O-Ring Vacuum Sealing - Zatkoff Seals & Packings · O-Ring Vacuum Sealing ORD 5705B Table of...

Catalog 5705B USA

O-RingVacuum Sealing

ISO 9001 Certified

WARNING

!

FAILURE, IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS AND/OR SYSTEMSDESCRIBED HEREIN OR RELATED ITEMS CAN CAUSE DEATH, PERSONAL INJURY AND

PROPERTY DAMAGE.

This document and other information from Parker Hannifin Corporation, its subsidiaries and authorizeddistributors provide product and/or system options for further investigation by users having technicalexpertise. It is important that the user analyze all aspects of the proposed application and review theinformation concerning the product or system in the current product catalog. Due to the variety of poten-tial operating conditions and applications for these products and/or systems, the user, through his or herown analysis and testing, is solely responsible for making the final selection of the products and systemsand assuring that all performance, safety and warning requirements are met.

The products describes herein, including without limitation, product features, specifications, designs,availability and pricing, are subject to change by Parker Hannifin and its subsidiaries at any time withoutnotice.

WarrantyTHIS WARRANTY COMPRISES THE SOLE AND ENTIRE WARRANTY PERTAINING TO ITEMS PROVIDED HEREUNDER. SELLER MAKESNO OTHER WARRANTY, GUARANTEE, OR REPRESENTATION OF ANY KIND WHATSOEVER. ALL OTHER WARRANTIES, INCLUDING BUTNOT LIMITED TO, MERCHANT ABILITY AND FITNESS FOR PURPOSE, WHETHER EXPRESSED, IMPLIED, OR ARISING BY OPERATION OFLAW, TRADE USAGE, OR COURSE OF DEALING ARE HEREBY DISCLAIMED. NOTWITHSTANDING THE FOREGOING, THERE ARE NOWARRANTIES WHATSOEVER ON ITEMS BUILT OR ACQUIRED WHOLLY OR PARTIALLY, TO BUYER’S DESIGNS OR SPECIFICATIONS.

Limitation Of Remedy: SELLER’S LIABILITY ARISING FROM OR IN ANY WAY CONNECTED WITH THE ITEMS SOLD OR THIS CONTRACTSHALL BE LIMITED EXCLUSIVELY TO REPAIR OR REPLACEMENT OF THE ITEMS SOLD OR REFUND OF THE PURCHASE PRICE PAID BYBUYER, AT SELLER’S SOLE OPTION. IN NO EVENT SHALL SELLER BE LIABLE FOR ANY INCIDENTAL, CONSEQUENTIAL OR SPECIALDAMAGES OF ANY KIND OR NATURE WHATSOEVER, INCLUDING BUT NOT LIMITED TO LOST PROFITS ARISING FROM OR IN ANY WAYCONNECTED WITH THIS AGREEMENT OR ITEMS SOLD HEREUNDER, WHETHER ALLEGED TO ARISE FROM BREACH OF CONTRACT,EXPRESSED OR IMPLIED WARRANTY, OR IN TORT, INCLUDING WITHOUT LIMITATION, NEGLIGENCE, FAILURE TO WARN OR STRICTLIABILITY.

Copyright © 1998, Parker Hannifin Corporation, Cleveland, OH. All Rights Reserved

O-Ring Seals for Vacuum Applications

O-Ring Vacuum SealingORD 5705B

Table of Contents PageIntroduction to vacuum sealing 1Weight loss of compounds in vacuum 3Leak rates for vacuum seals 3Effect of squeeze & lubricant in vacuum sealing 4Gas permeability rates for common elastomers 4Designing for high-temperature applications 5Face seal glands for vacuum service 6Dovetail grooves for vacuum service 7Half-dovetail grooves for vacuum service 8Static seal glands for vacuum service 9Reciprocating seal glands for vacuum service 10Parker O-Ring general information 11

O-Ring Vacuum Sealing

Build With The Best!Zatkoff Seals & PackingsFarmington Hills, MI 48335(248) 478-2400 Fax: (248) 478-3392

1


Introduction to Vacuum Sealing

There has been much discussion recently about the bestmeans for providing a good vacuum O-ring seal. Butylelastomers have long been the preferred material forsealing vacuum applications. The primary reason forthis popularity is butyl’s excellent gas permeationresistance. This vital property, together with the fact thatbutyl compounds have low outgassing and weight losscharacteristics, good physical properties, a temperaturerange from - 54°C to +124°C (- 65°F to +225°F) and goodmoisture resistance, has established butyl materials in thispreferred position.

Other Environmental Factors The need for specialenvironmental or service considerations in addition tobasic low permeability will often reduce the potential toutilize butyl. Requirements such as high temperature,radiation resistance, or certain combinations of fluidmedia may take careful study to ascertain the propermaterial recommendation. For instance, high tempera-ture or acid resistance would require the use of a fluoro-carbon material, which has a temperature range of -26°C to +205°C (-15°F to +400°F) while still retaining itsproperties of low outgassing and low permeation. Wherehot water, steam, or radiation is present, an ethylenepropylene material should be considered. Ethylenepropylene has a service temperature range of -- 54°C to+149°C (65°F to +300°F). Some Parker ethylenepropylene compounds, however, can withstand exposureup to +260°C (+500°F) in steam.

Deep Vacuum Weight Loss is particularly important inmany space and other vacuum applications whereoptical surfaces and electrical contact surfaces mustremain clean to serve their intended purpose. Somerubber compounds contain small quantities of oil or otheringredients that become mobile under high vacuumconditions and may deposit a thin film on all the sur-rounding surfaces. Table I (see page 3) indicates theweight loss of several Parker Seal compounds due toexposure to vacuum environments.

Where sensitive surfaces are involved, the higher weightloss compounds should be avoided in favor of the lowweight loss materials. The small amount of volatilematerial contained in low weight loss Parker Sealcompounds is primarily water vapor and is not likely todeposit on nearby critical surfaces.

When the properties of a high weight loss compound arerequired in a vacuum sealing application, some customershave the O-rings vacuum baked to drive off any residualvolatile components before the parts are assembled. Beaware however, that this procedure may shrink the O-ringsand modify their low temperature resistance.

O-Ring Squeeze and Effects of Lubrication A majorvacuum sealing consideration is the rate of flow of gasesfrom the pressure side to the vacuum side of an elastomericO-ring. This flow rate depends to a great extent on how theO-ring is used. One butyl compound has been tested inface-type O-ring seals, using grooves that provide 15%,30%, and 50% squeeze. It will be seen from the resultsplotted in Figure I (see page 3) that increasing the squeezereduced the leak rate dramatically. Lubricating the O-ringwith a high vacuum grease also reduced the leakage of thelight (15%) squeeze rings significantly, but the effect of thegrease was considerably less at 30% squeeze, while at 50%squeeze the beneficial effect of the grease was not detect-able. Several other compounds were tested in this way withsimilar results.

Increased O-ring squeeze reduces flow rate by increasingthe length of the physical path the gas has to travel (width ofring) and decreasing the area available to the entry of thegas (groove depth). Increasing squeeze also tends to forcethe elastomer into any small imperfections or surface finishmarks in the mating metal surfaces, and thus preventsleakage around the seal. The application of vacuum greasechanges the surface tension and may reduce the rate ofsurface absorption.

It is therefore recommended that dovetail or face type O-ring grooves be used whenever possible for static vacuumseals, employing a suitable vacuum grease as a sealinglubricant and surface coating in addition to a heavy squeezeon the O-ring cross-section. When a radial vacuum seal isrequired, or when a heavy squeeze is not possible for somedesign reason, it becomes even more important to use asuitable vacuum grease.

Although a heavy squeeze is necessary to reduce leakageto an absolute minimum in an O-ring vacuum seal, this typeof design may require heavy flange construction. Further-more, extreme squeeze values may crush the O-ring.However, when an extra-shallow gland is desired in order toincrease the squeeze, it must be made wide enough toaccomodate the full O-ring volume.

For most purposes, the gland design shown for vacuum andgases in Design Chart I (see page 6) is a reasonablecompromise in a face seal situation. The squeeze recom-mended in this design chart, however, is sufficiently heavythat a male or female gland assembly with the samedimensions may be very difficult to assemble. For thesesituations, O-ring grooves in accordance with thestandard static seal glands found in Design Chart IV (seepage 9) may be more suitable.

Introduction

Zatkoff Seals & PackingsFarmington Hills, MI 48335(248) 478-2400 Fax: (248) 478-3392



2

Avoid havingtool marks

perpendicularto the O-ringsealing line.

This creates abuilt-in leak

path.

The ideal surface finishfor any vacuum seal flange

has a circular layO-ring Vacuum Seal

Dovetail & Half-dovetail Grooves It is often necessaryto provide some means for retaining an O-ring in a faceseal groove during assembly and maintenance. Anundercut or “dovetail” groove has proven effective inmany applications to keep the O-ring in place. A dovetailgroove, however, is expensive to machine and thusshould be used only when absolutely necessary.

It should be noted that although this type of gland hasbeen used successfully, it is generally not recommended.The inherent characteristics of the groove design limitsthe amount of void area. Therefore, normally acceptabletolerance extremes, wide service temperature ranges,and fluid media which cause high swell of the elastomerare conditions which very often cannot be accommo-dated by a dovetail groove. Design Charts II & III (see pp7-8) provide dimensional recommendations for full andhalf-dovetail vacuum seal O-ring grooves.

Dynamic Vacuum Sealing There is very little dataavailable on dynamic vacuum seals, but reasonably lowleak rates have been reported using two O-rings sealsdesigned according to the standard radial dynamicdesign dimensions for reciprocating seals which areshown in Design Chart V (see page 10). In sealing gasesand vacuum, it is quite feasible to use two O-ring seals inseparate grooves. (In reciprocating hydraulic applica-tions, however, such redundant seals are not recom-mended because of the danger of creating a pressuretrap between the two seals.)

Gland Surface Finishes for Vacuum Sealing ServiceSurface roughness of gland surfaces is more critical insealing pressurized gases or vacuum than it is forliquids, because a gas will find its way through extremelyminute passages. Therefore, surfaces against which anO-ring must seal should have a surface finish valuesmoother than usual. Surface finishes of 16 rms arerecommended, with care being taken to insure that thereare no machine or tool marks perpendicular to the sealas shown in the illustration below.

Vacuum Leak Rates To determine the approximateleak rate for a vacuum seal, use the “Leak Rate Approxi-mation” method. The leak rate of a gas through an O-ring seal may be roughly approximated when thepermeability of the gas through the particular elastomeris known for the temperature at which the seal mustfunction.

The following formula is useful for this approximation:

L = .7FDPQ(1-S)2 where:

L = Approximate leak rate of the seal, std. cc/sec.

F = Permeability rate of the gas through the elastomer atthe anticipated operating temperature. Std cc cm/cm2

sec bar (Permeability rates for helium, hydrogen, andcarbon dioxide through some representative Parkercompounds are shown in Table II on page 4).

D = Inside diameter of the O-ring, inches.

P = Pressure differential across the seal, Ib/in2.

Q = Factor depending on the percent squeeze andwhether the O-ring is lubricated or dry. (From Figure ll)

S = Percent squeeze on the O-ring cross section ex-pressed as a decimal. (i.e. for 20% squeeze, S = .20)

This formula provides only a rough order of magnitudeapproximation because permeability varies betweencompounds in the same polymer family, and because itis based on the assumption that:

1. The cross-section of a squeezed O-ring is rectangular.

2. The cross-sectional area of a squeezed O-ring is thesame as its area in the free condition.

3. The permeability rate of a gas through an O-ring isproportional to the pressure differential across the seal.

Note: These assumptions are not entirely accurate.

For convenience, the formula contains mixed units. Itwas set up this way because in the United States, O-ringdiameters are usually given in inches, and pressures inpounds per square inch, while permeability figures areusually shown in metric units. The .7 factor providesdimensional homogeneity.

Introduction

3


Test Samples: Approximately .075” thickTime: 336 hours (two weeks)Vacuum Level: Approximately 1 x 10-6 torrTemperature: Ambient - approximately 21°C (70°F)

Polymer Percent Polymer Percent Type Weight Loss Type WeightLoss

Butyl .18 Nitrile 1.06Neoprene .13 Nitrile 3.45Ethylene propylene .39 Polyurethane 1.29Ethylene propylene .92 Silicone .03Ethylene propylene .76 Silicone .31Fluorosilicone .28 Fluorocarbon .07Fluorosilicone .25 Fluorocarbon .09

0

1

2

3

4

5

6

7

8

9

10

15 30 50

Test Sample: O-ring I.D.= 4.850”, W= .070”Compound: ButylPressure Differential: 60 psiTemperature: 25°C (77°F)

A variation of plus or minus 50% from the predicted valueshould be anticipated to allow for limitations in the accuracyof test equipment, available standards and variations be-tween samples tested.

Squeeze - Percent

Figure 1 O-Ring Leak Rate - Dry vs Lubricated

Table I Weight Loss of Elastomer Materials in Vacuum

Dry

Lubricated withDow Corning DC11

Vacuum Grease

Hel

ium

Lea

k R

ate

cc/s

ec/li

near

inch

x 1

07

Note: Varying weight loss figures within the same polymer family represent different formulationsor compounds made from that base polymer.

Weight Loss & Leak Rate


4


2.0

1.8

1.6

1.4

1.2

1.0

0.8

0.6

0.4

0.2

0.010 20 30 40 50

Percent Squeeze

Fact

or Q

Dry Ring

Base Permeability x 10 -8

Polymer cc cm/cm 2 sec. bar

Helium Hydrogen Carbon Dioxide

ButylFluorocarbonFluorosiliconeNeopreneNitrilePolyacrylateSiliconeEthylene propylenePerfluorocarbon

Permeability rates listed above are for standard elastomers when tested with gases and temperatures as indicated.n/a = no data currently available.

Figure II Effect of Squeeze and Lubricant on O-Ring Leak Rate

Table II Gas Permeability Rates

Lubricated Ringusing DC11

Vacuum Grease

6.5 @ 77°F12.7 @ 77°F

143.0 @ 77°F 6.5 @ 77°F8.0 @ 77°F

16.3 @ 77°F238.0 @ 77°F19.7 @ 77°F23.8 @ 68°F

16.1 @ 95°F160.0 @ 200°F

n/a180 .0 @ 100°F 21.2 @ 100°F 49.6 @ 100°F1010.0 @ 103°F 111.0 @ 104°F

n/a

n/an/a

444.0 @ 79°F9.98 @ 72°F47.7 @ 86°F

n/a2280.0 @ 77°F

n/a5.77 @ 68°F

Vacuum Squeeze & Gas Permeability

Parker elastomer seals are used in manyspecialized vacuum applications fromlaser pumps to semiconductor produc-tion.


Thermal ExpansionThe thermal expansion coefficient of perfluorinated (FFKM)elastomers is much higher than that of conventional sealmaterials like nitrile (NBR) or fluorocarbon (FKM). When designing a perfluorinated O-ring seal gland forhigh-temperature service, it is important to take intoconsideration the potential effect of thermal expansionand incorporate extra capacity in the gland cavity. The forces generated by excessive elastomer expan-sion in a confined space (gland) can severely damagethe O-ring seal, and warp or distort the metal retainerand fasteners of the sealed assembly. Figure III illustrates the relative volume change ofseveral different elastomers and, for comparison, steel.Note that the volumetric expansion of perfluorinatedrubber is about 22% when taken from room temperatureto +250°C (+482°F). In such a case, the gland fill of the seal assemblyshould not exceed 75% at room temperature to allow forthermal expansion and thus avoid generation of exces-sive internal forces which could result in O-ring extrusionand/or damage to mating parts.


Designing f or high temperatureapplications

Design Recommendations forHigh Temperature Applications

Finite Element Analysis (FEA)Finite Element Analysis or (FEA) is a computer modelingprocess used to calculate strain and stress forces of amechanical structure. These forces may be generated byexternal mechanical loading which induces internalstress as well as internal thermal loading which has thesame effect when the O-ring is confined within its gland. FEA modeling uses a “mesh” of small elements asshown in (a). For each element, equilibrium conditions arethen established relative to all other contacting elements.

Figure IV illustrates an FEA plot of a Parofluor O-ringcross-section shown in:

(a) its original uncompressed state.(b) after installation at room temperature.(c) at elevated temperature of +250° C (+482°F).

Note the extreme amount of volumetric expansion dueto thermal stressing of the perfluorinated material.

Figure IV Radial tension developed due tothermal expansion in FFKM (Parofluor)

The finer (smaller) the mesh of elements defining thestructure to be examined, the more accurate the analysiswill be. On the other hand, the calculation time increasesdramatically with the smaller, more numerous elements. Parker Seal was a pioneer in developing FEA techniquesfor use with true elastomeric materials. This analyticaltechnique is now widely used to simulate high temperaturecompression set and other elastomer behaviors in develop-ing advanced seal geometry as well as new gland designs.

(a)FFKM without deformation @ 20°C (b)FFKM @ 20°C after installation (c)FFKM @ 250C°

5

1.00e-01 -2.320e+00 -4.740e+00 -7.160e+00 -9.580e+00 -1.200e+01 -1.110e+00 -3.530e+00 -5.950e+00 -8.370e+00 -1.079e+01

50° 150°

10%

25%

250°

20%

200°

15%

5%○○○○○○○○○○○○○○○○○○○○○○

FKM

Parofluor

NBR

Steel

Temperature (°C)

Expansion (%

)

100°

Figure III Relative Volume Changedue to thermal expansion

30%


6

DESIGN CHART FOR O-RINGVACUUM FACE SEAL GLANDSFOR EXTERNAL VACUUMDimension the groove by itsoutside diameter (HO) and width:HO = mean O.D. of O-ringTolerance = Minus 1% of MeanO.D., but not more than -.060”


➤

➤

➤FOR INTERNAL VACUUMDimension the groove by itsinside diameter (HI) and width:HI = mean I.D. of O-ringTolerance = Plus 1% of MeanI.D., but not more than +.060”

.003 Max.

W .005 Max.

WW ➤

➤

➤

➤

➤

➤

➤

➤

➤

➤W

I.D.

Section W-W

L

G

R

16

16

32

32

Break cornersapprox. .005” Rad.➤

➤0° to 5°

(Typical)

➤

➤

➤

➤

Gland Detail

Groove Depth(= Gland Depth)

➤

➤

➤L

G

Vacuum Face Seal Glands

004 .070 .050 .013 19 .084 .005through 1/16 ±.003 to to to to to

050 .054 .023 32 .089 .015


178 .080 .032 30 .125 .015


284 .107 .042 30 .164 .025


395 .162 .063 30 .244 .035


475 .211 .080 29 .314 .035

.375 .276 .082 22 .419 .030Special 3/8 ±.007 to to to to to

.286 .108 28 .424 .045

.500 .370 .112 22 .560 .030Special 1/2 ±.008 to to to to to

.380 .138 27 .565 .045

Design Chart I For O-Ring Vacuum Face Seal GlandsThese dimensions are intended primarily for face type O-ring seals and low temperature applications.

O-Ring W L G RSize Cross Section Gland Squeeze Groove Groove

AS568A- Nominal Actual Depth Actual % Width Radius


7


DESIGN CHART FORDOVETAIL GROOVES FOR VACUUM SERVICE

Dovetail Grooves for Vacuum Service

O-Ring W L G R R 1Size Cross Section Gland Squeeze Gland

AS568A- Nominal Actual Depth % Width

004 .070 .050 .055through 1/16 ±.003 to 27 to .005 1/64

050 .052 .059

102 .103 .081 .083through 3/32 ±.003 to 21 to .010 1/64

178 .083 .087

201 .139 .111 .113through 1/8 ±.004 to 20 to .010 1/32

222 .113 .117

309 .210 .171 .171through 3/16 ±.005 to 18 to .015 1/32

349 .173 .175

425 .275 .231 .231through 1/4 ±.006 to 16 to .015 1/16

460 .234 .235

.375 .315 .315Special 3/8 ±.007 to 16 to .020 3/32

.319 .319

Design Chart II For O-Ring Vacuum Dovetail Grooves

Radius “R” is CRITICAL. Insufficient radius will potentially cause damage to the O-ring during installation, whileexcessive radius may contribute to extrusion.

➤

➤

➤

➤

➤

Mean Groove Diametercoincides with Mean

O-Ring Diameter

66°

L

R1

G

➤

➤

R

➤

➤

NOTE:These design recommendations require metal-to-metal contact. In special applications, for example in the semiconductor industry, deviation from theserecommendations may be necessary. When designing with ParofluorTM elastomers, one should take into consideration that perfluorinated elastomers mayrequire more squeeze than an FKM material to obtain optimum sealing performance. To increase squeeze, modifications of the design recommendations shownbelow are necessary.

➤


8


DESIGN CHART FORHALF-DOVETAIL GROOVES FOR VACUUM SERVICE

Half-dovetail Grooves for Vacuum Service

O-Ring W L G R R 1Size Cross Section Gland Squeeze Gland

AS568A- Nominal Actual Depth % Width

004 .070 .052 .064through 1/16 ±.003 to 25 to .005 1/64

050 .054 .066

102 .103 .083 .095through 3/32 ±.003 to 19 to .010 1/64

178 .085 .097

201 .139 .113 .124through 1/8 ±.004 to 18 to .010 1/32

222 .115 .128

309 .210 .173 .171through 3/16 ±.005 to 17 to .015 1/32

349 .176 .175

425 .275 .234 .255through 1/4 ±.006 to 15 to .015 1/16

460 .238 .257

.375 .319 .350Special 3/8 ±.007 to 14 to .020 3/32

.323 .358

Design Chart III For O-ring Vacuum Half-dovetail grooves

Radius “R” is CRITICAL. Insufficient radius will potentially cause damage to the O-ring during installation, whileexcessive radius may contribute to extrusion.

➤

➤

R1

➤

➤66°

L

R➤

➤

➤

G

Mean Groove Diametercoincides with Mean

O-Ring Diameter

➤

➤

➤

NOTE:These design recommendations require metal-to-metal contact. In special applications, for example in the semiconductor industry, deviation from theserecommendations may be necessary. When designing with ParofluorTM elastomers, one should take into consideration that perfluorinated elastomers mayrequire more squeeze than an FKM material to obtain optimum sealing performance. To increase squeeze, modifications of the design recommendations shownbelow are necessary.

➤


O-Ring W L E G R MAX.Size Cross Section Gland Squeeze Diametral Groove Groove *Eccen-

AS568A- Nominal Actual Depth Actual % Clearance Width Radius tricity

004 .070 .050 .015 22 .002 .093 .005through 1/16 ±.003 to to to to to to .002

050 .052 .023 32 .005 .098 .015


178 .083 .025 24 .005 .145 .015


284 .113 .032 23 .006 .192 .025


395 .173 .045 21 .006 .286 .035


475 .229 .055 20 .007 .380 .035

9


DESIGN CHART FORO-RING STATIC VACUUM SEAL GLANDS

Design Chart IV For O-Ring Static Vacuum Seal Glands

L

G

R

16

32

32

➤

➤0° to 5°(Typical) ➤

➤➤

➤

➤Gland Detail

.003 Max.

W .005 Max.

WW ➤

➤

➤

➤

➤

➤

➤

➤

➤

➤

➤

➤W

I.D.

Section W-W

1/2 E➤

➤ ➤

Male Gland Female Gland➤

➤

16

➤ ➤

F

Groove Depth

1/2 E

Break cornersapprox. .005” Rad.

* Total indicator reading between groove and adjacent bearing surface.

Static Vacuum Seal Glands

➤

1/2 E


O-Ring W L E G R MAX.Size Cross Section Gland Squeeze Diametral Groove Groove *Eccen-

AS568A- Nominal Actual Depth Actual % Clearance Width Radius tricity


012 .057 .018 25 .005 .098 .015


116 .090 .018 17 .005 .145 .015


222 .123 .022 16 .006 .192 .025


349 .188 .030 14 .006 .286 .035


460 .240 .044 16 .007 .380 .035

10


DESIGN CHART FORRECIPROCATING VACUUM PACKING GLANDS

Design Chart V For Reciprocating O-Ring Vacuum Packing Glands

L

G

R

16

32

32

➤

➤0° to 5°(Typical)

➤➤

➤

➤

F

Gland Detail

.003 Max.

W .005 Max.

WW ➤

➤

➤

➤

➤

➤

➤

➤

➤

➤

➤

➤W

I.D.

Section W-W

16

Break cornersapprox. .005” Rad.

➤➤

➤1/2 E

Reciprocating Vacuum Seal Glands

* Total indicator reading between groove and adjacent bearing surface.

➤ ➤

➤

➤

➤➤

PistonGroove

Dia.

Cylinder Bore Dia. Rod Bore Dia.Rod Gland Groove I.D.

Rod O.D.Piston O.D.

=Groove Depth(Ref.)

➤

Rod Glands

➤

Piston Glands


11

Notes:

O-Rings Seals for Vacuum Applications

Parker Seal has developed a Windows based softwareprogram which will assist the O-ring designer and user toselect the appropriateO-ring material andrecommend propergland dimensions forall types of O-ringapplications rangingfrom traditional staticand dynamic O-ringsseals for hydraulicand pneumaticservice to vacuumseals.

The inPHorm O-

Parker inPHorm for O-Rings

**Windows is a Trademark of Microsoft Corporation*inPHorm is a Trademark of Parker Hannifin Corporation, Cleveland, OH

To order any Parker O-Ring, contact your nearest Au-thorized Parker Seal Distributor. To obtain the addressand telephone number of a Parker Seal Distributor nearyou, call1-800-C-PARKER or visit our web site atwww.parker.com.

How to Or der Parker O-Rings

Ring Design and Material Selection Software containsa complete listing of over 950 fluids and their compatibilitywith various Parker O-Ring Compounds. In addition, O-ring materials qualified to ASTM, SAE and various MIL-Specs are covered. The program will calculate groove di-mensions, squeeze, gland fill and other data for a widerange of O-ring sizes in both standard AS568A sizes aswell as metric. The inPHorm O-Ring Design and Mate-rial Selection Software is available from your local ParkerSeal Distributor.


Offer Of SaleThe items described in this document are hereby offered for sale at prices to be

established lay Parker Hannifin Corporation, Its subsidiaries and its authorizeddistributors. Thin offer and its acceptance by any customer (“Buyer”) shall be

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in material or workmanship for a period of 365 days from the date of shipment to Buyer, or

2,000 hours of use, whichever expires first. THIS WARRANTY COMPRISESTHE SOLE AND ENTIRE WARRANTY PERTAINING TO ITEMSPROVIDED HEREUNDER. SELLER MAKES NO OTHER WAR-RANTY, GUARANTEE, OR REPRESENTATION OF ANY KINDWHATSOEVER. ALL OTHER WARRANTIES, INCLUDING BUTNOT LIMITEDTO, MERCHANTIBILITY AND FITNESS FOR PUR-POSE, WHETHER EXPRESS, IMPLIED, OR ARISING BY OPERA-TION OF LAW, TRADE USAGE, OR COURSE OF DEALING AREHEREBY DISCLAIMED. NOTWITHSTANDING THE FOREGOING,THERE ARE NO WARRANTIES WHATSOEVER ON ITEMS BUILTOR ACQUIRED WHOLLY OR PARTIALLY, TO BUYERS DESIGNSOR SPECIFICATIONS.

5. Limitation Of Remedy: SELLER’S LIABILITY ARISING FROMOR IN ANY WAY CONNECTED WITH THE ITEMS SOLD OR THISCONTRACT SHALL SE LIMITED EXCLUSIVELY TO REPAIR ORREPLACEMENT OF THE ITEMS SOLD OR REFUND OF THEPURCHASE PRICE PAID BY BUYER, AT SELLER’S SOLE OP-TION. IN NO EVENT SHALL SELLER BE LIABLE FOR ANYINCIDENTAL, CONSEQUENTIAL OR SPECIAL DAMAGES OF ANYKIND OR NATURE WHATSOEVER, INCLUDING BUT NOT LIM-ITED TO LOST PROFITS ARISING FROM OR IN ANY WAY CON-NECTED WITH THIS AGREEMENT OR ITEMS SOLD HEREUNDERWHETHER, ALLEGED TO ARISE FROM BREACH OF CONTRACT,EXPRESS OR IMPLIED WARRANTY, OR IN TORT, INCLUDINGWITHOUT LIMITATION, NEGLIGENCE, FAILURE TO WARN ORSTRICT LIABILITY.

6. Changes, Reschedules and Cancellations: Buyer may request to modify

the designs or specifications for the items sold hereunder as well as the quantities and

delivery dates thereof, or may request to cancel all or part of this order, however, no such

requested modification or cancellation shall become part of the contract between Buyer and

Seller unless accepted by Seller in an amendment to this Agreement. Acceptance of any

such requested modification or cancellation shall be at Seller’s discretion, and shall be upon

such terms and conditions as Seller may require.

7. Special Tooling: A tooling charge may be imposed for any special tooling,

including without limitation, dies, fixtures, molds and patterns, as required to manufacture

items sold pursuant to this contract. Such special tooling shall be and remain Seller’s

property notwithstanding payment of any charges by Buyer. In no way will Buyer acquire any

interest in apparatus belonging to Seller which is utilized in the manufacture of the items sold

hereunder, even if such apparatus has been specially converted or adapted for such

manufacture and notwithstanding any charges paid by Buyer. Unless otherwise agreed,

Seller shall have the right to alter, discard or otherwise dispose of any special tooling or other

property in its sole discretion at any time.

8. Buyer's Property: Any designs, tools, patterns, materials, drawings, confidential

Information or equipment furnished by Buyer or any other items which become Buyer’s

property, may be considered obsolete and may be destroyed by Seller after two (2)

consecutive years have elapsed without Buyer placing an order for the items which are

manufactured using such property. Seller shall not be responsible for any loss or damage

to such property while it is in Seller’s possession or control.

9. Taxes: Unless otherwise indicated on the face hereof, all prices and charges are

exclusive of excise, sales, use, property, occupational or like taxes which may be imposed

by any taxing authority Upon the manufacture, sale or delivery of the items sold hereunder

If any such taxes must be paid by Seller or if Seller is liable for the collection of such taxes,

the amount thereof shall be in addition to the amounts for the items sold. Buyer agrees to

pay all such taxes or to reimburse Seller therefore upon receipt of its invoice. If Buyer claims

exemption from any sales, use or other tax imposed by any taxing authority, Buyer shall save

Seller harmless from and against any such tax, together with any interest or penalties

thereon which may be assessed if the Items are held to be taxable.

10. Indemnity For Infringement of Intellectual Property Rights:Seller shall have no liability for infringement of any patents, trademarks, copyrights, trade

dress, trade secrets or similar rights except as provided in this Part 10. Seller will defend and

indemnify Buyer against allegations of infringement of U.S. patents U.S. trademarks,

copyrights, trade dress and trade secrets (hereinafter ‘Intellectual Property Rights”) Seller

will defend at its expense and will pay the cost of any settlement of damages awarded in an

action brought against Buyer based on any litigation that an item sold pursuant to this

contract infringes the Intellectual Property Rights of a third party. Seller’s obligation to

defend and indemnity Buyer Is contingent on Buyer notifying Seller within Ten (10) days

after Buyer becomes aware of such allegations of infringement, and Seller having sole

control over the defense of any allegations or actions including all negotiations for settle-

ment or compromise. If an item sold hereunder is subject to a claim that it infringes the

Intellectual Property Rights of a third party, Seller may, at its sole expense and option,

procure for Buyer the right to continue using said Item or modify said item so as to make it

non-infringing, or offer to accept return of said item and return the purchase price less a

reasonable allowance for depreciation. Notwithstanding the foregoing, Seller shall have no

liability for claims of infringement based on information provided by Buyer, or directed to

items delivered hereunder for which the designs are specified in whole or part by Buyer, or

infringements resulting from the modification, combination or use in a system of any item

sold hereunder, The foregoing provisions of this Part 10 shall constitute Seller’s sole and

exclusive liability and Buyer’s sole and exclusive remedy for infringement of Intellectual

Property Rights.

If a claim is based on information provided by Buyer or if the design for an item delivered

hereunder is specified in whole or in part by Buyer, Buyer shall defend and indemnity Seller

for all costs, expenses or judgments resulting from any claim that such Item infringes any

patent, trademark, copyright, trade dress, trade secret or any similar right.

11. Force Majeure: Seller does not assume the risk of and shall not be liable for delay

or failure to perform any of Seller’s obligations by reason of circumstances beyond the

reasonable control of Seller (hereinafter called ‘Events of Force Majeure’). Events of Force

lMajeure shall include, without limitation, accidents, acts of God, strikes or labor disputes,

acts, laws, rules or regulations of any government or government agency, fires, floods,

delays or failures in delivery of carriers or suppliers, shortages of materials and any other

cause beyond Seller’s control .

12. Entire Agreement Governing Law: The terms and conditions set forth

herein, together with any amendments, modifications and any different terms conditions

expressly accepted by Seller in writing, shall constitute the entire Agreement concerning the

items sold, and there are no oral or other representations or agreements which pertain

thereto. This Agreement shall be governed in all respects by the law of the State of Ohio. No

actions arising out of the sale of the items sold hereunder or this Agreement may be brought

by either party more than two (2} years after the cause of action accrues.


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