Physical and Chemical Industry P-e12-16a
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Transcript of Physical and Chemical Industry P-e12-16a
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General Purpose Equipment/ Measuring Equipment
Cultivation/Separation/ Analysis
Storage/Transfer
Experimental Equipment
Cleaning/Sterilization
Process Gas Equipment
High Vacuum Equipment
Clean Series/ Static Electricity Elimination
Equipment
P.1
P.5
P.6
P.6
P.7
P.7
P.8
P.8
Test-tube ............................Electric Actuator
Thermostatic/Drying ..........Thermoelectric BathHeating/Cooling .................ChillerEquipment for DI Water .....Filter/Regulator/Flow Switch/Piping etc.Fluid Feed, Pressure Feed, Pressurization,Pressure Reduction ...........Pump/Flow Switch/PipingStirring ...............................Air CombinationBalance .......................Ionizer
TubingFittings
2 Port ValveFilter
RegulatorDiaphragm Valve
Ionizer
High Vacuum Equipment
Cooling Unit for Evaporator.......ChillerDispense PumpLiquid Dispense Pump
P-E12-16A
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Equipment for DI water line, such as DI water manufacture equipment or analysis equipment, and peripheral devices.Stainless steel or fluoropolymer products
Needle Valve (Restrictor)Fluoropolymer Needle Valve/ LVN
RegulatorsClean Regulator/Fluororesin Type/ SRFClean Regulator/ SRHRegulator for Water/ WR
Flow SwitchesDigital Flow Switch for Deionized Water and Chemical Liquids/ PF2DDigital Flow Switch for PVC Piping/ PF3W
HEPO 2 element
Membrane element
RestrictorFilter Regulator Flow Switch 2 Port Valve
Equipment for DI Water
High Precision Filters for LiquidsHigh Precision Filter for Liquids/ FGH
Quick Change Filter for Cleaning Fluid/ FQ1
P. 28 P. 18
P. 28
FittingsStainless Steel 316 One-touch Fittings/ KQG2Stainless Steel 316 Insert Fittings/ KFG2S Couplers Stainless Steel Type/ KKAClean One-touch Fittings for Blowing/ KPFluoropolymer Fittings/ LQ
TubingFluoropolymer Tubing/ TLFluoropolymer Tubing (PFA)/ TLMFEP Tubing (Fluoropolymer)/ THSoft Fluoropolymer Tubing (Modified PTFE)/ TD
P. 16P. 17
P. 17P. 17
P. 17
P. 19P. 20
P. 19P. 19
2 Port ValvesAir Operated Chemical Liquid Valve/Integral Fitting Type/ LVC
Air Operated Chemical Liquid Valve/Threaded Type/ LVAManually Operated Chemical Liquid Valve/Integral Fitting/Threaded Type/ LVHAir Operated Chemical Liquid Valve/Compact Type/ LVDChemical Liquid Valve/Non-Metallic Exterior/ LVQVinyl Chloride Air Operated Valve/ LVPPVC Quick Drain Valve/ LVW
P. 25P. 25P. 25
P. 25P. 25
P. 25P. 25
P. 14P. 14
P. 14
P. 22
P. 22
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Discharge of chemicals
Flow switch
N2
Series LQHBBore Through Connector
Series LQMale Connector
A changing of the tube position is available in accordancewith the depth of the container.
Transferring liquidby pressure Atomizing liquid
Stirring liquid
Transferring and Collecting liquidProcess Pumps (Diaphragm Pumps)Automatically Operated Type (Internal Switching Type) Air OperatedType (External Switching Type)/ PA(F) 3000/5000Built-in Solenoid Valve Air Operated Type (External Switching Type)/PB1000A/PB1313A
Flow SwitchesDigital Flow Switch for Air/ PF2A3-Color Display Digital Flow Switch for Water/ PF3WDigital Flow Switch for Deionized Water and Chemical Liquids/ PF2D
General Purpose Equipment/Measuring Equipment
P. 26
P. 26
P. 22P. 22
P. 22
Fittings & TubingFluoropolymer Fittings/ LQFluoropolymer Bore Through Connector/ LQHB
Fluoropolymer TubingFluoropolymer Tubing/ TLFluoropolymer Tubing (PFA)/ TLMFEP Tubing (Fluoropolymer)/ THSoft Fluoropolymer Tubing (Modified PTFE)/ TD
P. 17
P. 17
P. 19P. 20
P. 19
P. 19
Digital Pressure Switches2-Color Display Digital Pressure Switch/ ZSE80(F)/ISE80(H)Pressure Sensor for General Fluids/ PSE560Low Differential Pressure Sensor/ PSE550
P. 20P. 21
P. 21
Dispense PumpDispense Pump/ LDP P. 26
P. 26
Liquid Dispense PumpLiquid Dispense Pump/ LSP
Chemical Liquid ValveDirect Operated 2/3 Port Solenoid Valvefor Chemical Liquids/ LVM P. 24
Installation Examples
Reagents Transfer
Pressure Feed of Chemicals
P
LVM3 port
Head
Syringe pumpBellows
Fluid Feed, Pressure Feed, Pressurization, Pressure Reduction
Analyzer
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Static Electricity Elimination EquipmentAntistatic equipment for samples or containers of electronicbalance
Balance
IonizersIonizer/ IZS40/41/42Ionizer/Nozzle Type/ IZN10
Ionizer/Fan Type/ IZF10Electrostatic Sensor/ IZD10Electrostatic Sensor Monitor/ IZE11Handheld Electrostatic Meter/ IZH10
P. 23P. 23
P. 23P. 23
P. 23
P. 23
Clean Air ModuleClean Air Module/ LLBAir Blow Module/ LLB1Component Parts: Flow switch, Regulator, ON/OFF valve,
Restrictor, Filter
P. 11P. 11
Stirring
P. 12P. 12
P. 12
P. 13
P. 12
¡ Fittings & TubingOne-touch Fittings/ KQ2
¡ Finger Valve (2 Port)/ VHK
Air Filters/RegulatorsModular Type F.R.L. Unit/ AC
Air Filter/ AF
Regulator/ AR
Filter regulator/ AW
Mist Separator/ AFM
Filter, regulator, and oil mist separator for air motor type stirring machine. Removes the dust and oil mist.
P. 24P. 15
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Cultivation/Separation/Analysis
Temperature control of concentration fluid
Highly integrated resin manifold (Made to Order)
Circulating Fluid Temperature ControllerApplicable to rotary evaporators, various concentrators, and distillators.
Thermo-chillerThermo-chiller Compact Type/ HRS
Cooling Capacity: 1 kW to 5 kWTemperature Stability: ± 0.1 ° C
P. 28 P. 29Thermoelectric BathPeltier-type Thermoelectric Bath/ INR-244-757
Peltier-type Thermoelectric Bath/ INR-244-757
Conductivity meter
Cooling Unit for Evaporator
Dispense PumpDispense Pump/ LDP P. 26 P. 26
Liquid Dispense PumpLiquid Dispense Pump/ LSP
Chemical Liquid ValveDirect Operated 2/3 Port Solenoid Valvefor Chemical Liquids/ LVM P. 24
Cooling Capacity: 200 WTemperature Stability: ± 0.04 ° C
LVM100
LVM150
LVM200
LVM095
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Storage/Transfer
Electric ActuatorsElectric Actuator/Slider Type/ LEFElectric Slide Table/ LESElectric Gripper/ LEHCard Motor/ LAT
P. 31P. 33
P. 33P. 34
Application example ofspecimen transfer system
Test-tube
Tubing
Polyurethane Tubing/ TUPolyurethane Coil Tubing/ TCUPolyolefin Tubing / TPH
Fluoropolymer Tubing
FEP Tubing (Fluoropolymer)/ THSoft Fluoropolymer Tubing (Modified PTFE)/ TD
Fluoropolymer Tubing/ TLFluoropolymer Tubing (PFA)/ TLMAntistatic Tubing/ TA Tube Cutter/ TK
P. 18 P. 19 P. 19P. 19
P. 20P. 19
P. 20
P. 19P. 20
P. 15P. 17P. 15
P. 16P. 16
P. 17P. 17 P. 16
P. 17P. 17
Experimental Equipment
Fittings
Fluoropolymer Fittings Hyper Fittings/ LQS Couplers/ KK/KKHS Couplers Stainless Steel Type/ KKAS Couplers/ KK130Clean One-touch Fittings for Blowing/ KP
Tubing
FittingsOne-touch FittingsOne-touch Fittings/ KQ2Brass One-touch Fittings/ KQB2Stainless Steel 316 One-touch Fittings/ KQG2Stainless Steel 316 Insert Fittings/ KFG2Miniature Fittings/ MS
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RegulatorDiaphragm ValveCheck Valve
Vacuum GeneratorFlow Switch
Process Gas EquipmentP. 27
P. 27
P. 27
P. 27
P. 27
2 Port ValvesDirect Operated 2 Port Solenoid Valve/ VX21/22/23Pilot Operated 2 Port Solenoid Valve/ VXDZero Differential Pressure Type/Pilot Operated 2 Port Solenoid Valve/ VXZCompact Direct Operated 2/3 Port Solenoid Valve for Water and Air/ VDWZero Differential Pressure Type/Pilot Operated 2 Port Solenoid Valve/ VXSDirect Operated 2/3 Port Solenoid Valve for Chemical Liquids/ LVM
P. 24P. 24
P. 24P. 24P. 24
P. 24
Pinch ValvePinch Valve/ AXTP
Cleaning/Sterilization
Air Filters for Clean BlowClean Gas Filter / SFClean Air Filter/ SFD
P. 11P. 11
FiltersClean Gas Filter
2 Port Valves
P. 24
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High Vacuum Equipment
Clean Series/Static Electricity Elimination EquipmentIonizersIonizer/ IZS40/41/42Ionizer/Nozzle Type/ IZN10Ionizer/Fan Type/ IZF10
High Vacuum ValvesAluminum High Vacuum Angle Valve/ XL Stainless Steel High Vacuum Angle Valve/ XMStainless Steel High Vacuum In-line Valve/ XYSmooth Vent Valve/ XVDSlit Valve/ XGT
P. 30P. 30P. 30
P. 31P. 31
P. 23P. 23
P. 23
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Air Preparation Equipment (Dryers, Filters)Refrigerated Air Dryer IDF ······························································ P.11
Heatless Air Dryer ID ········································································ P.11
Membrane Air Dryer IDG ································································· P.11
Clean Gas Filter SF ··········································································· P.11
Clean Air Filter SFD ··········································································· P.11
Clean Air Module LLB ······································································ P.11
Air Blow Module LLB1 ······································································ P.11
F.R.L. UnitsModular Type F.R.L. Unit AC ·························································· P.12
Air Filter AF ··························································································· P.12
Mist Separator AFM ··········································································· P.12Micro Mist Separator AFD ······························································ P.12
Regulator AR ························································································ P.12
Regulator with Backflow Function AR ······································· P.12
Lubricator AL ························································································ P.12
Filter Regulator AW ··········································································· P.13
Filter Regulator with Backflow Function AW ·························· P.13
Mist Separator Regulator AWM ··················································· P.13
Micro Mist Separator Regulator AWD ······································· P.13
Modular Type F.R.L Unit ACG ······················································· P.13
Pressure Control Equipment (Regulators)Regulator with Built-in Pressure Gauge ARG ······················· P.14
Regulator with Built-in Pressure Gauge with BackflowFunction ARG K ··········································································· P.14
Filter Regulator with Built-in Pressure Gauge AWG ··········· P.14
Filter Regulator with Built-in Pressure Gaugewith Backflow Function AWG K ············································ P.14
Clean Regulator SRH ······································································· P.14
Precision Clean Regulator SRP ··················································· P.14
Clean Regulator/Fluororesin Type SRF ···································· P.14
Regulator for Water WR110 ··························································· P.14
Fittings and TubingOne-touch Fittings KQ2 ··································································· P.15
Metal One-touch Fittings KQB2 ··················································· P.15
Rotary One-touch Fittings KS/KX ··············································· P.15
One-touch Fittings Manifold KM ·················································· P.15
Insert Fittings KF ················································································ P.15
Miniature Fittings M ··········································································· P.15
Self-align Fittings H/DL/L/LL ························································· P.15
Self-seal Fittings KC ·········································································· P.15
S Couplers KK/KKH ·········································································· P.16S Couplers KK130 ············································································· P.16
Multi-connector DM············································································ P.16
Multi-connector with One-touch Fittings DMK ······················· P.16
Rectangular Multi-connector KDM·············································· P.16
Piping Module KB ··············································································· P.16
Antistatic One-touch Fittings KA ················································· P.16Stainless Steel 316 One-touch Fittings KQG2 ······················ P.16
Stainless One-touch Fittings KG ················································· P.17
Stainless Steel 316 Insert Fittings KFG2 ································ P.17
Miniature Fittings Stainless Steel 316 MS ······························ P.17
S Couplers Stainless Steel Type KKA ······································ P.17
Clean One-touch Fittings for Blowing KP ································ P.17
Fluoropolymer Fittings Hyper Fitting LQ1 ······························· P.17
Fluoropolymer Fittings Hyper Fitting LQ3 ······························· P.17
Fluoropolymer Bore Through Connector LQHB ··················· P.17
Fluoropolymer Needle Valve LVN················································ P.18
Low Torque Rotary Joint MQR ······················································ P.18
Nylon Tubing T ····················································································· P.18
Soft Nylon Tubing TS ········································································· P.18
Polyurethane Tubing TU ··································································· P.18
Soft Polyurethane Tubing TUS ······················································ P.18
Hard Polyurethane Tubing TUH ···················································· P.18
Wear Resistant Tubing TUZ ··························································· P.18
Polyurethane Coil Tubing TCU ······················································ P.19
Polyurethane Flat Tubing TFU ······················································ P.19
2-Layer Soft Fluoropolymer Tubing TQ ····································· P.19
Antistatic Soft Nylon Tubing TAS ················································· P.19Antistatic Polyurethane Tubing TAU ··········································· P.19
Fluoropolymer Tubing TL ································································ P.19
FEP Tubing (Fluoropolymer) TH ·················································· P.19
Soft Fluoropolymer Tubing TD ······················································ P.19
Fluoropolymer Tubing (PFA) TLM ··············································· P.20
Polyolefin Tubing TPH ······································································· P.20
Tube Cutter TK ····················································································· P.20
Pressure Switches2-Color Display High-Precision Digital Pressure Switch
ZSE30A(F)/ISE30A ······································································· P.202-Color Display High-Precision Digital Pressure Switch
ZSE40A(F)/ISE40A ······································································· P.20
Digital Pressure Switch ZSE10(F)/ISE10 ································ P.20
2-Color Display Digital Pressure SwitchZSE80(F)/ISE80(H) ······································································· P.20
Air Checker: Electronic Pressure SwitchPS1000/1100/1200 ········································································ P.21
Compact Pneumatic Pressure Sensor PSE53 ·················· P.21
Compact Pneumatic Pressure Sensor PSE54 ·················· P.21
Low Differential Pressure Sensor PSE55 ···························· P.21
Pressure Sensor for General Fluids PSE56 ······················· P.21Multi-Channel Digital Pressure Sensor Controller PSE200 ······· P.21
2-Color Display Digital Pressure Sensor Controller PSE300 ···· P.21
Pressure Switch / Read Switch Type IS10 ······························ P.21
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Flow Switches2-Color Display Digital Flow Switch PFM ································ P.22
Digital Flow Switch for Air PF2A ·················································· P.22
3-Color Display Digital Flow Switch for Water PF3W ········· P.22
3-Color Display Digital Flow Switch for PVC Piping PF3W ··· P.22Digital Flow Switch for Deionized Water and
Chemical Liquids PF2D ······························································· P.22
Static Electricity Elimination EquipmentIonizer IZS40/41/42 ············································································ P.23
Ionizer/Nozzle Type IZN10 ······························································ P.23
Ionizer/Fan Type IZF10 ····································································· P.23
Electrostatic Sensor IZD10 ····························································· P.23Electrostatic Sensor Monitor IZE11 ············································ P.23
Handheld Electrostatic Meter IZH10 ·········································· P.23
2/3 Port Valves for Fluid ControlFinger Valve VHK················································································ P.24
Direct Operated 2 Port Solenoid Valve VX2 ··························· P.24
Pilot Operated 2 Port Solenoid Valve VXD ····························· P.24
Zero Differential Pressure Type/Pilot Operated2 Port Solenoid Valve VXZ························································· P.24
Zero Differential Pressure Type/Pilot Operated
2 Port Solenoid Valve VXS ························································· P.24Compact Direct Operated 2 Port Solenoid Valve VDW ····· P.24
Compact Direct Operated 2/3 Port Solenoid Valvefor Chemical Liquids LVM··························································· P.24
Pinch Valve AXTP20 ········································ P.24
Air Operated Chemical Liquid Valve/Integral Fitting Type
LVC ······································································································ P.25
Air Operated Chemical Liquid Valve/Threaded Type LVA··· P.25Manually Operated Chemical Liquid Valve/Integral Fitting/
Threaded Type LVH······································································· P.25Air Operated Chemical Liquid Valve/Compact Type LVD······· P.25
Chemical Liquid Valve/Non-Metallic Exterior LVQ ··············· P.25Vinyl Chloride Air Operated Valve LVP ····································· P.25
PVC Quick Drain Valve LVW ························································· P.25
PumpsProcess Pump/Double Acting Pump PA ·································· P.26
Process Pump/Diaphragm Pump PB ········································ P.26
Non-Metallic Pump/Double Acting Pump PAF ······················ P.26
Fixed Amount Liquid Dispense Pump (Solenoid Type)LSP ······································································································· P.26
Dispense Pump LDP ······································· P.26
Process Gas EquipmentRegulator/Back Pressure Regulator for Ultra High Purity
AP/SL/AZ/BP ··················································································· P.27
Regulator/Back Pressure Regulatorfor General Applications AK/BP ·············································· P.27
Diaphragm Valve for Ultra High Purity AP ······························· P.27Diaphragm Valve for Ultra High Purity AZ ······························· P.27
Check Valve/Vacuum Generator/Flow Switch AP ························· P.27
Filters for LiquidsHigh Precision Filter for Liquids FGH ········································ P.28
For cleaning Fluid/Quick Change Filter FQ1 ·························· P.28
Chillers (Circulating Fluid Temperature Controller)Refrigerated Thermo-cooler HRG ··············································· P.28
Thermo-chiller HRS ··········································································· P.28
Thermo-chiller HRS-X017 ······························································· P.28
Refrigerated Thermo-chiller HRZ ················································ P.29
Refrigerated Dual Thermo-chiller HRZD ·································· P.29
Water-cooled Thermo-chiller HRW ············································· P.29
Peltier-type Thermo-con HEC ······················································· P.29
Peltier-type Chemical Thermo-con HED ·································· P.29
Thermoelectric BathPeltier-type Thermoelectric Bath INR-244-757 ····················· P.29
Peltier-type Thermoelectric Bath HEB ······································ P.29
Temperature Control EquipmentPeltier-type Air-thermo HEA ·························································· P.30
Thermo-dryer with Air Temperature Adjustment FunctionIDH ··································································································· P.30
High Vacuum EquipmentAluminum High Vacuum Angle Valve XL ····························· P.30
Stainless Steel High Vacuum Angle/In-line Valve XM/XY ··· P.30Smooth Vent Valve XVD··································································· P.31
Slit Valve XGT ······················································································· P.31
Electric ActuatorsElectric Actuator/Slider Type LEF ················································ P.31
Electric Actuator/Rod Type LEY ··················································· P.32
Electric Actuator/Guide Rod Type LEYG ································· P.32
Electric Slide Table LES ··································································· P.33
Electric Rotary Table LER ······························································· P.33
Electric Grippers LEH ······································································ P.33
Controller LEC ····················································································· P.34
Programless Controller LECP1 ···················································· P.34
Pulse Input Driver LECPA ······························································ P.34AC Servo Motor Driver LECS ··················································· P.34
Card Motor LAT3 ················································································ P.34
Card Motor Controller LATC4 ······················································· P.34
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Equipment Lineup for Physical and Chemical Industry
¡ Supply dry air with a low dew point below –30 °C.¡ Heater or electric control board is not required.¡ Possible to check the outlet dew point with the
indicator. (Selfregenerative style allows for easymaintenance.)
Heatless Air Dryer ID
Outlet flow L/min (ANR) Inlet flow L/min (ANR)Series
ID 80 to 780 100 to 975
Outlet flow L/min (ANR) Standard dew point ( ° C)Series
IDG A/IDG 10 to 1000 −15, −20, −40, −60
¡ Possible to easily supply dry air using thehollow fiber membrane!
¡ Non-fluorocarbon¡ Power supply not required¡ No vibration or heat discharge.¡ With a dew point indicator.
Membrane Air Dryer IDG
¡ Cartridge type allows element replacement (SFA100/200/300, SFB100)¡ Compact disposable type (SFB300, SFC100)
Clean Gas Filter SF
Series Operating pressure FiltrationType
Clean Gas Strainer
Cartridge type disc
Cartridge type straight
Disposable type straight
Disposable type multiple disc
Cartridge type straight
SFA100·200·300SFB100SFB300SFC100
SFB200
Max.0.99 MPa (Vacuum: 1.3 x 10 −6 kPa)
Max.0.99 MPa (Vacuum: 1.3 x 10 −6 kPa)
Max.0.99 MPa (Vacuum: 1.3 x 10 −6 kPa)
Max.0.99 MPa (Vacuum: 1.3 x 10 −6 kPa)
Max.0.99 MPa (Vacuum: 1.3 x 10 −6 kPa)
0.01 µm
(Filtration efficiency 99.99%)
120 µm
¡ Built-in hollow fiber element¡ Pressure drop
(Inlet pressure 0.7 MPa,Max. flow rate)
Clean Air Filter SFD
Type Operating pressure FiltrationSeries
SFD100
SFD200
Disposable type(Irreplaceable element)
Cartridge type
(Replaceable element)
MAX.1.0 MPa0.01 µm
(Filtration efficiency:99.99%)
¡ Clean equipment modularized (Reduction of piping labor/ Space-saving)
¡ Clean air is easily available.¡ Nominal filtration rating: 0.01 µm (Filtration
efficiency 99.99%)¡ Wetted parts: Grease-free, Silicone-free¡ Assembled in a clean room, shipped
and packed in a duplicate package¡ 24 combinations available
Clean Air Module LLB ¡ Reduction of piping labor/Space-saving¡ Nominal filtration rating: 0.01 µm (Filtration efficiency 99.99%)¡ Wetted parts: Grease-free¡ 3 combinations available
Air Blow Module LLB1
Fluid Set pressure Flow range L/min (ANR)Series
LLB3LLB4
Clean AirN2 gas Note)
0.05 to 0.4 MPa
Note) Inlet air conditions ISO 8573-1 Quality grade: Equivalent to 1.4.1 to 1.6.1
5 to 100
50 to 500 Fluid Set pressure Flow range L/min (ANR)Series
LLB1 Air N2 gas 0.05 to 0.6 MPa Up to 100
Air Preparation Equipment (Dryers, Filters)
¡ Refrigerant: R134a(HFC)[IDF1E to 15E1]R407C(HFC)[IDF22E to 75E]
¡ Improved corrosion resistance with the useof a stainless steel, plate type heat changer.(IDF4E to 75E)
Refrigerated Air Dryer IDF
Applicablecompressor
Air flow capacity m 3 /min (ANR)
50 HzSeries
IDF1E to 75E 0.75 to 75 kW 0.10 to 11.060 Hz
0.12 to 12.4
SFA
SFB
SFB300 SFB200SFC
SFD100 SFD200
LLB3
LLB4
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¡ Easy replacement of the elementThe element and the bowl are in one piece. Replacement can be done in hand.
¡ Energy saving regulator Pressure drop: Max. 50% improvement¡ Reduced required maintenance space: Max. 46% reduction¡ Better visibility & safer
The bowl is covered with a transparent bowl guard.
Modular Type F.R.L. Unit AC
Series Set pressure (MPa)Port sizeCombination equipment
AC20 to 40-A
AC20A to 40A-A
AC20B to 40B-A
AC20C to 40C-A
AC20D to 40D-A
1/8, 1/4, 3/8, 1/2, 3/4
Air filter, Regulator,Lubricator
Filter regulator,Lubricator
Air filter, Regulator
Air filter, Mist separator, Regulator
Filter regulator, Mist separator
0.05 to 0.7
Air Filter AF
Port size Filtration ( µm)Series
AF20 to 40-A 1/8, 1/4, 3/8, 1/2, 3/4 5
Mist Separator AFM
Micro Mist Separator AFD
Port size Filtration ( µm)Series
AFD20 to 40-A 1/8, 1/4, 3/8, 1/2, 3/4 0.01
Regulator AR
Port size Filtration ( µm)Series
AFM20 to 40-A 1/8, 1/4, 3/8, 1/2, 3/4 0.3
Port size Set pressure (MPa)Series
AR20 to 40-A 1/8, 1/4, 3/8, 1/2, 3/4 0.05 to 0.7
¡ Easy replacement of the elementThe element and the bowl are in one piece. Replacementcan be done in hand.
¡ Reduced required maintenance space: Max. 46%reduction
¡ Better visibility & saferThe bowl is covered with a transparent bowl guard.
¡ Energy saving regulatorPressure drop: Max. 50% improvement
F.R.L. Units
¡ Built-in mechanism to release air pressure from theoutlet side efficiently and quickly. (Built-in check valve:With backflow function)
¡ Better visibility & saferThe bowl is covered with a transparent bowlguard.
¡ Better visibility & saferThe bowl is covered with a transparent bowlguard.
¡ Better visibility & saferThe bowl is covered with a transparent bowlguard.
Regulator with Backflow Function AR
Port size Set pressure (MPa)Series
AR20K to 60K 1/8, 1/4, 3/8, 1/2, 3/4, 1 0.05 to 0.85
Port size Bowl capacity (cm 3)Series
AL20 to 40-A 1/8, 1/4, 3/8, 1/2, 3/4 25 to 135
Lubricator AL
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Equipment Lineup for Physical and Chemical Industry
Modular Type F.R.L Unit ACG
Series Set pressure (MPa)Port sizeCombination equipment
AF + ARG + ALAWG + ALAF + ARGAF + AFM + ARGAWG + AFM
1/8, 1/4, 3/8, 1/2
Air filter, Regulator with integral pressure gauge, Lubricator
Filter regulator with integral pressure gauge, Lubricator
Air filter, Regulator with integral pressure gauge
Air filter, Mist separator, Regulator with integral pressure gauge
Filter regulator with integral pressure gauge, Mist separator
0.05 to 0.85
¡ Built-in mechanism to release air pressurefrom the outlet side efficiently and quickly.(Built-in check valve: With backflowfunction)
¡ Easy replacement of the element The element and the bowl are in one piece.
Replacement can be done in hand.¡ Energy saving regulator
Pressure drop: Max. 50% improvement¡ Reduced required maintenance space: Max.
46% reduction¡ Better visibility & safer The bowl is covered with a transparent bowl
guard.
Filter Regulator with Backflow Function AW
Port size Set pressure (MPa) Filtration ( µm)Series
AW20K to 40KAW60K
1/8, 1/4, 3/8, 1/2, 3/4
3/4, 10.05 to 0.85 5
Filter Regulator AW
Micro Mist Separator Regulator AWD
Port size Set pressure (MPa) Filtration ( µm)Series
AWD20 to 40 1/8, 1/4, 3/8, 1/2 0.05 to 0.85 0.01Port size Set pressure (MPa) Filtration ( µ m)Series
AWM20 to 40 1/8, 1/4, 3/8, 1/2 0.05 to 0.85 0.3
Port size Set pressure (MPa) Filtration ( µm)Series
AW20 to 40-A 1/8, 1/4, 3/8, 1/2, 3/4 0.05 to 0.7 5
Mist Separator Regulator AWM
¡ Improves visibility of pressure gaugeslocated in various locations.
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Equipment Lineup for Physical and Chemical Industry
¡ Improves visibility of pressure gaugeslocated in various locations.
Regulator with Built-in Pressure Gauge ARG
Port size Set pressure (MPa)Series
ARG20 to 40 1/8, 1/4, 3/8, 1/2 0.05 to 0.85
¡ Improves visibility of pressure gaugeslocated in various locations.
Regulator with Built-in Pressure Gauge with Backflow Function ARG K
Port size Set pressure (MPa)Series
ARG20K to 40K 1/8, 1/4, 3/8, 1/2 0.05 to 0.85
¡ Improves visibility of pressure gaugeslocated in various locations.
Filter Regulator with Built-in Pressure Gauge AWG ¡ Improves visibility of pressure gauges
located in various locations.
Filter Regulator with Built-in Pressure Gauge with Backflow Functio AWG K
Port size Set pressure (MPa) Filtration ( µ m)Series
AWG20K to 40K 1/8, 1/4, 3/8, 1/2 0.05 to 0.85 5
Port size Set pressure (MPa) Filtration ( µ m)Series
AWG20 to 40 1/8, 1/4, 3/8, 1/2 0.05 to 0.85 5
¡ Contamination controlled stainless steel regulator¡ Oil-free¡ Two types of d iaphragm materials:
PTFE, Fluororubber
Clean Regulator SRH
Applicable tubing O.D. Set pressure (MPa)Series
SRF
Metric size Inch size
ø4 to ø19
—
Integrated with fitting
With nut
Tube extension
ø1/8 to ø3/4
Tubing O.D.ø1/4 to ø3/4
0.02 to 0.4
¡ High precision low flow consumption stainless steel regulator¡ Bleed air flow 0.5 L/min (ANR) or less (0.2 MPa at outlet
pressure)¡ Setting sensitivity: 0.3% F.S.¡ Repeatability: 1% F.S.
Precision Clean Regulator SRP
Port size Set pressure (MPa)Series
SRP M5, 1/8Low pressure type: 0.005 to 0.2
High pressure type: 0.01 to 0.4
Relief mechanism Port size Set pressure (MPa)Series
SRHNon-relief
Relief
Rc 1/8, 1/4, 3/8,1 /29/16-18UNF, 7/8-14UNF
Rc 1/8, 1/4, 3/8, 1/2
Low pressure type: 0.02 to 0.2High pressure type: 0.05 to 0.7
¡ Wetted partsBody: New PFADiaphragm: PTFE
¡ Recommended maximum flow rate: 20L/min (SRF50)(0.3 MPa at inlet pressure, fluidization)
Clean Regulator/Fluororesin Type SRF
Fitting size: 2 to 6
Regulator for Water WR110
Port size Set pressure (MPa)Series
WR110-X224 Rc 1/4 0.08 to 0.39
Pressure Control Equipment (Regulators)
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Equipment Lineup for Physical and Chemical Industry
Applicable tubing O.D. Connection threadSeries
M- -2M
ø2
ø3.2, ø4, ø6
M3, M5
M3, M5, 1/8
Applicable tubing O.D. Connect ion threadSeries
KS
KX (High Speed Type)ø4, ø6, ø8, ø10, ø12
M5 x 0.8, M6 x 1.01/8, 1/4, 3/8, 1/2
Applicable tubing O.D. Connect ion threadSeries
HDLLLL
ø4, ø6, ø8, ø10, ø12 1/8, 1/4, 3/8, 1/2Applicable tubing O.D. Connection threadSeries
KC ø4, ø6, ø8, ø10, ø12M5 x 0.8
1/8, 1/4, 3/8, 1/2
¡ Applicable to use for oscillating and rotating sections in robots.¡ Low torque rotation style rotary One-touch fittings.¡ Copper-free (Electroless nickel plated)
Rotary One-touch Fittings KS/KX
¡ Compact and non-tool connection¡ Compact piping space¡ Hose nipple, Hose elbow, Barb
Miniature Fittings M
¡ Applicable for use on soft copper steel pipe.¡ Flared ridge metal ferrule.
Self-align Fittings H/DL/L/LL¡ One-touch installation and removal.¡ Built-in self-seal mechanism.¡ Air does not exhaust after removal of
tubing.¡ Copper-free (Electroless nickel plated)
Self-seal Fittings KC
Applicable tubing O.D. Connection threadSeries
KM ø4, ø6, ø8, ø10, ø12 1/8, 1/4, 3/8, 1/2
Applicable tubing O.D. Connect ion threadSeries
KF ø4, ø6, ø8, ø10, ø12 1/8, 1/4, 3/8, 1/2
¡ Compact manifold piping possible.
One-touch Fittings Manifold KM
¡ Vacuum −101.3 kPa applicable¡ Piping can be done without removing nut.¡ Fluid temperature: −5 to 150 ° C (Brass sleeve) −5 to 60 ° C (Resin sleeve)¡ Steam can be used.¡ Grease-free
Insert Fittings KF
Applicable tubing: Metric size
Fittings and Tubing
One-touch Fittings KQ2
Applicable tubing O.D. Connection threadSeries
KQ2 Metric Metricø2, ø3.2, ø4, ø6, ø8ø10, ø12, ø16
M5 x 0.8, M6 x 1.0, M3 x 0.5R, Rc 1/8, 1/4, 3/8, 1/2
Applicable tubing O.D. Connection threadSeries
KQB2 ø3.2, ø4, ø6, ø8ø10, ø12, ø16M5
R/Rc/G 1/8, 1/4, 3/8, 1/2
¡ Compact and lightweight¡ Fluid temperature: −5 to 150 ° C¡ Brass parts: Electroless nickel plated¡ Grease-free
Metal One-touch Fittings KQB2 ¡ Possible to use in vacuum to −100 kPa.¡ Improved tube insertion/removal: Insertion force: Max. 30% reduction
: Removal force: Max. 20% reduction∗ ∗Tube pulling out strength is ensured to be equivalent to existing model.
¡ Compact and lightweight: Dimensions height direction 24% shorter∗
Dimensions horizontal direction 23% shorter∗ : Weight 57% lighter∗∗ Existing model KQ2 series Male elbow/Applicable tubing O.D.: 6/ Connection thread: R1/8
¡ Body type: totaled 51 models¡ Thread material/Surface treatment: 2 types ∗∗Brass, Brass + Electroless nickel plated
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Equipment Lineup for Physical and Chemical Industry
Applicable tubing O.D. Connection thread (R, NPT)Series
KK130 ø6, ø8, ø10, ø12 1/8, 1/4, 3/8, 1/2
No. of connecting tubes Applicable tubing O.D.Series
DMK 6, 12 ø3.2, ø4
Applicable tubing O.D. Connection threadSeries
KB ø4, ø6, ø8, ø10, ø12, ø16 1/8, 1/4, 3/8, 1/2
Applicable tubing O.D. Connect ion threadSeries
KK
KKH
ø3.2, ø4, ø6, ø8ø10, ø12, ø16
—
M5 x 0.8, 1/8, 1/43/8, 1/2, 3/4
1/8, 1/4, 3/8, 1/2
No. of connecting tubes Applicable tubing O.D.Series
DM 6, 12 ø4, ø6
No. of connecting tubes Applicable tubing O.D.Series
KDM 10, 20 ø3.2, ø4, ø6, ø8
¡ One-touch fitting type standardized.(KK)¡ Use of ultra high-impact PBT resin.(KKH)
S Couplers KK/KKH ¡ Cv factor: increased by 34% ∗¡ Plug insertion force: reduced by 22%
(20 N) ∗¡ Lightweight: reduced by 14% (12 g) ∗
∗ : Compared to the existing model
S Couplers KK130
¡ One-touch installation and removal ofmulti-tubes.
¡ Prevents installation mistakes.
Multi-connector DM ¡ One-touch installation and removal of
multi-tubes.¡ Prevents installation mistakes.
Multi-connector with One-touch Fittings DMK
¡ One-touch installation and removal ofmulti-tubes.
¡ Prevents installation mistakes.¡ Built-in One-touch fittings.
Rectangular Multi-connector KDM ¡ Centralized distribution of supply air.¡ One-touch fitting installation without the
use of tools.¡ Air output direction possible
through 360 ° C.
Piping Module KB
Applicable tubing O.D. Connect ion threadSeries
KA ø3.2, ø4, ø6, ø8, ø10, ø12 M5 x 0.8, M6 x 1.0standard UNI thread, 1/8, 1/4, 3/8, 1/2
¡ Surface resistance: 10 4 Ω to 10 7 Ω¡ For preventing static electricity¡ Body: Conductive resin used for seal
parts¡ Copper-free (Electroless nickel plated)¡ Uni thread
Antistatic One-touch Fittings KA¡ Compact and lightweight¡ Fluid temperature: −5 to 150 ° C¡ Material: Metal parts stainless steel 316,
seal parts special FKM¡ Grease-free/Can be used with steam.
Certified to meet current FoodSanitation Law standards.
Stainless Steel 316 One-touch Fittings KQG2
Applicable tubing O.D. Connection threadSeries
MetricKQG2 ø3.2, ø4, ø6, ø8ø10, ø12, ø16M5
R/Rc 1/8, 1/4, 3/8, 1/2
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Equipment Lineup for Physical and Chemical Industry
Connection threadSeries
KKA 1/8, 1/4, 3/8, 1/2, 3/4, 1, 1 1 / 4, 1 1 / 2
Maximum operating pressure Operating temperatureSeries
LQ1 1.0 MPa 0 to 200 ° C
¡ Body material: Stainless steel 304¡ Seal material: Fluoropolymer (Special
FKM) is employed.¡ Grease-free¡ Check valve built in to both plug and
socket
S Couplers Stainless Steel Type KKA
Fluoropolymer Fittings Hyper Fitting LQ1
Applicable tubing O.D. Connect ion threadSeries
MS ø3.2, ø4, ø6 M5
Applicable tubing O.D. Connect ion threadSeries
KP ø4, ø6, ø8, ø10, ø12 1/8, 1/4, 3/8, 1/2
Maximum operating pressure Operating temperatureSeries
LQ3 1.0 MPa Nut material PVDF: 0 to 150° C
Nut material PFA: 0 to 200 ° C
¡ Possible to use in corrosive conditions¡ Compact piping space¡
Hose nipple, Hose elbow, Barb
Miniature Fittings Stainless Steel 316 MS
¡ One-touch fittings for clean room blowing systems¡ Completely oil-free (Fluoro coated rubber portions)¡ Wetted parts are non-metallic.¡ Parts washed and assembled in a clean room,
packed in a duplicate package.¡ Can be used in a vacuum (−100 kPa).
Clean One-touch Fittings for Blowing KP
Fluoropolymer Fittings Hyper Fitting LQ3
Insert bushing type
Flare type ¡ Freely choose tube positioningAs the tube runs through the fitting itself,a setting is available for any optionalposition.
¡ Can be used in pressure feed of chemicals,etc., during the production process ofsemiconductors.
¡ Applicable to chemicals such as acid,alkali and deionized water.
¡ Material: New PFA (Body, nut), PTFE(Collet)
Fluoropolymer Bore Through Connector LQHB
Applicable tubing O.D. Operatingtemperature ( ° C)Series
LQHBMetric size Inch size
3 to 25 1/8 to 1 0 to 200
Applicable tubing O.D. Connection threadSeries
MetricKFG2 ø4, ø6, ø8ø10, ø12, ø16 R·Rc 1/8, 1/4, 3/8, 1/2
¡ Possible to use in corrosive conditions¡ Metal parts: Stainless steel 303
Stainless One-touch Fittings KG
Applicable tubing O.D. Connect ion threadSeries
KG ø4, ø6, ø8, ø10, ø12, ø16 M5 x 0.8, M6 x 1.01/8, 1/4, 3/8, 1/2
¡ Compact and lightweight¡ Fluid temperature: −65 to 260 ° C (Swivel
elbow:−5 to 150 ° C )¡ Material: Stainless steel 316
Rubber material is not used.(Exceptswivel elbow)
¡ Grease-free/Can be used with steam.Certified to meet current Food SanitationLaw standards
Stainless Steel 316 Insert Fittings KFG2
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Equipment Lineup for Physical and Chemical Industry
¡ Metal seal type.¡ Air suppy to rotary/pivot shafts of turntables
and robot arms.¡ Low rotational torque: 0.003 to 0.50 N·m or less¡ Operating temperature: −10 to 80 ° C¡ Allowable RPM: 200 to 3000 min −1(r.p.m)
Low Torque Rotary Joint MQR
No. of circuits Port size Operating pressureSeries
MQR 1, 2, 4, 8, 12, 16 M5 x 0.8 −100 kPa to 1 MPa
¡ For general pneumatic tubing¡ Maximum operating pressure: 1.5 MPa
(at 20°
C)
Nylon Tubing T ¡ Maximum operating pressure: 1.0 MPa
(at 20 ° C)
Soft Nylon Tubing TS
Color FluidSeries
T · TIA ø4, ø6, ø8, ø10, ø12, ø16 Black, White, Red, Blue, Yellow, Green
Tubing O.D.
Metric size
Air, Water
Color FluidSeries
TU · TIUB ø2, ø4, ø6, ø8ø10, ø12, ø16
Black, White, Red, Blue, Yellow,Green, Clear, Orange, and Others
Total 29 colors
Tubing O.D.
Metric size
Air, Water
Tubing O.D. Color FluidSeries
TUS ø4, ø6, ø8, ø10, ø12 Black, White, Red, Blue, Yellow,Green, Translucent, Yellow brown
Air
¡ Maximum operating pressure: 0.8 MPa(at 20 ° C)
Polyurethane Tubing TU ¡ Maximum operating pressure: 0.6 MPa
(at 20 ° C)
Soft Polyurethane Tubing TUS
¡ Material: New PFA¡ Fitting integrated, all-in-one structure
· Hyper fitting/LQ2 series used¡ Triple seal structure
Fluoropolymer Needle Valve LVN
Applicable tubing O.D.
Metric InchSeries Flow adjustment range
(L/min)
LVN
Orifice dia. (mm ø)
4 to 12 1/8 to 1/2 0 to 12 4.4 to 10
Color FluidSeries
TS · TISA ø4, ø6, ø8, ø10, ø12, ø16 Black, White, Red, Blue, Yellow, Green
Tubing O.D.Metric size
Air, Water ∗
∗ Compatible with water due to a change in materials. Compatible fluid typesare printed on the tube body for differentiation, so please be sure to checkthis. (Refer to the table below.) If using the previous TS/TISA series with“water”, the tube may shrink and cause air leakage or the tube may fall out.
Print code FluidPrevious
NEWSMC TS 0604 SOFTNYLON 6 x 4¡ SMC TS 0604 SOFTNYLON 6 x 4
Air
Air, Water
Printing/Fluid
Color FluidSeries
TUZ ø4, ø6, ø8, ø10, ø12 Black, White, Red, Blue, Yellow, Green
Tubing O.D.Metric size
Air
¡ Superior restoring compared to the nylontubing.
Hard Polyurethane Tubing TUH ¡ Abrasion: Approx. 1/3 (Compared with
SMC polyurethane tubing TU series)
Wear Resistant Tubing TUZ
Maximum operating pressureTubing O.D. FluidSeries
TUH0.8 MPa (at 20° C)
1.0 MPa (at 20° C)
Standard type
High pressure typeø4, ø6, ø8ø10, ø12
Air
ColorBlack, White, Blue,
Translucent
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Equipment Lineup for Physical and Chemical Industry
¡ Flexible¡ Maximum operating pressure: 0.8 MPa
(at 20 °C)¡ For moving applications.
Polyurethane Coil Tubing TCU ¡ Maximum operating pressure: 0.8 MPa
(at 20 °C)¡ Compact piping
Polyurethane Flat Tubing TFU
Tubing O.D. Color FluidSeries
TFU ø4, ø6, ø8 BlackNumber of cores
2, 3 Air
Air
Tubing O.D. Color FluidSeries
TCU ø4, ø6, ø8 BlackNumber of cores
1, 2, 3 Air
Note) Colors other than black are available as Made-to-Order specifications.
Color FluidSeries
TQ ø4, ø6, ø8, ø10, ø12Translucent
(Material color)
Tubing O.D.
Metric size
Air, Water,Inert gas, Solvent
Color FluidSeries
TAU ø3.2, ø4, ø6, ø8, ø10, ø12 Black
Tubing O.D.
Metric size
Air
¡ Carries fluid such as solvent with a softand abrasion resistant tube.
¡ 2-layer structureOuter layer: Special nylon resin
¡ Inner layer: Special fluoropolymerInternal smoothness: Equivalent to Ra0.02 µm
2-Layer Soft Fluoropolymer Tubing TQ
Color FluidSeries
TAS ø3.2, ø4, ø6, ø8, ø10, ø12 Black
Tubing O.D.
Metric size
ColorSeries
TL/TIL ø4, ø6, ø8, ø10, ø12, ø19 Translucent
Tubing O.D.
Metric size
¡ Maximum operating pressure: 1.2 MPa(at 20 °C)
¡ For preventing static electricity.
Antistatic Soft Nylon Tubing TAS
¡ Maximum operating pressure: 0.9 MPa(at 20 °C)
¡ For preventing static electricity.
Antistatic Polyurethane Tubing TAU ¡ Maximum operating pressure: 1.0 MPa
(at 20 °C)¡ Maximum operating temperature: 260 °C
(This can vary according to operatingpressure.)
Fluoropolymer Tubing TL
Color FluidSeries
TH/TIH ø4, ø6, ø8, ø10, ø12 Translucent, Black, Red, Blue
Tubing O.D.Metric size
Air, Water
Color FluidSeries
TD/TID ø4, ø6, ø8, ø10, ø12 Translucent
Tubing O.D.Metric size
Air, Water
FEP Tubing (Fluoropolymer) TH ¡ Maximum operating pressure: 1.6 MPa (at 20 ° C)∗¡ Food Sanitation Law compliant¡ Complies with FDA (Food and Drug Administration) §177-1550
dissolution test.¡ Maximum operating temperature: 260 ° C (This can
vary according to operating pressure.)∗ This can vary according to size.
Soft Fluoropolymer Tubing TD ¡ Maximum operating pressure: 2.3 MPa (at 20 ° C)∗¡ Food Sanitation Law compliant¡ Complies with FDA (Food and Drug Administration) §177-1550 dissolution test.¡ Maximum operating temperature: 200° C (This can vary according to operating pressure.)∗ This can vary according to size.
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Equipment Lineup for Physical and Chemical Industry
ColorSeries
TLM/TILM ø2, ø3, ø4, ø6, ø8, ø10, ø12, ø16, ø19, ø25 Translucent, Black, Red, Blue
Tubing O.D.
Metric sizeColor FluidSeries
TPH ø4, ø6, ø8, ø10, ø12 Black, White, Red, Blue, Yellow, Green
Tubing O.D.
Metric size
Air, Water, Other
¡ Maximum operating temperature: 260 °C (This can vary accordingto operating pressure.)
¡ Food Sanitation Law compliant¡ Complies with FDA (Food and Drug Administration) §177-1550
dissolution test.
Fluoropolymer Tubing (PFA) TLM Polyolefin Tubing TPH
Tube Cutter TK
Applicable tubing materialSeries
TK-1TK-2TK-3
13 mm or less
18 mm or less
12 mm or less
Nylon, Soft nylon,Polyurethane, and
other soft plastic tubing
Applicable tubing O.D.
¡ With One-touch fitting (Straight, Elbow)¡ Space-saving. Mountable side by side
without clearance.¡ Precision indicator setting function¡ Simultaneous copying is possible
for maximum 10 units.
2-Color Display High-Precision Digital Pressure SwitchZSE30A(F)/ISE30A
Type Rated pressure rangeSeries
ZSE30AFZSE30AISE30A
Compound pressure
Vacuum pressure
Positive pressure
−100.0 to 100.0 kPa
0.0 to −101.0 kPa
−0.100 to 1.000 MPa
Type Rated pressure rangeSeries
ZSE40AFZSE40AISE40A
Compound pressure
Vacuum pressure
Positive pressure
−100.0 to 100.0 kPa
0.0 to −101.3 kPa
−0.100 to 1.000 MPa
¡ IP65¡ Applicable fluid: Air, Non-corrosive gas,
Non-flammable gas¡ Simultaneous copying is possible
for maximum 10 units.¡ 3-step setting¡ With One-touch fitting
2-Color Display High-Precision Digital Pressure SwitchZSE40A(F)/ISE40A
Pressure Switches
Type Rated pressure rangeSeries
ZSE10FZSE10ISE10
Compound pressure
Vacuum pressure
Positive pressure
−100.0 to 100.0 kPa
0.0 to −101.0 kPa
−0.100 to 1.000 MPa
Type Rated pressure rangeSeries
ZSE80FZSE80ISE80ISE80H
Compound pressure
Vacuum pressure
Positive pressure
Positive pressure
−100.0 to 100.0 kPa
0.0 to −101.0 kPa
−0.100 to 1.000 MPa
−0.100 to 2.000 MPa
¡ Low profile 9.8 mm¡ Vertical mounting space reduced to approx. 1/2
(Compared to ZSE/ISE30A series)¡ Simultaneous copying is possible for maximum 10 units.¡ 3-step setting
Digital Pressure Switch ZSE10(F)/ISE10
¡ Suitable for a wide variety of fluids withstainless diaphragm
¡ IP65¡ RoHS compatible¡ Low leakage VCR, Swagelok compatible fittings can be selected. With One-touch fitting (Straight, Elbow)¡ Back piping, underside piping
2-Color Display Digital Pressure SwitchZSE80(F)/ISE80(H)
ø4, ø6
ø8, ø10, ø12
1.0 MPa
0.7 MPa (at 20 °C)
¡ Maximum operating pressure
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Equipment Lineup for Physical and Chemical Industry
Type Rated pressure rangeSeries
PSE531PSE533PSE532PSE530
Vacuum pressure
Compound pressure
Low pressure
Positive pressure
0 to −101 kPa
−101 to 101 kPa
0 to 101 kPa
0 to 1 MPa
¡ Connector¡ Analog output (voltage)
Compact Pneumatic Pressure Sensor PSE53
Type Rated pressure rangeSeries
PSE541PSE543PSE540
Vacuum pressure
Compound pressure
Positive pressure
0 to −101 kPa
−100 to 100 kPa
0 to 1 MPa
Type Rated pressure rangeSeries
PSE550 Differential pressure 0 to 2 kPa
¡ Analog output (voltage)
Compact Pneumatic Pressure Senso r PSE54 ¡ Suitable for applications such as air current volume
maintenance, filter blockage, and liquid surface detection¡ Analog output (voltage/current)
Low Differential Pressure Sensor PSE55
¡ Wetted parts: Stainless steel 316L¡ IP65¡ Suitable for a wide variety of fluids¡ Analog output (voltage/current)¡ Low leakage VCR , Swagelok compatible fittings can be selected.
Pressure Sensor for General Fluids PSE56
Type Rated pressure rangeSeries
PSE561PSE563PSE564PSE560
Vacuum pressure
Compound pressure
Positive pressure
Positive pressure
0 to −101 kPa
−100 to 100 kPa
0 to 500 kPa
0 to 1 MPa
Set pressure rangeSeries
PSE300
−101 to 101 kPa
10 to −101 kPa
−10 to 100 kPa
−0.1 to 1 MPa−50 to 500 kPa
−0.2 to 2 kPa
Set pressure rangeSeries
PSE200
−101 to 101 kPa
10 to −101 kPa
−10 to 101 kPa
−0.1 to 1 MPa
Type Set pressure rangeSeries
IS10 Positivepressure0.1 to 0.4 MPa0.1 to 0.6 MPa
¡ Four sensors can be connected.¡ Applicable sensors: PSE53 , 54 , 56¡ Capable of controlling various different
applications from one controller¡ 4 inputs, 5 outputs (2 outputs for 1ch, 1
output for 2 to 4ch)
Multi-Channel Digital Pressure Sensor ControllerPSE200
¡ Applicable sensors: PSE53 , 54 , 550, 56¡ Compatible with voltage input and current input¡ Response time: 1 ms¡ Space-saving, capable of vertical and horizontal contact mounting¡ Panel mounting, Bracket mounting, DIN rail mounting
2-Color Display Digital Pressure Sensor ControllerPSE300 ¡ 16% lighter, 11% smaller (Compared with IS1000)
¡ Service life: 5 million cycles¡ Can be connected to modular type F.R.L. units.
Pressure Switch/Read Switch Type IS10
Type Set pressure rangeSeries
PS1000PS1100PS1200
Positive pressure
For vacuum/residual pressure
For vacuum
−0.1 to 0.45 MPa
−0.1 to 0.4 MPa
−100 to 0 kPa
¡ Plug-in reducer for One-touch fittings.¡ With LED light.
Air Checker: Electronic Pressure Switch PS1000/1100/1200
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Equipment Lineup for Physical and Chemical Industry
¡ Air, N 2, Ar, CO 2¡ Grease-free¡ Integrated flow adjustment valve¡ Compact, Lightweight, Space-saving
2-Color Display Digital Flow Switch PFM
Set flow range (L/min)
( ): For CO 2
Series
PFM
0.2 to 10 (0.2 to 5)
0.5 to 25 (0.5 to 12.5)
1 to 50 (1 to 25)
2 to 100 (2 to 50)
Set flow range (L/min)Series
PF3W
0.5 to 4
2 to 16
5 to 40
10 to 100
50 to 250
Set flow range (L/min)Series
PF2A
1 to 10
5 to 50
10 to 100
20 to 200
50 to 500
150 to 3000
300 to 6000
600 to 12000
¡ Integrated type and separate monitor type are available.¡ Switch output, accumulated pulse output, analog output¡ Capable of switching back and forth between cumulative and instantaneous flow¡ IP65
Digital Flow Switch for Air PF2A
¡ 3-color / 2-screen display¡ Integrated flow adjustment valve and
temperature sensor¡ 40% smaller than existing
product (PF2W)¡ IP65 compliant,
non-grease type¡ Fluid temperature: 0 to 90°C
3-Color Display Digital Flow Switch for Water PF3W
Set flow range (L/min)Series
PF2D0.4 to 4
1.8 to 20
4.0 to 40
Set flow range (L/min)Series
PF3W10 to 100
30 to 250
¡ Body sensor: New PFA, Tube: Super PFA¡ Low-particle generation, Excellent flow-through
characteristics
Digital Flow Switch for Deionized Water and Chemical Liquids PF2D
¡ Applicable fluid: Deionized water and chemical, etc¡ 3-color / 2-screen display¡ IP65 compliant, non-grease type¡ Fluid temperature: 0 to 70 ° C
3-Color Display Digital Flow Switch for PVC Piping PF3W
Flow Switches
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Equipment Lineup for Physical and Chemical Industry
Electrostatic Sensor IZE11
Rated measurementrange
Minimum unitsetting OutputSeries
IZE11 −0.4 kV to +0.4 kV−20 kV to +20 kV
0.001 kV(at ± 0.4 kV)
0.1 kV(at ± 20 kV)
Switch output x 2 + Analog output(1 to 5 V, 4 to 20 mA)
¡ Detects electrostatic potential of theworkpiece, and is capable of switch output,analog output or output of current.
¡ Detects electrostatic potential of theworkpiece, and is capable of switch output,analog output or output of current.
Electrostatic Sensor IZD10
Output voltageMeasurement potentialEffective detection
distanceSeries
IZD10-110
IZD10-510
± 0.4 kV(At detection distance 25 mm)
± 20 kV(At detection distance 50 mm)
1 to 5 V
(Output impedance: )Approx. 100 Ω10 to 50 mm
25 to 75 mm
Ion generation method Ion balanceSeries
IZN10 Corona discharge type Energy saving static electricity elimination nozzle:±10 V or less
High flow static electricity elimination nozzle:±15 V or less
¡ Dust removal and static electricity elimination by air blowSpot type static electricity elimination.
¡
Slim design: Thickness dimension 16 mm¡ Nozzle type can be selected according to applications.• Energy saving static electricity elimination
nozzle (Short range static electricity elimination,design focuses on ion balance)
• High flow static electricity elimination nozzle(Long range static electricity elimination anddust removal)
¡ With alarm functionHigh-voltage error, electrode needlecontamination detector
Ionizer/Nozzle Type IZN10
Type Ion balanceSeries
IZS42IZS41IZS40
Dual AC type
Feedback sensor type
Standard type
Ion generation method
Corona discharge type ± 30 V
¡ Potential amplitude is reduced with Dual AC type.25 V or less (Installation height: 300 mm)
¡ Rapid elimination of static electricity by afeedback sensor.
¡ Reduction of adjustment and maintenancelabor by auto balance sensor.
¡ Simple operation: Can be controlled bypowering the ionizer ON. (Standard type)
¡ Setting ionizer with remote controller.¡ Transition wiring may be used.¡ High speed static electricity elimination cartridges
and energy saving static electricity eliminationcartridges are available.
Ionizer/Bar type IZS40/41/42
Rated measurement range Minimum display unitSeries
IZH10 ± 20.0 kV
¡ Compact design: 80 mm × 110 mm × 39 mm¡ Weight: 280 g¡ Static electricity elimination time: 1.5 seconds¡ With alarm function
High-voltage error, electrode needlecontamination detector
¡ 2 types of fans available.Rapid static electricity eliminating fan/ Low-noise fan
Ionizer/Fan Type IZF10
Ion generation method Ion balanceSeries
IZF10 Corona discharge type (DC)±
13 V
¡ Easy-to-use handheld electrostatic meter.¡ Weight: 85g (excluding dry cell batteries)¡ With backlight¡ LOW battery indicator¡ Peak/Bottom value indication¡ Zero-clear function¡ Auto power-off function
Handheld Electrostatic Meter IZH10
0.1 kV ( ± 1.0 to ± 20.0 kV)0.01 kV (0 to ± 0.99 kV)
Static Electricity Elimination Equipment
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Equipment Lineup for Physical and Chemical Industry
¡ The valve direction clearly indicates whether thevalve is open or closed.
¡ Small knob operating force. (0.04 to 0.14 N·m)
Finger Valve VHK ¡ For Air, medium vacuum, water, oil, steam (can be used with heated water.)¡ Body material: (Air) Aluminum, Resin (Water, oil, medium vacuum) C37, Stainless steel¡ Available with One-touch fittings (resin body)¡ Flow rate: 20% more flow∗
¡ Height: 10% smaller ∗
¡ Lightweight: 30% lighter∗
∗ Comparison with SMC existing model
Direct Operated 2 Port Solenoid Valve VX2
Actuation Port size Orifice diameter (mmø)Series
VX21/22/23 N.C./N.O. 1/8 to 1/2ø6 to ø12 2 to 10
Description Type Port sizeSeries
VHK2VHK3
Finger Valve2 port valve
3 port valveø4 to ø12
M5, 1/8 to 1/2
2 or 3 port valve selectable
¡ For air, water, oil, heated water, high temperature oil¡ Body material: C37, CAC407, Aluminum, Resin and Stainless steel¡ Height: Approx. 7% smaller (7 mm) ∗¡ Enclosure: IP65
(Electrical entry “Faston” type terminal is IP40)∗Comparison with SMC existing model (VXD24)
Pilot Operated 2 Port Solenoid Valve VXD ¡ For air, water, oil, heated water, high temperature oil¡ Body material: C37, Stainless steel, Aluminum, and Resin
(With One-touch fittings)¡ Enclosure: IP65
Zero Differential Pressure Type/ Pilot Operated 2 Port Solenoid Valve VXZ
Actuation Port size Orifice diameter (mmø)Series
VXZ N.C./N.O. 1/4 to 1 10 to 25
¡ For air, water, heated water, steam¡ Body material: C37, Stainless steel¡ Special FKM seal material for high temperature
(Leakage rate: 1 cm 3 /min or less)¡ Enclosure: IP65
Zero Differential Pressure Type/ Pilot Operated 2 Port Solenoid Valve VXS
¡ For air, medium vacuum, water¡ Body material: Aluminum, Resin (PPS), C37, Stainless steel¡ With One-touch fittings (resin body)¡ IP65
Compact Direct Operated 2 Port Solenoid Valve VDW
Actuation Port size Orifice diameterSeries
VDW10/20 N.C. ø3.2, ø4, ø6, M5, 1/8 ø1 to ø3.2
Actuation Port size Orifice diameter (mmø)Series
VXD N.C./N.O. 1/4 to 132 A to 50 A
10 to 50
Actuation Port size Orifice diameter (mmø)Series
VXS N.C./N.O. 1/4 to 1 10 to 25
Compact Direct Operated 2/3 Port SolenoidValve for Chemical Liquids LVM
Pinch Valves AXTP20
Actuation Tubing Operating pressureSeries
AXTP20 N.O. Silicone etc.Outside diameter (O.D.) ø4, ø6 ø1/4
0 to 100 kPa
Valve structure Actuation Orifice diameter (mmø)Series
LVM09/090
LVM11
LVM10/100LVM15/150LVM20/200
Diaphragm typeDirectly operated poppet
(Locker type)
Diaphragm typeDirectly operated poppet
Diaphragm typeDirectly operated poppet
(Locker type)
N.C.N.O.
Universal
N.C.
N.C.N.O.
Universal
1.1
1.5
1.4
1.6
2
¡ Isolated structureDiaphragm isolates the solenoid drive body from the fluid.
¡ Wetted parts: Body/plate: PEEKDiaphragm: EPDM, FKM, Kalrez ® can be selected.
2/3 Port Valves for Fluid Control
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Equipment Lineup for Physical and Chemical Industry
Actuation Port sizeSeries
Threadedtype
LVA N.C./N.O.Double acting 1/8 to 1
Orifice diameter (mmø)
2 to 22
¡ Body material: New PFA/Stainless steel/PPS¡ Diaphragm material: PTFE, EPDM, NBR can be selected.
Air Operated Chemical Liquid Valve/Threaded TypeLVA
ActuationPort size
(Applicable tubing O.D.)Series
Manual type(Integral fitting/ Threaded type)
LVH N.C.1/8 to 1/2
(Metric:ø3 to ø12Inch:1/8 to 1/2)
Orifice diameter(mm ø)
4 to 12
ActuationApplicable tubing O.D.Note)
Metric InchSeries
Integral fitting
Tube extensionLVD
N.C. N.O./ Double acting
Orifice diameter(mm ø)
¡ Body material:New PFA/Stainless steel/ PPS
¡
Compatible with locking and non-lockingtypes
Manually Operated Chemical Liquid Valve/Integral Fitting/Threaded TypeLVH ¡ Lineup of compact and space-saving types
Up to 29% reduction in dimensions on
piping side¡ Body material: New PFA¡ Diaphragm material: PTFE¡ Actuator material: PPS
Air Operated Chemical Liquid Valve/Compact TypeLVD
¡ No screws, all-in-one integrated designNon-metallic structure with no metalscrews used to fasten the actuator portionand body portion
¡ Body material: New PFA¡ Diaphragm material: PTFE¡ Actuator material: PVDF
Chemical Liquid Valve/Non-Metallic Exterior LVQ ¡ Applicable to rigid vinyl chloride tube: Union type
with PVC unfixed union¡ Body material: CPVC, Diaphragm material: PTFE¡ O-ring material: FKM, EPDM (selectable)¡ Applicable fluids: Deionized water, chemicals
Vinyl Chloride Air Operated Valve LVP
3 to 19
6 to 19
1/8 to 3/4
1/4 to 3/4
2 to 16
4 to 16
Note) Tubing O.D. for tube extension type.
Actuation OptionApplicable tubing O.D.Type
LVP5
LVP6
Orifice diameter(mm ø)
N.C.N.O.
Double acting
ActuationApplicable tubing O.D.
Metric InchSeries
Integral fitting
Space-saving type
Tube extension
LVQN.C.N.O.
Double acting
Orifice diameter(mm ø)
3 to 25 1/8 to 1
4 to 22
Note) Tubing size
Fitting size: 2 to 6
6 to 25Note) 1/4 to 1Note)
ø22 (Nominal dia.16A)
ø26 (Nominal dia.20A)
ø32 (Nominal dia.25A)
16
22
With flow rateadjustment
Applicable tubing O.D. Orifice diameter ActuationSeries
ø32 (Nominal dia.25A)
ø38 (Nominal dia.32A)
ø48 (Nominal dia.40A)
ø60 (Nominal dia.50A)ø75 (Nominal dia.65A)
ø89 (Nominal dia.80A)
¡ Complies to JIS standard for polyvinyl chloride piping (JIS K 6742)¡ Applicable fluids: Deionized water, Chemicals¡ Fluid contact materials:
PVC (Body)PTFE (Poppet)FKM (O-ring: Standard)EPDM (O-ring: Optional)
¡ Flow-rate characteristics:Cv factor 10 to 198
¡ Easy piping with union connection
PVC Quick Drain Valve LVW
ø25
ø40
LVW60
LVW80
LVW90ø65
ø80
Double acting
¡ Body material:New PFA¡ Same configuration N.C./N.O./double-acting¡ Able to handle fluid temperatures up to 100 °C
Air Operated Chemical Liquid Valve/Integral Fitting TypeLVC
Actuation Applicable tubing O.D.Series
Integralfitting
LVC N.C./N.O.Double acting
Metric: 3 to 25Inch: 1/8 to 1
Orifice diameter (mmø)
4 to 22
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Equipment Lineup for Physical and Chemical Industry
Process Pump/Double Acting Pump PA
Type ActionDischarge rate
(L/min) Wetted part materialSeries
PA3000
PA5000
Automatically operated type
Air operated type
Automatically operated type
Air operated type
ADC12(Aluminum)
SCS14(Stainless steel)
1 to 20
0.1 to 12
5 to 45
1 to 24
Process Pump/Single Acting Pump PB
Non-Metallic Pump/Double Acting PumpPAF Liquid Dispense Pump (Solenoid type) LSP
Discharge rate adjustment range Wetted part materialSeries
LSP5 to 50 µL
50 to 100 µL
100 to 200 µL
Body: PEEKDiaphragm/Check valve: EPDM,FKM
PA3 0PA3 13PA5 0PA5 13
Type ActionDischarge rate
(L/min) Wetted part materialSeries
PAF3000
PAF5000
Automatically operated type
Air operated type
Automatically operated type
Air operated type
New PFA(Fluororesin)
1 to 20
1 to 15
5 to 45
5 to 38
PAF3410PAF3413PAF5410PAF5413
Type ActionDischarge rate(mL/min) Wetted part materialSeries
PB1000
Built-in solenoid valve
Air operated type
Air operated type
PolypropyleneStainless Steel 316
8 to 2000
8 to 1000
8 to 1000
PB1011APB1013A
PB1313A New PFA(Fluororesin)
∗ Tightening bolt, Air switching valve: Stainless steelUse the PAF series standard products when metal-free pump is necessary
for hydrofluoric acid, etc./div.
Fluid adsorption/ discharge rate setting range RepeatabilitySeries
LDP 0.05 to 5 mL
Fluid adsorption/ discharge rate resolution
0.005 mL ±1%
Dispense Pump LDP
Pumps
¡ Discharge rate can be adjusted.¡ Discharge rate stability (repetition
accuracy ±1 )∗ ±2% at 5 to 15 µL
¡ Shutoff function¡ Self-contained system does not need any
priming.¡ Fluid used: Water, deionized water,
diluent, and cleaning fluid
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Equipment Lineup for Physical and Chemical Industry
Process Gas Equipment
¡ For UHP gas delivery in semiconductor and other cleanindustries.
¡ Body material: Stainless steel 316L secondary remelt orStainless steel 316L
¡ Wetted parts material: Electropolish¡ External metal seal construction
Regulator/Back Pressure Regulator for Ultra High Purity AP/SL/AZ/BP
Connection sizeSeries
AP/SL
AP
AZ
BP
Distribution (Compact)
Distribution
Bulk gas delivery
Source
Sub-atmospheric
Source
Distribution
Source
Sub-atmospheric
−
Body material
Stainless steel 316Lsecondary remelt
Connection type
Face sealTube stub
1/4", 3/8"
1/4", 3/8", 1/2", 3/4"
1/2", 3/4", 1"Single
stage
Two stage
Single
stage
Back pressure
regulator
Stainless steel 316L
Stainless steel 316Lsecondary remelt
Stainless steel 316Lsecondary remelt
Stainless steel 316L
1/4", 3/8"1/2", 3/4"
1/4", 3/8"
1/4", 3/8"1/2"
1/4", 3/8"
¡ For wide variety of applications from semiconductor to general¡ Body material Stainless steel 316 or brass available depending on gas
Regulator/Back Pressure Regulator for General Applications AK/BP
Connection sizeSeries
AK
BP
Distribution
Source
Sub-atmospheric
Source
−
Body material
Stainless steel 316Brass
Connection type
NPT,Compression
fitting
1/4", 3/8"1/2"
Single
stage
Two stage
Back pressureregulator
1/4"
1/4"
¡ For UHP gas delivery in semiconductor and other clean industries.¡ Shut off valve which uses a diaphragm for a moving element to open and
close the valve.¡ Springless diaphragm valves do not have a wetted spring.
Diaphragm Valve for Ultra High Purity AP
Connection sizeSeries
AP
Body material
Stainless steel 316Lsecondary remelt
Connection type
Face sealTube stub
1/4", 3/8"1/2", 3/4"
Air operated type
Manually operated type ∗ 1/2: Machined type/Tube weld only
Body material Connection sizeSeries
AZStainless steel
316L1/4, 3/8
1/2∗
Connection type
Face seal
¡ Cleaned for high purity semiconductor applications.¡ Cleanroom assembled and He leaked tested.¡ Valve meets dimensional requirements of SEMI Standard.¡ User-friendly forged body
Diaphragm Valve for Ultra High Purity AZ
Air operated type
Manually operated type
[Check Valve]¡ To prevent reverse flow.¡ Unique design with only one moving part in the gas stream, an O-ring.¡ It is a springless design, free of springs and poppets.[Vacuum Generator]¡ Vacuum generator¡ Applicable to emission of unnecessary gas remaining inside piping during replacement
of gas cylinder.[Flow Switch]¡ It detects excess flow above a given flow rate, caused by pipe breakage etc.
Check Valve/Vacuum Generator/Flow Switch AP
Body material Connection sizeSeries
AP1/4", 3/8"
1/2", 3/4"
Connection type
Face sealTube stub
Check valve
Vacuum generator
Flow switch
Stainless steel 316L secondary remelt, Stainless steel 316L
Stainless steel 316L
Stainless steel 316L secondary remelt, Stainless steel 316L
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Equipment Lineup for Physical and Chemical Industry
Port size Temperature ( °C)Series
FQ1 Rc1/2, 3/4, 1Maximum operating pressure
1 MPa MAX.80
¡ Ideal for low flow filtration (MAX.30 L/min)¡ No tools required.
Quick Change Filter/For Cleaning Fluid FQ1
Filters for Liquids
Chillers (Circulating Fluid Temperature Controller)
¡ Filtration efficiency: 99% or more
High Precision Filter for Liquids FGH
Port size Temperature ( °C)Series
FGH Rc3/8 to 1Maximum operating pressure
1 MPa MAX.80
¡ Air-cooled models provide cooling water whereverneeded thanks to easy mounting and easy operation.
¡ Proven performance with a wide range of applicationssuch as lasers/analysis equipment/LCD manufacturingequipment/mold temperature regulators, etc.
Refrigerated Thermo-cooler HRG
Cooling capacity Circulating liquidSeries
HRG 10 to 15 kW
Temperature stability
± 1.0/ ± 0.5 ° C
Cooling method
Air-cooledrefrigeration/ Water-cooledrefrigeration
Set temperature range
5 to 35 ° C
Clear water,Deionized water,Ethylene glycol
aqueous solution
Economy type chiler(Three-phase power supply) ¡ Compact
W 377 x H 615 x D 435, 31 kg¡ Basic type with simple function and performance¡ With ready-to-use power cord
Thermo-chiller HRS-X017
Maximum cooling capacity Circulating liquidSeries
HRS-X017 1200 W
Temperature stability
± 2 ° C
Cooling method
Air-cooledrefrigeration
Set temperature range
10 to 30 ° CClear water,Ethylene glycol
aqueous solution
Basic type
Cooling capacity Circulating liquidSeries
HRS
1300 W1900 W2400 W
5100 W
Temperature stability
± 0.1 ° C
Cooling method
Air-cooledrefrigeration/ Water-cooledrefrigeration
Air-cooled refrigeration
Set temperature range
5 to 40 ° CClear water,
Ethylene glycolaqueous solution
¡ Air-cooled models provide cooling water wherever needed thanks to easy mounting and easy operation.¡ Proven performance with a wide range of applications such as lasers/analysis equipment/LCD manufacturing equipment/mold temperature regulators, etc.¡ Compact W 377 x H 615 x D 500, 40 kg¡ Timer operation function, Low level in tank detecting function, Power failure auto-restart function, Anti-freezing function¡ Self diagnosis function¡ Ideal for overseas models (single-phase 200 to 230 VAC, single-phase 100 and 115 VAC)¡ Conforms to UL specifications, CE-marking.
Thermo-chiller HRS Compact type
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Equipment Lineup for Physical and Chemical Industry
Cooling capacity Circulating liquidSeries
HRZD 9.5 kW x 2Temperature stability
± 0.1 ° C
Cooling method
Water-cooled refrigeration
Set temperature range
−30 to 90 ° C Fluorinated liquid
Cooling capacity Circulating liquidSeries
HRW 2 to 30 kW
Temperature stability
± 0.3 ° C
Cooling method
Water-cooledrefrigeration
Set temperature range
20 to 90 ° C
Fluorinated liquid,Clear water,
Deionized water,Ethylene glycol
aqueous solution
¡ Temperature for two systems can be controlled
separately by one chiller.¡ Double inverter type: Substantially more energy is
saved by using a DC inverter refrigerator and inverterpump.
¡ Space saving: Footprint reduced by 23 %¡ Reduced wiring, piping and labor: Single power cable,
single facility-water piping system¡ CE-marking
Refrigerated Dual Thermo-chiller HRZD
¡ Direct heat exchanger for water circulated within a plant¡ For temperature regulation within the temperature
range where no freezer is needed¡ Proven performance with semiconductor process equipment, with a wide range of features
such as high temperature stability, wide temperature range, failure testing, external signal.¡ Conforms to UL and SEMI specifications, CE-marking.¡ Inverter type can be selected.
Water-cooled Thermo-chiller HRW (Double inverter type) (High-performance chiller (Water-cooled type)
Cooling capacity Circulating liquidSeries
HEC230, 600W
140, 320,600, 1200 W
Temperature stability±0.01 to 0.03°C
±0.01 to 0.03°C
Cooling method
Peltier-type air cooled
Peltier-type water cooled
Set temperature range
10 to 60 ° C
Clear waterClear water,Fluorinated
liquid
¡ For applications requiring high-precision temperature control¡ High-precision, refrigerant-free temperature control equipment
employing Peltier elements¡ Simple structure and high reliability¡ Can easily be built into equipments with
compact and low-vibration design¡ Compatible with wide range of
power supply voltages¡ Conforms to UL specifications, CE-marking.
Peltier-type Thermo-con HEC High-precision chiller
Cooling capacitySeries
300 W
Temperature stability± 0.04 ° C
Cooling method
Peltier-type air cooled
Set temperature range
Cooling capacity Circulating liquidSeries
HED 300 to750 W
Temperature stability
± 0.1 ° C
Cooling method
Peltier-typewatercooled
Set temperature range
10 to 60 ° C
0 to 60 ° C−
Deionizedwater,
Chemical liquids
Peltier-type Thermoelectric Bath INR-244-757
¡ Heat exchanger employs Peltier elements for direct temperature controlof chemical liquids.
¡ Fluoropolymer heat exchanger is suitablefor a wide range of chemical liquids.
¡ Conforms to UL specifications,CE-marking.
Peltier-type Chemical Thermo-con HED Fluoropolymer temperature control equipment for chemical liquids
Cooling capacity Circulating liquidSeries
HEB 140 W
Temperature stability
± 0.1 ° C
Cooling method
Peltier-typewater cooled
Set temperature range
−15 to 60 ° CClear water,Fluorinated
aqueous liquid
¡ High-precision temperature-regulation thermostatic chamber thatemploys Peltier elements
¡ Compact and low vibration¡ Unique agitation method keeps up-down
temperature distribution to a minimum.
Peltier-type Thermoelectric Bath HEB High-precision thermoelectric bath
Cooling capacity Circulating liquidSeries
HRZ 1 to 15 kW
Temperature stability
± 0.1 ° C
Cooling method
Water-cooledrefrigeration
Set temperature range
−20 to 40 ° C
20 to 90 ° C
−20 to 90 ° C
Fluorinated liquid,Clear water,
Deionized water,Ethylene glycol
aqueous solution
Cooling capacity Circulating liquidSeries
HRZ 1.8 to10 kW
Temperature stability
± 0.1 ° C
Cooling method
Water-cooledrefrigeration
Set temperature range Set temperature range
−20 to 90 ° C
Fluorinated liquid,Clear water,
Deionized water,Ethylene glycol
aqueous solution
¡ Proven performance with semiconductor processequipment, with a wide range of features suchas high temperature stability, wide temperaturerange, failure testing, external signal.
¡ All models conform to safety standards.¡ Conforms to UL and SEMI specifications, CE-marking.
Refrigerated Thermo-chiller HRZ
¡ In addition to the state-of-the-art functions of the HRZ series, these modelsemploy a DC inverter compressor to achieve better energy efficiency.
¡ Wide temperature range and cooling capacity range covered by one unit¡ Suited to the short innovation cycle of semiconductor equipment, and
capable of responding flexibly to changes in the process conditions.¡ Conforms to UL and SEMI specifications, CE-marking.
Refrigerated Thermo-chiller HRZ High-performance chiller (High-performance chiller (Built-in inverter)
Thermoelectric Bath
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Equipment Lineup for Physical and Chemical Industry
Cooling capacity Circulating liquidSeries
HEA 22 WTemperature stability
± 0.1
Cooling method
Peltier-type air cooled
Set temperature range
0 to 50 Air