MEMS Based Reconfigurable RF Systems for SoftwareRadio, Wireless Sensors, and MMID Technology, Jussi...
-
Upload
the-research-council-of-norway-iktpluss -
Category
Technology
-
view
1.115 -
download
2
Transcript of MEMS Based Reconfigurable RF Systems for SoftwareRadio, Wireless Sensors, and MMID Technology, Jussi...
MEMS Based Reconfigurable RF Systems for Software
Radio, Wireless Sensors, and MMID Technology
(MOSART)
Jussi Varis
VTT Technical Research Centre of Finland
Sweden, FOI: R. Malmqvist, C. Samuelsson
Sweden, Uppsala University: A. Rydberg, X. Hu
Finland, VTT: J. Varis, P. Rantakari, J. Säily, M. Lahti, M. Kaunisto, J. Saijets, and T. Vähä-
Heikkilä
NORDITE Conference 2011
Quality Hotel 33, Oslo
June 14th, 2011
2 NORDITE Conference 2011, June 14th, 2011
Outline
1. Project overview
2. Motivation and applications
3. Produced devices and modules
• RF MEMS Devices
• Antennas on LTCC
• LTCC packaged RF MEMS devices
• Sub-system modules
4. Related on-going efforts
5. Benefits from MOSART
6. Summary
3 NORDITE Conference 2009, Nov. 4th, 2009
Project overview
• 36 month VINNOVA, Tekes, and VTT funded project.
• Main goal: Successful integration of MEMS components, active RF circuits, and sub-systems into a LTCC packaged re-configurable RF front-end demonstrators at 10-40 GHz.
• Research partners: FOI, Uppsala University (SWE), VTT (FIN)
• Industry partners: Nera Networks (NOR), Ericsson Research (SWE), Saab Microwave Systems (SWE), Silex Microsystems (SWE), Syncore Technologies (SWE), Elektrobit Wireless Communications (FIN), Selmic (FIN).
4 NORDITE Conference 2009, Nov. 4th, 2009
Motivation
• RF MEMS
wireless RF systems with better performance
(compared with a use of today’s of the shelf technologies)
• RF MEMS in point-to-point communication and RF sensing (5-40 GHz),
reconfigurable electronic multi-band (frequency-agile) front-ends
Lowers component count, reduces complexity and cost
• RF MEMS switch technology
High linearity
Low insertion loss and DC power consumption candidate for re-configurable front-
ends and beam steering
5 NORDITE Conference 2009, Nov. 4th, 2009
Applications
• 35 GHz low loss electrically steerable antennas (low power radars)
• 10-30 GHz re-configurable/tunable amplifiers (for Pt-to-Pt communications)
mm wave sensors
radio links
6 NORDITE Conference 2009, Nov. 4th, 2009
MOSART RF MEMS devices
VTT 30-40 GHz
wideband matching
network
(1.0 mm x 0.9 mm). FOI RF MEMS
switch (0.7 mm x
1.0 mm).
VTT 35 GHz analog phase
shifter.
FOI 20-30 GHz SPDT with
places for LNAs (4.5 mm x
3.0 mm).
VTT 20-30 GHz SPDT (5.0
mm x 3.0 mm).
FOI 35 GHz 3-bit switched delay
phase shifter (9.3 mm x 3.0 mm).
7 NORDITE Conference 2009, Nov. 4th, 2009
MOSART antennas on LTCC
Uppsala 35 GHz 4x1 slot-coupled
antenna array (21.0 mm x 12.5 mm).
Uppsala 20-30 GHz microstrip
bow tie antenna array
(8.0 mm x 18 mm).
VTT 20-30 GHz end-fire dipole antenna
(8.5 mm x 8.0 mm). VTT 20-30 GHz Vivaldi antenna
(5.7 mm x 17 mm).
VTT 35 GHz co-planar 4x1 antenna
array with EBG structure
(20 mm x 12 mm).
8 NORDITE Conference 2009, Nov. 4th, 2009
MOSART LTCC packaged RF MEMS devices
LTCC packaged wideband RF MEMS
impedance tuner (9.0 mm x 9.5 mm).
LTCC packaged 20-30 GHz RF MEMS SPDT
switch(12 mm x 9.0 mm).
9 NORDITE Conference 2009, Nov. 4th, 2009
MOSART sub-system modules
20-30 GHz switchable LNA/driver
module (16 mm x 15 mm).
25/35 GHz switchable LNA
module(20 mm x 11 mm).
35 GHz narrowband digital phased array
Rx module (45 mm x 29 mm).
35 GHz narrowband analog phased
array Rx module (71 mm x 25 mm).
10 NORDITE Conference 2009, Nov. 4th, 2009
Main remaining challenges
• RF MEMS reliability Process quality (residuals, layer thicknesses).
Design parameter stability (MEMS switch gap height, capacitance ratio, pull-in
voltage)
Environmental susceptibility (temperature, mechanical, charging, etc.)
• Integration Flip-chip bonding vs. ribbon bonding
Alignment accuracy on LTCC
MEMS temperature tolerance in various integration and post integration
phases.
11 NORDITE Conference 2009, Nov. 4th, 2009
Related on-going efforts
• Rx modules on Taclam.
• Tunable LNAs and drivers on quartz. wire bond
or
flip-chip
Quartz substrate with RF MEMS
impedance matching networks.
LNA/PA
MMIC
RX1
RX2 Rx modules on
Taclam substrates.
Antenna arrays.
RF MEMS
phase shifters.
MMIC
LNAs.
Benefits from MOSART
• Nordic countries and Europe have in place technologies to produce
packaged re-configurable radio modules.
RF MEMS
LTCC
MMICs
• Benefits to industry partners in MOSART
Saab: electrically steerable phased array front-ends for sensor applications
Nera, Ericsson, Elektrobit: re-configurable/tunable radio sub-systems for Pt-to-Pt
applications
Syncore: novel integated sub-systems
Selmic: micro and mm wave frequency LTCC module processing
Silex: micro and mm wave RF MEMS processing
12 NORDITE Conference 2009, Nov. 4th, 2009
Benefits from MOSART
• Expanding European frontiers in RF MEMS and LTCC related
development
MEMS-4-MMIC (EU FP7, 2008-2011, on-chip integration of MMIC and RF
MEMS): OMMIC and CNRS-IEMN (FRA), FOI and Saab (SWE), IMST (GER),
IMT (ROM), VTT (FIN)
SATURNE (EU FP7, 2010-2013, GaN and RF MEMS for space applications):
UU (SWE), Thales and CNRS-IEMN (FRA), EADS (GER), Thales Alenia
Space (ITA), TopGAN (POL)
MiniMEMS (EU FP7, 2010-2013, miniaturised RF MEMS for airport and
weather radar systems): ÅAC Microtec and UU (SWE), Thales and CNRS-
IEMN (FRA), Vaisala (FIN)
MEMSMOD (ESA and participants, 2010-2012, LTCC packaged RF MEMS
switch reliability and environmental testing and assessment): EADS (GER),
Selmic and VTT (FIN)
13 NORDITE Conference 2009, Nov. 4th, 2009
Towards commercial systems
• RF MEMS switches and sub-systems
(circuits & antennas) have been
demonstrated with state-of-the-art
performance from DC-100 GHz and beyond
• Enabling technology for miniaturized, low-
power high performance re-configurable RF
systems (e.g. for wireless comm., space,
security & defense)
• High reliability (switch cycles) and
fabrication yields needed for a higher market
penetration
• Today, just a few commercial vendors
offering RF MEMS as packaged (discrete)
components: RadantMEMS (US), OMRON
(JPN), DELFMEMS (FR)
• A few MMIC foundries developing RF-
MEMS: OMMIC (FR) – GaAs, IHP (GE) –
SiGe, Selex (IT) – GaN
• RF-MEMS technology in the US (e.g.
Radant) has demonstrated a much higher
TRL than what is currently available in
Europe.
14 NORDITE Conference 2009, Nov. 4th, 2009
15 NORDITE Conference 2009, Nov. 4th, 2009
Summary
• MOSART has demonstrated
RF MEMS matching networks, phase shifters and SPDT switches
Antenna arrays and wideband antennas on LTCC
Module concepts for electronically steerable or re-configurable radio systems
Processing technologies for manufacturing RF MEMS devices and LTCC modules.
• MOSART has
Brought together a large number of Nordic companies and research institutes.
Utilised synergy (for example MMIC design and manufacturing) from other related on-
going projects and networks.
Expanded RF MEMS and LTCC related development to include more Nordic and
European companies and institutes in Nordic, EU, and ESA related projects.
• Challenges remain
RF MEMS reliability and stability
Integration related issues.
16 NORDITE Conference 2009, Nov. 4th, 2009
Contact information
• Project manager and national contact in Finland:
Dr. Jussi Varis, VTT, [email protected], tel: +358-40-569 4089, fax: +358-20-722 7013
• National contact in Sweden:
Prof. Anders Rydberg, Uppsala University, [email protected], tel: +46-18-471 3228, fax: +46-18-555096
• Chairman of the Steering Group:
Dr. Robert Malmqvist, FOI Swedish Defense Research Agency, [email protected], tel: +46-13-378 353, fax: +46-13-378 519