MEMS @ Texas Tech · Texas Tech wins Sandia MEMS design competition Image of the week Shown above...

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MEMS @ MEMS @ Texas Tech Texas Tech

Transcript of MEMS @ Texas Tech · Texas Tech wins Sandia MEMS design competition Image of the week Shown above...

Page 1: MEMS @ Texas Tech · Texas Tech wins Sandia MEMS design competition Image of the week Shown above is Texas Tech University's microclock fabricated using Sandia's SUMMiT V polysilicon

MEMS @MEMS @Texas TechTexas Tech

Page 2: MEMS @ Texas Tech · Texas Tech wins Sandia MEMS design competition Image of the week Shown above is Texas Tech University's microclock fabricated using Sandia's SUMMiT V polysilicon

MEMS Research @ TTUMEMS Research @ TTUMEMS Design and Fabrication

MEMS Testing, Characterization & Control

MEMS Integration and Application

MEMS Education

MEMS Organization

Page 3: MEMS @ Texas Tech · Texas Tech wins Sandia MEMS design competition Image of the week Shown above is Texas Tech University's microclock fabricated using Sandia's SUMMiT V polysilicon

MEMS Design, Simulation MEMS Design, Simulation and Fabricationand Fabrication

AutoCAD (TTU) SUMMiT VSandia National Labs

Ideas Devices

Illustrator TTU Nano Tech Center

ANSYS (FEM)Simulation

Page 4: MEMS @ Texas Tech · Texas Tech wins Sandia MEMS design competition Image of the week Shown above is Texas Tech University's microclock fabricated using Sandia's SUMMiT V polysilicon

MEMS Testing and Characterization

Packaging issuesStictionFriction

Accelerated wearCoatings

TestingCustom Drivers

Microscope probe stationsInterferometric Microscope

Electron MicroscopeAtomic Force Microscopes

Page 5: MEMS @ Texas Tech · Texas Tech wins Sandia MEMS design competition Image of the week Shown above is Texas Tech University's microclock fabricated using Sandia's SUMMiT V polysilicon

MEMS Control

Integrated Sensing & ControlIntegrated Sensing & Control

Adaptive OpticsNon-contact digital micromirrors

Page 6: MEMS @ Texas Tech · Texas Tech wins Sandia MEMS design competition Image of the week Shown above is Texas Tech University's microclock fabricated using Sandia's SUMMiT V polysilicon

MEMS EducationMEMS Education

Sandia National LabsSandia National LabsSUMMiT V ProcessSUMMiT V ProcessUniversity Alliance ProgramUniversity Alliance Program

Three Course MEMS Curriculum

The 18mm2 Classroom, T. Dallas, J. Berg, & R. Gale Hilton Head 2006

Page 7: MEMS @ Texas Tech · Texas Tech wins Sandia MEMS design competition Image of the week Shown above is Texas Tech University's microclock fabricated using Sandia's SUMMiT V polysilicon

MEMS IntegrationMEMS Integration

LED Illuminators for LED Illuminators for DMDDMD--based video based video projection systems projection systems

Generation of Generation of arbitrary sequences arbitrary sequences of of ultrafastultrafast pulses pulses

Page 8: MEMS @ Texas Tech · Texas Tech wins Sandia MEMS design competition Image of the week Shown above is Texas Tech University's microclock fabricated using Sandia's SUMMiT V polysilicon

MEMS ApplicationsMEMS Applications

IR detector with IR detector with integrated shutter integrated shutter

Biochemical sensors Biochemical sensors

MEMS Microphone MEMS Microphone

Page 9: MEMS @ Texas Tech · Texas Tech wins Sandia MEMS design competition Image of the week Shown above is Texas Tech University's microclock fabricated using Sandia's SUMMiT V polysilicon

MEMS OrganizationMEMS OrganizationTEXMEMS IV – Texas Tech University – July 2002

T. Dallas – Co-Chair MEMS Technical Working Group, Texas State Strategy on Advanced Technology

www.TEXMEMS.org

Page 10: MEMS @ Texas Tech · Texas Tech wins Sandia MEMS design competition Image of the week Shown above is Texas Tech University's microclock fabricated using Sandia's SUMMiT V polysilicon

Contact InformationContact Information

www.depts.ttu.edu/ntc

[email protected]