Piezoelectricity and ferroelectricity
Transcript of Piezoelectricity and ferroelectricity
Piezoelectricityand ferroelectricityApplications of piezoelectric materials
Prof.Mgr.Jiří Erhart, Ph.D.
Department of Physics FP TUL
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Piezoelectriceffect
Direct effect Converse effect
Sensorsstatic
Charge generators
ForceAcceleration
Pressure
Resonators
Ultrasound
US probesSonochemistry
RF devicesResonantsensors
Quartz watchQuartz
resonators
Gas, chemicaldetector
Actuators
Nonresonant
Bendingstructures
Resonant
US motors
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Piezoelectric gas ignitors
Discharge between electrodes, charge is generated by piezoelectricity – hammer impact on PZT ceramic element
Piezo ceramics (inside)
HammerElectrodes
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Quartz application
Force, pressure and acceleration sensors (e.g. Kistler, Switzerland)
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Accelerometer
Deformation of piezoelectric element by the inertial force from the seismic mass
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Quartz
SiO2 – natural or artificial crystal, quartz clock, e.g. wrist watch
W.P.Mason: US patent No. 2,081,405 (1937) – first patent on quartz clock resonator (fork resonator)
Quartz crystalWarren Perry Mason (1900-1986)
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Quartz resonators
W.G.Cady – first frequency standard - US National Bureau of Standards, 1921
1926 – radio transmitter frequency stabilization
Walter Guyton Cady (1874 –1974)
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Ultrasound motor
Ultrasound piezoelectric motors – transversal travelling wave
Shinsei motor
www.krazytech.com
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Ultrasound motor
Ultrasound piezoelectric motor – elliptic motion of stator surface– friction with rotor
Example: diameter 30mm
www.pcbmotor.com
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Ultrasound motor
Langevin transducer
PZT ceramics
stator
rotor
Paul Langevin (1872 -1946)
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Ultrasound motor - PILine®
Elliptic motion of the tip joined with PZT ceramics element
www.pi.ws
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Ultrasound atomization of liquids
Medicines application to mucous membrane in small dropletsAir humidificationAerosol deposition onto textile materials etc.
Droplet size is easilycontrollable by frequencyIt is in the range ofµmfor frequency 1-2 MHz
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Ultrasound atomization of liquids
Liquid surface moves due to ultrasound wave
Average droplet size
Narrow distribution of droplet sizeProduction of atomized liquid amount is controllableDroplet size is controllable
FS
amFTFP
32
365.0rf
rρ
σ=
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Liquid atomizers
• Ultrasound humidifiers
• Drug inhalers
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Electronic cigarette
Atomiser inside cigaretteUS patent 20070267031 (2007)
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Ultrasound generationand application
• Medical – diagnostics, healing
• Technology - welding, cleaning, NDT, sonochemistry, …
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Piezoelectric transformer - Rosentype
US patent No.2,830,274 (1958), C.A.Rosen et al.
Piezoelectric transformer - Rosen type
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Rosen type transformer
• Longitudinal plate vibration
• Common mechanical deformation
INOUT
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Piezoelectric transformers – commercial products
Integrated with electronics – CCFL electronics
• Rosen-type (Fuji & Co., Japan)
• “Transoner” (Face Electronics, USA)
• Multilayer (Noliac A/S, Denmark)
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Rosen type PT
Radial poling - nonhomogeneous
IN OUT
ceramics electrode polarization
OUT
IN
ceramics electrode polarization
rrr
UrE
1)ln(
)(12
=
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Rosen type PT
Rectangular Rosen PT No. 2APC841 14mm/7mm/th.1mm
0
2
4
6
8
10
12
14
16
18
100 1000 10000 100000 1000000
Load [Ω]
Gai
n [-
]
0
10
20
30
40
50
60
70
80
Eff
icie
ncy
[%]
Gain Efficiency
Disc Rosen PT No. 1APC841 diam. 20mm/th.0.8mm
0
1
2
3
4
5
6
7
8
1000 10000 100000
Load [Ω]
Gai
n [-
]
0
2
4
6
8
10
12
14
16
Eff
icie
ncy
[%]
Gain Efficiency
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Rosen type PT
Rectangular Rosen PT APC 841, l = 14mm, w = 7mm, b = 1mm,
V = 98mm3 No-load parameters ZL→∞, η→0
(((( )))) 2212 ====∞∞∞∞UU fr = 113.85 kHz
Optimum load parameter ZL = 10kΩ (((( )))) 312 ====OPTUU fr = 113.05 kHz
%77====OPTηηηη fr = 113.05 kHz
Peak power PIN = 56.5mW fr = 113.10 kHz POUT = 43.6mW fr = 113.08 kHz
Peak power density PIN/V = 0.58Wcm-3
POUT/V = 0.44Wcm-3 Input and Output impedance
ZIN = 167Ω fr = 112.9 kHz ZIN = 92.2kΩ fa = 115.4 kHz ZOUT = 1.68kΩ fr = 113.0 kHz ZOUT = 14.5MΩ fa = 123.4 kHz
Disc Rosen PT APC 841, r = 10mm, b = 0.8mm,
V = 251mm3 No-load parameters ZL→∞, η→0
(((( )))) 1912 ====∞∞∞∞UU fr = 120.25 kHz
Optimum load parameter ZL = 11kΩ (((( )))) 512 ====OPTUU fr = 119.60 kHz
%15====OPTηηηη fr = 119.60 kHz
Peak power PIN = 251.9mW fr = 119.63 kHz POUT = 37.6mW fr = 119.60 kHz
Peak power density PIN/V = 1.00Wcm-3
POUT/V = 0.15Wcm-3 Input and Output impedance
ZIN = 20.5Ω fr = 120.25 kHz ZIN = 342kΩ fa = 128.94 kHz ZOUT = 7.2kΩ fr = 120.21 kHz ZOUT = 54.0kΩ fa = 120.48 kHz
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Power density for PT - comparison
Power density increased substantionally from the first PT’s application
K.Uchino: Piezoelectric motors and transformer, in Piezoelectricity, Springer Verlag 2008
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Piezoelectric actuation
Direct piezoelectric effect – sensors
Converse piezoelectric effect – actuators, ultrasound generation
Sheard - mode
S5
15
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Piezoelectric coefficients
Mechanical deformation is proportional to voltage
piezoelectriccoefficients d31, d33
Typical values d31≈100-300pC/N (10-12C/N=10-12m/V), d33≈ 200-600pC/N for PZT ceramics
x3
x1
x2
S3
S1
S2
T3
T2
T1
E3
tUE
EdS
EdS
EdS
/3
3333
3312
3311
====
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Bending deformation, operation in static, quasistatic or dynamicmode for the actuator
Antiparallel (series) Parallel (electrical driving of one or both elements)
Piezoelectric ceramic bimorph
PZT
Metal
+
+
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Bimorph parameters
• (Free) stroke
• Blocking force
• Resonance frequency
• Resonance deflection
voltage
stroke
force
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Stroke, deflection
(Free) stroke (parallel bimorph)
Without metallic plate
( )( ) V
tshtthhs
Lthds
mE
mmm
mm
311
22311
23111
3642
6
++++
−=δ
Vh
Ld2
231
4
3=δ
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Blocking force
Blocking force (parallel bimorph)
Without metallic plate
( )V
L
wth
s
dF m
Ebl
+−=
11
31
2
3
VL
hw
s
dF
Ebl11
31
2
3−=
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Bimorph’s resonance
• Resonance frequency (with metallic plate)
• Deflection at the resonance (without metallic plate)
( ) ( )( )
8751.7,6941.4,8751.1
,2
,
)1(14
42131
3
1
4
2
321
11
11
2
32
112
2
=λ=λ=λρρ
===
+++++
ρπ+λ
=
P
mmm
E
EP
miri
Ch
tB
s
sA
BCB
ABB
sL
thf
( )32
2231
12
1,,
2
)cosh()cos(14
)sinh()sin(3
whIA
EIa
a
f
LLh
LLVd
=ρ
=π=Ω
ΩΩ+ΩΩΩ
=δ
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Piezoelectric ceramic unimorph
Metallicmembrane
PZT ceramics
Agelectrode
Similar to bimorphin circular arrangement
Complicated mathematicalsolution
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Unimorph’s parameters
(static) deflection- homogeneous unimorph
- heterogeneous unimorph )(2
28
3)( 22
21
231 ar
h
h
h
Vdr −
−=δ
)(4
3)( 22
231 ar
h
Vdr −=δ
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Piezoelectric ceramic actuators
Bending elements (bimorph, unimorph, moonie, cymbal, THUNDER, Helimorph, RAINBOW)
Deflections up to 1-3mm, forces up to 0.1N!
Unimorph (membrane)
Bimorph
Electrode
PZT
Metallic plate
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THUNDER®
TH in layer UNimorphDrivER and sensorSpecial high temperature – mechanical pre-stress
Deflections up to 8mm, force up to 100N!
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HELIMORPH ®
Double spiral bimorph structure
High deflection up to 5mm, force up to 1N!
Drawback - brittleness
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RAINBOW ®
Reduced And IN ternallyBiased Oxide Wafer
Monolithic ceramic structure
Internal gradient of chemical composition within plate thickness – piezoelectric coefficient gradient and very high permissible deformation up to 500%!
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Moonie and cymbal
Moonie Cymbal
Composite structures – metallic cups and PZT plate are glued together; radial motion of ceramics is transformed to the axial motion of cups center
Deflection up to 50µm, small force; very high deflection sensitivity as a sensor of hydrostatic pressure
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Operating parameters of bending actuators
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Vibration of body inside the viscous liquid
Vibration of infinite plate– damped vibrations, penetration depthδ
Mechanical tension caused by viscous forces– phase shift
z
tjeuu ω−= 0
( )tzjz eeuv ωδδ −−= 0
ρωηδ 2=
)4
cos(0
πωωρητ +−= tu
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Vibration of sphere in viscous liquid
Viscous drag force at harmonic vibration motion
Piezoelectric bimorph is used for the vibration generation and force sensing at the same time
ρωηδω 2
,0 ≡= − tjeuu
dt
duRRu
RRF
++
+=δω
ηρπδ
πη92
12
316 2
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Bimorph
PZT plate
Metallic plate
Bimorphsubmergedinto water
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Bimorph vibration submerged into liquid
Bimorph is approximated by the sphere inside liquid
Forced vibrations in liquid
Me, K, bin – effective mass, bimorph’s stiffness, internal damping
( ) ( )
+=
+=
=++++ −
R
Rb
RRM
eFKydt
dybb
dt
ydMM
i
tjinie
δδ
πηδρπ
ω
16
,29
132 2
3
02
2
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Bimorph’s resonance
Mechanical resonance of bimorph is registered electrically by the bimorph, impedance spektrum
- Free in air – resonance frequency
- Damping inside liquid – resonance frequency
Width of resonance peak
e
ii M
Knf
π2=
ie
in
ie MM
bb
MM
K
++=
+=−= γωγωω ,,
21 2
022
02max
γ3
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Princip le of the measurement by bimorph
• Calibration for the known liquid – radius estimate for the equivalent sphere
• Impedance spektrum of bimorph vibrating inside liquid→ γ, ωmax
• Viscosity and density calculation
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Typical result
Second resonance of bimorphs inside liquid
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Resonance parameters
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Multilayer actuators
Many thin PZT layers in single segmentMultilayer segment are stacked together
with mechanical amplification by lever arms (Cedrat Technologies, France)
High blocking forces (kN), very small deflections (≈1-10µm) without mechanical amplification
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Piezoelectric fuel injection module
Cedrat Technologies, Francie
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Actuator parameters comparison
Low deflection – high blocking force
Craig D. Near, Piezoelectric Actuator Technology, Presented at SPIE Smart Structures and Materials
Conference, February 27, 1996
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Deflection amplification for piezoelectric actuators
Deflection is not high enough for the most direct applications
Deflection amplification – lever mechanismor hydraulics
Piston
PiezostackHydraulicchamber
Piezostack
Lever
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Piezoelectric valves
Ball valve Poppett valve
piezo-stack 2x THUNDER
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Micropump
Dosage of small volumes of liquids – by piezoelectric bending elements
Bimorph as an active valve element
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Operating mode forpiezoelectric element
(a) transversal or (b) longitudinal mode of piezoelectric element - membrane
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Throttle valve
Throttle valve operated by ultrasonic piezoelectric motor - US patent No. 4,915,074
US motor
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Pyroelectricity applications
• IR sensors for remote control
• Proximity sensor – door opening, guarding of space, parking sensor etc.
• Night vision – VIDICON camera
• Temperature distribution – IR camera
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Recommended reading
J.Zelenka: Piezoelectric resonators, Elsevier, 1986A.H.Meitzler, H.M.O’Brian, H.F.Tiersten: Definition and measurement of radial mode coupling factors in
piezoelectric ceramic materials with large variations in Poisson’s ratio, IEEE Trans. Sonics Ultrason. SU-20, 3 (1973) 233-239
N.T.Adelman, Y.Stavsky, E.Segal: Radial vibrations of axially polarized piezoelectric ceramic cylinders, J.Acoust.Soc.Am. 57, 2 (1975) 356-360
A.Ballato, J.Ballato: Accurate electrical measurements of modern ferroelectrics, Ferroelectrics 182(1996) 29-59
IRE Standards on Piezoelectric Crystals: Determination of the Elastic, Piezoelectric, and Dielectric Constants—The Electromechanical Coupling Factor, Proceedings IRE (1958) 764–778
P.Hána, L.Burianová, D.Barošová, J.Zelenka, Ferroelectrics 224(1999) 39–46N.T.Adelman, Y.Stavsky: Flexural-extensional behavior of composite piezoelectric circular plates,
J.Acoust.Soc.Am. 67, 3 (1980) 819-822J.G.Smits, A.Ballato: Dynamic admittance matrix of piezoelectric cantilever bimorphs,
J.Microelectromechanical Systems 3, 3 (1994) 105-112J.G.Smits, S.I.Dalke, T.K.Cooney: The constituent equations of piezoelectric bimorphs, Sensors and
Actuators A 28 (1991) 41-61Q.M.Wang, L.E.Cross: Performance characteristics of piezoelectric cantilever bending actuators,
Ferroelectrics 215(1998) 187-213
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Thank you for your attention!