OML - Optical Microsystems Laboratory Electrical Engineering...
Transcript of OML - Optical Microsystems Laboratory Electrical Engineering...
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Koc University Hakan Ürey
Koç University – Istanbul
Director of OML - Optical Microsystems Laboratory
Electrical Engineering Department
5mm
1mm2 Microlens Array on 2D MEMS Stage (2009)
Micro Spectrometers and Laser Scanners on Silicon
Wafer
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Koc University
Koç University, Istanbul, Turkey • Private University established by Vehbi Koç Foundation
in 1993 • Among the World's top 250 universities by THE (Times
Higher Education) rankings in 2012-2013. • ~4,000 undergraduate and ~500 graduate students
(>300 international exchange students); • Among the top Universities in Turkey based on scholarly
research articles and faculty awards
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Koc University Prof. Dr. Hakan Ürey Dr. Necmettin Kilinc
Sven Holmström (Sr. Res. Eng.) Erhan Ermek (Res. Eng.)
Berker Hüsam (Res. Eng.) Selim Ölçer (Tech.)
Research Focus: • MEMS/NEMS sensors and actuators, Micro-optics,
• 2D/3D Display and Imaging Systems
Graduate Students Kaan Aksit
Aref Mostafazadeh Ulas Adiyan
Onur Cakmak Osman Eldeş
Kivanc Hedili Basarbatu Can Ziya Isıksacan
Özgecan Karabulut Uğur Aygün
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Koc University Selected Patents
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Koc University Awards and Invited Presentations
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Koc University Projects
Funding -Industrial • Microvision, Aselsan,
Fraunhofer IPMS, OPET, Inventram
EC Projects • FP6 Networks (NEMO,
3DTV, MINOS) • FP7 STREP projects
(MEMFIS, HELIUM3D) • FP7 IAPP Project • FET-Open Project
TÜBİTAK (National Funding) • 5 projects completed • 2 projects on-going
• 3D displays (3D laser TV, 3D head-worn projection displays, 3D light-field display using LED arrays);
• Pico-projectors and Laser scanners (high-performance electromagnetic, electrostatic, and piezoelectric actuated record-performance MEMS scanners; FR4 based dynamic zoom barcode scanner);
• Micro-optics (exit pupil expanders, heads-up-display screens, Gabor super lenses);
• Endoscopic imaging (Microlens on MEMS stage based laser scanner);
• Portable Micro-Spectrometer (MEMS-based Fourier transform infrared spectrometer, Lamellar grating interferometers, FR4 based interferometers);
• Thermal imaging (MEMS bimaterial sensor array; CMOS optical readout IC; 3D CMOS integration);
• Portable Nano-Biosensor (MEMS sensor array for parallel multi-analyte screening for portable point of care diagnostics).
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Koc University
Patent Licensing Agreements (consists a portfolio of about 25 patents)
• Microvision Inc. (USA): MEMS and FR4 scanners, 3D displays, novel micro-optical screen.
• Fraunhofer IPMS (DE): MEMS spectrometers
• Aselsan Inc. (TR): Thermal imaging sensor array
• Inventram Inc. (TR): Biosensors for point-of-care diagnostics of multiple diseases.
• Opet Inc. (TR): Tagging and identification of functional fluids for vehicles
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Koc University
MEMS SCANNERS AND PICO-PROJECTOR APPLICATIONS
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Koc University
1st Laser Scanning Display Product NOMAD à 2004
Red monochrome display with SVGA resolution Blue and green lasers were not yet commercial
(direct green LD is available only recently)
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Koc University Pico Projectors (Sponsor Microvision Inc.)
• Optics and MEMS scanners for laser projectors
– >10 patents licensed to industry; – Sponsor: Microvision (USA)
1st Pico Projector product by Microvision -‐ 2009
Latest Pico-‐projector product by Microvision -‐2011
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Koc University MEMS Scanners
MEMS scanners for pico-‐projectors and MEMS
spectrometers on Si wafer.
• Single coil bimagnetic actuation • WVGA Resolution 850 x 480 pixels
Yalcinkaya et.al. JMEMS,2006
• 300um Silicon wafer • Structure formed with DRIE • Front Side:
• Electroplated multi-turn coils • PZR sensors on both flexures • Al mirror
• Backside KOH etched to reduce weight
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Koc University Piezoelectric Actuated Fast-‐Axis Scanner
• 1.4mm round mirror, • 24V opera=on. • 40deg op=cal scan angle • 40kHz resonance, • Also demonstrated PZT
angle sensor. Record Performance!
Baran et.al. IEEE MEMS Conference, 2012
Collabora=on with Paul Muralt Group, EPFL
• 125um SOI • PZT: 2um solgel deposi=on
Desired Mode
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Koc University
Resonant MEMS Scanner Comparison for Dynamic Displays at 60 fps
=Dis
play
Hor
izon
tal
Res
olut
ion
=Display Vertical Resolution
• Record performance obtained • Piezo and EM actuation preferred • Future Goal: Full HD resolution capable fast and slow axis scanners
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Koc University Ice Hockey Using PicoP, Camera, and Retros
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Koc University
SCREEN TECHNOLOGIES FOR NOVEL DISPLAYS
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Koc University
Another Application of See-Through Screen Windshield Embedded HUD
PicoP
projector
Built into windshield
Requires varying pitch and varying tilt angle microlenses in 2D array form to form a large eyebox
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Koc University
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Koc University
Demo in a car Camera focused on the screen
See-through Screens For HUDs (Sponsor: Microvision Inc.)
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Koc University
M. Hedili, SPIE Photonics Europe Conf., April 2012
Transparent displays using embedded lenses
Partially reflective coating
Viewing window
Cover glass
Epoxy
Thin metal dielectric mirror as the reflective surface and a narrow band-pass filter
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Koc University
Novel See-Through Screen and Transparent Display Concept
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Koc University Novel 3D Displays Using Pico-Projectors
Auto-‐stereoscopic 3D Display
Mixed-‐polarizaNon Stereoscopic 3D Display
Aksit et al, IEEE-JDT 2012
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Koc University
3D Display PicoP Çalışması İle Kaan Akşit ve Osman Eldeş Ağustos 2012’de IMID Konferansında Merck Award Kazandılar
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Koc University 3D Head-Worn Projection Display and Retro Screen
Hakan Urey, New Project Starting Jan 2013
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Koc University 3D Laser TV
Sponsor: FP7, HELIUM3D project Completed in 2011 Partners: DMU, UCL, HHI, Philips, Barco, TuE
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Koc University Exit Pupil Expanders for Head-Worn Displays
θ o FOV
Bi-axial MEMS
Scanner
Gaussian Beam from point
light source
Dlens
Diffractive Exit Pupil Expander (EPE) (NA expander)
Exit pupil
Ocular (viewing optics)
Viewer’s eye
Intermediate Image Plane
Expanded exit pupil
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Koc University
FR4 BASED MICRO-OPTO-MECHATRONIC SYSTEMS
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Koc University
FR4 as a Micro-Opto-Mechatronic Platform (using standard PCB technology)
FR4 Board with EM actuated scanners
Sponsors: Microvision Inc (USA) NEMO (EC FP6 project)
LED / Waveguide Integrated with FR4 Scanner
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Koc University Barcode Reader with Extended Depth of Focus
First barcode reader system with dynamic
focusing ability! Result of 1.5 yrs
development together with NEST, India
1st Proto
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Koc University
MEMS FT SPECTROMETER
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Koc University Commonly Used Michelson Configura5on
LGI Configura5on
IR Source
IR Detector
Sample Plane
ReferenceLaser
-‐1st
0th
1stPD
MEMS device
Ellipticreflectors
IR Source
IR Detector
Sample Plane
Reference Laser
PD
Ellipticreflector
Stationary Mirror
Moving Mirror
Beam Splitter
Compensation Plate
Lamellar Grating Interferometer (LGI) Based Fourier Transform Spectrometer Advantages
ü LGI eliminates ü reference mirror ü beam spliSer ü compansa=on plate ü vacuum packaging of MEMS ü interference alignment efforts
ü LGI is Achroma=c ü LGI is less suscep=ble to vibra=on noise ü LGI is smaller, more robust and easier to
assemble X LGI useful range is limited by Talbot
distance
Lamellar Gra5ng Interferometer (LGI) Advantages over Michelson Interferometer:
O. Ferhanoglu et al., OpNcs Express, 2009.
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Koc University MEMS LGI Device
• Micro Fourier Transform Spectrometer – Patent licensed to Fraunhofer – IPMS (Dresden, DE) – Sponsor: FP7 / MEMFIS project Partners: Bruker, FhG-IPMS, VIGO, RHE, CTR, Sopra
MEMS Diffraction
Grating
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Koc University
Transmission Spectra Comparison: Commercial Desktop FTIR vs. Our Compact FTIR
Achieved spectral resolution of 20-30cm-1 in 2.5um-16um range One of the best reported performance with MEMS spectrometers
Poor SNR at >3,000cm-1
Nearly all absorption peaks are resolved
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Koc University
MOEMS UNCOOLED THERMAL IMAGING
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Koc University MEMS Thermal Imaging
• MEMS Thermal Imaging Sensor Array – Patent pending – Sponsor: ASELSAN (TR) – Bimaterial bending due to IR hear – Sensed using interferometric
optical readout • Nano-Biosensor for POC diagnostics
– Sponsor: TÜBİTAK
Infrared Camera Pixels50um
200 400 600 800 1000
100
200
300
400
500
600
700
0
200
400
600
800
1000
1200
1400
1600
1800
2000
Hermetic sealingby laser welding
Vacuum pipe
IR window (BaF2)
Package developed with VTT
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Koc University
BIOSENSOR FOR POC DIAGNOSTICS
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Koc University Portable Biosensor for POC Diagnostics
In-vitro multianalyte screening device – Patent pending – Sponsor: TÜBİTAK, Inventram – Using MEMS and optical readout
Tested MDC <0.1 ng/ml; Standard ELISA MDC 0.2ng/ml
Robust portable system
Multiplexed detection 64 sensor parallel
readout PTL 2008; Biosensors and Bioelectronics 2010 and 2011 papers
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Koc University Summary
Micro-optics and MEMS is a powerful combination with many applications: • MEMS scanners and pico-projectors • Special Augmented Reality (AR) screens • 3D displays • Wearable displays • FR4 as a micro-opto-mechatronic platform • Spectrometers • Thermal imaging • Biosensors for multiplexed detection
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Koc University Contact Details
Prof. Dr. Hakan Urey Koç University Electrical Engineering Sariyer, 34450 Istanbul – TURKEY
Office Phone: +90 212 338 1474 Lab Phone: +90 212 338-1772 E-mail: [email protected] Web: http://mems.ku.edu.tr