Motion and Automation for Test, Measurement and Satellite inertial navigation system testing •...
Transcript of Motion and Automation for Test, Measurement and Satellite inertial navigation system testing •...
A e r o t e c h W o r l d w i d eUnited States • Germany • United Kingdom • Japan • China • Taiwan • France
Semiconductor Inspection and Metrology
Cleanroom and High Vacuum Systems
Integrated Automation and Data Acquisition
Sensor Testing
Surface Profiling
www.aerotech.comDedicated to the Science of Motion
Motion and Automation for Test, Measurement and Inspection
Capabilities in Test, Measurement and InspectionSince 1970, Aerotech has been dedicated to developing solutions for the test, measurement and inspection industry. Our expertise includes systems for shop floor, R&D, vacuum and cleanroom environments. Our ability to provide custom-engineered products and systems to end users, integrators and high-volume OEMs is unmatched, and our products deliver quality, performance, flexibility and the highest return on investment.
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5•Single-andmulti-axisrate
tables
•Motionsimulatorsoftware
•Advancedcontroltechniques
•Excellentrateandin-positionstability
Sensor Testing
•Compactsurfacemeasurementplatform(SMP)
•Linearamplifiers
•Integratedsystemsupport
•Measurewafers,opticsandcylindricalshapes
•X-rayinspection
•Ultrasonictesting
•Largeselectionofcomponents
•Linearamplifiers
•Linearandrotarymotors
Nondestructive Test 19
Surface Profiling 15
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23•Ellipsometry,scanningwhitelight
interferometry,stylusmeasurements
•Highperformancelinearmotorstages
•Lowprofiledirect-driveverticalandrotarystages
•Vacuumchuckoptionswithintegratedlevelingmechanisms
•LinearandPWMdigitalcontrollers
Semiconductor Inspection and Metrology
41•Stand-aloneand
PC-basedcontrollers
•PLCandmotionintegrationwithMotionPAC
•Operatorinterface
•Dataacquisition–SensorFusion
•Advancedtuningandcontrolsfeatures
Integrated Automation and Data Acquisition
•Satelliteinertialnavigationsystemtesting
•Scanningelectronmicroscopy
•Opticspolishing
•Vacuumoptionfor10-3to10-8
•Experiencewithvacuumapplications
35Cleanroom and High Vacuum Systems
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ContentsCapabilities in Test, Measurement and Inspection ........................................................... 2
Sensor TestingInertial Sensor Testing and Calibration ........................................................................... 6Motion Simulators ........................................................................................................... 8General Sensor Testing ................................................................................................... 12
Surface ProfilingSurface Measurement Motion Platform (SMP) ................................................................ 16Traditional Profiling and Measurement Solutions ............................................................ 18
Nondestructive TestX-Ray Inspection .............................................................................................................. 20Ultrasonic Testing ............................................................................................................ 22
Semiconductor Inspection and MetrologyThin Film Measurement ................................................................................................... 24Wafer Inspection ............................................................................................................. 26Atomic Force Microscopes .............................................................................................. 28Defect Detection/Particle Scanning ................................................................................. 30Electrical and Magnetic Characterization ....................................................................... 32Reticle Inspection ............................................................................................................ 33SEM, TEM, FIB ................................................................................................................ 34
Cleanroom SystemsCleanroom Capabilities .................................................................................................. 36
High-Vacuum SystemsVacuum Applications ...................................................................................................... 38Rotary Test Platform ........................................................................................................ 40
Integrated Automation and Data AcquisitionAerotech Integrated Automation Solutions ..................................................................... 42Standard Controls ........................................................................................................... 44Advanced Controls ......................................................................................................... 45Data Acquisition Solutions – Sensor Fusion ..................................................................... 46MotionPAC ..................................................................................................................... 48A Wide Variety of Amplifier Options .............................................................................. 50
Rotary and Linear MotionRotary Motion Solutions .................................................................................................. 52Linear Motion Solutions .................................................................................................. 56Planar Air-Bearing Stages ............................................................................................... 58Nanopositioners ............................................................................................................. 60Components to Integrated Solutions ............................................................................... 64
Bringing Value and Convenience to our Customers ...........65
Engineered Systems ...........................................................................66
Capabilities in Other Markets .......................................................68
Worldwide Training and Support ...............................................70
Awards and Recognition .................................................................71
Copyright © 2012, Aerotech, Inc. Information in this brochure is subject to change without notice.
WORLD HEADQUARTERS Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238 Ph: 412-963-7470 Fax: 412-963-7459 Email: [email protected]
Aerotech France 91280 Saint Pierre du Perray France Ph: +33 1 64 93 58 67 Fax: +44 (0)1256 855649 Email: [email protected]
Aerotech Germany Süd-West-Park 90 D-90449 Nürnberg, Germany Ph: +49-911-9679370 Fax: +49-911-96793720 Email: [email protected]
Aerotech United Kingdom The Old Brick Kiln Ramsdell, Tadley Hampshire RG26 5PR United Kingdom Ph: +44 (0)1256 855055 Fax: +44 (0)1256 855649 Email: [email protected]
Aerotech China Room 101, No. 28 Building Tianlin Road 140 Xuhui District Shanghai, China 200234 Ph: +86 (21) 3319 7715 Email: [email protected]
Aerotech Japan WBG Marive East 22F 2-6-1 Nakase Mihama Ward, Chiba Japan 261-7122 Ph: +81 (0)50 5830 6821 Fax: +81 (0)43 306 3773 Email: [email protected]
Aerotech Taiwan 5F., No.32, Aly. 18, Ln. 478 Ruiguang Road Neihu District, Taipei City Taiwan R.O.C. Ph: +886 (0)2 8751 6690 Email: [email protected]
Sensor Testing
Inertial Sensor Testing and CalibrationRegardless of the size, composition, degrees of freedom or quantity of sensors, Aerotech has a solution for the testing and calibration of today’s inertial sensors. Our solutions are designed to induce sinusoidal excitations, accelerations and positions for the testing and calibration of accelerometers, gyroscopes, inertial navigation systems, fiber optic gyros, inertial measurement units and stabilized systems. When coupled with our state of the art controllers containing Harmonic Cancellation, Motion Simulator Software, Motion Designer Software, Command Shaping and various other advanced control techniques, precise and highly-repeatable testing and calibration are assured.
Applications•Accelerometers
•Gyroscopes
•MEMScalibration
•Inertialmeasurementunits
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Features and Benefits•Highaccuracy,direct-drive
motionsimulators
•Nocogging
•Hightorque
•Mechanicalorairbearings
•Real-timedatacollection
•Position,rateandoscillationmodes
•User-profileimporting
•Easy-to-useprogrammingtools
•Slip-ringsortwistcablesfeedUUTsignals/power
•Solutionsrangefromeconomicalsingle-axissystemstohigh-performancethree-axissystems
ChallengeMany times a sinusoidal excitation is needed in the testing or calibration procedure of an inertia device. The very nature of this test introduces errors in the motion at the excitation frequency and other higher order harmonics. Left uncorrected, these errors can skew test results, lead to poor calibration or trigger unnecessary failures in quality assurance.
SolutionUsing Harmonic Cancellation, which is part of our Dynamic Controls Toolbox, you can easily cancel out any disturbances caused by the excitation frequency or an imbalanced load. This feature adapts to magnitude and frequency of error source. An easy-to-use setup wizard is provided through the Digital Scope and the Motion Simulator. Aerotech understands that disturbances are unacceptable and has developed Harmonic Cancellation for all of our controller lines to eliminate these errors, resulting in the most accurate testing and calibration results available.
Positionerrorwithoutharmoniccancellation
Positionerrorwithharmoniccancellation
AdvancedControl:HarmonicCancellation
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Precision Direct-Drive Rotary Position and Rate Tables•Highcapacityangularcontact
bearingsorairbearings
•Highlyaccurateclosed-loopcontrol
•Brushless,slotlessmotorforsmoothmotionwithnocogging
•Largeselectionofintegrated,low-noiseslipringsforcustomersignalsandpower
•Multiplemotortypesforhighspeedorhigh-torqueconfigurations
•Excellenterrormotionperformance
•Dualliquidorgasports
•Lowmaintenancedesign
•Positionresolutionto0.000006°(0.1µrad)(0.02arcsec)
ARMS-260
ARMS-200
ARMS-150
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Motion Simulators – GUIKey Features:
•Operate1,2,3axismotionsimulators
•User-friendlygraphicaluserinterface
•GraphicalmotionprofilePVAT(Position,Velocity,Acceleration,Time)importing
•PositionSynchronizedOutputforreal-timeeventtriggering
•TrajectorytrackingfromEthernet,analogorprograminputs
•FrequencyresponsemodeallowsinputsinesweepandUUTperformancetestsoncustomerdevice
•IterativeLearningminimizespositionerror
•GUIremoteclient-servermodeallowsparallelprocessingcapabilitiesandcontrolviaEthernetnetwork
•HarmonicCancellationoptimizesmotionpositionerrorsgeneratedbysinusoidalmotion
MotionDesigner
FrequencyResponse
DataAnalysis
MainScreen
Program
Trackscreenallowsexternalsignalselectionfortracking
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Motion Simulators – Single Axis
PCandNpaqorHLerack-mountcontroloperationviaAerotechMotionSimulationpackage
TiltMotion
UUTpowerandsignalsroutethroughsliprings
AreaformountingmultipleUUTs(UnitUnderTest)onourlargetabletopsforsimultaneoustesting
HighSpeedRotationorOscillation
ARMS-260•500lb(227kg)payloadcapacity
•Unloadedacceleration>20,000°/s2
•Minimumrate0.001°/s
Single-Axis ARMS Series Rate Tables•Single-axisconfigurationsincludeoptional
freestanding,highstiffnesspostwithlevelingfeet
•Reconfigurableforcontinuousorlimitedtravel
•Customslip-ringoptionsavailable
•Verticalorhorizontalorientationoptions
•Differenttabletopsizeoptions
High Accuracy Single-Axis Rate Table with Tilt Table•Allowsratetableperformanceat
multipleinclinationangles
•Mountedtoagear-driverotarytablefortiltmotion
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Motion Simulators – Two AxisTwo-axis motion simulators are useful for simultaneous axis testing of position, rate and acceleration sensors.
Two-Axis Rate Table with Integrated Electronics•Continuousrotationofbothaxes
•Smoothmotionfromnon-coggingbrushless,slotlessmotors
•Powerandsignalsliprings
•Tworotatinggas/liquidports
•Machinebaseincludesmotioncontroller,lineardigitalampsandESTOPsafetycontrols
Accuracyplotshowingbetterthan±1arc-secaccuracy(±4.85µrad)
ContinuousYaw
ContinuousRoll
ESTOPremoteforflexiblesafetylocations
LinearamplifiersandESTOPcontrolintegratedintorack-mountshelftominimizefloorspacerequirement
RemoteorintegratedPCoptions
Gyroandinertialdevicetesting
Motion Simulators – Three AxisThree-axis motion simulators provide roll, pitch and yaw simultaneous motion for real-world angular velocity profiles.
•Smallerthantraditionalthree-axissimulatorstoaccommodatetoday’sminiatureMEMSgyrosinamuchsmallerfootprint
•ModulardesignbasedontheARMSratetables
•Continuousorlimitedtraveloptions
•Pedestaloptions
•Single-axisratetablesintegratedwithaheatchamber
•Verticalandhorizontalmountavailable
•Lowcycletimesfortemperaturetests
Each motion simulator is tested for accuracy and tilt errors. Typical tilt error is below 10 µrad. Typical accuracy is ±5-10 µrad.
ContinuousRoll,PitchandYaw
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General Sensor TestingSensors of all shapes and sizes can be found in virtually every product that is manufactured. Sensors allow the products we use to work smarter and safer. The testing of these devices is critical to ensure safe and accurate operation. Regardless of the sensor type, Aerotech has a solution to meet your testing needs.
Applications•Positionsensors
•Infrareddetectors
•Automotivesensors
•Pressuresensors
Features and Benefits•Superiorvelocitystability
•Lowsettlingtime
•Highthroughput
•Highaccuracy
•Componentleveltoturnkeysystemcapabilities
•Numerousstageofferings
•Customizableuserinterface
•IntegratedDevelopmentEnvironment(IDE)
•Advancedcontrolstechniques
Products•APR
•ADRT/ADRS
•PROseries(ballscrewandlinearmotor)
•AGC
•ACS
•AGS1500
•Customsolutions APR
A3200andEnsemblemulti-axismotioncontrollers
ADRS
PRO165LM
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Variety of Linear Motion Stages for Every Application
ACT115:Lowcost,low-lead-timeactuators
PRO165LM-XY:StandardXY,XYZ,XYqcombinationsANT130-L:
Highresolutionlinearmotorstage
MPS75SL:Miniaturegear-drivenlinearstage
EnsembleSeries
SoloistSeries
Broad Selection of Integrated Controllers
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ChallengeToday’s sensors can come in many different shapes and sizes with even more variations in functionality. Developing and manufacturing devices is your area of expertise, and testing and inspecting those devices is very important. Aerotech understands that many times these highly specific devices require customized testing and calibration solutions.
SolutionOur highly skilled Mechanical, Electrical and System engineers will work with you to design a custom solution to meet your specific testing needs. We are capable of providing customization on all levels. From special motors to custom stages to complete machines with enclosures, safety and consoles, Aerotech is your one stop shop for all of your custom automation needs.
AGC Goniometers•Goniometersforuniquetesting
environments
•Linearamplifiersfordelicatetestingenvironments
•Integratedsolutionstominimizestartuptime
General Sensor Testing
NdriveLinearAmplifiers(ML,CL,HLe)
Surface Profiling
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Surface Measurement Motion Platform (SMP)Aerotech’s Surface Measurement Motion Platform (SMP) is a unique solution for surface profiling needs. The SMP is particularly effective when measuring or testing rotation symmetric objects but smaller non-rotation symmetric objects can also be measured. With the small mechanical footprint, integrated controls and flexible sensor options, the SMP can be easily added to any laboratory, testing facility or manufacturing floor. With the R and Theta axes available as air bearings or mechanical bearings there is a solution for every budget.
Features and Benefits•Idealforrotationallysymmetricobjects
•Includesuptofouraxesofmotioninacompactpackage -Availableasamechanical bearingorairbearingsolution
•Flexibilitytomeasuretopandsidesurfacesaswellasflatorsphericalparts
•Mechanicaldesignallowsforvarioussensoroptions -WhiteLightInterferometer -Multi-WavelengthInterferometer -VisionSystem -TouchProbes
•Compactdesignis60%smallerthantraditionalCartesiansystems
•High-speeddesignis40%fasterthantraditionalCartesiansystems
•Superiorpositionrepeatabilityinthenmrange
•Linearamplifiertechnology
•Versatilesoftwarearchitectureallowsforeasyintegration
•Advancedcontroltechniquestoeliminateenvironmentaldisturbances
•Availableoperatorinterfaceallowsforashortertimetomarket
Z
TT
C
RR
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ChallengeThe mechanics and controls are only part of a complete profiling or inspection machine. Sensor integration, process development and data acquisition are many times a much larger part of the overall machine. Many times, coordinating the mechanical system position with the sensor values can be difficult and time consuming. Incorporating the results into a polished user interface is also necessary in order to bring the final product to market.
IncreaseratestabilityanddecreasesettletimesinthepresenceofvibrationwithAerotech’sEnhancedThroughputModule(ETM)
SolutionAerotech offers a suite of powerful software tools that allow for fast development of a custom interface.
•C#
•VB.NET®
•ManagedC++
•LabVIEW®(VIsprovided)
•CLibrary
•EPICS
•IEC61131-3
Time
Posi
tion
MotionDesigner–Graphicaltrajectorygenerationanddataanalysis
UsetheAerotechOperatorInterface(OI)forfastdeploymentLabVIEW™VIsforbuildingacustominterface
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Traditional Profiling and Measurement SolutionsSurface profiling applications challenge current motion control technology on a number of fronts. Extremely high probe sensitivity is required for state-of-the-art systems, mandating the smallest possible parasitic motion (such as flatness), while high-speed data collection must not be hampered by the automation controller. Aerotech’s integrated scanning platforms offer key features to increase both throughput and performance.
Products•AGS10000andAGS15000linearmotorgantries
•ANT130-XYmulti-axisnanopositioner
•ANT130-L-Zverticalnanopositioner
•Componentsforcustomsolutions
Features and Benefits•In-positionstability
•Highaccuracy
•Lowtotalcostofownership
•Component-to-turnkeysystemcapabilities
•Solutionsforalllevelsofaccuracy
-Ball-screwstages -Linearmotorstages -Air-bearingstages
AGS15000seriesCartesiangantry
ANT130-XYandANT130-Lmountedtoagranitebase/bridgeassembly
Nondestructive Test
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X-Ray InspectionAerotech understands the challenges behind today’s X-ray technology and has the components and stages to support all areas of X-ray inspection. As the tolerances for inspection get better and better, then so must the precision of the axes involved in the test procedure. This is why it is important to choose your products from a vendor that can supply not only what you need today, but also what you will need in the future.
Features and Benefits•Accuratelow-speedoperation
•Highvelocitystability
•Controlssolutionsforallaxes
•Largeselectionofcomponents
Products•PRO115andPRO165ball-screwstages
•AGRgear-driverotarystage
•ADRSmechanicalbearing,direct-driverotarystage
•ABRSandABRTair-bearing,direct-driverotarystages
•Customsolutions
AGR-50gear-driverotarystage
ABRS-200MPair-bearing,direct-driverotarystage
PRO165ball-screwlinearstage
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SolutionAt Aerotech we have a wide range of stages and components to meet all of the needs of X-ray inspection machines. At the component level we have our linear motors, rotary motors and control solutions. Our PRO Series ball-screw stages and AGR Series gear-driven rotaries are the perfect choices for those non-testing axes. For test axes we have a large selection of direct drive and air-bearing options to meet any requirement.
ABL1500ZwithABRTrotarystage
ABRTseriesair-bearing,direct-driverotarystages
Linearamplifiersolutionsfornoiseimmunityandsmoothvelocitycontrol
ChallengeX-ray inspection machines require different axes of varying degrees of precision. Many times the axes not used during testing only require ball screw or gear-driven technology, while the test axes can require direct-drive motion or even air-bearing-level precision.
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Ultrasonic TestingWhether you are in search of a complete ultrasonic testing machine or just the components to build your own system, Aerotech has a solution. Our large selection of ball-screw stages, gear-driven rotaries and linear motor actuators are complemented nicely by our extensive controls in order to provide you with the best solution, all from a single vendor.
Products•PRO115ball-screwlinearstage
•ACTlinearactuator
•Linearamplifiers
•Rack-mountedamplifiers
•Linearmotors
•Rotarymotors
•Fullinspectionmachines
CustomXYZgantrysystembuiltfromPROserieslinearstages
Features and Benefits•Costeffective
•Noradiatedelectricalnoise
•Flexiblesolutions
•Componentstocompletesystems
Completelineoflinearamplifiersandmotors
Semiconductor Inspection and Metrology
Applications•Ellipsometry
•Reflectometry
•ScanningWhiteLightInterferometry(SWLI)
•Stylusmeasurements
Features and Benefits•Highlyaccurateclosed-loopcontrol
•Digitaloutputencoderoptions
•Brushless,slotlessmotorforsmoothmotionwithnocogging
•LowprofileZandthetastageoptions
•Rotarystageoptionswithintegralrotaryunionforvacuumchuckoperation
•Vacuumchuckoptionswithintegrallevelingmechanism
Thin Film MeasurementAerotech has a multitude of linear, rotary and Z stage options for two-, three- and four-axis thin film thickness and profile measurement tools. Each system has been designed to optimize throughput while minimizing thickness/profile direction geometric errors. All mechanics are designed to be fully cleanroom compatible by utilizing strict manufacturing methods, careful material selection and thoughtful cable management designs. Aerotech’s Ensemble controller, utilizing the ultra-compact Ensemble MP drive, provides a high-performance motion platform that requires minimal space.
Products•EnsembleMPPWMcontroller/drive
•Highperformancelinearmotorstages(ALS20000,PRO225LM)
•Lowprofiledirect-driveZandrotarystages(WaferMaxZ,WaferMaxT,ADRS)
350mmtravelALS20000XYstagewithWaferMaxthetastage
300mmwaferchuckwithintegral3-pointlevelingmount
EnsembleMPPWMdrives
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ChallengeFab floor-space is at a premium, which forces tool manufacturers to provide the smallest machine footprint possible. In addition, a variety of machine safety standards must be satisfied. Compact drive electronics that can run on non-lethal voltages (48 VDC and below) and can be mounted just about anywhere in the tool are highly valuable when attempting to pass regulatory standards like Semi S2.
SolutionAerotech’s MP and ML drive options are compact, DC input compatible drives that provide nearly all of the control functionality of other drives but take up less than one-fourth the volume. Their compact size allows them to be mounted just about anywhere and they are compatible with readily available 24 and 48 VDC supplies.
EnsembleML10-40-IOMXH(linear)andEnsembleMP10-IO-MXU(PWM)drives
41.1mm107m
m
14
1.2
mm
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Wafer InspectionAn integral element of every wafer fabrication facility is its optical (lightfield and darkfield) inspection systems. These surface characterization tools detect a wide variety of defects including voids, pits and scratches in the wafer surface. Smooth, high-speed raster scanning is required to meet the needs of today’s fabrication facility. Aerotech’s ABL9000 has long been the standard for this type of inspection by providing superior dynamic performance characteristics.
ABL9000motionplatformwithgranitebridge/Zaxis,optimizedisolationsystemandmachinebase
Features and Benefits•Aerotechdirect-drivelinearmotorsallowfor
high-speedscanningandfastturnaround,thusmaximizinginspectiontoolthroughput
•AerotechoffersawidevarietyofaxesthatcanbemountedonanXYstage,includingthetaaxesforpatternalignmentandZaxesforfocusadjustment
•Open-framestageformicroscopeapplications
•Aerotech-suppliedmachinebaseandisolationsystemminimizeintegrationtime
•Aerotech’sexperiencedengineeringgroupcanassistindevelopingacustomsystemtomeetyourspecificneeds
Aerotechoffersawidevarietyoflinearandrotarystagecombinationstofitnearlyanyinspection/defectdetectionapplication.
ABL1500WB/ABL1500XYwithpneumaticallycounter-balancedABL1500Z
ABL1500WB/ABL1500XYwithWaferMaxZq
Products•Highdynamicstages(PlanarHD,ABL9000,
ABL1500,ALS3600)
•Direct-driverotaryandZ-axisstages
(WaferMaxZandT)
•HighperformanceA3200controlplatform
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TheSlice(rasterscanning)commandblendsascanningandsteppingmovetogethertoformasinglecontouredmoveforhigherthroughput
Aerotechhasmultipleopenframestageconfigurationsincludingairandmechanicalbearingsystemsideallysuitedtoopticalwaferinspectionapplications.
Automation3200(A3200)multi-axismachinecontroller
HighthroughputcustomALS3600openframestage
ChallengeThe key to optical wafer measurement systems is their ability to accurately identify and measure defects while running at production line rates. This requires exceptionally stiff mechanical structures, motion profile generation and responsive isolation systems. The system’s ability to settle to a target scan velocity is key to meeting wafer per hour (wph) throughput requirements.
SolutionBoth Aerotech’s air and mechanical bearing stages are developed to be the highest stiffness structures possible. This design philosophy forces throughput reducing natural frequencies as high as possible. In addition, Aerotech has developed move profile optimization routines that allow for faster settling after acceleration. The Slice command smooths the stage turnaround during raster scanning, and Directional Gain Scheduling reduces settling time by automatically adjusting gains based on error motions.
Dynamic Position Error, Circle XY - Gain Scheduled Kpos
Time (seconds)
Pos
Erro
r x
(µm
)Po
s Er
ror
y (µ
m)
Vec
tor
Pos
Erro
r (µ
m)
Time (seconds)
Time (seconds)
Normal
Gain Scheduled Kpos
Normal
Gain Scheduled Kpos
Normal
Gain Scheduled Kpos
Thissystemfeaturesair-bearingstagesandtwo-axislaserinterferometerfeedbacktoprovidesub-nanometerresolution.
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Atomic Force MicroscopesMany inspection applications require tight positional stability, but few are as stringent as that for Atomic Force Microscopes (AFMs). Aerotech has multiple motion platform solutions that directly address the needs of Atomic Force Microscopy by providing nanometer step sizes to single-digit nanometer positional stability. The recommended platforms are all direct-drive, direct-feedback devices that undergo extensive testing to ensure top-notch accuracy and stability performance.
Products•Ultra-stablemulti-axismotionplatforms
(ABL9000,ANT95-XY,ANT130-XY)
•Lownoise,highresolutioncontrolelectronics(NdriveHLe,Npaq/DL4010,NdriveML)
•Alternativeconstructionmaterialstominimizethermalissues
Features and Benefits•A3200motioncontrollerwithrackmountor
discretelinearamplifiers
•HighperformanceintegratedXYlinearmotorstages–airbearingandmechanicalbearing
•Ultra-stablemotionplatformprovidesverytightin-positionstabilityandminimaldrift
300mmwaferclassABL9000planarair-bearing
SolutionAerotech’s ABL9000 can be “locked” in both X and Y to dramatically increase positional stability over time. Specially designed methods are used to control the locking procedure while maintaining positional information. This ensures that the user always knows where the sample is positioned regardless of the locking condition.
Special calibration methods can be used to increase both the unlocked and locked accuracy at the workplane of an XY stage system. These methods are designed to not only reduce the positional errors but also X and Y direction errors caused by rotations in theta X, theta Y and theta Z directions.
ChallengeAFMs produce exceptionally high-resolution images of very complex geometric features. The challenge is finding a motion platform that provides very accurate positioning as well as no motion when settling in position. Positional instability is a parasitic motion that AFMs cannot tolerate.
InvarALS130-XYwithpneumaticallycounterbalancedZaxisisspecificallydesignedtodramaticallyincreasethermalstability.
ANT180-XYstagesystem
ANT130-XY ANT95-XY-ULTRADiscreteorrack-mountlinearamplifieroptions
0 5 10 15 20 25 301
0
1
2
3
4
5
6
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Time (s)
Pos
ition
(nm
)
1 nm Best-in-Class Resolution
1nmstepplotforANT95-XY-ULTRA
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Defect Detection/ Particle ScanningAerotech’s ultra-smooth linear air-bearing motion systems and high performance rotary stages are an excellent choice for macro-defect, particle contamination and general defect measurements. High speed linear and matched rotary stages coupled with a state-of-the-art motion controller provide accurate, high-throughput measurements. Whether it is simple “spokes-of-the-wheel” motions or tightly controlled helical inspection profiles, Aerotech has the optimum stage combination.
Products•A3200motioncontrollerwithrack-
mountordiscretelinearamplifiers
•HarmonicCancellationadvancedcontrolsminimizeparasiticcouplingbetweenrotaryandlinearaxes
•Highperformanceair-bearing,linearmotorstages(ABL1500/ABL2000)
•Direct-drivehigh-speedspindleortraditionalrotarystages(ABS2000/ASR2000/ABRS/ADRS)
CustomABL2000linearair-bearingwithcustomlow-profilerotarystage
Dependingonaxisorientationandpackagingrequirements,Aerotechcandesignacustom,high-performanceR-thetasolutiontosuit.
ASR2000seriesmechanical-bearingspindle
Aerotechhasbothmechanicalandair-bearingspindleoptionsforrotationalspeedsupto6000rpm.
ABS2000seriesair-bearingspindle
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ChallengeWhen incorporating high-speed rotary axes into a multi-axis motion platform, chuck balancing becomes an important concern. Proper balancing of the payload increases accuracy by reducing machine vibration and increases throughput by allowing for higher spindle speeds.
Features and Benefits•Aerotechadvancedcontrols–
HarmonicCancellation
•Reducepositionerroronperiodictrajectories
•Rejectperiodicdisturbances
•Adaptstomagnitudeandfrequencyoferrorsource
•Built-insetupwizards
SolutionFor applications utilizing a high-speed spindle, Aerotech can perform chuck centering/balancing to reduce integration time. In addition, Aerotech’s advanced control suite incorporates “Harmonic Cancellation,” a control method specifically designed to dramatically reduce cross-talk between rotary axes with residual imbalance and linear axes.
High-powerlinearamplifiercontrolsystem
PositionerrorwithoutHarmonicCancellation
PositionerrorwithHarmonicCancellation
AdvancedControl:HarmonicCancellation
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Products•EpaqrackmountorEnsembleCP/MP
discretedrives
•PROseries,AGS1000,side-driveXY
•AVS/AVSIseries,ATS100forfocusing
•AGRseries
Electrical and Magnetic CharacterizationFrom traditional four-axis stage stacks to small footprint gantry systems, Aerotech has a multitude of options for electrical and magnetic measurements. For magnetic measurements, Aerotech can also supply custom structures that increase the distance between magnetic materials and the work area or can provide specially designed shielding solutions.
Features and Benefits•TraditionalXYorgantryconfigurations
•Rotaryencoder,linearencoderor“dual-loop”feedback
•Highaccuracyandtightin-positionstability
•Customdesignsavailable
AGS1000Cartesiangantry
CustomXYcrossed-rollerstage
Ensemblemulti-axisstand-alonecontroller
Reticle InspectionReticle inspection requires a unique combination of mechanics that provides both ultra-high accuracy and a large clear aperture. The combination of high stiffness air bearings and dual linear-motor-driven axes provides an XY open-frame stage with exceptional performance characteristics. The ABL3600 represents a major upgrade in performance over traditional mechanical-bearing open-frame stages.
Features and Benefits•Largeclearapertureprovides
completeaccessforinspectionandillumination
•Duallinear-motor-drivenXandYaxesprovideexcellentyawperformance(0.5arcsec)
•Allairbearingsarefullypreloadedtoprovideexceptionalsystemstiffness
•Brushless,slotlessmotorforsmoothmotionwithnocogging
•Linearencoderorlaserinterferometerfeedbackprovideshighlyaccuratepositioning
Products•ABL3600
•ALS3600
•Customtip-tilt
•A3200controller
•Npaqdrivechassis
Automation3200(A3200)multi-axismachinecontroller
ABL3600open-frameair-bearingwith250mmXYtravel
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SolutionAerotech has a long history of supplying vacuum compatible motion systems for a variety of applications including semiconductor inspection, satellite testing and ion beam profiling. Our application, engineering and production staff are highly skilled and experienced with custom vacuum system solutions designed to meet specific testing needs of vacuum inspection systems.
SEM, TEM, FIBElectron/ion microscopy including transmission electron, scanning electron and focused ion beam microscopes provide exceptionally high resolution images with large depths of field and have many other advantages over traditional microscopy. Strikingly clear images are obtained from samples ranging from biological samples to semiconductor wafers. Regardless of the component under test, Aerotech has a variety of high vacuum, low magnetic field electromechanical solutions.
ApplicationsToday’s electron- and ion-beam microscopes require very high throughput motion systems that utilize high vacuum compatible materials and incorporate careful magnetic field management. All of these features ensure fast, accurate measurements with little contamination.
•BGAcomponents
•Biologicalsamples
•Materialsqualification
•Semiconductorwafers
Features and Benefits•Customsolutions
•Highthroughput
•Lowsettlingtime
•Highaccuracy
•Componentturnkeysystemcapabilities
•IntegratedDevelopmentEnvironment
•Advancedcontroltechniques
34
XYvacuumstagewithspecialshieldedmagnets
Cleanroom Systems
Cleanroom CapabilitiesAerotech manufactures the widest variety of cleanroom compatible motion solutions for high performance applications such as wafer inspection and metrology.
Aerotech Cleanroom-Ready Motion Systems Feature:•Lowparticulategeneratingcablemanagement
systems
•Cleanroomcompatible,hydrocarbon-freelubricants
•Specialmaterialsurfacetreatments
•Manufacturingprocessesthatarespecificallydesignedtomaximizesystem-levelcleanliness
•Cleanroompackaging
Cleanroom Facility•ISOClass6
•CellspecificISOclass5areas
•Temperaturecontrolto±0.1degreeC
•Dedicatedproducttransferandlargemainproductassemblyareas
•Actively-isolatedgranitesurfaceplatesfortestingpurposes
36 www.aerotech.com
ALS20000XYlinearmotorstage
ABL9000planarair-bearingwithcustomisolationsystem
High-throughputopen-framesystem
High-Vacuum Systems
38
Vacuum ApplicationsAerotech’s vast application experience, unmatched product scope, and extensive engineering capabilities make us the partner of choice for vacuum compatible motion systems. Since our inception, Aerotech has designed and manufactured the highest-performance motion control and positioning systems available, and our vacuum-compatible platforms are no exception. Aerotech’s precision motion control products provide the critical performance for today’s demanding vacuum applications in markets such as semiconductor manufacturing and inspection, optics fabrication and military/aerospace. Always guiding our vacuum system development effort is Aerotech’s motto: “DedicatedtotheScienceofMotion.”
Aerotech Has Specific Experience with Vacuum-Compatible Motion Platforms•Materialselection
•Surfacepreparation
•Hardwareventingandeliminationoftrappedvolumes
•Lubricantselection
•Thermalmanagement
•Magneticfieldcontrol
•Cleaning
•Bake-out
•Handlingandpackaging
Vacuum Options Available from Aerotech•Lowvacuumoption(10-3torr)
•Standardvacuumoption(10-6torr)
•Highvacuumoption(10-8torr)
Aerotech’s Vacuum Experience Includes a Wide Variety of Applications•Satellitecomponenttesting
•Scanningelectronmicroscopy(SEM)
•E-beaminspection
•EUVlithography
•Ion-beamprofiling
•Ionimplantation
•Deposition
•Opticspolishing
XYvacuumsystempreparedfor10-8torroperation
A wide variety of standard Aerotech motion products are available in vacuum-prepared versions. In addition to standard platforms, Aerotech routinely manufactures custom systems designed to meet application-specific needs. All of Aerotech’s vacuum compatible motion platforms minimize pump down time, chamber contamination and thermal issues. In addition, these systems can incorporate key application considerations like reduction of magnetic fields.
ShieldedlinearservomotorAerotechcleanroom
Actualmagneticfieldmeasurementovera300mmdiametertargetzone
ActualRGAplotfromanXYsystem
39
Multipleconfigurationsavailable
40 www.aerotech.com
The Aerotech Rotary Calibrator (ARC) sets a new industry standard of performance for angle and rotary table calibrations. At the heart of the Calibrator is a large rotary air-bearing axis with nanometer-level error motion performance. This high-accuracy air-bearing master axis is constructed of steel to closely match the CTE
of the surrounding granite structure. The air-bearing acts as the master angle generator to generate angles as small as 0.015 arc-seconds to over 360° (continuous rotation).
The Calibrator is equipped with a high-resolution, high-accuracy electronic autocollimator for measurement feedback on optical surfaces. The entire instrument is built on a precision granite machine structure that is isolated from the machine base and floor through passive air isolation. A custom enclosure isolates the system from air turbulence, high-frequency thermal fluctuations and ambient light. System electronics are housed in a separate enclosure from the instrument to isolate any electrical noise and heat from the instrument. Custom calibration software provides the operator with easy control of the angular step, test procedure (such as circle closure) and plot/report generation.
Rotary Test Platform
1. Angular measurement uncertainty analysis performed according to ANSI/NCSL Z540-2-1997: Guide to the Expression of Uncertainty in Measurement while calibration of a rotary table over 360º with 10º steps using a modified circle closure technique. The temperature of the lab was controlled to 20ºC +/- 0.25ºC.
Specifications• Master-axis accuracy:
<0.15 arc-seconds (<727 nano-radians)
• Minimum incremental step (min. angle): 0.015 arc-seconds (73 nano-radians)
• Electronic system resolution: 0.0069 arc-seconds (34 nano-radians)
• Angular measurement uncertainty: <0.2 arc-seconds expanded uncertainty, k=2 (<970 nano-radians, k=2)1.
• Customized software for automated test execution and report generation
• Built-in control and plot utilities
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Position (Degrees)0� 50� 100� 150� 200� 250 300 350
0.2
0.15
0.1
0.05
0
-0.05
-0.1
-0.15
-0.2
Data Taken 5-May-2010
Data Taken 11-May-2010Data Taken 6-May-2010
Pos
ition
Err
or (A
rc S
econ
ds)
Aerotech Rotary Calibrator (ARC) master axis error – calibrated repeatability over multiple days.
Integrated Automationand Data Acquisition
42 www.aerotech.com
•Highperformance
•Easytouse
•Flexible
•Scalable
•Networked
•Lowestcostofownership
•Advancedcontroltechnology
Linear and Rotary Servomotors
Automation 3200 Ensemble
Network and Fieldbus Connectivity•Ethernet/IP™
•Modbus®/TCP
•DeviceNET
•EthernetTCP/IP
•USB
•RS-232
•GPIB
•PC-based
•1to32axesofcoordinatedmotion
•Upto32tasks
•RS-274(G-code)
•Advancedfeaturesfordemandingapplications
•PWMorlineardrives(upto150amp)
•Scannercontrolformarking
•Tightlyintegratedlaserfunctionality
•Retrofitpackageforoldcontrols
•IntegratedPLC–MotionPAC
•Stand-alone
•1to10axiscontroller
•Upto4tasks
•Versatile,cost-effective,coordinatedmotion
Aerotech Integrated Automation Solutions
Configure Your Automation Solution with Aerotech
• Common Software Platform: Tools, Powerful Programming Environment, Calculators, Diagnostics
ProgrammingInterface Autotune LoopTransmission
43
Soloist
Accessories•Linearamps
•ESTOP
•Rack-mountconfiguration
•Rack-mountPCs
Data Acquisition
•Stand-alone
•1to10axiscontroller
•Upto4tasks
•Versatile,cost-effective,coordinatedmotion
•PWMorlineardrives(10-150amppeak)
•Drivesbrushless,linear,rotary,DCbrushorsteppermotors
•Desktop,rackmountorpanelmount
•Stand-alone
•Networkupto1,024singleaxes
•Upto4tasks
•Elegant,economical,versatilecontroller
•PWMorlineardrives(10-150amppeak)
•Drivesbrushless,linear,rotary,DCbrushorsteppermotors
• Common Software Platform: Tools, Powerful Programming Environment, Calculators, Diagnostics • Use the libraries and SDK to develop your own applications with .NET, C#, VB.NET, C, or LabVIEW®
MotionPACParameterEditor DigitalScope
SensorFusion
44 www.aerotech.com
Standard Controls
Slice Move
Aerotech controllers offer the broadest array of programming interfaces and core motion capabilities of any automation system available today for both OEMs and end-users alike.
Increasescanningthroughputbyblendingstepandscanintoacontouredmove
Axis Calibration
Compensateforrepeatablemechanicalerrorsinapositioningsystem
Gantry Mode
Complexgantrycontrolisreducedtoafewsimplecommandstohandledualmotorand/ordualfeedbackconfigurations
Parts Rotation
Usewhenatwo-dimensionalpartmustberepeatedindifferentorientationswithouttranslatingthepartprogrammanytimesover
3D Error Correction
MeasureXYZerrorsandthecontrollercancorrectthecommandedpositiontoaccuratelymovetoalllocationsinthe3Dspace
Dual-Loop Control
Dual-loopcontrolisusedtoeliminatetheeffectsofbacklashandothersourcesoferror
Laser Interferometer
Systemsrequiringultra-highresolutionandfeedbackstabilityuseinterferometerfeedback
Velocity Blending
Thevelocitychangestothenextvelocitycommand,accelerationlimited,withoutstopping
Orthogonality Correction
ImproveX-Yplanaraccuracybysimplyenteringtheknownorthogonalityerrorandthecontrollerwillcompensate
45
Advanced Controls
Directional Gain Scheduling
Decreasesettletimeandincreasein-positionstability
Friction Compensation
Reducesettletimeandreduceerroratdirectionreversals
Position Synchronized Output (PSO)
Triggerexternaleventspreciselyatdesiredpositionwhileinmotion
Motion Designer
Graphicaltrajectorygenerationanddataanalysis
Command Shaping
Reducevibrationattheworkpoint
Loop Transmission
Tuninganddiagnosticutilitythatgreatlyenhancessystemperformance
Harmonic Cancellation
Reducepositionerroronperiodictrajectoriesandrejectperiodicdisturbances
Iterative Learning Control
Reducefollowingerroronrepeatedmovesequencesthatcanbelearnedandoptimized
Enhanced Throughput Module (ETM)
Increaseratestabilityanddecreasesettletimesinthepresenceofvibration
46 www.aerotech.com
Data Acquisition Solutions – Sensor FusionThe Sensor Fusion desktop, rack mount or panel mount system allows you to record sensor I/O precisely aligned with encoder positions, and to retrieve the results through one easy to use software interface. The Sensor Fusion, when used with PSO and the Digital Scope, is Aerotech’s answer for all of your data acquisition needs. The Sensor Fusion can have up to four of the following card options:
With a variety of analog, digital, encoder and PSO cards available, the Sensor Fusion allows you to record sensor data and position data in ways that have never been possible. Its modular design allows for additional cards such as vision and serial data acquisition. With desktop, rack mount and panel mount options available, there is a Sensor Fusion for every application. As an integrated member of the A3200 motion controller family, the Sensor Fusion allows you to collect position data as well as sensor data in concert with one another.
•AnalogInput
•AnalogOutput
•DigitalInput
•DigitalOutput
•EncoderInputandPSOOutput
Features and Benefits•Dataacquisitionprecisely
integratedwithmotioncontrol
•SensorI/Oeasilyalignedwithencoderposition
•Datarecordingandplayback
•Combinesensorinputsinrealtime
•5MHzcollectionrates
•Oneeasy-to-usesoftwareinterface
•Noadditionalsoftwarerequired
•Desktop,rackmountandpanel-mountoptions
SensorFusion
47
SF-DO-01SF-DO-02•32digitaloutputs
•5MHzplayback
•32mAat5V
•Highpoweroption:325mAat5-24V
Digital Input Digital Output
Encoder Input and PSO Output
Digital Input:SF-DI-01•32digitalinputs
•5MHzcollectionrate
•5Vor24V
•Activehighoractivelow
SF-ENC-01•4encoderinputs
(TTL)
•1PSOoutputs
•1.0MHzcollection
Analog OutputAnalog Input
SF-AI-01SF-AI-02•16analoginputs
•Upto400kHzcollection
•18-bitresolution
•Selectableinputrange
SF-AO-01SF-AO-02•8or16outputs
•500kHzplayback
•16-bitresolution
•5V,10Vorexternalreferencevoltage
SF-AO-03SF-AO-04•4or8outputs
•750kHzplayback
•20-bitresolution
•5V,10Vorexternalreferencevoltage
48 www.aerotech.com
MotionPAC – PLC Integrated With Motion•30%to50%reductionindevelopmenttime
•High-performancemotionfullyintegratedwithstandardPLCenvironment
•Easy-to-usediagnosticsandtools
•Standards&flexibility:IEC61131-3,.NET,PLCopen,PC-based
•IntegratedwiththeA3200motioncontroller
Program in IEC6 1131-3: LD, FBD, ST
Define hardwareOnline mode displays all Tag values
Axis manager Standard LDCreate libraries
Combine LD and FD on same program
Completely integrated motion blocks
Tag database
LD, FBD or ST programs
49
Integrated Automation: MotionPAC
MotionPAC•IEC61131-3•PLCopen•Aerotechmotionblocks•Axismanager•Extensivedevelopment&debugenvironment•Simulateprogram
Motion Composer•Axismanager•Low-levelmotiondiagnostics•Motionprogramming•Advancedcontrolalgorithms
Scope•Signalcapture&analysis•Autotuning•Looptransmission•Encodertuning•Advancedcontrols
HMI•Programselectionandrun•Jogpanel•Machinecontrol•Customizablebuttons•Axismanager
I/O & Data Acquisition•High-speeddataacquisitionsynchronized
withmotionandPLC•High-speedregistration•PositionSynchronizedOutput•Machineinterlocks•FieldbusI/O
Central Machine Tag Database•Tagsavailableinallapplicationsbyname•DefinebothlocalorglobalmachineTags•DefineTagsinI/Odefinition,ST,LD,FBDor
motionprogram
50 www.aerotech.com
A Wide Variety of Amplifier Options
MP
1 1 1 11 6 6
10 A
10-80 VDC (Output)
1-AI6-DI/4-DO
1-AI/1-AO
8-DI/8-DO
1-AI/1-AO
All units capable of sinusoidal commutation, dual-loop control and drive brushless, brush or stepper motor
16-DI/16-DO
1-AI/1-AO
16-DI/16-DO
1-AI/1-AO
16-DI/16-DO
4-AI/4-AO
16-DI/16-DO
4-AI/4-AO
6-DI/4-DO
1-AI/1-AO
6-DI/4-DO
1-AI/1-AO
6-DI/4-DO
1-AI/1-AO
10-320 VDC 10-320 VDC ±40-80 VDC±40 VDC
10 A
N/A
Npaq®: 10-30 A
Npaq®: 10-320 VDC
Multiple Configurations
Available
Multiple Configurations
Available
1-AI per axis
8-DI/8-DO per Axis
1-AI/1-AO per Axis
Epaq: 24-90 VDC
Epaq: 10 A10-30 A 10-150 A 10-20 A
PWMPWM PWM LinearLinearNpaq®: Both
PWM and Linear Available
Epaq: Both PWM and
Linear Available
A3200Drives
Ensemble Controls
Soloist Controls
Output Type
Axes
Peak Current Output
DC Bus Voltage
Standard I/O
Optional I/O
Incremental Encoder
Absolute Encoder
Resolver/ InductosynCapacitive
ProbesLaser
Interferometer
CP HPe HLe MLCL Integrated Drive Racks
Npaq® or Npaq® MR drive chassis
Epaq or Epaq MR drive chassis and motion controller
1
16-DI/16-DO
1-AI/1-AO
6-DI/4-DO
1-AI/1-AO
±40 VDC
10 A
Linear
Rotary and Linear Motion
52 www.aerotech.com
Rotary Motion Solutions
•100mm,150mm,200mm,250mmand325mmapertures
•Axialloadcapacityto595kg
•Excellentaccuracyandrepeatability
•Cog-freemotorprovidessmoothmotion
•Nogearbacklash
ALAR•Noaccuracychangeovertime
fromgearwear
•45-300rpmcontinuousrotationspeed
•Vac10-6torrcompatibleversions
•Highresolutiongivesexcellentsteppingandin-positionstability
TheALAR-LPseriesisdesignedtobemountedwiththeverticalaxiscoincidentwithgravity.TheLPislowerprofilethantheSPforapplicationsthathavelessspaceavailable.
In-positionstabilityof±0.05µrad Highresolutiongivessmallstepcapability
TheALAR-SPseriesisdesignedtobemountedinanyconfiguration–verticalorhorizontal.
53
Ultra-Precise, Low Profile, Direct-Drive Rotary Air-Bearings•Excellentradial,axialandtilt
errormotions
•Directcoupled,high-accuracyrotaryencoder
•Lowprofile,planardesign
•Axialloadcapacityto97kg
•Magneticpreload
Ultra-Precise, High Accuracy, Direct-Drive Rotary Air-Bearings•Hightorqueoutput,direct-drive
slotless,brushlessservomotor
•Zero-coggingmotorforoutstandingvelocitystability
•Excellentradial,axialandtilterrormotions
•Directcoupled,high-accuracyrotaryencoder
•Large-diameterclearaperture
•Nomechanicalcontact
•Fullyconstrainedair-bearingcanberunupsidedownoronitsside
•Axialloadcapacityto69kg
ABRSSeries
ABRTSeries
54 www.aerotech.com
High Accuracy Rotary Stage
•Accuraciesupto1.1arcsecond
•Axialloadcapacityupto450kg
•Incrementalorabsoluteencoders
•Largebearingsprovidehighpayloadandmomentloadcapacity
•375-800rpmcontinuousrotationspeed
•Sevenmodelsareavailable,eachwitheither50,75or100mmclearaperture
Low Profile, Direct-Drive Rotary Stages•Hightorqueoutput,direct-drive
brushlessservomotor
•Cogfree,slotlessmotordesignforsuperiorvelocitystability
•Directcoupled,high-accuracyrotaryencoder
•Ultra-low-profileminimizesworkingheight
ADRSSeries
APRSeries
55
Large Aperture, Gear-Drive Rotary Stage
AGRSeries
•Enhancedspeedandloadcapacity
•Largeapertureaddressesawiderangeofapplications
•Usefulforheavyandunbalancedloads
•Non-back-drivinggear
•Vacuumratedoptionsto10-6torr
ADRTSeries
High Torque Output, Direct-Drive Rotary Stages•Cog-freebrushlessservomotor
designforoutstandingvelocitystability
•Large-diameterclearaperture
•Highloadcapacityandhighspeed
•5-60arcsecondaccuracy
56 www.aerotech.com
ALS Series•Direct-drivelinearmotorstages
•Hardcoverandside-sealdesignforyearsofmaintenance-freeoperation
•Highaccuracylinearencoderoptionforapplicationsthatrequireexcellentvelocityregulation
•Multipleframesizesandtravellengthsprovidesystemconfigurationflexibility
•IntegratedcablemanagementforXY,XYZconfigurationsandcustomerinterfaces
AGS Series•Optimizeddesignforprecisecontouring
•Velocityto3m/sandaccelerationto5g
•Highpowerbrushlesslinearservomotorsforsmoothmotion
•Travelsupto1.5mx1.5m
•CustomizableZandthetaaxesforflexibleconfigurations
•Noncontactlinearencoders
•Configurablecablemanagementsystemallowsforintegrationoffiberlasers,cameras,airlines,etc.formultipleapplications
ABL Series•Exceptionalgeometricair-bearingperformance
•Travelto1.2meter
•Linearencoderorlaserinterferometerfeedback
•Submicronaccuracy
•IntegratedXYandXYZsystems
•Non-coggingdirect-drivemotors
ALS5000WB
AGS15000
ABL1500
ABL8000
Linear Motion Solutions
57
PRO Series•Precisiongroundball-screwdrive
•Ruggedconstruction
•Long-lifelinearmotionbearing
•Side-sealdesignwithhardcoverprotectsfromdebrisbetterthantop-sealdesign
•Lowcost,highperformance
•50to1500mmtravel
ATS Series•Precisiongroundball-screwdrive
•Ruggedconstruction
•Highaccuracy,noncontactlinearencoder
•Long-lifelinearmotionguidebearingsystem
•Travelsfrom25mmto1000mm
•Heavyloadoptionsavailable
•10-6torrvacuumcompatible
•Hard-coatedtabletopandcover
•Low-bearingerrorsforexcellentgeometricperformance
MPS Series•50and75mmwidths
•Travelto100mm
•Precisiongroundball-screworlead-screwdrive
•DCservoorsteppermotor
•Crossed-rollerbearings
•Compactmulti-axisconfigurations
PRO LM Series•Direct-drivelinearmotorfor
ultra-precisemotion
•Long-lifelinearmotionguidebearingsystem
•Travelsfrom100mmto1500mm
•Low-cost,high-performancestage
MPS50SL/MPS75SLXY
PRO165
PRO165LM
ATS5000WB
58 www.aerotech.com
Planar Air-bearing StagesABL9000•Fullpreloadonallaxes
•Duallinear-motor-drivenYaxis
•Travelto1.2mx1.2m
•Linearencoderorlaserinterferometerfeedback
PlanarHD
•Maximizethroughputwith2m/sscanvelocityand5gacceleration
•Fasterturnaroundandminimizedsettlingtimes
•Activeyawcontrol
•Linearencoderorlaserinterferometerfeedback
•Travelto1.2mx1.2mDynamicstraightness,center270mmoftravelat500.0mm/smaxvelocity
ABL9000
PlanarHD
59
AHL9000•Air-bearingscanaxis;mechanical-bearingstepaxis
•Duallinear-motor-drivenstepaxis
•Travelto1.2mx1.2m
•Linearencoderorlaserinterferometerfeedback
ABG10000•Airbearingsforultra-smoothmotion
•Allaxesarefullypreloaded
•Duallinear-motor-drivenloweraxis
•Travelto1mx1m
•Optionsinclude:Zaxis,vibrationisolation,machinebaseandcontrolenclosure
AHL9000
ABG10000
60 www.aerotech.com
NanopositionersANT95-L Single-Axis Linear Stage•Noncontact,non-cogging,frictionless
direct-drive–zerobacklashorhysteresis
•Highresolution(1nm),repeatability(75nm)andaccuracy(250nm)
•In-positionstabilityof<1nm
•Anti-creepcrossed-rollerbearings
•Highdynamicperformance
•AvailableinX,XY,XYZandmanyothercombinations
ANT95-XY Dual-Axis Linear Stage•IntegratedlowprofileXYlinearmotorstage
•Noncontact,non-cogging,frictionlessdirect-drive–zerobacklashorhysteresis
•Highresolution(1nm),repeatability(75nm)andaccuracy(250nm)peraxis
•In-positionstabilityof<1nm
•Anti-creepcrossed-rollerbearings
•Highdynamicperformance
-25-12.5
012.5
25
-25-12.5
012.5
25-3-2-10123
Position (mm)
Position (mm)
Acc
urac
y E
rror
(µm
)
ANT95-50-L-PLUS1nmstepplot
TheANT95-Lseriesoffers25,50,75and100mmtravels
ANT95-50-XY-ULTRA2Dsystemaccuracy
TheANT95-XYseriesoffers25x25mmor50x50mmtravel
61
ANT130-L Single-Axis Linear Stage•Noncontact,non-cogging,frictionlessdirect-
drive–zerobacklashorhysteresis
•Highresolution(1nm),repeatability(75nm)andaccuracy(250nm)
•In-positionstabilityof<1nm
•Anti-creepcrossed-rollerbearings
•Highdynamicperformance
•Largeselection–4differenttraveloptions
ANT130-XY Dual-Axis Linear Stage•IntegratedlowprofileXYlinearmotorstage
•Noncontact,non-cogging,frictionlessdirect-drive–zerobacklashorhysteresis
•Highresolution(1nm),repeatability(75nm)andaccuracy(250nm)
•In-positionstabilityof<1nm
•Anti-creepcrossed-rollerbearings
•Highdynamicperformance
AWARDS
-80-40
040
80
-80-40
040
80-3-2-10123
Position (mm)
Position (mm)
Acc
ura
cy E
rro
r (µ
m)
TheANT130-Lseriesoffers35,60,110or160mmtravel
ANT130-060-L-PLUS1nmstepplot
TheANT130-XYseriesoffers60x60,110x110or160x160mmtravel
ANT130-160-XY-ULTRA2Dsystemaccuracy
62 www.aerotech.com
ANT95-R and ANT130-R Rotary Stages•Highresolution(0.01arcsec)
•Highperformanceinlargetravels
•Outstandingerrormotionspecifications
•0.005arc-secin-positionstability
•3arc-secaccuracy
•1.5arc-secbi-directionalrepeatability
•Multi-axisconfigurations
ANT-20G Goniometers•Noncontact,non-cogging,frictionless
direct-driveforzerobacklashorhysteresis
•Highspeed(150°/s)
•Highresolution(0.05arcsecond)
•Excellentin-positionstability
•Largeangularrange;20°oftravel
•Orthogonalmountingoftwocradlesprovidesrotationaboutthesamepoint
•Nomaintenance
•Compactdesign
ANT95-R0.01arc-secstepplot
ANT-20G-900.05arc-secstepplot
63
0 5 10 15 20 25 302
0
2
4
6
8
10
12
14
16
18
20
22
Time (s)
Pos
ition
(nm
)
ANT95-L-Z and ANT130-L-Z•Nanometerperformanceinalarge
travelformat
•Highresolution(2nm),repeatability(75nm),andaccuracy(300nm)
•In-positionstabilityof<2nm
•Anti-creepcrossed-rollerbearings
•Highdynamicperformance
ANT95-50-L-Z-PLUS2nmstepplot
0 5 10 15 20 25 302
0
2
4
6
8
10
12
14
16
18
20
22
Time (s)
Pos
ition
(nm
)
ANT130-5-V2nmstepplot
ANT95-3-V and ANT130-5-V•Nanometerperformancewitheither
3or5mmtravel
•In-positionstabilityof<1nm
•200nmaccuracy
64
ChallengeThere can be drastic differences in requirements from one measurement system to the next depending on its intended use. As an integrator or OEM, this can be frustrating as it requires constant evaluation of new motion equipment to satisfy ever changing requirements. This can lead to inconsistent solutions and support challenges.
SolutionAerotech offers solutions for all levels of performance and component needs. At the very simplest level we have controls and motors that users can buy to incorporate into their own designs. If more complete components are desired we offer a large selection of rotary and linear stages utilizing ball screw, gear drive, linear motor, mechanical bearing and air-bearing technology. If a complete system is needed Aerotech can provide a machine base, isolation systems, integrated controls, safety and enclosures. We can provide a solution that requires nothing more than adding a sensor and implementing the process.
BMS60brushlessslotlessrotarymotor
CustomZ-axisassembly
BLMserieslinearmotor
A3200softwaremachinecontroller
Npaqrackmountservoamplifier
Components to Integrated Solutions...
www.aerotech.com
Bringing Value and Convenience to Our Customers
Vertical IntegrationOur expertise in motors, amps, controls and stages enables us to provide a complete optimized solution.
InterconnectabilityAerotech systems are designed to work together. This allows you to spend time and resources on your process, not on system integration.
System CheckoutPrior to shipment, all systems are fully assembled and checked out. All system parameters are factory-set based on your specifications.
DocumentationAll systems are fully documented. System interconnect-drawings, specification sheets and stage certification plots are included with every system.
Aerotech offers its customers a number of important advantages as a single-source provider:
R&DOur engineering teams are dedicated to product development and continuous improvement.
Technology LeaderAerotech engineers are continuously updating existing products and introducing new products. We are truly “Dedicated to the Science of Motion.”
QualityAerotech is an ISO 9001 certified supplier with a rigorous quality program.
Worldwide PresenceAerotech is committed to supporting customers worldwide. We operate full sales and service facilities in the United Kingdom, Germany, Japan, Taiwan and China. We also maintain a growing number of direct field sales and application engineering offices throughput North America, and work with representatives across the globe.
Support & ServiceBecause all system elements are designed and manufactured by Aerotech, we provide the highest level of technical knowledge available. Unlike companies that only manufacture part of the system, Aerotech manufactures all of the system components, minimizing service time.
Single-Source SolutionAerotech designs and manufactures precision stages, motors, drives and controllers giving you all of the components needed for a complete system.
Application ExperienceSince 1970, Aerotech has completed thousands of motion control projects, spanning an extensive range of applications.
Corporate Headquarters • Pittsburgh, PA • USA
Aerotech United Kingdom
Aerotech Germany
Aerotech Japan
Aerotech China
Aerotech Taiwan 65
66 www.aerotech.com
Engineered SystemsAerotech engineers and manufactures specialty high-performance subsystems. Our highly-trained staff of experienced software and hardware engineers enables our customers to get to production readiness faster. Aerotech provides real-time collaborative support — either at your facility, at our facility or on the web.
Ion Beam Profiling in Vacuum Liquid-Cooled, Vacuum-Prepped System
Precision Optical Production Two-Side Optical Inspection
Rapid Prototyping Advanced Pick-Place-Inspect Station
Optical Inspection
High-Volume Production Inspection Station
4-Axis Coordinate Measuring Machine
Experimental Lithography Printhead Inspection Station High-Accuracy Laser Machining
Drum Writing High-Speed Optical Indexer
Direct-Write Lithography Magnetic Characterization
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Discrete Part Manufacturing Memory RepairComponent Inspection PCB Inspection
Lithography Thin-Film Measurement
Drum Writing
Large-Substrate Inspection High-Throughput Wafer Inspection
Rotary Test StandSolar Module Inspection Pick and Place
Vacuum Inspection System Microscopy
Vacuum ProcessingFPD Processing
Photovoltaic, Fuel Cell and Alternative Energy
Extensive application experience and a broad array of motion products make Aerotech the perfect partner for your photovoltaic (solar cell), fuel cell and other alternative energy manufacturing and testing platforms. Our worldwide operation has engineered and manufactured a multitude of motion platforms for these markets and we continue to provide innovative solutions.
Control Systems
Aerotech motion controllers, motors and drives are utilized in our own positioning systems and by end users and OEMs worldwide. From our Automation 3200 software-based motion controller that can control up to 32 axes, to the Soloist single-axis servo controller, to the Ensemble multi-axis stand-alone motion controller, we provide a variety of options to suit your application.
General Automation
Since 1970 Aerotech has been a manufacturer of top-quality automation products. The breadth of the our product line, including automated nanopositioners, planar air-bearing systems, high-speed gantries, linear and rotary and lift stages, brushless linear and rotary servomotors and drives, single- and multi-axis motion controllers, goniometers and gimbals/optical mounts makes Aerotech unique among motion control manufacturers. Aerotech is DedicatedtotheScienceofMotion.
Laser Processing
Aerotech has extensive experience in providing motion components and subsystems for laser processes such as cutting, welding, marking, etching and micromachining. These processes are the key to advancing technology in markets such as photovoltaic manufacturing, aerospace and medical device manufacturing.
Capabilities in Other Markets
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Defense and Aerospace
Aerotech has manufactured hundreds of high-accuracy systems including many for high vacuum (10-6 torr) and cleanroom environments. Our equipment is used for testing electro-optic systems, high-performance laser processing, materials testing and manufacturing, target tracking, satellite sensor calibration and verification, inertial guidance testing, scanning, optical pointing, repeatability and life-cycle testing for quality control. Custom systems are available with minimal development time.
Medical Device Manufacturing and Life Sciences
Aerotech manufactures high-performance motion systems and components for medical and life sciences applications including stent cutting, medical laser welding systems for cardiac pacemakers and catheters, IOL and contact lens manufacturing, DNA sequencing, blood sequencing, haptic mills and drills, x-ray machines, magnetic resonance scanners and CAT scanners. We can customize a medical laser welding system for any need.
Government and Educational Research and Development
The breadth of Aerotech’s product line offers solutions for the wide-ranging requirements of academic and government R&D. Our nanopositioners provide the accuracy required not only for photonics experiments, but also for micro- and nano-machining workstations. Aerotech’s multi-axis rotary positioners and gimbals offer the high precision needed for defense, satellite and space science research. Unique applications call for unique solutions, and Aerotech can provide custom-engineered systems to meet your needs.
Electronics Manufacturing and AssemblySpeed, accuracy and reliability are the key requirements for pick-and-place machines, stencil cutting machines, printed circuit board assembly and other electronic manufacturing and assembly equipment. Since 1970 Aerotech has exceeded the most stringent criteria used to judge electronic manufacturing and assembly equipment, and we continue to raise the standard with our advanced motion technologies by addressing industry-specific challenges in pick-and-place machines, stencil cutting machines and printed circuit board assembly systems.
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Aerotech offers comprehensive worldwide training and customer service either at customer facilities or at one of our Aerotech training centers.
Our Training Program Features:
•Standardandcustomizedcourses
•Hands-ontrainingwithAerotechpositioningsystems
•Interactivetrainingwithexperiencedinstructors
•Comfortable,spaciousfacilities
Installation and Start up (Commissioning)
Startup and commissioning services minimize startup times, reduce cost and accelerate time-to-production. By combining our product knowledge with your process and application expertise, new systems and applications can be completed faster at a reduced overall cost.
Engineering Support
Aerotech provides complete engineering support for our products, including on-site support and maintenance, and remote support via phone, fax, website and/or WebEx® software. As a manufacturer staffed by engineers, we understand the unacceptability of downtime.
Training
Comprehensive training classes are designed to help our customers realize the full potential of our products. By demonstrating all of a product’s features and how to use them, customers have been able to reduce startup time and quickly optimize their applications. Our classes have been developed, and continually upgraded, using feedback from our customers.
Since 1970, Aerotech has designed motion control and positioning systems and components with an unsurpassed track record of reliability. When you make the choice to purchase from Aerotech, we urge you to learn how to get the most from your new products. We provides both on-site (your facility) and/or in-house (our facility) training for our customers’ convenience.
AerotechLtd(UnitedKingdom)
AerotechGmbH(Germany)
AerotechKK(Japan)
AerotechInc(U.S.A.)
Worldwide Training and Support
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SemiconductorInternational2007Editors’ChoiceBestProduct–
WaferMaxT™
SemiconductorInternational2008
Editors’ChoiceBestProduct–
Ensemble™
2008ControlEngineeringEngineers’ChoiceAward
–LaserTurn®1
2011ControlEngineeringEngineers’ChoiceAward
–ANT130-XY
2012ControlEngineeringEngineers’ChoiceAwardFinalistProduct–
MotionPAC
DesignNews2008GoldenMousetrapFinalistProduct–
Nmark™SSaM
DesignNews2009GoldenMousetrapFinalistProduct–LaserTurn®1,AGS15000,ANT95-XY
DesignNews2010GoldenMousetrapWinner–
ANT130-XY
EuroAsiaIC2006IndustryAward–WaferMaxZ™
LightwaveOFC2001Attendees’ChoiceAward–
FiberAlign®130
DesignNews2002BestProductNominee–
Automation3200
MachineDesignExcellenceinManufacturingTechnology–Slides/Ways1998and2000
Aandrijftechniek2002Award–
FiberMax®
ProductDesignandDevelopment2002Top50Product–
Automation3200
LightwaveNFOEC2002Attendees’ChoiceAward–
FiberMax®
Awards and Recognition
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H - Aerotech Headquarters l - Direct Field Sales Office s - Aerotech Subsidiary n - Representative
Dedicated to the Science of Motion
www.aerotech.com CA0312A
Aerotech’s Worldwide Sales and Service Locations