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Digital ICIntroduction
1.Introduction
If the automobile had followed the same
development cycle as the computer, a Rolls-
Royce would today cost $100, get one million
miles to the gallon and explode once a year
Most of slides come from Semiconductor Manufacturing Technologyby Michael Quirk and Julian Serda
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Digital IC
outline
• Course Introduction
• a brief history
• Design Metrics
• DIC characteristics
• Design partitioning/CMOS logic
• Semiconductor processing
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Digital IC
Semiconductor processing
• Semiconductor fabrication
• Layout fundamental
• Semiconductor testing
• Semiconductor assembling
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Digital IC
Different Electrical Tests for IC Production
(From Design Stage to Packaged IC)
TestStage of IC
Manufacture
Wafer- or
Chip-LevelTest Description
IC Design Verification Pre-Production Wafer levelCharacterize, debug and verify new chip
design to insure it meets specifications.
In-Line Parametric
TestWafer fabrication Wafer level
Production process verification test
performed early in the fabrication cycle
(near front-end of line) to monitor process.
Wafer Sort (Probe) Wafer fabrication Wafer levelProduct functional test to verify each die
meets product specifications.
Burn-In Reliability Packaged ICPackaged
chip level
ICs powered up and tested at elevated
temperature to stress product to detect
early failures (in some cases, reliability
testing is also done at the wafer level
during in-line parametric testing).
Final Test Packaged ICPackaged
chip level
Product functionality test using product
specifications.
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Digital IC
Automated Electrical Tester
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Digital IC
Wafer Fab Process Flow with Test
Implant
Diffusion
Test/Sort
Etch
Polish
PhotoCompleted wafer
Unpatterned wafer
Wafer start
Thin Films
Wafer Fabrication (front-end)
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Digital IC
Wafer Test
• In-line Parametric Test (a.k.a. wafer electrical
test, WET)
• In-line test structure
• In-line test type
• In-line test data explain
• In-line test equipment
Scribe line with monitor test structures
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Digital IC
In-line Parametric Test
Systems• Probe card interface
• Wafer positioning
• Tester instrumentation
• Computer as host or
server/networkElectronic interface
Instrumentation
Computer
Probe card
Wafer positioning(X, Y, Z, q)
X-Y stageq-Z stage
8
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Digital IC
Probe Card for Automatic Tester
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Digital IC
Examples of Test Structure
Test Structure Fault Measurement
Discrete transistorsLeakage current, breakdown voltage, thresholdvoltage and effective channel length
Various line widths Critical dimensions
Box in a box Critical dimensions and overlay registration
Serpentine structure overoxide steps
Continuity and bridging
Resistivity structure Film thicknessCapacitor array structure Insulator materials and oxide integrity
Contact or via string Contact resistance and connections
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Digital IC
Data Trends
• The same die location keeps failing a parameter
on a wafer.
• The same parameter is consistently failing on
different wafers.
• There is excessive variation (e.g., > 10%) in
measurement data from wafer to wafer.
• Lot-to-lot failure for the same parameter,
indicating a major process problem.
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Digital IC
Wafer Sort
• Wafer Sort (a.k.a. wafer probe)
• DC testing
• Output checking
• Function testing
• The Objectives of Wafer Sort
• Chip functionality: verify the operation of all chip functions to insure only
good chips are sent to the next IC manufacturing stage of assembly
and packaging.
• Chip sorting: sort good chips based on their operating speed
performance (this is done by testing at several voltages and varying
timing conditions).
• Fab yield response: Provide important fab yield information to assess
and improve the performance of the overall fabrication process.
• Test coverage: Achieve high test coverage of the internal device nodes
at the lowest cost.
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Digital IC
Wafer Bin Map with Bin Failures
1
1
1
6
1
5
4
1
1
1
1
1
1
1
1
1
1
12
1
1
1
1
1
1
1
1
1
10
1
1
10
3
1
1
1
1
4
1
1
1
10
7
1
1
1
1
1
1
10
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1
7
1
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1
1
2
12
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1
1
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1
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1
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3
10
1
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7
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2
Device: Example
Lot: Example
Wafer: 200 mm
Layer: Hardware Bins
Yield: 79.54%
Good: 70
Total: 88
Good
Bad
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Digital IC
Reduced Partial Die on Large Wafer
200 mm 300 mm
14.5% partial die
10.8% partial die
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Digital IC
Reduced Time to Product Maturity for
DRAM Production
-1 0 1 2 3 4 5 6 7
Year
DR
AM
Pro
be
Yie
ld, A
fter
Rep
air
100
80
60
40
20
0
R&D
PilotLine Full Production
16 Mb
256 Mb256 Kb
4 Mb64 Kb
64 Mb
1 Mb
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Digital IC
Semiconductor processing
• Semiconductor fabrication
• Layout fundamental
• Semiconductor testing
• Semiconductor assembling
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Digital IC
Packaging Requirements
• Electrical: Low parasitics
• Mechanical: Reliable and robust
• Thermal: Efficient heat removal
• Economical: Cheap
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Digital IC
Important Functions of IC
Packaging• Protection from the environment and
handling damage.
• Interconnections for signals into and out of
the chip.
• Physical support of the chip.
• Heat dissipation.
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Digital IC
Traditional Assembly and Packaging
Wafer Test and Sort
Wire Bond
Die Separation
Plastic Package Final Package and Test
Die Attach
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Digital IC
Typical IC Packages
Quad flat pack(QFP)
Leadless chip carrier(LCC)
Plastic leaded chip carrier(PLCC)
Dual in-line package(DIP)
Thin small outline package(TSOP)
Single in-line package(SIP)
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Digital IC
Levels of IC Packaging
2nd level packaging:
Printed circuit board
assembly
First level packaging:
IC packaging
Final product assembly:
Final assembly of circuit
boards into system
Metal leads for mounting
onto printed circuit board
Pins
Pins are inserted into holes then soldered on rear of PCB.
Surface-mount chips are soldered
on top of tinned pads
on the PCB.
Edge connector plugs into main system.
PCB subassembly
Main electronics assembly board
Leads
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Digital IC
Traditional Assembly
• Wafer preparation (backgrind)
• Die separation
• Die attach
• Wire bonding
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Digital IC
Schematic of the Backgrind Process
Rotating and
oscillating spindle
Wafer on rotating chuck
Downforce
Table rotates only during
indexing of wafers
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Digital IC
Wafer Saw and Sliced Wafer
Wafer
Stage
Blade
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Digital IC
Typical Leadframe for Die Attach
DieLeadLeadframe
Plastic DIP
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Digital IC
Epoxy Die Attach
Die
Epoxy
Leadframe
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Digital IC
Wires Bonded from Chip Bonding Pads
to Leadframe
Moulding compound
LeadframeBonding pad
Die
Bond wire
Pin tip
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Digital IC
Wirebonding Chip to Leadframe
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Digital IC
Traditional Packaging
• Plastic Packaging
• Ceramic Packaging
• TO-Style Metal Package(old)
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Digital IC
General package mode
Plastic Dual In-Line Package (DIP)
for Pin-In-Hole (PIH)1970s-1980s
Single In-Line Package (SIP),
decreasing capacity and cost
Memory application
Thin Small Outline Package (TSOP)
Memory and smartcard Single In-
Line Memory Module (SIMM)
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Digital IC
General package mode
Quad Flatpack (QFP) with Gull
Wing Surface Mount Leads
Plastic Leaded Chip Carrier (PLCC)
with J-Leads for Surface Mount
Leadless Chip Carrier (LCC)
Ceramic interconnect layers
4-layer laminate
Laminated Refractory Ceramic
Process Sequence
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Digital IC
Advanced Packaging
• Flip chip
• Ball grid array (BGA)
• Chip on board (COB)
• Tape automated bonding (TAB)
• Multichip modules (MCM)
• Chip scale packaging (CSP)
• Wafer-level packaging
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Digital IC
Advanced Packaging
Solder bump on bonding padSilicon chip
Substrate
Connecting pin
Metal interconnectionVia
Bonding pad perimeter array
Flip chip bump area array
Flip Chip Package
Flip Chip Area Array Solder
Bumps Versus Wirebond
Solder bump
Chip
Epoxy
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Digital IC
Ball Grid Array
Molded cover
Wire
Substrate
Metal via
Solder ball
Chip
Bonding pad
Epoxy
Thermal via
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Digital IC
Multichip Module (MCM)
MCM substrateIndividual die
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Digital IC
Summary
• MOS Transistors are stack of gate, oxide, silicon
Can be viewed as electrically controlled switches
• Build logic gates out of switches
• Draw masks to specify layout of transistors
• Using different packaging&assembing tech.
• to start designing schematics and layout for a
simple chip!
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