MarSurfLD120 E neu - Mytolerans leverantör av Mahr ... · MarSurf LD 120 Product Description...

M a r S u r f

MarSurf LD 120. Two in OneHigh-precision contour and surface measuring system

NEW: now with MarSurf XC 20

MarSurf LD 120. Two in One

© by Mahr GmbH, Göttingen We reserve the right to modify our products, particularly with a view totechnical improvement and further development. All illustrations andnumbers etc. are therefore subject to change.Status: August, 30, 2004

Mahr GmbH GöttingenP.O. Box 1853, 37008 Göttingen, Germany Brauweg 38, 37073 Göttingen Phone +49-551-7073800, Fax +49-551-7073888, E-mail: [email protected]

Roughness and contour measurements inone? Of course - with MarSurf LD 120

Ladies and Gentlemen,

This presentation folder is intended to introduce you to

the new, universally usable, high-end surface measuring

system LD 120.

The combination of contour and roughness depth meas-

urements on radii, on slants or free-form surfaces requires

a measuring unit with a comparably large stroke as well

as a comparably high resolution. Measuring paths in mm

range are necessary for the contour measurements, the

roughness measurements in the µm range. In order to

realize both measuring tasks in only one measurement, a

highly precise measuring system is necessary, which

enables relatively large measuring strokes for the contour

as well as resolutions in the µm range for roughness

measurements.

The new 2D measuring unit LD 120 closes the gap be-

tween the roughness and contour measuring units in the

spectrum of Mahr surface products. The probe system

(z-axis) offers a measuring range of 10 mm with a resolu-

tion of 2 nm. The position of the probe system in the

direction of the drive unit (x-axis) is recorded over

120 mm by means of an integrated glass scale and a reso-

lution of 2 nm. These features allow measurement of the

finest contours. In addition, the electronically controlled

contacting combined with an almost frictionless support

of the probe, allows for finest contact forces down to

0.5 mN (standard for stylus instruments 0.7 mN), which

are held constant over the entire measuring range.

Together with the high probe resolution, this allows for a

roughness measurement according to standard specifica-

tions.

You start a contour measurement on your measuring

object and perform the desired contour evaluation with

the MarSurf XC 20 evaluation software. You can addition-

ally determine roughness parameters on random loca-

tions of the contour profile. This means that when

choos-

ing a probe arm with surface stylus, you can acquire

contour characteristics as well as roughness values in

one measurement.

MarSurf LD 120 is a highly precise 2D measuring unit, this

means that aside from the measurement, the probe tip

can be positioned in a two-dimensional room via the con-

trolled drives of the drive axis and probe axis. The highly

precise positioning allows not only insertion into even the

smallest bores but also fully automatic measuring runs.

You start a measuring program which approaches ran-

dom points on your workpiece, performs measurements

and then delivers fully automatically the desired evalua-

tions. With the touch of a button, you receive numerous

results. Since the values can also be tolerated, you can

directly see if your workpiece lies within the specifica-

tions.

An extensive range of probe arms is available in order to

optimally use the diverse application possibilities of this

surface measuring unit. The probe arms differ as to sur-

face and contour stylus tips as well as to their geometry,

which allows insertion into small bores, for example. The

probe arms are connected to the probe system by a

magnetic coupling. This allows for fast changing of the

probe arms, but also prevents damage of the probe bear-

ing. After calibration of each probe arm has been carried

out, the geometry data, stylus tip radii and form devia-

tion as well as weighing data are recorded in the soft-

ware.

Have fun with the Marsurf LD 120!

MarSurf LD 120

Product Description 4

MarSurf LD 120 Compact Measuring Station 4

MarSurf LD 120 with Measuring Stand 5

Your High-Precision Contour and Surface Measuring System 6

Technical Data 7

System Description 8

MarSurf LD 120 in Process 9

High-precision Contour Measurement 10

Roughness Measurement 12

Contour and Roughness Measurement 13

Calibration and Probe Compensetion 14

Probe Arm Exchange 15

Automatic Two-dimensional Positioning 16

Segmented Measurement 17

Automation 18

Application Software MarSurf XC 20 19

Practical Examples 26

Annex 32

Scope of Delivery 32

Services 34

Accessories 36

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Contents

MarSurf LD 120 Product Description

MarSurf LD 120 Compact Measuring Station

Mahr offers the MarSurf LD 120 in two basic meas-uring station variants.

The "compact" version is designed for smaller measuringobjects and higher accuracy, since vibrations are optimal-ly supressed by the stiff compact stand with small meas-uring loop.This variant is therefore especially well-suited for areasclose to the production site. Mounting devices canadvantageously be integrated in the set-up for auto-matic measurements on serial parts.

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Product Description MarSurf LD 120

MarSurf LD 120 with Measuring Stand

• A calibration method for ensuring the very highest accuracy gives you the assurance that your results will be correct.

• Measuring forces from 0.5 mN to 30 mN whose set-tings can be varied via software and which remain constant over the entire measuring stroke deliver flexibility and reliability. You can select the optimum measuring force to match the material characteristics of the testpiece and the pick-up of your choice.

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MarSurf LD 120 with Measuring Stand

Resolutions in the nm range are achieved in a combina-tion consisting of the XC 20 with high-precision driveand tracing system LD 120 and measuring stand ST 500 / ST 750.

"Two in One" enables the contour and roughness depthto measured in a single measuring run.10 mm measuring stroke for 2 nm resolution and a measuring length of 120 mm are the dimensions withinwhich the contour and roughness depth parameters aremeasured and evaluated with the highest accuracy.

• The magnetic pick-up mount guarantees flexibility in the diversity of pick-ups and exchangeability while maintaining the same high level of reliability.

• Guaranteed positioning accuracy when exchanging pick-ups in the µm range and collision protection, rigidity and stability of the pick-ups are essential for resolutions in the nm range.

• Roughness and contour in a single strokeYou need only half the time and your work is faster, more reliable and more efficient. With just onemeasurement, you have all the results for roughness and contour characteristics at a glance. So you have more time for other things!

• State-of-the-art laser technology for small tolerancesThe integrated special laser interferometer provides pinpoint accuracy over a large measuring range and at maximum resolution. You can process jobs with low tolerances and thus tackle new challenges head-on.

• Proven user interface and handling conceptThe user concept of this high-precision contour and roughness measuring system is identical with the other well-known PC-controlled surface measuring systems of Mahr. Thus, you are joining a contemporaneous high-end generation of surface metrology and at the same time increase process safety at lower training costs.

• Innovative tracing arm concept for maximum stabilityThe tracing arms, which have been designed using bridge-building techniques, ensure maximum rigidity,low-oscillation measurements and unwavering precision. So you can build your own bridges - to new dimensions of flexibility!

• Probes with magnetic mountingThe magnetic mounting facilitates probe change within seconds and ensures a high degree of system and collision protection as well as longevity.

• Market conformityThere is no better solution for high-precision contour and roughness measurement.

• Customer serviceOver 65 years of expertise in surface measurement: more than six decades of experience in combination with state-of-the-art, future-orientated technology. And in case of questions there is always a Mahr subsidiary or representative nearby.

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Your High-precision Contour and Surface Measuring System


Product Description MarSurf LD 120

Technical Data

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• MarSurf LD 120 with standard probe LD A14-10-2 under low vibration conditions

• Recommended working temperature: 20 °C

In order to reach the stated accuracy at highest resolu-tion, the probe system is produced by highly qualifiedpersonnel in clean rooms which have been especially de-signed for this purpose.

Integrating these conditions in the available productionprocesses is what makes a competent precision metrologyproducer.

Production of MarSurf LD 120

The stated technical data is valid for the following con-ditions:

Measuring system special laser interferometerTraversing length 0.1 mm to 120 mm Probe measuring range 10 mm to 20 mmStandard probe LD A14-10-2, diamond 2 µm, 90 °Resolution in z 2 nmHorizontal measuring axis Glass scaleMeasuring point distance in x 0.05 µm to 1 µmContacting force 0.5 mN to 30 mN, adjustable via software Measuring speed 0.1 mm/s to 2.0 mm/s in 0.1 mm steps

for contour masurements,0.1 mm/s and 0.5 mm/s for roughness measurements

Return speed and positioning speed in x direction up to 4 mm/s

Straightness deviation with correction 0.12 µm/20 mm0.25 µm/60 mm0.4 µm/120 mm

Angle measurement U95 < 0.5'Radius measurement ± 0.01% of nominal value at R12.5 1

Distance measurement ± (1+L/100) µm

General DataOperating temperature 15 °C up to 30 °CRecommended working temperature 20 °C ± 2 KStorage/transport temperature 0 °C up to 40 °C (in transport package)

1 Measured on a calibration standard within an angle segment of ± 35° relative to the horizontal axis.

For different applications probes can be changed quickly.Probe arm mounting is realized by means of magnetic clickpoint. This type of construction permits high degree ofprobe protection by unintended mechanical effects.

For the most frequent applications, probe arm LD A14-10-2 is included in the scope of the MarSurf LD 120 Set. Thefan form of the probe ensures a high degree of stiffnessand leads to high precision and reliability.

For different measuring tasks, various probe and tip geo-metries are available. According to the measuring task, youcan use diamond tips with 2 µm radius for roughness meas-urements, carbide tips with 25 µm radius for contour measurements as well as ruby balls. By means of an ade-quate selection of the stylus tip, short-wave and long-waveprofile components can be recorded and evaluated in onemeasuring run.

Functional Principle


Measuring station componentsMarSurf LD 120 Drive Unit

MarSurf LD 120 drive unit facilitates traversing lengthsfrom 0.1 mm up to 120 mm with drive speeds between0.1 and 2 mm/s. Due to a glass scale in x-direction, auto-matic positioning is possible.

Functional principle of the probe system

The probe principle is based on a rocker system with astylus tip on one and a diffraction grid on the other sideof the rotary axis.

The light of a diode is focused on the diffraction gridbringing out an interference image. Moving up anddown the diffraction grid leads to changes of the inter-ference image on the receptor side which is registered byphoto diodes. From this image, an electronic evalutationcircuit determines the position of the grid and conse-quently the stylus tip.

A moving coil motor is used for probe positioning in z- direction and tip force control.

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Scanning Grid

Photo Diode

Center of Rotation

Stylus tip Evaluation

Diode with Optical System

9

In Process MarSurf LD 120

Measuring with MarSurf LD 120

Processing machine

The simple, faster, more dependable way

From testpiece to measurement and final result:

Measurement

Result

Testpiece

High-precision Contour Measurement

MarSurf LD 120 In Process

MarSurf LD 120 is a highly precise contour measuringinstrument, that means radii, angles, flatness or dis-tances can be exactly measured down to the sub-micrometer range. The basis for this is due to the lasercalibrated axes with a resolution of up to 2 nm.

Highly precisely manufactured balls allow the residualerror referring to the radius measurement to beappar-ent.

The decisive factor is a high repeatability of the meas-uring results as reached with MarSurf LD 120.

Example: Acceptance measurements on ball

Example: Acceptance measurement of flatness on a highly flat opti-cal glass plate

Normal/ Standard

Bez./ Description Kalibrierkugel/Calibration sphereNummer/ Number B 1883Istwert/ Actual value. 12,49645

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Example: Repeatability measurements on ball

1 6 11 16 21

12,4964 12,4964 12,4964 12,4964 12,496412,4965 12,4965 12,4965 12,4964 12,496412,4965 12,4964 12,4964 12,4965 12,496412,4964 12,4964 12,4965 12,4964 12,496412,4965 12,4965 12,4965 12,4963 12,4964

The high accuracy at high resolution allows also forthe measurement of even the smallest structures suchas microstructures on a silicon wafer:

High-precision Contour Measurement


Enhanced Accuracy with MarSurf XC 20 due toMorphological Filtering

During a contour measurement, the probe records themovement of the tracing element's center. In reality, thecontact point of the tracing element and the sur-face isto be determined in order to enable high-precision con-tour measurements. This contact point can be calculatedfrom the radius and the known form deviations of thetracing element. Normally, a numerical differentiationmethod is used for this calculation. For sharp edges orvery small radii, however, this method often producesmeasuring points which do not correspond to the actualprofile (see Figure).

For the very first time, the MarSurf XC 20 software usesa method based on morphological filtering for recon-structing contour profiles. This enables correct reproduc-tion of the profile even for very sharp edges

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Z

zn

-nz

nx

R

x

V meas (X)

Original profileProfile of mean pointsNumerical differentiationmethodMorphological filtering

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Roughness Measurement


Roughness measurements with large measuringrange

A further field of application is roughness measurement.For this purpose, the probe system features a resolutionof 2 nm. In addition, there is the possibility to activatecontacting forces lower than 1 mN, which is purposefulwhen using 2 µm standard stylus tips. Combined withthe large measuring range of 10 mm, you can determi-ne the roughness of surfaces in contours, such as ballbearing paths, for example. Using the MarSurf XC 20evaluation software, any area in your measured contourcan be selected for roughness evaluation.

Measuring force

The MarSurf LD 120 allows the adjustment of meas-uring forces which can be held over the entire meas-uring range.

Due to practically frictionless support and precisely con-trollable traverse, contacting forces of down to 0.5 mN (standard for stylus instruments 0.7 mN) arepossible. In this way, optimum contacting forces can beapplied for all combinations of styli and surfaces.

Measuring point density

The minimum measuring point spacing is 0.25 µm - ascommon in roughness measurement - which means120,000 data points over a traversing length of 30 mm.

Roughness and Contour Measurement


MarSurf LD 120 makes roughness and contour meas-urement possible with a single stroke!

The same measuring task can be solved under theseconditions as follows:

1. Fixing and positioning of the testpiece: In this case slanted, to reach the measuring locationZenith searchContacting the starting pointSetting the measuring conditions

2. Start and run of the measurement followed by automatic evaluation

Time is money! This is also true for the pre-cision metrology with MarSurf LD 120!

In the daily life of dimensional metrology, you needroughness and contour measurements in order to checkyour testpiece. When working sequentially - meaning first the rough-ness and then the contour measurement - a testpiece ismeasured by a proficient operator in the followingsteps:

Roughness:1. Selection of the roughness measuring station

configuration

2. Fixing and positioning of the testpiece: zenith search / setting the measuring conditions

3. Determining the starting point of the measurement: Always trial measurements in the front limit switch position to avoid exceeding the measuring range

4. Start and run of the measurement

Contour:1. Move stylus out of the testpiece range after

roughness measurement. Selection of the contour measuring station configuration. Reference point run of the drive unit

2. Fixing and positioning of the testpiece: zenith search / contacting the starting point. Setting the measuring conditions. Start and run ofthe measurement

3. Evaluation of the measurement: radius dimensioning

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ConclusionFor a roughness and contour measurement, MarSurfLD 120 saves you 75% of your time and money! Youhave capacities for tasks of higher value and yourcosts are reduced at the same time!

Your quantum leaps are our incentive - just contact us!

Apart from the roughness evaluation in your contour,you can of course also perform your contour evalua-tion with the LD 120, so that with only one measure-ment, you receive all desired results represented in thesame format.

Conventional

Calibration and Probe Compensation

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An optimized calibration and adjustment system ena-bles your measuring tasks to be performed within theindicated accuracy range. For MarSurf LD 120 this isrealized by a strictly separated acquisition of calibra-tion data for all single axes and all geometry parame-ters of the probes.

Main steps are:

1. LD 120 factory calibrationAt Mahr factory calibration data are determined for the complete system, except for probe- dependent parameters. This means that drive and probe axes are calibrated by a laser interferome-ter under climatically stable conditions. Furthermore, the flatness deviation of the x axis guiding - although low due to existing high-pre-cision system - is determined and compensated, as well.

2. Calibration of weighing dataPermanently complying the user-selected measur-ing force ensures essential advantages of cine-matic stableness between stylus tip and testpiece. For each probe weighing tables are calculated in an automatic measuring process.

3. Determination of probe geometryThe probe system is based on an ex factory laser-calibrated angle measurement system. For determination of the stylus tip position in relation to the center of rotation of angle measuring system and x axis, the geometry data of the probe are required, meaning that this data is calibrated for each MarSurf LD 120 probe.

The principleIn an automatic process, a measurement over a roundnessstandard is carried out. Afterwards, the geometry param-eters are adjusted such that the radius evaluation is thesame on both sides of the maximum. The absolute radiusof the standard is irrelevant for this type of procedure.The correct radius evaluation is assured by the traceabilityto the laser-calibrated x axis.

Additionally, form deviations and tip radius can be deter-mined using the roundness standard.

The acquired geometry data are saved individually foreach probe, so that after changing a probe or restartingthe complete system measuring can go on without further calibration.


Weighing procedure

Probe Arm Exchange

Im Prozess MarSurf LD 120

Probe arm change without new calibration

If the probe arm needs to be changed due to specialgeometrical demands or certain contour applications,this is easily done within seconds. The probe arms aremagnetically connected, so that they can easily be takenoff and attached. On their support, they automaticallyslide into the correct position. Since the calibration datais saved for each arm, you can continue to measurepractically at once without having to calibrate.

The magnetic attachment also protects the probe sup-port in case of collisions.

Mahr, with many years of experience in design and pro-duction of probe systems, naturally offers differentprobe arm variants for the MarSurf LD 120 just like forall the other surface and contour measuring systems.The standard probe arms have been optimized for stiff-ness by means of FEM simulations. They are availablewith diamond tips for roughness measurements but alsowith the usual probe balls and probe edges for specialcontour applications. Special solutions ac-cording tocustomer's needs are also possible.

Magnetic connection

Probe arms

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Automatic Two-dimensional Positioning


The traverse axis as well as the probe are both equippedwith a high-precision drive necessary for adjustment ofthe position speeds and probe force which furthermoreenables arbitrary two-dimensional positioning. The driveunit is operated via corresponding "positioning" buttonsin the "measuring station view" or by entering targetpositions.

Positioning speeds are freely selectable which is impor-tant to reach hardly accessible measuring points withcorresponding precaution.

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Segmented Measurement


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Application:

• Obstructed areas, sections which cannot be measured due to potential tip damage.

• Radii with bores

Example: Detail measurement with low measuring speed andhigh positioning speed

Two-dimensional positioning and segmented measurement

Two-dimensional positioning in conjunction with"Segmented Measurement" allows the measuring pro-cess to be divided into different sections. The profile issegmented into measuring and positioning ranges. Foreach segment, different measuring parameters can bedefined.

Segment table with settings for two segments. Roughness evalution

Time saving due to segmented measurement:

Measuring of details with low measuring speed (0.1 to 0.5 mm/s) + quick positioning (4 mm/s) for sec-tions which are NOT measured.

Example: Radii with bore

Example: Measuring object with obstacle (partly not measurable) Example: R1, R2 = 1 mm, a = 53 mm

Without the option of segmented measurement:Traversing length = 56 mm / 0.2 mm/s = 280 s

With segmented measurement:Traversing length 1 = 3 mm/0.2 mm/s = 15 s

+ Positioning distance = 50 mm/4 mm/s = 12.5 s+ Traversing length 2 = 3 mm/0.2 mm/s = 15 s

= 42.5 sTime Saving = 240 s

= 85%^

Automation


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Two-dimensional positioning plus MarSurfXC 20 = Automation

MarSurf XC 20 enables saving and loading of tasksdecribing a measuring procedure:

1. Measuring tasks including automatic position-ing (only possible due to two-dimensional pos. facility of MarSurf LD 120), optional with auto-matic operation of measuring stand ST 750 CNC)

2. Evaluation

3. Individual forms

4. Automatic procedures for printing and saving purposes

These four items can be combined completely or partlyto compose a measuring task.

Result:= Time saving and safe operation (protected processand comparable evaluations)

An automatic measuring procedure in practice:

4. Measuring record printed, data saved

3. Starting of measuring program

1. Clamping of testpiece

2. Zenith adjustment

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The simple, reliable gateway to the XC 20

Password-protected user loginYou can define which operator is to have which rightson the instrument, e.g.

• Administrator• Only start programs via function keys

Application Software MarSurf XC 20 MarSurf LD 120

Application Software MarSurf XC 20

The easy way to fast measurementThe start• All axes of measuring stand, drive unit and pick-up

can be controlled directly• Functions such as start to end point measurement

(with operator prompting via text tips) enable the user to perform correct measurements in interactive mode with practically no setup time

Entering into the XC 20 WorldFor measuring and evaluating contours, the newMarSurf XC 20 software is available. Decades of expe-rience in contour and roughness measurement - fromwhich resulted already the well-known predecessing"Perthometer Concept" system - and numerous wishesand hints from our customers have shaped this newsystem generation. Just in combination with theMarSurf LD 120 drive unit, the new software can fullydemonstrate its strong points: enhanced accuracy dueto morphological filtering, reduced measuring point spa-cing, improved calibration and evaluation routines aswell as versatile, complex evaluation possibilities whichoptimally combine contour and roughness measure-ment.

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MarSurf LD 120 Application Software MarSurf XC 20

The Evaluation

Logically structured icons speak all languages andneed no translation!

Use of the Quick & Easy function:Setting up and saving an automatic program run withoutprogramming knowledge, "learning by doing".

Plausibility check for automatic programruns

Operating sequence list with programoptimization• Jumps, loops • Interactive user intervention in the case of

automatic evaluation

Additionally, formerPerthometerConcept users canselect display of thefamiliar PerthometerConcept icons!

Category icons

Application MarSurf XC 20 MarSurf LD 120

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Sections• Details can be shown separately

By creating sections, individual results groups canbe made error-free.

Angles

Radii

Examples:

The Evaluation

Distances

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The Evaluation

Nominal / actual comparison

Up to five evaluation ranges can be selectedIn many cases, profile comparisons are also performedwith testpieces that are subject to heavy wear. The abili-ty to select certain evaluation ranges offers the distinctadvantage of being able to determine the fit-in rangesthat are not subject to wear or deformation. This canbe useful for optimum profile matching.

Methods for performing fit-in

• Minimum line form deviation• Least squares (Best Fit)

Generating the nominal profile

• Using master profile measurement, • DXF import or • Entering nominal geometries

Tolerances zones can be selected in any areas in thenominal profile (XC 20 only)

Nominal profile with tolerances zones

Nominal profile with tolerances zones fitted in

Example: Fit-in by selecting ranges

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The Evaluation

Graphic display of the results(enlarged deviation display)

Bar chart display

Zoom, maximum 25 steps

• Display with non-proportional zoom• Zoom area can be moved in the overview field• Zoom area can be anchored to the profile

Contour displayWith roughness evaluation

Associative elementsChanging reference contours immediately results in achange in the measured value, e.g. increasing or reduc-ing a radius segment using the mouse directly changesthe dependent variables such as radius, line form devia-tion, distances to the coordinate system, etc.

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MarSurf XC 20. Online Help

When performing a programmed, automatic measuringrun, it is important for subsequent measurements thatthe evaluation created earlier is adapted accordingly.MarSurf XC 20 guarantees correct evaluation even if thetestpiece is moved in x- and z-direction and for inclina-tions in x/z of up to 15°.

Do you have any questions? If so, click

• Detailed operating instructions in the system, complete with sample applications

• Help mode (context-sensitive help)

Example:Measuring station view Help clickHelp text for measuring station view is displayed

Info boxWhen selecting an evaluation function, a short tip auto-matically appears for the action in question.

• You save time, since you significantly reduce your setup time.

• The time required for the evaluation drops to virtually zero.

• You can be sure that your results will be correct.

• Guaranteed reproducibility, no erroneous results.

Automatic Coordinate System

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Many Reasons for the new Generation of Surface Measurement Devices


You are assured fast measuring results and save valuable time that you can devote to other tasks

• Self-explanatory user interface supported by graphic elements

• Easy programming in Teach-in mode, "learning by doing"

• Permanent online help in every programming step• Fast measurement thanks to start/end point function

You can be sure that your measuring results will be correct

• Excellent calibration procedure thanks to many years of experience, i.e. including geometry calibration, measuring force calibration, compensation of the deflection, etc.

• Stability and rigidity of the pick-ups• The drive units are very smooth in operation and are

highly stable and accurate• The MarSurf ST 500 / ST 750 measuring stand

ensures optimum measuring conditions• Plausibility tips ensure that the correct measuring

strategy with the specified framework conditions is maintained.

• User access rights using password protection rules out the possibility of incorrect operator input.

When you use MarSurf XC 20, you're among the best, since you're using the best possible Mahr contour metrology

• Measurement using the "twin stylus" for the upper and lower contours

• Creation of profile sections, evaluation of different parameters per section

• Associative elements. Immediate changes to the parameters as a function of reference elements when changes are made

• Rapid measurement since setup times are avoided through start/stop function

• Automatic measurement in Q & E (Quick and Easy) mode. Rapid, simple programming in Teach-in mode

• When conducting series of measurements or repeat measurements, the coordinate system required for evaluation is created automatically at the correct position, even if the testpiece is moved in x and z directions and the inclination of X to Z is tilted by up to 15°.

• XC 20 measuring stations can be upgraded to the XCR 20 version, i.e. they can also be used as combined measuring stations for contour and roughness

• All Perthometer Concept users can import measure-ments of nominal contours and profiles in MarSurf XC 20

• The user interface layout can also be changed over to the Perthometer Concept icons

Practical Examples

MarSurf LD 120 Practice

Simultaneous measuring and evaluation of contour androughness in tracks of ball bearings.

Geometric characteristics and friction performance havealways been the most decisive quality attributes in thebearing industry. The contour evaluation of the trackincluding roughness and gothic profiles predestine use ofMarSurf LD 120 in that case.

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Compact measuring station

Compact measuring station with bearing

Evaluation of a bearing

Practical Examples

Practice MarSurf LD 120

Precision dual pistons and their micro teeth structurecan be extremely critical due to potential leakage risks.MarSurf LD 120 samples named structure at a very highdegree of accuracy and provides the basis for a clear andunique testpiece evaluation.

Costs are reduced due to the the reduced measuringtime, which already includes roughness evaluation.

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Measuring station for a dual piston

Detail view of a dual piston

Evaluation of a dual piston

Practical Examples


28

Synchronizing rings:Synchronizing rings for control gears make highdemands on dimensional metrology. The tracing of theroof slant's contour including roughness parameterssustainably defines functionality with regards to gearchanging forces, improvement of wear behaviour andreduced noise level. The synergies of MarSurf LD 120 -high accuracy contour and surface texture measure-ment - are to the best advantage of this system.

Valve tappets:Longevity and lowest possible fuel consumption arenowadays taken for granted in the field of motor engi-neering, but still represent a highly technical challenge. Toensure the adequate parameters from quality's point ofview, the simultaneous acquisition of contour and surfaceis required: an excellent precondition for MarSurf LD 120.

Evaluation of a synchronizing ringMeasurement on synchronizing ring

Evaluation of a valve tappetMeasurement on a valve tappet

Practical Examples


29

Measurement on a pin roller

Measurement on a halogen lamp reflector

Measurement on a ball pivot

Practical Examples


30

Artificial hip socket, ceramics Evaluation of an artificial hip socket

Artificial hip ball, ceramics Evaluation of an artificial hip ball

Artificial hip joints must bear approximately 20 millionload changes under double or triple weight. The wearbetween ball and socket of around 1 µm per year givesinformation about the level of accuracy and quality whichmust be defined for contour and roughness of bothparts.

Practical Examples


31

Artificial hip balls, bears and eye lenses:There are three main aspects for implants in medical tech-nology: good compatibility for the human body, longevityand highest precision. To ensure these material character-istics MarSurf LD 120 enables high-precision measurementin the nanometer range so that everything really fits: fora lifetime!

Evaluation of an artificial hip joint implant

Measurement on an optical glass

Eye lense implant

Evaluation of an optical glass

Artificial hip joint implant

Scope of Delivery

MarSurf LD 120 Annex

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MarSurf LD 120 Compact Measuring Station MarSurf LD 120 drive unit with integrated tracingsystem

• Traversing lengths: up to 120 mm• Vertical measuring range: 10 mm• Resolution in z-direction: 2 nm• Probe LD A14-10-2, with diamond tip 2 µm, 90°• Operating Manual

MarSurf LD 120 with XC 20 evaluation computer • Measuring and evaluation license MarSurf XC 20• Integrated Mahr data acquisition board (PCI)• Operating Manual and Online Help• Operating system licence for Microsoft Windows,

incl. operating manual and installation CD

MarSurf LD 120 roundness standard• High-precision measuring sphere to check the meas-

uring spindle accuracy, diameter approx. 50 mm• Roundness deviation 0.04 µm with Mahr certificate

MarSurf LD 120 compact measuring stand• Measuring stand to fix drive unit LD 120 • Base plate (25 mm drilling template and M6 thread)

included

MarSurf LD 120 XY-table• Testpiece positioning table, appropriate for

mounting fixing elements with M6 thread• Positioning range in z: 12.5 mm• Positioning range in y: 25 mm• Angle adjustment range in xy layer: ± 2.5°• Inclination adjustment in y or x layer: -4° up to +7°

MarSurf LD 120 granite plate 650 mm x 450 mm• For mounting the MarSurf LD 120 compact

measuring stand• Incl. pneumatic damping elements, 4 items

15" TFT flat screen monitor

Printer • Incl. connection cable printer to computer

Scope of Delivery

Annex MarSurf LD 120

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MarSurf LD 120 with Measuring Stand MarSurf LD 120 drive unit with integrated tracingsystem

• Traversing lengths: up to 120 mm• Vertical measuring range: 10 mm• Resolution in z-direction: 2 nm• Probe LD A14-10-2, with diamond tip 2 µm, 90°• Operating Manual

MarSurf LD 120 with XC 20 evaluation computer • Measuring and evaluation license MarSurf XC 20• Integrated Mahr data acquisition board (PCI)• Operating Manual and Online Help• Operating system licence for Microsoft

Windows, incl. operating manual and installation CD

MarSurf LD 120 roundness standard• High-precision measuring sphere to check the meas-

uring spindle accuracy, diameter approx. 50 mm• Roundness deviation 0.04 µm with Mahr certificate

MarSurf ST 500 measuring stand• Measuring stand to fix MarSurf LD 120 drive unit,

with granite platte 700 mm x 550 mm • Including pneumatic damping elements, 4 items

MarSurf LD 120 XY-table• Testpiece positioning table

15" TFT flat screen monitor

Printer • Incl. connection cable printer to computer

Required with each supply:

Commissioning of MarSurf LD 1201.5 working days on site by Mahr ServiceCenter, including:

• Mounting and connecting of delivered measuring station components

• Function test of system using probe LD A14-10-2 included in the MarSurf LD 120 set

• System configuration by means of MarSurf LD 120 measuring standard including inspection sheet (calibration certificates can be ordered separately)

• Short introduction (2 hours) to basic operation of measuring system MarSurf LD 120; assumed existing MS Windows knowledge

Required with first supply:

Basic training for MarSurf LD 1201.5 working days by Mahr ServiceCenter

• Introduction to MarSurf LD 120 operation and handling

• Roughness measurements with MarSurf LD 120 and standard probe LD A14-10-2

• Evaluation of roughness measurements and creation of forms and records

• Creation of task folders and measurement tasks

• Contour measurements with MarSurf LD 120 and standard probe LD A14-10-2

• Manual evaluation of contour measurement

• Creation of an automatic contour evaluation program on the basis of a standard example

• File saving and documentation of measuring results

• Checking and calibration of measuring station using standard probe LD A14-10-2

Services

MarSurf LD 120 Annex

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Optional Services (upon request, dending on complexity and expenditure of time)

Application training I for MarSurf LD 120 (at Mahr or at the customer’s premises) (basic training required)

It is recommended to send corresponding testpiece(s) and description of measuring tasks to Mahr Göttingen at least10 working days in advance.

• Testing facilities of measuring station and calibration of probes

• Roughness measurement with LD 120 on customer’s testpieces including explanations concerning evaluation facilities

• Contour measurement with LD 120 on customer’s testpieces including explanations concerning evaluation facilities

• Introduction to creation of measuring programs for automatically solving customer-specific measuring tasks

• Treatment of customer’s requirements and tasks

Application training II for MarSurf LD 120 (Basic training required)Contents, duration and location as well as functionality of measuring programs are coordinated with the customerand charged accordingly. The below mentioned items shall be considered as an example for a training guideline.

• Roughness measurements with MarSurf LD 120 on customer-specific testpieces including explanations concerning evaluation facilities

• Evaluation facilities by means of program package "profile analysis" (when ordering)

• Contour measurement with MarSurf LD 120 on customer’s testpieces including explanations on evaluation facilities

• Multiple measurements on contour

• Introduction in creation of measuring programs

• Creation of measuring programs for customer-specific measuring tasks

• Explanations of issued measuring programs

• Treatment of customer-specific requirements and tasks

• Calibration of further probes

Calibration of MarSurf LD 120• with Mahr calibration certificate, traceable to standards

Reproducibility of measuring results• according to separate agreement

Services

Annex MarSurf LD 120

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MarSurf LD 120 Accessories

Probes

MarSurf LD 120 probe LD A14-10-2

included in LD 120 standard kit

stylus tip 2 µm, 90°, L = 10 mm

dimensions acc. to drawing

OT5005-0212.000A04

MarSurf LD 120 probe LD A14-10-2/60°

OT5005-0214.000A04

MarSurf LD 120 probe LD A14-10-500

stylus tip ruby ball R = 500 µm, L = 10 mm

dimensions acc. to drawing

OT5005-0212.000A04

MarSurf LD 120 probe LD B4-10-2/90°

stylus tip 2 µm, 90°, L = 1.0 mm

dimensions acc. to drawing:

OT5005-0311.000A03

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LD C 25-20-500

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