Metal-free-catalyst for the growth of Single Walled Carbon Nanotubes P. Ashburn, T. Uchino, C.H. de...
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![Page 1: Metal-free-catalyst for the growth of Single Walled Carbon Nanotubes P. Ashburn, T. Uchino, C.H. de Groot School of Electronics and Computer Science D.C.](https://reader035.fdocuments.us/reader035/viewer/2022062421/56649d165503460f949ec443/html5/thumbnails/1.jpg)
Metal-free-catalyst for the growth of Single Walled Carbon
Nanotubes
P. Ashburn, T. Uchino, C.H. de GrootSchool of Electronics and Computer Science
D.C. Smith, G. N Ayre, K.N. BourdakosSchool of Physics and Astronomy
A.L. Hector, B. MazumderSchool of Chemistry
University of Southampton
![Page 2: Metal-free-catalyst for the growth of Single Walled Carbon Nanotubes P. Ashburn, T. Uchino, C.H. de Groot School of Electronics and Computer Science D.C.](https://reader035.fdocuments.us/reader035/viewer/2022062421/56649d165503460f949ec443/html5/thumbnails/2.jpg)
Contents
• Aims
• New CNT growth process using Ge
• Initial results
• Possible mechanisms
• Refinement of CNT process
• Recent results
• Conclusions
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Aims
![Page 4: Metal-free-catalyst for the growth of Single Walled Carbon Nanotubes P. Ashburn, T. Uchino, C.H. de Groot School of Electronics and Computer Science D.C.](https://reader035.fdocuments.us/reader035/viewer/2022062421/56649d165503460f949ec443/html5/thumbnails/4.jpg)
Standard Growth Methods
• Require
– Metal catalyst nanoparticles• Metals include Fe, Ni, Co and others• Particles need to be a few nanometers in diameter
– Carbon containing gas• SWNT favoured by smaller non-conjugated molecules
– Energy to decompose the feedstock• Thermal energy – CVD• RF – Plasma enhanced CVD
• Often include
– Hydrogen – • encourages SWNT growth
– Oxidising agent – • appears to regenerate catalyst
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Non-metallic routes to SWNT
• But standard standard growth methods have disadvantage of using metal catalysts
• Metals are lifetime killers in silicon & also degrade yield
• Non-metallic catalyst is desirable for silicon compatibility
• Aim of this research is to search for non-metallic routes to SWNT growth
![Page 6: Metal-free-catalyst for the growth of Single Walled Carbon Nanotubes P. Ashburn, T. Uchino, C.H. de Groot School of Electronics and Computer Science D.C.](https://reader035.fdocuments.us/reader035/viewer/2022062421/56649d165503460f949ec443/html5/thumbnails/6.jpg)
A New CNT Growth Method using Germanium
![Page 7: Metal-free-catalyst for the growth of Single Walled Carbon Nanotubes P. Ashburn, T. Uchino, C.H. de Groot School of Electronics and Computer Science D.C.](https://reader035.fdocuments.us/reader035/viewer/2022062421/56649d165503460f949ec443/html5/thumbnails/7.jpg)
New Germanium based route to SWNT
Start with either
SiGe (30% Ge) layer grown on silicon Or
Stranski-Krastanow Ge (d = 20-250nm) dots on silicon
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Pre-Treat Substrates
• Carbon ion implant – 31016 cm-2 30keV
• Strip native oxide with HF vapour
• Chemically oxidise with H202
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Chemical Vapour Deposition
Substrate
Gas outlet
Quartz tube
Ceramic boat
Oven
Gas inlet(CH4, Ar, H2)
Two Step Process
Anneal – 1000oC, H2 300 sccm, Ar 1000 sccm, 10min
Growth – 850oC, CH4 1000 sccm, Ar 300 sccm, 10 min
Tem
per
atu
re (
C)
1000
850
Time (min)30 60 90
RT
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Initial results
![Page 11: Metal-free-catalyst for the growth of Single Walled Carbon Nanotubes P. Ashburn, T. Uchino, C.H. de Groot School of Electronics and Computer Science D.C.](https://reader035.fdocuments.us/reader035/viewer/2022062421/56649d165503460f949ec443/html5/thumbnails/11.jpg)
SEM Post Growth: SiGe Samples
500 nm
(a)
500 nm
(a)
500 nm
(b)
500 nm
(b)
As-grown
After HF Treatment
• Two types of fibre observed after growth
• “Fat” Curly Fibres
• Removed by HF vapour etch
• Oxide nanofibers
• “Thin” straighter fibres
• Remain after HF vapour etch
•Carbon nanotubes
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Raman Spectra
CNTs
CNTs
Thick fibers
Raman shift (cm-1)
1200 1400 1600 1800
G band (a)
Inte
ns
ity
(arb
. u
nit
s)
-400-300-200-100
SiRBM (b)
1200 1400 1600 1800
(c)
Raman shift (cm-1)
1200 1400 1600 1800
G band (a)
1200 1400 1600 1800
G band (a)
Inte
ns
ity
(arb
. u
nit
s)
-400-300-200-100
SiRBM (b)
-400-300-200-100
SiRBM (b)
1200 1400 1600 1800
(c)
1200 1400 1600 1800
(c)
• excitation = 633nm
• Clear G-band signal
• No D- band observed
• Radial breathing modes indicate SWNT with diameters in range 1.2-1.6nm
• Thick fibres give broad peak at 1400 cm-1 similar to ones reported for amorphous carbon.
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Ge dot samples
Raman spectra of Ge dot sample
CNTs on Ge dots
Raman shift (cm-1)In
ten
sit
y (a
rb.
un
its
)
1200 1400 1600 1800
-250 -200 -150 -100
Raman shift (cm-1)
Raman shift (cm-1)In
ten
sit
y (a
rb.
un
its
)
1200 1400 1600 1800
-250 -200 -150 -100
Raman shift (cm-1)
-250 -200 -150 -100
Raman shift (cm-1)
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TEM Images
A bundle of SWNTs
(b)(a)
10 nm 50 nm
(b)(a)
10 nm 50 nm
Oxide nanofibers
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Possible Mechanisms
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Analysis of Experimental Data
Sample Implant Pre-treatment Growth Gas CNT growth
1 C ion H2O2 CH4, H2 CNTs
2 C ion - CH4, H2 Lower CNT density
3 C ion H2O2 Ar, H2 No CNTs, oxide fibres
4 No H2O2 CH4, H2 No CNTs
5 No - CH4, H2 No CNTs
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Further Analysis• Evidence of C diffusion to surface
• C expected to aid nanotube growth
•Ge nanoparticles formed during pre-anneal
Depth (nm)
1017
1018
1019
1020
1021
1022
1023
0 40 8010-4
10-3
10-2
10-1
100
101
102
0 40 80
C,
O C
on
ce
ntr
ati
on
(c
m-3
)
Ge
co
nte
nt (%
)
(a) (b)Ge
C
O
C
Ge
O
Depth (nm)
1017
1018
1019
1020
1021
1022
1023
0 40 8010-4
10-3
10-2
10-1
100
101
102
0 40 80
C,
O C
on
ce
ntr
ati
on
(c
m-3
)
Ge
co
nte
nt (%
)
(a) (b)Ge
C
O
C
Ge
O
1 µm1 µm
After implant After pre-heating
SEM
AFM
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Possible Mechanisms• Vapour-liquid-solid growth one possibility:
Ge nanoparticle would be seen at tip of nanotube
• Nanotube growth from root another possibility
• TEM shows no evidence on particle at tip
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Refinement of CNT Process
![Page 20: Metal-free-catalyst for the growth of Single Walled Carbon Nanotubes P. Ashburn, T. Uchino, C.H. de Groot School of Electronics and Computer Science D.C.](https://reader035.fdocuments.us/reader035/viewer/2022062421/56649d165503460f949ec443/html5/thumbnails/20.jpg)
Issues
•Ge nanoparticles responsible for growth
•But need to control nanoparticle size
•Ge implantation widely used to create Ge nanoparticles in oxide
•Has advantage that nanoparticle size controlled by implant dose and anneal conditions
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Ge Nanoparticle Fabrication
SiO2
Si
Ge implant
SiO2
Si
Anneal
Si
Oxide etchGe nanoparticles
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Recent Results
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Ge Nanoparticles
3E16cm-2 Ge implantNo C implant600C anneal
3E16cm-2 Ge implantNo C implant1000C anneal
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Ge Nanoparticle Sizes
3E16cm-2 Ge implantNo C implant600C anneal
3E16cm-2 Ge implantC implant600C anneal
•600C anneal gives ~2nm Ge nanoparticles•C implant gives smaller Ge nanoparticles
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After Nanotube Growth
Carbon nanotubes formed No carbon nanotubes formed
3E16cm-2 Ge implantNo C implant600C anneal
3E16cm-2 Ge implantNo C implant1000C anneal
•New process allows nanotube growth without C implant
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Temperature Time Temperature Time without C+ C+
1100 ℃ 5 min 850 ℃ 20 min No CNTs No CNTs
1050 ℃ 5 min 850 ℃ 20 min No CNTs 0.6 ± 0.1
1000 ℃ 5 min 850 ℃ 20 min No CNTs 2.7 ± 0.8
950 ℃ 10 min 850 ℃ 20 min 0.6 ± 0.2 2.0 ± 0.6
900 ℃ 10 min 850 ℃ 20 min 3.5 ± 1.0 4.1 ± 1.2
850 ℃ 10 min 850 ℃ 20 min 1.3 ± 0.1 1.2 ± 0.3
N/A N/A 1000 ℃ 20 min No CNTs No CNTs
N/A N/A 950 ℃ 20 min 1.6 ± 0.5 3.2 ± 2.6
N/A N/A 900 ℃ 20 min No CNTs 0.4 ± 0.1
N/A N/A 850 ℃ 20 min No CNTs No CNTs
Pre-anneal CNT growth CNT area density (μm in length / μm2)
Analysis of Experimental Data
•Carbon implant widens process window for nanotube growth
![Page 27: Metal-free-catalyst for the growth of Single Walled Carbon Nanotubes P. Ashburn, T. Uchino, C.H. de Groot School of Electronics and Computer Science D.C.](https://reader035.fdocuments.us/reader035/viewer/2022062421/56649d165503460f949ec443/html5/thumbnails/27.jpg)
Inte
ns
ity
(arb
. u
nit
s)
1200 1400 1600 1800 2000
Wave number (cm-1)
G
D
#2 no C+ implant
100 200 300 400 500
Si
RBM
RBM
Si
100 200 300 400 500
RBM
SiSi
#2 C+ implant
1200 1400 1600 1800 2000
G
M
Wave number (cm-1)
Inte
ns
ity
(arb
. u
nit
s)
Effect of Carbon Implant
No C implant C implant
•No D band for C implanted samples•Carbon implant improves nanotube “quality”
![Page 28: Metal-free-catalyst for the growth of Single Walled Carbon Nanotubes P. Ashburn, T. Uchino, C.H. de Groot School of Electronics and Computer Science D.C.](https://reader035.fdocuments.us/reader035/viewer/2022062421/56649d165503460f949ec443/html5/thumbnails/28.jpg)
Conclusions
• Developed a new route to SWNT growth
• Evidence shows Ge nanoparticles key to growth
• SWNTs produced have diameter range 1.2 -1.6nm
• SWNTs are “highly quality” as measured by Raman
• Implanted Ge nanoparticles give more reproducible SWNT growth.
• C implant widens process window for SWNT growth & improves nanotube “quality”