Partner to the Semiconductor and Electronics...

Partner to the Semiconductor

and Electronics Industry

2

Maximum performance with mini-

mal space requirements. Process

reliability from a single source

Concepts and products for maxi-

mum efficiency; compact products

and system solutions from Festo.

An entire product range and range

of services of the highest quality,

ensuring process reliability along

the entire value creation chain as

well as a fast return on investment.

Ideally suited for manufacturing or

processing ICs, whether in wafer

and computer manufacture, watch

and clock production, precision

mechanics or medical technology.

Product range overview

3

Contents Page

Standards-based cylinders 6

Compact cylinders 7

Drives with linear guide and rodless cylinders 10

Electric drives 12

Grippers 14

Vacuum technology 15

Individual valves 16

Valve terminals 17

Proximity switches and sensors 18

Connection technology 20

Compressed air preparation 21

Services 22

The cleanest components for your

clean room

Tested, checked, categorised.

Regardless of whether they are

certified according to US Federal

Standard 209E or ISO 14644-1,

the miniaturised components and

subsystems are suitable for nearly

all clean rooms. Using series pro-

ducts in your clean room helps to

save costs.

ESD? CT? PWIS? No chance!

With ESD protected products and

systems electrostatic discharges

(ESD) can be prevented!

Furthermore, many of the products

are CT-free (free of copper, PTFE

and halogen) and are also free

of paint-wetting impairment

substances. The complete

specifications can be found in

the electronic catalogue or are

available on request.

4

Management level

Actuation

Drives

Field level

Control

Controller

Control level

Proportional valves

Servo-pneumatic

Axis controller

SPC200

Linear drives with

displacement

encoder

Convincing automation concepts

Your task defines our solution.

From management level to the

front-end at production level,

our individualised automation

concepts are the result of optimum

communication and network

expertise, resulting in a portfolio

of products such as fieldbuses or

standard interfaces.

5

Electrical installation concepts

• Centralised

• Decentralised

• On-site

• Hybrid

CPI installation

systems

Stand-alone units

on-site

Servo motor con-

trollers CMMP-AS

Stepper motor con-

trollers CMMS-ST

Motor controllers SFC

Linear drives Semi-rotary drives Handling modules

Valves Decentralised valve

terminals

Valve terminals

on-site

I/O modules

Pneumatic

Toothed belt axes

DGE-ZR

Electric cylinders

DNCE

Electric drives

DMES

Handling axes HME

with linear motor

Servo motors

EMMS-AS

Stepper motors

EMMS-ST

Servo motors

MTR-DCI

Electric

Management system

PLC

(ABB, Allen-Bradley,

Rockwell, Siemens,

etc.)

Robotics controller

CMXR

Axis interface

CPX-CMMX

PLC

CECX

6

Greater safety, more options,

more than the standard requires:

the round cylinder modular system

DSNU. With many variants and

mounting options, with a fast

response and minimal break-away

force – simply an economical

solution.

• Diameter 8 to 63 mm

• Stroke length 10 to 500 mm

• Force 30 to 1,870 N

• Stainless steel design CRDSNU

• Clean room class to 10/ISO4

The standard norm. Profile slots

for integrated cylinder switches.

Compact and sturdy with a wide

range of variants and mounting

options.


• Stroke length 1 to 2,000 mm

• Force 483 to 7,363 N

• Clean room class to 100/ISO 5

Modular system for round cylinders according to DIN ISO 6432

Type DSNU/ESNU/CRDSNU

Standard cylinder modules according to DIN ISO 15552 and VDMA 24562

Type DNC

The first cylinder with non-stick sur-

faces: extremely smooth surface

with an Ra value of 0.6 µm, highly

corrosion resistant and repairable.



• Rod wiper seal material PUR

• NSF certified H1 lubricating

grease, piston rod seal compa-

tible for use with food products

• Clean room class 1,000/ISO 6

Stainless steel round cylinders in clean design

Type CRHD

Standards-based cylinders

Swivel modules

Type DSM/DSM-B

DSM: the compact swivel module

for the smallest installation spaces.

DSM-B with new, precise and robust

cushioning. The positive-locking

mounting ensures a secure hold.

Both have infinite swivel angle

adjustment up to max. 270°.

• DSM: sizes 6 to 10 mm

• DSM-B: sizes 12 to 40 mm

• Torque, 0.15 to 20 Nm

• Operating frequency to 4 Hz


Short-stroke cylinders

Type ADVC/AEVC

The short-stroke cylinder with that

little extra. Needs little space, is very

powerful and has already been

proven thousands of times over.

Mounting hole pattern according to

ISO 6431, diameters from 32 to

100 mm.


• Stroke length 2.5 to 25 mm

• Force 7.5 to 4,712 N




• Force 170 to 1,060 N

•Clean room class to 10/ISO4

Compact standard cylinders

Type ADN

The new and economical standard

in the compact class: standard

cylinder ADNP. Its compact design

makes it perfect even in tight

installation spaces. It is light and

therefore ideally suited for installa-

tion on moving machine parts.

• Piston diameter 10 to 32 mm

• Stroke length 1000 mm

• Operating pressure max. 10 bar

• Temperature range –20 to +80 °C


Compact cylinders

Cylinders

Type DMM

Compact and flexible mounting:

the multi-mount cylinder. Optimally

designed aluminium profile with

numerous mounting options.

Integrated sensor slots for

2 versions of cylinder switches.

8

Cylinders

Compact EZH

The smallest of its kind. Single-

acting and, with a width of

1.5 – 10 mm, extremely slim:

40% less fitting space compared

with round cylinders.

• Piston area 1.5/6.5 to 5/20 mm



• Temperature range 0 to +60 °C

• Ideal for the back-end area,

therefore without classification

Cylinders

Compact EG

The smallest round cylinder. For

exceptionally delicate applications

with high installation density:

from Ø 2.5 mm, single-acting.

Minimal weight from 2 to 20 g.

• Piston diameter 2.5 to 6 mm



• Temperature range +5 to +60 °C

• Ideal for the back-end range,


• Piston diameter 6 to 16 mm



• Temperature range -20 to +80 °C

• Ideal for the back-end area,


Compact cylinders

Cylinders

Compact EGZ

Small but with that little extra:

simply screw in. From Ø 6 mm,

single-acting. Ideal for handling

tasks: the stroke end position can

be varied according to the depth of

engagement of the cylinder.

9

Clamping modules

Type EV

Maximum clamping force, minimum

height. Diaphragm protection and

rapid clamping of sensitive or

slightly uneven components.

• Hermetically sealed


• Diameter 10 x 30 to 20 x 180 mm,

block-shaped


• Force 55 to 1,690 N

• Clean room class 100/ISO 5

Fluidic muscles

Type MAS/DMSP

Simply ingenious – muscles for

automation. Flexible tubing with

aramide fibres in rhomboidal

pattern. Impressively high forces,

absolute tightness and stick-slip

free behaviour.

• Diameter 10, 20, 40 mm

• Nominal length 30 to 9,000 mm

• Force 400 to 4,000 N


10

Drives with linear guide

and rodless cylinders

Guide units

Type DFC

Mini for micro – always there when

things are a little tight. Small and

precise thanks to drive and guide

integration. Many direct mounting

options. With plain or recirculating

ball bearing guides.



• Force 7.5 to 47 N




• Force 68 to 4,712 N


Guide units

Type DFM/DFM-B

Almost unbelievably tough and

excellent guide functionality:

the DFM. The modular system

DFM-B for reliability, flexibility and

resilience, even with high torque

loads.

Twin cylinders

Type DPZC/DPZJ

The slim all-rounder: Guided,

compact and versatile. Offers guide

functions for all small applications.

• Plain or recirculating ball bearing

guides



• Force 34 to 241 N


Mini slides

Type SLT, SLS, SLF

The precise, dynamic mini slide

range: powerful (SLT), slim (SLS)

and flat (SLF). Impressive

cushioning concepts and versatile

adaptation options.

SLT SLS SLF

Ø mm 6 ... 25 6 ... 16 6 ... 16

Stroke mm 10 ... 200 5 ... 30 10 ... 80

Force N 14 ... 590 17 ... 121 17 ... 121


11

Linear drives for the back-end area

Type SLG

Space has been redefined with the

SLG: extremely flat design and with

maximum precision. Simple direct

mounting and minimised total

weight. Optional intermediate

position modules and precision

adjustable end stops.




Mini slides

Type DGSL

The outstanding new slide series!

Unique in many areas: precision,

load capacity, compact design and

easy to install.




• Clamping cartridge/clamping unit

options


Linear drives

Type DGC

Guided force in restricted spaces.

Load capacity, precise, optimal

mounting and installation.

Economical basic design, sturd plain-

bearing guide and precise recircula-

ting ball bearing guide. Optional

2nd slide and intermediate position.


• Stroke length 1 to 5,000 mm

• Force 30 to 1,680 N


12

Electric drives

• Max. stroke 2,000 mm

• Max. speed 0.2 to 1.2 m/s

• Repetition accuracy ±0.02 mm

• Max. feed force 1,600 N

• Size 18 to 63 mm


Highly precise, wonderfully strong

and superbly compact: the

DGE..-SP...KF with an extremely

rigid recirculating ball bearing

guide.

Spindle axes with recirculating ball bearing guide

Type DGE-SP-KF



• Max. feed force 1,500 N

• Size 8 to 63 mm


Extremely compact, precise, very

sturdy and a superb team player.

The recirculating ball bearing guide

makes it perfect for resisting high

forces and torques.

Toothed belt axes with recirculating ball bearing guide

Type DGE-ZR-KF

Electrical axes

Type EGSK/EGSP

Precision embedded in steel:

the electric axes EGSK and EGSP

provide a compact package of

impressive precision, repetition

accuracy and rigidity.

• Size15 ... 46 mm

• Strokes 25 … 800 mm

• Force 15 … 330 N

• Repetition accuracy 0,003 mm

• Ideal for the back-end area

13

Electric piston rod cylinders

Type DNCE

A preassembled system solution

with a choice of dynamic or

economic servo motors. Ball

screw or plain-bearing spindle.

No servicing needed thanks to

lifetime lubrication.

• Sizes 32, 40, 63 mm

• Repetition accuracy

KF: ± 0.2 mm

GF: ± 0.7 mm

• Max. feed force: 1,200 N


More economical, more flexible,

with greater team potential:

the electric drive DMES.

It is characterised by its compact

dimensions with high rated loads

and high mechanical torques.

• Adapted to the motor unit

MTR-DCI with integrated

controller

• Sizes 18, 25, 40, 63 mm


• Feed force up to 3.000 N



Electric drives with trapezoidal lead-screw spindle

Type DMES

Electrical mini slides

Type SLTE

Positioning – precise, reliable

and space-optimised. Controller

included for slow or fast, gentle or

dynamic motion. The SLTE is freely

positionable and has a precise,

rigid guide.

• Sizes 10, 16 mm

• Stroke lengths 50 to 150 mm

• Positioning time for 50 mm

stroke: 400 ms


14

Standard grippers

Type HGD/HGP/HGR/HGW

The gripper range for standard

gripping. Cost-effective and versatile.

• Force of 6.6 to 580 N per

gripper jaw


HGP – parallel grippers

• Size 6 to 35 mm

• Gripping force backup

HGD – three-point grippers


HGR – radial grippers


• 180° gripper jaw opening angle

HGW – angle grippers


• 40° gripper jaw opening angle

Micro grippers

Type HGWM/HGPM

Preferred in all applications

involving very small parts:

extra small dimensions, a real

all-rounder on the factory floor.

• Angle and parallel gripper

• Size 8 to 12 mm

• Stroke compensation

• Versatile mounting options


Precision grippers

Type HGPP

For maximum precision and

flexibility in many areas: the HGPP.

Approx. 10 million cycles without

relubrication means a long service

life is ensured.


• Integratable Hall sensor/sensing

of 3 positions

• Grippers can be mounted from

above or below

• Lightweight thanks to use of

special aluminium


T-slot grippers

Type HGPT

Grippers ideally suited for the harsh

conditions found in mechanical

engineering. Optional re-lubrication

and integrated SM..-10 standard

sensors included.

T-slot grippers HGPT

• Gripping force retention

• Sealing air connection

• Gripping force up to 1,114 N per

gripper jaw


Grippers

15

Swivel/gripper units

Type HGDS

Economical, space-saving drive

combination. Swivel and gripper

functions in a single drive, move-

ment of high effective load, thanks

to optional shock absorbers.

Precise, ball bearing guided

gripping motion.

• 3 sizes: diameter 12, 16, 20 mm

• Swivel angle of 210° can be freely

adjusted

• Monitoring of swivel and gripper

component with standard sensors

SM..-10

• Gripping force per gripper jaw

60 to 180 N


Vacuum grippers

Type ESG

The ESG suction gripper stands for

unlimited modularity. The vacuum

gripper range offers a wide variety

of combinations with a modular

product system containing more

than 5,000 variants – ideally suited

for every application and therefore

extremely economical.

• 6 suction cup shapes

• 15 suction cup dimensions from 2 to

200 mm; 9 oval suction cup sizes

• 6 different suction cup materials

• Numerous suction cup holders with

and without height compensation

• Tubing connections: threaded, push-

in fittings QS, barbed fitting PK


Vacuum generators

Type VADMI

Multi-functional variants VADM...

With and without solenoid valve for

an ejector pulse that increases with

the cycle rate. Optional air saving

circuit for reduced vacuum costs

and filter contamination indicator.

Complete functional unit with vacu-

um generator, valve and silencer.

• Nominal diameter 0.45 to 3 m

• Connection M5, G 1/8, G 1/4, G 3/8

• Solenoid valve, vacuum ON/OFF

• Solenoid valve, ejector pulse

• Integrated silencer

• Integrated filter with contamination

indicator

• Ideal for the back-end area, therefo-

re without classification

Vacuum generators

Type VN, VAD, VADMI

Simply a step ahead: in-line

vacuum generators VN and multi-

functional vacuum variants

VADM... . . For maximum durability

and functionality.

• Decentralised vacuum generation

• Different performance classes

• Different functionalities: e.g.

VADMI with ejector pulse, air

saving function and control signal


(without silencer)

Grippers

Vacuum technology

16

Individual valves

Extremely small, extremely fast,

extremely versatile, extremely light:

MHA1 miniature valves for actuating

compact drives such as for example

for chip picking in the back-end area.

Weight optimised combination of

vacuum and pressure valve on one

connection plate.

• Product weight 30.5 g

• Directly actuated

• Flow rate 45 l/min

• Voltage 24 V DC ± 10%

• Switching times 5 ms

• Pressure -0.9 to 1.5 bar

• Protection class IP40

• Valve function 3/2-WV

closed + open, 5/2-WV

• Standard nominal flow rate

200 l/min Operating pressure

range 1.5 to 8 bar (with external

auxiliary pilot air suitable for

vacuum operation)

• Response times on/off 12/10 ms

• Width 10 or 12

(depending on design)

• Operating voltage 5 VDC, 12 V DC,

24 V DC (each ± 10%)

• Protection class IP 40

• As an individual valve or on an

aluminium manifold strip


Individual valves

Type VG series

Compact and powerful. Designed

for space-saving handling tasks and

everywhere where high component

density is essential. Ideally suited

as a pilot valve for valves and

drives that come into contact with

media.

Fast-switching valves

Type MH2../ MH3../ MH4..

The high-speed champions:

high cycle times, quickly assembly

with integrated QS push-in fittings.

MH2/3/4 fast-switching valves for

shorter and more precise cycle

times; extremely short and repeti-

tion-accurate response times,

e.g. for precision dosing, bonding

or ejecting. Service life at least

500 million switching cycles.

• Width 10, 14, 18 mm

• Flow rate 100, 200, 400 l/min

• Directly actuated

• 3/2-way closed/open, 5/2-way

• Voltage 24 V DC

• Switching times of 2, 3 or 4 ms

• Pressure –0.9 to 8 bar


• Threaded connection or QS fitting


Miniature vacuum valve combination for the back-end range

Type MHA1

17

Valve terminals

Type CPV-SC

Reduced format, optimised flow,

clean design.

• Maximal 16 series sub-base

valves in a fixed grid of 10 mm

• 5/2, 5/2-way double solenoid,

3/2, 2/2-way

• 2 to 16 valve positions

• Pressure range –0.9 to 7 bar

• Flow rate 150 to 170 l/min

• Threaded connection or QS fitting

• Individual connection

• Multi-pin plug connection

• Field bus connection for Profibus

DP, DeviceNet, including CPI

string extension

• CPI installation system


Valve terminals/individual valves

Type CPA-SC

Smart format, optimised flow, clean

design. Modular valve terminal and

individual valves in IP40. Ideally

suited for system mounting.

• Width 10 mm

• 2 to 24 valve positions

• 5/2-way, 5/2-way double solenoid,

5/3-way, 2x 3/2-way, 2x 2/2-way,

1x 3/2-way with external supply



• Individual connection

• Multi-pin plug connection

• Fieldbus connection for Profibus

DP, DeviceNet, including CPI

string extension


Modular valve terminals

Type MPA1/MPA2

Fieldbus terminal, multi-pin

terminal or individual valve in

IP65 – solid-metal valve body and

sub-base.

• Diagnostic messages via fieldbus

• Flexible pressure supply, variable

pressure zones, additional power

supply at any position

• Up to 64 valve positions or

128 solenoid coils



• 2 x 2/2, 2 x 3/2, 5/2, 5/2-way

double solenoid, 5/3-way,

1 x 3/2-way with external supply

• Electrical I/O and fieldbus

connection through modular

electrical terminal type CPX

• Additional electrical power supply

zones for disconnecting power

from the valves

• Manual pressure regulator

• Integrated pressure sensors and

proportional-pressure regulators

VPPM


Valve terminals

18

Proximity switches and sensors

Pressure and vacuum sensors

Type SDE1

All pressure values are continuously

under control with the SDE1

modular system for pressure

measurement, monitoring and

sensing. Thanks to clear menu

prompting using 3 buttons and a

LCD-display it can be put into

operation quickly and without

a user manual.

• Front panel, H-rail or mounting for

D and MS series service units

• Plug connector M8 or M12

• Freely programmable

hysteresis/comparator mode

selectable for relative or

differential pressure

• Quick mounting by simply clicking

or sliding it in



Pressure and vacuum switches

Type SDE5

The SDE5 is the cost-effective

alternative for simple, quick moni-

toring. Intelligent, easy to install

and reliable. It is as effective for

object detection via back pressure

as it is for pressure, regulation and

vacuum detection.

• Selectable output functions

• Minimal assembly times thanks

to QS fittings and M8 plug

connectors or free cable end

• Quick switching-point adjustment

at the touch of a button

• Measuring range -1 to 10 bar



Type SPAB

Cost-effectiveness and high

functionality are combined in the

pressure and vacuum sensors

SPAB. In spite of their compact size,

all values can be easily read off a

two-part, multi-coloured display.

Festo’s uniform pressure sensor

display and operating concept

enables simple and quick opera-

tion.

• Pressure supply ports with GPT,

NPT, RPT threads

• Measuring ranges: -1 ... 1,

0 ... 10 bar

• Electrical connection M8 or cable

• Analogue and digital outputs


19


Type SDE3

Designed for sensing relative and

differential pressure; optionally

with two independent pressure

switches plus two-colour LCD

display in a single unit.

• Space-saving and suitable for

TPM

• Intuitive operator prompting and

fast teach-option

• Numeric pressure display or bar

graphs for dynamic processes

• Quickest H-rail and front panel

mounting

• Code lock prevents tampering

while enabling the settings to be

read


Proximity sensors

Type SMT-/SME-8M

One for all: universal sensing for

all Festo drive units. Efficient and

secure fitting in the slot. Vibration,

shock and tensile forces applied

to the cable will neither loosen the

sensor nor lead to unreliable

functioning.

• Contact-less or contacting

sensing

• Voltage: 24 V AC/DC

• Plug M5, M8, M12, open end


Position transmitters

Type SMAT

It opens new areas of application

for pneumatic cylinders. The

cylinder piston position over a

range of 50 mm is indicated via an

analogue, proportional output

signal. Its integrated OOR (out of

range) sensor indicates when the

piston leaves the sensing range.

• Process monitoring/measure-

ment: quality, wear, process

monitoring

• Object detection: condition, posi-

tion, acceptable/unacceptable

separation

• Object recording: clamping,

pressing


20

Fittings

Type CK, CN

Classic, quick and reliable – always

the right fitting.

• CK quick connectors available in

aluminium or polyamide for

tubing outside diameters from

3 to 13 mm.

• CN barbed fittings for tubing

inside diameters of 2 – 6 mm

• Ideal for use in control cabinets


Quick connectors

Type QS

Classic, quick and reliable – always

the right fitting.

QS fittings for when speed is of the

essence. Simply push on and it’s

ready to go. With anti-static variants

QS-CM and QS every task is covered.

Mini included.

• For tubing outside Ø of 3

to 16 mm

• Over 1,000 variants

• Thread types G, R and M, M3

to G 1/2

• Pressure range 0 to 10 bar

• Temperature range -10 to +60 °C


Compressed air tubing

Always the right tubing, always the

optimum flow resistance. Machine

compressed air distribution made

easy. CT-free and antistatic variants.

• Polyurethane, polyamide, poly-

ethylene and PVC

• Various colours, spiral tubing

• Diameters 3, 4, 6, 8, 10, 12,

16 mm

• Optionally ESD-protected, food

industry compatible, flame-

retardant, hydrolysis or acid

resistant


Connection technology

21

• Connection M5 to G 1/8

• Flow rate of up to 500 l/min

• Grid dimension 25 mm


Service units

Type D-Micro

The name of the game is program-

ming. D-Micro. Extremely small,

highly robust and ready to install

for Festo plug and work®.

Compressed air preparation

23

From engineering through to

operation

Services and products – a classic

trend is the systematic reduction of

various process costs, from design

right through to system operation.

When considering the overall costs

of a system on the basis of TCO –

Total Cost of Ownership – this

offers enormous saving potential.

A significant point is that the actual

technological costs are minor

when compared to the design,

procurement, logistics and system

operating costs.

Festo’s service and product

philosophy is based on a

permanent analysis of the value

creation chain of different types of

customers. Using this knowledge,

Festo then develops services for

all the individual links within a

value creation chain.

Services

Faster

during the development

process ...

during the procurement

process ...

during the assembly

process ...

during the operational

process.

Festo – everything from a single

source

One partner for all current automa-

tion tasks requiring pneumatic and

electrical components. That has its

advantages.

Innovative: 2,800 patents,

80 innovations per year, 1 objec-

tive: the benefit to you.

Systematic: Systematically open for

individual solutions from a single

source.

Present: Worldwide, in person and

online. 56 companies in 176 coun-

tries.

Productive: When it comes to

installation, logistics and service.

23,000 products with a long service

life as standard.

See for yourself under

www.festo.com

en

2

00

8/0

9

Festo AG & Co. KG

P.O. Box

73726 Esslingen

Ruiter Strasse 82

73734 Esslingen

Germany

Phone +49 711 347-0

Fax +49 711 347-2144

[email protected]

www.festo.com

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