NT® Pressure Transducer Models 4100, 4210, 4130, 4230 · PDF fileENTEGRIS, INC. USER GUIDE...

NT® PRESSURE TRANSDUCER MODELS 4100, 4210, 4130, 4230

User Guide

P/N 01-1027289 (Rev. A 04/14)

ENTEGRIS, INC. USER GUIDE 1

NT PRESSURE TRANSDUCER, MODELS 4100, 4210, 4130, 4230

Table of Contents

Safety Alert Symbol . . . . . . . . . . . . . . 2

Introduction . . . . . . . . . . . . . . . . . . . . . . . 3

Installation . . . . . . . . . . . . . . . . . . . . . . . . 3

Mechanical Installation . . . . . . . . 3

Electrical Installation . . . . . . . . . . 4

Power Supply Requirements . . . 4

Warnings . . . . . . . . . . . . . . . . . . . . . . . . . 4

Unit Operation . . . . . . . . . . . . . . . . . . . . 6

Operating Environment . . . . . . . . 6

Process Connections . . . . . . . . . . . . 6

Pressure Transducer Cover Assembly . . . . . . . . . . . . . . . 6

Pressure and Temperature Requirements . . . . . . . . . . . . . . . . . 6

Pressure Limits . . . . . . . . . . . . . . . . . . 7

Pressure Reference Accuracy . . . . . . . . . . . . . . . . . . . . . . . 7

Linear Output Signal . . . . . . . . . . . 8

Troubleshooting . . . . . . . . . . . . . . . . . . 9

Maintenance . . . . . . . . . . . . . . . . . . . . . . 9

Zero and Span Adjustment . . . . . 9

Reference . . . . . . . . . . . . . . . . . . . . . . . . 11

Physical Specifications . . . . . . . . 11

Electrical Specifications . . . . . . 11

Performance Specifications .... 11

Certifications . . . . . . . . . . . . . . . . . . . 12

CE Compliance . . . . . . . . . . . . . . . . . . 12

Class I, Division 2 Hazardous Environments . . 12

Ordering Information . . . . . . . . . . 13

Model 4100 Single-port . . . . . . . 13

Model 4210 Flow-through . . . . . 14

Model 4130 Single-Port . . . . . . . 15

Model 4230 Flow-through ...... 15

Installation Drawings . . . . . . . . . 16


Model 4210 Flow-through . . . . . 18


Model 4230 Flow-through ...... 21

For More Information ............ 22

Terms and Conditions of Sale .............................. 22

Product Warranties ............... 22

2 USER GUIDE ENTEGRIS, INC.


IntroductionThis manual is for use with the following standard NT® Pressure Transducers 4000 Series Models 4100, 4130, 4210 and 4230. These instruments have been designed for use in high purity applications in the semiconductor industry.

These products feature no moving parts and no filled cavities, which reduces the possibility of a contami-nated process. The wetted parts of these nonmetallic transducers are constructed with PTFE, PFA or other similar high purity inert materials.

WARNING! Attempting to install or operate NT standard 4000 Series Pressure Transducers without reviewing the instructions contained in this manual could result in personal injury or equipment damage.

!

Polypropylene electricalconnector option

Signal conditioning circuit

Electronic pressure sensor

Process connection

PTFE Body

Cut-away Example: NT Single-port Pressure Transducer

Cut-away Example: NT Flow-through Pressure Transducer

Process connection

Polypropylene electricalconnector option

Signal conditioning circuit

Electronic pressure sensor

PTFE Body

Safety Alert Symbol

WARNING! !

Indicates a hazardous situation which, if not avoided, could result in serious injury or death.



InstallationWARNING! The pressure transducer has been factory sealed. Do not attempt to remove the cover of the pressure transducer. Any attempt at removal of the pressure transducer cover will void the warranty and damage the unit.

NOTE: NT Pressure Transducers for DI water applications, Models 4130 and 4230, are built with a removable grommet to allow adjustment of the zero and span potentiometers.

WARNING! Do not tighten the nuts that protect the process connections during shipment. Do not tighten the nuts unless the proper tubing has been installed. Tightening these nuts may result in damage to the pressure transducer process connections.

Mechanical Installation Standard NT Pressure Transducers utilize flared tube connections and must be used with the proper tubing size and coupling nut.

When installing flared tubing to the pressure transducer, the flared tube is pushed over the transducer’s fitting until the fitting reaches the smaller tube diameter. The amount of torque required to tighten the coupling nut is dependent upon the size of the fitting.

Fitting Size 1⁄4” 3⁄8” 1⁄2” 3⁄4” 1”

Torque (in•lbs) 5 8 11 14 30

Care should be taken when installing flared tubing onto the pressure transducer. Do not use excessive torque or subject the transducer to high heat during installation. The transducer should be firmly mounted to a solid surface to en- sure stability. Verify that the pres-sure transducer and the sig nal cable are free from mechanical stress or excessive bending from the surrounding equipment.

!

!



Electrical InstallationThe pressure transducer provides an analog (0–5 VDC, 0–10 VDC or 4–20 mA) electrical output propor-tional to the pressure measured.

NOTE: The white wire is not required for the 4–20 mA output configuration, please refer to the wiring diagrams below.

Power Supply RequirementsThe pressure transducer requires a 12–30 volt DC power supply with less than 2% ripple at 100 or 120 Hz. The required power supply voltage varies with the load resistance (RLoad), please refer to the formulas on page 6. The power supply must provide clean power and must be used only to power similar measure-ment-type devices. The power supply must not be used to power inductive loads, such as motors, relays or sole-noids. These devices may produce transients that may affect the pres-sure transducer measurements when the inductive device is powered up or powered down.

NOTE: Be sure to ground the shield of the cable to local ground.

Warnings

WARNING! DO NOT REMOVE OR REPLACE WHILE CIRCUIT IS LIVE UNLESS THE AREA IS KNOWN TO BE FREE OF IGNITIBLE CONCENTRATIONS OF FLAMMABLE SUBSTANCES.

WARNING! DO NOT REPLACE COMPONENTS UNLESS POWER HAS BEEN DIS- CONNECTED OR THE AREA IS KNOWN TO BE FREE OF IGNITIBLE CONCENTRATIONS OF FLAMMABLE GASES OR VAPORS.

WARNING! EXPLOSION HAZARD. DO NOT CONNECT WHILE THE CIRCUIT IS LIVE OR UNLESS THE AREA IS KNOWN TO BE FREE OF IGNITIBLE CONCENTRATIONS.

WARNING: SUBSTITUTION OF COMPONENTS MAY IMPAIR SUITABILITY FOR DIVISION 2

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!

!

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Pressure transducer4–20 mA output version

Pressure Transducer0–5 VDC, 0–10 VDC output version

+24 VDC GND

RED

RED

WHITE

WHITE

BLACK

BLACK

Voltage pressure signal

4–20 mA pressure signal

No connection

Displayor PLC

Displayor PLC



Load Resistance: Current Output (4–20 mA Configuration)

If a load resistor, RLoad, is used in series with the current output, the value of RLoad is dependent on the supply voltage and the meter resis-tance and is calculated from the following formula:

Load Resistance: Voltage Output (0–5, 0–10 VDC)

The output impedance is 1 kOhm. The input impedance should be ≥1 megohm for ±0.1% load impedance error.

Operatingregion

Power supply voltage(VPS)

R Loa

d(O

hms)

12 24 29

850

0

Figure 1. Power Required for a 4–20 mA Loop

RLoad = – Rmeter

where:RLoad = maximum load

resistance (ohms)

VPS = power supplyvoltage (volts)

Rmeter = meter resistance (ohms)(theoretically = 0)

VPS – 12 V

20 mA



Unit Operation

Operating EnvironmentThe pressure transducer is to be mounted in a well vented and controlled environment. Refer to the Reference section on page 12 for additional specifications.

Process ConnectionsTo avoid possible pressure leaks, make sure all process connections have been performed in accordance with the Mechanical Installation guidelines on page 4.

Pressure Transducer Cover AssemblyStandard NT Pressure Transducer covers are factory sealed and should not be tampered with or opened. Opening the cover shall void the product warranty. The NT Pressure Transducers for DI water applica-tions, Models 4130 and 4230, are built with a removable grommet to allow adjustment of the zero and span potentiometers.

WARNING! Any attempt to remove or tamper with the transducer cover will void the warranty and damage the unit.

Pressure and Temperature Requirements The minimum pressure required is atmospheric pressure. The pres-sure transducer may be damaged if subjected to vacuum pressure (pres-sure that is less than atmospheric pressure).

The pressure transducer is rated for use with fluids at process tempera-tures between 10–65°C (50–149°F) under normal operating conditions.

WARNING! NT Pressure Transducers, Models 4100, 4130, 4210 and 4230, may be damaged if the sensor is subjected to any level of vacuum pressure (pressure less than atmospheric pressure).

!

!



WARNING! The pressure limits for standard NT Pressure Transducers (4000 Series) decrease significantly for temperatures above 65°C (149°F). Exceeding these limits may result in personal injury or equipment damage.

Pressure Reference AccuracyThe accuracy of the pressure trans-ducer output is ±1% of full scale. This accuracy includes the effects of linearity, hysteresis and repeatabil-ity, measured at room temperature. Accuracy specifications for nonstandard product configurations might vary.

!

Transducer RangeMaximum Pressure Limit

@ 23°C (73°F)Maximum Pressure Limit

@ 65°C (149°F)

0–30 psig 690 kPa (100 psig)3 690 kPa (100 psig)2, 4

0–60 psig 1034 kPa (150 psig)1, 3 690 kPa (100 psig)2, 4

0–100 psig 1034 kPa (150 psig)1, 3 690 kPa (100 psig)2, 4

0–150 psig 1310 kPa (190 psig)1, 3 N/A

1. Maximum pressure limit for 3⁄4” Flaretek® fitting connections at 23°C (73°F) is 758 kPa (110 psig).

2. Maximum pressure limit for 3⁄4” Flaretek fitting connections at 65°C (149°F) is 620 kPa (90 psig).

3. Maximum pressure limit for 1” Flaretek fitting connections at 23°C (73°F) is 517 kPa (75 psig).

4. Maximum pressure limit for 1” Flaretek fitting connections at 65°C (149°F) is 372 kPa (54 psig).

For detailed pressure limit information on Flaretek tube fitting connections, refer to the Maximum Pressure Capabilities chart in the Flaretek fittings product section on Entegris’ website at http://www.entegrisfluidhandling.com.

Pressure Limits



Linear Output SignalThe output signal of the pressure transducer is a linear function pro-portional to the applied pressure.

Pressure Measurement

Curr

ent

Out

put

(mA)

0 psig

0 psig

Full scale

20 mA

4 mA

Pressure Measurement

Volta

geO

utpu

t(V

)

Full scale

10 Vor 5 V

0 V



TroubleshootingTroubleshooting the NT Pressure Transducers (4000 Series) may be accomplished by measuring the out put signal of the pressure trans-ducer with a battery powered current/voltage meter. The meter may be placed in series with the pressure transducer to measure the current output or it may be used to directly measure the voltage output.

Using the battery powered current/ volt meter is an effective method to determine whether the device or the on-site data acquisition system is not functioning properly.

Maintenance: (NT Pressure Transducers for DI Water Applications, Models 4130 and 4230 Only)

Zero and Span AdjustmentUnit Calibration Steps:

1. Remove pressure transducer from service.

2. Connect the pressure transducer inlet outlet port connector to a calibrated pressure source.

3. Connect the pressure transducer electrical connection to a power source.

4. Connect the pressure transducer electrical connection to a display to monitor the mA or voltage output.

5. Remove the access grommet (see Diagram A).

6. Locate the zero and span adjust-ment screws (see Diagram B).

Diagram A



7. At ambient pressure (no pressure applied), rotate the zero adjust-ment screw (see Diagram C) clockwise or counterclockwise until the display reads 4.0 mA or 0 Volts.

8. Apply full scale pressure to the unit. Rotate the span adjustment screw clockwise or counterclock-wise until the display reads the full scale value (i.e., depending upon configuration: 20.0 mA, 10 Volts or 5 Volts).

9. To obtain best accuracy, repeat steps 7 and 8.

10. The calibration procedure is complete. Reinstall the access grommet.

11. Safely vent any applied pressure.Disconnect the display and disconnect the power.

12. Return the pressure transducer to service.

SpanPot

ZeroPot

Diagram B

Diagram C



ReferenceThe following lists the specifications for the NT Pressure Transducer product line. Please consult the factory for product specifications manufactured for nonstandard applications.

NOTE: Specifications are subject to change without notice.

Physical Specifications

Materials: Wetted parts Body PTFE

Sensor interface CTFE or PFA (Models 4100 and 4210)

O-ring PFA (Models 4130 and 4230)

Kalrez® (Models 4100 and 4210)

EPDM(Models 4130 and 4230)

Nonwetted parts Polypropylene, polyethylene, PVDF (in addition to materials listed above)

Connection type: Flared tube, NPT

Electrical Specifications

Input voltage: 24 VDC (12–30 VDC)

Input current: 20 mA maximum

Pressure signal output ranges: 4–20 mA, 0–5 VDC, 0–10 VDC

Electrical connection: 6’, 12’, 30’ FEP-jacketed pigtail or polypropylene 3-pin connector

Models 4100 and 4210)

12’ FEP-jacketed pigtail (Models 4130 and 4230)A

Electrical enclosure: IP54

Performance Specifications

Reference accuracy: ±1% of full scale (includes linearity, hysteresis and repeatability) at 23°C (73°F)

Process temperature: 10–65°C (50–149°F)



Certifications

CE ComplianceEntegris products have been tested to various test standards required by the EMC 89/336/EEC directive. The results of this testing are on file at Entegris and are available upon request.

Please contact the factory for the latest information. The most current specifications may be found on Entegris’ Web site at: http://www.entegrisfluidhandling.com/ Default.asp?G=1613&1n=en

Class I Division 2 Hazardous EnvironmentsEntegris has tested our standard products to the UL 61010-1, ANSI/ISA 12.12.01 standards for use in Class I, Division 2 Group A–D, T6 10°C ≤ Ta ≤65°C hazardous environments. The results of this testing are on file at Entegris and are available upon request.

All spec i fications are subject to change. Please contact the factory for the latest information.



Ordering Information

Refer to the following for the desired configuration.Model 4100 Single-port Pressure Transducer Example model number: 4100-100G-F02-D06-A-P1-U1

Code Pressure Range

030G 207 kPa (30 psig)060G 414 kPa (60 psig)100G 690 kPa (100 psig)150G 1034 kPa (150 psig)

Code Inlet/Outlet Port Connection

F02 1⁄4” Flaretek tube fittingF03 3⁄8” Flaretek tube fittingF04 1⁄2” Flaretek tube fittingW02 1⁄4” Super 300 Type Pillar® tube fittingW03 3⁄8” Super 300 Type Pillar tube fittingW04 1⁄2” Super 300 Type Pillar tube fittingN02 1⁄4” FNPTN04 1⁄2” FNPTM02 1⁄4” MNPT

Code Electrical Connector Type

B06 FEP-jacketed 6’ pigtail electrical cableB12 FEP-jacketed 12’ pigtail electrical cableB30 FEP-jacketed 30’ pigtail electrical cableD00 Polypropylene connector (cable not included)D06 Polypropylene connector and 6’ PVC cableD12 Polypropylene connector and 12’ PVC cableD30 Polypropylene connector and 30’ PVC cable

Code Electrical Outputs

A 4–20 mA (12–30 VDC input)B 0–10 VDC (12–30 VDC input)C 0–5 VDC (12–30 VDC input)

Code Sensor Interface

P1 CTFE sensor interface (default)P2 PFA sensor interface

Code Primary/Secondary Seal

U1 Kalrez 4079 / Viton® (default)U2 Kalrez 1050 / VitonU3 Kalrez 6375 UP / VitonS1 Kalrez 4079 / Kalrez 4079S2 Kalrez 1050 / Kalrez 1050S3 Kalrez 6375 UP / Kalrez 6375 UP



Code Pressure Range

030G 207 kPa (30 psig)

060G 414 kPa (60 psig)

100G 690 kPa (100 psig)


F02 1⁄4” Flaretek tube fitting



F06 3⁄4” Flaretek* tube fitting

F08 1” Flaretek* tube fitting

W02 1⁄4” Super 300 Type Pillar tube fitting




W08 1” Super 300 Type Pillar tube fitting

Code Electrical Connector Type

B06 FEP-jacketed 6’ pigtail electrical cable



D00 Polypropylene connector (cable not included)

D06 Polypropylene connector and 6’ PVC cable




A 4–20 mA (12–30 VDC input)

B 0–10 VDC (12–30 VDC input)

C 0–5 VDC (12–30 VDC input)

Code Sensor Interface

P1 CTFE sensor interface (default)

P2 PFA sensor interface

Code Primary/Secondary Seal

U1 Kalrez 4079 / Viton (default)

U2 Kalrez 1050 / Viton

U3 Kalrez 6375 UP / Viton

S1 Kalrez 4079 / Kalrez 4079

S2 Kalrez 1050 / Kalrez 1050

S3 Kalrez 6375 UP / Kalrez 6375 UP

* For detailed pressure limit information on Flaretek tube fitting connections, refer to the Maximum Pressure Capabilities chart in the Flaretek fittings product section on Entegris’ website at http://www.entegrisfluidhandling.com.

Model 4210 Flow-through Pressure Transducer Example model number: 4210-100G-F02-D06-A-P1-U1



Code Pressure Range

030G 207 kPa (30 psig)

060G 414 kPa (60 psig)

100G 690 kPa (100 psig)

150G 1034 kPa (150 psig)








N02 1⁄4” FNPT

N04 1⁄2” FNPT

M02 1⁄4” MNPT


A 4–20 mA (12–30 VDC input)



Model 4130 Single-port Pressure Transducer Example model number: 4130-100G-F02-A

Code Pressure Range

030G 207 kPa (30 psig)

060G 416 kPa (60 psig)

100G 690 kPa (100 psig)





F06 3⁄4” Flaretek tube fitting*

F08 1” Flaretek tube fitting*





W08 1” Super 300 Type Pillar tube fitting


A 4–20 mA (12–30 VDC input) **



* For detailed pressure limit information on Flaretek tube fitting connections, refer to the Maximum Pressure Capabilities chart in the Flaretek fittings product section on Entegris’ website at http://www.entegrisfluidhandling.com.

Model 4230 Flow-through Pressure Transducer Example model number: 4230-100G-F02-A



Installation Drawings

4100 Single-port Pressure Transducer with Flared Connection

3 conductor FEP-jacketed cable,pigtail connection (BXX)(Cable length up to 30 feet)

25.4 mm (1.00”)

B

AØ 47.8 mm(1.88”)

76.2 mm (3.00”)

3 conductor connector/cable (DXX) (Cable lengthup to 30 feet)

A

Ø 47.8 mm(1.88”)

B

11.4 mm (0.45”)

Receptacle withplug removed

ELECTRICAL CONNECTOR INFORMATION

Wire4–20 mA Output Version

VoltageOutput Version

Red VDC+

24 VDC (12–30 VDC)

24 VDC (12–30 VDC)

Black VDC–

Ground Ground

White Not used 0–5 VDC signal or0–10 VDC signal

Inlet/Outlet Port Connection A B

1⁄4” Flaretek 76.2 mm (3.00”) 25.2 mm (0.99”)

3⁄8” Flaretek 76.2 mm (3.00”) 26.9 mm (1.06”)

1⁄2” Flaretek 76.2 mm (3.00”) 29.0 mm (1.14”)


1⁄4” Flaretek 76.2 mm (3.00”) 25.2 mm (0.99”)

3⁄8” Flaretek 76.2 mm (3.00”) 26.9 mm (1.06”)

1⁄2” Flaretek 76.2 mm (3.00”) 29.0 mm (1.14”)


Pin Wire4–20 mA Output Version


10 Black VDC–

Ground Ground

11 Red VDC+

24 VDC (12–30 VDC)

24 VDC (12–30 VDC)

12 White Not used 0–5 VDC signal or0–10 VDC signal



4100 Single-port Pressure Transducer with NPT Connection

3 conductor Teflon®-jacketedcable, pigtail connection (BXX)(Cable length up to 30 feet)

25.4 mm (1.00”)

B

A

Ø 47.8 mm(1.88”)

76.2 mm (3.00”)

11.4 mm (0.45”)

3 conductor connector/cable (DXX)(Cable length up to 30 feet)

Receptaclewith plugremoved

B

A

Ø 47.8 mm(1.88”)




10 Black VDC–

Ground Ground

11 Red VDC+

24 VDC (12–30 VDC)

24 VDC (12–30 VDC)



1⁄4” MNPT 76.2 mm (3.00”) 15.0 mm (0.59”)

1⁄4” FNPT 82.3 mm (3.24”) —

1⁄2” FNPT 88.9 mm (3.50”) —


1⁄4” MNPT 76.2 mm (3.00”) 15.0 mm (0.59”)

1⁄4” FNPT 82.3 mm (3.24”) —

1⁄2” FNPT 88.9 mm (3.50”) —




Red VDC+

24 VDC (12–30 VDC)

24 VDC (12–30 VDC)

Black VDC–

Ground Ground




4210 Flow-through Pressure Transducer with Flared Connection

3 conductor FEP-jacketed cable,pigtail connection (BXX)(Cable length up to 30 feet)

25.4 mm (1.00”)

B

A

6.4 mm (0.25”)C

5.1 mm (0.20”) (2)

59.9 mm (2.36”)

44.5 mm(1.75”)

47.2 mm(1.86”)

44.5 mm”(1.75)




Red VDC+

24 VDC (12–30 VDC)

24 VDC (12–30 VDC)

Black VDC–

Ground Ground


Inlet/Outlet Port Connection A B C

1⁄4” Flaretek 89.7 mm (3.53”) 94.5 mm (3.72”) 18.5 mm (0.73”)

3⁄8” Flaretek 89.7 mm (3.53”) 98.3 mm (3.87”) 17.0 mm (0.67”)

1⁄2” Flaretek 96.0 mm (3.78”) 102.4 mm (4.03”) 21.6 mm (0.85”)

3⁄4” Flaretek 104.4 mm (4.11”) 108.5 mm (4.27”) 25.4 mm (1.00”)

1” Flaretek 112.5 mm (4.43”) 120.7 mm (4.75”) 30.5 mm (1.20”)



47.2 mm(1.86”)

44.5 mm”(1.75)

3 conductor connector/cable (DXX)(Cable length up to 30 feet)

B

A

6.4 mm (0.25”)C

5.1 mm (0.20”) (2)

59.9 mm (2.36”)

44.5 mm(1.75”)

Receptacle withplug removed

11.4 mm (0.45”)

76.2 mm (3.00”)


1⁄4” Flaretek 89.7 mm (3.53”) 94.5 mm (3.72”) 18.5 mm (0.73”)

3⁄8” Flaretek 89.7 mm (3.53”) 98.3 mm (3.87”) 17.0 mm (0.67”)

1⁄2” Flaretek 96.0 mm (3.78”) 102.4 mm (4.03”) 21.6 mm (0.85”)

3⁄4” Flaretek 104.4 mm (4.11”) 108.5 mm (4.27”) 25.4 mm (1.00”)

1” Flaretek 112.5 mm (4.43”) 120.7 mm (4.75”) 30.5 mm (1.20”)




10 Black VDC–

Ground Ground

11 Red VDC+

24 VDC (12–30 VDC)

24 VDC (12–30 VDC)




4130 Single-port Pressure Transducer

3 conductorFEP-jacketed cablePigtail connection(Cable length 12 feet)

25.4 mm (1.00”)

Ø

B

A

47.5 mm (1.87”)

SZ




Red VDC+

24 VDC (12–30 VDC)

24 VDC (12–30 VDC)

Black VDC–

Ground Ground



1⁄4” Flaretek 79.2 mm (3.12”) 25.2 mm (0.99”)

3⁄8” Flaretek 79.2 mm (3.12”) 26.9 mm (1.06”)

1⁄2” Flaretek 79.2 mm (3.12”) 29.0 mm (1.14”)

1⁄4” MNPT 79.2 mm (3.12”) 15.0 mm (0.59”)

1⁄4” FNPT 87.9 mm (3.46”) —

1⁄2” FNPT 94.5 mm (3.72”) —



4230 Flow-through Pressure Transducer

ZS

3 conductorFEP-jacketed cablePigtail connection(cable length 12 feet)

5.1 mm (0.20”)

44.5 mm(1.75”)

44.5 mm(1.75”)

59.9 mm(2.36”)

25.4 mm (1.00”)

A

B

C




Red VDC+

24 VDC (12–30 VDC)

24 VDC (12–30 VDC)

Black VDC–

Ground Ground



1⁄4” Flaretek 95.3 mm (3.75”) 94.5 mm (3.72”) 18.5 mm (0.73”)

3⁄8” Flaretek 95.3 mm (3.75”) 98.3 mm (3.87”) 17.0 mm (0.67”)

1⁄2” Flaretek 101.6 mm (4.00”) 102.4 mm (4.03”) 21.6 mm (0.85”)

3⁄4” Flaretek 110.0 mm (4.33”) 108.5 mm (4.27”) 25.4 mm (1.00”)

1” Flaretek 118.1 mm (4.65”) 120.7 mm (4.75”) 30.5 mm (1.20”)



For More InformationPlease call your Regional Customer Service Center today to learn what Entegris can do for you. Visit www.entegris.com and select the Customer Service link for the center nearest you.

Terms and Conditions of SaleAll purchases are subject to Entegris’ Terms and Conditions of Sale. To view and print this information, visit www.entegris.com and select the Legal Notices link from the footer.

Product WarrantiesFor Product Warranties, visit www.entegris.com and select the Legal Notices link from the footer.

ENTEGRIS, INC. Corporate Headquarters | 129 Concord Road | Billerica, MA 01821 USA Customer Service Tel. +1 952 556 4181 Customer Service Fax +1 952 556 8022 In North America 800 394 4083 | www.entegris.com

©2004–2014 Entegris, Inc. All rights reserved Printed in USA P/N 01-1027289 (Rev. A 04/14) 3960-5426ENT-0414

Entegris®, the Entegris Rings Design®, Creating a Material Advantage®, NT ® and Flaretek® are registered trademarks of Entegris, Inc.Kalrez® and Viton® are registered trademarks of DuPont Dow Elastomers, L.L.C.Teflon® is a registered trademark of E.I. du Pont de Nemours and Company.Pillar® is a registered trademark of Nippon Pillar Packaging Company, Ltd.

NT® Pressure Transducer Models 4100, 4210, 4130, 4230 · PDF fileENTEGRIS, INC. USER GUIDE...

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