National Nanofabrication CentreCentre for Nano Science and Engineering

IISc, Bangalore, India

TUMS Murthy July 1, 2014

Cleanroom administrative committee Meeting

Cleanroom Admin Commitee Meeting TUMS MURTHY July 1, 2014

Equipment Charge proposalSl no. Equipment/ Activity Current NNfC Rate in

Rs/hrProposed NNfC rate in

Rs /hrSNF rate in Rs/hr Remarks

1 Raith e-line Electron beam Litho system ( Lithography, Inspection, SEM) 10,000 20,000 19003 SNF Premium tool charged at +23% of base rate. $ 249.19 x 1.23= $306 .5 including overheads

2 DRIE 10,000 15000 15450

3 All atmospheric furnaces: Wet and dry oxidation, Boron Diffusion, Phosphorous diffusion, Drive-in, Annealing

5000 10,000 15450

4 All LPCVD furnances : Nitride, Poly-silicon, Silicon Dioxide

5 ICP RIE ( Cl & F chemistry); PECVD( Nitride, Poly, Oxide), ALD (Al2O3)

6 Dielectric and Metal sputtering, E Beam evaporation

7 Mask aligner for Optical Lithography ( MJB4 and EVG 620)

Laser Writer for Optical Lthography ( Microtec, Heidelberg)

Wafer bonder (EVG 501)

8 Mask writing ( Microtech, Heidelberg) . Charge capped at a maximum of Rs. 10,000 for each 3-inch mask plate

2000 5000 NA Increase cap toRs. 20,000

9 Thermal evaporation Unit 2000 5000 15450

10 Chemical wet bench ( RCA Clean, Pirnha Clean, Etching) 2000 5000 10300

Equipment Charge Cap 3,00,000/month 4,00,000 ?? 617954 SNF cap is roughly 40 hrs usage

Staff support charge rate 6131

Training charge rate 9174

Consumables Charge Cost + 60.5%

Cleanroom Admin Commitee Meeting TUMS MURTHY

• Effluent testing by Shriram Institute– All effluents were tested– Dry Exhaust, Wet Exhaust and general exhaust are within

spec – Acid/Alkali drain after ETP is within spec– Fluoride level after ETP is high at 21 ppm reduced from 575

ppm at inlet. Need process optimization to bring this level down to ~3 ppm

• DI water was tested for 42 parameters and is within spec ( TOC<0.1ppm, Silica-nil, Sodium, Potassium <0.01ppm)

July 1, 2014

Action Items

Cleanroom Admin Commitee Meeting TUMS MURTHY

• Propose to conduct orientation course twice a year – August 3rd Tuesday and Wednesday ( Aug 19, 20)– February 3rd Tuesday and Wednesday

• Successful completion of this course will be a pre-requisite for authorization to use NNfC

• 3 modules of 1 hr will be offered on each day• Each lecture will cover fundamental principles

and practice and capabilities in NNfC

July 1, 2014

New User Orientation

Cleanroom Admin Commitee Meeting TUMS MURTHY

• Day 1– Introduction to Cleanroom procedures and

protocols, EHS ( Environment, Health and Safety)– Wafer Cleaning and wet processing– High temp growth and deposition ( Oxidation,

Doping, LPCVD, RTP)• Day 2

– Plasma processing (Deposition and etch)– PVD (Sputtering and Evaporation of materials)– Lithography

July 1, 2014

Orientation Course

Cleanroom Admin Commitee Meeting TUMS MURTHY

• Evaluated two solutions– Badger.

• Used by several University Nanofabs in USA.• Relatively expensive ($20K /year)• After-sales support is expected to be better. • No known users outside USA

– FOM Networks • Used by far smaller number of labs/centers• Inexpensive ( Initial cost $5K-$15K , only $1.5 K/year)• Weak after-sales support • A few installations outside USA( China, Europe)

July 1, 2014

Fab Management software

Cleanroom Admin Commitee Meeting TUMS MURTHY

• Chemical storage reviewed– 2 rooms on 1st floor – 2 rooms on 2nd floor

• Exhaust enhanced, sun-film on windows• The rooms on 2nd floor need air-conditioning

during summer to maintain temperature around 23 deg C– Cost estimated ~7 lakhs ( not negotiated)

July 1, 2014

Facilities Highlights

Cleanroom Admin Commitee Meeting TUMS MURTHY

• UPS batteries replacement – Found defective

• 4 batteries in 250 KVA UPS• 1 each in the 250 KVA and 500KVA UPS

– Intermediate step to replace weak batteries– Recommended step replace all batteries in one

UPS • 500KVA UPS 150 nos - 22.5 lakhs ( Rocket )• 250 KVA UPS x 3 80 each -10 Lakhs x 3 (Panasonic)

July 1, 2014

Facilities Issues

Cleanroom Admin Commitee Meeting TUMS MURTHY

• Cleanroom fresh air supply duct leakages– Found fresh air leakage inside the tunnel

• One leak at the joint at exit from tunnel in Litho supply• One probably near the inlet • Others, if any, are not reachable

– Working with Nanoclean to rectify the leakages – To find long term solution to the problem of

thermal insulation deterioration and damage ( pests ?) and leakages inside the tunnel

July 1, 2014

Facilities Issues

TUMS MURTHY

• User statistics

• May user statistics : – 80 users ( 45 from CeNSE)– Billed 19.0 Lakhs ( 15.5 from CeNSE)

July 1, 2014

Reports

Cleanroom Admin Commitee Meeting

Cleanroom Admin Commitee Meeting TUMS MURTHY July 1, 2014

Thank You

Cleanroom Admin Commitee Meeting TUMS MURTHY July 1, 2014

NNfC budget estimatesDescription Cost in Lakhs of Rupees

Cleanroom Consumables243.13

Utilities Consumables49.95

Sub total293.08

Process equipment AMC69.08

Process equipment spares 209.50

Utilities AMC33.01

Sub-total311.60

TOTAL604.68

Cleanroom Admin Commitee Meeting TUMS MURTHY

• Continuous improvement actions– Fire protection system commissioned in auto-

mode– Sun-film on all windows of clean room– Exhaust fan fixed over Silane cabinet– Wet exhaust scrubber repairs (section of ducts

and window screens)

July 1, 2014

Facilities Highlights