Mike Conroy-Taylor Hobson(2) - IDEMATitle Microsoft PowerPoint - Mike Conroy-Taylor Hobson(2).ppt...
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1 the best in form and surface measurement a division of 1 1 the best in form and surface measurement a division of Latest Development in Metrology for the Latest Development in Metrology for the Latest Development in Metrology for the Latest Development in Metrology for the HDD Industry HDD Industry HDD Industry HDD Industry the best in form and surface measurement a division of 2 Who Are Taylor Hobson? Who Are Taylor Hobson? Who Are Taylor Hobson? Who Are Taylor Hobson? • Founded in 1886 by William and Thomas Taylor Founded in 1886 by William and Thomas Taylor Founded in 1886 by William and Thomas Taylor Founded in 1886 by William and Thomas Taylor • 1887 1887 1887 1887 - W.S.H Hobson joined and became the sales face of Taylor Hobson W.S.H Hobson joined and became the sales face of Taylor Hobson W.S.H Hobson joined and became the sales face of Taylor Hobson W.S.H Hobson joined and became the sales face of Taylor Hobson • 1893 1893 1893 1893 - The first Cooke Lens produced The first Cooke Lens produced The first Cooke Lens produced The first Cooke Lens produced - the most consistent in quality the most consistent in quality the most consistent in quality the most consistent in quality worldwide worldwide worldwide worldwide • 1932 1932 1932 1932 - The first Cooke Zoom Lens for Cine photography The first Cooke Zoom Lens for Cine photography The first Cooke Zoom Lens for Cine photography The first Cooke Zoom Lens for Cine photography • 1930s 1930s 1930s 1930s - During this period, Taylor Hobson came to supply over 80% of th During this period, Taylor Hobson came to supply over 80% of th During this period, Taylor Hobson came to supply over 80% of th During this period, Taylor Hobson came to supply over 80% of the e e e world's lenses world's lenses world's lenses world's lenses • 1941 1941 1941 1941 - Talysurf 1 Talysurf 1 Talysurf 1 Talysurf 1 - the world's first true surface texture measuring instrument the world's first true surface texture measuring instrument the world's first true surface texture measuring instrument the world's first true surface texture measuring instrument • 1949 1949 1949 1949 - Talyrond 1 Talyrond 1 Talyrond 1 Talyrond 1 - the world the world the world the world’s first roundness measuring instrument invented s first roundness measuring instrument invented s first roundness measuring instrument invented s first roundness measuring instrument invented • 1970 1970 1970 1970 - Talyrond 73, the world's most accurate roundness measurement Talyrond 73, the world's most accurate roundness measurement Talyrond 73, the world's most accurate roundness measurement Talyrond 73, the world's most accurate roundness measurement instrument, is launched instrument, is launched instrument, is launched instrument, is launched • 1984 1984 1984 1984 - Introduction of the Form Talysurf Introduction of the Form Talysurf Introduction of the Form Talysurf Introduction of the Form Talysurf • 1996 1996 1996 1996 - The Revolutionary Form Talysurf Series PGI The Revolutionary Form Talysurf Series PGI The Revolutionary Form Talysurf Series PGI The Revolutionary Form Talysurf Series PGI - Phase Grating Phase Grating Phase Grating Phase Grating Interferometer Interferometer Interferometer Interferometer - gauge is developed gauge is developed gauge is developed gauge is developed • 2003 2003 2003 2003 - Talysurf CCI is launched Talysurf CCI is launched Talysurf CCI is launched Talysurf CCI is launched
Transcript of Mike Conroy-Taylor Hobson(2) - IDEMATitle Microsoft PowerPoint - Mike Conroy-Taylor Hobson(2).ppt...
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Latest Development in Metrology for the Latest Development in Metrology for the Latest Development in Metrology for the Latest Development in Metrology for the HDD IndustryHDD IndustryHDD IndustryHDD Industry
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Who Are Taylor Hobson?Who Are Taylor Hobson?Who Are Taylor Hobson?Who Are Taylor Hobson?
• Founded in 1886 by William and Thomas TaylorFounded in 1886 by William and Thomas TaylorFounded in 1886 by William and Thomas TaylorFounded in 1886 by William and Thomas Taylor• 1887 1887 1887 1887 ---- W.S.H Hobson joined and became the sales face of Taylor HobsonW.S.H Hobson joined and became the sales face of Taylor HobsonW.S.H Hobson joined and became the sales face of Taylor HobsonW.S.H Hobson joined and became the sales face of Taylor Hobson• 1893 1893 1893 1893 ---- The first Cooke Lens produced The first Cooke Lens produced The first Cooke Lens produced The first Cooke Lens produced ---- the most consistent in quality the most consistent in quality the most consistent in quality the most consistent in quality
worldwideworldwideworldwideworldwide• 1932 1932 1932 1932 ---- The first Cooke Zoom Lens for Cine photographyThe first Cooke Zoom Lens for Cine photographyThe first Cooke Zoom Lens for Cine photographyThe first Cooke Zoom Lens for Cine photography• 1930s 1930s 1930s 1930s ---- During this period, Taylor Hobson came to supply over 80% of thDuring this period, Taylor Hobson came to supply over 80% of thDuring this period, Taylor Hobson came to supply over 80% of thDuring this period, Taylor Hobson came to supply over 80% of the e e e
world's lensesworld's lensesworld's lensesworld's lenses• 1941 1941 1941 1941 ---- Talysurf 1 Talysurf 1 Talysurf 1 Talysurf 1 ---- the world's first true surface texture measuring instrumentthe world's first true surface texture measuring instrumentthe world's first true surface texture measuring instrumentthe world's first true surface texture measuring instrument• 1949 1949 1949 1949 ---- Talyrond 1 Talyrond 1 Talyrond 1 Talyrond 1 ---- the worldthe worldthe worldthe world’’’’s first roundness measuring instrument inventeds first roundness measuring instrument inventeds first roundness measuring instrument inventeds first roundness measuring instrument invented• 1970 1970 1970 1970 ---- Talyrond 73, the world's most accurate roundness measurement Talyrond 73, the world's most accurate roundness measurement Talyrond 73, the world's most accurate roundness measurement Talyrond 73, the world's most accurate roundness measurement
instrument, is launchedinstrument, is launchedinstrument, is launchedinstrument, is launched• 1984 1984 1984 1984 ---- Introduction of the Form Talysurf Introduction of the Form Talysurf Introduction of the Form Talysurf Introduction of the Form Talysurf • 1996 1996 1996 1996 ---- The Revolutionary Form Talysurf Series PGI The Revolutionary Form Talysurf Series PGI The Revolutionary Form Talysurf Series PGI The Revolutionary Form Talysurf Series PGI ---- Phase Grating Phase Grating Phase Grating Phase Grating
Interferometer Interferometer Interferometer Interferometer ---- gauge is developedgauge is developedgauge is developedgauge is developed• 2003 2003 2003 2003 ---- Talysurf CCI is launchedTalysurf CCI is launchedTalysurf CCI is launchedTalysurf CCI is launched
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“To Be The Best Provider of Form, Roundness and Surface Measurement Solutions Worldwide”
RoundnessMeasurement
Surface and FormMeasurement
3D Profiling
183µm
5.9µm
183µm
0.10.10.10.1ÅÅÅÅ1.2nm1.2nm1.2nm1.2nm 0.8nm0.8nm0.8nm0.8nm
www.taylor-hobson.com
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IntroductionIntroductionIntroductionIntroduction
Advanced Slider MeasurementsAdvanced Slider MeasurementsAdvanced Slider MeasurementsAdvanced Slider Measurements
General Hard Disk MeasurementsGeneral Hard Disk MeasurementsGeneral Hard Disk MeasurementsGeneral Hard Disk MeasurementsUsing InterferometryUsing InterferometryUsing InterferometryUsing Interferometry
Roundness Measurement of Hard Drive MediaRoundness Measurement of Hard Drive MediaRoundness Measurement of Hard Drive MediaRoundness Measurement of Hard Drive Media
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Advanced Slider MeasurementsAdvanced Slider MeasurementsAdvanced Slider MeasurementsAdvanced Slider Measurements
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Advanced MetrologyAdvanced MetrologyAdvanced MetrologyAdvanced Metrology
• Significant R&D effort has been Significant R&D effort has been Significant R&D effort has been Significant R&D effort has been directed towards addressing three directed towards addressing three directed towards addressing three directed towards addressing three key issues relating to nonkey issues relating to nonkey issues relating to nonkey issues relating to non----contact contact contact contact measurementmeasurementmeasurementmeasurement
• These are caused by the variation in These are caused by the variation in These are caused by the variation in These are caused by the variation in phase change on reflection exhibited phase change on reflection exhibited phase change on reflection exhibited phase change on reflection exhibited by the different materialsby the different materialsby the different materialsby the different materials
• The areas affected most by these The areas affected most by these The areas affected most by these The areas affected most by these are highlighted in the line profileare highlighted in the line profileare highlighted in the line profileare highlighted in the line profile
• Both DC step height and AC Both DC step height and AC Both DC step height and AC Both DC step height and AC roughness / slope errors existroughness / slope errors existroughness / slope errors existroughness / slope errors exist
• Also by utilising the Also by utilising the Also by utilising the Also by utilising the ‘‘‘‘Thin Film Thin Film Thin Film Thin Film ExtensionExtensionExtensionExtension’’’’ software measurements software measurements software measurements software measurements can be made both before and after can be made both before and after can be made both before and after can be made both before and after DLC or similar thin film coatings DLC or similar thin film coatings DLC or similar thin film coatings DLC or similar thin film coatings have been appliedhave been appliedhave been appliedhave been applied
36.37 nm
76.117 µm
64.89 µm
nm
-30-25-20-15-10-505
1015
0 5 10 15 20 25 30 35 40 45 50 55 60 µm
0 1 2 3
Raw Phase Measurement
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Auto AC Phase CorrectionAuto AC Phase CorrectionAuto AC Phase CorrectionAuto AC Phase Correction
• For the AlFor the AlFor the AlFor the Al2222OOOO3333TiC reference area in TiC reference area in TiC reference area in TiC reference area in particular, advantage has been particular, advantage has been particular, advantage has been particular, advantage has been taken of the technique of taken of the technique of taken of the technique of taken of the technique of ‘‘‘‘autoautoautoauto----AC AC AC AC compensationcompensationcompensationcompensation’’’’, enabling significant , enabling significant , enabling significant , enabling significant compensation for local Fresnelcompensation for local Fresnelcompensation for local Fresnelcompensation for local Fresnel----induced phase changes to be induced phase changes to be induced phase changes to be induced phase changes to be achievedachievedachievedachieved
• These developments mean that the These developments mean that the These developments mean that the These developments mean that the independent use of an ellipsometer independent use of an ellipsometer independent use of an ellipsometer independent use of an ellipsometer is is is is notnotnotnot requiredrequiredrequiredrequired
Raw Phase Measurement
After DC & AC Correction
20nm20nm20nm20nm
20nm20nm20nm20nm
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36.37 nm
76.117 µm
64.89 µm
Pole Tip Measurement ConclusionPole Tip Measurement ConclusionPole Tip Measurement ConclusionPole Tip Measurement Conclusion
• Simple fast nonSimple fast nonSimple fast nonSimple fast non----contact contact contact contact measurements can be made on measurements can be made on measurements can be made on measurements can be made on AlTiC based HDD sliders with AlTiC based HDD sliders with AlTiC based HDD sliders with AlTiC based HDD sliders with fully automatic material fully automatic material fully automatic material fully automatic material compensationcompensationcompensationcompensation
• No coating or special No coating or special No coating or special No coating or special component preparation requiredcomponent preparation requiredcomponent preparation requiredcomponent preparation required
• No need for AFM or No need for AFM or No need for AFM or No need for AFM or Ellipsometer measurementsEllipsometer measurementsEllipsometer measurementsEllipsometer measurements
• Measures both PTR and AlMeasures both PTR and AlMeasures both PTR and AlMeasures both PTR and Al2222OOOO3333step height with <0.1nm Std Devstep height with <0.1nm Std Devstep height with <0.1nm Std Devstep height with <0.1nm Std Dev
10.87 nm
76.551 µm
63.016 µm
NO Coating RequiredNO Coating RequiredNO Coating RequiredNO Coating RequiredNO AFM MeasurementsNO AFM MeasurementsNO AFM MeasurementsNO AFM Measurements
NO Need For N&K ValuesNO Need For N&K ValuesNO Need For N&K ValuesNO Need For N&K ValuesNO Ellipsometer MeasurementsNO Ellipsometer MeasurementsNO Ellipsometer MeasurementsNO Ellipsometer Measurements
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General Hard Disk MeasurementsGeneral Hard Disk MeasurementsGeneral Hard Disk MeasurementsGeneral Hard Disk MeasurementsUsing InterferometryUsing InterferometryUsing InterferometryUsing Interferometry
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InterferometersInterferometersInterferometersInterferometers
• Typical InterferometerTypical InterferometerTypical InterferometerTypical Interferometer– VSI - Vertical Scanning Interferometer
• absolute measurement but at least 3 nm noise– PSI - Phase Shifting Interferometer
• 0.1 nm resolution but relative and limited to about 150 nm– Typically 640 x 480 pixel resolution
• Talysurf CCITalysurf CCITalysurf CCITalysurf CCI– CCI - Coherence Correlation Interferometer
• Very high resolution, absolute measurement and 100 um range (400 um and z stitching available)
– 1024 x 1024 (or 2048 x 2048) pixel resolution
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Step MeasurementsStep MeasurementsStep MeasurementsStep Measurements
• Various parameters on sliders can be measured, such as step height. The Talysurf CCI is ideal for step height measurements because it does not have the limitation (¼ wavelength, typically about 150 nm) of phase shifting and it is more accurate and repeatable than normal vertical scanning.
Step height of an air baring surface
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HDD Suspension HDD Suspension HDD Suspension HDD Suspension –––– Data StitchingData StitchingData StitchingData Stitching
µm
0
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1 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 1.9 2 2.1 2.2 2.3 2.4 2.5 2.6 mm
Representation of Pt parameter
Zoomed
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15 mm
End-on analysis
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HDD Bearing MeasurementHDD Bearing MeasurementHDD Bearing MeasurementHDD Bearing Measurement
Step HeightStep HeightStep HeightStep Height
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FlatnessFlatnessFlatnessFlatness
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HDD Media HDD Media HDD Media HDD Media ---- Landing ZoneLanding ZoneLanding ZoneLanding ZoneLanding ZoneLanding ZoneLanding ZoneLanding ZoneMany hard disk drives require a specially textured landing zone to enable the heads to park on the media surface when not being used. This is often created using a laser texturing process which can be monitored using the Talysurf CCI 6000 instruments. Automatic characterisation includes: volume, height, density and mean diameter of individual or whole areas of texturing.
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HDD Media HDD Media HDD Media HDD Media ---- RoughnessRoughnessRoughnessRoughness
Media RoughnessMedia RoughnessMedia RoughnessMedia RoughnessThe roughness of the media needs to be monitored carefully as it is one of the key limiting factors on the fly height of the head. Reducing the roughness of the media allows for a reduced fly height giving smaller magnetic spacing which in turn is needed to maintain high data densities on the drive.
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Roughness Roughness Roughness Roughness –––– Pixel resolution Pixel resolution Pixel resolution Pixel resolution
Roughness measurement data is dependent on the pixel size and the field of view of the optics. Changing between different objectives leads problems with direct comparison between the datasets because of the different pixel sizes. It is preferable to capture the whole image using one objective for repeatable data.
The image shows data from a 4 million pixel camera with the field of view of a
1 million pixel camera shown inserted
The image shows data from a 4 million pixel camera with the field of view of a
640 x 480 pixel camera shown inserted
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Roughness Roughness Roughness Roughness –––– Advanced Analysis Advanced Analysis Advanced Analysis Advanced Analysis The need for square datasets for some advanced calculations reduces the usable field of view further. For example a 320 x 240 pixel camera can only give a 240 x 240 square dataset. If the analysis needs 2n pixels a 320 x 240 camera can only analyse 128 x 128 pixels.
The image shows data from a 4 million pixel camera with the field of view of a
320 x 240 pixel camera shown inserted
The image shows data from a 4 million pixel camera with the field of view of a
240 x 240 pixel FOV shown inserted
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Roughness Roughness Roughness Roughness –––– PSD analysisPSD analysisPSD analysisPSD analysis
• Power spectral density analysis (PSD) is becoming a common tool for measuring surface texture. The larger bandwidth of the 4 million pixel camera is able to give a larger PSD analysis range.
0.0001
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10
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1.00E-04 1.00E-03 1.00E-02 1.00E-01 1.00E+00 1.00E+01
Average PSD(nm^2um) Average PSD(nm^2um) Average PSD(nm^2um) Average PSD(nm^2um)
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640 x 480640 x 480640 x 480640 x 4801024 x 10241024 x 10241024 x 10241024 x 10242048 x 20482048 x 20482048 x 20482048 x 2048
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Roundness Measurement of Hard Drive MediaRoundness Measurement of Hard Drive MediaRoundness Measurement of Hard Drive MediaRoundness Measurement of Hard Drive Media
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The Talyrond is a culmination of The Talyrond is a culmination of The Talyrond is a culmination of The Talyrond is a culmination of over 50 years of roundness over 50 years of roundness over 50 years of roundness over 50 years of roundness metrology innovation and experience metrology innovation and experience metrology innovation and experience metrology innovation and experience packaged into a single instrument.packaged into a single instrument.packaged into a single instrument.packaged into a single instrument.
– All the datums of the Talyrond, the arm,column and spindle have been precision machined to extreme tolerances.
– The centre and levelling table is fitted with high resolution motors enabling accurate automated set up to defined targets; all in continuous rotation.
– The Talymin 5 gauge and patented arm orientation mechanism is unrivalled in versatility. Access to multiple featured components prevent the need for multiple styli
– All axes, arm column and spindle utilise high precision glass scales to guarantee high data integrity
Roundness Measurement ToolRoundness Measurement ToolRoundness Measurement ToolRoundness Measurement Tool
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TalyrondTalyrondTalyrondTalyrond
• Key Features and benefitsKey Features and benefitsKey Features and benefitsKey Features and benefits
– Automatic Calibration of the gauge in less than 10 seconds10 seconds10 seconds10 seconds– High accuracy position control for the spindle less than 0.20.20.20.2°°°°– High accuracy position control for the arm and column 5555µµµµmmmm– Automatic centre and level with full follow capability to targets less than
0.80.80.80.8µµµµmmmm– High density data for roundness up to 18000180001800018000 points– High density data Straightness of up to 200,000200,000200,000200,000 points– Talymin 5 gauge with resolutions down to 1.2nm1.2nm1.2nm1.2nm– Arm and Column resolution 0.250.250.250.25µµµµmmmm– Cylindrical mapping capability for detailed analysis of cylindrical features– Radial Auto-crest and partial arc measurement
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Sample Roundness MeasurementSample Roundness MeasurementSample Roundness MeasurementSample Roundness Measurement
In the example shown below the inner circumference and outer circumference are both measured automatically. The measurement shown is the concentricity of the two measurements, other roundness parameters are also available.
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NO Coating RequiredNO Coating RequiredNO Coating RequiredNO Coating RequiredNO AFM MeasurementsNO AFM MeasurementsNO AFM MeasurementsNO AFM Measurements
NO Need For N&K ValuesNO Need For N&K ValuesNO Need For N&K ValuesNO Need For N&K ValuesNO Ellipsometer MeasurementsNO Ellipsometer MeasurementsNO Ellipsometer MeasurementsNO Ellipsometer Measurements
SummarySummarySummarySummary
• With The Talysurf CCIWith The Talysurf CCIWith The Talysurf CCIWith The Talysurf CCI• Simple nonSimple nonSimple nonSimple non----contact measurements can contact measurements can contact measurements can contact measurements can
be made on HDD sliders, bearings and be made on HDD sliders, bearings and be made on HDD sliders, bearings and be made on HDD sliders, bearings and media with fully automatic generation of media with fully automatic generation of media with fully automatic generation of media with fully automatic generation of results results results results
• Measures both PTR and ALR step Measures both PTR and ALR step Measures both PTR and ALR step Measures both PTR and ALR step height with <0.1nm Std Devheight with <0.1nm Std Devheight with <0.1nm Std Devheight with <0.1nm Std Dev
• Measures roughness from subMeasures roughness from subMeasures roughness from subMeasures roughness from sub----Angstrom to um levels using high Angstrom to um levels using high Angstrom to um levels using high Angstrom to um levels using high resolution cameras for greater resolution cameras for greater resolution cameras for greater resolution cameras for greater bandwidth of measurementbandwidth of measurementbandwidth of measurementbandwidth of measurement
• Measures step height and identifies Measures step height and identifies Measures step height and identifies Measures step height and identifies defectsdefectsdefectsdefects
• With The TalyrondWith The TalyrondWith The TalyrondWith The Talyrond• Automatic roundness measurements Automatic roundness measurements Automatic roundness measurements Automatic roundness measurements
can be made on HD mediacan be made on HD mediacan be made on HD mediacan be made on HD media• Parameters such as concentricity can be Parameters such as concentricity can be Parameters such as concentricity can be Parameters such as concentricity can be
studiedstudiedstudiedstudied
10.87 nm
76.551 µm
63.016 µm
