Nanopositioning for the ID16A-NI endstation...ID16A-NI NANO IMAGING BEAMLINE Page 2 Nanopositioning...
Transcript of Nanopositioning for the ID16A-NI endstation...ID16A-NI NANO IMAGING BEAMLINE Page 2 Nanopositioning...
Nanopositioning for the ID16A-NI endstation
F. Villar, P. Cloetens, A. Joita-Pacureanu, L. André, P. van der Linden,
O. Hignette, R. Baker, C. Guilloud, J. Meyer.
MEDSI - October 23, 2014 - Melbourne
ID16A-NI NANO IMAGING BEAMLINE
Page 2 Nanopositioning for the ID16A NI endstation - MEDSI Melbourne - October 23, 2014 - F Villar
Biomedical research
Sub-cellular processes
Anti-malarian drugs
Dubar et al, Chem. Commun.
Nano/Micro-Technology:
3D Integration
Voids in Through-Si-via
Bleuet et al (CEA-Leti)
ID16B-NA 165 m
ID16A-NI 185 m
UPBL4 Layout
Optics Hutch 34 m
EXPERIMENTAL TECHNIQUES
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Magnified HoloTomography X-ray Fluorescence Microscopy (2D/3D)
Ptychographic Nano-Tomography (ultimate resolution)
Probe Object With F. Pfeiffer et al.
YZ scan resolution 5nm Run out < 50nm
Y
Z
X-rays
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Vacuum + parasitic movements < 50nm
Correction of the guiding errors of a rotation stage by piezo actuators
Rotation stage
20
0m
m
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Vacuum + parasitic movements < 50nm Movement of the hexapod is made under the control of capacitive sensors
looking at 2 metrologic reference surfaces.
12 capacitive
sensors Reference surfaces
20
0m
m
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X-rays
The hexapod is also used to scan
the sample (2D fluorescence
microscopy)
20
0m
m
0
1
2
3
0 180 360
µm
angular position (°)
Tz error without compensation
ROTATION STAGE ERROR COMPENSATION
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1µm
L Ducotté
0
1
2
3
0 180 360
µm
angular position (°)
Tz error without compensation
ROTATION STAGE ERROR COMPENSATION
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16
17
18
19
0 180 360
µm
angular position (°)
Tz error with compensation
1µm
1µm
0
1
2
3
0 180 360
µm
angular position (°)
Tz error without compensation
ROTATION STAGE ERROR COMPENSATION
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1µm
17,160
17,170
17,180
17,190
0 180 360
µm
angular position (°)
Tz error with compensation
10nm
ASSEMBLY ON THE BEAMLINE
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ASSEMBLY ON THE BEAMLINE
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ASSEMBLY ON THE BEAMLINE
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X-rays
ASSEMBLY ON THE BEAMLINE
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KB optics
fixed curvature 17keV
Focal spot size 20nm
R. Baker
X-rays
ASSEMBLY ON THE BEAMLINE
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95mm working distance microscope
In situ visualization of the sample during
alignment.
O. Hignette
X-rays
FIRST RESULTS ON THE BEAMLINE
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Focus size: 75 nm (July 2014) → 50 nm (August) → 30-40 nm (September)
Horizontal
FWHM
31 nm
Vertical
FWHM
40 nm
A. Pacureanu, Y. Yang, F. Fus, S. Bohic, P. Cloetens
Scan of a knife-edge with the piezo-actuators
FIRST RESULTS ON THE BEAMLINE
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Focus stability:
1 nm repeatability for successive knife-edge scans
Down to 6 nm (!) over 8 hours horizontally
Down to 30 nm over 8 hours vertically
5 nm
~ 8 hours ~ 9 hours
40 nm
Horizontal stabilty Vertical stability
refills
FURTHER WORK : THERMAL DRIFT
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Measure and control the position of the KB
relative to the sample : 3 laser interferometers
Reduce the heat sources
(2 of the 4 motors switched
off on rotation stage)
Thermal modelling
of the station
+ temperature sensors
Reduce the sensitivity to heat
change (invar)
~ 9 hours
40nm
Long term drift
in the Z direction
Long term drift
in the Z direction
~ 9 hours
40nm
FURTHER WORK : THERMAL DRIFT
Page 18 Nanopositioning for the ID16A NI endstation - MEDSI Melbourne - October 23, 2014 - F Villar
Measure and control the position of the KB
relative to the sample : 3 laser interferometers
Reduce the heat sources
(2 of the 4 motors switched
off on rotation stage)
Thermal modelling
of the station
+ temperature sensors
Reduce the sensitivity to heat
change (invar)
FUTURE WORK 2015
Page 19
Samples at 100K to limit
the radiation damage
Liquid nitrogen cooled + conductive braid
P van der Linden
Nanopositioning for the ID16A NI endstation - MEDSI Melbourne - October 23, 2014 - F Villar
200m
m
sample
2nd KB optics focussing at 33.6 keV