NEW

One-Shot 3D MeasurementInstan t 3D measurement over a l a rge a rea

One-shot 3D Measuring MacroscopeVR-3000 Series

Significant time and skill are required in order to produce repeatable measurements.

Conventional Measurement DevicesWith conventional equipment, only a single line can be measured, making it challenging and time consuming to analyse an entire sample.

Measurement time: Several hours

2

Simply place the sample on the stage and click Measure.The setup is user-independent, enabling anyone to obtain repeatable and reliable results.

One-shot 3D Measuring MacroscopeThe entire surface area can be measured at once, allowing for accurate measurement of the intended region.One-shot 3D measurements over a wide area can be performed instantly.

Measurement time:

4From secondsExample: Depression in a battery

NEW

3

One-shot 3D Measuring Macroscope

VR-3000 Series

NEW

Here’s the difference!

One-shot surface measurement of 3D shapesallows measurements such as height, angles and radii to be taken simultaneously.

Example: Stand for handheld device

One-Shot 3D MeasurementAllows non-contact 3D measurement of surfaces. Analyse difficult-to-reach areas that could not be measured with conventional systems.

Conventional measurement devices

Shapes measured with points and linesIt is difficult to measure structures with large height differences or shapes with steep angles.

4

Here’s the difference!

In addition to visual inspection, multiple measurements can be made to calculate roughness and waviness.

No. Measurement name Measurement value Unit

1 Evaluated length 1200 μm

2 Wz 34.3 μm

3 Wa 10.5 μm

Conventional measurement devices

Limited viewing areaA small field-of-view makes it difficult to measure curvature and irregularity over wide areas.

One-Shot 3D MeasurementAllows 3D measurement of wide areas in seconds, including measurement of curvature and small changes in surface texture.

Conventional field

Example: Irregularity and unevenness in coating

Max. height

Max.-Min.: 34.3 μm

Min. height

5

Inspecting components now requires 3D data

KEYENCE combined the advanced optical design of our digital microscopes with the high-speed, high-accuracy

measurement and 3D technology of our displacement gauges to develop a macroscope that completes instant

3D measurements.

Some things can only be seen with 3D measurement.

Introducing the One-shot 3D Measuring Macroscope

Internal structure of a watch

6

The 3 Main Benefits of One-shot 3D Measurement

P.8

Precise 3D measurement of a wide field with a single click

Innovative optical technology and hardware

User independent 3D measurements

Place and push 3D measurement and measurement assistance functions P.12

A wide range of easy 3D analysis and reporting tools

Extensive measurement and imaging capabilities P.16

One-shot 3D Measuring Macroscope VR-3000 Series

NEW

7

Precise 3D measurement of a wide fieldThe world’s first one-shot measurement algorithm

8

TMT (Telecentric Multi-Triangulation) Algorithm

We combined three, double-telecentric lenses with the multiple triangulation technology of our displacement gauges to create a unique algorithm for high-speed, high-accuracy 3D measurement.

Real Colour 3D Technology

Our technology produces true colour 3D images.

Red, green and blue light are shone from a dedicated

real colour lighting unit. This light are captured by

a new, high-accuracy CMOS sensor and images

obtained from each separate colour are compiled

to create a full-colour image. This process captures

accurate and vivid colour information that cannot be

obtained with a standard colour camera and white

light.

XYZ Traceability

The VR-3000 Series allows any user to obtain highly

reliable measurements based on an international-

standard traceability system. A calibration gauge with

inspection results and a

calibration certificate are

included with the system.

This allows calibration to

be performed on-site by

anyone.

Measurement Principle (right)

Bands of light from the transmitter lens are scattered across the surface of the object being

measured. When the reflected light is observed from another angle (receiver lens), height

differences on the object make the bands of light appear distorted. An image of these

distortions is taken using a CMOS sensor, and triangulation calculations are performed to

measure the height and position at each point.

World’s First

National Institute of Advanced Industrial Science and Technology (AIST)

JCSS accredited organisation

Gauge block

Height difference measurement device

Calibration block

National Institute of Advanced Industrial Science and Technology (AIST)

JCSS accredited organisation

Standard Scale

Coordinate measurement equipment

Calibration chart

National standard National standard

X-YZ

One-shot 3D AlgorithmWe combined our TMT one-shot algorithm for high-accuracy, true colour measurements with our high resolution 3D technology to create the world’s first algorithm for instant 3D measurement.

CMOS

Receiver lens

Light source

Transmitter lens

Object being measured

9

High accuracy with a telecentric lens

Feature size is unchanged as the lens moves in the Z

When measuring objects with height differences, it is important

that the field-of-view remains constant as the lens moves in

the Z direction. By using a telecentric lens, the VR-3000 can

accurately measure height differences up to ±5 mm.

Minimal distortion throughout the field-of-view

A telecentric lens with minimal distortion throughout the

entire viewing area is essential for one-shot measurement of

areas as large as 3 cm.

Industry’s first

Precise one-shot 3D measurement over a large areaAn innovative combination of optical technology and hardware

Triple telecentric lensesTo achieve high-accuracy 3D measurement, it is crucial that the transmitter

and receiver lenses are made in such a way to minimise distortion, and that

changes in the distance between the object and lens do not alter the size of the

image.

The VR-3000 contains a total of 3 wide telecentric lenses, used in combination

with the industry’s largest CMOS. The advanced optical design allows high-

accuracy one-shot 3D measurement of areas up to 3 cm.

Contact-type measurement device

Installation areaA

3 size

VR-3000 Series3-dimensional measurement

device

When viewingobjectfrom above

Standardlens

Telecentriclens

Standard camera lensDistortion in periphery of lens

VR-3000 Series Minimal distortion throughout entire field

Minimal distortion over the entire measurement area.

Space-saving design requires minimal operating areaThe small footprint allows the unit to be

placed anywhere that has access to a 100 VAC

power outlet.

10

Accurate imaging

No vibration isolation required

High-accuracy CMOS sensorThe industry’s largest high-accuracy CMOS is used, allowing data to be obtained with minimal noise for high-resolution image capture.

Specially designed vibration-proof rubberThe VR-3000 is made of a vibration-proof material with over four times the vibration prevention of conventional materials. The material absorbs a wide range of vibration from low to high frequencies, allowing for steady imaging even at high magnifications.

Real Colour Light Unit The VR-3000 has a light source that emits red, green and blue light for true colour reproduction. The combination of an optical system and optical fibres minimises inaccuracies when composing the colours.

Designed to withstand large amounts of vibrationStrength analysis was used to create a highly-rigid frame and remove the need for vibration isolation equipment like an air table. Below is a diagram of the strength analysis on the casing on the unit.

11

User-independent measurementsPlace and push 3D measurement

Conventional Measurement DevicesUser Measurement results

Person A 0.34

Person B 0.29

Person C 0.35

Person X 0.31

Measurement length

Measurement pitch

Measurement speed

Brightness adjustment

Measurement range

2. Probe selectionDifferent contact probes need to be

selected according to the sample or

purpose of measurement.

1. Positioning Adjustments such as sample positioning

and stage alignment need to be

completed by the user.

3. Parameter selectionVarious measurement conditions need to be set.

Various adjustments need to be made by the user, meaning that measurement results may be inconsistent.

12

u

Just place the sampleand click one button.

One-shot 3D Measuring Macroscope

Without AALG With AALG

User Measurement results

Person A 0.35

Person B 0.35

Person C 0.35

Person X 0.35

AALG (Advanced Auto Light & Gain) algorithm allows accurate data to be obtainedThe transmission method of the projected light and the receiver sensitivity

are automatically adjusted to the optimal conditions for the sample being

measured, meaning that users only need to click the Measure button. This

prevents adjustments made by a user from causing inconsistencies when

gathering 3D data.

Industry’s first

Measurements are completed instantly with just one click of the Measure button. Repeatable and accurate results can be obtained by anyone.

13

u

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User-independent measurementsVarious measurement assistance functions are available to eliminate inconsistencies between users

Measurement assistance tools identify edges and centres of different shapes

Measurement baselines are created based on a surface area to improve measurement accuracy

Extensive measurement assistance tools make it possible to measure shapes by automatically establishing baselines such as top, bottom or intersection points. With contact type systems, inaccuracies tend to occur with these measurements. Now, with the measurement assist tools, these measurements can be made accurately and easily.

It can be difficult to accurately set the proper baseline when using a linear incline correction, which can lead to large errors in measurement. For example, when measuring two surfaces that are 10 mm apart, a measurement error of nearly 20 μm will occur with an incline of just 0.1 degrees. The VR-3000 has several functions for determining the baseline based on a surface area, allowing for accurate setting of the baseline and reducing measurement errors.

Case: Axial direction of a round bar (measuring wear of axles, etc.)

Linear: Standard setting

Example: Height difference of 0.35 mm set

Surface: Standard setting

Case: Angle between two surfaces (folding angle of pressed sheet metal, etc.)

Contact-type

Upward slope

Downward slope

Fixed

Contact-type

With assistance tools

With assistance tools

Contact-type

Results are greatly affected by the slope of the sample

VR-3000

A base level can be set for wide surfaces, preventing them from being affected by the slope of the sample.

Height difference: 0.31 mm

Height difference: 0.35 mm

14

u

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Template function for completing repeat measurements on similar parts

Eliminate variations during repeated or comparative measurements

All settings and measurement specifications for an image are stored in a template that can be applied to other samples instantly. The automatic position correction function also makes it possible to complete measurements at the same location on multiple samples, even when the samples are not placed in the same orientation.

Repeatable comparative measurement *Requires optional VR-H1P Analyser expansion module

Automatic position correction regardless of sample orientation

The 3D comparative view displays the images of two samples side-by-side and quantifies differences in structure, including height and cross-sectional area.

2. Use this template to automatically measure the same location on samples B, C and D.1. Complete a profile measurement for sample A and save a template.

Automatic position

correction function

Visualise and quantify differences in the same area

A

B

C

D

15

A wide range of easy 3D analysis tools Easily complete 3D analysis on any sample

Measure height, width, angle and radius

X, Y and Z measurement

Measurements such as height, width, cross-sectional area, angle and radius can be made by simply pointing and clicking across the desired area.

Profile measurement

16

Measuring difference between Sample A and Sample B

Measure the average height difference, volume, surface area and area-to-surface area ratio of any area selected on the screen.

3D visual comparison and comparative measurement

Average height difference, volume and surface area measurement

Comparative measurement

Place separately captured images side-by-side and manipulate the 3D displays simultaneously.

The 3D comparison view displays the images of two samples side-by-side and quantifies differences found between the two shapes, including height and cross-sectional area.

Measure average height difference

Measurement results

3D visual comparison Comparative measurement

Measure volume and surface area

Low

17

It is possible to visualise curvature with a height-colour map on a 3D image and quantify the curvature of a sample. Curvature and waviness parameters will be automatically calculated by the system.

Roughness parameters including Ra and Rz can be measured for the intended area whilst viewing either a 2D or 3D image.

Various parameters, such as Sa and Sz can be measured for a selected area in accordance with ISO 25178. Differences in appearance and texture can be quantified easily.

Line and surface roughness measurements

Curvature, linear roughness (ISO4287:1997), surface roughness (ISO 25178)The VR-3000 is equipped with a variety of metrology functions for quantifying roughness and surface deformations.

Measure line roughness Measure surface roughness

Measuring curvature and distortion

18

For those wanting to measure a larger area in 3D, a stitching module

allows for 3D measurement of an area up to 270 mm.

Wide-field 3D Measurement

*Requires VR-H1J Stitching module (optional)

Stitching

19

A wide variety of easy-to-use 3D analysis and reporting toolsOne-click measurement and simple report creation

Gather and analyse 3D data

By simply placing the sample on the stage and pressing the “Measure” button, 3D data will be collected in just a matter of seconds. Once the data has been obtained, measurement and analysis can be performed in the Analyser software.

A function guide is included for data analysis - eliminating the need for training!

Intuitive software design makes analysis incredibly easy. The user can simply move their mouse over each measurement icon in the function guide to see a brief description of the measurement type, eliminating confusion when completing measurements.

STEP1

Data capture

STEP2

Measurement

20

CAD compatible

3D data collected by the VR-3000 can be saved as an .stp file and output to a variety of CAD programmes.After completing a measurement,

a report can be generated instantly with a single click

Formatted reports can be created and saved easily, eliminating the trouble of making a report from scratch for each sample. The Template function (see page 15) can also automatically perform measurements and create reports over the same location on a sample.

STEP3

Report

21

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u

The VR-3000 is designed with unique telecentric lenses created by advanced optical technology developed through 20 years of microscope design experience. The high-quality lenses provide large depth-of-field observation with minimal distortion.

Telecentric lenses with a large depth-of-field

Extended depth-of-field function

Telecentric lenses combined with the KEYENCE depth composition function allows for sharp focus of the entire surface without the need for any manual manipulation of the part. This function produces fully-focused images of samples, even when working at high magnification, where depth-of-field is limited.

An easy-to-use microscope for everyday inspection

Large depth-of-field

Conventional microscope

Conventional microscope

VR-3000 Connector 12x

VR-3000 PCB 12x

22

u

High-definition imaging

9 megapixel 3 CMOS camera

Observation that surpasses the limits of optics

16-bit HDR function

Capture high-quality microscope images

Extensive 2D measurement functions

Various measurements, such as distance, angle and radius, can be taken simply by clicking the desired points on an image. An edge extraction function and measurement assistance tools also eliminate human error, allowing for consistent and repeatable measurements between different users.

The VR-3000 is able to capture up to 16 bits of red, green and blue colour data to perform significantly more accurate imaging of a sample than what can be captured with traditional 8-bit devices.

Samples can be imaged under magnifications ranging from 12x to 160x. High resolution images of 9 megapixels can be captured and saved by simply pushing the Capture button.

9 megapixel 3 CMOS cameraRed, green and blue data are

obtained for each pixel, allowing

for clear observation with excellent

colour reproduction.

Reflective samples cannot be imaged clearly due to the limited levels of colour that can be captured.

Details in low contrast samples cannot be seen.

With one click the system will capture additional colour data by varying the shutter speed

By increasing the levels of colour gradation, samples with bright spots or dark spots can be imaged clearly.

Low contrast samples can be imaged clearly.

256 times more levels of colour than a conventional deviceE f f e c t sP r o b l e m s

16-bit (65,536-colour)

HDR function

8-bit(256-colour)

Conventional

method

Without HDR With HDR Resin surface 40x

23

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Captures information that traditional profile measurement tools cannot

Captures data that could not be seen with a limited viewing area

Linear measurement device

• Contact-type measurement takes a long time even when measuring a single

line.

• In some cases, the intended area, such as a BGA peak, is not correctly measured.

• Two areas of interest that are far apart cannot be measured simultaneously,

and stitching them together takes a long time.

• Positioning the sample for accurate measurement is extremely difficult.

With One-Shot 3DThe 3D shapes of all BGAs are captured simultaneously, meaning that in addition to seeing the peak, the entire BGA shape can be seen instantly.

With One-Shot 3DA wide area can be measured in one 3D image. Surface preparation, like adjusting for tilt, can be done with a single click.

u

Case: BGA height

Case: Surface height of substrate

Example applications

24

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Captures data that cannot be obtained with point measurement systems

Captures data that cannot be seen with traditional microscopes

3D measurement device

• Curvature can only be measured at selected points.

• Figures cannot be seen visually.

Optical microscope

• The location of air leakage cannot be seen, even when viewing under high

magnification.

• Small changes in shape cannot be quantified.

With One-Shot 3DHeight differences are displayed in 3D with colour coding, providing a visual representation of curvature. It is also possible to instantly measure the highest and lowest points on a surface that is several centimetres wide.

With One-Shot 3D3D data is obtained and height differences are colour coded even for shapes with minute height differences, ensuring that no surface changes are missed during inspection. Targeted areas can also be quantified to create specifications for acceptable or defective parts.

!-------Red point: point being measured

u

Case: Curvature of a die-casting

Case: Depressions in O-rings

25

14.1

34470

150

496

48428

147

328.4

91 109310

290

171

290

343310150

14.1

34470

496

48

147

150428

344

228.5

(77)

414

195

117 26

25.3

8480

182

8 × M6 Depth 10

228

32812597 224

35

35

35180R

Optional Items

External Dimensions

OP-87708 100 mm Spacer

Head: VR-3050 Head: VR-3100

Controller: VR-3000K

OP-87709 Tilt Stage

OP-87717 Manual Slider for Image Stitching

Inserting this 100 mm-high spacer between the measurement section and the base allows you to measure objects up to 188 mm in height.

Install this on the XY stage to observe and measure objects from any angle without having to manipulate the object by hand. The stage is designed so that the sample securely adheres to the stage when positioned at an angle.

For those wanting to measure a wider area, a stitching module (optional) allows for an area of up to 270 mm to be measured.

188 mm

26

Unit: mm

System Configuration Diagram

Specifications

OP-87709 tilt stage (optional)*

OP-87715 XYθ stage (optional)*

OP-87710 calibration standard (standard item)

*Comes standard with the VR-3100.

OP-87708 100 mm spacer (optional)

OP-87717 manual slider for stitching (optional)

VR-H1VE Viewer software

VR-H1AE Analyser software

VR-H1P Analyser expansion module (optional)

VR-H1J Stitching module (optional)

ModelController VR-3000KHead VR-3100 VR-3050

Wide-field mode High magnification mode Wide-field mode

Magnification on a 15" monitor

12x 25x 38x 50x 40x 80x 120x 160x 12x 25x 38x 50x

Field-of-viewHorizontal: mm 24.0 12.0 8.0 6.0 7.6 3.8 2.5 1.9 24.0 12.0 8.0 6.0

Vertical: mm 18.0 9.0 6.0 4.5 5.7 2.9 1.9 1.4 18.0 9.0 6.0 4.5

Zoom 1x to 4x

Measurable height*1 10 mm (±5 mm) 1 mm (±0.5 mm) 10 mm (±5 mm)

Standard scale*2 0.1 μm 0.5 μm

Repeatability*3Height measurement 0.5 μm

Width measurement 1 μm 0.5 μm 1 μm

Working distance 75 mm

Image receiving element 4 megapixel monochrome CMOS

Transmitter lens Double telecentric lens x2

Receiver lens Double telecentric lens

Light sourcesObservation light source LED ring light (red, green, blue) LED ring light (white)

Measurement light source White LED

Image size 1024 x 768 pix, 2048 x 1536 pix

Stage

XY stroke Up to 270 mm*4 (default 70 mm*5)

Z stroke 90 mm (electric) 88 mm (manual)

Rotation ±90° –

Tilt Over ±30° –

Data processing Dedicated PC specified by KEYENCE (OS: Windows 7)*6

Power sourceSupply voltage 100 to 240 VAC 50/60 Hz

Power consumption 150 VA

Environmental resistance

Ambient temperature for usage 15 to 30°C

Relative humidity for usage 35 to 80%, no condensation

WeightController 3.8 kg

Head 21.5 kg (weight of measurement unit: 10.8 kg)

*1 Low range ±5 mm and high range ±0.5 mm around the focal point position. *2 Height measurement resolution. *3 When the KEYENCE VR calibration gauge is measured with average height difference mode.*4 When using the OP-87717 manual slider for stitching. *5 The VR-3050 requires the XYθ stage (OP-87715, sold separately).*6 Windows 7 Professional and Ultimate.

VR-3050 VR-3100 Control PC

Head

ControllerVR-3000K Monitor (optional)

27

WW1-1013

www.keyence.comSAFETY INFORMATIONPlease read the instruction manual carefully in order to safely operate any KEYENCE product.

Please visit:

AUSTRIAPhone: +43 22 36-3782 66-0 Fax: +43 22 36-3782 66-30BELGIUMPhone: +32 1 528 1222 Fax: +32 1 520 1623BRAZILPhone: +55-11-3045-4011 Fax: +55-11-3045-5219CANADAPhone: +1-905-366-7655 Fax: +1-905-366-1122CHINAPhone: +86-21-68757500 Fax: +86-21-68757550CZECH REPUBLICPhone: +420 222 191 483 Fax: +420 222 191 505FRANCEPhone: +33 1 56 37 78 00 Fax: +33 1 56 37 78 01

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KEYENCE CORPORATION1-3-14, Higashi-Nakajima, Higashi-Yodogawa-ku, Osaka, 533-8555, Japan Phone: +81-6-6379-2211

Copyright (c) 2013 KEYENCE CORPORATION. All rights reserved. VR3-WW-C-GB 1073-2 600B75 Printed in JapanThe information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice.

* 6 0 0 B 7 5 *

All-in-one imaging and measurement system

Digital MicroscopeVHX-2000

NEW

NEW

Providing non-contact profile and roughness measurements on nearly any material

3D Laser Scanning MicroscopeVK-X100/X200

❙ 200× - 24000× magnification❙ 0.5 nanometre Z-axis resolution❙ High-resolution, large depth-of-field observation❙ Profile and roughness measurements with zero sample preparation❙ Measures thickness and uniformity of clear layers❙ Acquires data on angles approaching 90 degrees

❙ Large depth-of-field: 20x larger than conventional optics❙ Free-angle observation for 360 degree inspection❙ Observe, record and measure - all with a single system❙ 0.1x - 5000x magnification range with brightfield, darkfield, transmitted, DIC and polarised illumination❙ View low-contrast and highly-reflective targets❙ 2D & 3D Image Stitching expands viewing area up to 200 times