Micro Electro Mechanical Systems: Scaling Beyond

the Electrical Domain

Micro Electro Mechanical Systems: Scaling Beyond

the Electrical DomainClark T.-C. NguyenClark T.-C. Nguyen

Smaller Is BetterSmaller Is Better

Surface MicromachiningSurface Micromachining

Silicon Substrate

SacrificialOxide Structural

PolysilconIsolationOxide

NitrideInterconnectPolysilicon

Hydrofluoric Acid Free Standing

Beam

Surface MicromachiningSurface Micromachining

[UCLA]

Integrated CMOS/MEMS DeviceIntegrated CMOS/MEMS DeviceVibrating Mechanical

Element

Integrated CMOS

Electronics

[Analog Devices]

MEMS Technology RoadmapMEMS Technology RoadmapN

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100

101

102

103

104

105

106

107

108

109

More Advanced???

Number of Mechanical Components100 101 102 103 104 105 106 107 108 109

MEMS Technology RoadmapMEMS Technology RoadmapN

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Number of Mechanical Components

100

101

102

103

104

105

106

107

108

109

100 101 102 103 104 105 106 107 108 109

Integrated FluidicSystems

Terabit/cm2

Data Storage

Weapons,Safing, Arming,

and Fusing

Majority ofEarly MEMS

Devices(mostly sensors)

ADXL-50

Digital MicromirrorDevice (DMD)

ADXL-278

MEMS Integration LevelsSince DARPA Prog. Start

Enabled ApplicationsADXL-78

CPU’s

Pentium 4

ADXRS

DisplaysPhased-ArrayAntenna

AdaptiveOptics

Optical Switches& Aligners

OMM 32x32

i-STAT 1Caliper

Fully-Integrated AccelerometerFully-Integrated AccelerometerN

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Number of Mechanical Components

100

101

102

103

104

105

106

107

108

109

100 101 102 103 104 105 106 107 108 109

ADXL-78[Analog Devices]

Mechanical Proof Mass

Mechanical Proof Mass

Microfluidic ChipMicrofluidic ChipN

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Number of Mechanical Components

100

101

102

103

104

105

106

107

108

109

100 101 102 103 104 105 106 107 108 109

ADXL-78

Integrated FluidicSystems

Probe-Based Data StorageProbe-Based Data StorageN

umbe

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Number of Mechanical Components

100

101

102

103

104

105

106

107

108

109

100 101 102 103 104 105 106 107 108 109

ADXL-78

Integrated FluidicSystems

Terabit/cm2

Data Storage

[IBM]

Optical MEMSOptical MEMSN

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Number of Mechanical Components

100

101

102

103

104

105

106

107

108

109

100 101 102 103 104 105 106 107 108 109

ADXL-78

Integrated FluidicSystems

Digital MicromirrorDevice (DMD)

Displays

Movable Micromirror

Movable Micromirror

TI Digital Micromirror Device

[UCLA]

Scaling Guitar StringsScaling Guitar StringsVibrating “A”

String (440 Hz)Vibrating “A”

String (440 Hz)Micromechanical Free-

Free Beam (92 MHz)Micromechanical Free-

Free Beam (92 MHz)58,000X

Size Reduction

58,000X58,000XSize Size

ReductionReduction

Diamond Micro-Disk ResonatorDiamond Micro-Disk Resonator• Frequency = 1.5 GHz, Q = 11,555• Frequency = 1.5 GHz, Q = 11,555

PolysiliconElectrode

Diamond Disk

[Univ. of Michigan]

Change In Communication Architecture?

Change In Communication Architecture?

MEMSTechnology

MEMSTechnology

Single-ChipTransceiverSingle-ChipTransceiver

Chip-Scale Atomic Clock (CSAC)Chip-Scale Atomic Clock (CSAC)

NIST- F1NIST- F1HP 5071AHP 5071A

CSACCSAC

VolVol: 1 cm: 1 cm33

Power: 30 Power: 30 mWmWAcc: Acc: 11××1010––1111

VolVol: ~3.7 m: ~3.7 m33

Power: ~500 WPower: ~500 WAcc: Acc: 3.83.8××1010––1515

Size Versus PowerSize Versus Power133Cs vapor at 10–7 torr

Large Vapor CellLarge Vapor Cell

50,000X Size 50,000X Size ReductionReduction

VolVol: ~500 cm: ~500 cm33

Power: ~30 WPower: ~30 W

VolVol: ~0.01 cm: ~0.01 cm33

Power: ~10 Power: ~10 mWmW

CSAC-Enabled EnhancementsCSAC-Enabled Enhancements

GPS Free

Micro Power GenerationMicro Power Generation

00 22 44 66 88 1010 1212 1414

Specific Energy Density (kW-hr/kg)Specific Energy Density (kW-hr/kg)

PropanePropane

MethaneMethane

GasolineGasoline

DieselDiesel

EthanolEthanol

MethanolMethanol

ConventionalLi Battery

ConventionalLi Battery

Formic AcidFuel Cell

Formic AcidFuel Cell

Solid Oxide Micro Fuel CellSolid Oxide Micro Fuel Cell

~ 8 cm~ 1 cm

0.7 cm

Miniature Wankel EngineMiniature Wankel Engine

4 watts of power output4 watts of power output

[UC Berkeley][UC Berkeley]

Micro Gas AnalyzersMicro Gas Analyzers

Separation Analyzer

Species A

B

A

B15 min.15 min.

Micro Gas AnalyzersMicro Gas Analyzers

separation time < 4 secseparation time < 4 sec

Micromechanical CircuitMicromechanical Circuit

A few µm A few µm

Nanomechanical ResonatorNanomechanical ResonatorFrequency: 1.029 GHzFrequency: 1.029 GHz

75 nm

1.1µm

120 nm