NEW THICK FILM FUNCTIONAL DEVICES

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Electrocomponent Science and Technology, 1981, Vol. 8, pp. 77-82 0305-3091/81/0802-0077 $06.50/0 (C) 1981 Gordon and Breach Science Publishers, Inc. Printed in Great Britain NEW THICK FILM FUNCTIONAL DEVICES Y. TAKETA, O. ABE and M. HARADOME Physical Science Laboratories, Nihon University at Narashino, Funabashi, Chiba. The development of thick-film functional devices having oscillation, negative resistance, switching, memory and so on has been needed. New non-volatile memory devices manufactured of Nb205-based thick-film have now been created. The thick-film devices have been prepared by using common thick-film technology such as screen printing, drying and firing. The characteristics and the operation of the devices are as follows: When adc voltage is applied to the devices, rapid resistance change, so called switching effect, occurs. The devices have low resistance state. Even when the voltage is removed completely, the devices do not return to high resistance state and keep low resistance state. However, when alternating voltage is impressed upon the devices, the low resistance state goes to the high resistance state. The recovery time of the resistance state depends upon the frequency of applied ac voltage. The higher frequency voltage that is applied, the sooner the recovery time becomes. The threshold voltage exponentially increases with higher frequency of an applied ac voltage. In addition to the memory effect, the Nb2Os-based thick-film devices have a switching and oscillation characteristic. 1. INTRODUCTION Thick-film technology is now extensively used for various purpose in hybrid microelectronics manufacturing. Usually the technology, however, is only used for making passive elements such as resistors, conductors, over glaze film etc. Sometimes thick-film capacitors and thermistors are produced and used as one of the constituent parts of the thick-film hybrid IC. 2,3 Recently, functional devices having oscillation, amplification, switching, memory and so on have widely been tried to conduct by using thick-film technology. 4 Researches on the functional devices are being made on oxides such as iron, vanadium, and niobium, which exhibit resistance change under the supply of the joule heating of the oxide when an external voltage is applied between the electrodes. These resistance changes are accompanied by a discontinuous change in the resistivity by a factor of the order of 103 through 105. Conducting without an applied voltage is by an activated process with a band gap similar to an insulator, and with an applied voltage the band gap is similar to an intrinsic semiconductor. Up to now, for instance, the application of thick-film technology has been made to the development of functional devices, transistors, oscillation devices and switching elements. By study in NbOx-based functional devices, then, it has become clear that the devices are characterized as 77 follows: 1) The abrupt switching action occurs when a dc voltage is applied to the specimen, and the resistance changes from high resistance to low resistance. 2) The resistance of the specimen after the switching action is kept low without electrical power. 3) It was found that the NbO thick-film devices have a new non-volatile membry effect and can be used as thick-film memory devices. 4) By applying ac voltage memory state can be eliminated. In the following, an interpretation of the physical processes associated with the NbOx-based thick-film functional devices is described. 2. PREPARATION OF THE SPECIMENS The powder mixed in the ratio 87Nb20 and 13V20 in wt% was presintered for 3 hr at 1300C in air and then pulverized. The resultant powder and glass frits were mixed with the ratio of 80 to 20 wt%. They were evenly dispersed into the organic vehicle to produce printable thick-film inks, screen-printed on 96% alumina substrate, and fired at 750C for 15 min. in air. The shape and dimension of the specimen having 3 mm in width, 4 mm in length and 40 through 50 pm in average thickness is illustrated in Figure 1. The

Transcript of NEW THICK FILM FUNCTIONAL DEVICES

Page 1: NEW THICK FILM FUNCTIONAL DEVICES

Electrocomponent Science and Technology, 1981, Vol. 8, pp. 77-820305-3091/81/0802-0077 $06.50/0

(C) 1981 Gordon and Breach Science Publishers, Inc.Printed in Great Britain

NEW THICK FILM FUNCTIONAL DEVICES

Y. TAKETA, O. ABE and M. HARADOME

Physical Science Laboratories, Nihon University at Narashino, Funabashi, Chiba.

The development of thick-film functional devices having oscillation, negative resistance, switching, memory and so onhas been needed.New non-volatile memory devices manufactured of Nb205-based thick-film have now been created. The thick-film

devices have been prepared by using common thick-film technology such as screen printing, drying and firing. Thecharacteristics and the operation of the devices are as follows:When adc voltage is applied to the devices, rapid resistance change, so called switching effect, occurs. The devices

have low resistance state. Even when the voltage is removed completely, the devices do not return to high resistancestate and keep low resistance state. However, when alternating voltage is impressed upon the devices, the lowresistance state goes to the high resistance state. The recovery time of the resistance state depends upon the frequencyof applied ac voltage. The higher frequency voltage that is applied, the sooner the recovery time becomes. Thethreshold voltage exponentially increases with higher frequency of an applied ac voltage.

In addition to the memory effect, the Nb2Os-based thick-film devices have a switching and oscillation characteristic.

1. INTRODUCTION

Thick-film technology is now extensively used forvarious purpose in hybrid microelectronicsmanufacturing. Usually the technology, however, isonly used for making passive elements such as resistors,conductors, over glaze film etc. Sometimes thick-filmcapacitors and thermistors are produced and used asone of the constituent parts of the thick-film hybridIC.2,3 Recently, functional devices having oscillation,amplification, switching, memory and so on havewidely been tried to conduct by using thick-filmtechnology.4

Researches on the functional devices are being madeon oxides such as iron, vanadium, and niobium, whichexhibit resistance change under the supply of the jouleheating of the oxide when an external voltage is appliedbetween the electrodes. These resistance changes areaccompanied by a discontinuous change in theresistivity by a factor of the order of 103 through 105.Conducting without an applied voltage is by anactivated process with a band gap similar to aninsulator, and with an applied voltage the band gap issimilar to an intrinsic semiconductor. Up to now, forinstance, the application of thick-film technology hasbeen made to the development of functional devices,transistors, oscillation devices and switching elements.By study in NbOx-based functional devices, then, it

has become clear that the devices are characterized as

77

follows:

1) The abrupt switching action occurs when a dcvoltage is applied to the specimen, and the resistancechanges from high resistance to low resistance.

2) The resistance of the specimen after the switchingaction is kept low without electrical power.

3) It was found that the NbO thick-film devices havea new non-volatile membry effect and can be used asthick-film memory devices.

4) By applying ac voltage memory state can beeliminated. In the following, an interpretation of thephysical processes associated with the NbOx-basedthick-film functional devices is described.

2. PREPARATION OF THE SPECIMENS

The powder mixed in the ratio 87Nb20 and 13V20 inwt% was presintered for 3 hr at 1300C in air and thenpulverized. The resultant powder and glass frits weremixed with the ratio of 80 to 20 wt%. They were evenlydispersed into the organic vehicle to produce printablethick-film inks, screen-printed on 96% aluminasubstrate, and fired at 750C for 15 min. in air.The shape and dimension of the specimen having

3 mm in width, 4 mm in length and 40 through 50 pmin average thickness is illustrated in Figure 1. The

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78 Y. TAKETA, O. ABE AND M. HARADOME

FIGURE 1 Shape and size of specimen. A electrode; B specimen; C substrate.

Pd-Ag thick-film conductor which had previously beenprefired on the substrate was used as electrode.

Then, the forming operation for as-fired specimenswas performed. The forming operation is that high dcvoltage is applied several times to each specimen for afew seconds. 80 to 100 volts for forming is applied inthis experiment. After forming, various kinds ofelectrical measurements were conducted.

3. RESULTS AND DISCUSSION

Figure 2 shows the V-I characteristics of the specimen.When the V-I curves were obtained, the resistor wasused in series with the specimen to limit the current.The V-I characteristic shows that a) the resistancechange is Ohmic, when the voltage is pressed upon thespecimen, which is approximately 3 Mf, and b) withincrease in applied voltage non-Ohmic electricalconduction appears and the current increases up topoint A. Point A is the threshold point, which istypically of the order of about 160 V/cm (Vth 63 Vin this figure), c) AC is the negative resistance region.The abrupt switching action (hereinafter called forwardswitch) occurs in the interval AB, and then current

FIGURE 2 DC V-I characteristics.

FIGURE 3 DC V-I characteristic for the low resistance stateafter switching. Horizontal scale is 10 V/div and vertical scale5 mA/div.

moves to point C very slowly. The change of theresistance in the interval AB of the specimen is a factorof 10 through 104. The switching speed is 5 through10/sec at room temperature, d) With decrease of thecurrent, the curve CO follows. After the forward switchthe resistance of the specimens does not return to highresistance and always holds low value without electricalpower. When the voltage is applied to the specimenafter switching, the current increases along the curveDC as seen in Figure 3 and the current flow along thecurve O-A-B-C is not observed. In order to obtain ahigh resistance state, alternating voltage is applied tothe specimen. So the low resistance state readily returnsto the high resistance state. Therefore, the highresistance is in a state of memory and a quickconversion from memorized state to non-memorizedstate is taken place by applying ac voltage. That is tosay, the specimen has a non-volatile memory effect.

Figure 4 illustrates ac voltage-current characteristics.When the ac voltage (sine wave 50 Hz) is impressedupon the specimen keeping the low resistance state isgradually increased, the current also increases. After

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NEW THICK FILM FUNCTIONAL DEVICES 79

%Ooo

0% g

VOLTAGE kV/cm

FIGURE 4 AC V-I characteristics.

passing through the point A, the abrupt switchingaction (hereinafter called backward switch) occurs inthe interval AB and the current rapidly decreases. Inthis case, when the current reaches 9 mA (appliedvoltage, ac 3.5 V), a backward switching occurs and thecurrent changes to 7 #A (applied voltage, ac 14 V).The backward switching speed is relatively slow androughly 100 through 200 msec. The resistance changesfrom 200 f at the low resistance state to 20 Mf at thehigh resistance state. With the electronic devices it isrequired that there is no temperature dependence ofthe electronic properties. So in the next study, weexamined how the ambient temperature would affectthe resistance of the specimens. Figure 5 shows thetemperature dependency of the resistance. Thespecimen has the temperature dependency as seen thisfigure. For example, in the case of the specimenapplying 10 V, when the ambient temperature elevatesup to 80C, the resistance changes quickly in the factorof 103. From this experiment it is found that theresistance change of the specimen is accompanied byirregular oscillation (afterward we describe). Figures 6and 7 show the temperature dependency of the V-Icharacteristics and the relation between the thresholdvoltage and the temperature respectively. Above 100Cthe negative resistance is no longer seen in the V-Icharacteristic curve. That curve shows only the positiveresistance. Above 80C, the switching actions alsodisappears. Vth decreases with increase in ambienttemperature and at the same time as seen in Figure 6.The areas of the hystersis loop of the V-I characteristiccurve also decrease. The gradient (that is OC part asseen in Figure 2) of the V-I characteristic curves afterswitching changes from negative inclination to apositive one with the increase in the temperature. As

iV (2/]xlO V

15V 3.0 xl0 3V/cm)

lOV (2)x I0 aV/cm)

,,I

2.5 3 0 3.5 4.0 4.5

TEMPERATURE KIxlO"FIGURE 5 Temperature dependence of the resistance. Theshadowed portion shows the area of oscillation.

seen in this figure, threshold voltage is in proportion tothe reciprocals of the temperature.On the other hand, each switching speed of forward

and backward switch also depends upon the ambienttemperature. Also the threshold voltage changes withthe ambient temperature. The temperaturedependency of the forward switch is illustrated inFigure 8. The switching speed of forward switching isabout 5 through 10 #sec at room temperature but theswitch speed increases 200 through 250 #sec, when theatmosphere temperature decreases from roomtemperature to -50C. The switching speed becomesroughly constant value below about -80C. Thebackward switch has the same tendency, too. Theswitching speed of backward switch is about 100through 200 msec at room temperature and increases 1through 1.5 sec at about -150C. We investigated therelation between backward switch time and appliedvoltage when ac voltage was suddenly impressed uponthe specimen with keeping the low resistance state.Figure 9 shows how backward switching time ischanged by applying ac voltage. From these results, itwas found that the switching time is proportional to theapplied voltage. For instance, when ac 4 V

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80 Y. TAKETA, O. ABE AND M. HARADOME

(I:) .l.,.0 !)

FIGURE 6 Temperature dependence of V-I characteristics.Horizontal scale is 5 mA/div and vertical scale 10 V/div.

(8 102 V/cm) is applied to the specimen, theswitching time is about 10 msec and in the case of ac8 V (1.6 103 V/cm) it is about 10 sec.As mentioned above, when the transition of the

resistance occurs, the oscillation is always observed inthe specimen. Thereby, the oscillation phenomenonwas examined by applying pulse-like voltage to thespecimen to avoid evolution of heat as much aspossible. The pulse-like voltage used is 150 V, width20 psec and pulse form is rectangular. Figure 10 showsthe oscillation characteristics. The oscillation amplitudeis 30 through 70 V, frequency 200 kHz through 2 MHzand the oscillation waveform is blocking-like, and thisoscillation is characterized in self oscillation of

Nb2Os-based thick-film. The amplitude and the

i00

02 4 6 8 i0

TEMPERA TURE K-XI0-FIGURE 7 Relation between ambient temperature andthreshold voltage.

" 80

LLI

< 60

o>

N 4o

20

D

102

i0,,,i

2 4 6 8 i0TEMPE RA TURE K-X10 -3

FIGURE 8 Temperature dependence of the switchingspeed.

frequency of the oscillation strongly depend upon theenvironmental temperature as indicated in Figure 11.The oscillation is remarkable especially in the region ofthe temperature between -50 and 80C. In this region,the frequency of the oscillation increases only slightlybut the amplitude decreases relatively large from about110 V to 60 V in inverse proportion to the ambient

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NEW THICK FILM FUNCTIONAL DEVICES 81

4 6 8

VOLTAGE nA rms

FIGURE 9 Relation between applied voltage and backwardswitch time.

i

2o

>

o ............. Frequency

50 0 50TEMPERATURE C

FIGURE 11 Temperature dependence of oscillationcharacteristics.

i00

o

OC 27"C

d

6o

o40

20

10D

Z

l0 m

50C 80CFIGURE I0 Temperature dependence of osciIIationcharacteristics. Horizontal scale is 50 V/div and vertical5 psec/div.

temperature. The relation between the oscillationbeginning voltage and the ambient temperature of thespecimen is shown in Figure 12. As the ambienttemperature increases, a sharp drop in the thresholdvoltage occurs. For example, when the temperature is

100, 24 and 100C, the oscillations appear at 480, 98and 32 V, respectively.

oioo o

TEMPERATURE C

FIGURE 12 Temperature dependence of threshold voltage.

The study of the memory effect and oscillationphenomena in the Nb2Os-based thick-film is just in itsinitial phase, and consequently serious discussion of amechanism will be premature. In the view of the X-raydiffraction analysis the structure of the specimenconsists of (Nb, V)205, NbVO3, and ar-Nb12029crystallites. In the case of oxide materials having theswitching effect, thermal filaments or channels are

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82 Y. TAKETA, O. ABE AND M. HARADOME

usually formed. However, these thermal phenomenahave not been observed in our specimen yet. A delaytime of the switching or oscillation action with inputsignal is found, and the temperature at which thesephenomena can be observed is lower than thetemperature (the region of about 800C) at which

Nb20 shows the sharp change in the electricalresistance. This seems that the filament or channel isthe most probable affecting factor for these phenomenaand thermal energy probably has direct effect upon theoscillation and memory phenomena.

Further studies, especially of the memory andoscillation mechanism, are being pursued and will be

published in the near future.

CONCLUSIONS

The Nb2Os-based functional devices having memory,oscillation, switching and so on were made by usingthick-film technology.The properties of the memory and oscillation effects

are as follows:

2) The mernory state of these devices can beconverted into the unmemorized state by applying acvoltage.

3) The oscillation is the self-oscillation and thewaveform is blocking-like.

4) The frequency of this oscilation and memoryphenomena are influenced by the ambient temperatureand the dimension of the specimen.

REFERENCES

1. C. A. Harper (Ed) Handbook of Thick-Film HybridMicroelectronics, McGraw-Hill Book Company, New York(1974).

2. Y. Taketa, et al, ’Thick-Film Thermistors’, Journal of theCollege oflndustrial Technology Nihon University, 9-1,109 (1976).

3. A. Ikegami, et al, ’Thick-Film Thermistor’, Ceramics, 14,220 (1979).

4. Y. Taketa, et al, ’New Thick-Film Oscillation Devices’,Proceedings Hybrid Microelectronics Symposium, 445(1975).

1) The memory is non-volatile memoryphenomenon.

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