NEW FINE series PURE CAT:No.710-02E-B Adjustable Dual Flow ...

CAT:No.710-02E-BFINE series PURENEW

It came to be able to perform valve travel adjustment for setting up a small flow.

FPR-NSD-71SS2-6.35

FPR-ND-71SS2-9.52

Excellent,Ultimate,Fine,Clean & Safe Technology

ABAZ A.Z ACC(I)

Adjustable Dual Flow Valves

1

Adjustable Dual Flow Valves application is to minimize the particle movement due todrastic introduction of fluid into the chamber.It is developed mainly for semiconductor process equipment.By switching a small flow and a large flow, it is possible to go up chamber internal pressure smoothly.Moreover, by the conventional Dual Flow Valve, adjustment correspondence with the difficult actual use line is possible.



Small-Flow Port

Small-Flow Adjustment ScrewSmall flow rate control isenabled by adoption of special mechanism.

Valve ConstructionAdopted direct diaphragmstructure.

Large-Flow PortMax. Cv Value can be obtained by operation pressure supply to a Large-Flow Port.

ActuatorThe exact flow rate change is possible by using the piston structure actuator.

Lock Nut for Small FlowFlow rate set is possibleto any small flow bythis Lock Nut.

● Adjustable from Small Flow Rate tp Max. Cv Value● Compact Design● High durabirity(High life)

1/4OD 3/8OD

You can download the latest catalogue from ”http://www.fujikin.co.jp/go/c72001e”

Excellent,Ultimate,Fine,Clean & Safe Technology

2

FPR-ND -71SS2-9.52FPR-NSD-71SS2-6.35

A

A

FD EE

FMaximum Opereting Pressure

Dual Flow Valves

End Connection Sizes6.35 ： 1/4OD9.52 ： 3/8OD

B

BFPＲ： Normal Close Type

NSD: Stainless steel small direct diaphragm valveND : Stainless steel direct diaphragm valve

C

C 7 ： UJR end connection、UPG end connection

It may be written as #A and #B on the end of ordering number at the time of product shipment. #A and #B show the history of a product and do not show the change on a function on a size. Cv Value may be changed with seat material, end connection of Body and fluid temperature.

※： Option or build-to-order article.

Nominal Size MaximumOperating Pressure Fluid Temperature Range

6.359.52

0.10.6

1MPa 0.4～0.6MPa－10～+40℃

Max Cv Value （With N2 gas at 20°C）

UJR, UPGⓇF900

●Actual leak rate: External leak:5×10－12 Pa・m3／sec or less， Seat leak:5×10－12Pa・m3／sec or less　●All valves are Helium leak tested.●Tested leak rate: External leak:5×10－10 Pa・m3／sec or less， Seat leak:5×10－10Pa・m3／sec or less　●Excellent Durability:1milon cycles or more.

Valves

－10

0.5

1

1.5

0 2010 4030 50 60 8070

Pressure （MPa）

Temperature （℃）

40℃、1MPa

9 ： F900 end connection※

D

Small-Flow Port Large-Flow Port


Acutuation Pressure End Connection

Temperature.-Pressure Rating

Part Number Designation

Operating Principle

Specifications

: Depends on the body end connection and size.


3

Same Face-To-Face Dimension as MEGA -ONE、NEW MEGA -ONEUpgrade of the existing lines is easily possible.

Nominal Diameter 6.35

® ®


Dimensions（Unit: mm）

Nominal Diameter 9.52

FPR-NSD-71SS2-6.35

9/16-18UNF

Nominal Size: φ6.35

Nominal Size: φ9.52

Thread Length: 62-M5×0.8

Lock Nut for Small Flow

Lock Nut

Small Flow Adjustment Screw

Small Flow Adjustment Screw

Small Flow Port

Large Flow Port

（23.5）

（23.5）（R30

.5）

45°

45°

HEX.17

Nominal Size: φ4

（72.3）

12（60.3）

（28.5）

21

13

13

（82.3）

52

55

35

O.P. 0.4〜0.6MPa TYPE N.C.

RAL

FLOWGE

2-M5×0.8

Large Flow Port

7/8-14UNF

FPR-ND-71SS2-9.52

（40.5）

（106）

（85.9）

（97）

76.2

（41.4）

φ7

（40.5）

55HEX.17

11.1

20.2

20.2

You can download the each drawing from Fujikin’s Cad data service. https://www.fujikin.co.jp/cad_s/

Small Flow Port

Thread Length: 6

4

By using this Adjustable Dual Flow Valves as shown above, we can promise to offer total cost merit by shortening your design and assembly time and realizing compact space around the equipment.

Relation between rotation angle of the Small-Flow　Adjustment Screw and Cv Value(Experimental value)

Relation between rotation angle of the Small-Flow Adjustment Screw and Cv Value

Test Conditions

0.35

0.3

0.25

0.2

0.05

0.1

0.15Cv Value

1800 360 540 720 1080 1260 1440900

Rotation Angle （°　）900 180 270 360 450

0.10

0.09

0.08

0.07

0.06

0.05

0.04

0.03

0.02

0.01

540 630 720 810 900

Cv Value

Rotation Angle （°　）

Flow Diagram Small-Flow Port

3-way Solenoid Valve

Pressure Gauge

Regulator MFMN2 GasAdjustable Dual Flow Valve

0.4MPa

GasChamber

ChamberDual Flow Valve Dual Flow Valve

Gas

VAC

VAC

3/8" line

3/8" line

1/4" line

1/4" line

Example1 Example 2

Test Fluid Test Fluid Temperature

Test Pressure　　　　　　　　Operating Pressure

N2 GasRoom TemperatureInlet Pressure： 0.01MPaOutlet Pressure： Atmosphere0.4MPa

１. Turn the Small-Flow Adjustment Screw for clockwise until slow flow rate becames zero.２. Determine zero point at zero flow rate, from this zero point, turn the Small-Flow Adjust -ment Screw 45° then lock by unti-clockwise. ３. Messure the flow rate.４. Calculate from messurement result.５. It examines by turning the Small-Flow Adjustment Screw every 45 degrees counter -clockwise in the above-mentioned procedure of 2-4.

Example 1Avoid particle rise (due to the sudden flow) to the chamber. You can just use this Adjustable Dual Flow Valve instead of using two on-off valves and a needle valve. Example 2It reduces the sudden exhaustion to the chamber at the beginning of vacuum suction process. You can just use this Adjustable Dual Flow Valves, instead of using a 1/4 valve and a 3/8 valve.

Nominal Diameter 1/4" Nominal Diameter 3/8"

Excellent,Ultimate,Fine,Clean & Safe TechnologyAdjustable Dual Flow Valves

Performance(Reference Data)

How to use Adjustable Dual Flow Valves

Test Procedure

Operating Pressure


NEW FINE series PURE CAT:No.710-02E-B Adjustable Dual Flow ...

Documents

Transcript of NEW FINE series PURE CAT:No.710-02E-B Adjustable Dual Flow ...