of Materials Technology, Darmstadt University of Technology, Darmstadt, Germany

Po3010

Tribological studies of TiN coatings deposited by combined pulsed magnetron sputtering and pulsed biasing Zhibin Liu1

, PJ Kelly2, RD Arnell3, F Velasco4

1Institute of Materials Research ,University of Salford, UK, Manchester, U.K 2Surface Engineering Group, Manchester Metropolitan University,Manchester, UK 3Institute of Materials Research, Univeristy of Salford, UK 4Jost Institute for Tribotechnology, University of Central Lancashire, Preston, UK

Po3012

Ti-Si-N nanocomposite films with a high content of Si Jindrich Musil1, Radomir Cerstvy2

, Pavel Dohnal3, Petr Zeman4 1University of West Bohemia, Plzen, Czech Republic 2,3,4University of West Bohemia

Po3013

Obtaining Coatings with High Resistance of Oxidation in High Temperatures by Application a Metalorganic Compounds. MOPVD Technology Marek Betiuk1

, Kryspin Burdyñski2, Jan Senatorski3 1Institute of Precision Mechanics, Warsaw, Poland 2,3Institute of Precision Mechanics, Warsaw, Poland

Po3016

Hard anodizing of aluminium matrix composite A6061/(Al2O3)p for wear and corrosion resistance improvement Josep A. Picas1

, Enric Martín2, Mª Teresa Baile3

, Elisa Rupérez4, Antonio

Forn5 1Technical University of Catalonia, Vilanova i la Geltrú, Spain 2,3,4,5Technical University of Catalonia, Vilanova i la Geltrú, Spain

Po3017

Noble metal coatings with high temperature and chemical resistance for glass molding applications Frank Burmeister1, Jan Hagen2

, Sigrun Ebest3, Peter Manns4, Günter

Kleer5 1Fraunhofer Institut für Werkstoffmechanik, Freiburg, Germany 2,3,4,5Fraunhofer Institut für Werkstoffmechanik

Po3018

FORMATION AND CORROSION PROPERTIES OF Mg-Ti ALLOYS PREPARED BY PHYSICAL VAPOUR DEPOSITION Carsten Blawert1, S. Mändl2, W. Dietzel3, Y. Bohne4 1GKSS Forschungszentrum Geesthacht GmbH, Geesthacht, Germany 2,4Leibniz-Institut für Oberflächenmodifizierung, Leipzig, Germany 3GKSS Forschungszentrum Geesthacht GmbH, Geesthacht, Germany

Po3019

Preparation of hard solid lubricant coatings by pulsed magnetron sputtering from powder targets Yanwen Zhou1

, Peter Kelly2, GQ Li3

1Anshan University of Science and Technology, Anshan, Liaoning Province, China

2Surface Engineering Group, Dalton Research Institute, Manchester Metropolitan University, Manchester, UK 3State Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, 116024, P.R.China

96 PSE 2006


Po3020

Dependence of the friction behaviour of hydrogenated Si-C-N coatings with the bonding structure Anne-Sophie LOIR1

, Y. Gachon2, J.C. Sánchez-López3

, T.C. Rojas4, C.

Héau5 1Instituto de Ciencia de Materiales de Sevilla, CSIC-US, SEVILLA, SPAIN 2,5HEF R&D SAS, Andrézieux-Bouthéon, France 3,4Instituto de Ciencia de Materiales de Sevilla, CSIC-US, Sevilla, Spain

Po3021

STRUCTURAL AND MECHANICAL PROPERTIES OF PVD TiAlCr(Si)N COATINGS DEDICATED TO HIGH SPEED MACHINING Frederic Lapostolle1

, Delhinger2 Rapaud3, Meunier4, Von Stebut5Coddet6

1LERMPS-UTBM, BELFORT Cedex, FRANCE 2INSA , Lyon, France 3,6LERMPS-UTBM, Belfort, France 4CREST, Montbéliard, France 5EMN, Nancy, France

Po3022

Influence of high-temperature oxide formation on the tribological behaviour of TiN and VN coatings Nazanin Fateh1

, C. Mitterer2, G. A. Fontalvo3 1Dep. Physical Metallurgy and Materials Testing, University of Leoben, Leoben, Austria 2,3Department of Physical Metallurgy and Materials Testing, University of Leoben, A-8700 Leoben, Austria

Po3023

Thermal Stability and Oxidation Resistance of Zr-Cu based PVD Nanostructured Coatings Omar Jimenez1

, K. Kanakis2, A. Leyland3

, A. Matthews4 1The University of Sheffield, Engineering Materials, Sheffield, UK 2,3,4The University of Sheffield

Po3024

Corrosion Protection of Mg-Li Alloy by Plasma Thermal Spraying of Aluminum Masato Tsujikawa1

, Shin-ichiro Adachi2, Yukiko Abe3, Sachio Oki4,

Kazuhiro Nakata5, Masaichiro Kamita6

1Graduate School of Engineering, Osaka Prefecture University, Sakai-shi, Japan 2Technical Research Institute of Osaka Prefecture, Izumi-shi, Japan 3Graduate Student Osaka Prefecture University, Sakai-shi, Japan 4Kinki University, Higashi-osaka-shi, Japan 5Osaka University, Suita-shi, Japan 6Yamani Co. Ltd., Osaka-shi, Japan

Po3025

Micro- and bonding structure of AlCrVN low-friction coatings Robert Franz1

, Christian Mitterer2, Peter Polcik3, Volker Derflinger4,

Richard Tessadri5, Bernhard Sartory6, Jörg Neidhardt7

1Christian Doppler Lab Advanced Hard Coatings, University of Leoben, Leoben, Austria 2,7Christian Doppler Lab Advanced Hard Coatings, University of Leoben, Leoben, Austria 3Plansee AG, Reutte, Austria 4Balzers AG, Balzers, Liechtenstein 5,6Christian Doppler Lab Advanced Hard Coatings, University of Innsbruck, Innsbruck, Austria

Po3026

Unlubricated sliding friction and wear of arc-evaporated TiCN hard coatings: role of the surrounding atmosphere as to the formation of tribo-layers Marisa Rebelo de Figueiredo1

, Jörg Neidhardt2, Reinhard Kaindl3, Richard Tessadri4, Christian Mitterer5 1Christian Doppler Lab. , Advanced Hard Coatings, University of Leoben, Leoben, Austria 2,5Christian Doppler Lab. Advanced Hard Coatings,University of Leoben, Leoben, Austria 3,4Christian Doppler Lab. Advanced Hard Coatings, University of Innsbruck, Innsbruck, Austria

PSE 2006 97


Po3027

Substrate effects on hard coatings morphology and adhesion Peter Panjan1

, Miha Cekada2, Darja Kek-Merl3, Matjaz Panjan4

1Jozef Stefan Institute, Ljubljana, Slovenia 2,3,4Jozef Stefan Institute, Ljubljana, Slovenia

Po3028

PERFORMANCES OF PLASMA MODIFIED ALUMINUM SURFACES IN COMBINATION WITH CHROMATE-FREE PRIMER Valerie Carlier1, M. Hecq2

, F. Renaux3, A. Azioune4

, J-J. Pireaux5, M.

Piens6 1Coatings Research Institute CoRI, Limelette, Belgium 2,3LCIA, Université de Mons-Hainaut, Mons, Belgium 4,5LISE, Facultés universitaires Notre-Dame de la Paix, Namur, Belgium 6Coatings Research Institute, Limelette, Belgium

Po3029

Interpretation of Shear Test Results of thermally sprayed Coatings Sven Hartmann1

, Friederike Deuerler2, Heinrich Grützner3, Reinhard Winkler4 1RHV-Technik GmbH & Co. KG, Waiblingen, Germany 2Bergische Universität Wuppertal, Wuppertal, Germany 3IFAM Fraunhofer Institut, Bremen, Germany 4SLV-Duisburg, NL der GSImbH, Duisburg, Germany

Po3030

High temperature wear resistance of different microstructure Cr3C2-NiCr plasma sprayed coatings Juliane Vicenzi1, Caio Marcelo Marques2

, Carlos Pérez Bergmann3 1Universidade Federal do Rio Grande do Sul, Porto Alegre, Brazil 2,3Universidade Federal do Rio Grande do Sul, Porto Alegre, Brazil

Po3031

Deposition and characterization of quasicrystal coatings thin film and quasicrystal composite thin film Aurélie Stihle1

, Lapostolle2 Liao3, Allain4

, Kenzari5 Coddet6 1LERMPS-UTBM, BELFORT Cedex, FRANCE 2,3,4,6LERMPS-UTBM, Belfort, France 5LSG2M - Ecole des Mines de Nancy, France

Po3032

High-temperature resistant coatings deposited by Combined Magnetron Sputtering and Ion Implantation Eduard Grigore1

, C. Ruset2, M. Chivu3, C. Coman4

, H. Dong5, X. Li6

1National Institute for Laser, Plasma and Radiation Physics, Bucharest-Magurele, Romania 2National Institute for Laser, Plasma and Radiation Physics 3,4Institute for Metallurgical Research, Bucharest, Romania 5The University of Birmingham, Department Metallurgy & Materials 6The University of Birmingham, Department Metallurgy & Materials, Edgbaston, Birmingham B15 2TT, United Kingdom

Po3033

Silica coatings on steel substrates deposited by bipolar pulsed DC PACVD Christian Forsich1

, D. Heim2, T. Müller3

1University of Applied Sciences, Wels, Austria 2University of Applied Sciences, 4600 Wels, Austria 3RÜBIG GmbH & Co KG, 4600 Wels, Austria

Po3034

Pulsed reactive PVD-alumina for low melting polymers Anika Krämer1, R. Nickel2, E. Lugscheider3, K. Bobzin4

, N. Bagcivan5 1Surface Engineering Institute, Aachen, Germany 2,3,4,5Surface Engineering Institute, Aachen, Germany

98 PSE 2006


Po3035

Design and performance of a high temperature particle impingement erosion rig Caio Marcelo Marques1

, Juliane Vicenzi2, Carlos Pérez Bergmann3 1Universidade Federal do Rio Grande do Sul, Porto Alegre, Brazil 2,3Universidade Federal do Rio Grande do Sul, Porto Alegre, Brazil

Po3036

Comparison of Sputtered and Arc-evaporated AlCrN Hard Coatings Jörg Neidhardt1, C. Mitterer2, R. Tessadri3, A. Reiter4, B. Sartory5

, C. Tritremmel6 1C. Doppler Lab. Advanced Hard Coatings, University of Leoben, Austria, Leoben, Austria 2,6C. Doppler Lab. Advanced Hard Coatings, University of Leoben, Leoben, Austria 3,5C. Doppler Lab. Advanced Hard Coatings, University of Innsbruck, Innsbruck, Austria 4Balzers AG, Liechtenstein

Po3037

EFFECT OF ALLOYNG ELEMENTS ON THE TRIBO-MECHANICAL BEHAVIOUR OF NANOCRYSTALLINE Cr(Al)N COATINGS Marta Brizuela1

, D. González2, A. García-Luis3

, P. Corengia4 1Fundación INASMET-Tecnalia, Donostia-San Sebastian, Spain 2,3,4Fundacion Inasmet-Tecnalia, Donostia-San Sebastian, Spain

Po3038

Morphology of ion-beam coatings on the base of Ti with additions of ultradispersed diamonds and ultradispersed Al2O3. Mikhail Andreyev1

, Lyudmila Markova2, Alexander Ilyuschenko3

1Head of the department of Powder Metallurgy Institute, Minsk, Belarus 2,3Powder Metallurgy Institute, Minsk, Belarus

Po3039

A HIGH-TEMPERATURE OXIDATION RESISTANCE OF NOVEL Si-B-C-N COATINGS PREPARED BY REACTIVE MAGNETRON SPUTTERING Stanislav Hreben1

, Jaroslav Vlcek2, Stepan Potocky3

, Jiri Kalas4, Petr

Zeman5, Karel Rusnak6

, Vratislav Perina7, Yuichi Setsuhara8

1University of West Bohemia, Plzen, Czech Republic 2,3,4,5,6University of West Bohemia 7Academy of Sciences of the Czech Republic 8Osaka University

Po3040

Temperature behaviour of Si-B-C-N coatings up to a 1300 C substrate limit Jiri Kalas1

, J. Vlcek2, S. Potocky3

, S. Hreben4, J. Houska5

, K. Rusnak6, P.

Zeman7, V. Perina8

1University of West Bohemia, Plzen, Czech Republic 2,3,4,5,6,7University of West Bohemia, Plzen, Czech Republic 8Academy of the Sciences of the Czech Republic, Rez near Prague, Czech Republic

Po3041

CHANGE IN WEAR BEHAVIOUR OF Ti AND Ti6Al4V AFTER PLASMA IMMERSION ION IMPLANTATION Stephan Mändl1, M. Ducherow2

, A. Fleischer3 1Leibniz-Institut für Oberflächenmodifizierung, Leipzig, Germany 2,3Leibniz-Institut für Oberflächenmodifizierung

Po3042

Micro-abrasive wear resistance of CrN and CrSiN coatings Mingdong Bao1

, He Jiawen2, Sébastien WERY3

, Xu Xuebo4, Bao

Mingdong5, Sun Hailin6

, Dennis Teer7 1Ningbo university of technology, Ningbo, China 2State Key Lab. for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi'an 710049, China 3TechnologyCRI University of Perpignan, 66860 Perpignan, France 4,5School of mechanical engineering, Ningbo University of technology, Ningbo 315016, China 6,7Teer Coatings Ltd., Droitwich Worcestershire WR9 9AS, UK

PSE 2006 99


Po3043

Electromechanical Behavior of Nanoscaled Silver Coatings on PET Fibers Martin Amberg1

, Dirk Hegemann2, Kathrin Grieder3, Pierluigi Barbadoro4

1EMPA Materials Science and Technology, St. Gallen, Switzerland 2,3,4EMPA Materials Science and Technology

Po3044

The Role of Surface Defects Density on Corrosion Resistance of CrN, TiAlN PVD Hard Coatings on Different Substrates Darja Kek-Merl1, Peter Panjan2 1Jozef Stefan Institute, Ljubljana, Slovenia 2Jozef Stefan Institute, Ljubljana, Slovenia

Po3045

Optimization and characterization of electrodeposited coatings of Ni-SiC Hachemi Ben Temam1

, M. R. Baaissa2, L. Zeroual3, A. Chala4

, C. Nouveau5

, S. Rahmane6 1Département de Chimie Industrielle, Université de Biskra, Biskra, Algeria 2Département de Chimie Indistrielle, Université de Biskra, 07000 Biskra, Algeria 3Département de Génie des Procédés, Université de Sétif, 19000 Sétif, Algeria 4,6Département de Physique, Université de Biskra, 07000 Biskra, Algeria 5LaBoMaP, ENSAM, 71250 Cluny, France

Po3046

Influence of Si-chemical bonding on the semiconductive and anti-corrosion properties of SiCN coatings David Pech1

, P. Steyer2, A.-S. Loir3, J.C. Sánchez-López4, Y. Gachon5

,

C. Héau6 1Laboratoire de Physico-Chimie Industrielle, INSA de Lyon, VILLEURBANNE Cedex, FRANCE 2Laboratoire de Physico-Chimie Industrielle, INSA de Lyon, Villeurbanne, France 3,4Instituto de Ciencia de Materiales de Sevilla, CSIC-US, Sevilla, Spain 5,6HEF R&D SAS, Andrézieux-Bouthéon, France

Po3047

Effect of Thermal Oxidation on Properties of Aluminium Film Shabnam Daemi Milani1, Mahmood Ghoranneviss2

, Abbas Anvari3, Mohammad Reza Hantehzadeha4

, Masumeh Shariati5 1Plasma Physics Research Center, Islamic Azad University, Tehran, Iran 2,4,5Plasma Physics Research Center, Tehran, Iran 3Sharif University of Technology, Tehran, Iran

Po3048

Corrosion response dependence on wide temperature ranges in low energy nitrogen PIII of austenitic stainless steels Regulo López-Callejas1

, A. E. Muñoz-Castro2, R. Valencia A.3, S. R.

Barocio4, A. Mercado-Cabrera5

, R. Peña-Eguiluz6, O. Godoy-Cabrera7

, A. de la Piedad-Beneitez8 1ININ Plasma Physics Laboratory, Mexico, DF, Mexico 2,3,4,5,6,7,8ININ Plasma Physics Laboratory, Mexico, DF, Mexico

Po3049

ENERGY SAVING ELECTROLYTE-PLASMA TECHNOLOGIES FOR THERMAL-CYCLING SURFACE HARDENING OF BIG-SIZE TOOLS Yuriy Tyurin1

, S.I. Golovenko2, M.L. Zgadkevich3

1E.O.Paton Electric Welding Institute NAS Ukraine, Kiev, Ukraine 2,3Electric Welding Institute O.E.Paton

Po3050

Dry Machining Using CrAlYN Coated Carbides Burkhard Schramm1

, E. Abele2, C. Berger3, H. Scheerer4, E. Broszeit5

1Technische Universität Darmstadt, Darmstadt, Germany 2,3,4,5Darmstadt University of Technology, Germany

100 PSE 2006


Po3051

Utilization of Industrial Waste To Develop Wear Resistant Overlay Coatings S.C. Mishra1

, K.P. Sreekumar2, Alok Satapathy3, K.C. Sabat4, P.V.

Ananthapadmanabhan5 1National Institute of Technology, Rourkela, India 2,5Laser & Plasma Technology Division, B. A. R. C., Mumbai, India 3,4Indian Institute of Technology, Bombay, India

Po3052

EROSION WEAR BEHAVIOUR OF REDMUD-FLYASH COMPOSITE COATINGS S.C. Mishra1

, Alok Satapathy2, K.C. Sabat3, P.V. Ananthapadmanabhan4

,

K.P. Sreekumar5 1National Institute of Technology, Rourkela, India 2,3Indian Institute of Technology, Bombay, India 4,5Laser & Plasma Technology Division, B. A. R. C., Mumbai, India

Poster - Hybrid and Duplex Processes

Po3053

Galvanically strengthened PVD copper metallization films on ABS: a model study on Adhesion Cor Schrauwen1

, Anneke Bloksma2, Robert Renders3

, Roland Tacken4,

Vincent Frenken5, Thijs van Oudheusden6

1TNO S&I, Materials Technology, Coating & Multilayer Devices, Eindhoven, The Netherlands 2,3,4,5,6TNO S&I, Eindhoven, NL

Po3055

A zirconia film preparation by a zirconium-oxygen plasma using a positively biased electrode Ken Yukimura1

, Takashi Ikehata2, Xinxin Ma3

, Igor Levchenko4, Shuhei

Akashi5 1Department of Electrical Engineering, Doshisha University, Kyotanabe, Japan 2Department of Electrical and Electronic Engineering/Ibaraki University,Hitachi, Japan 3School of Material Science and Engineering/ Harbin Institute of Technology, Harbin, PR China 4School of Physics/The University of Sydney, Sydney, Australia 5Department of Electrical Engineering/Doshisha University, Kyotanabe, Japan

Po3056

Mechanical Properties of Metal Coatings Deposited by Ion Assisted EB PVD on Ni-based Alloys Karl Berreth1

, Eberhard Pflüger2, Abram Lyutovich3, Karl Maile4

, Eberhard Roos5 1Materialprüfungsanstalt (MPA) Universität Stuttgart, Stuttgart, Germany 2Coatings and Surface Measurement,/CSM Insturments, Neuchâtel, Swiss 3,4,5Materialprüfungsanstalt (MPA)/Universität Stuttgart, Stuttgart, Germany

Po3057

Parallel operation of hollow cathode- and vacuum arc plasma for hard material coating process Martin Holzherr1, Michael Falz2

, Bernd Bücken3 1VTD VAKUUMTECHNIK DRESDEN GmbH, Dresden, Germany 2,3VTD VAKUUMTECHNIK DRESDEN GmbH

PSE 2006 101


Po3058

Thin TiCN Films Prepared by Hybrid Magnetron - Laser Deposition Tomas Kocourek1

, C. Popov2, J. Kadlec3

, M. Jelínek4, A. Santoni5

1Institute of Physics AS CR, Prague, Czech Republic, Praha, Czech Republic 2Institute of Microstructure Technologies and Analytics, University of Kassel, Germany 3Military Academy, Brno, Czech Republic 4Institute of Physics AS CR, Prague, Czech Republic 5ENEA, Centro Ricerche Frascati, Roma, Italy

Po3059

Enhanced mechanical and tribological properties of AISI 304 stainless steel by using a hybrid nitriding process Rogerio Oliveira1

, Mario Ueda2, Ing Hwie Tan3

, Lilian Hoshida4 1Instituto Nacional de Pesquisas Espaciais, Sao Jose dos Campos, Brazil 2,3,4Instituto Nacional de Pesquisas Espaciais, Sao Jose dos Campos, Brazil

Po3060

INFLUENCE OF MICROSTRUCTURE ON NITROGEN DIFFUSION IN Fe-Cr-Ni THIN FILMS Darina Manova1

, Y. Bohne2, S. Mändl3, H. Neumann4

, B. Rauschenbach5 1Leibniz-Institut für Oberflächenmodifizierung, Leipzig, Germany 2,3,4,5Leibniz-Institut für Oberflächenmodifizierung

Po3062

PLASMA DUPLEX TECHNOLOGY WHICH ARE APPLIED TO HARDEN TOOLS IN METALLURGY Yuriy Tyurin1

, O.V.Kolisnichenko2 A.D.Pogrebnjak3, M.L., Zgadkevich4

1E.O.Paton Electric Welding Institute NAS Ukraine, Kiev, Ukraine 2,4Electric Welding Institute O.E.Paton, Kiev, Ukraine 3Sumy Institute for Surface Modification, Sumy, Ukraine

Poster - Nanocomposite Films

Po3063

Nanocomposite Alumina-Zirconia Thin Films by Reactive Dual RF Magnetron Sputtering David Trinh1

, Lars Hultman2, Ingrid Reineck3

, Marianne Collin4, Hans

Högberg5 1Linköpings Universitet, Linköping, Sweden 2,5Linköpings Universitet 3,4

AB Sandvik Tooling

Po3064

Structural and mechanical properties of (Al, Cr)N and nanocomposite nc-(Al, Cr)N/a-SiNx coatings reactively sputter deposited David MERCS1

, Sophie LAMY2, Christian CODDET3

, Pascal BRIOIS4,

Valérie DEMANGE5 1LERMPS-UTBM, BELFORT Cedex, FRANCE 2,3,4UTBM-LERMPS, Belfort, France 5LSGS, Nancy, France

Po3065

Development of PVD - TiAlN/C nano-composite coatings for pressure die-casting applications Masateru Nose1

, Seiichi Masa2, Xuili Ma3

, Tokimasa Kawabata4, Susumu

Ikeno5, Takekazu Nagae6

, Kiyoshi Nogi7, Miki Ohi8 1Facalty of Art and Design, University of Toyama, Takaoka, Japan 2,8Hokunetsu Co. Ltd., Toyama, Japan 3Graduate Student of Engineering School, University of Toyama, Japan 4,5Faculty of Engineering, University of Toyama, Japan 6Toyama Industrial Research Center, Takaoka, Japan 7Joining and Welding Research Institute, Osaka University, Japan

102 PSE 2006


Po3066

The Structure and Mechanical Properties of PVD TiSi(B,N) Coatings Deposited by DC-pulse Unbalanced Magnetron Sputtering Martynas Audronis1

, E.A. Levashov2, A. Leyland3

, F.V. Kiryukhantsev-Korneev4

, A. Matthews5, D.V. Shtansky6

1Department of Engineering Materials, The University of Sheffield, UK, Sheffield, UK 2,4,6Moscow State Institute of Steel and Alloys, Russia 3,5Department of Engineering Materials, The University of Sheffield, UK

Po3067

Method for Improvement the Adhesion of Nanofibres/Nanoparticles Reinforced Polypropylene Valentin Chirila1

, Gabriela Marginean2, Tudor Iclanzan3

, César Merino4,

Waltraut Brandl5 1University of Applied Sciences Gelsenkirchen, Gelsenkirchen, Germany, Gelsenkirchen, Germany 2,5University of Applied Sciences Gelsenkirchen, Department of Materials Science, Gelsenkirchen, Germany 3University “Politehnica” of Timisoara, Faculty of Mechanical Engineering, Timisoara, Romania 4Grupo Antolin Ingenieria, Carbon Nanofibres Research Group, Burgos, Spain

Po3068

Multifunctional Ti-Si-C nanocomposite thin films deposited by dc magnetron sputtering Per Eklund1

, Henrik Ljungcrantz2, Torbjörn Joelsson3

, Ulf Jansson4, Ola

Wilhelmsson5, Jens Emmerlich6

, Lars Hultman7, Hans Högberg8

1Linköping University, IFM, Thin Film Physics Division, Linköping, Sweden 2,3Impact Coatings AB 4,5Dept. of Materials Chemistry, Uppsala University 6,7,8Linköping University, IFM, Thin Film Physics Division

Po3069

The correlation between the constitution, microstructural evolution and properties of non-reactively magnetron-sputtered TiC/a-C nanocomposite coatings – a review Sven Ulrich1

, E. Lewin2, M. Lattemann3

, J. Halbritter4, M. Stüber5, C. Ziebert6, M. Rinke7

, U. Helmersson8, U. Jansson9

1Forschungszentrum Karlsruhe, Institute for Materials Research I, Eggenstein-Leopoldshafen, Germany 2,9Uppsala University, Department of Materials Chemistry, The Ångström Laboratory, Uppsala, Sweden 3,8Linköping University, IFM Material Physics, Linköping, Sweden 4,5,6,7Forschungszentrum Karlsruhe, Institute for Materials Research I, Eggenstein-Leopoldshafen, Germany

Po3071

Al-Cr-N coatings deposited by an arc-magnetron hybrid process Vishnu RACHPECH1

, V. Chapusot2, J.F. Pierson3, J. von Stebut4, A.

Billard5 1LSGS, Ecole des Mines de Nancy, Nancy, France 2PVDco s-à-r-l, Baccarat, France 3,4,5LSGS, Ecole des Mines, Nancy, France

Po3072

Structure and mechanical/tribological properties of TiN-Ag nanocomposite coatings Harald Köstenbauer1, G. A. Fontalvo2

, J. Keckes3, C. Mitterer4

1Dep. Physical Metallurgy and Materials Testing, University of Leoben, Leoben, Austria 2,4Department of Physical Metallurgy and Materials Testing, University of Leoben, A-8700 Leoben, Austria 3Department of Materials Physics, University of Leoben, A-8700 Leoben, Austria

Po3073

Mechanical, electrical and optical properties of CrSiN nanocomposite films elaborated by co-sputtering deposition David Pilloud1ROUSSELOT2 1Institut FEMTO-ST, Dpt CREST, University of Franche-Comté (France), MONTBELIARD, FRANCE 2Institut FEMTO-ST, Dpt CREST, University of Franche-Comté (France)

PSE 2006 103


Po3074

Thermal stability and oxidation resistance of chromium-copper nanocomposite coatings deposited by electron beam PVD. Kostas Kanakis1

, A. Matthews2, A. Leyland3

, M. Monclus4, M. Baker5, O.

Jimenez6 1University of Sheffield, Department of Engineering materials, Sheffield, UK 2,3,6University of Sheffield, Department of Engineering materials, Sheffield, UK 4,5University of Surrey, School of engineering, Surrey, UK

Po3075

Characterization of Ar/N2 discharges during the reactive deposition of Cr-Si-N coatings by means of magnetron sputtering assisted by RF plasmas Mira BARAKET1

, David MERCS2, Christian CODDET3

1LERMPS-UTBM, BELFORT Cedex, FRANCE 2,3LERMPS-UTBM

Po3076

Effect of Ti content on the mechanical properties of nanocomposite Ti-C-N film J.J. Li1, P.Xu2 Q.Wang3

, Z.L.Wang4C.Z.Gu5 1 Institute of Physics, Chinese Academy of Sciences, Beijing, China 2,3,4,5Institute of Physics,Chinese Academy of Sciences/Beijing/CHina

Po3077

Structural and mechanical properties of Zr-B-N nanocomposite thin films prepared by triode sputtering Abdelouahad Chala1

, C. Saied2, M. A. Djouadi3

1Département de Physique, Université de Biskra, Biskra, Algeria 2Département de Physique, Université de Biskra, BP 145 RP, 07000 Biskra, Algeria 3Institut des Matériaux Jean Rouxell, 44322 Nantes, France

Po3079

Preparation and characterization of nanocomposite films Sn or SnO2 with hydrocarbon plasma polymer matrix Jaroslav Pavlik1

, Jindrich Matousek2, Tomas Vagner3, Zdenek Stryhal4

1Faculty of Science, J.E.Purkinje University, Usti nad Labem, Czech Republic 2,3,4Faculty of Science, J.E.Purkinje University in Usti nad Labem, Czech Republic

Po3080

Computer Study of Composite and Nanocomposite Films Stanislav Novak1

, Martin Svec2, Rudolf Hrach3

1Faculty of Science, J.E.Purkinje University, Usti nad Labem, Czech Republic 2Faculty of Science, J. E. Purkinje University in Usti nad Labem, Czech Republic 3Faculty of Mathematics and Physics, Charles University, Prague, Czech Republic

Po3081

Fe-B-N NANOCOMPOSITES FORMED BY CRYSTALLISATION OF AMORPHOUS REACTIVELY SPUTTERED FILMS Jean-François Pierson1

, Albano Cavaleiro2 1LSGS - Ecole des Mines, NANCY, France 2DEM / University of Coimbra, Coimbra, Portugal

Po3084

The Corrosion Behaviour of Austenitic 316L Stainless Steel after Low-T Plasma Nitridation in the Physiological Solutions Levent Trabzon1

, Erdem Arslan2, M. Cem Igdil3, Kursat Kazmanli4, Turgut

Gulmez5 1Istanbul Technical University, Istanbul, Turkey 2,3,5ITU Mechanical Engineering, Istanbul Turkiye 4ITU Materials and Metallurgical Engineering, Istanbul Turkiye

104 PSE 2006


Po3085

A phenomenological model of plasma electrolytic saturation (PES) of steel in related solutions Peyman Taheri1, mahmood Aliof Khazraei2, Alireza Sabour Rouhaghdam3

, Changiz Dehghanian4 1University of Tehran-Tehran-Iran, Tehran, Iran 2,3Tarbiat modares University, Tehran, Iran 4University of Tehran, Tehran, Iran

Po3086

Complex surface treatments combining plasma electrolytic nitro-carburising, boro-nitriding, boro-carburizing and boro-carbonitriding Peyman Taheri1, Changiz Dehghanian2

, mahmood Aliof Khazraei3, Alireza Sabour Rouhaghdam4 1University of Tehran-Tehran-Iran, Tehran, Iran 2University of Tehran, Tehran, Iran 3,4Tarbiat modares University, Tehran, Iran

Po3087

Effect of CH4 on the compound layer properties of AISI H13 tool steel in plasma nitrocarburizing process Rodrigo Leonardo de Oliveira Basso1

, C. A. Figueroa2, L. F. Zagonel3, H.

O. Pastore4, D. Wisnivesky5

, F. Alvarez6 1Instituto de Física Gleb Wataghin, Unicamp, Brazil, Campinas, Brazil 2,3,5,6Instituto de Física Gleb Wataghin, Unicamp, Brazil 4Instituto de Quimica, Unicamp, Brazil

Po3088

ON THE OXYGEN EFFECT IN PLASMA NITRIDING OF METAL ALLOYS Carlos Figueroa1

, Sylvan Weber2, Thierry Czerwiec3, Fernando Alvarez4

1IFGW-UNICAMP, Campinas, Brazil 2Laboratoire de Physique des Matériaux (UMR CNRS 7556), Ecole des Mines, Parc de Saurupt, 54042 Nancy Cedex, France 3Laboratoire de Science et Génie des Surfaces, (UMR CNRS 7570), Institut National Polytechnique de Lorraine, Ecole des Mines de Nancy, Parc de Saurupt, 54042 Nancy Cedex, France 4IFGW-UNICAMP, Campinas, Brazil

Po3089

Precipitates temperature dependence in nitrited AISI H13 tool steels obtained by ion beam treatment Luiz Zagonel1, R. L. O. Basso2

, Fernando Alvarez3 1IFGW-Unicamp, Campinas, Brazil 2,3IFGW-Unicamp, Campinas, Brazil

Po3090

Fast nitriding of AISI H13 steels by inductively coupled plasma Dong-hoon Han1

, Bohwan Park2, Jung-joong Lee3

1Seoul National University, Seoul, South Korea 2,3Seoul National University, Seoul, South Korea

Po3091

Sliding wear and mechanical properties of AISI 316L nitrided by DC-pulsed plasma nitriding Pablo Corengia1

, A. García-Luis2, M. Brizuela3

, D. A. Egidi4, E. Las Heras5

, D. González-Santamaría6 1Energy Unit, INASMET-Tecnalia and Surf. Eng. Group INTI, Donostia-San Sebastián, Spain 2,3,6INASMET-Tecnalia, Donostia-San Sebastián, Spain 4,5Instituto Nacional de Tecnología Industrial, San Martín, Argentina

PSE 2006 105


Po3092

Microstructure, morphology and wear behavior of DC-pulsed plasma nitrided (DCPPN) AISI 316L austenitic stainless steel Evangelina Las Heras1

, D. González Santamaría2, A. García-Luis3

, A. Cabo4

, M. Brizuela5, G. Ybarra6

, N. Mingolo7, S. Brühl8, P. Corengia9

1Surf. Eng. Group, INTI, San Martín, Buenos Aires, Argentina 2,3,5INASMET-Tecnalia, Donostia-San Sebastián, Spain 4Ionar S.A., Buenos Aires, Argentina 6Instituto Nacional de Tecnología Industrial, San Martín, Argentina 7Comisión Nacional de Energía Atómica, San Martín, Buenos Aires, Argentina 8Universidad Tecnológica Nacional, 3260 Concepción del Uruguay, Argentina 9INASMET-Tecnalia, Donostia-San Sebastián, Spain. Instituto Nacional de Tecnología Industrial, San Martín, Argentina

Po3093

Experimental study and simulation of titanium alloys surface mechanical properties modified by plasma nitriding: influence on adhesion of a-SiC:H coatings Laurent Thomas1

, M.Joinet2 J.F.Caudrelier3, C.Chaussavoine4, V.Lucas5

F.Teyssandier6 1PROMES - CNRS, Perpignan, France 2,3,4,6PROMES - CNRS, Perpignan, France 5EADS/CCR, Suresnes, France

Po3094

CORRELATION BETWEEN TREATMENT HISTORY OF STEEL AND NITRIDING PROPERTIES Darina Manova1

, S. Mändl2, H. Neumann3, B. Rauschenbach4

1Leibniz-Institut für Oberflächenmodifizierung, Leipzig, Germany 2,3,4Leibniz-Institut für Oberflächenmodifizierung

Po3095

DC-Pulsed Plasma Nitriding Process: The effect of blind holes size on surface properties Celeste Calahonra1

, E. De Las Heras2, A. García-Luis3

, M. Brizuela4, D.

González-Santamaría5, P. Corengia6

, H. Svoboda7 1INTI and Faculty of Engineering, UBA, San Martín , Buenos Aires, Argentina 2Instituto Nacional de Tecnología Industrial, San Martín, Argentina 3,4,5INASMET-Tecnalia, Donostia-San Sebastián, Spain 6INASMET-Tecnalia, Donostia-San Sebastián, Spain. Instituto Nacional de Tecnología Industrial, San Martín, Argentina 7Faculty of Engineering, University of Buenos Aires, Ciudad de Buenos Aires, Argentina.

Po3096

Acceleration of Carbon Diffusion by Molybdenum in Low-Temperature Plasma Carburizing of Austenitic Stainless Steel Masato Tsujikawa1

, Akira Okamoto2, Nobuhiro Ueda3

, Naohiko Yamauchi4, Shin-ichi Noguchi5, Takumi Sone6 1Graduate School of Engineering, Osaka Prefecture University, Sakai-shi, Japan 2,3,4,6Technical Research Institute of Osaka Prefecture 5Graduate Student of Osaka Prefecture University

Po3097

Determination of the optimum conditions for ion nitrinding of 32CDV13 low alloy steel Chahinez Saied1

, A. Chala2, C. Nouveau3

, M.A. Djouadi4 1Département de Physique, Université de Biskra, Biskra, Algeria 2Département de Physique, Université de Biskra, BP 145 RP, 07000 Biskra, Algeria 3LaBoMaP, ENSAM, 71205 Cluny, France 4Institut des Matériaux Jean Rouxell, 44233 Nantes, France

Po3098

Tribological behavior of surface treated Gamma based Titanium Aluminides Ahmad Reza Rastkar1, Ahmad Reza Rastkar2, Ali Reza Niknam3

, Babak Shokri4 1Laser & Plasma Research Institute, Tehran, IRAN 2,3,4Laser & Plasma Research Institute, Shahid Beheshti University, Tehran, IRAN

106 PSE 2006


Poster - Plasma Polymerization

Po4001

Reactions at functional plasma polymer/ liquid interfaces Renate Förch1

, N. Queralto2, L. Francesch3

, S. Borros4, G. Bumbu5

, R. Berger6, W. Knoll7 1Max Planck Institut Für Polymerforschung, Mainz, Germany 2,5,6,7MPI-P, Mainz, D 3,4IQS, Barcelona, E

Po4002

Pressure dependence of plasma polymerization of methane at constant W/FM Renate Förch1

, N. Queralto2, L. Francesch3

, S. Borros4, G. Bumbu5

, R. Berger6, W. Knoll7 1Max Planck Institut Für Polymerforschung, Mainz, Germany 2,5,6,7MPI-P, Mainz, D 3,4IQS, Barcelona, E

Po4003

Surface analysis of plasma chemically deposited styrene/allylamine co-polymer films Umut Oran1

, W. E. S. Unger2, J. F. Friedrich3, S. Swaraj4

1BAM (Bundesanstalt fuer Materialforschung und -pruefung), Berlin, Germany 2,3,4BAM (Bundesanstalt fuer Materialforschung und -pruefung), Berlin, Germany

Po4004

Plasma deposition of conjugated polymer coatings at atmospheric pressure Roel Dams1

, Julien Bardon2, Jerome Bour3, David Ruch4

, Dirk Vangeneugden5

, Dirk Vanderzande6 1Vito, Flemish institute for technological research, Mol, Belgium 2,3,4Laboratoire de Technologie Industrielle (LTI), centre de recherche public Henri Tudor, Esch sur Alzette, Luxembourg 5Vito, Flemish institute for technological research, Mol, Belgium 6University of Hasselt, Institute for Material Research (IMO), Division Chemistry, Diepenbeek, Belgium

Po4005

Surface chemical characterization of plasma-polymerized organic films: State-of-the-art and shortcomings Wolfgang E. S. Unger1, Andreas Lippitz2

, Asmus Meyer-Plath3, Umut

Oran4, Sufal Swaraj5

1Bundesanstalt für Materialforschung und –prüfung (BAM), Berlin, Germany 2,3,4,5Bundesanstalt für Materialforschung und –prüfung (BAM), Berlin, Germany

Po4006

MICRO/NANO-STRUCTURED FLUORINATED SURFACES MODULATE CELLS ADHESION AND GROWTH. Erica D'Aloia1

, Roberto Gristina2, Pietro Favia3

, Giorgio Saverio Senesi4, Riccardo d'Agostino5 1Department of Chemistry, University of Bari, Italy, Bari, Italy 2,4Institute of Inorg. Methodology of Plasma, (IMIP) CNR, Via Orabona 4, 70126, Italy 3,5Department of Chemistry, University of Bari, Via Orabona 4, 70126, Italy and Institute of Inorg. Methodology of Plasma, (IMIP) CNR, Via Orabona 4, 70126, Italy

Po4007

Characterization of Plasma Polymerized Allyl Alcohol and Styrene Homopolymers and Copolymers Renate Mix1

, Vanessa Gerstung2, Jörg F. Friedrich3

1BAM-Berlin, Berlin, Deutschland 2,3BAM, Berlin, Deutschland

PSE 2006 107


Po4008

Plasma polymerization of different organic precursors containing amine groups: Correlation between OES and XPS measurements Laurent Denis1

, Michel Hecq2, Yvan Segui3, André Ricard4

, Fabian Renaux5

, Rachel Gouttebaron6 1LCIA, University of Mons-Hainaut, Mons, Belgium, Mons, Belgium 2,5LCIA, University of Mons-Hainaut, Mons, Belgium 3LGET, University Paul Sabatier, Toulouse, France 4CPAT, University Paul Sabatier, Toulouse, France 6LCIA, Materia Nova, Mons, Belgium

Po4009

Diagnostics of Deposition Processes in the Dielectric Barrier Discharge Afterglow running in Ar/Fluorocarbon Mixtures Igor Vinogradov1

, M. Shakhatre2, A. Lunk3

1Institute for Plasma Research, Stuttgart, Germany 2,3Institute for Plasma Research, Stuttgart, Germany

Po4010

PLASMA CHEMISTRY OF TETRAMETHYLSILANE PRECURSOR DURING THE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF SIOXCYHZ THIN FILMS Angel Barranco1

, Angel Yanguas2, José Cotrino3

, Agustín R. González-Elipe4

, Pierangello Groening5 1Instituto de Ciencia de Materiales de Sevilla, Sevilla, Spain 2,3,4Instituto de Ciencia de Materiales de Sevilla, Sevilla, Spain 5EMPA

Po4011

Conductive polymer films produced by plasma polymerization Espedito Vassallo1

, F. Ghezzi2, M. Catellani3, L. Laguardia4, S. Luzzati5,

D. Ricci6, F. Dell'Era7 1CNR-Istituto di Fisica del Plasma, Milan, Italy 2,4,6,7CNR-Istituto di Fisica del Plasma, Milan, Italy 3,5CNR-Istituto per lo Studio delle Macromolecole

Po4012

LANGMUIR PROBE MEASUREMENTS IN POLYMER DEPOSITING PLASMAS TO QUANTIFY FUNDAMENTAL PLASMA PARAMETERS Maximilian Paul Baier1, Michael Haupt2, Jakob Barz3

, Christian Oehr4 1Fraunhofer Institute for Interfacial Engineering and Biotechnology, Stuttgart, Germany 2,3,4Fraunhofer Institute for Interfacial Engineering and Biotechnology, Stuttgart, Germany

Po4013

R. f. magnetron sputtering of polypropylene in mixture of argon and nitrogen Jan Hanus1

, Hynek Biederman2, Danka Slavinska3

, Andrei Choukourov4,

Jaroslav Kousal5 1Charles University at Prague, Faculty of Mathematics and Physics, Prague, Czech Republic 2,3,4,5Charles University at Prague, Faculty of Mathematics and Physics, Prague, Czech Republic

Po4014

Synthesis of Organic–Inorganic Hybrid-Polymer Thin Films by PECVD Method and Characterization of Their Electrical and Optical Properties In-Seob Bae1

, S.-J. Cho2, J.-S. Hyun3

, W. S. Choi4, B. Hong5, J.-H. Boo6

1Department of Chemistry and CAPST, Sungkyunkwan University, Suwon, Republic of Korea 2,3,6Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Republic of Korea 4,5School of Information and Communication Eng. and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Republic of Korea

108 PSE 2006


Po4015

RF-plasma deposition and surface characterization of stable (COOH)-rich thin films from cyclic L-lactide Bianca Rita Pistillo1

, L. Detomaso2, E. Sardella3

, P. Favia4, R. d'Agostino5

1Department of Chemistry, University of Bari, Bari, Italy 2,3,4,5Department of Chemistry, University of Bari, Bari, Italy

Po4016

Investigation of plasma polymer coatings deposited by means of Strip Hollow Cathode (SHC) method Krasimir Nikolov1

, Nicole Sämann2, Bernd Schuhmacher3

1DOC Dortmunder Oberflächencentrum GmbH, Dortmund, Germany 2,3DOC Dortmunder Oberflächencentrum GmbH, Dortmund, Germany

Po4017

Infrared and morphological investigations of plasma-polymerised thin silicon nitride films deposited with the Plasmodul® Andreas Schulz1

, M. Walker2, L. Steiner3, U. Schweitzer4, J. Schneider5, M. Leins6

, S. Enge7, U. Stroth8

1Institut für Plasmaforschung der Universität Stuttgart, Stuttgart, Germany 2,3,4,5,6,7,8Institut für Plasmaforschung der Universität Stuttgart, 70569 Stuttgart, Germany

Po4018

Plasma polymerization of allylamine films by an ion gun inverse magnetron Iñigo Braceras Izaguirre1

, R. Muñoz2, P. Corengia3

, N. Briz4, A. García-

Luis5, D. González-Santamaría6

, M. Brizuela7 1Biomaterials Department, INASMET-Tecnalia, Donostia-San Sebastián, Spain 2,3,4,5,6,7INASMET-Tecnalia, Donostia-San Sebastián, Spain

Po4019

Electron-Spin-Resonance: A Study of Radicals in Plasma Polymers to improve the Quality of Functional Coatings Michael Haupt1, Maximilian Baier2, Christian Oehr3, Jakob Barz4 1Fraunhofer Institute for Interfacial Engineering and Biotechnology, Stuttgart, Germany 2,3,4Fraunhofer Institute for Interfacial Engineering and Biotechnology

Po4020

VHF ROLL COATER PLASMA POLYMERISATION SYSTEM Ralph Schmittgens1

, F. Stahr2, K. Schade3, B. Meyer4, E. Schultheiss5

1Technische Universität Dresden, Institut für Festkörperelektronik, Dresden, Germany 2,3FAP Forschungs- und Applikationslabor Plasmatechnik GmbH, Dresden, Germany 4Hochschule Mittweida (FH), Mittweida, Germany 5TU Dresden, Institut für Festkörperelektronik, Dresden, Germany

Po4021

Surface modification of silicone rubber membrane by graft polymerization via microwave discharge to improve wettability Mehdi Sharifian1

, Mehdi Sharifian2, Babak Shokri3

1Laser & Plasma Research Institute, Tehran, IRAN 2,3Laser & Plasma Research Institute, Shahid Beheshti University, Tehran, IRAN

PSE 2006 109


Poster - Thin Film Characterization

Po4022

COATING FAILURE MODES INVESTIGATED BY THE IMPACT TEST AT ROOM AND ELEVATED TEMPERATURES Konstantinos-Dionysios Bouzakis1

, A. Asimakopoulos2, G. Skordaris3

, N. Michailidis4

, G. Erkens5 1Aristoteles University of Thessaloniki, Thessaloniki, Greece 2,3,4

Aristoteles University of Thessaloniki 5CemeCon AG, Würselen, Germany

Po4023

Investigations of tribological coatings with a spiral tribometer Reinhold Bethke1

, Klaus Bewilogua2 1Fraunhofer Institute for Surface Engineering and Thin Films, Braunschweig, Germany 2Fraunhofer Institute for Surface Engineering and Thin Films; Braunschweig, Germany

Po4024

Nanomechanical testing of ultra-thin PVD films for stiction control in MEMS devices Ben Beake1

, John Sullivan2, Bagoui Shi3, Kevin Cooke4

, Xiaoling Zhang5,

Sue Field6, Stephen Goodes7

1Micro Materials Ltd, Wrexham, UK 2,3Aston University, UK 4,5,6Teer Coatings, Droitwich,

UK 7Micro Materials Ltd, Wrexham, UK

Po4025

Water droplet erosion testing at CESI RICERCA Federico Cernuschi1, Lorenzo Lorenzoni2 1CESI RICERCA, Milano, Italy 2CESI RICERCA

Po4026

Safety of Food Production: Characterisation of Surfaces for Sterile Applications Uwe Beck1

, Ulrich Bobe2, Karl Sommer3, Rainer Schmidt4, Georg

Reiners5 1BAM, Fachgruppe VI.4, Surface Technology, Berlin, Germany 2,3TU München, Institut für Maschinen- und Apparatekunde, Freising, Germany 4FH Jena, Jena, Germany 5BAM, FG VI.4 Surface Technology, Berlin, Germany

Po4027

EVALUATION OF NANOINDENTER AREA FUNCTIONS THROUGH EMPIRICAL-ANALYTICAL METHODOLOGIES AND BY MEANS OF A FEM-BASED ALGORITHM Konstantinos-Dionysios Bouzakis1

, Nikolaos Michailidis2 1Aristoteles University of Thessaloniki, Thessaloniki, Greece 2

Aristoteles University of Thessaloniki / 54124 Thessaloniki / Greece

Po4030

New methods of surface engineering in forming tools development Jürgen Leopold1

, Bernhard Wielage2, Andreas Wank3

, Gerhard Schmidt4, Christian Rupprecht5 1Fraunhofer IWU, Chemnitz, Germany, Chemnitz, Germany 2,5Technische Universität Chemnitz -LVW, Chemnitz, Germany 3GTV mbH & Co.KG, Luckenbach, Germany 4Fraunhofer IWU, Chemnitz, Germany

110 PSE 2006


Po4031

Structural and thermo-magneto-mechanical effects of r.f.-sputtered ferromagnetic shape-memory alloy Ni2MnGa Florent Bernard1

, L. Hirsinger2, P. Delobelle3, C. Rousselot4

1Institut FEMTO-ST (UMR 6174), CREST, University of Franche-Comté, Montbéliard Cedex, France 2,3Institut FEMTO-ST (UMR 6174), Département LMARC, University of Franche-Comté, 24, Chemin de l’Epitaphe, 25000 Besançon, France 4Institut FEMTO-ST (UMR 6174), Département CREST, University of Franche-Comté, Pôle Universitaire des Portes du Jura, BP 71427, 25211 Montbéliard Cedex, France

Po4032

Nano-Mechanical Properties of TiO2 and SiO2 Coatings Deposited by Pulsed Magnetron Sputtering Yin Nan Kok1

, G. T. West2, P. J. Kelly3 1Manchester Metropolitan University, Manchester, United Kingdom 2,3Dept. of Chemistry and Materials, Manchester Metropolitan University, Manchester, United Kingdom

Po4033

Depth profiling and compositional study of implanted surface layers and nitride multilayers by a combined GDOES, NRA and RBS analysis Cristina Fernández Ramos1

, J. García-López2, A. Fernández3

, R. Martínez4

, J.A. García5, R. Rodríguez6

1Institute of Materials Science of Seville, Seville, Spain 2Centro Nacional de Aceleradores 3Instituto de Ciencia de Materiales de Sevilla 4,5,6Centro de Ingeniería Avanzada de Superficies-AIN

Po4034

The effect of roughness on the results of the laser-acoustic test method Dieter Schneider

Fraunhofer Institute for Materials and Beam Technology, Dresden, Germany

Po4035

The properties of phase separation and interfacial structure in (La0.91,Sr0.09)MnO3 thin films Yen-Hua Chen1

, Tai-Bor Wu2 1National Tsing-Hua University,Taiwan, Hsin-Chu, Taiwan 2National Tsing-Hua University

Po4036

State-of-the-art Multilayer Optics for Laboratory X-ray Devices Frank Hertlein1

, Christian Hoffmann2, Alexandra Oehr3, Jörg Wiesmann4

,

Carsten Michaelsen5 1Incoatec GmbH, Geesthacht, Germany 2,3,4,5Incoatec GmbH

Po4037

Potential of modulated IR radiometry for the on-line control of coatings Francisco Macedo1

, B. K. Bein2, J. Gibkes3

, F. Vaz4, A. C. Fernandes5

, A. Gören6 1Department of Physics , University Minho, Braga, Portugal 2,3Exp.Phys. III, Solid State Spectroscopy, Ruhr-University, Bochum, Germany 4,5Physics Department., University of Minho, Guimarães, Portugal 6Physics Department, University of Minho, Braga, Portugal

Po4038

Characterization of nanostructured Ti-B-(N) coatings produced by dc magnetron sputtering JUAN CARLOS SANCHEZ-LOPEZ1

, C. López-Cartes2, D. Martinez-

Martinez3, A.Fernandez4 A.García-Luis5

, M., Brizuela6 J.I., Oñate7 1Instituto de Ciencia de Materiales de Sevilla (CSIC-US), SEVILLA, Spain 2,3,4Instituto de Ciencia de Materiales de Sevilla (CSIC-US), Sevilla, Spain 5,6,7Fundación INASMET, 20009 Donostia-San Sebastián, Spain

PSE 2006 111


Poster - Nanostructures and Nanopatterning

Po4039

Broadband antireflective structures on PMMA by plasma treatment Robert Leitel1, Norbert Kaiser2, Ulrike Schulz3

, Antje Kaless4 1Institut für Angewandte Physik, Friedrich Schiller Universität, Jena, Germany 2,3Institut für Angewandte Optik und Feinmechanik, Fraunhofer Gesellschaft, Jena, Germany 4Institut für Angewandte Physik/ Friedrich Schiller Universität, Jena, Germany

Po4040

Controlled functionalization of multi-walled carbon nanotubes and characterization Benoit Ruelle1

, S. Peeterbroeck2, R. Gouttebaron3

, T. Godfroid4, F.

Monteverde5, M. Alexandre6

, M. Hecq7, Ph. Dubois8

1Laboratoire de Chimie Inorganique et Analytique, UMH, Mons, Belgium, Mons, Belgium 2,6,8Service des Matériaux Polymères et Composites, UMH, Mons, Belgium 3,4,5Materia Nova asbl, Mons, Belgium 7Laboratoire de Chimie Inorganique et Analytique, UMH, Mons, Belgium

Po4041

Microwave plasma-enhanced chemical vapor deposition of carbon nanotubes Alexander Malesevic1

, Chris Van Haesendonck2, Annick Vanhulsel3

1VITO Materials (Flemish Institute of Technological Research), Mol, Belgium 2K.U.Leuven, Leuven, Belgium 3VITO Materials, Mol, Belgium

Po4043

ATMOSPHERIC PRESSURE PLASMA CHEMICAL ETCHING FOR CONTINOUS C-SI SOLAR WAFER PROCESSING Elena Lopez1

, Alexander Hauser2, Moritz Heintze3, Rainer Möller4, Harald

Wanka5, Volkmar Hopfe6

, Ines Dani7 1Fraunhofer IWS, Dresden, Germany, Dresden, Germany 2,3,4,5centrotherm Photovoltaics GmbH, Blaubeuren, Germany 6,7Fraunhofer IWS, Dresden, Germany

Po4044

Positive etch profiles in silicon with improved pattern quality Karola Richter1, Gerd, Zschätzsch2

, Johann-Wolfgang, Bartha3 1Technische Universität Dresden, Institut für Halbleiter- und Mikrosystemtechnik, Dresden, Deutschland 2,3TU Dresden, IHM, Deutschland

Po4045

COLLOIDAL MONOLAYERS COMBINED WITH COLD PLASMAS: A VERSATILE NANOFABRICATION TOOL Eloisa Sardella1

, P. Favia2, R. Gristina3

, S. Lovascio4, R. d'Agostino5

1Department of Chemistry, University of Bari, Bari, Italy 2,4,5Department of Chemistry, University of Bari, Bari, Italy 3Istituto di Metodologie Inorganiche e dei Plasmi, CNR, Bari, Italy

Po4046

Surface Binding Stability and Activities of Nano-Particles Maziar S.Yaghmaee1

, Maziar S.Yaghmaee2, Babak Shokri3

1Laser & Plasma Research Institute, Tehran, IRAN 2,3Laser & Plasma Research Institute, Shahid Beheshti University, Tehran, Iran

112 PSE 2006


Poster - Multilayer Films

Po4047

Oxidation Behaviour of Nanoscale Multilayer CrAlYN/CrN Coatings Deposited by the Combined High Power Impulse Magnetron Sputtering / Unbalanced Magnetron Sputtering (HIPIMS/UBM) Technology Christina Reinhard1

, P.Eh. Hovsepian2, A.P. Ehiasarian3

1Nanotechnology Centre for PVD Research, Sheffield Hallam University, Sheffield, UK 2,3Nanotechnology Centre for PVD Research, Sheffield Hallam University, Sheffield, UK

Po4048

Deposition of TiN/CrN multilayers with nanometric bi-layer periods by Cathodic Arc PVD Rosario Martinez1

, J. A. García2, M. Rico3

, R. Bueno4, R.J. Rodríguez5

1Asociación de la Industria Navarra, Cordovilla, Spain 2,3,4,5

Asociación de la Industria Navarra, Cordovilla, Spain

Po4049

Large area dual ion beam sputter deposition of nanometer multilayers Peter Gawlitza1

, Stefan Braun2, Andreas Leson3

, Matthias Nestler4 1IWS Dresden, Fraunhofer-Institut fuer Werkstoff- und Strahltechnik, Dresden, Germany 2,3IWS Dresden, Fraunhofer-Institut fuer Werkstoff- und Strahltechnik, Germany 4Roth & Rau AG, Hohenstein-Ernstthal, Germany

Po4050

Analytical transmission electron microscopy characterization of tribofilms generated during dry sliding wear of nano-structured multilayer TiAlCN/VCN coatings Quanshun Luo1

, A. Ehiasarian2, L. Chen3

, P. Eh. Hovsepian4, W.M.

Rainforth5, Z. Zhou6

, C. Schimpf7 1MERI, Sheffield Hallam University, UK, Sheffield, UK 2,3,4,7Sheffield Hallam University, Sheffield, UK 5,6University of Sheffield, Sheffield, UK

Po4051

Multilayered TaN/NbN coatings with superlattice structure grown by magnetron sputtering process Dejun Li1, J. Yang2

, M. X. Wang3, M. Cao4

, X. H. Zhang5 1Tianjin Normal University, Tianjin, China 2,3,4,5Tianjin Normal University, Tianjin, China

Po4052

The Wear Property and Oxidation Behavior of Ti1-xAlxN/CrN Superlattice Coatings Prepared by D.C. Magnetron Sputtering Jong-Keuk Park1

, Seung-Soo Ahn2, Tai-Joo Chung3

, Young-Joon Baik4 1Korea Institute of Science and Technology, Seoul, Korea 2,3

Andong National University, Andong, Korea 4Korea Institute of Science and Technology, Seoul, Korea

Po4053

Computer simulation of multilayer structure and mechanical properties of TiAlN/CrN and TiAlN/TiN coatings Matjaz Panjan1

, Tomaz Peterman2, Peter Panjan3

, Miha Cekada4 1Jozef Stefan Institute, Ljubljana, Slovenia 2University of Ljubljana, Faculty of mathematics and physics, Ljubljana, Slovenia 3,4Jozef Stefan Institute, Ljubljana, Slovenia

PSE 2006 113


Poster - Plasma Sources: Diagnostics and Modelling

Po4054

Plasma density development in a pulsed microwave concentrator Christian Hunyar1, Regina Unger2, Eberhard Räuchle3

, Lukas Alberts4,

Matthias Graf5, Mathias Kaiser6 1Fraunhofer Institute for Chemical Technology, Pfinztal, Germany 2,3,4,5,6Fraunhofer Institute for Chemical Technology, Pfinztal, Germany

Po4055

Particles modelling of low pressure - high current wire discharge Tiberiu Minea1

, G. Gousset2, M. Makarov3, Y. Loumani4

1CNRS, LPGP, Paris Sud University, Orsay, France 2,4LPGP, Paris Sud University, Orsay, France 3Renault Recherch & Development, France

Po4056

Study of a new plasma source for free-standing plasmas Ulrich Schweitzer1, K.-M. Baumgärtner2, U. Stroth3

, M. Walker4, U. Schumacher5, A. Schulz6 1Institut für Plasmaforschung, Universität Stuttgart, 70569 Stuttgart, Stuttgart, Germany 2Muegge Electronic GmbH, 64385 Reichelsheim, Germany 3,4,5,6Institut für Plasmaforschung, Universität Stuttgart, 70569 Stuttgart, Germany

Po4057

Microplasma Discharge Using Carbon Nanotubes as Cathode Qin Zou1

, Takamichi Ishibashi2, Hidenori Ohi3, Kazuki Nakazawa4, Hiroaki

Kanakusa5, Akimitsu Hatta6

1Kochi University of Technology, Kochi, Japan 2,3,4,5,6Kochi University of Technology

Po4058

Fluid dynamic modelling of a flying coater head approach for deposition of non-oxide films by atmospheric PECVD Gerrit Mäder1, Volkmar Hopfe2

, Steffen Krause3, Daniela Rogler4

1Fraunhofer IWS, Dresden, Germany 2,4Fraunhofer IWS, Dresden, Germany 3Technische Universität Dresden, Germany

Po4059

Spectroscopic diagnostic of Ar and Ar-N2 plasma during DC magnetron deposition process Mireille Gaillard1

, Nikolay Britun2, Jeon Geon Han3

, Soo Ghee Oh4 1CAPST, SungKyunKwan University, Suwon, Korea, Suwon, Korea 2,3CAPST, SungKyunKwan University, Suwon, Korea 4Ajou University, Suwon, Korea

Po4060

Time- and space resolved detection of reactive fragments in a N2/H2-Plasma via LIF-Spectroscopy Andreas Schenk1

, Karl-Heinz Gericke2, Nina Lucas3

, Christian Schrader4, Stephanus Büttgenbach5 1Institut für Physikalische und Theoretische Chemie, TU-Braunschweig, Braunschweig, Germany 2,4Institut für Physikalische und Theoretische Chemie, TU-Braunschweig, Braunschweig, Germany 3,5Institut für Mikrotechnik, TU-Braunschweig, Braunschweig, Germany

114 PSE 2006


Po4061

STUDY OF REACTIVE R.F. SPUTTERING PROCESS OF SILICON TARGET UNDER Ar:N2:O2 ATMOSPHERES Eric Tomasella1

, Jacquet2 Sauvage3, Cellier4, Thomas5 Rebib6

1Laboratoire des Materiaux Inorganiques UMR CNRS 6002, aubiere, France 2,4Laboratoire des Matériaux Inorganiques, UMR CNRS 6002, Université Clermont-Ferrand (Blaise Pascal), 24 Avenue des Landais, 63177 Aubière cedex, France. 3CERI-CNRS, 3A rue de la Férollerie, 45071 Orléans cedex 2, France. 5PROMES-CNRS, Rambla de la Thermodynamique, 66100 Perpignan cedex, France. 6Laboratoire des Matériaux Inorganiques, UMR CNRS 6002, Université Clermont-Ferrand (Blaise Pascal), 24 Avenue des Landais, 63177 Aubière cedex, France

Po4062

High-power pulsed magnetron sputtering: Model predictions and experimental verification Kristyna Burcalova1

, Jaroslav Vlcek2, Pavel Kudlacek3

, Jan Lukas4,

Jindrich Musil5 1University of West Bohemia, Plzen, Czech Republic 2,3,4,5University of West Bohemia, Plzen, Czech Republic

Po4063

Large Area SiH4/H2 VHF Plasma Produced with Multi-rod Electrode Yoshinobu Kawai1, H. Muta2

, T. Nishimiya3, Y. Takeuchi4, H. Takatsuka5

,

Y. Yamauchi6, Y. Kai7 1Kyushu University, Kasuga, Japan 2,7Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Japan 3,4Nagasaki Research & Development Center, Mitsubishi Heavy Industries Ltd., Nagasaki, Japan 5,6Nagasaki Shipyard & Machinery Works, Mitsubishi Heavy Industries Ltd., Nagasaki, Japan

Po4064

EFFECTIVE ELECTRODE WORK FUNCTIONS IN HELIUM GAS TUNGSTEN ARC DURING OPERATION Shinichi Tashiro1

, Hiroshi Nishikawa2, Manabu Tanaka3

1Joining and Welding Research Institute, Osaka university, Ibaraki, Japan 2,3Joining and Welding Research Institute, Osaka university, Ibaraki, Japan

Po4065

Droplet-Free Metal Ion Sources and Effects of Reactive Gas Addition Keiji Nakamura1

, Akira Wakayama2, Ken Yukimura3

1Chubu University, Kasugai, Aichi, Japan 2Chubu University 3Doshisha University

Po4066

EFFECT OF THE ELECTROMAGNETIC WAVES ON THE SPATIAL DISTRIBUTIONS OF ELECTRON TEMPERATURE IN 915 MHz H2 ECR PLASMA Hiroshi Muta1

, Yoshinobu Kawai2, Masayoshi Tanaka3, Koichi Morino4

1Kyushu University, Kasuga, Japan 2,3,4Kyushu University, Kasuga, Japan

Po4067

Large Area Plasma Characteristics using Internal Linear ICP Source for the FPD processing Kyong Nam Kim1

, Geun Young Yeom2, Jong Hyuk Lim3

1Materials Engineering in Sungkyunkwan University, Gyunggi-Do, Suwon-Si, South of Korea 2,3Materials Engineering in Sungkyunkwan University, Suwon, South of Korea

Po4068

Inductive Coupled Radio Frequency Plasma Bridge Neutralizer Frank Scholze1

, Horst Neumann2 1Leibniz-Institute for Surface Modification, Leipzig, Germany 2Leibniz-Institute for Surface Modification, Leipzig, Germany

PSE 2006 115


Po4069

Extraction of ions from dielectric barrier discharge configurations Siegfried Müller1, Jens Grundmann2

, Rolf-Jürgen Zahn3 1Institut für Niedertemperatur-Plasmaphysik Greifswald, Greifswald, Germany 2,3Institut für Niedertemperatur-Plasmaphysik Greifswald, Greifswald, Germany

Po4070

Design and characterisation of a microwave plasma source for the treatment of hollow compartments Jörg Ehlbeck1

, Manfred Stieber2, Thomas von Woedtke3, Ronny

Brandenburg4, Kristian Rackow5

, Udo Krohmann6, Klaus-Dieter

Weltmann7 1Institute of Low Temperature Plasma Physics, Greifswald, Germany 2,3,5,6,7Institute of Low Temperature Plasma Physics, Greifswald, Germany 4Vanguard AG Medical Services for Europe, Berlin, Germany

Po4071

Spectroscopic characterisation of a capillary plasma jet applied for disinfection Jörg Ehlbeck1

, Kristian Rackow2, Udo Krohmann3

, Thomas von Woedtke4

, Ronny Brandenburg5, Manfred Stieber6, Klaus-Dieter

Weltmann7 1Institute of Low Temperature Plasma Physcis, Greifswald, Germany 2,3,4,6,7Institute of Low Temperature Plasma Physcis, Greifswald, Germany 5Vanguard AG Medical Services for Europe, Berlin, Germany

Po4072

Properties of Inductively-Coupled Plasmas Driven by Multiple Low-Inductance Internal-Antenna Units Kosuke Takenaka1

, Yuichi Setsuhara2, Kazuaki Nishisaka3

, Akinori Ebe4,

Shinya Sugiura5, Kazuo Takahashi6, Koichi Ono7

1Joining and Welding Reserch Institute, Osaka University, Ibaraki, Japan 2Joining and Welding Research Institute, Osaka University, Ibaraki, Japan 3,4EMD Corporation, Kyoto, Japan 5,6,7Department of Engineering, Kyoto University, Kyoto, Japan

Po4073

Flow patterns in a low-pressure hollow-cathode radiofrequency discharge: simulation and measurements George-Felix Leu1

, Anne Francis2, Albrecht Brockhaus3

, Volker Schaffert4, Jürgen Engemann5 1Microstructure Research Center, University of Wuppertal, Wuppertal, Germany 2,3,4,5Microstructure Research Center, University of Wuppertal, Wuppertal, Germany

Po4074

MEASUREMENT OF ELECTRODE TEMPERATURE IN ARC PLASMA Manabu Tanaka1

, Shinichi Tashiro2, Kazuhiro Nakata3

, Kei Yamazaki4, Fusaki Koshiishi5, Keiichi Suzuki6 1Joining and Welding Research Institute, Osaka University, Ibaraki, Japan 2,3Joining and Welding Research Institute, Osaka University, Ibaraki, Japan 4,5,6KOBE STEEL, LTD, Fujisawa, Japan

Po4075

Discharge Structures of Inductively-Coupled Plasmas Sustained with Low-Inductance Internal Antennas Takashi Sera1

, Akinori Ebe2, Kosuke Takenaka3

, Yuichi Setsuhara4 1Joining and Welding Research Institute, Osaka University, Ibaraki, Japan 2EMD Corporation,Kyoto,Japan 3,4Joining and Welding Research Institute, Osaka University,Ibaraki, Japan

116 PSE 2006


Po4076

A comparison of the plasma in laser and hybrid laser-magnetron SiC deposition system Michal Novotny1

, M. Jelinek2, J. Bulir3, J. Lancok4

1Institute of Physics, Academy of Sciences of the Czech Republic, Praha 8, Czech Republic 2,3,4Institute of Physics, Academy of Sciences of the Czech Republic, Prague, Czech Republic

Po4077

Comparison of O.E.S. Electron Temperatures in Opposed Target Magnetron Discharges with Ferromagnetic and Non-Ferromagnetic Targets during Pulsed DC Operation Tamara Moiseev1

, David C. Cameron2 1Dublin City University, NCPST, Dublin, Ireland 2Lappeeranta Univ. of Tech., Mikkeli, Finland

Po4078

Interferometry and modeling of interferograms of atmospheric barrier-torch discharge Jiří Olejníček1

, Zdenčk Hubička2, Petr Virostko3

, Oleksander Churpita4,

Lubomír Jastrabík5 1Institute of Physics, Academy of Sciences of the Czech Republic, Praha, Czech Republic 2,3,4,5Institute of Physics, Academy of Sciences of the Czech Republic, Prague, Czech Republic

Po4080

Study of the high - frequency inductive coupled discharge plasma interaction with walls Atis Skudra1

, Gita Revalde2, Zanda Gavare3

, Natalia Zorina4, Boriss

Polyakov5 1Institute of Atomic Physics and Spectroscopy, University of Latvia, Riga, Latvia 2,3,4Institute of Atomic Physics and Spectroscopy, University of Latvia, Riga, Latvia 5Institute of Chemical Physics, University of Latvia, Riga, Latvia

Po4081

Spectroscopic Diagnostics of Dielectric Barrier Discharges (DBD) at Atmospheric Pressure Viorel Poenariu1

, R. Bartnikas2, M. R. Wertheimer3

1Department of Engineering Physics, Ecole Polytechnique, Montreal, Montreal, Canada 2Hydro-Quebec Research Institute, Varennes, Canada 3Department of Engineering Physics, Ecole Polytechnique, Montreal, Canada

Po4082

Dielectric Barrier Discharges (DBD) in Gases at Atmospheric Pressure: Effect of Charge Trapping on the Dielectric Michael R. Wertheimer1, I. Radu2

, R. Bartnikas3 1Department of Engineering Physics, Ecole Polytechnique, Montreal, Canada 2Department of Engineering Physics, Ecole Polytechnique, Montreal, Canada 3Hydro-Quebec Research Institute, Varennes, Canada

Po4083

Computational Studies of Plasma Dynamics and Electrode Erosion Interdependence in the IPD Coaxial Accelerator Marek Rabinski1, Krzysztof Zdunek2 1Dept of Plasma Physics and Technology, Institute for Nuclear Studies, Otwock-Swierk, Poland 2Faculty of Materials Science, Warsaw University of Technology, Warsaw, Poland

Po4084

Characterisation of the plasma properties of a reverse polarity planer magnetron designed as an ion source Mukesh Ranjan1

, Dr.S.Mukherjee2 Mr. KishoreKumar3 1FCIPT, Institute for Plasma Research, Gandhinagar (Gujarat), India 2,3FCIPT, Institute for Plasma Research

PSE 2006 117


Poster - Polymer Treatment and Modification

Po4085

Plasma-induced sizing and cleaning of fibers and fabrics in a large area microwave system for achieving enhanced properties of fiber reinforced plastics (RFP) Klaus_Dieter Nauenburg1

, D. Gittel2, M. Kaiser3, H. Urban4, E. Mäder5, K.

Manygoats6, S. Melcher7

1Fraunhofer Institut Chemical Technology (ICT), Pfinztal, Germany 2,3,4Fraunhofer Institute Chemical Technology (ICT), Josef-von-Fraunhofer-Str. 7, D-76327 Pfinztal, Germany 5,6,7Institute for Polymer Research (IPF), Hohe Straße 6 , D-01069 Dresden, Germany

Po4086

Amino Functionalization of Polymers by Low-Pressure Plasma Processing – Status and Perspectives Asmus Meyer-Plath1

, Renate Mix2, Jörg Friedrich3

1Federal Institute for Materials Research and Testing (BAM), Berlin, Germany 2,3Federal Institute for Materials Research and Testing (BAM), Berlin, Germany

Po4087

Amino functionalisation of polysulfone hollow fibre microfiltration membranes Michael Mueller1, Markus Storr2, Hermann Goehl3, Eckehard Walitza4

,

Christian Oehr5 1Fraunhofer Institute for interfacial Engineering & Biotechnology, Stuttgart, Germany 2,3Gambro Dialysatoren GmbH Hechingen, Germany 4,5Fraunhofer IGB, Stuttgart, Germany

Po4088

Improved surface energy analysis for plasma treated PET films Dimitrios Mataras1

, D. D. Papakonstantinou2, E. Amanatides3

, V. Ioannidis4

, P. Nikolopoulos5 1Plasma Technology Laboratory, University of Patras, Patras, Greece 2,3Plasma Technology Laboratory, University of Patras, Patras, Greece 4,5Laboratory of Ceramic and Composite Materials, University of Patras, Patras, Greece

Po4089

Absolute Spectroscopy of a Double Inductively Coupled Plasma in the VUV - VIS Spectral Range for Sterilization and Modification of Medical Implants Helmut Halfmann1

, Peter Awakowicz2, Nikita Bibinov3

1Institute for Electrical Engineering and Plasma Technology, Bochum, Germany 2,3Institute for Electrical Engineering and Plasma Technology

Po4090

Continuous coating of synthetic fibers using Hexamethyldisiloxane (HMDSO) Michael Keller1, E. Körner2, P. Fortunato3

, D. Hegemann4 1Empa SG, St. Gallen, Schweiz 2,3,4Empa SG

Po4091

An alternative approach to dyeing of PET fabrics at low temperature Mohammad Mokbul Hossain1

, Dirk Hegemann2, Axel S. Herrmann3

1EMPA Materials Science and Technology, St. Gallen, Switzerland 2EMPA Materials Science and Technology, St. Gallen, Switzerland 3Faserinstitut Bremen e.V., Bremen, Germany

118 PSE 2006


Po4092

Surface Modification of Polymeric Materials by Plasma Treatment Yong Zhu1

, Kenichi Haji2, Masahisa Otsubo3, Chikahisa Honda4

, Youl-Moon Sung5 1University of Miyazaki, Miyazaki, Japan 2,3,4University of Miyazaki, Miyazaki, Japan 5Kyungsung University, Busan, Korea

Po4093

A novel, two step method for the modification of inorganic surfaces with organic groups by chlorinated phosphazene plasma deposition and subsequent reaction in solution Alessandro Sassi1, Gianantonio Della Mea2

, Mario Gleria3, Sara

Carturan4, Roberto Milani5, Gianluigi Maggioni6

1Istituto di Scienze e Tecnologie Molecolari del CNR Sezione di Padova, Padova, Italy 2Department of Materials Engineering and Industrial Technologies, University of Trento, Trento, Italy 3Istituto di Scienze e Tecnologie Molecolari del CNR, Sezione di Padova, Padova, Italy 4,6University of Padua c/o INFN, Laboratori Nazionali di Legnaro, Legnaro, Italy 5Dipartimento di Scienze Chimiche, Università di Padova, Padova, Italy

Po4094

Crystallization aspects of di-para-xylylene composite organic materials during plasma processing Gheorghe Dinescu1

, C. Petcu2, B. Mitu3

, Y. Segui4 1National Institute for Laser, Plasma and Radiation Physics, Magurele-Bucharest, Romania 2,3National Institute for Laser, Plasma and Radiation Physics, Magurele-Bucharest, Romania 4Université Paul Sabatier, Laboratoire de Génie Electrique, Toulouse, France

Po4095

Modification of polymer surfaces using a Hall-Effect ion source Glen West1, Chris Liauw2

, Peter Kelly3 1Manchester Metropolitan University, UK, Manchester, UK 2,3Manchester Metropolitan University, Manchester, UK

Po4096

Magnesium implantation by plasma immersion in polymers for oxidation protection in Low Earth Orbit environment Ing Hwie Tan1

, Mario Ueda2, Renato Dallaqua3

, Leon Gengembre4,

Nicole Demarquette5 1Instituto Nacional de Pesquisas Espaciais, Sao Jose dos Campos, Brazil 2,3Instituto Nacional de Pesquisas Espaciais, Sao Jose dos Campos, Brazil 4Laboratoire de Catalyse de Lille/ Université des Sciences et Technologies de Lille, Villeneuve d’Ascq cedex, France 5Escola Politecnica da USP/Depto. Eng. Metalurgica e de Materiais, Sao Paulo, Brazil

Po4097

PLASMA TREATMENT OF MEMBRANES AND GAS DIFFUSION LAYERS FOR FUEL CELLS Matthias Walker1, Andreas Friedrich2

, Ulrich Stroth3, Andreas Schulz4

,

Joachim Schneider5, Sebastian Enge6, Jochen Kerres7

1Institut für Plasmaforschung, Universität Stuttgart, Stuttgart, Germany 2Deutsches Zentrum für Luft- und Raumfahrt, Pfaffenwaldring 38-40, 70569 Stuttgart, Germany 3,4,5,6Institut für Plasmaforschung, Universität Stuttgart, 70569 Stuttgart, Germany 7Institut für Chemische Verfahrenstechnik, Universität Stuttgart, Böblinger Str. 72, 70199 Stuttgart, Germany

Po4098

Modification of polymer membranes for electrochemical cells by low temperature plasma treatment Jacek Tyczkowski1, P. Kazimierski2, M. Krawczynska3 1Technical University of Lodz, Dept. Process Eng., Lodz, Poland 2,3Dept. Process. Eng., Technical University of Lodz, Lodz, Poland

PSE 2006 119


Po4099

Surface modification of a polyurethane film by low pressure nitrogen plasma treatment Rafael Balart1, David García2

, Vicente Blanes3, Mª Rosa Sanchis4

, Oscar Calvo5 1Polytechnic University of Valencia, Alcoy (Alicante), Spain 2Polytechnic University of Valencia, Alcoy, Alicante, Spain 3,4,5Textile Research Institute – AITEX., Alcoy, Alicante, Spain

Po4100

Low pressure glow discharge plasma treatment of a LDPE film for improved adhesion to polyethylene foams for technical applications Rafael Balart1, María Blanes2

, Vicente Blanes3, Mª Rosa Sanchis4

, David García5 1Polytechnic University of Valencia, Alcoy (Alicante), Spain 2,3Textile Research Institute – AITEX, Alcoy, Alicante, Spain 4Textile Research Institute – AITEX, Alcoy , Alicante, Spain 5Polytechnic University of Valencia, Alcoy, Alicante, Spain

Po4101

Surface modification of polymers by glow discharge plasma Davoud Dorranian1

, Amir Hossein Sari2, Ali Khodayari3, Mahmood Ghoranneviss4 1Plasma Physics Research Center, Islamic Azad University, Tehran, Iran 2,4Plasma Physics Research Center, Islamic Azad University, Tehran, Iran 3Physics Dept., Islamic Azad University, Karaj, Iran

Po4102

Surface characterization of nylon fiber with water-repellency modified by low pressure RF plasma discharge processing Young Yeon Ji1, Sang-Sik Kim2 1Institute for Advanced Engineering, Yongin, KOREA 2Institute for Advanced Engineering, Yongin, KOREA

Po4103

Investigation of Antibacterial activity on cotton fabrics with cold plasma in the presents of magnetic field Sheila Shahidi1, Mahmood Ghoranneviss2

, Bahareh Moazzenchi3, Abbas Anvari4, Abosaeed Rashidi5, Davood Dorranian6 1Plasma Physics Research Center, Islamic Azad University, Tehran, Iran 2,3,5,6Plasma Physics Research Center, Islamic Azad University, Tehran, Iran 4Physics Department, Sharif University of Technology, Tehran, Iran

Po4104

Atmospheric pressure plasma treatment of leather Renate Hänsel1, C.-P. Klages2

, M. Eichler3, J. Borris4 1Research Institute for Leather and Plastic Sheets (FILK), Freiberg, Germany 2,3,4Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany

120 PSE 2006


General Information Conference Fees Regular registration fee 480 € after July 1st, 2006 510 €

The registration fee includes the conference proceedings, book of abstracts, Welcome Party, Industrial Evening. It does not include the Tutorial on Saturday / Sunday and the Ba-varian Evening.

Regular registration fee for students 220 € after July 1st, 2006 250 €

The student’s fee includes the book of abstracts, welcome party, Industial Evening. It does not include the proceedings, the Tutorial on Saturday /Sunday and the Bavarian Evening.

Two-days ticket 290 €

This special ticket is only valid for the conference and exhibition on Tuesday and Wednes-day including book of abstracts and Industrial Evening.

Tutorial: Fundamentals and Trends of Plasma Surface Processing

Regular: 300 € Students: 150 €

This ticket is only valid for the Tutorial on Saturday and Sunday.

Bavarian Evening (incl. 5.52 € VAT): 40 €

Participation is only possible with this additional ticket.

Accompanying persons: 60 €

Fee includes Welcome Party, Industrial Evening as well as Bavarian Evening.

We kindly ask all students to present their (valid) student card as well as their (valid) ID to the employees of the conference office.

Payment Conditions for Conference fees

All stated conference fees are free of VAT according to §4 (22a) UStG (German value-added tax law). A letter of confirmation of your registration to the PSE 2006 will be sent to you by e-mail including the invoice. The price for the Bavarian Evening is inclusive 16 % VAT.

The preferred methods of payment are by credit card (Visa Card / MasterCard / American-ExpressCard) or by wire bank transfer (drawn on a German bank) within 14 days after re-ceipt of the invoice. Late and on-site registrations can only be accepted after payment by credit card (Visa Card / MasterCard / AmericanExpressCard) or cash at the beginning of the conference.

Cancellations and substitutions are accepted if written notification is received. A cancellation fee of 100 € will be charged before June 10th, 2006. After this date, no refunds of the regis-tration fees will be made.

Accompanying Exhibition Please, find detailed information in the exhibition flyer and on the PSE 2006 website (www.pse2006.net)

Conference Proceedings Proceedings of the International Conference on Plasma Surface Engineering will be pub-lished after the conference and distributed to all regular delegates.

PSE 2006 121

Accommodation

Tourist Information (Ms Hofmann) Postfach 15 62 82467 Garmisch-Partenkirchen Germany Phone.: +49 (0) 88 21 180-726 Fax: +49 (0) 8821-755 email: [email protected]

Insurance The European Society of Thin Films as the organizer of the conference cannot accept re-sponsibility for personal accidents or loss of or damage to private property of participants and accompanying persons which may occur either during, or arising from the conference. Therefore, participants should take whatever steps they consider necessary regarding in-surance.

Restaurants A variety of restaurants in town offer local and international food for lunch and dinner. Dur-ing the conference a lunch will be offered against cash in the Café of the Congress-Center.

Taxi Taxis can be ordered by calling 2408 and 2409 (Marienplatz) or 1616 (Bahnhofsplatz).

Car Parking A parking lot for only about 100 cars is available at the Congress-Center. As most hotels in Garmisch are situated in walk distance to the Congress-Center, we recommend that partici-pants use the hotel parking lot for parking their cars and go afoot from the hotel to the Con-gress-Center.

Visiting Tours Garmisch-Partenkirchen is a well-known resort in the foothills of the Bavarian Alps, embed-ded in an enchanting landscape of mountains, lakes, villages, baroque churches and fa-mous castles of the Bavarian kings. Several bus tours are offered by the tourist-office which is located next to the Congress-Center in Garmisch-Partenkirchen. Travel to Garmisch-Partenkirchen How to reach Garmisch-Partenkirchen by train:

from München central station about 80 min (approx. hourly schedule) from Augs- burg central station about 100 min (change at Weilheim/Obb.)

by car:

via Autobahn A 95 / E 4, 110 km from München

by air:

via München (Flughafen München) direct railway transfer to München central station by public transport (S-Bahn) available


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