Micormachine: #2 (Oct. 9) 1. Various applications of micromachines - Information input -...
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Transcript of Micormachine: #2 (Oct. 9) 1. Various applications of micromachines - Information input -...
Micormachine: #2 (Oct. 9)
1. Various applications of micromachines- Information input- Information output- Telecommunications- Medicine- Biotechnology- Precise measurement- Power generation- Others
2. Health information system using wearable sensors
Invention of Integrated Circuits by Jack Kilby
http://www.ti.com/corp/docs/kilbyctr/jackstclair.shtml
The First IC
In 1958, at Dallas R&D Center if Texas Instruments7/16 x 1/7 (inch)2 On a germanium substrate
http://www.ti.com/corp/docs/kilbyctr/jackstclair.shtml
Micromotor
Microphone
Fingerprint Sensor
Shigematsu et al, NTT Labs.
Fingerprint Sensor
Thermal Machining
Schematic Structure SEM
Miniature Display Using Micromirrors
Fast mirror -- 550 m minor axisDriven at resonance (6.2 kHz)
Slow mirror -- driven at videorefresh rate of 20 Hz
R.A. Conant, et al., "A Full-Motion Video Display Using Micromachined Scanning Micromirrors," proc. Transducers '99, Sendai, Japan, June 1999, pp. 376-379.
Micro Display for Virtual Reality
R.A. Conant, et al., "A Full-Motion Video Display Using Micromachined Scanning Micromirrors," proc. Transducers '99, Sendai, Japan, June 1999, pp. 376-379.
Telecommunication : Optical Switch
Structure of Optical Switch
M. Makihara, et al., J. Lightwave Tech. Vol. 17. No. 1, pp. 14-18, 1999.
Medicine : Micro Syringe
OKa, et al., Kagawa University
Silicon wafer
Optical fiber
Needle made of SiO2
800 m
Micro Gas Flow Sensor
Response time : 2 msResolution : 1 mm/secSmall size : 1.7 mm2
Sensing range : 0 ~ 10 , 0 ~ 30 m/secLow power consumption : Battery operated
Micrograph of Micro Gas Flow Sensor
Sensor Heater Sensor
SEM of Micro Gas Flow Sensor
Micro Gas Sensor
H. Baltes, et al., IEEE Spectrum, September, pp. 35-38, 1998.
DMD Pixel Structure
Projection Display Using DMD
Surface-Conduction Emitter Display
Watch: Typical Wearable Instrument
- Usually people are not aware of wearing- Attached on human skin- Works continuously- Linked to time information
- Other wearable things: ring, glasses
→Air pressure, altitude, water depth
Pressure Sensor
Silicon Silicon
Vacuum Vacuum
Wearable Pulse Oximeter
Non-invasive and real-time measurement of oxygen concentration in blood
C. H. Mastrangelo, M. A. Burns and D. T. Burke, IEEE Proceedings, Vol. 86, No. 8, pp. 1769-1787.
Liquid Injection Device
C. H. Mastrangelo, M. A. Burns and D. T. Burke, IEEE Proceedings, Vol. 86, No. 8, pp. 1769-1787.
Microfluid Device Using Si and Plastic
Source: Ministry of Public Management, Home Affairs, Posts and Telecommunications
AgricultureEnvironment
Medicine, Health Security Disaster Prevention
Others
Images of Sensor Network Applications
Sensing
Analog and digitalsignal processing
RF transceiver
Sensing
Analog/digitalsignal processing
RF transceiver
Sensing
Analog/digitalsignal processing
RF transceiver
Sensing
Analog/digitalsignal processing
RF transceiver
Sensing
Analog/digitalsignal processing
RF transceiver
Sensing
Analog/digitalsignal processing
RF transceiver
Network module
(Sensor module)
(Sensor module)
(Sensor module)(Sensor module)
(Sensor module)
InternetWirelesslink
PC
N-interfacer(Sensor module)
Ubiquitous Sensor Network Concept
SRAM
Powerregulator
RFtransceiver
chipset
Oscillator
RFcontroller
ADC
Base boardRS232C
Powerregulator
USB
Ether
PC
Sensor
MPU
Battery
Base board
RF board
Battery
Optional
303.825 MHz
(a) (b)
Block Diagrams
Sensor module (Ni3)
Network module
Sensor Network Using Ni3
腕時計のケースに入れた Ni3
Eyeball movement sensor
Rheometer
Cardiograph
Acceleration sensor
Vibration
Pulseoxymeter
Vital data, Warning
Skin thermometry sensorSkin conductivity sensorBody-movement- accelerometerMicro vibration accelerometer
Wearable PC (with a built-in PHS )
Electroencephalograph
Send information by radio
( admission, secure communication )
Feet pressure sensor
Server for wearable PC
Internet
Information browserfor cliants
Health care system
Medical institutions
Fire stations
Vital data management systemMuscle-sound sensor
・ Dispersion to different kinds of instruments・ Security・ General purpose search engine・ accumulation and management of vital data
・ correlation analysis of actions, living bodies, and environmental information・ management of attributed data about actions and health
Healthcare System Using Wearable Sensors
Current Status of Wearable Sensors