Mark L. Schattenburg- From nanometers to gigaparsecs: the role of nanostructures in unraveling the...

8/3/2019 Mark L. Schattenburg- From nanometers to gigaparsecs: the role of nanostructures in unraveling the mysteries of the cosmos

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S p a c e N a n o t e c h n o l o g y L a b o r a t o r y

M a s s a c h u s e t t s I n s t i t u t e o f T e c h n o l o g yS N LS N L

From nanometers to gigaparsecs:*

the role of nanostructures in unraveling

the mysteries of the cosmos.

Mark L. Schattenburg

Space Nanotechnology Laboratory

Center for Space Research

and

NanoStructures Laboratory

Research Laboratory of Electronics

Massachusetts Institute of Technology

77 Massachusetts Avenue, Cambridge, MA 02139

Plenary Talk

45th International Conference on Electron, Ion and Photon Beam

Technology and NanofabricationWashington, D.C., May 30, 2001

*1 gigaparsec = 1034 nanometers


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MLS-2001-05-25.03.eps

1 arc-second

1parse

c=3.3

lighty

ears=

3.1x101

6

me

ters

Definition of the Parsec

("parallax second")

Earth

Sun

star

Nearest star ~1 parsecSize Milky Way galaxy ~1 kilo-parsecNearby galaxies ~1 mega-parsecSize of known universe ~1 giga-parsec


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Huge jets many times longer than our galaxy.

Exhaust from the supermassive black hole.

Supernova Remnant

Supernovae can emit more energy than

the combined output of all the billions of stars in our galaxy.

Supermassive Black Hole

Our Bizarre Universe

The centers of galaxies harbor black holes that can have

more mass than all the stars of our galaxy combined.

Galactic Jet

Huge jets many times longer than our galaxyare the exhaust from supermassive black holes.

Bizarre-Universe.eps

Cosmic vacuum cleaner.

Star Being Eaten by Black Hole


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What powers the enormous relativistic jets shooting from quasars?(Massive black holes are suspected.)

It appears that only 10% of the mass of the Universe is visible.What is the nature of the mysterious missing matter?

How did the Universe get here and what is its ultimate fate?

Unsolved Mysteries of the Universe.

NGC 3606Crab Nebula Pulsar

Quasar PKS 0637-752

3 gigaparsec distant.

Unsolved-Mysteries.eps

Our Galactic Center

Massive black hole?

Neutron star spinning at 33 Hz. Star birth region.

HCG 62

Cluster of galaxies.

Neutron Star


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MOTIVATION

Goal: higher performance astrophysics instrumentation.

High launch costs place premium on high performance at lowest possible mass.

Many useful phenomena occur when size and accuracy of features are comparable towavelength of light.

Our lab has developed a variety of novel nanostructure technologies that have beenapplied to nine space missions.

Two missions are described:Chandra Observatory x-ray telescope.

IMAGE neutral atom camera.

Will show new microtechnology that we believe may lead to diffraction-limited x-raytelescopes.


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SubrahmanyanChandrasekhar

(1910-1995)

NASA Chandra ObservatoryX-ray Telescope

MLS-01-03-14.02

Nobel Prize, 1983

Performs high-resolution x-ray imaging and spectroscopy in the

energy range of 0.1-10 keV (wavelengths from 0.1 to 10 nanometers).


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Principles of X-ray Optics at Grazing Incidence

Refractive index for x-ray radiation:

Critical angle for total external reflection of x-rays:

,)()(1)( += wherein

2=c

c

Critic

alRay

Totally

Reflected

Rays

Grazing Incidence Radiation and

Total External Reflection

in +=1

0.5 1 1.5 2 2.5 3

0.2

0.4

0.6

0.8

1

Reflec

tivity

c /

A

B

C

D E

3/:

1/:

10/:

10/:

0/:

1

2

=

=

=

=

=

E

D

C

B

A

cc_

GrazingIncidence.ai

10-4

~10-2


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Nested

HyperboloidsNested

Paraboloids

Doubly-

Reflected

X-rays

X-rays

10 Meters

1.1 Meter Diameter

FocalPlane

MLS-2001-05-23.01.eps

Chandra ObservatoryGrazing Incidence Optics(Wolter Type I)


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ChandraX-ray Telescope Mirror Assembly

Chand

ra-Mirror.eps

Raytheon Optical Systems & Eastman Kodak Corp.


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NASA Chandra ObservatoryX-ray Telescope

High Energy Transmission Grating Spectrometer (HETGS)

HETG

S

HETGS Instrument

SunshadeDoor

High ResolutionMirror Assembly(HRMA) Thrusters (4)

(105 lb)Low GainAntenna (2)

Aspect CameraStray Light Shade

SpacecraftModule

OpticalBench

Integrated ScienceInstrument Module(ISIM)

High ResolutionCamera (HRC)

CCD ImagingSpectrometer(ACIS)

TransmissionGratings (2)

Solar Array (2)

ChandraTelescopeGrating(stowed)

X-ray CCDDetector array

Zero-order beamsDiffracted beams

CCD1 CCD6CCD5CCD4CCD3CCD2

Grating(in use)

X-rays

X-raymirrors

P H

Rowland Torus Transmission Grating Geometry and CCD Readout Array


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NASA Chandra X-ray Observatory

High Energy Transmission Grating Spectrometer (HETGS)

1.1 meter

100 nm

550 nm

MLS-2001-05-11.01eps

HETGS instrument.Invar grating frame.

Scanning electron micrograph of gold grating.

3 cm


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100 nm

0.6 m

1.0 m polyimide

goldgrating

polyimidemembrane

Invarframe

adhesive

5 nm Chrome

20 nm Gold

MLS-2001-05-24.01.eps

i

bar

- space

~

x rays

Pi-Phase-Shifting Transmission Grating Design

gold

bars

Transmission Grating DesignBars shift phase x-rays by ~

zero order ~0first order maximized


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Chandra ObservatoryX-ray Spectrum of Binary Star Capella

0.5

X-ray Wavelength (nanometers)

Coun

ts/Bin

100

50

0

2.01.51.0

/=1000

Capella-2.eps

Raw x-ray spectra.


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Chandra X-ray Spectrum

Small Magellanic Cloud Supernova Remant E0102-72

Direct X-ray Image (CCD Camera)

X-ray Image Dispersed by Transmission Gratings

longer wavelengths shorter wavelengths

E0102

-72.eps

l

Zero

Order


16/36

Interference Lithography

variableattenuator

beamsplitter

laser beam = 351.1 nm

Pockels cell

mirror

beamsplitter

mirror

substrate

MLS-99-0

5-26.03

2

p= 2 sin

spatial filters

phase errorsensor


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0.5-1.0 mpolyimi e

silicon wafer

0.5-1.0 ARC

5 nm chromium20 nm gold

200 nmresist

(a) Prepare substrate.

silicon

(b) Pattern gold grating.

Invarframe

(c) Acid spin-etch waferbackside.

(d) Bond to Invar frame.

(e) Cut away.

MLS-94-

05-13.01

goldgrating

polyimide

15 nmTa2O5

silicon

adhesive

Membrane-Supported Transmission GratingFabrication Process - Macro View


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MLS-94-05

-13.02

(b) Pattern by ILand develop.

silicon

polyimide

(c) Etch interlayer inCF4 RIE plasma.

silicon

polyimide

ARC

(e) Gold electroplate.

plated gold

polyimide

silicon

Membrane-Supported Transmission Grating

Fabrication Process - Micro View

(f) Strip interlayerand ARC.

silicon

polyimide

silicon

polyimide

(d) Etch ARC in O2RIE plasma.

silicon

polyimide

ARC

resist

(a) Preparesubstrate.

platingbase

inter-

layer

(g) Acid spin-etchsubstrate.Align and bondto frames.

polyimide

epoxy

Invar

ARC

platedgold


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Medium EnergyNeutral Atom Detector (MENA)

NASA Imager for Magnetopause-to-AuroraGlobal Exploration Mission (IMAGE)

IMAGE.ep

s


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Earths Space Environment: The Magnetosphere

Magnetosphere-2.eps

Space Weather


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Charge Exchange

A magnetically trapped ion captures

an electron from a neutral

hydrogen atom...

TRAPPED

FREE

...creating an energetic neutral atom

(ENA) that is no longer trapped.

Charge-E

xchange-2


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MENA Neutral Atom Camera

Measurement Concept

ME

NA-Concept-2.eps

Collimator HWHM:

55 imaging plane

2 spin plane

AcceleratingGrid

START Electrons

Position

SensiveAnode

UV

Nanofilters

START Foil

2.6 nm Carbon

GroundGrid

Prim

aryMEN

A

STOP

tan() =X2 - X1

L

tan() =cos()

L

X2X

1

D2D1

Ioniz

edAto

m

MCP Stack

START Position (D1)

+

STOP Position (D2)

Time of Flight

+ Species

Pulse Height

Time of Flight

+ Energy

Species

Polar

Angle

Nanofilter UV Blocking Transmission Gratings


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UV+Atoms

Atoms

Detector

NanofilterGrating

Nanofilter UV-Blocking Transmission Gratings

Filter.eps

45 nm

10-1

10-9

10-7

10-5

10-3

Thickness (nm)

UVTransmissionCoeffic

ient

30 nm gap width40 nm gap width

50 nm gap width60 nm gap width

0 100 200 300 400 500 600 700 800

=121.6 nm(Hydrogen Lyman Alpha)

Electron micrograph of lines before electroplating.Electron micrograph of gold nanofilter.

45 nm

ARC

Resist

PB

IL

Mesh-Supported Grating Fabrication Process


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silicon

ARCresist

SiN

MLS-9

8-05-0

plating

base

(Cr/Au)

silicon

SiN

gold grating

plated nickel

gold and nickel gratings

SiNSilicon(e1) Spin resist and UV expose.

(e2) Plate nickel and strip resist.

(f) Mounting

metal frame

adhesive

(g) Backside Etch

resist exposed resist

UV

patterned resist

silicon

ARC

SiN SiN

silicon

SiN

plated gold

Mesh-Supported Grating Fabrication Process

plated nickel

Interlayer(Ta2O5)

(a) Wafer Preparation

(b1) Pattern resist. (b2) Etch and plate. (b3) Strip resist.(c) Pattern Support Grid

(e) Plug Pinholes

(b) Grating Patterning

(d) Wafer Etch


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Support Grating(nickel)

Nanofilter Grating

(gold)

155 nm line

45 nm space

UV Nanofilter Grating Support Mesh Design

Triangular

Support Mesh

(nickel)

MLS-2001-05-25.04.eps

4.0 m 346.4 m 10 mm

Completed

Flight Grating

(Stainless Steel Frame)


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Pinhole Plugging Results

MLS-01-03-14.01.eps

200 m m

Pinholes Before Plugging

200 m m

Pinholes After Plugging

4x 4x


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IMAGE Medium Energy Neutral Atom Camera (MENA)

Magnetospheric Storm Observations(August 12, 2000)

Sun Sun

Shadow Shadow

9:30 UT 22:00 UT

MLS-20

01-05-11-02.eps Frames from an oxygen atom "movie."

(Elapsed time between frames is 12.5 hours.)


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X-rays

X-rays

Doubly

Reflected

X-rays

Nested

Paraboloidal

Foils

Nested

Hyperboloidal

Foils

Wolter Type I Design

Two Popular Foil X-ray Telescope Designs

X-rays

Crossed 1-D Curved Mirror Foils

Kirkpatrick-Baez Design

Resolution is critically dependant on the precise

shaping and assembly of the reflective surfaces.

MLS-2

001-05-25.05

Focus

Focus

X F il O ti f Hi h Th h t X T l


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X-ray Foil Optics On-board the USA/Japan ASTRO-ESatellite

Traditional foil optics assembly techniques yield

resolution only on the arcminute level.

cc_

ASTROE.eps

X-ray Foil Optics for High Throughput X-ray Telescopes


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500 m m500 m m

Spring Comb Reference Comb

Microstructures for High-Resolution X-ray Foil Optic Assembly

MLS-2001-05-28.01.eps

Silicon micromachined combs.

500 m m

Stainess-steel wire-EDM combs.

Very low accuracy (> 20 microns).

Poor optic resolution (>1 arcminute telescope).

Very high accuracy (


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Two Types of Silicon Micro-Combs

(a) Reference combs are designed to accommodate the mirror foilswith ease and make highly accurate single-point contacts with the foils.

(b) Spring combs have flexible springs that impart minute forcesto the foils to properly shape and position them.

Units: mm Spacing tolerances


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Micro-combs as Tools for Assembling

Diffraction-Limited X-ray Foil Optics

200 mm

100 mm

200 mm

100 mm

x-rays

parabolic hyperbolic

Module for Kirkpatrick-Baez x-ray telescope.(Another module is needed to focus cross axis.)

Diffraction-limited optics at =1 nm demands ~10 nm assembly accuracy.

cc_

Comb

Purpose-2.eps

Force

Motion

Glass

Microsheet

Spring

Comb

Reference

Comb

~200 m

Assembly concept.


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100 mmsilicon wafer

microcombs etched through

entire wafer

a) Grow thermal oxide.

b) Photolithography.

c) Reactive ion etch oxide.

d) Attach quartz handle-wafer.

e) Deep reactive ion etch silicon.

f) Extract finished micro-combs.

Micro-comb Fabrication Process Overview

Silicon Wafer Oxide Resist Quartz

MLS-20

01-05-28.02.eps

Silicon Wafer

NASA Constellation X Mission Concept


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NASA Constellation-XMission Concept

Con-X-Concept


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ACKNOWLEDGEMENTSSpace Nanotechnology Laboratory Staff

James M. Carter, Research Specialist, RLE

Robert C. Fleming, Lab Manager, CSR

Dr. Ralf K. Heilmann, Research Scientist, CSR

Dr. Michael McGuirk, Research Scientist, CSR

Ed Murphy, Project Technician, CSR

Dr. G.S. Pati, Postdoctoral Associate, CSR

Students

Nat Butler, Research Assistant, PhysicsCarl G. Chen, Research Assistant, Electrical Engineering

Paul T. Konkola, Research Assistant, Mechanical Engineering

Olivier Mongrard, Research Assistant, Aero. & Astro. Engineering

Glen Monnelly, Research Assistant, Physics

Significant assistance of Prof. Henry I. Smith and the NanoStructures Laboratory.

Research sponsored by NASA and DARPA/ARO.

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