Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several...
Transcript of Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several...
![Page 1: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/1.jpg)
Probe Card Test and Repair on a Probe Card Analyzer without a Probe Card Interface
John StromJeff Greenberg
Rudolph Technologies
Simon AllgaierFEINMETALL
![Page 2: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/2.jpg)
Typical Probe Card Test Setup• Probe Card• Probe Card Interface (PCI) (e.g. Motherboard, Fixture) • Probe Card Analyzer (PCA)• Measure Mechanical and Electrical Properties
2Strom, Greenberg, Allgaier
Probe Card PCI PCA
![Page 3: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/3.jpg)
Probe Card Analyzer Basic Test Requirements
• Required Mechanical Tests
3Strom, Greenberg, Allgaier
Alignment
Planarity
• Required Electrical Tests‐ Component Testing‐ Leakage / Capacitance‐ Contact Resistance‐ Wiring – Primary Channel‐ Wiring ‐ Shorts
Probe Card Probe
Tester Side Connections
Component
![Page 4: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/4.jpg)
PCI Cost Impacts Cost of Probe Card Test• Probe Card Interface needed for each Tester Interface• Probe Card Manufacturers
– Support multiple customers with multiple tester platforms– Each customer can have unique Tester Interfaces solutions
• Tester World (only a snap shot)Advantest V93000 – 12inch tower and 9,5inch towerAdvantest V93000 – Direct ProbeTeradyne J750 – 12inch in several configurationsTeradyne J750HD – 12inch towerTeradyne J750HD – 440J ( 18inch tower )Teradyne µ‐Flex in a lot of configurationsTeradyne Ultra Flex – also Ultra ProbeTeradyne Eagle Test Systems
……..For Digital, Analog and Mixed Signals over 200 different tester platforms!
4Strom, Greenberg, Allgaier
![Page 5: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/5.jpg)
Probe Card Interfaces Use Models
5Strom, Greenberg, Allgaier
• Probe Card Manufacturing• Probe Card Manufacturer Service and Repair Sites• Probe Card Customers
– Incoming QA– Troubleshooting
• Probe Card Manufacturing/Customer R&D
• Big investment in PCIs
• Is there a test strategy that can deliver the required test results at a lower cost?
![Page 6: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/6.jpg)
What if we test the probe card with NO PCI?• Can we reduce costs and maintain high test quality?
6Strom, Greenberg, Allgaier
Probe Card PCI Probe Card Holder
![Page 7: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/7.jpg)
• Probe card holder – Mechanical Requirements– Position probes planer to the Checkplate (chuck)– Supply minimal hold‐down force – do not want card to move– Rework Compatible – Hold the probe card so it can be flipped
Probe Card Holder Requirements
Probe card holder
Ground Connection
Ground Connection
• Probe card holder – Interconnect Requirements• Single connection to probe card ground plane
Strom, Greenberg, Allgaier 7
![Page 8: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/8.jpg)
What can we measure with a Probe Card Holder?• Required Mechanical Tests?
– Planarity– Alignment
• Required Electrical Tests?‐ Component Testing.‐ Leakage / Capacitance‐ Contact Resistance‐ Wiring – Primary Channel‐ Wiring ‐ Shorts
8Strom, Greenberg, Allgaier
Probe Card Probes
Tester Side Connections
Component
![Page 9: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/9.jpg)
PlanarityMechanical Properties Measured
9Strom, Greenberg, Allgaier
X ErrorY Error
Scrub LengthScrub Area
Motion Angle
DiameterProbe Force
Spring Rate
![Page 10: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/10.jpg)
Probe Card HolderPlanarity Measurement Challenges
• Cannot do electrical planarity – No connection• Force Planarity (FP)– New Feature on PRVX4
– Determine probe contact position via force‐based contact – This enables testing without a PCI
Load Cell Load Cell Post
Strom, Greenberg, Allgaier 10
![Page 11: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/11.jpg)
Probe Card HolderAlignment Measurement Challenges
• Alignment – Requires Probe Planarity – No Electrical Connection– Force Planarity enables accurate alignment measurements – Planarity required for accurate scrub– Planarity required for good focus quality
• Alignment – Probe Card Holder requires low total force– PRVX4 the window surface is small and raised so during Alignment at
overtravel, only a few probes are overtraveled at a time
Strom, Greenberg, Allgaier 11
![Page 12: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/12.jpg)
Are the mechanical results valid?PCI vs Probe Card Holder ‐ DOE
• J750 Probe Card Interface • J750 Probe Card Holder
• Probe Card (ViProbe®)– Active Area: 35mm X 35mm– Probe Count: 3508 (2484 bussed)
• PRVX4 Probe Card Analyzer (FEINMETALL)– Run P&A with PCI– Run P&A with Probe Card Holder
Strom, Greenberg, Allgaier 12
![Page 13: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/13.jpg)
Test Results: PCI vs. Probe Card Holder Planarity
• Probe Card Interface ‐ Planarity via Electrical Contact Position• Probe Card Holder – Planarity via Force Contact Position
13Strom, Greenberg, Allgaier
![Page 14: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/14.jpg)
Test Results: PCI vs. Probe Card Holder Planarity
• Probe Card Interface ‐ Planarity via Electrical Contact Position• Probe Card Holder – Planarity via Force Contact Position
14Strom, Greenberg, Allgaier
Force contact is less sensitive to contamination
![Page 15: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/15.jpg)
15Strom, Greenberg, Allgaier
Test Results: PCI vs. Probe Card Holder Alignment
![Page 16: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/16.jpg)
Summary ‐Mechanical test results• Force Planarity and Low Force Alignment
– Enables Planarity and Alignment with a Probe Card Holder
• Probe Card Holder meets 100% of mechanical test requirements
• Equivalent results for Planarity and AlignmentVS.PCI Probe Card Holder
Strom, Greenberg, Allgaier 16
![Page 17: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/17.jpg)
Probe Card HolderElectrical Properties Measurements?
• Required Electrical Tests?‐ Component Testing‐ Leakage / Capacitance‐ Contact Resistance‐ Wiring – Primary Channel‐ Wiring – Shorts / Opens
17Strom, Greenberg, Allgaier
Probe Card Probe
Tester Side Connections
Component
![Page 18: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/18.jpg)
Probe Card Holder : Component Testing• Component testing – PCI Technique
18Strom, Greenberg, Allgaier
Probe CardTester Side Probes
Component
Standard PCI Measurement technique
![Page 19: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/19.jpg)
Probe Card Holder : Component Testing• Component testing – Probe Card Holder Technique
19Strom, Greenberg, Allgaier
Probe Card
Ground Cable
Tester Side Probes
Component
![Page 20: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/20.jpg)
Probe Card Holder : Component Testing• Component testing – Probe Card Holder Technique
– Automatically measure all components connected to ground plane
20Strom, Greenberg, Allgaier
Component
Ground Cable
![Page 21: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/21.jpg)
Probe Card Holder: Leakage/Capacitance• Leakage / Capacitance – PCI Technique
21Strom, Greenberg, Allgaier
![Page 22: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/22.jpg)
Probe Card Holder: Leakage/Capacitance• Leakage / Capacitance – Probe Card Holder
– Can measure all probes to ground automatically
22Strom, Greenberg, Allgaier
![Page 23: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/23.jpg)
Probe Card HolderContact Resistance & Wiring: Primary channel
• Contact resistance / Wire checker ‐ Primary channel method
23Strom, Greenberg, Allgaier
![Page 24: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/24.jpg)
Probe Card HolderContact Resistance & Wiring: Primary channel
• Contact resistance / Wire checker ‐ Primary channel method• New User Assist Testing Feature• 100% test coverage with User Assist
24Strom, Greenberg, Allgaier
![Page 25: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/25.jpg)
25Strom, Greenberg, Allgaier
New User Assist Testing• New feature guides user to each
location to contact with probe• Bussed probes typically large % of
probe card (semi‐automatic)• Roughly 20‐30 probes/minute for
non‐bussed probes
![Page 26: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/26.jpg)
Probe Card Holder Wiring: Short/Opens
• Where do I move the ground probe?• Not currently viable: Area for future work
26Strom, Greenberg, Allgaier
![Page 27: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/27.jpg)
Summary : Electrical MeasurementsWith Probe Card Holder
Valid Electrical Tests Results Trade Offs?• Component Testing (100%) YES Auto – Gnd
Semi – Non Gnd• Leakage / Capacitance (100%) YES To Ground only• Contact Resistance (100%) YES Semi‐Automatic• Wiring – Primary Channel (100%) YES Semi‐Automatic
Not viable Tests Results
• Wiring – Short / Opens No
27Strom, Greenberg, Allgaier
![Page 28: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/28.jpg)
• Easy to Make• Can be manufactured in‐house • Very short lead times
• Allows simplified probe card definitions• No PCB required for Planarity and Alignment• Very low cost compared to PCI• Does not require PCA with Pogo blocks – Low Cost PCA option
Probe Card Holder Additional Benefits
Strom, Greenberg, Allgaier 28
No Pogo Blocks
![Page 29: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/29.jpg)
Summary: PCI vs Probe Card Holder
29Strom, Greenberg, Allgaier
Test PCI Probe Card Holder
Planarity Yes ‐Electrical Yes: Force
Alignment Yes Yes
Components Yes Yes
Leakage/Capacitance Yes Yes: To ground plane
Contact Resistance Yes Yes: Semi‐Automatic
Wiring: Primary Channel Yes Yes: Semi‐Automatic
Wiring: Shorts/Opens Yes No
Cost High Low
![Page 30: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/30.jpg)
Summary• New VX4 test capabilities provide options for reducing cost of
probe card test by using a Probe Card Holder instead of a PCI– Force based planarity– Low force Alignment measurement– User assisted electrical test
• Use models for lower cost Probe Card Holder testing– Probe Card manufacturer production: new tester interface introduction
and other low volume manufacturing– Probe Card manufacturer service center: probe card repair– Probe Card customer: incoming QA, troubleshooting– Probe Card manufacturer/customer: R&D testing
• Use model for traditional Probe Card Interface testing– Volume manufacturing – 100% test coverage
30Strom, Greenberg, Allgaier
![Page 31: Probe Card Test and Repair on a Probe Card Interface · Teradyne J750 – 12inch in several configurations Teradyne J750HD – 12inch tower Teradyne J750HD – 440J ( 18inch tower](https://reader030.fdocuments.us/reader030/viewer/2022033122/5ea7370a8347ca57d6430cdc/html5/thumbnails/31.jpg)
Thank You : Acknowledgements• Sam Waggoner – JP Kummer• Greg Olmstead – Rudolph Technologies• Bill Favier – Rudolph Technologies• Foster Lin – Rudolph Technologies• Brett Strong – Rudolph Technologies• Felix Grunikiewicz – FEINMETALL• Aleksandar Markovski – FEINMETALL
31Strom, Greenberg, Allgaier