1. DHM: a MEMS Analyzer DHM is a integrated and unique tool for dynamical 3D and electrical measurement on MEMS MOEMS and micro system. 2. Lynce Tec A unique integrated MEMS Analyzer A 3D optical profiler Interferometric resolution out of plane Diffraction limited in plane resolution A Stroboscopic synchronization Waveform generator or external sync for mems excitation signal Continuous frequency range from static to 25Mhz MEMS Live Analysis Toolbox In & out of plane motions Frequency response Electrical analysis Product Description Out of plane displacement vs Frequency Micro mirror at 18kHz 3. Lynce Tec Access a wide range of sample Capture Fast Vertical Motion Interact in real time with your device Characterize complex geometry & movement Measure in Any environment DHM provide a solution for each Challenge us with your sample Analyze in Live your measurements Unique Features Investigate non linear resonances DHM + Stroboscopic Module Ready from MEMS Characterization 4. Lynce Tec Slow Motion Stroboscopic Real Time Interact in real time with your device and analyze it in live thanks to : The full field measurement & strictly non scanning acquisition. Koala live measurement visualization and analysis tool. Unique Features Click to play video full screen 5. Lynce Tec Measure in any Environment With an optimal optical quality : trough windows In vacuum Unique conception enabling to use any objective. Corrected for most standard thickness of cover glass Immersion objectives, Long working distance Including for high NA/resolution objectives Unique Features In liquids In presence of electrical probes Interferometric objectives : internal reference DHM unique design with an external reference arm. Cover glass correction To achieve Optimal quality Source : MicroscopyU, Nikon 6. Lynce Tec Complex geometry & movement (1) Pass trough point sensor limitation complex geometry : sacrificial holes, grid with multiple devices complex movement : combined in and out of plane with tilt of suspended structure DHMs Full Field Acquisition Simultaneously measure million of points A Single Sensor records full device information Unique Features Optical Shutter. Click to play video full screen Gyroscope, 5 kHz Presence of sacrificial holes 7. Lynce Tec Complex geometry & movement (2) DHM simultaneously measure a grid of device. statistical analysis : De-phasing between elements Collapse voltage for membranes Resonance frequency variability Unique Features cMUT @ 200kHz Analyze Dephasing between device Click to play video full screen cMUT, Statistical distribution of collapse voltage 8. Lynce Tec Fast Vertical Motion Micro Mirror at resonance frequency 18.2KHZ Laser pulse at 100ns, we observe interference pattern. DHM is able to measure device with vertical motions up to several meters per second. Short laser pulse length down to 7.5ns allows DHM to freeze device movement Relevant for MEMS at low frequencies. They have usually large and fast vertical displacement Unique Features Laser pulse at 10ns, no interference pattern. 9. Lynce Tec Study of Non Linear Resonances Stroboscopic module with dedicated electronics Frequency scan with continuous sweep of excitation frequency Frequency approach form upward and downward Unique Features Courtesy of Bosch GmbH) High Frequency Mirror A non linear response 10. Lynce Tec DHM : A Versatile System VCSEL Fast design testing 2-axis miroir Multiple excitation signals for complex system control SG-MOSFET Memory Efficient failure analysis Gyroscope Measurement in vacuum through transparent windows AFM cantilever Resonance Frequency Analysis Fabry-Perot Quality control Variable capacitor Full field measurement for complex movement analysis Membranes HF mirror Short laser pulses for high vertical speed cMut Full field measurements for statistical analysis 11. Lynce Tec MEMS Analysis toolboxes Dynamical Analysis 3D Dynamical topography In and out of plane by several methods Correlation Edge detection Corner detection Resonance frequency analysis Intensity scan Frequency scan & bode analysis Fourier analysis Highly customizable graphical analysis Any combination of measurement ready for export & printing Raw data available for your analysis Roughness According to ISO Standard Reflectometry Get topography of (semi)- transparent patterns Remote Koala Interface & Customize your experiment C++, C#, labview or matlab interface 12. Lynce Tec MEMS Toolbox: 3D dynamical topography tools 4.5 kHz 27 kHz 79 kHz 87 kHz MEMS toolbox Click on frequency To play movies 13. Lynce Tec MEMS Toolbox: displacements Combined in and out-of-plane deccorelation: Automated tracking of the in-plane displacement Automated follow up of the out of plane measurement area MEMS toolbox Click to play video full screen 14. Lynce Tec Fast resonances analysis Intensity analysis Fast determination of resonance frequencies Up to 10 frequency increment per second MEMS toolbox 15. Lynce Tec Amplitude and Phase Bode analysis Sine wave excitation of increasing (decreasing) frequencies Determination of resonance frequencies Calculation of Amplitude and phase Bode diagrams Resonance Quality factor measurements calculation Scan speed (resolution dependants, typically up to 10 measurements per second) MEMS toolbox 16. Lynce Tec Fourier resonances analysis Fourier analysis Determination of resonance Quality factor measurement Impulse response (slow) Chirp (fast but a priori knowledge of resonance range) MEMS toolbox Excitation Signal with a signal comprising high frequency FOURIER transfom of temporal response Temporal response of the device 17. Lynce Tec MEMS toolbox Highly customizable graphical 18. Lynce Tec There is definitely more with DHM Measure your MEMS Interact with your device Measure in any condition Access high speed motion Characterize Complex movement & geometry Study Non linear resonances Analyze your MEMS 3D dynamical topography In and out of plane Analysis Frequency Analysis Data exportation Price Competitive Only one instrument to explore your MEMS No need of complex calibration Easy to use, low training cost Fast measurement, High instrument disponibilities 19. Lynce Tec Lyncee Tec a pioneer company Lyncee Tec Leader in holographic microscopy Owner of the key patents of the technology 10 years of market experience A team of experts To give you the appropriate support To work with you to offer you the customized solution to meet your needs Competent After Sales Service A reliable Partner focusing on continuous improvement 20. Lynce Tec Do not hesitate to contact us ! Thank you