10836_Raman Characterization of Carbon Nano Materials and Obtaining Representative Measurements
Nano-Materials Characterization
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Transcript of Nano-Materials Characterization
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Nano-Materials Characterization
Yoram Shapira, EE Nano-bio-electronics 18.12.01
Growth and
Processing
Characterization
and Analysis
Design and
Modeling
Nano
Systems
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Nano-Materials Characterization
Analytical Technique
Typical Application
Signal Detected Elements
Detection Limits
Depth Resolution
Lateral Probe Size
TXRF Metal contamination
X-rays S - U 109-1012
Atoms/cm2 10 mm
RBS Thin film composition
He atoms Li - U 1 - 10 at% (Z<20) 0.01 - 1 (Z>20)
2-20 nm 2 mm
XPS Surface analysis Depth profiling
Photo- electrons
Li - U 0.01 - 1 at% 1-10 nm 10 m – 2 mm
EDAX (EDS)
elemental microanalysis
X-rays B - U 0.1 - 1 at% 1 – 5 m 1 m
Quad SIMS
Dopant profiling Surface microanalysis
Secon- dary ions
H - U 1014-1017
Atoms/cm3 <5 nm 1 m (Imaging)
30 m (D Profiling)
TOF SIMS
Surface microanalysis
Secon- dary ions
H - U 108
Atoms/cm2 <1 monolayer
0.1 m (Imaging)
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Nano-Materials CharacterizationAnalyticalTechnique
TypicalApplication
Signal DetectedElements
DetectionLimits
DepthResolution
Lateral ProbeSize
AES Surface analysisand depthprofiling
Augerelectrons
Li U 0.1 - 1 at% <2 nm 100 nm
HRAES Surfaceanalysis, microarea depthprofiling
---“--- Li U 0.01 - 1 at% 2 - 6 nm <15 nm
SEM Surface imaging Secondary &backscatteredelectrons
3 nm
AFM Surface imaging Atomic forces 0.01 nm 1.5 5 nm
HRSEM High resolutionsurface imaging
Secondary &backscatteredelectrons
0.7 nm
STM Surface imaging Tunnelingcurrents
0.01 nm 0.1 nm
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Nano-Materials Characterization
Analytical Technique
Typical Application
Signal Detection Limits
Depth Resolution
Lateral Probe Size
FTIR Dopants and contamination
Infrared photons
1011-1012
Atoms/cm3 1-10 mm 2 mm
PL Dopants and contamination
Photons 1011-1012
Atoms/cm3 1 - 3 m >5 m
Raman Dopants and contamination
Photons 1019
Atoms/cm3 1 m 1 m
XRD Structure and contamination
X-rays
1020
Atoms/cm3 3 mm 15 m
HEED Structure and contamination
X-rays
1020
Atoms/cm3 5 nm 0.1-10 m
ION micro- probe
Dopants and contamination
Ions
5x1017
Atoms/cm3 5 nm 0.1 mm
HRTEM [TED] [EDS]
Nano-structure [Xtal structure] [element analysis]
Electrons [Electrons]
1m-1nm
10m-0.5nm
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Nano-Materials Characterization
Analytical Technique
Typical Application
Signal Depth Resolution
Probe Size
HRTEM [TED] [EDS]
Nano-structure Xtal structure Element analysis]
Electrons Electrons
1m-1nm
10m-0.5nm
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Courtesy Yossi LEREAH
Transmission Electron Microscope
• Electron source: W, LaB6, FEG• Condenser Lenses (Electromagnetic)• Sample• Objective Lens (determine the point resolution)• Post Sample Lenses• Detector: electron- light converter
• Chemical analysis: EDS, GIF
Wavelength at 200KV - 0.0025nm
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Bragg’s Law2dsinq=lL
Nano-Materials Characterization
Courtesy Yossi LEREAH
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Objective Lens The Core of TEM
• Back Focal Plane: Diffraction Pattern• Image Plane• Diffraction Contrast: Bright Field or Dark Field by
excluding one of the beams (in the back focal plane)• Phase Contrast by including all beams
Courtesy Yossi LEREAH
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Crystallization of Ge:Al (1)
A branched Morphology in Material Science that is relevant to Life Science
Contrast: Mass thickness, Bragg Conditions
Diffraction: Polycrystalline, Preferred orientation
•
Yossi LEREAH TEL AVIV University
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Yossi LEREAH TEL AVIV University
Crystallization of Ge:Al (2)
• Phase Contrast reveals the periodicity of the atoms.
• The interface is rough down to atomic scale
Courtesy Yossi LEREAH
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Melting of Nano-Particles
• Melting temperature depends on the particle size.
• Existence of surface melting.
• Diffraction Contrast between solid and liquid phases
Yossi LEREAH TEL AVIV University
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Nano-Materials Characterization
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Nano-Materials Characterization
Courtesy Yossi LEREAH
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Nano-Materials Characterization
Analytical Technique
Typical Application
Signal Probe Size
SEM Surface imaging
Secondary & backscattered electrons
3 nm
HRSEM High resolution imaging
Secondary & backscattered electrons
0.8 nm
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Collected signals in SEM
Sample
Incident beam
Secondary electrons (SE)
Backscattered electrons (BSE)
Cathodoluminescence(CL)
X-rays
Absorbed current
Courtesy Z. Barkay
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Energy distribution of SE and BSE
Courtesy Z. Barkay
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Signal emission from interaction volume
Rp
Courtesy Z. Barkay
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The origin of high SE spatial resolution
• High resolution SE(1): 1 nm• Lower resolution SE(2): 0.1-1 m
Courtesy Z. Barkay
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Composition dependenceE=30keV
Usually 0.1, at 30KeV=(z)
Courtesy Z. Barkay
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Basic SEM modes of operation - summary
(*) usually sizes of 1cm, dependent on SEM configuration
(**) voltage and Z dependent
Additional modes: Voltage contrast (VC) and EBIC - usually used in devices and p-n junctions.
Signal/Mode Information Material Resolution
Secondary electrons (SE)
Morphology All (*) ~1nm
Backscattered electrons (BSE)
Atomic number
All (*) 0.1-0.5m(**)
X-ray (EDS or WDS)
Atomic composition
All (flat) ~1m
(CL)Cathodo- luminescence
Bandgap, impurities, lifetimes
Insulators and semi- conductors
~ 1m
Courtesy Z. Barkay
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AntHuman hairEye of an ant
Courtesy A. Merson
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Nano-Materials Characterization
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Surface, Atomic number, Element imaging
BSE
Cu
SE
Courtesy Z. Barkay
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Nano-Materials Characterization
Courtesy Z. Barkay
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Nano-Materials Characterization
Courtesy Z. Barkay
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Nano-Materials Characterization
Analytical Technique
Typical Application
Signal Detected Elements
Detection Limits
Depth Resolution
Probe Size
EDAX elemental microanalysis
X-rays B - U 0.1 - 1 at% 1 – 5 m 1 m
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Atomic mapping and analysis
Cl
Brr
Agr
EDS analysis of AgClBr fiber cross section
0102030405060
0 0.2 0.4 0.6 0.8 1
fiber diameter (mm)
% a
tom
ic
BrClAg
Courtesy Z. Barkay
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Nano-Materials Characterization
Courtesy CEA
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Nano-Materials Characterization
Analytical Technique
Typical Application
Signal Detected Elements
Detection Limits
Depth Resolution
Probe Size
AES Surface analysis and depth profiling
Auger electrons
Li U 0.1 - 1 at% <2 nm 100 nm
FE-AES Surface analysis, micro area profiling
---“--- Li U 0.01 - 1 at% <2 nm <15 nm
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Nano-Materials Characterization
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Auger process
Courtesy A. Merson
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Courtesy A. Merson
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Auger Emission
a. X-ray fluorescenceb. Auger emission
Courtesy A. Merson
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Courtesy PHI
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Courtesy PHI
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Nano-Materials Characterization
Courtesy PHI
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Courtesy PHI
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Nano-Materials Characterization
Courtesy PHI
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Nano-Materials Characterization
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Nano-Materials Characterization
Courtesy PHI
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Nano-Materials Characterization
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Nano-Materials Characterization
Analytical Technique
Typical Application
Signal Detected Elements
Detection Limits
Depth Resolution
Probe Size
XPS Surface analysis Depth profiling
Photo- electrons
Li - U 0.01 - 1 at% 1-10 nm 10 m – 2 mm
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Nano-Materials Characterization
Courtesy PHI
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Nano-Materials Characterization
Courtesy PHI
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Nano-Materials Characterization
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Nano-Materials Characterization
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Nano-Materials Characterization
Courtesy PHI
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Nano-Materials Characterization
Analytical Technique
Typical Application
Signal Detected Elements
Detection Limits
Depth Resolution
Probe Size
Quad SIMS Dopant profiling Surface microanalysis
Secon- dary ions
H - U 1014-1017
Atoms/cm3 <5 nm 1 m (Imaging)
30 m (D Profiling)
TOF SIMS Surface microanalysis
Secon- dary ions
H - U 108
Atoms/cm2 <1 monolayer
0.1 m (Imaging)
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Nano-Materials Characterization
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Courtesy A. Merson
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Courtesy A. Merson
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Nano-Materials Characterization
Courtesy PHI
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Nano-Materials Characterization
Courtesy PHI
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Nano-Materials Characterization
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Courtesy A. Merson
I~exp(-2kd)
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Courtesy A. Merson
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Non-contact mode
Courtesy A. Merson
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Nano-Materials Characterization
Courtesy Y. Rosenwaks
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Nano-Materials Characterization
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Materials Characterization
Courtesy Dr. Z. Barkai
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Courtesy Dr. Z. Barkai
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Nano-Materials Characterization
STM: Si(7x7)
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Nano-Materials Characterization
A superlattice of alternating GaSb (12 ml) and InAs (14 ml) was MBE grown by W. Barvosa-Carter, B. R. Bennett, and L. J. Whitman. Only every-other lattice plane [Sb (reddish) and As (blueish)] is exposed on the (110) surface.
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Materials Characterization
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Iron (on Cu) “Coral”
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Nano-Materials Characterization
Courtesy Z. Barkay
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Nano-Materials Characterization
Courtesy Z. Barkay
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Courtesy Y. Rosenwaks
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Materials Characterization
Courtesy Y. Rosenwaks
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Materials Characterization
Courtesy Dr. S. Richter
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Materials Characterization
Courtesy Dr. S. Richter
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Materials Characterization
Courtesy Dr. S. Richter