MEMS design and Micro-fabrication Lab
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Transcript of MEMS design and Micro-fabrication Lab
MEMS design and Micro-fabrication LabMML
SU-8 Mold PDMS replication
MIP Reactor
Micropump
Microvalve
(a) (b)
(c) (d)
Heater
Temp. Sensor
(e)
200µm50µm
2-Dimensional SPR Detection System Integrated with Molecular 2-Dimensional SPR Detection System Integrated with Molecular Imprinting Polymer Microarrays Using Microfluidic TechnologyImprinting Polymer Microarrays Using Microfluidic Technology
Kuo-Hoong LeeKuo-Hoong Lee, Yuan-Deng Su, Shean-Jen Chen and Gwo-Bin Lee, Yuan-Deng Su, Shean-Jen Chen and Gwo-Bin LeeDepartment of Engineering Science, National Cheng Kung University, Tainan, Taiwan 701Department of Engineering Science, National Cheng Kung University, Tainan, Taiwan 701
This study reports a novel microfluidic chip integrated with arrayed molecular imprinting polymer (MIP) films for surface plasmon resonance (SPR) phase imaging of specific bio-samples. The SPR imaging system uses a surface-sensitive optical technique to detect two-dimensional spatial phase variation caused by bio-molecules absorbed on a sensing surface composed of highly-specific MIP films. The developed system has a high resolution and a high-throughput screening capability and has been successfully applied to the analysis of multiple bio-molecules without the need for additional labeling in long-term measuring.
Simplified fabrication process of the SPR/MIP microfluidic chip. (a) SU-8 molding and PDMS casting fabrication process; (b) Spin-coating of MIP films and polymerization process; (c) Temperature sensor and heaters fabricated by using lift-off technique.
A novel SPR/MIP microfluidic chip integrated with arrayed MIP films for SPR phase imaging of specific bio-samples was developed.Multiple MIP films could be used for highly-sensitive, highly-specific bio-sensing.The development of the SPR/MIP microfluidic chip can be promising for nano-sensing applications and can detect bio-samples with a low molecular weight.
The temperature control system can heated up bio-samples to 37 °C within 20s and kept them
at a uniform temperature.
A SPR/MIP microfluidic chip comprising microchannels, micropumps/microvalves, micro-heaters and temperature sensors coupled with a 2-D SPR imaging system was developed. Micropumps were used to automate the sample injection. A micromachine-based temperature control module comprised of micro-heaters and a temperature sensor was used to maintain the temperature during measurement.
0 50 100 1500
0.002
0.004
0.006
0.008
0.01
Time (min)
SPR
angl
e sh
ift (d
eg)
Flowed progesterone sample
Arrived saturation
Washed with ethanol
0 50 100 1500
0.002
0.004
0.006
0.008
0.01
Time (min)
SPR
angl
e sh
ift (d
eg)
Flowed progesterone sample
Arrived saturation
Washed with ethanol
The detection kinetics of 50 μM progesterone. Reaction procedure (0 ~ 21 min : ethanol, 21 ~ 126 min : ethanol + 50μM progesterone, 126 min ~ : ethanol).
(a) SPR phase interference image and (b) phase reconstructed image when ethanol flows through the arrayed MIP films.
The relationship between the pumping rate and the driving frequency.
prism
Slide(SF-11)Au (47.5 nm)
Glass
OutletInlet
θ 1
CCDHe-Ne laser
Micropump
Microchannel
Arrayed MIPHeater
Temp. Sensor
prism
Slide(SF-11)Au (47.5 nm)
Glass
OutletInlet
θ 1
CCDHe-Ne laser
Micropump
Microchannel
Arrayed MIPHeater
Temp. Sensor
SU-8 molding
PDMS replication
Si
PDMS bonding
Cleaning
PDMS release / Via hole formation
Sputtering 47.5nm Au
Thiol group modification
MIP spin coating and polymerization
Slide
Lithography
Pt deposition
PR lift-off
Au lead deposition
Glass
Assembly
(a)
(b)
(c)
SU-8 molding
PDMS replication
Si
PDMS bonding
Cleaning
PDMS release / Via hole formation
Sputtering 47.5nm Au
Thiol group modification
MIP spin coating and polymerization
SlideSlide
Lithography
Pt deposition
PR lift-off
Au lead deposition
Glass
AssemblyAssembly
(a)
(b)
(c)
6 cm
Heater
Temp.Sensor
4 cm
Glass
MicropumpMicrovalve
PDMS layer1 & layer2 PDMS layer3
Microchannel
Arrayed MIP films
Inlet Outlet
6 cm
Heater
Temp.Sensor
4 cm
Glass
MicropumpMicrovalve
PDMS layer1 & layer2 PDMS layer3
Microchannel
Arrayed MIP films
Inlet Outlet
MicrochannelMicropump/valve
Inlet Outlet
PDMS #2
PDMS #3
PDMS #1Heater
Slide (SF-11)
Sensor
MicrochannelMicropump/valve
Inlet Outlet
PDMS #2
PDMS #3
PDMS #1
Heater
Slide (SF 11)-
Temp. sensor
Gold film
MicrochannelMicropump/valve
Inlet Outlet
PDMS #2
PDMS #3
PDMS #1Heater
Slide (SF-11)
Sensor
MicrochannelMicropump/valve
Inlet Outlet
PDMS #2
PDMS #3
PDMS #1
Heater
Slide (SF 11)-
Temp. sensor
Gold film
(a) Schematic illustration of the arrayed SPR/MIP microfluidic chip (b) Cross-sectional view showing that three layers of PDMS could be used to transport samples from inlet to outlet through the arrayed MIP films.
Freq. (Hz)
Pum
ping
rate
(ul/m
in)
0 5 10 15 20
10
20
30
40
50
25 psi20 psi15 psi10 psi
Time (s)
Tem
pera
ture
(o C)
0 25 50 75 10025
30
35
40
45
SEM images of the SU-8 molds (a and c) and PDMS replicas (b and d) of the arrayed MIP reactors and micropumps/valves. (e) the temperature sensor and heater.
Design
Conclusions
Results
Fabrication
Abstract
The authors gratefully acknowledge the financial support provided to this study by the MOE Program for Promoting Academic Excellence of Universities (Grant number EX- A-91-E-FA08-1-4).
Acknowledgements
(a) (b)
(a)
(b)
2006