System Description m XYZ stage, inkjet deposition system m User-fillable piezoelectric inkjet print cartridges and printheads m Built-in drop watcher camera system for jetting analysis   m Fiducial camera for substrate alignment and measurement m Variable jetting resolution m PC-controlled with graphical user interface (GUI)        application software m Wide range of fluid compatibility   m Heated vacuum platen   m Printhead maintenance and cleaning station m Includes PC, monitor and software

Mechanical System m Printable parameters  -   Printable area: 300 x 300 mm (11.8 x 11.8 in)  -   Substrate 0.05 - 30 mm thickness  -   System positional accuracy: ± 5 μm   -   Repeatability: ± 1 μm m Substrate holder  -   Vacuum platen  -   Temperature adjustable; ambient to 60o C m System footprint: 1.25 x 1.20 x 1.50 m (4.10 x 3.93 x 4.92 ft) m Weight approximately 880 kg (1,940 lbs)  m Power 100-120/200-240 VAC 50/60 Hz, 1,500 W maximum m Operating range 15-40o C at 5-80% RH non-condensing   m Operates at altitudes up to 2000 m m Safety and EMC compliant: CE/FCC/UL/RoHS/WEEE

Fiducial Camera m Allows substrate alignment using reference marks m Allows print origin or reference point positioning to match substrate placement m Provides feature location and measurement  m Provides post-print pattern inspection and image capture Cartridges m Type: Piezoelectric jetting device with integrated reservoir and heater  m Usable Ink Capacity: Up to 1.5 ml (user-fillable)  m Materials Compatibility: Many water-based, solvent, acidic or basic fluids  m Number of Nozzles: 16 nozzles, 254 μm spacing, single row  m Drop Volume: 1 (DMC-11601) and 10 (DMC-11610) picoliter nominal

Printheads m SX3, SE3 and SE-DPN

Control PC and Application Software m Pre-loaded patterned templates    m Pattern preview m Editors: Waveform and cleaning cycle m Bitmap (1 bit) files accepted    m DXF, Gerber, GDSII and OASIS file conversion         to Bitmap software

FUJIFILM Dimatix, Inc. • 2230 Martin Avenue • Santa Clara, CA 95050 • USATel: (408) 565-9150 • Fax: (408) 565-9151

E-mail: infomdd@dimatix.com • URL: www.dimatix.com

Datasheet

Materials Printer, Cartridges & Printheads DMP-3000, DMC-11601/11610, SX3, SE3 & SE-DPN

Replaceable Items m Print cartridge with one-time user-fillable reservoir m Nozzle wiping and blotting material for cleaning station

DDS00019 Rev. 01 10/02/09© FUJIFILM Dimatix, Inc.

FUJIFILM Dimatix, Inc. • 2230 Martin Avenue • Santa Clara, CA 95050 • USATel: (408) 565-9150 • Fax: (408) 565-9151

E-mail: infomdd@dimatix.com • URL: www.dimatix.com

Operating parameters Unit of measure SX3 SE3 SE-DPN

Individual tunable nozzles Yes Yes Yes

Number of addressable jets 128 128 128

Nozzle plate Silicon with non-wetting coating Silicon with non-wetting coating Nickel-gold plated

Nozzle arrangement Single row of 128 nozzles Single row of 128 nozzles Single row of 128 nozzles

Nozzle spacing micron 508 508 508

Nozzle diameter micron 19 42 35

Calibrated drop size picoliter 8 35 30

Adjustment range for drop size picoliter 8 - 10 30 - 40 25 - 30

Drop size variation, 1 sigma percent < 2 with trimming < 2 with trimming < 4 with trimming

Jet straightness ± 10 mrad absolute ± 10 mrad absolute 3 mrad 1 sigma

Nominal drop velocity msec-1 8 8 10

Drop velocity variation, 1 sigma percent ± 10 before trimming ± 10 before trimming ± 5 before trimming

Crosstalk, maximum percent 5 5 5

Operating temperature maximum °C 70 70 90

Optimal fluid viscosity range (at jetting temp.) cP 10 - 14 10 - 14 8 - 20

Compatible jetting fluids Functional fluids Functional fluids Functional fluids

Maximum operating frequency kHz 10 15 40

Nozzle line length mm 64.5 64.5 64.5

DDS00019 Rev. 01 10/02/09© FUJIFILM Dimatix, Inc.