MEMS for Adaptive Optics
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Transcript of MEMS for Adaptive Optics
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Professor Richard S. MullerMichael A. Helmbrecht
MEMS for Adaptive OpticsMEMS for Adaptive OpticsAdaptable-Mirror Section
Mirror Substrate
Solder-BumpElectrical Connections
Movable Mirror ElementsScale ~10s to 100s m
Scale ~ mm to cm
Current-DriverElectronics
Array of Elevating Mirrors
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Professor Richard S. MullerMichael A. Helmbrecht
How Can We Elevate the Mirror Elements?
How Can We Elevate the Mirror Elements?
• Magnetic Actuation– Solenoidal structures
• Electrostatic Actuation– Vertical comb-drives
• Thermal Actuation– Thermal-bimorph structures– Our initial design approach
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Professor Richard S. MullerMichael A. Helmbrecht
• Mirror
Berkeley Bimorph ProcessBerkeley Bimorph Process
• Single-mask process
• Low-stress nitride (SixNy) and aluminum bimorph
• Other processes under consideration– Hidden actuators – Electrostatic actuators– Bonded mirrors
Current path
Mirror
Die photo - actuated, released mirrors
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Professor Richard S. MullerMichael A. Helmbrecht
ConclusionsConclusions
• Bimorph actuator is small and can be fabricated under the mirror– Fill factor > 98%
• Bimorph actuators can be tiled in an arrays to actuate large numbers of mirrors
• Bimorph actuator provides large tip deflection (h = 10 m)• Models show frequency requirements are met (f>1 kHz)• Bimorph actuators have been fabricated
– Testing is underway