Operation of the S4700 FESEM
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Transcript of Operation of the S4700 FESEM
Operation of the S4700 FESEM
Quality SEM analysis is a matter of three factors
60% Sample- Preparation or type of sample30% Knowledge of the operator10% Type of instrument
Hitachi S4700 Instrument was installed in August of
1999 Has EDS, Backscatter, EBSD
capabilities High resolution imaging, up to
500,000X Low voltage imaging, down to 0.5kV
Basic Operation of the S4700
Each time you use the scope you need to fill the LN2 trap to the side of the scope.
Degas not Degauss If you are the first to
use the scope then you must “Degas” the lower aperture
This is to clean the lower aperture.
Flip the switch located in the left of the instrument panel on the column down from “Heating” to “DEGAS”
Software
Software
You will be given a user account and you You will be given a user account and you will set up a password that will be will set up a password that will be changed each time you use the scope. changed each time you use the scope. The initial logo should appear once you The initial logo should appear once you log inlog inIf it does not then open the SEM software If it does not then open the SEM software from the FE-SEM icon on the desktopfrom the FE-SEM icon on the desktop
This is the operating window of the 4700 software.
All operation can be done with the mouse or with the help of the small control panel.
Log Book
The microscope operating conditions will be written in a log book. These include the readings of the ion pumps, Ip1, Ip2, Ip3, the Vext, Ie, Vacc, date, user name, advisor and flash information if applicable
Set the HV using the HV control window and the drop down Vacc menu. HV’s between 0.5-30 kV are available
kV selection for a sample should be based on the type of analysisSamples that are non-conductors such as ceramics, glass, some oxides should be run at lower kV due to charging effects, which can cause problems with imaging.
Samples that are conductors such as metals can be run at higher kVs but might not be necessary.
Check the sample to see if the desired results are there at lower kVs. There is no need to blast the sample if the desired results can be obtained at a lower voltage.
Remember the 2X rule for doing EDS on samples.
Insert Sample into Sample Exchange chamber
Once the sample has been correctly prepped, it should be screwed to the end of the insertion rod.
DO NOT BEND THE INSERTION ROD WHEN MOVING THE SAMPLE!
Chamber Scope The S4700 is fitted with in
infrared camera. This allows the user to see inside the sample chamber and avoid bumping into detectors when inserting samples and moving the stage
Chamber scope is turned on prior to inserting the sample into the sample chamber
On switch
Sample Chamber When the S.E.C. light
on the front panel turns green open MV1 on the sample exchange door and allow the sample to be pulled into the sample chamber by the vacuum, watch on the chamber scope.
Column Setup As the sample
chamber pumps down, use the Column Setup for the type of SEM examination
The S4700 has 6 operation modes for the column
Ultra High Resolution
Analysis
Normal
Long WD
Magnetic
UHRA
Working distance – True working distance and can be set.
Condenser lens 1 - Default is 5, smaller numbers are bigger spot size, range is 1-16.
DeGauss- To degauss the column
Select Detector – Mixed for analysis and imaging
Upper for high resolution
Lower for analysis and samples that have slight charging
HV On Turn on HV in the HV window when
the sample chamber is at L X 10-3 Check Ip3, if it is 1 X 10-5 then DO
NOT OPERATE Note the Vacc, Ie and Vext and put in
Log book
Imaging Beam alignment Select scan speed Locate area of interest Go to High Mag mode Aperture alignment Stigmate Final Focus Brightness and contrast Capture image
Beam alignment Focus the image Click on “Beam
alignment” in the “Alignment” window
Use the left knobs on control panel to adjust the beam in the middle of the target.
Will have to been done multiple times throughout operation.
Alignment window
Beam align button
Beam
Move the beam to the center of the target
Can be done in the grid window using the mouse
Select scan speed 6 scan speeds Fast 1 and 2 – Frame averaging Can
be set in the “Signal Processing Window”
Slow 1-4 – are raster scan in seconds and are preset
5 is a reduced area scan used to aid in focusing in a smaller area
Scan Speed buttons
1 2 1 2 3 4 5
Signal Processing window
Locate area of interest Orient the sample
using 5 axis stageX, Y, Z, Tilt, and rotation
Move the sample to locate an area of interest, with trackball, click and drag, stage arrows, change x, y, z, tilt, and rotate
Trackball Mouse
Click and drag either the stage or the beam.
This button for the beam. Blue hand cursor
Stage arrows
This button for the stage. Yellow hand cursor
Stage Control
Change x and y positions
Rotate
Z position
Tilt
Go to High Mag mode Use the Low Mag mode to locate an area of
interest Low Mag mode is 30-10,000x and can not be
used for EDS Use High Mag mode for EDS and imaging High Mag mode is 250x to 500,000x Not all samples can be imaged at 500,000x Typical magnification is 25,000x to 250,000x
Aperture alignment Check the beam alignment Increase the mag, best done at the highest
resolution Click on the “Aperture Align” in the
“Alignment” window Use X and Y alignment knobs on control
panel Good alignment has little or no X or Y
movement. Image should pulse or rotate
Low Mag/High Mag mode
Aperture Alignment
Stigmate Refocus the image after Aperture alignment If the image skews out of focus it is out of
sigmation. Use knobs on the left of the control panel Y Stigmate first, X Stigmate, fine focus then
check Y and X stigmation again Gross movement of the image indicates the
sigmators need alignment Use the Alignment window and proceed with
sigmation alignment in the same manner as aperture alignment.
Stigmation alignment
Final Focus Select a slow scan speed to increase
resolution Refocus image
Brightness and contrast After focus do an “Auto Brightness
and Contrast” Brightness and Contrast can also be
adjusted manually with the “Brightness and Contrast” monitor button
Auto Brightness and Contrast Button Brightness
and Contrast Monitor Button
Capture Image Select image capture options in the “Capture
Image Window” Capture an image with the “M” button on the
main window. Image will be temporarily saved to a
“Capture Image Window” “Capture Image Window” will appear, use the
“Disk Icon” to save the image. All Images are to be saved on the D drive At completion images should be moved to the
internet or recorded on a CD.
Capture Resolution-Change the size of the captured image
Capture speed of the image- Frame averaging or slow scanning speed
Capture Image WindowRed “Saved”, image has been saved
Red number in upper left corner is the active image
Yellow number in the upper left corner is the next window to be occupied
Disk Icon for saving the image
Saved
Use the SEM Data Manager to view your images
Blurred Images Beam Alignement Aperture Alignement Stigmantion Coarse Focus Fine Focus Building Vibrations Stray Electric Fields Tip Noise
Hints on Stigmation Check Stigmation Alignment Focus best possible image with fine
focus with no “Skewing” Y stigmate X stigmate Fine Focus
Tip Noise Flash Tip Open the HV Window Select “Flash” Click on Flash and watch the Ie number
quickly appear in the window Note this number in the Log Book DO NOT operate if the Vext has changed 1.2
more than the most recent Flash Ie
Ie and Vext Ie changes rapidly after flashing “SET” a new Vext as the Ie drops Best working conditions are at an Ie
of >9 If Ie goes up to 12 STOP operation
and flash
Ie can be changed, most common is 10 micro Amps
Flashing button
The “On” button becomes a “SET” Button when HV is on