piranbi 501

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7/28/2019 piranbi 501


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CONTENTS

Section Title Page

1 IN TRODUC TION 1

1.1 Scope of this manual 1

1.2 General 2

2 TECHNICAL DATA 3

2.1 Operating conditions 3

2.2 Performance 3

2.3 Mechanical data 3

2.4 Electrical data 3

2.4.1 Electrical supply data 3

2.4.2 Indicators 4

2.4.3 Rear panel connections 4

3 INSTALLA TION 5

3.1 Unpacking and inspection 5

3.2 Panel mounting and free standing 6

3.3 Operating voltage 6

3.4 Power connections 6

3.5 Gauge head connections 73.6 Recorder output 7

4 OPERA TION 8

4.1 Power on 8

5 MAIN TENANCE 9

5.1 Calibration 9

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Section Title Page

6 STORAGE AND DISPOSAL 12

6.1 Storage 12

6.2 Disposal 12

7 SPARES AND ACCESSORIES 13

7.1 Introduction 13

7.2 Spares 13

7.2 Accessories 13

RE TURN OF EDWARDS EQUIPMENT

ILLUSTRATIONS

Figure Title Page

1 Pirani 501 recorder output graph (mbar) 10

2 Pirani 501 recorder output graph (torr) 11

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1 INTRODUCTION

1.1 Scope of this manual

This manual provides installation, operation and routine maintenance

instructions for the Edwards Pirani 501. Read this manual before attempting to

install and operate the unit.

This manual contains essential safety information which supplements the safety

features of the unit. Safety procedures are highlighted as WARNING and

CAUTION instructions. You must obey these instructions. The use of

WARNINGS and CAUTIONS is defined below.

WARNING

Warnings are given when failure to observe the instruction could result in

injury or death to persons.

CAUTION

Cautions are given where failure to observe the instruction could result indamage to the equipment, associated equipment and process.

The safety markings used on the equipment are:

A.C. Electrical

Supply hazard

Refer to

Manual

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1.2 General

The Pirani 501 is for use with the Edwards Pirani PRE10K gauge head. It has a

wide easy to read analogue meter scale with continuous pressure reading from

10-3to 5 mbar (or torr). Range switching is therefore not necessary.

A recorder output is provided on the rear panel of the Pirani 501 giving an output

of 0 to l00 mV. A graph of voltage/pressure is provided in Section 5 of these

instructions.

The unit may be left free standing on the folding legs supplied or panel mounted

with a mounting kit also supplied.

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2 TECHNICAL DATA

2.1 Operating conditions

Temperature range (operating) 0 to 50 °C

Temperature range (storage) -10 °C to +70 °C

Relative humidity 10 - 90 %

Maximum operating altitude 2000 m

2.2 Performance

Pressure measuring range (mbar or torr) 10-3

to 5Recorder output 0 - 100 mV

Output impedance 100Ω

(negative output connected to electrical

safety ground)

Minimum load resistance 10 kΩ

(continuous output)

2.3 Mechanical data

Fixing hole dimensions mm 92 (+ 0.8) x 92 (+0.8)

(panel mounting)

Dimensions mm (w x h x d) 96 x 96 x 155 (DIN 43700)

Meter scale (analog) 230 ° display wide angle

Mounting Bench or panel

(removable tilting feet and

panel clamp supplied)

Weight 650 g

2.4 Electrical data

2.4.1 Electrical supply data

Operating voltages 115 V or 230 V + 10 % - 20 %

(Selected by fuse position)

Operating frequency 50/60 Hz

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Fuse 230 V 63 mA (F)

Fuse 115 V 100 mA (F)

Power consumption 2 W

Power switching On when power supply applied

2.4.2 Indicators

LED (Light Emitting Diode) indication Green LED for power on

2.4.3 Rear panel connections

Recorder output 1 x 3.5 mm DIN

monojack socket

Gauge connector socket 1 x 5 pin DIN 180 °

Gauge type Edwards Pirani PRE10K

Power lead length 2 m

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3 INSTALLATION

CAUTION

Ensure that the instrument is set for the correct voltage before connecting

to the electrical supply.

3.1 Unpacking and inspection

Remove all packing materials and protective covers and check the instrument

for damage. If the instrument is damaged, notify your supplier and the carrierin writing within three days; state the Item Number of the unit together with

your order number and your supplier's invoice number. Retain all packing

materials for inspection. Do not use the instrument.

Check that your package contains the following items:

If any of these items are missing, notify your supplier in writing within 3 days.

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Qty Description Check

1

1

1

2

1

1

2

2

22

Controller

Mains lead (240 V or 115 V)

Chart recorder jack plug 3.5 mm

Mounting brackets

Mains fuse:

100 mA supplied with D395-01-000

OR 63 mA supplied with D395-11-000

Electrical supply lead

Foot tilting

Buffer 19 mm (self adhesive)

Screw M3 x 8 (self tapping)Screw M3 x 40

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3.2 Panel mounting and free standing

The unit may be mounted into a fixing hole in a panel if required. The dimensions

for a fixing hole are given in Section 2.3. Slide the unit into the fixing hole in the

front of the panel, then clip on the two mounting brackets and screw the two

M3 x 40 retaining screws through the clamps until the unit is held against the

panel.

Alternatively, screw the tilting feet to the front underside of the unit using the

self tapping screws provided for a free standing unit. Two self-adhesive buffers

are also provided to ensure better surface grip.

3.3 Operating voltage

WARNING

High voltages exist within the unit. Switch off electrical supply before

removing covers. Covers should not be removed except by a qualified

service engineer.

3.3.1 Pirani 501

The operating voltage on this instrument is changed by reversing the fuse holder.

A small arrow on the mains inlet connector points to the required voltage setting.

When changing the input voltage, the input fuse must also be changed, 100 mA

for 115 V operation and 63 mA for 230 V operation. Pull out the holder marked

beneath the input plug connection and check the fuse furthest

into the holder. Change if necessary.

3.4 Power connections

Instruments ordered to read mbar (D395-01-000) will be set for 230 V operation

and will require a 3-pin electrical supply connector to be connected. Connect the

three cored lead as follows:

BROWN lead to LIVE (L)

BLUE lead to the NEU TRAL (N)

GREEN/YELLOW lead to EARTH (E)

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Instruments ordered to read torr (D395-11-000) will be set for 115 V operation

and will have been provided with a moulded plug.

The wire colour coding is as follows:

BLACK - LIVE

WHITE - NEU TRAL

GREEN - EARTH

3.5 Gauge head connections

CAUTION

Do not connect or disconnect a gauge head with the power on. Damage to

the gauge head may result if this caution is ignored.

Connect the PRE10K gauge head to the vacuum system as detailed in the

instructions supplied with the head.

Connect the extension cable, if ordered, to the gauge head lead socket and plug

the lead into the instrument rear panel socket (5 pin DIN).

3.6 Recorder output

The recorder output socket is on the rear panel of the instrument, marked REC.

The recorder output provides a pressure/voltage output of 0 to 100 mV according

to Figures 1 and 2.

A 3.5 mm DIN mono jack plug is supplied for the recorder output. Connection is

earth (ground) to the outer cable and the signal path (negative) to the centre pin.

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4 OPERATION

4.1 Power on

Power to the Pirani 501 is on when the electrical supply is connected and

switched on.

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5 MAINTENANCE

The Pirani 501 requires no routine maintenance.

5.1 Calibration

For calibration of gauge heads refer to the working instructions for the PRE10K

(D024-28-880).

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10 Pi rani 501

Figure 1 - Pirani 501 recorder output graph (mbar)

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Figure 2 - Pirani 501 recorder output graph (torr)

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6 STORAGE AND DISPOSAL

6.1 Storage

Store the instrument in a cool dry place. Do not exceed the specified conditions.

6.2 Disposal

Dispose of the instrument in accordance with local and national safety

requirements.

WARNING

Do not incinerate the instrument. Incineration may cause emission of

noxious fumes and metal cased capacitors may explode due to build up of

internal pressure.

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7 SPARES AND ACCESSORIES

7.1 Introduction

Edwards products, spares and accessories are available from Edwards companies

in Belgium, Brazil, Canada, France, Germany, Great Britain, Hong Kong, Italy,

Korea, Japan, Switzerland, U.S.A., and a world wide network of distributors. The

majority of these centres employ Service Engineers who have undergone

comprehensive Edwards training courses.

7.2 Spares

The Pirani 501 has no serviceable parts.

7.3 Accessories

Pirani gauge PRE10K D024-28-000

Gauge head extension lead 5m D368-36-005

Gauge head extension lead l5 m D368-36-015

Gauge head extension lead 30m D368-36-030

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Return of BOC Edwards Equipment - Procedure (Form HS1)

Introduction

Before you return your equipment you must warn your supplier if the substances you used (andproduced) in the equipment can be dangerous. You must do this to comply with health and safety atwork laws.

You must complete the Declaration (HS2) on the next page and send it to your supplier before you

dispatch the equipment. If you do not, your supplier will assume that the equipment is dangerous andhe will refuse to accept it. If the Declaration is not completed correctly, there may be a delay inprocessing your equipment.

Guidelines

Take note of the following guidelines:

• Your equipment is 'uncontaminated' if it has not been used or if it has only been used withsubstances that are not dangerous. Your equipment is 'contaminated' if it has been used with any

dangerous substances.

• If your equipment has been used with radioactive substances, you must decontaminate it before youreturn it to your supplier. You must send independent proof of decontamination (for example acertificate of analysis) to your supplier with the Declaration (HS2). Phone your supplier for advice.

• We recommend that contaminated equipment is transported in vehicles where the driver does notshare the same air space as the equipment.

PROCEDURE

Use the following procedure:

1. Contact your supplier and obtain a Return Authorisation Number for your equipment.

2. Turn to the next page(s), photocopy and then complete the Declaration (HS2).

3. Remove all traces of dangerous gases: pass an inert gas through the equipment and any accessorieswhich will be returned to your supplier. Drain all fluids and lubricants from the equipment and itsaccessories.

4. Disconnect all accessories from the equipment. Safely dispose of the filter elements from any oil mistfilters.

5. Seal up all of the equipment's inlets and outlets (including those where accessories were attached). You may seal the inlets and outlets with blanking flanges or heavy gauge PVC tape.

6. Seal contaminated equipment in a thick polythene bag. If you do not have a polythene bag largeenough to contain the equipment, you can use a thick polythene sheet.

7. If the equipment is large, strap the equipment and its accessories to a wooden pallet. Preferably, thepallet should be no larger than 510mm x 915mm (20" x 35"); contact your supplier if you cannot meetthis requirement.

8. If the equipment is too small to be strapped to a pallet, pack it in a suitable strong box.9. If the equipment is contaminated, label the pallet (or box) in accordance with laws covering the

transport of dangerous substances.

10. Fax or post a copy of the Declaration (HS2) to your supplier. The Declaration must arrive before theequipment.

11. Give a copy of the Declaration to the carrier. You must tell the carrier if the equipment iscontaminated.

12. Seal the original Declaration in a suitable envelope; attach the envelope securely to the outside of theequipment package. WRITE YOUR RETURN AUTHORISATION NUMBER CLEARLY ON THE

OUTSIDE OF THE ENVELOPE OR ON THE OUTSIDE OF THE EQUIPMENT PACKAGE.

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Return of BOC Edwards Equipment - Declaration (Form HS2)

You must:

• Know about all of the substances which have been used and produced in the equipment before you complete this Declaration

• Read the Procedure (HS1) on the previous page before you attempt to complete this Declaration

• Contact your supplier to obtain a Return Authorisation Number and to obtain advice if you have any questions

• Send this form to your supplier before you return your equipment

a. Equipment model _____________________________________________________________

b. Serial Number ________________________________________________________________

c. Has the equipment been used, tested or operated?

Yes o Go to Section 2 no o Go to Section 4

Are any of the substances used or produced in the equipment

a. Radioactive yes o no o

b. Biologically active yes o no o

c. Dangerous to human health and safety? yes o no o

If you have answered 'no' to all of these questions, go to Section 4.

(Continued)

Your supplier will not accept delivery of anyequipment that is contaminated with radioactivesubstances, unless you:

• Decontaminate the equipment

• Provide proof of decontamination

YOU MUST CONTACT YOUR SUPPLIER FORADVICE BEFORE YOU RETURN SUCH EQUIPMENT

SECTION 1 : EQUIPMENT

SECTION 2 : SUBSTANCES IN CONTACT WITH THE EQUIPMENT

P900-71-100 Issue F Page 1of 2 3A05-010

Return Authorisation Number:

FOR SEMICONDUCTOR APPLICATIONS ONLY :

Tool Reference Number ________________________

Process ______________________________________

Failure Date ________________________________

Serial N umber of Replacement Equipment ________________________

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Reason for return and symptoms of malfunction: ______________________________________________________________________________________________

__________________________________________________________________________________________________________________________________________

If you have a warranty claim:

• who did you buy the equipment from ? ___________________________________________________________________________________________________

• give the supplier's invoice number ______________________________________________________________________________________________________

Print your name: ______________________________________ Print your job title: ______________________________________________________

Print your organisation: _________________________________________________________________________________________________________________

Print your address: _________________________________________________________________________________________________________________

_________________________________________________________________________________________________________________

Telephone number: _______________________________________ Date of equipment delivery: ______________________________________________

I have made reasonable enquiry and I have supplied accurate information in this Declaration. I have not withheld any information. I have followed the Return of BOC Edwards Equipment Procedure (HS1).

Signed: _________________________________________________________________ Date: _________________________________________________________

Precautions required (for example, use protective gloves, etc.)

1

2

3

4

5

6

Substance name Chemical symbol Action required after spillage or human contact

SECTION 3 : LIST OF SUBSTANCES IN CONTACT WITH THE EQUIPMENT

SECTION 4 : RETURN INFORMATION

SECTION 5 : DECLARATION

P900-71-100 Issue F Page 2of 2 3A05-010

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BOC Edwards is a trading name used by affiliatecompanies of The BOC Group plc. BOC Edwards andthe stripe symbol are trademarks of The BOC Group plc.

AddressesEUROPE

HEADQUARTERS

BOC EDWARDS

Manor Royal

CRAWLEY

West Sussex RH10 2LW

UNITED KINGDOM

Tel: +(44) 1293 528844

Fax: +(44) 1293 533453

GUILDFORD, ENGLAND

Tel: +(44) 1483 579857

Fax: +(44) 1483 505211

CUMBERNAULD, SCOTLAND

Tel: +(44) 1236 730575

BELGIUM

BRUSSELS

Tel: +(32) 2 363 0030

FRANCE

PARIS

Tel: +(33) 1 47 98 24 01

GERMANY

MUNICH

Tel: +(49) 89 9919180

MARBURG

Tel: +(49) 6420 82 41 0

ITALY

MILAN

Tel: +(39) 2 48 4471

SWITZERLAND

OBERWIL-BASEL

Tel: +(41) 61 401 4344

Fax: +(41) 61 401 4352

ISRAEL

TEL AVIV

Tel: +(972) 3 649 1262

Fax: +(972) 3 6475112

J ERUSALEM Tel: +(972) 2 321122

ASIA

HEADQUARTERS

BOC EDWARDS (ASIA)

Suite 1308 Tower 2

World Trade Square

123 Hoi Bun Road

Kwun Tong, Kowloon

HONG KONG

Tel: +(852) 2 796 9111

Fax: +(852) 2 796 9095

CHINA

BOC GASES (SHANGHAI)

Tel: +(86) 21 5899 0272 TIANJ IN BOC INDUSTRIAL GASES

Tel: +(86) 22 2834 1981

TAIWAN, R.O.C.

HSIN CHU CITY

Tel: +(886) 35 280 354

SOUTH EAST ASIA

BOC EDWARDS

26 Changi South Street I

Changi South Industrial Estate

SINGAPORE 486773

Tel: +(65) 546 8408

Fax: +(65) 546 8407

KOREA

HEADQUARTERS

SONGWON EDWARDS LTD

625-7 Upsong-dong

CHUNAN CITY

Chungchong Nam-do

KOREA

Tel: +(82) (0) 417 554 7070

Fax: +(82) (0) 417 554 7300

SEOUL

Tel: +(82) (0) 2 501 7070

AMERICAS

HEADQUARTERS

BOC EDWARDS

301 Ballardvale Street

WILMINGTON, MA 01887

USA

Tel: +(1) 978 658 5410

Toll free (USA only): 800 848 9800

Fax: +(1) 978 658 7969

MILPITAS, CA

Tel: +(1) 408 428 1037

TEMPE, AZ

Tel: +(1) 602 777 7007

AUSTIN, TX

Tel: +(1) 512 491 6622

CANADA

MISSISSAUGA, ONTARIO

Tel: +(1) 905 336 9119

Toll free (Canada only): 800 387 4076

Fax: +(1) 905 845 4924

BRAZIL

SAO PAULO

Tel: +(55) 11 8580377

Fax: +(55) 11 2652766

J APAN

HEADQUARTERS

Shuwa Shiba Park Building A-3F

2-4-1 Shibakoen, Minato-ku

TOKYO 105-0011

(Vacuum/Abatement)

NIPPON EDWARDS KK

Tel: +(81) 3 5470 6530

Fax: +(81) 3 5470 6521

(Electronic Gases)

OSAKA SANSO KOGYO KK

Tel: +(81) 3 3434 6789

Fax: +(81) 3 5472 8728

OSAKA

Tel: +(81) 6 384 7052

KYUSHU Tel: +(81) 96 326 7300

SENDAI

Tel: +(81) 22 373 8525

CORPORATE HEADQUARTERS

BOC EDWARDS

Manor Royal

CRAWLEY

West Sussex, RH10 2LW

UNITED KINGDOM

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