PllC - hwbdocuments.env.nm.gov Semiconductors/1993-04-27... · Sheet 1 or 2 Section DISCLAIMER ......

s II

U.S. Environmental Protection Agency Office of Solid waste Contract No. 68-W9-0041

RCRA Implementation Contract .zone 11 Regions Vl-X

PllC PRC Environmental Management, Inc.

In Association with: NUS Corporation ICF Technology, Inc. Versar, Inc. Ecology & Environment, Inc. HydroGeologic, Inc.

April 27, 1 ~93

Ms. Nancy Morlock Work"Assignment Manager U.S. EPA Region 6 1445 Ross avenue Dallas,. TX. 75202 .

Re: . EPA .Contract No. 68-W9-0041 Work Assignment No. R2652 Project No. 01

1 Dallas Centre 350 North St. Paul Street Suite 2600 Dallas. TX 75201 214-754-8765 Fax 214-922-9715

PRC

Signetics Corporation, RCRA Facility Assessment - Report additions

·Dear Ms. Morlock:

Please find enclosed the additional information EPA requeste4 for in-clusion in the above referenced RFA report. The additions include a table (Table 6-2) summarizing the ground-water analytical data,

. copies of the monitoring well construction logs, and rev.ised figures 2-2, 3-1, and· 4-2. In addition, PRC has enclosed the revised table of contents, references, and text pages.

If you have any questions, please call me at (214) 754-8765.

Sincerely,

5?;-LJJ34;; Stephen D. Phillips, P.G. Regional Liaison

Enclosures

cc: T. Reilly, EPA Regional Project Officer File

y contains recycled fiber and is recyclable

RCRA FACILITY ASSESSMENT REPORT SIGNETICS CORPORATION

ALBUQUERQUE, NEW MEXICO NMD000709782

Prepared for

U.S. ENVIRONMENT AL PROTECTION AGENCY Region 6

Allied Bank Tower 12th F1oor 1445 Ross Avenue

Dallas, Texas 75202

Prepared by

PRC Environmental Management, Inc. . 350 North St. Paul

Suite 2600 Dallas, Texas 75201

EPA contract No. 68-W9-0041

Work Assignment No. R2652

October 26, 1992

_,,.. . .. •' .

TABLE OF CONTENTS

Sheet 1 or 2

Section

DISCLAIMER .................................................... .

1.0 INTRODUCTION ............................................. .

1.1 PURPOSE OF THE RCRA FACILITY ASSESSMENT . . . . . . . . . . . . . . . . 1

2.0 . ·FACILITY DESCRIPTION ....... : . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1

2.1 FACILITY LOCATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2 2.2 FACILITY OPERATIONS AND HAZARDOUS WASTE MANAGEMENT . . . 5

2.2.1 _Summary of Wastes Handled . . . . . . . . . . . . . . . . . . . . . . . 7 2.2.2 Identification of Solid Waste Management Units .... ·. . . . . . . 10

2.3 REGULATORY STATUS . . . . . . . . . . . . . . . . .. . . . . . . . . . . . . . . . . . . 12

2.3.1 RCRA Permits ........... : ........ .. ....... ; . . 12 2.3.2 Air Permits ... ... . . ....... : ........... ; . . . . . . . 14 2.3.3 Water Permits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

3.0 ENVIRONMENTAL SETTING . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15

3.1 LAND USE ................................ ~ . . . . . . . . . . 15 3.2 CLIMATE . . . . . . . . . . . . . . . .. . . . . . . .. . . . . . . . . . . . . . . . . . . . . . 16 3:3 TOPOGRAPHY AND SURFACE WATER . . . . . . . ... . . . . . . . . . . . . . . . 16 3.4 SOILS .............. ; ....................... , . . . . . . . . 17 3.5 GEOLOGY . . . . . . . . . . . . . . . . . . . . .. . . . . . . . . . . . . . . . . . . . . . . . . 19 3.6 GROUND WATER ..................................... ,. 20

4.0 ·soLID WASTE MANAGEMENT UNITS ............. · ....... ;. .. . ..... 21

4.1 SWMU NO. 1 - SEGREGATED WASTE DRAINS ........ · ........... 21 4.2 SWMU NO. 2 -TANK 3 ......... ·., ...... ;... . . . . . . . . . . . . . . 23 4.3 SWMU NO. 3 -TANK 4 ........ · ........................... -. 25 · 4.4 SWMU NO. 4 -TANKS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27 4.5 SWMU NO. S - FLAMMABLE STORAGE 4 (FS4) .............. _. . . . 29 4.6 SWMU NO. 6 - CHEMICAL STORAGE 2 (CS-2) ......... , . . . . . . . . . 31 4.7 SWMU NO. 7 - NEUTRALIZATION WASTEWATER TREATMENT .

SYSTEM ......... ; . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33 · 4.8 . SWMU NO. 8 - CORONADO MUNICIPAL LANDFILL ............. · . . 37 . -

5.0 AREAS OF CONCERN ............. ~ . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40

6.0 HUMAN AND ENVIRONMENT AL TARGETS . -. . . . . . . . . . . . . . . . . . . . . . . . . 40

Section

6.1 6.2 6.3 6.4 6.5

TABLE OF CONTENTS

Sheet 2 of 2

AIR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41 SOIL . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41 SURFACE WATER ............................. . .. .. .... · . 42 SUBSURFACE GAS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43 GROUND WATER . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43

7.0 CONCLUSIONS AND RECOMMENDATIONS . . . . . . . . . . . . . . . . . . . . . . . . . . 44

REFERENCES ................................................... 51

Attachments

A Visual Site Inspection Summary

B Visual Site Inspection Photographs

c Signetics Monitoring Well Construction Logs

I •

LIST OF FIGURES

Figure ~

2-1 Facility Location . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3

2-2 · . Facility Layout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4

2-3 Signetics Systems Center Building . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

3-1 Ground-Water Elevation Contours and Arroyo Storm Water Drainage . . . . . . . . . . . . . 18

4-1 Wastewater Treatment Facility . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

4-2 Municipal Landfill Locations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

LIST OF TABLES

Tables

2-1 . Solid Wastes . · ......... ................................ , . . . . . . . 8

2-2 Hazardous Waste Transporters and TSO Facilities . . . . . . . . . . . . . . . . . . . . . . . . . 11

2-3 Solid Waste Management Units (SWMUs) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

6-1 Water Wells in a Three Mile Radius of Signetics Corporation Facility ............ • 45

6-2 Signetics Ground-water Monitoring Well Analytical Results ..... ·. . . . . . . . . . . . . . 46

7-1 SWMU Summary 48

. DISCLAIMER

This report was prepared for the U.S. Environmental Protection Agency (EPA), Region 6 by

PRC Environmental Management, Inc. in fulfillment of Contract No. 68-W9-0041, Work Assignment

No. R2652. The opinions, findings, and conclusions expressed herein are those of the contractor and

not necessarily those of EPA or other cooperating agencies. Mention of company or product names is

not to be considered as an endorsement by EPA. ·

This document is intended to assist EPA and state personnel in developing requirements for a

Resource Conservation and Recovery Act (RCRA) - regulated facility owner or operator to conduct a

RCRA Facility Investigation (RFI) pursuant to Title 40, Code of Federal Regulations (CFR), Part

264. EPA will not necessarily limit the .RF! or other requirements to those that correspond with the

recommendations set forth herein. EPA and state personnel must exercise their technical judgement

in using the RCRA Facility Assessment (RFA) report, as well as other relevant information, in

determining what RFI or other requirements to include in a permit or order.

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. l

EXECUTIVE SUMMARY

The Signetics Corporation Albuquerque facility (EPA ID. No. NMD000709782) is located at

the northern boundary of the city of Albuquerque, New Mexico, is a subsidiary of North American

Phillips Company, and is primarily a manufacturer of metal oxide semiconductor integrated circuits

(IC). The site is bordered on the east by the Pan American Freeway (Interstate 25), to the north by

vacant land, to the south by private businesses, an<I to the west by manufacturing facilities. There is

a residential area to the southwest of Signetics.

The construction of the plant began in 1978 and operations began in 1982, with full operation

status being reached in 1983. The production of ICs has remained the principle activity at the facility

with expansion activities currently occurring and changes in process equipment and chemical use

cngoing. Expansion activities.have involved the construction of additional production areas (clean

rooms) with more stringent levels of cleanliness and installation of greater levels of equipment

automation to improve production efficiency.

All production areas are within the Signetics facilities fabrication building as are the

. .. . wastewater treatment facility and hazardous waste storage areas. As a result of these production

· activities, Signetics generates four classes of hazardous waste; corrosive (0002), toxic (0004 and

0009), ignitable (0001), and listed (F002 and F003). These waste5 are .either treated and disposed of

into the City of Albuquerque Publicly· Owned Treatment Works-(POTW) (0002 wastes) or are stored

on site prior to shipment to a permitted disposal facilitY (0001, 0004, 0009, F002, and F003 wastes)

(Signetics, 1980b).

An etching step in the manufacture of ICs .produces waste hydrofluoric acid and buffered

oxide etch (hydrofluoric acid and ammonium fluoride solution) which is transferred through a

segregated drainage system to the facility's Neutralization Wastewater Treatment System. Subsequent.

IC cleaning steps utilize acid solutions of nitric and sulfuric acid. These spent acidic solutions are

also treated in the wastewater treatment system. A mixed solvent waste, Solvent I, Contains ignitable

(0001) and listed (F003 and F002) wastes from an IC photo stripping process. This waste is stored

in a 5,000~gallon tank prior to shipment to a Treatment, Storage, and Disposal Facility (TSDF) for

use in a waste fuels program. A second waste, Solvent II, also contains ignitable and listed hazardous

ii

waste constituents (F003). Solvent II waste is primarily waste photolithographic chemicals that are

stored in 55-gallon drums in a secure storage room. Toxic wastes include; arsenic contaminated

gloves, containers, and rags from IC "doping" activities, and mercury waste in the form of mercury

l~ps and broken thermometers that are classified as D004 and D009 hazardous wastes, respectively.

These wastes, which are stored separately on site in 55-gallon drums, are ultimately shipped to

commercial TSDFs by permitted transporters (Signetics, 1980b) ..

The Signetics Corporation Albuquerque facility submitted RCRA Part A and Part B Permit

applications to EPA Region 6 on August 14, 1980. The permit applications listed six hazardous

wastes generated and stored at the facility. These wastes included three stored-in-bulk quantities,

including waste Solvent I stored in 5,000-gallon Tank 3, waste hydrofluoric acid stored in 5,000-

gallon Tank 4, and waste buffered oxide etch stored in 5,000-gallon Tank 5. The other three wastes

were identified as drummed ignitable (Solvent II) stored in 55-gallon drums in Flammable Storage 4,

and arsenic- and mercury-contaminated wastes stored in separate 55-gallon drums in Chemical Storage

2 (Signetics, 1980b). The facility operated under interim status until receiving a draft RCRA

hazardous waste storage permit from the State of New Mexico on February 11, 1985 and a final 10-

year hazardous waste permit on April 1, 1986 (EPA, 1985 and NMEID, 1986). Signetics is an

indirect discharger of neutralized acid wastewater into the City of Albuquerque's POTW and operates

under a city wastewater discharge.permit number 2023A-3, which is current until July 31, 1993

(Albuquerque, 1991). The facility is also permitted for air emissions and was granted Air Quality

Permit Number 166 on December 15, 1986 by the City of Albuquerque (Albuquerque, 1992a).

During the Visual Site Inspection (VSI) and Preliminary Review (PR), PRC identified eight

Solid Waste Management Units (SWMU) at Signetics Corporation. Of these, five are active and three

are inactive. No areas of concern (AOC) were identified. PRC recommends further investigation at·

one SWMU, the abandoned Coronado Municipal Landfill.

iii

1.0 INTRODUCTION

PRC Environmental Management, Inc. (PRC), received Work Assignment No. R2652 from

the-u.s-. Environmental Protection Agency (EPA) under Contract No. 68-W9--0041 to conduct RCRA

facility assessments (RF A) and visual site inspections (VSI) of RCRA facilities permitted to store and

treat hazardous wastes. Under this Work Assignment, PRC is contracted to provide technical support

on a RF ANSI of the Signetics Corporation (Signetics) facility in Albuquerque, New Mexico.

This report describes the findings of a PR and a VSI. It includes (1) a description of the

facility and its SWMUs, (2) an identification of waste release potential through various contaminant

migration pathways, and (3) a summary of-conclusions and recommendations regarding further EPA

activity, i.e., the need for an RFI.

1.1 PURPOSE OF THE RCRA FACILITY ASSESSMENT

The purpose of the RF A is to identify environmental releases or potential relea5es from

SWMUs that may require corrective action. The RFA is the first step in implementing the corrective

action provisions of the 1984 Hazardous and Solid Waste Amendments (HSWA) to RCRA.

Specifically, Sections 3004(u), 3004 (v), and 3008(h) grant EPA the authority to initiate corrective

action for releases of hazardous wastes and constituents from SWMUs at RCRA-regulated facilities.

An RFA generally .consists of three steps; a PR, a VSI, and if necessary, a Sampling Visit (SV). A

sampling visit is conducted only when available information _is insufficient to support a

recommendation for a RCRA Facility Investigation (RFI). The RFA at Signetics did not include

sampling.

2.0 FACILITY DESCRIPTION .

This section of the RF A report describes the location of the facility and its historical _and

current operations, provides a list of the identified SWMUs and AOCs, and describes the sources and

types of wastes managed at the facility.

1

2.1 FACILITY WCATION

The Signetics Corporation facility is located at the north edge of the city of Albuquerque, at

the northwest juncture of the Pan American Freeway (Interstate 25) and Alameda Boulevard (Figure

2-1). The facility is on an approximately 60-acre plot obtained from the City of Albuquerque in an

industrial bond process (Figure 2-2) (EPA, 1986). The site is situated close to the north boundary of

the Elena Gallegos Land Grant, within the city limits, and just south of the Sandia Pueblo Land Grant

boundary. The facility is bordered on the east by the freeway, on the north by vacant land, to the

south by private businesses, principally Western Power and Construction, Inc., and to the west by

Honeywell, Inc., a manufacturing facility. There is a residential area to the southwest of Signetics.

The geographic coordinates of the facility are .north 35° 05' 020" latitude and west 106° 39' 015"

longitude. Figure 2-2 illustrates the layout of the Signetics facility.

The Signetics Albuquerque facility, a subsidiary of North American Philips .Company,

manufactures metal oxide semiconductor ICs from silicon wafers in its 470,000 square foot (ft2) plant

utilizing various masking, etching, cleaning, oxidation, metallization, and doping processes. The

facility operates on a 24-hour _per day schedule and has approximately 1,006 employees. All

manufacturing processes are conducted inside the fabrication building in two clean room production

areas designated as Fab 22 and Fab 23. Construction is currently ongoing to create additional

manufacturing capa~ity.

Standard facility _data are provided ~el_ow:

Facility Location:

Facility Address:

Facility Contact:

Telephone:

,, \ JrCfh44'T't".,. l" tr.'~ .. f•••-,-. -,.,.., ... ,.,., • ..,~_•,•• •• .. •• ••- .... I 11'

Intersection of the Pan American Freeway ·(Interstate

25) and Alameda Boulevard, Bernalillo County, New

Mexico

Signetics Corporation

9201 Pan American Freeway, N;E.

Albuquerque, New Mexico 87113

Gary Mavrakis

Material/Environmental Compliance Manager

(505) 822-7188

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SIGNETICS CORPORA'.l'ION ALBUQUERQUE, NEW MEXICO

FIGURE2-1 FACILI1Y .LOCATION MAP

PRC ·Environmental Management, Inc.

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SIGNETICS, ALBUQUERQUE, NEW MEXICO

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SIGNETICS CORPORATION ALBUQUERQUE, NEW MEXICO

FIGURE 2-2 FACILITY LAYOU

PRC Environmental Maner . . . \

·, Inc.

EPA ID Number:

Wastewater Discharge Permit:

Air Permit:

NMD000709782

2023A-3

166

2.2 FACILITY OPERATIONS AND HAZARDOUS WASTE MANAGEMENT .

The Signetics facility underwent construction from 1978 to 1982, and became fully

operational in 1983. Signetics submitted both a Part A and Part B RCRA permit applications on

August 14, 1980, recognizing that the facility would be generating and storing hazardous wastes

associated with the manufacture of ICs (Signetics, 1980b). The facility operated as a hazardous waste

generator under interim status until receiving a 10 year hazardous waste permit from the State of New

Mexico on April 1, 1986 (NMEID, 1986).

Under its Air Quality Permit 166, Signetics is permitted to annually process. a maximum of .

1,300,000 blank 4- and 6-inch silicon wafers . Manu~acturing of the ICs occurs ~n the facil~ty's

fabrication building using automated manufacturing equipment. The wafers are subjected to a circuit

diagram printing process using photolithographic material, the patte.m is etched with hydrofluoric acid

and buffered oxide etch~ cleaned with acids and solvents, and impregnated with a conductive material,

arsenic. The automated equipment, located in two clean roo·m areas, Fab 22 and .23, is continuously

serviced t>y operators.

Hazardous waste management is generally accomplished by continuous transport of waste

streams from•the automated manufacturing equipment through a segregated drainage system, or

contained within the equipment and transported daily to a central treatment and storage area. The

segregated drains are dedicated to specific waste streams and transport the ~astes to a wastewater . .

neutralization system or other SWMUs. Spent nitric and sulfuric acid, hydrofluoric acid, and

buffered oxide etch solutions are transported in these ·drains to a wastewater neutralization facility for

treatment and discharge to the City of Albuquerque POTW. The drainage system also transports

waste Solvent I, a mixed solvent cleaning solution, to Tank 3 for temporary storage prior to shipment

to a permitted TSDF. The wastewater treatment system and all hazardous waste SWMUs are located

, in the Systems Center-building illustrated in Figure 2-3. The facility stores only wastes generated

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FIGURE 2-3 SIGNETICS SYSTEMS CENT

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.----.. on-site and no off-site wastes are accepted (Signetics, 1980b). The segregated drainage system was

designed specifically for the waste streams associated with IC production.

The contained waste stream, waste Solvent II, is a spent photolithographic solution and is

collected in 5-gallon Nalgene carboys that are removed daily from the automated equipment and

transported to a temporary storage room, Flammable Storage 4 (FS-4). The carboy contents are

transferred to 55-gaJlon metal drums for on site storage until shipment to a TSDF.

Other process wastes, arsenic-contaminated material from servicing "doping" equipment and

mercury-contaminated materials from broken thermometers and mercury lamps, are transported daily

in. separate sealed bags to a temporary storage room, Chemical Storage 2 (CS-2). The bagged wastes

are placed in separate 55-gallon metal drums and stored on site until shipment to a TSDF.

Signetics has received three awards from the EPA in 1988, 1989 and in 1991 for its waste

management practices. The facility operates an aggressive recycling and reuse program of non

hazardous wa.Stes generated from daily operations. In addition to standard paper, plastic, cardboard,

and metal recycling; construction and maintenance materials, such as_ paint, are offered to employees

rather than disposed of, and non-hazfll'dous machine and pump oils are collected for reprocessing and

reuse at the facility. Slgnetics has reported its intention to phase out the use of freon (NMED, 1991).

2.2.1 Summary of Wastes Handled

The IC manufacturing process at the Signetics plant results in several different waste streams . .

including six hazardous wastes presented in Table 2-1 and described below. In addition to the process

wastes generated, other non-hazardous wastes are generated as a result .of plant maintenance and daily

operations.

The majority of wastes handled at Signetics result from manufacturing activit_ies occurri~g-in

two clean room areas, Fab 22 and 23. The IC etching step generates a hydrofluoric acid waste

stream (0002) and buffered oxide etch solution (hydrofluoric acid and ammonium fluoride) waste

stream (0002) that is transported to the Neutralization Wastewater Treatment System through the

segregated drainage pipes. Previously, these two waste solutions wer~ stored on sit~ in sep~te

5,000-gallon tanks until sufficient quantities were accumulated for shipment to a TSDF. Signetics

7

~··~.-,..-~·· ~

· Waste/EPA Waste Code

Waste Solvent l/D001/F002/F003

Waste Solvent II/D001/F003

Waste Hydrofluoric Acid/0002

Waste Buffered Oxide Etch/0002

Arsenic W aste/0004

Mercury Waste/0009

Spent Nitric and Sulfuric Acid Wastewater/NA**

Notes:

TABLE 2-1 , SOLID W ASTFS

Source

Photolithographic Cleaning

Photolithographic Circuit Printing

Silica Oxide Etching

Silica Oxide Etching

IC ·doping• Process

Production Activities

IC Cleaning Activities

Primary Management Unit*

Tank 3

Flammable Storage 4 (FS-4)

Tank 5 (inactive) and Neutral.ization Wastewater Treatment System

Tank 4 (inactive) and Neutralization Wastewater Treatment System

Chemical Storage 2 (CS-2)


Neutralization Wastewater Treatment System

* Primary management unit refers to a SWMU that currently manages or formerly managed the waste.

** Nonapplicable (NA) designates nonhazardous waste.

8

--~- -~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~---

hazardous waste storage permit limits the on-site storage capacity in each 5,000-gallon tank to 4, 700

gallons (NMEID, 1986). In an agreement reached with the City of Albuquerque and the State of

New Mexico in 1986, these two acid wastes are now neutralized in the Neutralization Wastewater

Treatment System, along with other acidic wastewaters, and discharged into the City of Albuquerque

POTW (EPA, 1988). Sigitetics reported the generation of approximately 50,000 gallons of waste

hydrofluoric acid and 30,000 gallons of waste buffered oxide etch in 1991 (Signetics, 1992). The two '

5,000-gallon tanks designated as TanJc 5 for the waste hydrofluoric acid tank and Tank 4 for the

buffered oxide etch waste tank are inactive, but maintained for possible future use.

A series of IC cleaning steps involve the use of acid solutions. The resultant spent nitric and

sulfuric acid wastewaters are discharged through the segregated drainage system to the Neutralization

Wastewater Treatment System. The neutralized wastewater effluent which includes the waste .

hydrofluoric and buffered oxide etch solutions, spent nitric and sulfuric acid wastewater, cooling

tower blowdown, fabrication scrubber waters, and demineralizer regeneration wastewaters, is

combined with the domestic wastewater and discharged into the City of Albuquerque POTW. The

total quantity of acid/caustic wastewater discharged from the wastewater treatment system was

reported by Signetics as approximately 160 million gallons in 1989 (Signetics, 1990).

The third hazardous waste stream generated in production activities is a mixed ignitable

"Solvent I" waste with hazardous waste classifications of 0001, F002, and F003. This

photolithographic· cleaning waste contains methanol, acetone, ethylene glycol, ethanolamine,

die_thyrene glycol monobutyl ether, water, and occasional trace levels of chlori~ated - solvents (freon

and 1, 1, 1-trichloroethane), resulting from the stripping ;f photolithographic material from the silica

wafers. Collection of this waste stream is also-through the segregated drainage system and stored in a

5,000-gallon SWMU, TanJc Jin the wa5tewatet treatment area in the S~stems Center .

building. The Solvent I waste is stored on site until shipped to a licensed commercial TSDF where it

is utilized in a fuels program (Signetics, 1980b). Signetics reported the shipment of approximately

20,000 gallons of Solvent I waste in 1991 (Signetics, 1992). The 1986 hazardous waste storage

_permit under which Signetic:S operates, specifies a maximum storage limit of 4, 700 gallons of waste

Solvent I in Tank 3 prior to shipment -to an off site TSDF (NMEID, 1986).

9

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A fourth hazardous waste, "Solvent n·, with hazardous waste classifications 0001 and F003,

is a waste photolithographic solution consisting of a mixture of proprietary vendor formulations of

positive photoresists which include cellosolve acetate, glycol esters, and acetone. This waste stream

is collected from individual automated IC manufacturing machines daily in 5-gallon Nalgene carboys

and segregated into 55-gallon steel drums and stored in Flammable Storage 4 (FS-4). Room FS-4 is a

designated SWMU for this waste (Signetics, 1980b). The drummed waste is stored for transport to a

TSDF for use in a fuels program. Signetics reported the generation of 160 drums of Solvent n waste

in 1991 (Signetics, 1992). The maximum allowable number of drums permitted in FS-4 under the

provisions of Signetics hazardous waste storage permit, is 36 drums (NMEID, 1986).

The fifth and sixth hazardous waste streams associated with production activities are

hazardous by characteristics of toxicity. The impregnation of the etch circuit diagrams with

conductive material involves the use of arsine gas and results in the generation of arsenic

contaminated gloves, containers, and rags with hazardous classification 0004. A smaller hazardous

waste stream with hazardous classification 0009, mercury contaminated waste, includes used lamp

bulbs, broken thermometers, and spill containment material. These two wastes are stored in separate

55-gallon steel drums in Chemical Storage 2 (CS-2), which is permitted tc:i hold a maximum of 64

drums of these hazardous wastes (NMEID, 1986). The drummed arsenic waste is stored until

sufficient quantity has accumulated to justify shipment. There was only one parti~ly filled drum of

mercury waste and no shipments had been made at the time of the VSI. Signetics reported the

generation of 25 drums of arsenic-contaminated wastes in 1991 (Signetics, 1992). . . .

Sig_netic5 us~ o.nly permitted hazardous waste transporters and TSOFs for the removal and

disposal of the wastes generated at the Albuquerque facility. Thr~ transporters aI)d three TSDFs

(Table 2-2) were identified by Signetics· as companies whose services are currently used (Signetics,

1991).

2.2.2 Identification of Solid Waste Management Units

. As a result of this RFA, a total of eight SWMUs have been identified at the Signetics facilit)'.

The definition of a SWMU adopted in this .Rf A reflects current EPA policy as stated in the July 15,

1985, Codification Rule (50 CFR 28701), the RCRA Facility Assessment Guidance Document

10

:"1"$;.: .............. o:••'•O• ... ..... ... ._ . ...,. , • '' ''" • fr,I .. ~•· • -.•n •-•1• 1~ •• • • , .. ,,,.L, . , ; T j• , ,.,. , ,., ., ,, ~,, ,,_ 'I

TABLE 2-2 HAZARDOUS WASTE TRANSPORTERS AND TSD F ACILITIFS

Company Name Address EPA ID Number

Transoorters ENSECO No Address ARD069748192

' Chemical Waste Management, Inc. No Address ILD099202681

RINCHEM Company, Inc. No Address NMD002208627

TSO Facilities

ENS ECO American Oil Road ARD069784192 El Dorado, AR 71730

Oil & Solvent Process Company 9131 East 96th Ave. COD980591184 Henderson, CO . 80640

Cameron-Yakima 1414 S. 1st Street WAD009477175 Yakima, WA 98901

11

" .... . ··.·

(October 1986), and other recent policy directives from the Office of Solid Waste and Emergency

Response (OSWER). A SWMU is defined as any discernable waste management unit at a RCRA

facility from which hazardous constituents might migrate. The definition does not include accidental

spills from production areas and units in which wastes have not been managed (such as product

storage areas). Table 2-3 presents a summary of the regulatory and operating status for all SWMUs

identified at the facility.

2.3 REGULATORY Sf ATVS

This seetion summarizes the regulatory status of the hazardous waste management units at the

Signetics facility, as could be determined from the files reviewed and from facility personnel. In this

sec.tion,_ we present information on permits and other environmental compliance issues under city,

state, and federal regulations.

2.3.1 RCRA Permits

The normal operation of the Signetics facility results in the generation of hazardous wastes by

characteristics of corrosivity (0002), ignitabil ity (DOO 1 ), toxicity (0004 and 0009), and · listed solvent

wastes (F002 and F003). These hazardous wastes, along with other non-hazardous wastes

(nitric/sulfuric acid wastewater) are treated on site for disposal in the City of Albuquerque POTW or

stored on site prior to transport to an approved TSDF.

Signetics submitted a RCRA Part A and Part B applications to EPA Region 6 on August 14,

1980. The facility operated under interim status until February 11, 1985 when the New Mexico

Environmental Improvement Department (NMEIJ:?) granted tentative approval for a hazardous. waste

storage permit and then gave final approval for the 10 year permit on April 1, 1986 (Signetics 1980a,

Signetics 1980b, and NMEID 1986). As a result of a 1986 agreement with the City of Albuquerque

and the State of New Mexico, the hydrofluoric acid and buffered etch wastes previously stored on site

in regulated SWMUs, are now discharged to the wastewater neutralization system. SWMU Nos. 3

and 4, storage tanks for these wastes, are now inactive but are maintained for possible future use

(EPA, 1988). Signetics has previously made minor amendments to their Part B permit in 1986 and

1988 to reflect changes in facility structures (NMEID, 1988b, Signetics, 1986 •. and Signetics, 1988).

12

SWMU Number

1

2

3

4 .

5

6

7

. 8

Note:

*

TABLE 2-3

SOLID w ·ASTE MANAGEMENT UNITS (SWMUs)

SWMU RCRA Hazardous Waste Name Management Unit* Status

Segregated Drains · Unregulated Active

·Taruc 3 Regulat~ Active

Tanlc 4 Regulated Inactive

Tanlc 5 Regulated Inactive

Flammable Storage 4 Regulated Active (FS-4)

Chemical Storage 2 Regulated Active (CS-2)

Neutralization U~egulated Acti·Je Wastewater Treatment System

Coronado Municipal Unregulated Inactive Landfill

A RCRA hazardous waste man~gement unit is one that currently requires or formerly required submittal of a RCRA Part A or Part B permit application. ·

13

µc . ,,., ...... ~··~ · ·• · · -- ·~ -~ ... . ~ ·- ·t • • • •:-~.- ..... • ,. , . . . .... ~ 1- u ;· ... ...

. "

The Part B permit is currently being amended to reflect changes in Signetics personnel with

responsibilities under this permit.

Regulatory compliance orders and notice of violations received by Signetics have generally

dealt with minor regulatory documentation requirement issues. The only penalty assessed against

Signetics occurred in 1983 and was in regard to the corporation's failure to submit documentation of

closure and post-closure assurance (EPA, 1983a and EPA, 1983b).

2.3.2 Air Permits

The City of Albuquerque, Engineering/Air Monitoring Section, Air Pollution Control

Division issued Air Quality Permit 166 to the Signetics facility on Dece~ber 15, 1986. The permit

has since been amended one time in 1987 to raise the levels of permin~ volatile organic compound

(VOC) and arsenic emissions, and the maximum annual silicon wafer processing volume. The permit

requires air quality monitoring of VOCs, arsenic, and acid emissions from the facility. Signetics is

required to submit quarterly reports (Albuquerque, l 992a).

Since the 1986 issuance of the original air permit, no notices of violations have been issued in

response to submitted quarterly reports or facility inspections. The City of Albuquerque has routinely

received submitted n.otifications from Signetics of stack air scrubber equipment upgrades and

modifications (Albuquerque, 1992a).

2.3.3 Water Permits

The Signetics facility discharges· process-related wastewater into the City of Albuquerque

POTW after treatment and falls under the category of an indirect wastewater discharger; not requiring

an NPDES permit. The City of Albuquerque is required to have an NPDES permit for its wastewater

treatment plant effluent and regulates the wastewater discharges into the POTW. Signetics bas a City

of Albuquerque wastewater discharge permit 2023A-3 that regulates discharge of acid wastewater· .

from the facility wastewater treatment system and is effective until July 31, 1993. The wastewater

effluent from the wastewater treatment system is combined with genera) facility wastewater and

discharged into the City's POTW (Albuquerque, 1991).

14

As required under the permit granted by the City of Albuquerque, the facility routinely

monitors effluent from the wastewater treatment system. Quarterly reports are submitted to the

Wastewater Utility Division's Southside Wastewater Treatment Plant documenting performance of the

Signetics wastewater treatment process. Between July 1990 and July 1991 there were several

instances where collected effluent samples exceeded the maximum concentration limits permitted

under Permit 2023A-3 (Albuquerque, 1992b). The excursions usually involved excessive levels of

fluoride, pH, and in one report, nickel. Additionall¥, Signetics has reported incidents of pH

excursions resulting from wastewater treatment equipment failure and human error (Albuquerque,

1992b)." To date, the facility has only been cautioned to take corrective action where necessary to

ensure that it stays within .the permitted limits. No notices of violation have been issued to' Signetics

for these permit violations.

3.0 ' ENVIRONMENTAL SETTING

This section describes the environmental setting of the Signetics site and the water resources

of the A.lbuquerque, New Mexico area. The information provides a basis for evaluating potential

impacts on human health and the environment from existing or potential releases of hazardous

materials to the environment from the SWMUs identified at Signetics. The following subsections

describe the land use, climate, topography and surface water, soils, geology, and ground water of the

-site.

3.1 . LAND USE

Signetics Albuquerque facility is located approximately 8 miles east of the Rio Grande River.

in the north part of the City of Albuquerque. Land use in the vicinity of the facility. is a mixture of

industrial, private business, and residential.· Signetics is bordered by open, undeveloped land to the

north; on the east by the Pan American Freeway (Interstate 25); to the south by Western Power and

Construction, Inc., and other private businesses; and to the west by Honeywell, Inc., a manufacturing

facility. There is a residential development to the immediate southwest of Signetics, and extensive

residential housing to the east, on the east side of the Pan American Freeway (Interstate 25).

15

places (Reeder, 1967). The distance between the base of the mountains and the inner valley floor

ranges from about 3 miles in the northern part of the area to about 9 miles in the southern part. The

valley floor is relatively flat, sloping downstream 6 to 7 feet per mile, and ranging in width from 1 to

4 miles. The inner valley is separated from the east mesa by a bluff which is breached by arroyos

from which alluvial fans spread out on the inner valley floor (Reeder, 1967).

A series of cut terraces parallel the Rio Grande on the west, and a broad upland surface,

about 600 feet above the river, borders the terraces on the west. In the Albuquerque area, the upland

and cut terraces are called the •west mesa.• The upland surface slopes generally southeast at about'

50 to 100 feet per mile. The Signetics facility is situated on the east mesa near the valley floor at an

approximate elevation of 5,200 feet above mean sea level. The facility is situated in the La Cueva

Arroy9 and is protected from storm water runoff by constructed concrete channels that bypass

Signetics on the north and south (Figure 3-1). La Cueva Arroyo drains an area of approximately 6.4

square miles upgradient of the Signetics facility (FEMA, 1983). The channels are designed to contain

a 100-year flood and Signetics is, therefore, not in the 100-year flood zone. At this time, the

500-year flood plain has not been established in this area (Anderson, 1992). The concrete channel on

the north side has a flow capacity of S,500 cubic feet per second (ft'/sec) and the southern channel, a

flow capacity of 1,600 ft'/sec (Signetics, 1980b). Flow from these channels discharges into the

Albuquerque Metropolitan Arroyo and Flood Control A~ministration (AMAFCA) .North Diversion

Channel, which eventually discharges back into the Rio Grande. Surface water runoff from the

facility is directed to the north and south storm water channels.

3.4 SOILS

The soils on which the Signetics facility is constructed are associated with the Embudo series

and are described as a gently sloping soil of 0 to 5% on the east mesa, consisting of deep, well

·drained soils that formed in alluvium derived from decomposed, coa.rSe grained, gran~te rocks on old

alluvial fans (USDA, 1977).

Surface water runoff is medium, and the hazard of water erosion is moderate.

17

~~\~·~~· .. ·:-·4~···•1 .. '.---:- -:--···· ~ ·-~: · '"'", :· ···· ··:··.:·· ·:· • , ~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~~

l " ~ l ! I i

-00

.•.. "C:t.;,

·.;,;.._~~ .. . . '"·~~.i· . ':

, . :.~ :;.: ::;...If~:~; ..•.

~· I ,

(' u P ·v a ·· ···r..

' I " I

:. 1·• i i , , i• ::

.... . ; -...111•1 ,"JdJ1 i! , .. ,., • . •. ·

.;.· .. ·: • .' •111:1 · ': "'W'.r lltlt(1p

Poree! boundaries and - slreet rights-of-way

1000 0

SCALE IN FEET

i

• below ground level

1QQ~

N

CORONADO


FIGURE 3-1 GROUND-WATER ELEV A TION CONTOURS AND ARROYO STORM WATER DRAINAGE ·

PRC Environmental Management, Inc.

.·

-· . .;

a depth of 60 inches or more is stratified, pale brown gravelly loamy coarse sand. The soil is

moderately alkaline (USDA, 1977).

Permeability is moderate in the upper 20 inches (0.2-0.6 inches per hour) and very rapid

below ( > 20 inches per hour). Available water capacity is 3 to 4 inches per inch of soil. Effective

rooting depth is 60 inches or more (USDA, 1977).

3.5 GEOLOGY

The Albuquerque area lies mostly within a graben which is part of the Rio Grande depression,

a connected series of grabens and structural basins having a general north - so~th alignment and

which ~s bordered on the east and west by upfaulted blocks. The upfaulted blocks to the east form

the Sandia and Manzano Mountains and the block to the west forms the highlands of the Rio Puerco

and much of the Rio Puerco valley. The Jemez Caldera and the Jemez uplift, north of the Jemez

River, are part of the west, upfaulted block that borders the depression (Reeder, 1967).

Fault zones trend along :the west base of the Sandia and Manzano Mountains. The bedrock

thus rises from the floor ofthe graben to the west of the mountains in steps. The fault zone bounding

the v.·est si~e of the grabe~ may be sim!lar to that on the east. The graben, or valley, bas been partly ,. . .

filled by sand, gravel, silt, clay, and·volcanic rocks of Tertiary and Quaternary age. Near the .. ~ .

borders of the depression, beds of the Santa Fe group dip toward the axis of the graben, but along the

axis the beds are nearly horizontal. Some of the dip of the Santa Fe group is dep<)sidonal; however,

later faulting and . movement along old faults in older beds has in places, steepened the dip and caused

faulting in the S~ta Fe group (Bjorklupd, 1961).

. . Rocks of pre-Tertiary age underlie the Albuquerque area and crop out in the Sandia and

Manzano mountains, the Rio Puerco valley, and in the highlands west of the Zia Indian Reservation

(Bjorklund, 1961):' Rocks of the Tertiary ~d Quaternary age crop out in most of the valley area.

They uncomformably overlie rocks of pre-Tertiary age and generally are composed of unconsolidated

to loosely consolidated gravel, sand and silt, and a few beds of basalt and tuff; at places, the sequence

is more than 6,000 feet thick. All water wells of large capacity are completed in .rocks of Tertiary

and Quaternary age (Reeder, 1967).

19

'.

'

·-"""tf'l •'f••-·· · •. •· - . . .

In the Albuquerque area the rocks of primary interest are the Santa Fe group, alluvial fans,

and valley alluvium. The Santa Fe group, of middle (?) Miocene to Pleistocene (?) age, underlies the

surficial deposits of the Rio Grande valley and crops out on the east and west mesas. Materials of the

Santa Fe group were derived by erosion of the highlands east and west of the Rio Grande depression

and by volcanic activity and erosion of the highlands farther north (Reeder, 1967). The Santa Fe

group consists of beds of unconsolidated to loosely consolidated sediments and interbedded volcanic

rocks. The deposits range from boulders to clay and from well-sorted stream-channel deposits to

poorly sorted slopewash deposits. Extrusive volcanic rocks of Tertiary and Quaternary ages, mainly ·

basaltic rocks, are interbedded with the sediments (Reeder, 1967).

A series of coalescing alluvial fans of Recent age were deposited unconformably on the Santa

Fe group. They extend westward from the base of the Sandia and Manzano Mountains to the bluffs

along the east side of the Rio Grande Valley. The fan deposits consist of sediments ranging from

poorly sorted mudflow material to well-sorted stream gravel. The fan deposits range in thickness

from Oto 200 feet, thicken towards the mountains, and are not generally aquifers (Reeder, 1967).

Valley alluvium of Recent age underlies the flood plain of th~ Rio Grande and its tributarie5.

This alluvium is similar in appearance and composition to sediments of the underlying Santa Fe group

and was derived from them in much of the area. The contact between the alluvium and the

underlying Santa Fe group is difficult to distinguish but is generally 80 to 120 feet below the ground

surface. Most of the irrigation wells along the Rio Grande tap the alluvium in the main valley

(Reeder, 1967).

3.6 GROUND WATER

The valley fill is the principal aquifer in the Albu.querque. area and is generally composed of

unconsolidated and loosely ~nsolidated gravel, sand, silt, and clay. The valley fill i~cludes twc;> ·

geological units; the Santa Fe group and the alluvium. Both are interconnected hydraulically, and

water moves from one formation into the other based on local hydraulic gradient conditions . .

(Bjorkh.md, 1961).

20

The ground water in the valley fill generally is under water-table conditions, but locally,

artesian conditions may exist owing to a confinement of saturated gravel or sand beds between beds of

silt or clay. The water table in the Albuquerque area, in general, is an irregular, sloping surface.

The irregularities in the water table are caused by differences in permeability and saturated thickness

or by additions or withdrawals of water. The water table slopes generally southwestward from the

Sand.ia and Manzano Mountains at a rate of about 5 to 20 feet to the mile (Bjorklund, 1961).

In the vicinity of the Signetics facility, ground water is encountered at a depth of

approximately 190 to 220 feet (Figure 3-1) (Signetics, 1992).

Recharge to the ground-water reservoir, in the Albuquerque area is from precipitation,

underflow of ground w~ter from adjacent areas, and seepage from streams, drains, canals, surface '

reservoirs, and applied irrigation water. The order of importance of each type of recharge depends

on local conditions. Much of the recharge comes from streams, particularly the Rio Grande (Reeder,

1967). ·· ... '

4.0 SOLID WASTE MANAGEMENT UNITS

·This 'Section discusses the SWMUs at the Signetics Corporation Albuquerque facility and

• .u~ .. evalu.aies ·actual cir P<?tential ·releases from those units. PRC identified eight SWMUs during the PR

and VSI. · Appendix A is a VSI summary and Appendix B provides photographs of the SWMUs.

Unless otherwise referenced, data presented in this section were obtained during the VSI.

4.1 SWMU NO. 1 - SEGREGATED WASTE DRAINS (Photograph No. 1)

Description

The segregated drainage system serves to move most wastes generated. in the production

areas, Fab 22 and Fab 23, to the Systems Center building (Figures 2-2 ~ 2-3) for treatineot of ·

waste bydrofluoric acid, buffered oxide etch solution, and nitric and sulfuric acid wastewater in the

Neutralization Wastewater Treatment System and storage of waste Solvent I in Tanlc 3 (SWMU No.

2). These drains were d~igned to be accessible in all parts of the facility, with no hidden piping or

21

""-~·'""" ...,, ___ fft• •1'H•··~ - .-•. , .. .. , . ... , ..,._ •• ··~ o

drains, and are suspended from the basement ceiling under the production areas in the Fabrication

building or routed to the wastewater area in concrete trenches in the floor of the Systems Center

building.

The segregated waste drains are operational and were part of the original construction of the

facility in 1982. The drains are not regulated by permit under RCRA.

Waste Type

Each of the drains is consigned to handling an individual waste stream from the proc~s areas.

The ~astes include:

• spent nitric/sulfuric acid solutions

• waste Solvent I photolithographic cleaning solution

• spent hydrofluoric acid solution

• spent buffered oxide etch (hydrofluoric and amn:ionium fluoride) solution

Waste Manaeement

Waste streams associated with production activities-~n Fab 22 and 23 are transported in

segregated drain lines to the wastewater treatment area. The spent acids and buffered oxide etch are -

discharged into the wastewater treatment system for neutralization, and ~e Solvent I is sent to Tank 3

(SWMU No. 2) for temporary storage; The segregated drains serve as .conduits ~or the transport of

these waste streams and no treatment is performed in this drainage system.

Environmental Releases

No environmental releases have.been reported from this SWMU.

22

Remedial Action Taken

No remedial actions have been taken.

Sunested Action

PRC recommends no further investigation· at this SWMU.

Reasons

The drainage system is by design, highly visible and easily accessible to plant personnel.

Spills from this unit would be immediately evident in the areas where piping is exposed and contained

.fa the concrete trenches in the floor. The areas where piping is exposed are routinely inspected.

4.2 SWJ\1U NO. 2 - TANK 3 (Photograph Nos. S, 9, and 14)

.Description

This 5,000-gallon capacity storage tank is a cylindrical mild steel tank, orientated vertically

and containing a flat top and bottom. The tank is 10 feet in diameter and 8 feet 6 inches in height.

Wall thickness is 3/16 inches. The tank is equipped with a 3-inch fill line which is attached to a

segregated drain pipe from the process areas. The tank is vented to the atmosphere outside of the

building ·and is located below ground, in .a concrete vault. The tank is not set on the concrete floor of

the. vault and the top of the vault is covered by ~steel grate {Signetics, 1980b). The vault h~ a total

volume of 9,000 gallons, which is 192· percent of T~ 3's capacity and will contain the release of all

of the tank contents and has no drainage system {EPA, 1985). The concrete is coated with

chemically resistant resin. A 3-inch hose connection and 'suction line permits chemi~ unloading

from the tank onto tank trucks (Signetics, 1980b).

23

UMZIC ,www·'*""..,..._.,.._....v.-.'/':"' ' ... ••••" ... "".,!.••· · · ·~ ·'.·. · ·· #. • • •••••• •·h· •.•..•

·-~-.-, . ......... _ -·- . ... ·-- .

This unit is active, is a RCRA regulated unit under Signetics Part B permit, and was part of

the original facility construction in 1982. The tank was replaced approximately 2 years ago, along

with Tanks 4 and 5.

Waste Type

This SWMU receives and stores a waste stream designated by Signetics as waste Solvent I, a

photolithographic cleaning waste .with hazardous designations 0001, F002, and F003. Primary

constituents of the waste include methanol, acetone, ethylene glycol, ethanolamine, diethylene glycol

monobutyl ether, and water. Chlorinated solvents, l, l, 1-trichloroethane and freon are also present

(Signetics, 1980b).

Waste Mnna2ement

Tcinlc 3 collects liquid Solvent I waste by gravity feed from .the process areas through the

segregated drainage system. The level of the tank. is monitored daily by measuring with a calibrated

measuring r}ote. This information is recorded daily in the Hazardous Waste Storage·Tanlc Log. The

waste is transported to a TSDF when the waste storage volume reaches 4, 700 gallons, which is the .

maximum storage volume allowed under Signetics 1986 hazardous ~aste storage permit (Signetics,

1980b and NMEJD, 1986).


No environmental releases have been reported from this SWMU.



24

Suggested Action

PRC recommends no further investigation at this SWMU.

Reasons

There have been no reported releases or spills. No visible contamination was observed during

. the VSI. The walls of the concrete vault appeared to be structurally sound, with no visible evidence

of cracks or deterioration. The tank and vault are included in a routine inspection program.

4.3 SWMU NO. 3 -TANK 4 (Photograph Nos. 5, 10, and 12)

Description

Tanlc 4 is a 5,000-gallon capacity cylindrical storage tank of reinforced fiberglass

- . construction. Orientated vertically and containing a flat top and bottom, the tank is supported by a

". IUIM N ta1u1Mr'"··· ... •:••· · •

5/16 inch steel reinforced PVC extended jacket. The tank is 10 feet in diameter and 8 feet 6 inches

in height. The tank has a synthetic corrosion barrier veil and is corrosion resistant to 10%

hydrofluoric acid at 150°F or to 30% hydrofluoric acid at 100°F. The tank is equipped with a 3-incb

fill line which is attached to a segregated drain pipe from the process areas. There is a 3-inch goose-. . .

neck vent with a polypropylene screen attached to the tank, which is in a below ground concrete

vault. The tank is not set on the concrete floor of the vault and the top of the vault is covered by a

steel grate (Signetics, 1980b). The vault has a total volume of 9,000 gallons, which is 192 percent of

Tank 4's capacity and will contain the release of all of the tank contents and has no drainage system

(EPA, 1985). The concrete is coated with chemically resistant resin. A 3-inch hose connection and

suction line permits chemical unloading from the tank onto tank trucks (Signetics, 1980b) .

. This unit is currently inactive but is a RCRA regulated unit under Signetics Part B Permit.

Originally utilized as a temporary storage unit for waste hydrofluoric acid solution since the start up ·

of the facility in 1982, an agreement between Signetics, and the City of Albuquerque and the .State of

25

-~·r-n ............... ·-···; .... ..

New Mexico in 1986, permits Signetics to discharge this waste stream into the Neutralization

Wastewater Treatment System (NMEID, 1988a). Tank 4 is maintained on standby for possible future

use if a change in regulations or policy should necessitate that Signetics return to its original waste

management practices. All tanks in the wastewater treatment area were replaced approximately 2

years ago . .

Waste Type

This SWMU was permitted for the storage of waste hydrofluoric acid. This waste stream

results from the silica dioxide etching process and consists mainly of a dilute solution (0.1-15%) of .

hydrofluoric acid at a pH of less than 1. The waste is characterized as hazardous by characteristic of

corrosivity and is assigned a 0002 waste designation (Signetics, 1980b).

Waste Management

Tank 4 originally collected spent hydrofluoric acid solution ~y gravity feed from the process

areas through the segregated drainage system. The level in the tank was monitored daily by

measuring with a calibrated measuring pole. This information was recorded daily in the Hazardous

Waste Storage Tank Log. The waste was transported to a TSDF when the waste storage volume

reached 4, 700 gallons, the maximum storage volume allowed in Signetics hazardous waste storage

permit (Signetics, 1980b and NMEID, 1986). Currently, the line carrying the spent hydrofluoric acid

is diverted into the Neu_tralization Wastewater Treatment System prior to reaching Tank 4, but could

be restored to this SWMU through the opening of a valve.





26

-·

(.

Suegested Action


Re3sons


the VSI. The walls of the concrete vault appeared to be structurally sound, with no visible evidence


4.4 SWMU NO. 4 -TANK 5 (Photograph Nos. 5 and 11)

Description

Tank 5 is a 5,000-gallon capacity cylindrical storage tank of reinforced fiberglass construction

Orientated vertically and containing a flat top and bottom, the tank is supported by a 5/16 inch steel

PVC extended jacket. The tank is 10 feet i~- diameter and 8 feet 6 inches in height. The tank has a

synthetic corrosion. barrier veil and is corrosion resistant to 10% hydrofluoric acid at 150°F or to

30% hydrofluoric acid at 100°F. The tank is equipped with a 3-inch fill line which is attached to a

segregated drain pipe from the process areas. There is a 3-inch goose-neck vent with a polypropylene

screen attached to the tank, which is in a below ground concrete vault. The tank is not set on the

concrete floor of the vault and the top of the vault is covered by a steel grate (Signetics, 1980b). The

vault has a total volume of 9~000 gallons, whi~h is 192 percent of Tank 5's ·capacity and will contain

the release of all of the tank contents and has no drainage system (EPA, 1985). The concrete is

coated with chemically resistant resin. A 3-inch hose coMection and suction line permits chemical

unloading from the tank onto tank trucks (Signetics, 1980b).

This unit is currently inactive but is a RCRA regulated unit under Signetics Part B permit.

Originally utilized as a temporary storage unit for waste buffered oxide etch solution since the start up

of the facility in 1982, an agreement between Signetics, and the City of Albuquerque and the State of

27·

New Mexico in 1986, permits Signetics to discharge this waste stream into the Neutralization

Wastewater Treatment System (NMEID, 1988a). Tank 5 is maintained on standby for possible future

use if a change in regulations or policy should necessitate th~t Signetics return to its original waste

management practices. All tanks in the wastewater treatment area were replaced approximately 2

years ago.

Waste Type

This SWMU was permitted for the storage of waste buffered etch solution. This waste stream

results from the silica dioxide etching process and consists mainly of a dilute solution of hydrofluoric

acid (0.1-15%) and ammonium fluoride (0.1-40%). The buffered oxide etch waste has a low pH and

a high concentration of fluoride. The waste is characterized as hazardous by characteristic of

corrosivity and is assigned a D002 waste designation (Signetics, 1980b).

Waste Mana:ement

Tank 5 originally collected spent buffered oxide etch solution by gravity feed from the process

areas through the segregated drainage system. The level in the tank was monitored daily by

measuring with a calibrated measuring pole. This information was recorded daily in the Hazardous

Waste Storage Tank Log. The waste was transported to a TSDF when the wast~ storage volume

reached 4,700 gallons, the maximum storage volume allowed in Signetics hazardous waste storage

permit (Signetics, 1980b and NMEID, 1986). Currently, the line carryjog the spent buffered oxide '

etch is diverted into the Neutralization Wastewater Treatment System prior to reaching Tank 5, but

could .be restored to th is SWMU through the opening of a valve.




No· remedial actions have been taken.

28

'11.~n~··-·· · ~" '' • -· --· ····••-., ·· ·c·• ·· -· ··-:·•· •· ·

.... 1,.

Sueeested Action


Reasons


the VSI. The walls of the concrete vault appeared to be structurally sound, with no visible evidence


4.5 SWMU NO. 5- FLAMMABLE STORAGE 4 (FS-4) (Photograph Nos. 16 and 17)

Description

Flammable Storage 4 (FS-4) is one of four rooms dedicated to th~ storage of flammable

chemical materials at the Signetics facility (Figure 2-3). FS-1, FS-2, and FS-3 are primarily used to

store unused chemical product and ignitable waste is stored in FS-4. This SWMU is constructed of

co~crete with inside dimensions of 22 by' 26 feet and contains 562 ft2 of floor space. The floor is an ., 8"-fnch· stab ;and the walls are 8-inch concrete masonry units with a 1 hour fire rating. The room is

also equipped ~vith makeup and exhaust air. The roof has an explosion vent rated ·at 600 pounds per

"square .inch (psi). The floor has a 4-inch slope to a 4-inch drain in the center of the room. The floor

drains to a line that discharges into Tank 3 (SWMU No. 2) (Slgnetics, 1980b).

This flammable storage room was put into service at the time of plant start up in 1982. This

SWMU is operational and is a RCRA regulated unit:

Waste Type

This room is used as a storage area for drummed hazardous waste that Sign_etics designates as

waste Solvent II. This solution is a waste mixture from the process areas of vendor proprietary

29

i J J I ... w .. -:~-::t ··.•t ·•n~ ........... , .. , ...... , ... . .. ,... . .

formulations of positive photoresists that include cellosolve acetate, glycol esters, and acetone. This

waste material is classified as hazardous by ignitability (0001) and as a non-halogenated solvent waste

(F003) (Signetics, 1980b).

Waste Management

Flammable wastes stored in FS-4 are placed in 55-gallon DOT 17E metal drums. ·The drums

are stored off the floor on pallets, with four drums per pallet, to elevate them from contact with any

possible liquid . releases. All drums and pallets are single stacked. The drums are marked with EPA

hazardous waste and Department of Transportation (DOT) labels and each drum is assigned a

number. The storage room is inspected daily to assure that drums are in good condition and

inspection logs are completed and kept on file (Signetics, 1980b).

The waste Solvent II is transferred from the process areas to FS-4 in 5-gaJlon NaJgene

carboys and transferred into drums. These wastes are.accompanied by chemical manifests during

transit. Each drum is opened approximately 10-20 times to add waste before it is filled. When waste

additions are made, a Hazardous Waste Drum Log is updated and maintained in the area of drum

storage until the drum is .full. These drum Jogs are maintained in a permanent file (Signetics, 1980b).

f :·1:· ' # •• i !

· Periodic sbipments of these drums are made to a TSDF when sufficient drummed inventory is

ac~umul~ted. The 1986 hazardous waste· storage permit limits drummed hazardous waste inventory in

FS-4 to 36 drums .(NMEID, 1986).

Environmental Release



. No remedial actions have been talcen.

30

Suggested Action


Reasons

There have been no reported releases or spills. Any releases that might occur in this room

would be contained within the confines of this area, or flow through the central floor drain and

discharge into Tan1c 3 (SWMU No. 2). No visible contamination was observed during the VSI. ·

4.6 SWMU NO. 6 - CHEMICAL STORAGE 2 (CS-2) (Photograph Nos: 2, 3, and 4)

Description

Chemical Storage 2 (CS-2) is one of two rooms dedicated to general chemical storage for

inventory used in process activities and general operation of the facility. A portion of CS-2, a

southwest comer of the room, has been dedicated to storing drummed arsenic and mercury

··· contaminated waste (Figure 2-3). This area is segregated from other portions of the room used for

chemical storage and marked with yellow striped tape. CS-2 has 2,611 ft2 of floor SJ>aCe, with 172 ft2

, . available for hazard~us waste -storage. The floor and walls are constructed of .8 inch concrete with

·· the roof covered .by a 4 inch concrete topping and fiberglass insulation and steel beams. The floor

has a 3-inch drain line that runs north into a piping trench and connects to a 6-inch acid waste drain

which discharges into the wastewater treatment system. The piping trench is equipped with a sump,

air pump, and level controls in case of a release. Since the hazar~ous waste st()red in this room is in

a solid form, the likelihood of hazardous waste discharging into the drains is unlikely (Signetics,

1980b).

The two chemical storage rooms, including CS-2, were placed into service -at the time of plant ,

start up in 1982. CS-2 is an operational SWMU and is regulated under RCRA.

31

t911 t•I _.,. .. _, ...,......_"~~~·..,.,...w.., ·-ot•"· ·• ...... . . _. ..... . .... ~. ,, ................... ,

.•

Waste Type

This room, in addition to storing general chemicals utilized in the day to day operation of the

facility, is a temporary storage area for two types of drummed solid hazardous waste; arsenic- and

mercury-contaminated materials.

The arsenic-contaminated materials are classified as hazardous waste by characteristics of

toxicity and designated as 0004 waste. This waste includes all materials that have been contaminated

with arsenic from production activities, such as gloves, containers, and rags. While all materials are

managed as hazardous wastes, not all would exceed the Toxicity Characteristic Leaching Procedure .

(fCLP) limits for arsenic (Signetics, 1980b).

The mercury-contaminated materials include mercury vapor lamps, broken mercury

thermometers, and contaminated spill containment materials. This material is also characterized as

hazardous by toxicity and is designated as a D009 waste (Signetics, 1980b). Since the start up of the

Signetics facility, approximately one-half drum of this waste has been accumulated.

Waste Manaeement

The hazardous wastes stored in CS-2 are placed in 55-gallon DOT l7H metal drums. The

drums are stored o.n pallets, with four drums p~r pallet, to elevate them from contact with any

possible liquid releases .. All drums and pallets are single stacked. The drums are marked with EPA

hazardous waste and DOT labels and each drum is assigned a number: The storage room is inspected

daily to assure that drums are in good condition and inspection logs are completed. and kept on file

(Signetics, 1980b).

The contaminated solid wastes are transferred from the process areas to CS-2 in bags and·

transferred into drums. These wastes are accompanied by chemical manifestS during transit: Each

drum is opened approximately 10-20 times to add waste before it is filled. When waste additions are

made, a Hazardous Waste Drum Log is updated and maintained in the area of drum ·storage until the

drum is full. These drum logs are maintained in a permanent file (Signetics, 1980b).

32

Periodic shipments of these drums are made to a TSDF when sufficient drummed inventory is

accumulated. The 1986 hazardous waste permit limits drummed hazardous waste inventory in CS-2

to 64 drums (NMEID, 1986).

EnYironmental Releases

No environmental releases have been repotted from this SWMU.



Suggested Action


Reasons

There have been nQ reported releases or spills. Since the hazardous wastes stored in this

room are generally solid, and the room is an enclosed structure with no signs of chemical staining or

etching of the concrete, containment of any accidental releases should be readily acoomplished.

4.7 SWMU NO. 7 - NEUTRALIZATION WASTEWATER TREATMENT SYSfEM (Photograph Nos. 5, 6, and 12)

Des~ription

The wastewater treatment facility is located in the south central portion of the Systems Center

building of the Signetics plant (Figure 2-3). This area of the plant includes SWMU Nos. 2, 3, and 4; . .

and the Neutralization Wastewater Treatment System (SWMU No. 7) (Figure 4-1). The

Neutralization Wastewater Treatment System consists of a solvent trap (grit chamber) at the influent

end of the system, followed by two sets of pH adjustment chambers, each containing two vaults, and

33

-\ I Ii 4 ,, .. _ ... - .. ..... ,. .• ¥, .. .,..,.~.-·~'""''-" " ' '" .. ~ •. I···"~ . ......... '"·''

., ~

T ~--.:.. I "t • i =- .f'o.

-- I r1~ol':" ,---~.~~

... -1i':."-= ~ 1--cin~· ~ --; -.

- - -t--··1

~di() 1 II I • l: I ti

WETWELL

HBUTRALIZATION CHAMBER

NEUTRALIZATIOl'.f CHAMBER

SOLVENT TRAP

-----..;'1-...._ tt l: 11 I ............. .. · .. ···; ::Jr

1.1. .f --·-:--., / q -~ . ..... , ' . : I i ,,, ... ,... ... / . .. , ",.,....... I

: ,' .. . l ..

:1 o····· ., :1 : . ! • p • : I • ' '··· ,J '' . . . : '- ... _ t' ! I ''W4WC •

: 0 '•TANiil/ .. ~ I L. .~·~ .. :-.:: .:····:t?~" I

·--·· ....... · ~ ·· ---···

11 : J I

··~I ''_. .. _w~w•w-•:-.. .

t....:-t=.-= :rr=:- ---i. ·- - - ··- • . . - - ·· - - j1:;; - - - ·- l" ~ - - - - -v.;:-;.-;-;- - - -=-~ .. -,,,~-· __, --- I f • .. ) •• .._.,... .-. . ~ ~-. .... , T., ..,._ e. • .. . g; . u:A:J I -

- •--' I-'".._:-·_ ? : I

:~...:.-.) I. ·. !

. - ·11 ' . // // . ~'} ".'", . . ~"Gfrdff"' . ·-- / ...... ~ ""' J . \ ----.. )v~~--U .

;, --~ MA .. "'.!H 'lf\"' .

--·· -~-· - - . -. .-- .- -- . - ··-· -- -- - - -- - -- .... -:· r- - -- ·- - - - -P\.l·~ .,lt'\J (~""'" VAii f'••\I YA ·I) ............ .,,.,.J

SOURCE: SIONETICS, ALBUQUERQUE, NEW MEXICO

-· :.-:::_. ~ . .:--:::-:· f•• Ill'••~·

NO SCALE


FIGURE 4-1 WASTE WATER TREATMENT FACILITY

PllC Environmental Management, Inc.

a wet well at the outfall or effluent point. The solvent trap, four vaults, and wetwell are configured

in series, and each pH adjustment chamber, with its two vaults, can be bypassed to permit

maintenance with no interruption of system operations. Two pH probes, one mounted in the last

vault before the wetwell, and one in the wetwell provide continuous readings and control signals for

pH adjustment to the wastewater. The wetwell also serves as the sampling well for the system

(Signetics, 1980b).

The vaults are of concrete construction with vault interiors coated with a protective lining to

protect against acid attack. The vaults are accessible through square metal hatches set in the concrete

floor of the facility and the pH probes are accessible through circular hatches .

. Two 5,000-gallon above ground storage tanks containing sulfuric acid and sodium hydroxide

are located in the same area and are utilized for _the pH adjustment process in the wastewater

treatment system and for regeneration of a demineralization unit in an adjacent area.

The Neutralization Wastewater Treatment System (SWMU No. 7) and SWMU Nos. 2, 3, and

4 are surrounded by a total of 11 acid leak test wells. These dry wells are inspected every 90 days '

for evidence of wastewater leakage (Figure 2-3). This area was originally open to the elements at the

~ime of the Signetics facility construction in 1980. It was _enclosed in 1986. to _provide better security

and protection to the treatment and storage equipment from the climate (Signetics, ·1986).

The Neutralization Wastewater Treatment System was put· into service in 1982 at th~ time of

plant start up and is still active. The unit is exempt from RCRA regulation under 40 CFR 264.1 (g)

(6) and New Mexico's Hazardous Waste Management Regulations (HWMR) 206.A.4f, but operates

under a City of Albuquerque Wastewater Discharge Permit 2023A-3 (Signetics, 1980b and

Albuquerque, 1991).

35

•

Waste Type

The wastewater treatment system neutralizes industrial wastewaters to a required pH discharge

range prior to discharge from the facility into the Albuquerque P01W. The treatment system

originally received spent hydrochloric and sulfuric acid solution from wafer cleaning activities in the

process areas, cooling tower blowdown, spent sulfuric acid and sodium hydroxide solutions from

demineralizer regeneration, and air scrubber fabrication waters. Subsequent to a 1986 agreement with

the City of Albuquerque and the State of New Mexico, Signetics was permitted to discharge the spent

hydrofluoric acid and buffered oxide etch solutions into the neutralization wastewater treatment system

with the other industrial wastewaters (EPA, 1988).

Waste Management

Acidic wastewater is drained by gravity through the segregated drainage systeni from the

process areas or is pumped from a sump in the RO/DI demineralization area into ·either the solvent

trap or first vault of the second neutralization chamber. Sodium hydroxide and occasionally sulfuric

acid are used to adjust ~e wastewater pH to a specified ·pH discharge range. Chemical feed rates are

controlled by pH probes in the ·second neutralization chamber and the wetwell. The permitted pH

· range of the wastewater effluent discharged to the City of Albuquerque P01W is 5.0 - 11.0

(Albuquerque, 1991). This treatment process does not provide for . the removal of fluorides or heavy

metals (Signetics, 1985a).


A release that occurred on November 5, 1985 wa5 reported to the NMEID and EPA. The

leak was detected in a test well on the north side of the wa.5tewater treabnent"System and the source of

the release was traced to the solvent trap (grit chamber) (Figure 4-1): Collected wastewater from the

test well was sent to Signetic's internal laboratory. Analysis of the water indicated a pH of 4.5 but

no other analytical data associated with this sample were reported. The release report to the NMEID . . included analytical data from wastewater samples routinely collected from the wastewater treatment

system that showed no significant levels of heavy metals. The release volume could not be

36

determined, but based on the less than 1/4-inch size of the hole in the vault, the estimated volume was

small (Signetics, 1985b).

Remedial Action

Wastewater was pumped from the test well. No· other action was requested by regulatory

agencies or taken.

Suggested Action

PRC reoommends no further investigation at this SWMU.

Reason

The wastewater is comprised of acidic wastewaters discharged to the Neutralization

Wastewater Treatment System, of which two, the waste hydrofluoric acid and buffered oxide etch, are

hazardous by characteristics of corrosivity and contain high ~ncentrations of fluoride. The pH level

of the released wastewater sample and l4H:k of hazardous constituents in the reported wastewater

analyses suggest a low risk to the environment.

4.8 SWMU NO. 8 - CORONADO MUNICIPAL LANDFILL (Photograph N~. 18 and 19)

Description

The Signetics Albuquerque facility is situated on _a portion of the former Coronado Municipal

Landfill site. The landfill was operated by the City of Albuquerque from 1963 to 1965 and received

mainly household and commercial trash. Historical evidence suggests that it was a relatively small

lan_dfill that was comprised of two sections and occupied an area of approximately 7 .5 acres (Figure

4-2). The larger section of the landfill was partially excavated during the construction of the

Signetics facility and moved to the Los Angeles Municipal Landfill. The estimated-depth of this

landfill section was 30 to 40 feet. The smaller section, in the vicinity of the_ northwest comer of the

37

---.-yor-r~-'-",-• o._-., ., , _•• "0 H'2J "-"• " • ,.,.,,_ •• , ••·•,• -"f•t•• • " • ·~·· · • •• • ·~ •

\lo) 00

y 0'

............. -~ 2 --. ---·,, ··.

, , 1!!9.IN · · llttmD ·i1tt. qn~ I qn~I,. ; .

.,, ·f"".," ~- IJnder91ovnd Sh1a9e Tank ~~"': )I.. ! I / I \VOG 1 , o~ ;no U~d er nr ound ~ i n1 ~II' ·'· ··

f) ,.t:RCLIS sites a ,'I• ~ "f( '.AR>. lillP- IJI • SllM

I < I I f . • l-if:~A ~l ·les

1000 0 1000

SCALE IN FEET

.. L_ .... ...........

-.,.... N /~,, -~ '-. --..,~ ---·· ---

CORONADO

·.'_ri7:J/ ;1 Ll~

AIRPORT


FIGURE4-2 MUNICIPAL LANDFILL LOCATIONS

PRC Environmental Management, Inc.

•

" I'

Signetics facility, had an estimated depth of 20 to 30 feet (EPA, 1986). The landfill site is vented for

methane and subsidence was evident during the VSI. Signetics has installed four monitoring wells at

its facility to monitor ground-water conditions (Figure 2-2). Depth to ground water is between 190 to

220 feet and the overlying aJluvium is very penneable (Signetics, 1992).

The Coronado landfill was operated from 1963 to 1965 and is inactive. The landfill has EPA

identification number NMD980622708 and is not regulated by RCRA or included in the Signetics Part

B Pennit (Albuquerque, 1992c).

Waste Type

The landfill reportedly received household trash and possibly some comrnerciaJ refuse.

Sampling of an exposed section of fill. indicated significant levels of heavy metals, pesticides, and

hyd~ocarbons. Reported substances included lead, zinc, dieldrin, chlordane, naphthaJene, and

bis(2-ethylhexyl)phtha1ate (EP.A, 1986). Ground-water samples collected by Signetics indicated the

presence of low concentrations of volatile organic compounds (VOCs), including tetrachloroethene

and 1,1,2 trichloro-1,2,2-trifluoroethane in collected ground-water samples (ENSECO, 1992).

Waste Manaeement

Th~ landfill . is uncontained and leaching of any contaminants into the soil is unrestricted .

(EPA, 1986).

Environmental Release

Exposed landfill materiaJ contained significant levels of heavy metals, pesticides, and

hydrocarbons. Ground water in the vicinity of the landfill contained low levels of VOCs (EPA, 1986

and ENSECO, 1992) . .

39

----· '!""' .... , ................. ,., ,......,.. .... .. · - ·- · ':"-- · ··-~· ... ..... ... .... ........ . ... . .. ~·:-1r..· ,······-·-···· •.•.


An unknown quantity of landfill material was removed from the larger section of the landfill

during construction of the Signetics facility and disposed of in the Los Angeles Landfill. No other

remedial action has been taken.

Suggested Action

PRC recommends that an RFI be performed to investigate the presence of hazardous

constituents in the landfill material and surrounding soil, and the extent of any ground-water

contamination.

Reasons

Evidence exists that hazardous materials are present in the landfill. Ground-water sampling

indicated the presence of harmful contaminants in the ground water, suggesting that a release from the

landfill may have occurred. Potential receptors exist; ground-water in the proximity of the facility

may be contaminated (EPA, 1986 and NMSE, 1992).

5.0 AREAS OF CONCERN

PRC identified no areas of concern (AOC) during the VSI.

6.0 HUMAN AND ENVIRONMENTAL T~GETS

This section discusses the potential human and environmental targets of any release of .

hazardous material into the environment from the SWMUs at the Signetics facility in Albuquerque,

New Mexico. Potential pathways include air, sail, subsurface gas, surface water, and ground water.

40

:-

,. ' .....

6.1 AIR

The Signetics facility has a permit with the City of Albuquerque for all its air emissions. Air

· Quality Permit number 166 was issued to the facility on December 15, 1986 and has since been

amended one time in 1987, to raise the levels of permitted voe and arsenic emissions, and the

maximum annual silicon wafer processing volume. The permit requires air quality monitoring of

VOCs, arsenic, and acid emissions from the Signetics facility. The air quality permit limits are 1.16

pounds per hour (lbs/hr) (5.015 tons/year) combined voe stack emissions, 0.00020 lbs/hr (0.0009

tons/year) combined arsenic stack emissions, and a maximum wafer utilization quantity of 1,300,000

per year. Acid emissions have no set limits (Albuquerque, 1992a).

· Signetics is required to submit quarterly reports on stack discharges to the City of

Albuquerque, Engineering/Air Monitoring Section, Air Pollution Control Division. An April 1990

quarterly report contained combined stack emission measurements of 0.041 lbs/hr (0.184 tons/year)

voes, 0.00015 lb/hr (0.006 tons/year) arsenic, and 1.418 lb/hr (6.64 tons/year) hydrochloric acid

.i (Albuquerque, 1992a)~

., , ... '- ... ;.

Since the 1986 issuance of the original air permit, no notices of. violations have been issued in

~esponse to submitted quarterly reports or facility inspections. The City has routinely received

submitted notifications of stack air scrubber equipment upgrades and modifications ·from Signetics

(Albuquerque, 1992a). ·

Therefore: based on the information above, the threat posed to the air by Signetics, as a result

of plant emissions, is estimated to be low.

6.2 SOIL

The Signetics facility \\'.as constructed on a portion of an abandoned and uncontained

municipal landfill. The landfill was constructed in 1963 and operated from 1963 to 1965 and

received mainly residential and possibly some commercial refuse. Analysis of exposed landfill refuse

indicated significant levels of heavy metals, pesticides, and hydrocarbons (EPA, 1986). The detected

presence of voes in ground-water samples collected by Signetics, and the permeable nature of the

41

· --.~ ... - . . .. ·· • "• • ..... n·., -·~ • • -·· t

'

- ..__,....._ .. ,,. ....... ...,._, ... -... ...

overlying alluvium, indicated that a rel~e of landfill wastes into the underlying soils and ground

water may have occurred (ENSECO, 1992).

The Neutralization Wastewater Treatment System had a documented one-time release of

wastewater into the surrounding soil in 1985. The wastewater detected in a leak detection test well

was removed and the pH measured. The pH measurement combined with analytical data from

routinely collected wastewater treatment samples suggest that the released material was not hazardous.

No subsequent record of an analysis of released wastewater or investigation of the site was found

(Signetics, 1985b).

The presence of the uncontained landfill under the Signetics facility, with an unknown volume

of hazardous material, makes the likelihood of a release to soil high. The other SWMUs storing

hazardous waste within the Signetics facility have had no reported releases and the containment ·

systems in place make the likelihood of release from these units low.

6.3 SURF ACE WATER

Surface water runoff from the Signetics facility is drained to the north and south side of the

property where it is discharged to storm water channels constructed to manage runoff-from the La

Cueva Arroyo. These concrete channels discharge into the AMAFCA N~rth Diversion Channel,

approximately 500 feet to the west of the.facility (Figure 3-1). This.100-year flood Control channel

diverts surface water runoff from most of Albuquerque along the east side of the Rio Grande and has

discharge points at both the north and south ends of the city. The direction of channel flow is north

in the vicinity of Signetics, with the point of discharge into the Rio Grande approximately 3 miles to

the_ northwest. The Rio Grande is the ciosesf su~ce water body to the f~cility and is about 3.5 miles

west, with a flow direction from north to south. Water lise from the Rio Grande River can be

generally classified as irrigation, livestock and wildlife. watering, some limited warm water ·fishery,

and secondary contact recreation (EPA, 1986). The Rio Grande also serves as a source of ground

water recharge in the Rio Grande Valley (Bjorklund, 1961). Between the AMAFCA North Diversion

Channel and the Rio Grande, there is an extensive network of irrigation channels and water ways

· serving private residences and small farms in the river valley.

42

' .

There are currently no endangered or threatened species in the vicinity of Signetics. There is,

however, one proposed candidate species, the Rio Grande Silvery Minnow, for threatened status,

whose habitat includes the Rio Grande in the Albuquerque area. The New Mexico Jumping Mouse,

found in riparian habitats, is under consideration as a candidate 2 (C2) level threatened species

(Donahue, 1992).

With the possible exception ~f the abandoned Coronado Municipal .Landfill, all hazardous

waste generation and storage on the Signetics property, occurs within the confines of the Fabrication

and ~ystems Center buildings (Figure 2-2). The likelihood of hazardo~s waste release to surface 1

water from these buildings is deemed low. The most likely potential pathway would be the

wastewater treatment facility which is routinely monitored and receives only acidic wastewater. The

likelihood of release to surface water from the landfill is unknown, but the close proximity of the Rio

Grmde, approximately 3.5 miles to the west, makes this potential pathway a concern. During the

VSI, no visible evidence of landfill material was observed. However, a previous report references ·

collection of exposed landfill material containing hazardous constituents (EPA, 1986).

6.4 SUBSURFACE GAS

The abandoned Coronado Municipal Landfill is the only SWMU of concern regarding the

'potential relea5e·of subsurface gas. There are 35 existing methane vents in the landfill and methane

. emissions are monitored regularly. Therefore, the potential for release of subsurface gas in the

vicinity of the Signetics facility can be described as high. In 1 year of ~eported monitoring, methane

concentrations from 35 vents never exceeded 10% lower explosive limit (LEL) (EPA, 1986).

6.S GROUND WATER

The Signeties facility is located on Valley fill, which is composed mostly of unconsolidated

and loosely . consolidated gravel, sand, silt, and clay; and includes two geological units, the Santa Fe

group and the alluvium (Bjorklund, 1961). The Santa Fe group and alluvium serve as the principal

aquifer in the Albuquerque area and are interconnected hydraulically, and water moves from one

formation into the other in accordance with the local hydraulic gradient . . Ground water in the vicinity

of the Signetics facility is reported at depths of 190 to 220 feet (Figure 3~1) (S.ignetics, 1992) . . The

43

~: !jil ,11£1 liiiif , - .. ~~~.c,•rtt't"T-t~ · ·-t"'''• .. ~r.,u~p., \-r" ._. ..... ,, .. ,., • .• 1 ·.- • •• •' •

high hydraulic conductivity of this unconsolidated alluvium makes the release of any contamination at

the facility a potential threat to ground water.

Information on 32 wells that are located within a 3-mile radius of the facility is listed in Table

6-1 (EPA, 1986 and NMSE, 1992). The closest well is located approximately 2,000 feet up gradient

of the facility. These wells are utilized for either commercial, irrigation or domestic water

consumption. This list of wells may not be current and cannot be considered inclusive of all wells in

the vicinity of the facility. Many of the well permits filed in the New Mexico State Engineer Office

were incomplete, and it was reported that wells are sometimes completed without a permit being

filed. Additionally, the City of Albuquerque has introduced a potable water supply to the area and

many of the wellS previously used for domestic consumption may be relegated to irrigation of lawns

and gardens (EPA, 1986 and NMSE, 1992). Table 6-1 provides a summary of the recorded wells

located in the area of the Signetics facility.

Finally, no contamination of ground-water wells has been documented in the communities

surrounding the Signetics facility. However, four ground-water monitoring wells installed by

Signetics on its property in J2!L(Figure 2-2) and sampled regularly since, have reveale<I ground

water contamination from low levels of VOCs (EMCON, 1987). The well construction logs for the

four monitoring wells; designated MW-1, MW-2, MW-3~ and MW-4; are included as Attachment C

and a summary of the ground-water contaminants are presented in Table 6-2 (Ensec0, 1988 through

1993). The ground-w.ater samples were analyzed for halogenated volatile o.rganics by EPA Methods

601 or 8010 and only the ~orripounds 1, 1,2,2-tetrachloroethan~, and tetrachloroethene have been

detected. Considering the uncontained construction of the landfill, the high permeability of the

underlying soils, and general hydraulic interconnection between the main aquifer zon~, the alluvium

and Santa Fe group, the potential for ground-water contamination is high.

7 .0 CONCLUSIONS AND RECOMMENDATIONS

The PA/VSI identified 8 SWMUs and no AOCs at the Signetics facility in Albuquerque, New

Mexico. Background· information on the facility's location, operations, ~aste generating processes, . .

history of docume.1ted releases, regulatory status, and receptors is pr·esented in Section 2.0. The

44

TABLE 6-1

Water Wells in a Three Mile Radius of Signetics Corporation Facility

Well Location No. Owner Depth . Water Use

(Ft.)

11.3.2.223 T. Benson 47 Commercial 11.3:2.140 Southwest Aggregate Co. 102 Commercial 11.3.3.334 Nazareth Sanatorium 245 Commercial 11.3.3.442 J. Crowder 46 Commercial 11.3.9.331 C. Bachechi 100 Irrigation 11.3.9.323 Southern Union Gas 200 Commercial 11.3.10.413 J. Torres 60 Irrigation 11.3.10.432 C. Moore 70 Irrigation 11.3.10.444 Nazareth Sanatorium 160 Irrigation

.. 11.3.10 . M. Caudill 176 Unknown 11.3.10. M. Montano 80 Unknown 11.3.10.122 G. Garcia 105 Domestic 11.3.11.334 Nazareth Sanatorium 810 Irrigation 11.3.12.444 Sandia Memory Garden . 50'1 Commercial/Irrigation 11.3.12.430 Sandia Memory Garden 550 Exploration

. 11.3.15.112 . E. Christ 65 Irrigation 11.3.15.440 C. Davis 255 Unknown

- 11.3.15.121'- J. Canilli 223 Unknown ' 1,1.3.15. D. Brink 260 ·Unknown

11.3.15. · C. Smoot 175 Unknown 11.3.15. Cambro Construction Inc. 220 Unknown 11.3.16.312 Yonemoto Brothers 75 Irrigation 11.3.21.132 Ranchos School Unknown 11.3.22.122 A. Montoya 96 Domestic 11.3.22.220 Wylie Brothers 158 Commercial 11.3.23.112 Public Service Company of NM 303 Commercial 11.3.23.210 American Gypsum 236 Commercial 11.3.24.221 City of Albuquerque (Tracy) . 1194 . Commercial

Alameda Well No. 2 ·~ - Walker Well No. 2

Walker Well No. 1 l l.3.'26.342 A. Simms 302 Irrigation

45

·.F :;c .. :: .. t ·: ·! &- ; •,,.. .. 1 1 ~ .......... ..... . ... . . t •" .-~ ' ' " " 'n .. ... · ·• ·-•· ·- ........... · •• ··

C•

-

G

TABLE 6-2

Signetics Ground-Water Monitoring Well Analytical Results

Monitoring Well Numbers Sample Parameter

Date

September I, l ,2,2-TetrachloRthanc 19 &. 20, 1988

Tetnchloroethenc

May 16 &. 17, 1, 1,2,2-Tetrachloroethanc 1989

Tetnchloroethenc

September Tetrachloroethenc 13 &. 14, 1989

Chloroform

December 6, I, 1,2,2-Tetnchloroethanc 1989

Teinchloroethenc

March 21, Tetnchloroethenc 1990

June 12 &. 13, Tetrachloroethenc 1990

September Tcuachloroethenc 12 &. 13, 1990

December Tetrachloroethene s &. 6, 1990

April 9 &. 10, Tetrachloroethenc 1991

June 12 &. 13, Tetrachloroethenc 1991

September 11, Tetnchloroethenc 1991

December Tetnchloroethenc 4" 17, 1991

March 2S & 26 Tetnchloroethenc 1992

May 19 &. 20, Tetrachloroethenc 1992

1,1,2 Tricbloro-1,2.2· lriOuoroethane

September Tetnchloroethenc 22 & 23, 1992

January Tcuachloroe&bcne 6 "7, 1993

~IL • Micro1nma per Uter • Not Dcsecled

MW-1 (µg/L)

30

30

2S

2S

IS

ND

17

17

--20

17 -24

11

14

12

13

13

9.0

-lJ

6.2

.alyse1 performed by EPA Method Number 601 or 8010

MW-2 MW-3 MW-4 (µg/L) (µg/L) (µg/L)

14 30 -

14 30 -14 - 9.2

14 - 9.2

9.9 - 6.1 '

ND - ND

- ND 17

- ND 17

- - -13 - -13 ND 8.1

- ND 7.6 11 - -IS ND 11

4.7 ND S.7

9.2 ND 6.5

11 ND 7.0

. 9.3 6.2 ND

9.S ND 4.7

8.'7 ND 4.8

- - -10 ND s.s

7.1 ND S.4

Trip Blank

ND

ND

-

-ND

1.0

-

-ND

--

ND

--

ND

-

-

ND

ND

ND

4.6

-ND

Reponing Limit (µg/L)

1.0

o.s

1.0

0.5

o.s

0.5

1.0

o.s

o.s 3.3

o.s

0.5 1.2

o.s

0.5

0.5

o.s

o.s

0.5

0.5

1.0

o.s .

o.s

environmental setting of the Albuquerque area is presented in Section 3.0. SWMU-specific

information, such as the unit's description, dates of operation, wastes managed, release controls,

history of documented releases, and observed condition, are discussed in Section 4.0. AOCs are

discussed in Section 5.0. Human and environmental targets as related to potential pathways, are

presented in Section 6.0. Following are PRC's conclusions and recommendations for each SWMU.

Table 7-1 summarizes the information on all the SWMUs at the Signetics facility and recommended

actions.

Eight SWMUs were identified at the Signetics facility as a result of the PR and VSI. Five of

these units are active. Of the inactive units, two are permitted units that are maintained for p.ossible

future use and one has undergone closure.

With the exception of some minor excursion~ from the provisions of the wastewater permit

granted by the City of Albuquerque, there has been only one reported release from the Signetics

facility, which was reported on November 5, 1985. This release from the Neutralization Wastewater

Treatment System constituted a release of wastewater with high concentrations of fluorides and a low

pH to adjacent soils. All incidences of wastewater treatment plant pH excursions have been promptly

reported to the City of Albuquerque's Wastewater Utility Division. The Southside Wastewater

Treatment Plant .release, -which occurred on November 5, 1985, was report_ed to both state and federal

_. regulators. No citations or notices of violation have been issued to the facility. as a consequence of . i .

this release. '

An RFI has been recommended for SWMU No. 8, the abandoned Coronado Municipal

Landfill. This SWMU is an area of potential subsurface contamination due to the unknown nature of

disposecl wastes, the recorded presence of hazardous constituents, the ·uncontained nature· of the .

landfill, the high permeability {)f local soils·, and the presence of voes in the ground water at the

facility .

.!"! · Table 7-1 summarizes the status, waste type, waste managemen~_, rel~es, m,igration pathways,

.- and remedial action for all the SWMUs.

Overall, the facility is not jud_ged to pose a significant threat to the environment, With the

exception of the abandoned Coronado Municipal Landfill, the waste management practices of

Signetics have been exemplory, as indicated by three environmental waste mana~ement awards

47

___ ..,.._.,. .... -~, ··-·· . ....... .. .... -.. ... ........ -· ·····

Unit SWMU No. l

Unit Name Se1n:1ated Drains

Description System of 4- to 6-incb pvc pipe• 1Uapcnded from ceilin1 of floor under proceu area• or in acceuiblc concn:IC tn:nch pipe 1allcry in floor of Sy1tem Cenler.

Operatin1 Statu1 Active

Regulatory Statu1 Unrcplatcd

Waste Type Proceu area acidic and ·aolvent wute aolutions (DOC)) , 0002, F002, and F003 wa1te1).

Waste Mana1emcnt Proceu area wa11e1 an: . collcclCd in dedicated pipe• in a

ac1rc1a1ed draina1e 1y1tem and tramponcd to the Neutralization WallCllValCr Treatment Sy11em (SWMU No. 7) or Tank ~ (SWMU No. 2).

Relcaac HillOry No rcponcd rclcaac1

Relcaac Pathway NIA

Remedial Action Taken NIA

Reicaac Poccnlial Low

Potential Pathway None

Reaaon for Releaac No rcponcd rclcaaca or 1pilla.

Potential Ratin1 No visible contamination durins VSI. Pipini is visible:, easily ac:ceaaiblc, and potential rclca1e1 contained within fabrication and Sy11tema Ccnaer buildinp.

Need for Rfl No .

TABLE 7-1 SWMU Summary

Sheet 1or3

SWMU No.l

Tank3

5 ,000-Jallon cylindrical steel tank of JO foot by 1.5 foot dimcmions in a below Jrade 11 foot by 11 foot by 13 foot JO inch concrclC vault. Tbe concrclC hu chemical n:1i1tant coatins and vaulta an: coven:d with llCel 1ratin1.

Active

Re plated

Walle Solvent.I, a mixed pbotolitho1rapbic aolvent clcanin1 wu1e (DOOi, F002, and F003).

Pr0eeu waatc i1 transponcd to Tank 3 throuJh ac1rc1a~ draina1e 1ystem from proce11 . arcaa: WaalC Solvent 1 is llOrcd . . in tank until tramponcd to a TSDF.

,,.,.

No rcponcd rclcaaca

NIA

NIA

Low

None

No rcponCd relcaKa or 1pilla. No viaiblc contamination durin1 VSI and concrete vault appeared

. to bavc ioocl lll'llCtUral · i1t1esrity. No draina or 111mp1 in vault area, completely coa&aincd.

No

. 48

SWMUNo.3

tank 4

5 ,000.,allon cylindrical n:inforced fibcrila11 tank of 10 foot by 1.5 foot dimcnaioaa, in below Jtadc 11 foot by 11 foot by )3 foot JO inch COllCl'CIC

. vault. Tbe concn:IC hH chemical rc1i1tant coatins and vaulta an: covered with steel 1ratinJ.

Inactive

Reiulatcd

Spent hydrofluoric acid aolution (0002).

Proceu WHIC WU tranaponcd to Tank 4 throu1h the ac1rc1a1ed draina1e 1y1tem from proceu arcaa. Spent hydrofluoric acid aolution ori1inally llOrcd in tanlt ulllil . transponcd to TSDF. Currently waalC hydro.fluoric acid

bypaaaca thi1 SWMU and is treated in SWMU No. :t, the ~allCWatcr uutmcnt 1y11em, prior to diacharie to 1hc POTW.

No rcponcd rclcaaca

NIA

NIA

Low

None.

No rcponcd relcaaca or lpilla. .No visible contamination durioi VSI and concrelC vauk appeared to bavc ioocl atruclUral in1c1rity. No draina or 111mp1 in vault area, complclely contained. Unit ia inac:tive.

No

· ·-; -~ ..

Unit

Unit Name

Dc.cription

Operating Slltus

Regulatory S11tu1

Waste Type

Waite .. Mana1ement

. '";,.

Release Hi1tory

Release Pathway


Release Potential

Potential -Pathway

Reason for Release Potential Rating

Need for RFI

- • l

__ ,,_....,.,...,.-................ .... ....... .. ...... _

SWMU No. 4

Tank S

S ,000-gallon cylindrical reinforced fiberil111 link of 10 foot by B.S foot dimenaiona, in below grade 11 foot by 11 foot by 13 foot JO inch concrete vault . The concrete h11 chemical reailllnt coating and vaults •re covered with ateel gratina.

Inactive

Regulated

Spent buffered oxide etch solution (hydrofluoric: acid and ammonium fluoride) (0002 waste).

Procell waste w11 lnlnaported to Tank 5 throush the se1re1ated draina1e 1y1tem · from proceu area1. Spent buffered oxide etch solution orisinally llOred in link until transported to TSDF. Currently, apent buffered oxide etch bypaaac1 thi1 SWMU and i1 trea<cd in SWMU No. 7, the w111ew1ter treatment 1y11em, prior to di.charie to the POTW.

No reported release•

NIA

NIA

Low

None

No reported releases or 1pi111. No visible con11mination durinJ VSI and concrete vault appeared to have 1ood structural intesrity. No drains or sump• in vault area, completely contained. Unit i1 inactive.

No


Sheet l o°f 3

SWMU No . S

Flammable Storage 4 (FS-4)

One of four rooma dedicated to storage of flammable matei:iala. FS-4 is used for hazardoua flammable walle llOrage. FS-4 ia a concrete room, with floor dimenaiona of 22 by 26 feet and 8 inch thick walla and floonng. The floor ia aloped to a central drain that diachariea into Tank 3. The concrete roof baa an explosion vent and the room ia vented.

Active

Regulated

Waste Solvent II, a · mixed solution of propriellry vendor formulationa of photore1i1t (DOOi and F003 walle).

Proceu area 1enerated walte ia transported daily to FS-4 in 5-sallon carl>oy1 and tranaferred to 55-sallon steel druma. Druma arc 1torcd off of floor on wooden pallell. Druma a.re periOdically tranaportcd by permitted tranaporter to TSDF.

No reported releaae1

NIA

NIA --

Low

None

No visible contamination durin1 VSl. Unit ia well contained with no e11ily acceuible pathway• for polential release, except from fire.

No

49

SWMU No.6


One of two rooma dedicated to general che.mical llOrage of proceu and facility chemical•. CS-2 h11 a portion of its floor apace apecific:ally dedicated to drummed toxic: hazardoua walle llOrage. CS-2 baa 2,6111\2 of floor apace of which the aouthwelt corner, con11ining 172 1\2

baa been dedicated to the atorage of drummed toxic: wa11e. The room i1 collllructcd of concrete floon, walla1

and roof. The floor baa a draina1e 1y1tem connected to the wa1tewater treatment 1y1tem.

Active

Regulated

Material• con11minated with arsenic: from proceu ac:tivitiea (0004 walte) and materials conllminated with mercury (0009 walle) .

Arsenic: and mercury contamina materials arc lnlnaported in seal ba11 to CS-2 and placed in acpara 55-sallon ltcel druma. Druml arc llOrcd by walte type, off the floor, on wooden pallell. Periodic ahipmenll by permitted tranaportcn arc made to TSDF1.

No reported rcleuc1

N/A

NIA

Low

None

No visible contamination durinJ VSI. Unit ia well contained wilb only polential pathway lbrouJh drainl system to walteWater trcatmcnl

· system, to POTW, _all!f to Rio Grande. Stored hazardous waste ia in .Olid form and release lhroush lhO-ia pathway ia unlikely. .

No

-- -

Unit

Unit Name

Dc1eription

Operatina Sta tu a

Resulatory StalUI

Waste Type

Wa1te Manaaement

Releaac History

ltelea1e Pathway


Release Potential

Potential Pathway

Reaaon for Releaac Potential Ratina

Need for RFI

SWMU No. 7


Sheet 3 of 3

Neutralization Wutewater Treatment Sy11.cm

A wa1tewater uuuncnt 1y1tcm with six below around coKrcte vaulu confipred in 1erie1. Vaulu arc covered by concrete 1lab1 and acceaaible throuah metal hatchea. The concrete ia coaled with corroaion rcaill&nt material. The neutralization ayatcm haa an influclll srit chamber, IWO neutralization chambe;.. of two vaulu each, and one outfall vault. Bolh neutralization chamben arc typically utilized, but can opcnte alone durina maintenance cyclca. The treatment area ia aurroundcd by a arid of 11 acid leak tell wella.

Active

Spent acidic wastewater aolutiona includina nitric/aulfuric acid, . apenl hydrofluoric acid (0002), and spent buffered oxide etch (0002). Additional waatcwaten include demincnliur rcaencration wa1tewater, coolina tower blowdown, and proce11 1erubbcr waltcWater.

Acid waatewaten from the proccaa areaa arc tranaponcd through the acarcaaled dninaae ayatcm and di1eharied into the wa1tewater ncutnlization ayatcm. The pH of the wa11ewatcr ia adjusled to meet a permit required pH r•nae prior to combination with aencral facility wutewatcr and di1eharie to thePOTW.

On.: rcponcd rclea1e of acidic wa1tcwater in 1985 from a amall leak in arit chamber. Occasional lhon pH excuniona in ncutnlization proccu.

Soil and surface water

None. Recovered leakins waltcWater from test well. PlaJll pH excuraiona arc lhon term and arc CC!rrcctcd to normal opcntina conditiona.

Surface water

Combined acidic waatcwatcr ia aencnlly nonhazardous. Vauh leak waa an anomaly. Waatcwater constihlenta of concern arc typically low pH and hiah coocentntiona· of fluoride.

No

50

SWMU No. 8

Coronado Municipal Landfill

Abandoned uncontaincd munieipal landfill located on poniona of Sianctica facility. Landfill baa two 1CCliona of approximately 7 .5 acre• of area and haa a rcponcd depth of 20 to 40 feet. There arc 35 methane venu and four around-water monitorina wella in the area.

Inactive

u nrcsulated

Houachold and commercial rcfuac

·Received residential and commercial rcfuac in an uncontaincd landfill from 1962 to 1965.

Collectcd fill from the landfill con&ainccl heavy mctab, pellticidea, and hydrocarbons. Ground-watcr Nmplca from .Sianetica facility contain low levels of VOCa. i.andfill ia currently vented for methane.

Soil, surface water, around water, and subsurface aaa.

A portion of landfill material was rclocaled to the Lo. Anaelea Municipal Landfill durins facility conatruction. Methane vents have been installed.

Hiah .

Soil, surface water, around waler, and submrface au.

Contcnta of the landfill arc unknown. Huardous constilllenta have been detcc~ in collccled fill material and iround-water Nmplea.

Yes

received from the EPA in 1988, 1989, and 1991. The generation and storage of all hazardous wastes

·associated with IC manufacturing are contained within the facility's Fabrication and Systems Center

buildings. The plant has instituted an aggressive waste recycling and minimization program.

Quarterly wastewater discharge and air quality reports to the City of Albuquerque indicate that the

facility is not releasing excessive levels of hazardous ·constituents to the POTW and atmosphere.

. . .

The contribution of tl}e. abandoned Coronado Municipal Landfill to soil and ground-water

contamination represents a potential threat to the environmen_t and neighboring communities. The

population within a 1 mile radius, downgradient from the facility is ·relatively low~ bu·t increases in

the river valley near the Rio Grande. No ground-water contamination has been documented

downgradient of the landfill but the unknown domestic ground-water use in the area, combined with

the high p~rmeability of the subsurface sediments, make this potential release a concern.

t' · ' 1 .

·,·----""""--

• • ···c .. •)

-..

51

'''1!041••···""'· ..... ,...--······ .. --....... ... ~ .... , ... .... .. .. ' .. .. 1 .. -~ ... •• • •• • • • •

J

REFERENCES

Sheet 1of2

Albuquerque, 1991. City of Albuquerque (Albuquerque) Wastewater Discharge Permit Number: 2023A-3. Public Utility Division, Industrial Pretreatment Section, August 1

Albuquerque, 1992a. City of Albuquerque Air Quality Permit 166 File. Engineering/Air Monitoring Section, Air Pollution Division, Notes taken by Frank Robinson of PRC Environmental Management Inc., October 5

Albuquerque, l 992b. City of Albuquerque Wastewater Discharge Permit 2023A-3 File. Public Utility Division, Industrial Pretreatment Section, October 2

Albuquerque, 1992c. City of Albuquerque Site Environmental Audit (SEA) Database - Signetics Corporation. Environmental Health Department, September 18

Anderholm, S., 1988. Ground-Water Geochemistry of the Albuquerque - Belen Basin, Central New Mexico. U.S. Gaological Survey, Water-Resources Investigation Report 86-4094

Anderson, C., 1992. Albuquerque Metropolitan Arroyo and .Flood Control Administration (AMAFCA), Albuquerque, New Mexico. Personal communication with Frank Robinson, PRC Environmental Management, Inc., October 14

Bjorklund, L. and B. Maxwell, 1961. Availability of Ground Water in the Albuquerque Area, Bernalillo and Sandoval Counties, New Mexico. New Mexico State Engineer Technical Report 21.

Donahue, M., 1992. United States Fish and Wildlife Services, Eeological Services Field Office, Albuquerque, New Mexico. Personal communication with Frank"Robinson, PRC Environmental Management, Inc., October 14

Emcon, 1987. Baseline Ground-water Investigation, Signetics Corporation, Albuquer:que, New Mexico. Emcon Associates, Project 377-16.01, June

Enseco 1988 through 1993.· Enseco Rocky Mountain Analytical Laboratory results prepared for Signetics

Environmental Protection Agency (EPA), 1983a. Letter from Craig Campbell to W. Dana, Signetics Corporation, March 17

EPA, 1983b. Settlement Agreement and Final Order. United States Environmental Protection Agency Region VI, June 29

EP.A, 1985. Preliminary Assessment Facility Checklist. September 2

EPA, 1986. Potential Hazardous Waste Site, Site Inspection Report. September

EPA, 1988. Compliance Evaluation Inspection (CEI) Report. August 30

Federal Emergency Management Agency (FEMA), 1983. Flood Insurance Study, Cit}r of Albuquerque, New Mexico, Bernalillo County. FEMA, Community .Number 350002, Final, September 15 ·

52

REFERENCFS

Sheet 2 or 2

GEMS, 1992. Geographical Exposure Modelling System (GEMS) Database. July 22

New Mexico Environment Division (NMED), 1991. Signetics Inspection Report. January 10

New Mexico Environmental Improvement Division {NMEID), 1986. Letter from unnamed author to Gary Mavrakis, Signetics Corporation, April 1

NMEID, 1988a. Inspection Report. August 30

NMEID, 1988b. Letter from Kirkland Jones to Gary Mavrakis, Signetics, September 1

New Mexico State Engineer's Office (NMSE), 1992. Ground-water well permit file. October 1 and 2

Reeder, H., L. Bjorklund, and G. Dinwiddie, 1967. Quantitative Analysis of Water Resources in the Albuquerque Area, New Mexico. NMSE, Technical Report 33

Signetics, 1980a. RCRA Part A Permit Application, August 14

Signetics, 1980b. RCRA Part B Permit Application, August 14 . .

Signetics, 1985a. Letter from Gary Mavrakis to Jamie Wright, EPA, May 14 . ... . .• ~ignetics, 1985b . . Letter from Gary Mavrakis to Maxine Goad, NMEID, Npvember 18

Signetics, 1986. Letter from Gary Mavrakis to Denise Fort, NMED, April 14 ·

Signetics,. 1988. Letter from Gary Mavrakis to Kelly Crossman, NMEID, August 16

Signetics, 1990 . . 19.89-Hazardous Waste Report. State of New Mexico Health and Environment Department, No date · ·

Signetics, 1991. 1991 Hazardous Waste Report, Off-Site Identification. U.S. Environmental Protection Agency, No Date ·

Signetics, 1992. Letter from Gary Mavrakis to Frank Robinson, PRC Environmental Management, Inc. (PRC), September 28

United States Department of Agriculture (USDA), 1977. Soil Survey of Bernalillo County and Parts of Sandoval and Valencia Counties, New Mexico. Soil Conservation Service, Forest Serviee, and United States Department of Interior (USDI) in cooperation with New Mexico Agriculture Experiment Station, No Date · ·

Williams, J., 1986. New Mexico in Maps. University of New Mexico Press, Albuquerque, Second Edition, No Date

52

.... .-..... '' "" .......... -. -·· --··~ .. , ... ·-· .. .. .... ..

AITACHMENT A

VISUAL SITE INSPECTION SUMMARY

Date:

Facility Representatives:

Inspection Team:

Photographer:

Weather Conditions:

Summary of Activities:

• i=•W&! iii ;; .-......... ~ u •11nt1••· •• I• "'·a .r,·r.u~~ - · ~~-·--- · ··· ,.,., ......... .... ., "

VISUAL SITE INSPECTION SUMMARY

Signetics Corporation 9201 Pan American Freeway, N.E. Albuquerque, New Mexico 87113

August 24, 1992

Gary Mavrakis, Material/Environmental Compliance Manager, Signetics Corporation

Frank Robinson, PRC Environmental Management, Inc. Cynthia McNulty, PRC Environmental Management, Inc. Joan Middleton, PRC Environmental Management, Inc. ·

Cynthia McNulty

Overcast and cloudy, wind direction was due north, temperature was 62.F

An introductory meeting, lasting approximately I 1/2 hours, was held with Gary Mavrakis at 8:20 AM on August 24, 1992. During the meeting, the purpose of the RF A and site visit was reviewed by Frank Robinson, the PRC site inspection team leader. Discussion was also held on the on going acti.vities of a parallel EPA investigation being performed by Fluor Daniels. The meeting then focused on t.he history of the facility, regulatory permit requirements, the processes, and operations of the facility. Also discussed were the wastes generated and various waste management practices at the facility. A review of the planned site inspection itinerary was made. with Gary Mavrakis. at the conclusion of the meeting.

The visual site inspection (VSI) began at 9:50 AM from the reception area at the entrance to the Signetics Fabrication building. The first area inspected was the facility's Compliance and Product Testing Laboratories where wastewater samples are tested for compliance and incoming photolithographic c.hemicals are tested for quality. Drains were inspected, and chemicat'handling and storage practices reviewed.

We then proceeded south to the process areas within the Fabrication building where the blank silicon wafers are processed into semiconductor integrated circuits (IC). At 10:00 AM we were shown the first process area, Fab 22, a •class loo• clean room that we were able to view from an adjacent corridor. Proceeding down the corridor we were able to view the newest process area, Fab 23, a •c1ass 10• clean room. We were able to view the automated manufacturing equipment and operators in clean room attire. Areas of construction were evident in the building, where a new pro~uction area is being built.

A-1

From the process area, we proceeded west to the basement of the Fabrication building at approximately 10:15 AM and were shown the segregated drainage pipes that transport the bulk of the process area. wastes to the storage areas. We were able to see that the pipes were designed to allow easy inspection and observation of any releases.

From the Fabrication building we proceeded west to the Systems Center building to inspect the waste storage areas and wastewater treatmept system. The Chemical Storage 2 (CS-2) toxic hazardous waste storage room was our next stop on the inspection tour at 10:20 AM. The drum storage practices were noted. The next area was the wastewater treatment area that ·includes the wastewater neutralization system and the three waste storage tanks ' in below ground concrete vaults. We inspected the vaults from the top of the tanks with a flashlight. At 11:00 AM the inspection moved to the Flammable Storage 4 (FS-4) ignitable hazardous waste storage area. Drum storage and waste management practices were reviewed. From the FS-4 area, we returned to the chemical storage area at 11:15 AM and inspected Chemical Storage 1 (CS-1); the other chemical storage room adjacent to CS-2.

At 11:20 AM we left the Systems Center building from the southwest side of the building and inspected the facility loading areas and the approximate site of the abandoned Coronado · Municipal Landfill. Areas of subsidence were evident and notice made of methane vents and ground-water monitoring wells instailed by Signetics. ·

We returned to the office of Gary Mavrakis at 11:40 AM and held a debriefing meeting. Gary indicated that he never received the fetter requesting a site visit or the requested additional site information. Frank Robinson will address this with a follow up letter. The inspection team left the facility at 12:20 AM.

A-2

A TI ACHMENT B

VISUAL SITE INSPECTION PHOTOCRAPHS

PHOTOGRAPH NO. 1

"!·

Date: 8/24/92 Picture Taken by: C. McNulty Direction Facing: East Picture Description: SWMU No. 1 - Segregated drain pjoes used to transport waste streams from process areas. Piping is transitioning from ceilins to concrete trenches in System Center.

B-1

0. 2

-~ t . . ,. D:itt>: 8 2~ :9'.! Picture Taken by: C. McNultv Direction Facing: --'E=a=s .... t _____ _

.Picture Description: SWMU No. 6 - Chemical Storage 2 (CS-2); drummed chemicals used at Signeti.:-s stored on wood oallets. Toxic hazardous wastes are stored in a separate area to the left.

PHOTOGRAPH NO. 3

:;- ··· . - . . ~ ......

Date: 8 124 .'92 Picture Taken by: C. McNultv Direction Facing: _W~es...,t ______ _ Picture Description: SWMU No. 6 - CS-2: chemical products used at Signetics stored on wood

· pallets and cold storage room for ohotoresist material.

B-2

PHOTOGRAPH NO. 4

Date: 8/24/92 Picture Taken by: C. McNulty . Direction Facing: Southwest Picture Description: SWMU No. 6 - CS-2: drummed toxic solid wasie stored on wooden oallets in dedicated waste storage area.

B-3

"; .

~· ·

DJte 8 24 ;92 Picture Taken by: C. McNultv . Direction Facing: Northeast Picture Description: SWMU Nos . 2. 3. 4 and 7 - Wastewater treatment system is left of the metal

· grates . GrateJ and solid covers are over vaults for Tanks 3. 4. and 5. and two empty vaults.

PHOTOGRAPH NO. 6

· Date: 8 /24 /92 Picture Taken by: C. McNulty Direction Facing: __.E=a,..s..._t ___ __.;. __ Picture Description: SWMU No. 7 - Influent ooint of wastewater treatment system at too center. The metal hatches give access to neutralization chambers. The circular hatch accesses oH probe.

B-4

j

PHOTOGRAPH NO. 7

Date: 8 ·2.i.·92 ' Picture Taken by: C. McNultv Direction Facing: __.S ... o ... u..,t .... h ____ _ Picture Description: A grate cover to one of two empty concrete vaults west of Tank 3. The empt,- vault was previous!\· used for bulk storage of sulfuric acid . Salvage drums are emptv-_

PHOTOGRAPH NO. 8

Date: 8/24192 Picture Taken by: C. McNulty Direction Facing: __,,So..._..p...,th..__ ___ _ Picture Description: A grate cover to one of two emPJv concrete vaults ~est of Tank 3. The emptv vault was previoustv used for bulk storage of caustic. Concrete oipe trench ig- back&round.

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Date: 8124 .'92 Picture Taken by: C. McNultv Direction Facing: --'S""o"-u=-t:..:.h.:.....-____ _ Picture Description: SWMU No. 2 - Metal cover over concrete vault holding Tank 3. Note vent and metered stick use,d for tank gauging. Concrete pipe trench in backgroun·d.

PHOTOGRAPH NO. 10

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Date: 8/24/92 Picture Taken by: C. McNulty Direction Facing: __.So_..u....,t .... h ____ _ Picture 'Description: SWMU No . .3 - Metal grate cover qver concrete vault holding Tank 4. Note metered stick used for tank gauging in center of picture.

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PHOTOGRAPH NO. 11

Date; 8/24192 Picture Taken by: C. McNultv Direction Facing: Southeast Picture Description: SWMU No. 4 - Metal grate cover over concrete vault holding Tank 5. Note concrete 'pipe trench ' \or segregated drainage system around oeriphery of area.

PHOTOGRAPH NO. -=12:...--

' ·

Date: 8/24/92 Picture Taken by: C. McNulty Direction Facing: Northeast Picture Description: SWMU No. 7 - Steel cover over one of 11 acid leak test wells surrounding the "_'astewater treatment ~ystem and Tanks 3. 4. and S. Note Door drain to wastewater plant.

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PHOTOGRAPH NO. 13

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. Date: 8/24/92 · Picture Taken by: C. McNulty Direction Facing: Northeast Picture Description: Bulk hydrochloric acid. sulfuric acid. and caustic storage tanks in wastewater treatment area. The white air scrubber is in background.

Date: 8/24/92 Picture Taken by: C. McNulty Direction Facing: _E=as ....... t -----Picture Description: SWMU No. 4 - East wall .of concrete vault with top of steel Tank 3 in foreground. No evidence of spills or cracks in waJls. The vault is inspected daily.

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PHOTOGRAPH NO. 15

. . Date: 8/24/92 Picture Taken by: C. McNulty Direction Facing: __.N......,or..,t .... h.__ ___ ~ Picture Description: This is an air scrubber unit in ttie wastewater treaiment area used to remove hydrochloric acid and caustic fumes. ·

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PHOTOGRAPH NO. 16

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Date: 8/24/92 Picture Taken by: C. McNulty Direction Facing: _W'"'""'"es..,t..._ ____ _ Picture Description: · SWMU No. S- Flammable Storage 4 CFS-4): waste Solvent II storage room with 5-gallon Nalgene carboy containers in a cart orior to transfer of contents to SS-gallon drums .

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PHOTOGRAPH NO. 17

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r Date: 8/ 24/92 ·Picture Taken by: C. McNulty 'Direction Facing: ._S.,..o __ u __ th..__ ___ _ Picture Description: SWMU No. S - FS-4: drummed Solvent II waste stored on wooden oallets. Note the spill /leak containment containers under the pallets.

PHOTOGRAPH NO. 18

Date: 8 /24 /92 Picture Taken by: C. Mc Nulty Direction· Facing: ·Northwest" Picture Description: SWMU No. 8 - Ground-water monitoring weJJ located fo vicinity of abandoned Coronado Municipal Landfill on Signetics facil~ty. · ·

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PHOTOGRAPH NO. 19

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Date: 8/24/92 Picture Taken by: · C. McNult\t Direction Facinl: __.W ..... e ... s. ... t ____ _ Picture Description: SWMU No. 8 - Aooroximate sjte of Coronado Municipal Landfill on SigJ)etjcs facility. Two methane vents in foreground and ground subsidence evident in area.

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PHOTOGRAPH 1'0. 20

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Date: 8 1 2419~ Picture Taken by: C. McNultv Direction Facing: __..E'""a=s .... t ------Picture Description: Municipal trash bin and nonchemical loading dock on west side of Signetics Fabrication building.

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PHOTOGRAPH NO. 21

... . . . ,, . . !. , ...... . .... ... , . .. .. . .... ...

Date: 8/24/92 Picture Taken by: C. McNulty Direction Facing: __,N ......... o.:..irt .... h...._ ___ _ Picture Description: Chemical receiving/loading dock on south side of Signetics Systems Center building. No materials are oermitted to be stored on the dock. · · ·

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ATIACHMENT C . . .

SIGNETICS MONITORING WELL CONSTJtUCTION LOGS

.-..

:

e Emcon ..... c •• , ••

a c

.. ~\ -

WELL DETAILS PROJECT NUMBER 377-16. 01

PROJECT NM-if Signetics

COUNTY Bernal i 11 o Co. 2 NM

WELL PERMIT NO • NlA

lc __ m __ .,.. I Steel protective

casing (Std.)

g

d

j

__ ,._k

BORING I WELL NO. M\.1-1

TOP OF CASING ELEV. 5168.73 GROUND SURFACE .ELEV. 5168.17

DATUM Mean Sea level

EXPLORATORY BORING a. Total depth 247

b. Diameter 7 7/8 Dr.illing method Air /Mud Rotary

WELL CONSTRUCTION c. Casing length 230 ft.

Material Schedule 40 PVC

d. Diameter __ 2 __ in.

e. Depth to top perforations 199. 5

f. Perforated length 30

Perforated interval froml 99 • ~o ~ft. Perforation type Machine Slotted

Perforation size __ o_._0_2_i_n_c_h ___ _

g. Surface seal _3 __ ft.

Seal material _C_e_m_e_n t_w~/_3;..;.%_· ..;..Be.;..n.;...t_o.;...n_i t.;.;;e

h. ·Backfill 171 ft. Backfill material Cement w/ 3% Bentonite

i. Seal 5 ft. Seal material __ B_en_t_o_n_i t_e ____ _

j. Gravel pack± _6_B __ ft.

Pack material CSSI Sx12 Sand

k. Bottom seal N/A ft. Seal material N/A

1. casing height ·*

m. Protective casing · diameter

: includes filter pack * top of PVC casing

. . 5 ft. lO . ___ in.

PL . T'E A-

WELL DETAILS

~ PROJECT NUMBER 377-16.01 BORING I WELL NO. MW-2 PROJECT NAME Si9netics TOP OF CASING ELEV. 5159.36 COUNTY Bernalillo Co., NM

GROUND SURF ACE ELEV. . 5158.15 sncon WELL PERMIT NO. NIA Mean Sea Level aeaece&T• e

DATUM

r~ m • j Steel protective

casing (Std.) EXPLORATORY BORING a. Total depth 245 ft. b. Diameter 7 718 in.

Drilling method Air/Mud Rotary g

·WELL CONSTRUCTION c. Casing length 240 ft.


d. Diameter 2 in.

d e h ~ Depth to top perforations 200 ft. f. Perforated length 30 ft.

Perforated interval from 200 to 230 ft. Perforation type Machine Slot

Perforation size 0.02 inch

a c g • Surface seal 6 ft. - . Seal material Grout W/ 3% Bentoni te • ,., • 4

h. Backfill 174 ft.: Backfill material Grout w/ 3% Bentoni t

i. Seal 8.·5 ft.

f Seal materiai · • Vol cl al Bentoni te

j j. Grave) pack ± · 56.5 ft. Paek material · CSSI 8xl2 Sand

k. Bottom. seal N/A ft. Seal material N/A

I. Casing height * . 1.0 ft. . m. Protective casing d~meter 10 in. k ...... -

±includes. filter pack (.S')and b natural pack (9.5') ·

* t~p of PVC casing ·

. PLATE A-10

@ ancon aa•OCtAfl8

.. : ... .. ... .... ..

~ ' -a c

f

WELL DETAILS PROJECT NUMBER 377-16.01

PROJECT NAiViE Signetics

COUNTY Bernalillo Co., NM

WELL PERMIT NO. N/A

m a I Steel protective

casing (Std.)

g

d e h

k

BORING I Wal NO. MW-3

TOP OF CASING ELEV.

GROUND SURFACE ELEV.

DATUM Mean Sea Level

EXPLORATORY BORING a. Total depth 260 ft.

b. Diameter , 7 7 /8 in.

Drilling method Air /Mud Rotary

WELL CONSTRUCTION c. Casing length 240. 5 ft.


· d. . Diameter 2 ---in. e . .... Depth to top perforations 209.5

f. Perforated length 30 ft. f>erfora ted interval from209 • §:0 239. Sn. Perforation type r-1achi ne Slotted

Perforation size · 0!02 inch

g. Surface seal 8 ft. Seal material Cement w/ 3% Bentonite

h. Backfill 172

Backfill material Cement w/ 3% Bentoni t

i. Seal 14 ft. · Seal material Bentonite

j. Gravel pack .± 66 ft.

Pack material CSSI 8xl2 Sand

k. Bottom seal N/A

Seal material N/A

I. Casing height * l~O

m. Proteetive ·casing diameter 10

± includes filter pack (2.5 ft)an natural pack (6 ft)

* top of PVC casing

PLATE A-1

... •

~ anc:on •••OCIAtte

-=~

a c

f

WELL DETAILS PROJECT NUMBER _..;;3.;_77;_-~l..;...ti _. 0_1 ___ _ BORING I WELL NO. MW-4

TOP OF CASING ELEV. 5182.94

GROUND SURFACE ELEV. 5182. 46

PROJECT NM-\E Si gneti cs

COUNTY Bernalillo Co., NM

WELL PERMIT NO. N/A

m • j Steel protective casing (Std.)

g

d e h

.... ······ .. - ...... ~-.·! ...... ....... ..... ·. 4!:.··~· ..... · . ..... . .... ' ····· . ........ ...... ~-·:· .. . . .... ·:-:~:::: ....... :•, .. .. ..•. -·~ ·:::-:-.:: j ···•·•· .. ······ ...... .... .. ....... · ...... ....... ... .. . . ... .. .•.. :. '· : ·~::. =~·.~::: ~: ... ~.:~ ....... .. ..• . ... .. · .... .........

k

DA IUM ___ M.;.;;;e;.;;a.;.;.n....;S:;.;:e:..:a~Le::..v:..:e~l~

EXPLORATORY BORING a. Total depth 260 ft.

b. Diameter 7 7 /8 in.

Drilling method Ai r /Mud Rotary

WELL CONSTRUCTION c. Casing length 240 ft.


d. Diameter 2 in. e. Depth to ·. top perforations 209. 5 ft. f. Perforated length 30 ft.

Perforated interval· from209. §:0 239. ~-

·perforation type Machine Slotted

Perforation size 0.02 inch

g. Surface seal 19 ft. Seal material Cement w/ 3% Bentoni te

h. Backfill 169.5 ft. Backfill materia1Cement w/3% Bentonite

i. Seal 10 ft. Seal material .Bentonite

j. Gravel pack± 61.5 ft. Pack material CSSI 8xl2 . Sand

k •. Bottom seal N/A ft. Sea I ma teria I N/A

I. ·casing height * .5 ft. m. Protective casing .diameter 10 in.

± .includes filter pack * top of PVC ~a sing

PLATE A-12

PllC - hwbdocuments.env.nm.gov Semiconductors/1993-04-27... · Sheet 1 or 2 Section DISCLAIMER ......

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Transcript of PllC - hwbdocuments.env.nm.gov Semiconductors/1993-04-27... · Sheet 1 or 2 Section DISCLAIMER ......