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Plasmafysica & StralingstechnologieElementary Processes in GasdischargesPlasma & Materials ProcessingCoherence & Quantum TechnologyScience and Technology of Nuclear Fusion0/ Applied PhysicsPlasma medium: common interest to the PPRT thrust area

Same fundamental knowledge reservoir

Plasmas investigated vary in density and temperatures

Intrinsic nonequilibrium medium

Utilize fundamental knowledge in various applications

Very good example of applied science

Plasma Physics and Radiation Technology

Experiments and modeling approach/ Applied Physics

Plasma Physics and Radiation TechnologyPhysics and chemistry on short time and length scales

Use of high power lasers for in situ and real time plasma and surface diagnostics

Two groups: Research on plasma-surface interactionPlasma & Materials Processing (PMP)Research on homogeneous plasma processesElementary Processes in Gasdischarges (EPG)/ Applied Physics

Plasma Physics and Radiation Technology

CQTHigh phase space density plasmasCoherence & Quantum TechnologyDeBroglie wavelength:Phase space density:

Quantum Effects become important3Central theme CQT: explore new extreme plasma regimes, in particular high phase-space density plasmas. The typical length scale is the DeBroglie wavelength ~1/sqrt(T). The low temperature techniques of AQT are combined with the FTV expertise of handling high electron densities to enter completely new regimes./ Applied Physics

Plasma Physics and Radiation TechnologyScience & Technology of Nuclear fusionGroup will have experimental focus

Strong collaboration with national and international facilities world wide

Direct links with PMP and EPG groups are present / Applied PhysicsThe track embraces research subjects such as:

the generation of plasmas

plasma-surface interaction (e.g. plasma deposition, plasma etching, etc.),

plasma-accelerators, novel ion and electron sources

laser cooling techniques and atomic optics

An important characteristic of the master track is the fundamental approach of the themes as well as the research into new applications of this broad field of research. Plasma Physics and Radiation Technology/ Applied PhysicsGeneral outline of the Master programme1st year60 ECTS3 compulsory courses10ECTS(Compulsory) track courses17ECTS

Optional courses14ECTSExternal Assignment19 ECTS2nd year60 ECTSGraduation project60 ECTSGeneral compulsory courses: 3 courses with a total of 10 ECTS

Compulsory and optional track courses: 17 ECTS consisting 2 compulsory courses of 8 ECTS in total and at least 11 ECTS of optional track courses;

optional courses: each student has to choose a well-balanced set of courses to a total of at least 14 ECTS points (about 3-4 courses);

external assignment project of 19 ECTS points (12 weeks) usually outside TU/e;

graduation project of 60 ECTS points (1 year).Plasma Physics and Radiation Technology8 compulsary: Introduction plasma physics + Lasers & Optics6/ Applied PhysicsCoherence & Quantum Technology (CQT) Extreme states of matter: Ultra-cold & ultra-hot, plasmas & gases; Laser manipulation of atoms, electrons and ions; Atom, electron & ion beams for femto-nano science & engineering.Staff:Prof. Jom LuitenProf. Ton van Leeuwen Dr. Servaas Kokkelmans Dr. Peter MutsaersDr. Edgar VredenbregtDr. Seth Brussaard/ Applied PhysicsCoherence & Quantum Technology (CQT)Ultra-Cold Electron & Ion Beams:

Laser cooling & trapping; Femtosecond (10-15 s) laser physics; Ultra-low temperature (0.001 - 10 kelvin) plasmas; Femtosecond electron microscopy; Sub-nanometer ion beam drilling & milling.Edgar Vredenbregt, Jom Luiten, Peter Mutsaers

/ Applied Physics

Ultracold electron & ion beams 15 KElectron temperaturee-ionsVIITaban et al., to be publishedUltracold plasmasTaban et al., Phys. Rev. Special Topics, 11, 050102 (2008) 9... and electron and ion beams of ultra-low entropy can be extracted. Recently electron beams have been produced of 15 K temperature (effective source temperature), 3 orders of magnitude lower than traditional field- or photo-emission sources. The electron temperature can be tuned by simply decreasing the ionization laser wavelength, which increases the excess electron ionization energy./ Applied Physics

Theory of Quantum Gases:

Atoms trapped in an optical lattice; Superfluidity of ultra-cold (nano-kelvin) Fermi and Bose gases; Quantum Plasmas & Beams.Servaas KokkelmansLaser Wakefield Acceleration:

Tera-watt light bullet laser physics; Extreme high-energy-density plasmas;Seth Brussaard

Coherence & Quantum Technology (CQT)/ Applied PhysicsFemtosecond structural dynamicsThe (bio)molecular movie...The poor mans X-ray Free Electron LaserLuiten et al., PRL 93, 094802 (2004)Claessens et al., PRL 95, 164801 (2005)Van Oudheusden et al., JAP 102, 093501 (2007)

VICI project Luiten:Exploring extreme beam regimes for femtosecond electron imagingPhase space density = Beam Brightness11Tthe combination of high n_e and ultra-low T_e enables unprecedented beam brightness (phase space density is equivalent to beam brightness). In the VICI project of Luiten these new extreme beam regimes of intense ultra-short and ultra-cold electron bunches are explored. In this way the capabilities of the X-ray FEL can be realized in a cheap, table-top setup, with electrons instead of X-rays. The Holy Grail of chemistry: resolving atomic structural dynamics real time the molecular movie becomes available for regular university labs./ Applied PhysicsStaff:Prof.dr.ir. Gerrit KroesenProf.dr. Joost van der MullenDr.ir. Eddie van VeldhuizenDr.ir. Peter BruggemanDr.ir. Sander NijdamDr.ir. Jan van DijkProf.dr. Ute EbertProf.dr. Marco HaverlagElementary Processes in Gas Discharges (EPG) Light and photons: Efficient lamps and EUV sources Environmental technology: using plasmas for air / water cleaning Biomedical technology: sterilisation; new medical treatments

/ Applied PhysicsPlasmas:Heaven and earth

Elementary Processes in Gas Discharges (EPG)/ Applied PhysicsPlasmas in lab and industry (1)

Elementary Processes in Gas Discharges (EPG)/ Applied PhysicsPlasmas in lab and industry (2)

Plasmas in lab and industry (2)Elementary Processes in Gas Discharges (EPG)/ Applied PhysicsStereo-photography of Corona discharges

S. Nijdam et al., Appl. Phys. Lett. 92 101502 (2008)

16Linksboven: optisch systeem voor stereo-fotografie van corona-ontladingen t.b.v. driedimensionale reconstructie van de kanalen en hun splitsgedrag

Rechtsboven: foto van de ontladingskamer

Linksonder: CCD-beeld met de twee verschoven beelden van de ontlading, single shot opgenomen

Rechtsonder: driedimensionale reconstructie van de kanalen. Ik heb hier ook een video van waarin de reconstructie ronddraait./ Applied PhysicsPlasma & Materials Processing (PMP)Staff:Dr.ir. Erwin Kessels Dr. Richard EngelnDr. Adriana CreatoreDr. Ageeth BolProf.dr. Fred RoozeboomProf.dr.ir. Richard van de Sanden

Plasma physics and chemistry of plasma & materials processing; Advanced plasma and surface diagnostics Micro- and nano-engineering of functional materials/ Applied Physics

Physics and chemistry of plasma & materials processing Micro- and nano-engineering of functional materialsAdvanced plasma and surface diagnostics

Plasma chemistryIon/radical densities/fluxesEnergy distribution fcts.Plasma surface interactionPlasma enhanced CVDDry etchingPlasma-assisted ALDThin films & devicesEllipsometryNonlinear surface spectroscopyNovel surface diagnostics(Laser) based gas phase diagnostics

Plasma & Materials Processing (PMP)18/ Applied PhysicsIn situ dangling bond detection during a-Si:H growth

H-abstractionadsorption on DBweakly-adsorbed stateinsertion into Si-Si

1 m mc-SiAgZnOglass substrateHigh rate plasma deposition of amorphous and microcrystalline silicon: Understanding the film growth mechanismAarts et al. Appl. Phys. Lett. 90 161918 (2007)Aarts et al. Phys. Rev. Lett. 95 166104 (2005)19/ Applied PhysicsIn situ dangling bond detection during a-Si:H growth

Evanescent wave cavity ring down absorption spectroscopy on dangling bonds

dangling bond absorptionAarts et al. Appl. Phys. Lett. 90 161918 (2007)Aarts et al. Phys. Rev. Lett. 95 166104 (2005)20/ Applied Physics

Si-radical growth pulseSurface dangling bond density during growth ~5x1011cm-2 surface coverage ~5x10-4 !!In situ dangling bond detection during a-Si:H growth Aarts et al. Appl. Phys. Lett. 90 161918 (2007)Aarts et al. Phys. Rev. Lett. 95 166104 (2005)21Waar komen onze afstudeerders terecht?Lokale industrie (ASML, NXP, OTB-Solar, Fujifilm, FEI)

Instituten (TNO, ECN, etc.)

Promotieplaatsen bij diverse universiteiten (ook buitenland via de verschillende zeer internationaal georienteerde groepen)/ Applied Physics/ Applied PhysicsPlasma medium: common interest to the PPRT thrust area

Same fundamental knowledge reservoir

Plasmas investigated vary in density and temperatures

Intrinsic nonequilibrium medium

Utilize fundamental knowledge in various applications

Very good example of applied science

Plasma Physics and Radiation Technology

Experiments and modeling approach