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MonoTorr P-O-U Brochure 00 5/31/00 11:11 AM Page 1
MonoTorr P-O-U Brochure - SAES Pure Gas, Inc. - Graphics by Erick 1/00
www.saesgetters.com
SAES Pure Gas, Inc.San Luis Obispo, CaliforniaThe Technology of Pure Gas
Point-Of-Use Purifiers
EUROPESAES Getters S.p.A.Group Headquarters (Italy)Tel.: +39 02 93178 1Fax: +39 02 93178320
SAES Getters Deutschland GmbHTel: +49 221 944 0750Fax: +49 221 944 0754
SAES Getters G.B., Ltd.Tel: +44 118 956 6856Fax: +44 118 950 4074
SAES Getters France S.a.r.l.Tel: +33 1 482 48696Fax: +33 1 482 41052
SAES Getters S.p.A.,Moscow Representative OfficeTel.: +7 095 207 9743Fax: +7 095 208 0198
An ISO 9001 Registered Company
© SAES Pure Gas, Inc.Printed in U.S.A. All rights reserved.MonoTorr and InsiTorr are registered trademarks of SAES Pure Gas, Inc.VCR is a registered trademark of Cajon Co.
00PG01
U.S.ASAES Pure Gas, Inc.Pure Gas Technologies Headquarters4175 Santa Fe RoadSan Luis Obispo, CA 93401, USATel.: +1 805 541 9299Fax: +1 805 541 9399
Trace AnalyticalAnalytical Technologies HeadquartersTel.: +1 650 364 6895Fax: +1 650 364 6897www.traceanalytical.com
ASIASAES Getters Japan Co., Ltd.Tel: +81 3 5420 0435Fax: +81 3 5420 0439
SAES Getters Singapore PTE, Ltd.Tel: +65 534 0757Fax: +65 534 0307
SAES Getters Singapore,Taiwan BranchTel: +886 35 62 4650Fax: +886 35 62 4656
SAES Getters KoreaTel: +82 2 3404 2400Fax: +82 2 3452 4511
SAES Getters S.p.A.,Shanghai Representative OfficeTel: +86 21 627 51177Fax: +86 21 624 58900
MonoTorr Phase I 3000 MonoTorr Phase II 3000 & 15000
System Features and Specifications Matrix
N R H
350 400 400
150 150 120
125/< 260 (3000) 125/< 260 (3000) 125/< 260 (3000)187/< 600 (15000) 187/< 600 (15000) 187/< 600 (15000)
<10 <10 <15
STANDARD STANDARD STANDARD
STANDARD STANDARD STANDARD
STANDARD STANDARD STANDARD
N/A N/A N/A
STANDARD STANDARD N/A
STANDARD STANDARD STANDARD
STANDARD STANDARD STANDARD
PNEUMATIC PNEUMATIC PNEUMATIC
Products and ServicesPoint-Of-Use Purifiers Certification and Analytical Services Analytical Systems
House Gas and Area Purifiers InsiTorr™ FastPump Analytical Instruments
Gas Product Code N R
Additional Specifications and Features
Operating Temperature (°C) 350 400
Pressure Rating (psig) 150 150
Heater Power Consumption 50 50(watts) Nominal/Maximum < 260 < 260
Pressure Drop (psi) <10 <10
0.003 µm Metal Filter STANDARD STANDARD
Bypass Assembly OPTIONAL OPTIONAL
Surface MountableN/A N/AEnclosure(w/ Cooling Fan)
Surface Mounting Plate STANDARD STANDARD
Life Status Sensor (LSS) N/A N/A
1/4" VCR© Fittings STANDARD STANDARD(MCG Fittings Optional)
10 µ Ra Piping Surface Finish STANDARD STANDARD
1/4" SS Diaphragm Valves MANUAL MANUAL
Gas Type Key: N = Nitrogen R = Rare Gas (Ar, He, etc.) H = Hydrogen
*All MonoTorr purifiers are CE compliant
Designs For All ApplicationsTwo basic designs are available. The Phase I 3000
provides the essential requirements for nitrogen andrare gases at flows up to 5 slpm.
Phase II purifiers are available for rare gases,nitrogen and hydrogen. These purifiers provide addedsafety, automation and life status monitoring (raregases and nitrogen only) in a sturdy surface-mountableenclosure. The Phase II 3000 is designed for maximumflows of 50 slpm (rare and nitrogen gases), and 30slpm for hydrogen. The maximum flow of the PhaseII 15000 is 75 slpm (rare and nitrogen gases) and 50slpm for hydrogen. Refer to the system features matrixon back panel for additional information.
Protection From Operator ErrorIt is vital to protect any purifier from prolonged
exposure to air. MonoTorr purifiers can offer thatprotection. The Phase II design includes a sensor tocontinuously monitor and isolate the purifier cartridgein the event of an upstream air leak.
Life Status SensorThe patented life status sensor (LSS), developed
by SAES Pure Gas, provides early warning forimpending breakthrough of impurities (see fig.4).The technique measures resistivity change occurringin the getter alloy as impurities are diffused into thebulk of the purification media.
Phase I Phase II
Pure Gas Technologies
MonoTorr P-O-U Brochure 00 5/31/00 11:11 AM Page 2
MonoTorr P-O-U Brochure - SAES Pure Gas, Inc. - Graphics by Erick 1/00
Point-Of-Use Purifiers
Figure 5
MonoTorr Phase I 3000with Optional Bypass
MonoTorr Phase II 3000 and 15000Rare Gas and Nitrogen
Note: Getter lifetime is dependent on purifier size, inletimpurities and average flow rate. Consult the factory forlifetime calculations. Specifications subject to changewithout notice.
Phase II15000
Phase II3000
InletImpurity
0 - 20slpm
20 - 50slpm
InletImpurity
0 - 30slpm
30 - 75slpm
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
< 10 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
< 10 ppb
NITROGENPerformance Guarantee
RARE GASAr, He, Xe, Ne, Kr and Rn
Performance Guarantee
InletImpurity
0 - 20slpm
20 - 50slpm
InletImpurity
0 - 30slpm
30 - 75slpm
O2
H2O
CO
CO2
N2
H2
CH4
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
< 10 ppb
< 10 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
< 10 ppb
< 10 ppb
Phase II15000
Phase II3000
HYDROGENPerformance Guarantee
Gas Product Impurities Removed
Argon - Ar MT-R H2O, O2, H2, CO, CO2, N2,Helium - He THC and particlesOther Rare Gases
Nitrogen - N2 MT-N H2O, O2, H2, CO, CO2,THC and particles
Hydrogen - H2 MT-H H2O, O2, CO, CO2, N2
and particles
O2
H2O
CO
CO2
N2
H2
CH4
O2
H2O
CO
CO2
H2
CH4
O2
H2O
CO
CO2
H2
CH4
Life Status SensorU.S. Patent #5,172,066
Figure 4 - MonoTorr Phase II Control Panel
VALVES
BYPASS
PURIFIER
ALARMS
PNEUMATICS
POWER
TEMPERATURE
LIFE STATUS
GOOD
MARGINAL
CHANGE
HEATER
STANDBY
OPERATING
TEMPERATURE
HIGH
SET
LOW
HEATERON/OFF
VALVECONTROL
LED CHECK
ACKNOWLEDGE
The Need for PurificationResearch has shown that gas purification can ensure
consistent and repeatable process performance forsemiconductor device manufacturing.
Purification isolates critical process areas from housegas distribution systems and protects against gas purityupsets and cross-contamination. As manufacturingprocesses grow more demanding, gas system impuritiesmust be reduced below one part per billion.
The Getter Technology ApproachSince 1950, SAES Getters has developed evaporable
and nonevaporable getter technologies for ultrahigh-vacuum applications. Nonevaporable getter materials,based on zirconium and its alloys, can also be used inultrahigh purification capable of sub-ppb performance.
Getter materials irreversibly trap gaseous impuritymolecules. Gaseous impurities are captured on the surface.When heated, the impurities diffuse into the bulk of thegetter. Unlike ambient technologies that rely on surfaceadsorption only, getter technology utilizes the entirevolume of material. This results in superior capacities andlonger lifetimes for all impurities.
MonoTorr gas purification products were developedspecifically for sub-ppb performance. These getter-basedpurifiers are preconditioned (activated) at our factory toallow immediate use. Its all-metal technology ensuresthat no impurities are added.
High Purity ManufacturingMonoTorr purifiers are engineered for high-purity
applications. All piping system wetted surface areas areelectropolished 316L stainless steel construction with10µ-inch Ra surface finish or less.
Welding and assembly are performed in our Class 100cleanroom. Stainless steel diaphragm valves and a 0.003µm stainless steel particle filter are standard on allMonoTorr products.
APIMS Measures PerformanceAtmospheric pressure ionization mass spectrometry
(APIMS) demonstrates capabilities of the MonoTorrapproach to purification. Upstream impurities fluctuatingin the low-ppm range are quickly controlled to ppt levels(see figs. 1 and 2 below).
Phase II Controller FeaturesLife Status - Indicates the life status of the purifier.Good is normal, Marginal indicates approachingdepletion and Change includes audible alarm to notifythe operator that end-point is approaching andreplacement will soon be required (available for raregases and nitrogen only).
Heater - Indicates status of heater.
Temperature - Displays heater mode while maintaininggetter material at preset operating temperature.
Valves - Indicates status of purifier as controlled bypneumatic valves.
Alarms - Pneumatic alarm caused by loss of adequatepressure for valves. Power alarm indicates thatextended power failure has caused purifier to go intoStandby condition. Temperature alarm indicates a highor low temperature condition in the purifier cartridge.The high temperature alarm could be caused by highimpurity levels (air) in the gas stream. Alarm causesthe purifier to go to Bypass mode. Additional errorcodes provide alarms for exhaust fan, heater or solidstate relay failure.
Heater On/Off - Activates heater only when noalarms exist.
Valve Control - Positions valves to Purifier or Bypassmode.
LED Check - Assures proper functioning of all LEDsand alarm buzzer.
Acknowledge - Silence audible alarm and restoresoperation if certain alarm conditions have beencorrected.
Reprinted from Solid State Technology © Penn Well Publishing Company
Figure 1 - Argon Figure 2 - Nitrogen
Figure 3 - Side View Cutaway of MonoTorr Phase I 3000
Gases Purified and Impurities Removed
1.0
0.9
0.8
0.7
0.6
0.5
0.4
0.3
0.2
.01
00 10 20 30 40 50 60 70 80 90 100
Cur
rent
(10
- 11 A
)
Atomic Weight
CH4+
H2O+ O2+
CO+, N2+
Ar+(38)
CO2+
Ar36 (Ar40)+
Ar+(36) Ar+
(40)
Ar40(Ar40)+
1.0
0.9
0.8
0.7
0.6
0.5
0.4
0.3
0.2
.01
00 10 20 30 40 50 60 70 80 90 100
Cur
rent
(10
- 11 A
)
Atomic Weight
H2O+
O2+ CO2
+ N5+
N2+ N3
+ N4+
Utilities Required
Line Power:120/220 VAC
Pneumatic ValveActuation
(Phase II only):Nitrogen or clean dryair at 90 - 100 psig,
filtered to 10 µm
INSTALLED POWER:
MODEL 3000 15000120 VAC 300W/2.5 Amps 600W/5 Amps220 VAC 330W/1.5 Amps 660W/3 Amps
Impurity Levels
60 ppt
296 ppt
80 ppt
80 ppt
H2O
O2
CO2
CH4
Impurity Levels
130 ppt
447 ppt
123 ppt
H2O
O2
CO2
INSTALLED POWER:
120 VAC 300W/2.5 Amps220 VAC 330W/1.5 Amps
Diaphragm valves (included)
Efficient insulation for lowpower consumption
Dual thermocouples for safety
Compact heater
All wetted surfaceselectropolished 316Lsurface finish
Compact package coolsoutlet gas
Custom controller with completesafety features:
• Audible alarm• Dual “K” thermocouples• High differential over
temperature alarm• All solid state design
0.003 micron all stainless steelparticle filter
InletImpurity
0 - 20slpm
20 - 30slpm
InletImpurity
0 - 30slpm
30 - 50slpm
O2
H2O
CO
CO2
N2
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
Phase II15000
Phase II3000
O2
H2O
CO
CO2
N2
32.5(825.5)
INLET
OUTLET
25.0(635.0)
.266ø MOUNTING HOLES4X PLACES
23.0(584.2)
1.0(25.4)
0.5(12.7)
9.0 (228.6)
10.0 (254.0)
DIMENSIONSIN INCHES
(mm)
34.0(863.6)
4.0(101.6)
33.38(847.9)
6.0 (152.4)
8.0 (203.2)
DIMENSIONSIN INCHES
(mm)
5.0(127.0)
2.75(69.8)
8.25(209.5)
INLET OUTLET
OUTPUT INTERFACE PORT
POWER SWITCH
POWER INLET
Ø.312 (7.9) MOUNTINGHOLES 4 PLCS.
PNEUMATIC SUPPLY1⁄4" NPT FEMALECONNECTOR
Ø1.0 (25.4)THRU 2 PLCS.
2" (50.8) PLENUM
MonoTorr P-O-U Brochure 00 5/31/00 11:11 AM Page 2
MonoTorr P-O-U Brochure - SAES Pure Gas, Inc. - Graphics by Erick 1/00
Point-Of-Use Purifiers
Figure 5
MonoTorr Phase I 3000with Optional Bypass
MonoTorr Phase II 3000 and 15000Rare Gas and Nitrogen
Note: Getter lifetime is dependent on purifier size, inletimpurities and average flow rate. Consult the factory forlifetime calculations. Specifications subject to changewithout notice.
Phase II15000
Phase II3000
InletImpurity
0 - 20slpm
20 - 50slpm
InletImpurity
0 - 30slpm
30 - 75slpm
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
< 10 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
< 10 ppb
NITROGENPerformance Guarantee
RARE GASAr, He, Xe, Ne, Kr and Rn
Performance Guarantee
InletImpurity
0 - 20slpm
20 - 50slpm
InletImpurity
0 - 30slpm
30 - 75slpm
O2
H2O
CO
CO2
N2
H2
CH4
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
< 10 ppb
< 10 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
< 10 ppb
< 10 ppb
Phase II15000
Phase II3000
HYDROGENPerformance Guarantee
Gas Product Impurities Removed
Argon - Ar MT-R H2O, O2, H2, CO, CO2, N2,Helium - He THC and particlesOther Rare Gases
Nitrogen - N2 MT-N H2O, O2, H2, CO, CO2,THC and particles
Hydrogen - H2 MT-H H2O, O2, CO, CO2, N2
and particles
O2
H2O
CO
CO2
N2
H2
CH4
O2
H2O
CO
CO2
H2
CH4
O2
H2O
CO
CO2
H2
CH4
Life Status SensorU.S. Patent #5,172,066
Figure 4 - MonoTorr Phase II Control Panel
VALVES
BYPASS
PURIFIER
ALARMS
PNEUMATICS
POWER
TEMPERATURE
LIFE STATUS
GOOD
MARGINAL
CHANGE
HEATER
STANDBY
OPERATING
TEMPERATURE
HIGH
SET
LOW
HEATERON/OFF
VALVECONTROL
LED CHECK
ACKNOWLEDGE
The Need for PurificationResearch has shown that gas purification can ensure
consistent and repeatable process performance forsemiconductor device manufacturing.
Purification isolates critical process areas from housegas distribution systems and protects against gas purityupsets and cross-contamination. As manufacturingprocesses grow more demanding, gas system impuritiesmust be reduced below one part per billion.
The Getter Technology ApproachSince 1950, SAES Getters has developed evaporable
and nonevaporable getter technologies for ultrahigh-vacuum applications. Nonevaporable getter materials,based on zirconium and its alloys, can also be used inultrahigh purification capable of sub-ppb performance.
Getter materials irreversibly trap gaseous impuritymolecules. Gaseous impurities are captured on the surface.When heated, the impurities diffuse into the bulk of thegetter. Unlike ambient technologies that rely on surfaceadsorption only, getter technology utilizes the entirevolume of material. This results in superior capacities andlonger lifetimes for all impurities.
MonoTorr gas purification products were developedspecifically for sub-ppb performance. These getter-basedpurifiers are preconditioned (activated) at our factory toallow immediate use. Its all-metal technology ensuresthat no impurities are added.
High Purity ManufacturingMonoTorr purifiers are engineered for high-purity
applications. All piping system wetted surface areas areelectropolished 316L stainless steel construction with10µ-inch Ra surface finish or less.
Welding and assembly are performed in our Class 100cleanroom. Stainless steel diaphragm valves and a 0.003µm stainless steel particle filter are standard on allMonoTorr products.
APIMS Measures PerformanceAtmospheric pressure ionization mass spectrometry
(APIMS) demonstrates capabilities of the MonoTorrapproach to purification. Upstream impurities fluctuatingin the low-ppm range are quickly controlled to ppt levels(see figs. 1 and 2 below).
Phase II Controller FeaturesLife Status - Indicates the life status of the purifier.Good is normal, Marginal indicates approachingdepletion and Change includes audible alarm to notifythe operator that end-point is approaching andreplacement will soon be required (available for raregases and nitrogen only).
Heater - Indicates status of heater.
Temperature - Displays heater mode while maintaininggetter material at preset operating temperature.
Valves - Indicates status of purifier as controlled bypneumatic valves.
Alarms - Pneumatic alarm caused by loss of adequatepressure for valves. Power alarm indicates thatextended power failure has caused purifier to go intoStandby condition. Temperature alarm indicates a highor low temperature condition in the purifier cartridge.The high temperature alarm could be caused by highimpurity levels (air) in the gas stream. Alarm causesthe purifier to go to Bypass mode. Additional errorcodes provide alarms for exhaust fan, heater or solidstate relay failure.
Heater On/Off - Activates heater only when noalarms exist.
Valve Control - Positions valves to Purifier or Bypassmode.
LED Check - Assures proper functioning of all LEDsand alarm buzzer.
Acknowledge - Silence audible alarm and restoresoperation if certain alarm conditions have beencorrected.
Reprinted from Solid State Technology © Penn Well Publishing Company
Figure 1 - Argon Figure 2 - Nitrogen
Figure 3 - Side View Cutaway of MonoTorr Phase I 3000
Gases Purified and Impurities Removed
1.0
0.9
0.8
0.7
0.6
0.5
0.4
0.3
0.2
.01
00 10 20 30 40 50 60 70 80 90 100
Cur
rent
(10
- 11 A
)
Atomic Weight
CH4+
H2O+ O2+
CO+, N2+
Ar+(38)
CO2+
Ar36 (Ar40)+
Ar+(36) Ar+
(40)
Ar40(Ar40)+
1.0
0.9
0.8
0.7
0.6
0.5
0.4
0.3
0.2
.01
00 10 20 30 40 50 60 70 80 90 100
Cur
rent
(10
- 11 A
)
Atomic Weight
H2O+
O2+ CO2
+ N5+
N2+ N3
+ N4+
Utilities Required
Line Power:120/220 VAC
Pneumatic ValveActuation
(Phase II only):Nitrogen or clean dryair at 90 - 100 psig,
filtered to 10 µm
INSTALLED POWER:
MODEL 3000 15000120 VAC 300W/2.5 Amps 600W/5 Amps220 VAC 330W/1.5 Amps 660W/3 Amps
Impurity Levels
60 ppt
296 ppt
80 ppt
80 ppt
H2O
O2
CO2
CH4
Impurity Levels
130 ppt
447 ppt
123 ppt
H2O
O2
CO2
INSTALLED POWER:
120 VAC 300W/2.5 Amps220 VAC 330W/1.5 Amps
Diaphragm valves (included)
Efficient insulation for lowpower consumption
Dual thermocouples for safety
Compact heater
All wetted surfaceselectropolished 316Lsurface finish
Compact package coolsoutlet gas
Custom controller with completesafety features:
• Audible alarm• Dual “K” thermocouples• High differential over
temperature alarm• All solid state design
0.003 micron all stainless steelparticle filter
InletImpurity
0 - 20slpm
20 - 30slpm
InletImpurity
0 - 30slpm
30 - 50slpm
O2
H2O
CO
CO2
N2
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
Phase II15000
Phase II3000
O2
H2O
CO
CO2
N2
32.5(825.5)
INLET
OUTLET
25.0(635.0)
.266ø MOUNTING HOLES4X PLACES
23.0(584.2)
1.0(25.4)
0.5(12.7)
9.0 (228.6)
10.0 (254.0)
DIMENSIONSIN INCHES
(mm)
34.0(863.6)
4.0(101.6)
33.38(847.9)
6.0 (152.4)
8.0 (203.2)
DIMENSIONSIN INCHES
(mm)
5.0(127.0)
2.75(69.8)
8.25(209.5)
INLET OUTLET
OUTPUT INTERFACE PORT
POWER SWITCH
POWER INLET
Ø.312 (7.9) MOUNTINGHOLES 4 PLCS.
PNEUMATIC SUPPLY1⁄4" NPT FEMALECONNECTOR
Ø1.0 (25.4)THRU 2 PLCS.
2" (50.8) PLENUM
MonoTorr P-O-U Brochure 00 5/31/00 11:11 AM Page 2
MonoTorr P-O-U Brochure - SAES Pure Gas, Inc. - Graphics by Erick 1/00
Point-Of-Use Purifiers
Figure 5
MonoTorr Phase I 3000with Optional Bypass
MonoTorr Phase II 3000 and 15000Rare Gas and Nitrogen
Note: Getter lifetime is dependent on purifier size, inletimpurities and average flow rate. Consult the factory forlifetime calculations. Specifications subject to changewithout notice.
Phase II15000
Phase II3000
InletImpurity
0 - 20slpm
20 - 50slpm
InletImpurity
0 - 30slpm
30 - 75slpm
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
< 10 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
< 10 ppb
NITROGENPerformance Guarantee
RARE GASAr, He, Xe, Ne, Kr and Rn
Performance Guarantee
InletImpurity
0 - 20slpm
20 - 50slpm
InletImpurity
0 - 30slpm
30 - 75slpm
O2
H2O
CO
CO2
N2
H2
CH4
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
< 10 ppb
< 10 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
< 10 ppb
< 10 ppb
Phase II15000
Phase II3000
HYDROGENPerformance Guarantee
Gas Product Impurities Removed
Argon - Ar MT-R H2O, O2, H2, CO, CO2, N2,Helium - He THC and particlesOther Rare Gases
Nitrogen - N2 MT-N H2O, O2, H2, CO, CO2,THC and particles
Hydrogen - H2 MT-H H2O, O2, CO, CO2, N2
and particles
O2
H2O
CO
CO2
N2
H2
CH4
O2
H2O
CO
CO2
H2
CH4
O2
H2O
CO
CO2
H2
CH4
Life Status SensorU.S. Patent #5,172,066
Figure 4 - MonoTorr Phase II Control Panel
VALVES
BYPASS
PURIFIER
ALARMS
PNEUMATICS
POWER
TEMPERATURE
LIFE STATUS
GOOD
MARGINAL
CHANGE
HEATER
STANDBY
OPERATING
TEMPERATURE
HIGH
SET
LOW
HEATERON/OFF
VALVECONTROL
LED CHECK
ACKNOWLEDGE
The Need for PurificationResearch has shown that gas purification can ensure
consistent and repeatable process performance forsemiconductor device manufacturing.
Purification isolates critical process areas from housegas distribution systems and protects against gas purityupsets and cross-contamination. As manufacturingprocesses grow more demanding, gas system impuritiesmust be reduced below one part per billion.
The Getter Technology ApproachSince 1950, SAES Getters has developed evaporable
and nonevaporable getter technologies for ultrahigh-vacuum applications. Nonevaporable getter materials,based on zirconium and its alloys, can also be used inultrahigh purification capable of sub-ppb performance.
Getter materials irreversibly trap gaseous impuritymolecules. Gaseous impurities are captured on the surface.When heated, the impurities diffuse into the bulk of thegetter. Unlike ambient technologies that rely on surfaceadsorption only, getter technology utilizes the entirevolume of material. This results in superior capacities andlonger lifetimes for all impurities.
MonoTorr gas purification products were developedspecifically for sub-ppb performance. These getter-basedpurifiers are preconditioned (activated) at our factory toallow immediate use. Its all-metal technology ensuresthat no impurities are added.
High Purity ManufacturingMonoTorr purifiers are engineered for high-purity
applications. All piping system wetted surface areas areelectropolished 316L stainless steel construction with10µ-inch Ra surface finish or less.
Welding and assembly are performed in our Class 100cleanroom. Stainless steel diaphragm valves and a 0.003µm stainless steel particle filter are standard on allMonoTorr products.
APIMS Measures PerformanceAtmospheric pressure ionization mass spectrometry
(APIMS) demonstrates capabilities of the MonoTorrapproach to purification. Upstream impurities fluctuatingin the low-ppm range are quickly controlled to ppt levels(see figs. 1 and 2 below).
Phase II Controller FeaturesLife Status - Indicates the life status of the purifier.Good is normal, Marginal indicates approachingdepletion and Change includes audible alarm to notifythe operator that end-point is approaching andreplacement will soon be required (available for raregases and nitrogen only).
Heater - Indicates status of heater.
Temperature - Displays heater mode while maintaininggetter material at preset operating temperature.
Valves - Indicates status of purifier as controlled bypneumatic valves.
Alarms - Pneumatic alarm caused by loss of adequatepressure for valves. Power alarm indicates thatextended power failure has caused purifier to go intoStandby condition. Temperature alarm indicates a highor low temperature condition in the purifier cartridge.The high temperature alarm could be caused by highimpurity levels (air) in the gas stream. Alarm causesthe purifier to go to Bypass mode. Additional errorcodes provide alarms for exhaust fan, heater or solidstate relay failure.
Heater On/Off - Activates heater only when noalarms exist.
Valve Control - Positions valves to Purifier or Bypassmode.
LED Check - Assures proper functioning of all LEDsand alarm buzzer.
Acknowledge - Silence audible alarm and restoresoperation if certain alarm conditions have beencorrected.
Reprinted from Solid State Technology © Penn Well Publishing Company
Figure 1 - Argon Figure 2 - Nitrogen
Figure 3 - Side View Cutaway of MonoTorr Phase I 3000
Gases Purified and Impurities Removed
1.0
0.9
0.8
0.7
0.6
0.5
0.4
0.3
0.2
.01
00 10 20 30 40 50 60 70 80 90 100
Cur
rent
(10
- 11 A
)
Atomic Weight
CH4+
H2O+ O2+
CO+, N2+
Ar+(38)
CO2+
Ar36 (Ar40)+
Ar+(36) Ar+
(40)
Ar40(Ar40)+
1.0
0.9
0.8
0.7
0.6
0.5
0.4
0.3
0.2
.01
00 10 20 30 40 50 60 70 80 90 100
Cur
rent
(10
- 11 A
)
Atomic Weight
H2O+
O2+ CO2
+ N5+
N2+ N3
+ N4+
Utilities Required
Line Power:120/220 VAC
Pneumatic ValveActuation
(Phase II only):Nitrogen or clean dryair at 90 - 100 psig,
filtered to 10 µm
INSTALLED POWER:
MODEL 3000 15000120 VAC 300W/2.5 Amps 600W/5 Amps220 VAC 330W/1.5 Amps 660W/3 Amps
Impurity Levels
60 ppt
296 ppt
80 ppt
80 ppt
H2O
O2
CO2
CH4
Impurity Levels
130 ppt
447 ppt
123 ppt
H2O
O2
CO2
INSTALLED POWER:
120 VAC 300W/2.5 Amps220 VAC 330W/1.5 Amps
Diaphragm valves (included)
Efficient insulation for lowpower consumption
Dual thermocouples for safety
Compact heater
All wetted surfaceselectropolished 316Lsurface finish
Compact package coolsoutlet gas
Custom controller with completesafety features:
• Audible alarm• Dual “K” thermocouples• High differential over
temperature alarm• All solid state design
0.003 micron all stainless steelparticle filter
InletImpurity
0 - 20slpm
20 - 30slpm
InletImpurity
0 - 30slpm
30 - 50slpm
O2
H2O
CO
CO2
N2
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 1 ppb
< 10 ppb
Phase II15000
Phase II3000
O2
H2O
CO
CO2
N2
32.5(825.5)
INLET
OUTLET
25.0(635.0)
.266ø MOUNTING HOLES4X PLACES
23.0(584.2)
1.0(25.4)
0.5(12.7)
9.0 (228.6)
10.0 (254.0)
DIMENSIONSIN INCHES
(mm)
34.0(863.6)
4.0(101.6)
33.38(847.9)
6.0 (152.4)
8.0 (203.2)
DIMENSIONSIN INCHES
(mm)
5.0(127.0)
2.75(69.8)
8.25(209.5)
INLET OUTLET
OUTPUT INTERFACE PORT
POWER SWITCH
POWER INLET
Ø.312 (7.9) MOUNTINGHOLES 4 PLCS.
PNEUMATIC SUPPLY1⁄4" NPT FEMALECONNECTOR
Ø1.0 (25.4)THRU 2 PLCS.
2" (50.8) PLENUM
MonoTorr P-O-U Brochure 00 5/31/00 11:11 AM Page 1
MonoTorr P-O-U Brochure - SAES Pure Gas, Inc. - Graphics by Erick 1/00
www.saesgetters.com
SAES Pure Gas, Inc.San Luis Obispo, CaliforniaThe Technology of Pure Gas
Point-Of-Use Purifiers
EUROPESAES Getters S.p.A.Group Headquarters (Italy)Tel.: +39 02 93178 1Fax: +39 02 93178320
SAES Getters Deutschland GmbHTel: +49 221 944 0750Fax: +49 221 944 0754
SAES Getters G.B., Ltd.Tel: +44 118 956 6856Fax: +44 118 950 4074
SAES Getters France S.a.r.l.Tel: +33 1 482 48696Fax: +33 1 482 41052
SAES Getters S.p.A.,Moscow Representative OfficeTel.: +7 095 207 9743Fax: +7 095 208 0198
An ISO 9001 Registered Company
© SAES Pure Gas, Inc.Printed in U.S.A. All rights reserved.MonoTorr and InsiTorr are registered trademarks of SAES Pure Gas, Inc.VCR is a registered trademark of Cajon Co.
00PG01
U.S.ASAES Pure Gas, Inc.Pure Gas Technologies Headquarters4175 Santa Fe RoadSan Luis Obispo, CA 93401, USATel.: +1 805 541 9299Fax: +1 805 541 9399
Trace AnalyticalAnalytical Technologies HeadquartersTel.: +1 650 364 6895Fax: +1 650 364 6897www.traceanalytical.com
ASIASAES Getters Japan Co., Ltd.Tel: +81 3 5420 0435Fax: +81 3 5420 0439
SAES Getters Singapore PTE, Ltd.Tel: +65 534 0757Fax: +65 534 0307
SAES Getters Singapore,Taiwan BranchTel: +886 35 62 4650Fax: +886 35 62 4656
SAES Getters KoreaTel: +82 2 3404 2400Fax: +82 2 3452 4511
SAES Getters S.p.A.,Shanghai Representative OfficeTel: +86 21 627 51177Fax: +86 21 624 58900
MonoTorr Phase I 3000 MonoTorr Phase II 3000 & 15000
System Features and Specifications Matrix
N R H
350 400 400
150 150 120
125/< 260 (3000) 125/< 260 (3000) 125/< 260 (3000)187/< 600 (15000) 187/< 600 (15000) 187/< 600 (15000)
<10 <10 <15
STANDARD STANDARD STANDARD
STANDARD STANDARD STANDARD
STANDARD STANDARD STANDARD
N/A N/A N/A
STANDARD STANDARD N/A
STANDARD STANDARD STANDARD
STANDARD STANDARD STANDARD
PNEUMATIC PNEUMATIC PNEUMATIC
Products and ServicesPoint-Of-Use Purifiers Certification and Analytical Services Analytical Systems
House Gas and Area Purifiers InsiTorr™ FastPump Analytical Instruments
Gas Product Code N R
Additional Specifications and Features
Operating Temperature (°C) 350 400
Pressure Rating (psig) 150 150
Heater Power Consumption 50 50(watts) Nominal/Maximum < 260 < 260
Pressure Drop (psi) <10 <10
0.003 µm Metal Filter STANDARD STANDARD
Bypass Assembly OPTIONAL OPTIONAL
Surface MountableN/A N/AEnclosure(w/ Cooling Fan)
Surface Mounting Plate STANDARD STANDARD
Life Status Sensor (LSS) N/A N/A
1/4" VCR© Fittings STANDARD STANDARD(MCG Fittings Optional)
10 µ Ra Piping Surface Finish STANDARD STANDARD
1/4" SS Diaphragm Valves MANUAL MANUAL
Gas Type Key: N = Nitrogen R = Rare Gas (Ar, He, etc.) H = Hydrogen
*All MonoTorr purifiers are CE compliant
Designs For All ApplicationsTwo basic designs are available. The Phase I 3000
provides the essential requirements for nitrogen andrare gases at flows up to 5 slpm.
Phase II purifiers are available for rare gases,nitrogen and hydrogen. These purifiers provide addedsafety, automation and life status monitoring (raregases and nitrogen only) in a sturdy surface-mountableenclosure. The Phase II 3000 is designed for maximumflows of 50 slpm (rare and nitrogen gases), and 30slpm for hydrogen. The maximum flow of the PhaseII 15000 is 75 slpm (rare and nitrogen gases) and 50slpm for hydrogen. Refer to the system features matrixon back panel for additional information.
Protection From Operator ErrorIt is vital to protect any purifier from prolonged
exposure to air. MonoTorr purifiers can offer thatprotection. The Phase II design includes a sensor tocontinuously monitor and isolate the purifier cartridgein the event of an upstream air leak.
Life Status SensorThe patented life status sensor (LSS), developed
by SAES Pure Gas, provides early warning forimpending breakthrough of impurities (see fig.4).The technique measures resistivity change occurringin the getter alloy as impurities are diffused into thebulk of the purification media.
Phase I Phase II
Pure Gas Technologies
MonoTorr P-O-U Brochure 00 5/31/00 11:11 AM Page 1
MonoTorr P-O-U Brochure - SAES Pure Gas, Inc. - Graphics by Erick 1/00
www.saesgetters.com
SAES Pure Gas, Inc.San Luis Obispo, CaliforniaThe Technology of Pure Gas
Point-Of-Use Purifiers
EUROPESAES Getters S.p.A.Group Headquarters (Italy)Tel.: +39 02 93178 1Fax: +39 02 93178320
SAES Getters Deutschland GmbHTel: +49 221 944 0750Fax: +49 221 944 0754
SAES Getters G.B., Ltd.Tel: +44 118 956 6856Fax: +44 118 950 4074
SAES Getters France S.a.r.l.Tel: +33 1 482 48696Fax: +33 1 482 41052
SAES Getters S.p.A.,Moscow Representative OfficeTel.: +7 095 207 9743Fax: +7 095 208 0198
An ISO 9001 Registered Company
© SAES Pure Gas, Inc.Printed in U.S.A. All rights reserved.MonoTorr and InsiTorr are registered trademarks of SAES Pure Gas, Inc.VCR is a registered trademark of Cajon Co.
00PG01
U.S.ASAES Pure Gas, Inc.Pure Gas Technologies Headquarters4175 Santa Fe RoadSan Luis Obispo, CA 93401, USATel.: +1 805 541 9299Fax: +1 805 541 9399
Trace AnalyticalAnalytical Technologies HeadquartersTel.: +1 650 364 6895Fax: +1 650 364 6897www.traceanalytical.com
ASIASAES Getters Japan Co., Ltd.Tel: +81 3 5420 0435Fax: +81 3 5420 0439
SAES Getters Singapore PTE, Ltd.Tel: +65 534 0757Fax: +65 534 0307
SAES Getters Singapore,Taiwan BranchTel: +886 35 62 4650Fax: +886 35 62 4656
SAES Getters KoreaTel: +82 2 3404 2400Fax: +82 2 3452 4511
SAES Getters S.p.A.,Shanghai Representative OfficeTel: +86 21 627 51177Fax: +86 21 624 58900
MonoTorr Phase I 3000 MonoTorr Phase II 3000 & 15000
System Features and Specifications Matrix
N R H
350 400 400
150 150 120
125/< 260 (3000) 125/< 260 (3000) 125/< 260 (3000)187/< 600 (15000) 187/< 600 (15000) 187/< 600 (15000)
<10 <10 <15
STANDARD STANDARD STANDARD
STANDARD STANDARD STANDARD
STANDARD STANDARD STANDARD
N/A N/A N/A
STANDARD STANDARD N/A
STANDARD STANDARD STANDARD
STANDARD STANDARD STANDARD
PNEUMATIC PNEUMATIC PNEUMATIC
Products and ServicesPoint-Of-Use Purifiers Certification and Analytical Services Analytical Systems
House Gas and Area Purifiers InsiTorr™ FastPump Analytical Instruments
Gas Product Code N R
Additional Specifications and Features
Operating Temperature (°C) 350 400
Pressure Rating (psig) 150 150
Heater Power Consumption 50 50(watts) Nominal/Maximum < 260 < 260
Pressure Drop (psi) <10 <10
0.003 µm Metal Filter STANDARD STANDARD
Bypass Assembly OPTIONAL OPTIONAL
Surface MountableN/A N/AEnclosure(w/ Cooling Fan)
Surface Mounting Plate STANDARD STANDARD
Life Status Sensor (LSS) N/A N/A
1/4" VCR© Fittings STANDARD STANDARD(MCG Fittings Optional)
10 µ Ra Piping Surface Finish STANDARD STANDARD
1/4" SS Diaphragm Valves MANUAL MANUAL
Gas Type Key: N = Nitrogen R = Rare Gas (Ar, He, etc.) H = Hydrogen
*All MonoTorr purifiers are CE compliant
Designs For All ApplicationsTwo basic designs are available. The Phase I 3000
provides the essential requirements for nitrogen andrare gases at flows up to 5 slpm.
Phase II purifiers are available for rare gases,nitrogen and hydrogen. These purifiers provide addedsafety, automation and life status monitoring (raregases and nitrogen only) in a sturdy surface-mountableenclosure. The Phase II 3000 is designed for maximumflows of 50 slpm (rare and nitrogen gases), and 30slpm for hydrogen. The maximum flow of the PhaseII 15000 is 75 slpm (rare and nitrogen gases) and 50slpm for hydrogen. Refer to the system features matrixon back panel for additional information.
Protection From Operator ErrorIt is vital to protect any purifier from prolonged
exposure to air. MonoTorr purifiers can offer thatprotection. The Phase II design includes a sensor tocontinuously monitor and isolate the purifier cartridgein the event of an upstream air leak.
Life Status SensorThe patented life status sensor (LSS), developed
by SAES Pure Gas, provides early warning forimpending breakthrough of impurities (see fig.4).The technique measures resistivity change occurringin the getter alloy as impurities are diffused into thebulk of the purification media.
Phase I Phase II
Pure Gas Technologies